JP2010027292A - Static eliminator equipped with electrode needle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static eliminator equipped with a mechanism, capable of readily regulating a tip position of each electrode needle, and capable of readily changing the number of electrode needles. <P>SOLUTION: An electrode needle assembly 4a has a base member 43 arranged fixedly in an outer periphery of a fan 3, a holding member 44 arranged inside the base member 43 and constituted to hold the electrode needles 41, 42, and a fixing member 45 for fixing the holding member 44 pushed against the base member 43. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a blower type static eliminator provided with an electrode needle.

  Various types of so-called blown static eliminators have been developed that generate positive and negative ions simultaneously by corona discharge and transport the generated ions toward the object together with the air blown by the fan to neutralize the static electricity charged. Yes. Such blower type static eliminators are used for the purpose of preventing the destruction of components and the like due to the discharge of static electricity charged in the components and the like in the assembly process of semiconductor components and electronic devices. This type of static eliminator has electrode needles (discharge needles) for generating ions by corona discharge. For example, in Patent Document 1 that discloses a DC static eliminator, “the electrode needles 5 are fixed to the electrode holders 1 so that the tips of the discharge needles 5 are directed toward the ring center of the electrode holders 1, and the base ends of the electrode needles 5 are disclosed. Is slightly protruding at the center of the circular recess 6 provided on the outer peripheral surface of the electrode holder 1.

  Further, Patent Document 2 that discloses a static eliminator describes that “the static elimination electrodes 11 and 12 are inserted into the electrode mounting holes 10 of the fan case 5”, and further, as shown in FIG. 13 and the electrode needle 16 is implanted in the insulator 15 having the connection hole 14 ”.

JP 2001-110590 A Japanese Patent Publication No. 6-56797

  In the conventional static eliminator, the electrode needles are fixed to the housing. Therefore, in order to adjust the position of the tip of each electrode needle, it is troublesome to remove the electrode needle once. In recent years, a static eliminator that can increase or decrease the amount of ions generated is desired. For this purpose, it is effective to change the voltage applied to the electrode needles or to change the number of electrode needles. However, when the voltage is increased, dirt or the like easily adheres to the tip of the electrode needle. On the other hand, it is very troublesome to increase or decrease the number of electrode needles with a conventional static eliminator.

  Therefore, the present invention provides a static eliminator provided with a mechanism that can easily change the number of electrode needles and adjust the tip position of the electrode needles.

  In order to achieve the above object, according to an aspect of the present invention, an electrode needle assembly including a housing and at least one electrode needle for generating ions by corona discharge, and disposed in the housing; An air blower for generating an air flow for carrying ions generated by the electrode needle; and a power source for applying a voltage to the at least one electrode needle. The electrode needle assembly includes at least one electrode needle. An electrode needle insertion hole through which the at least one electrode needle can be inserted, a base portion made of an insulating material fixedly disposed on the housing, and provided in the base portion and electrically connected to the power source And a holding portion that holds each of the electrode needles inserted into the electrode needle insertion hole of the base member so that the tip of each of the at least one electrode needle is positioned at a predetermined position. It is provided.

  According to the present invention, the tip position of each electrode needle of the static eliminator can be easily adjusted, and the number of electrode needles can be easily changed.

  FIG. 1 is a top view showing a first embodiment of a static eliminator according to the present invention. In the present embodiment, the present invention will be described using a DC type static eliminator as an example. The static eliminator 1 includes a housing 2, an air blowing unit or fan 3 disposed inside the housing 2, electrode needle assemblies 4 a to 4 d for generating ions by corona discharge, and electrode needle assemblies 4 a to 4 d. And high voltage power supplies 5a and 5b for transmitting a high voltage. Each of the electrode needle assemblies 4a to 4d includes two electrode needles 41a and 42a, 41b and 42b, 41c and 42c, and 41d and 42d arranged in parallel. In the illustrated example, each electrode needle assembly has two electrode needles, but it is of course possible to have a configuration in which each electrode needle assembly has one or three or more electrode needles.

  The static eliminator 1 further includes a counter electrode (not shown) that generates corona discharge between the electrode needle assemblies 4a to 4d. A pair of electrode needle assemblies (electrode needle assemblies 4a and 4c and 4b and 4d in the illustrated example) are arranged at positions facing each other, and one pair of electrode needle assemblies (4a and 4c) has a positive high voltage. The other pair of electrode needle assemblies (4b and 4d) is electrically connected to a negative high voltage power supply 5b. Corona discharge is generated between the electrode needle and the counter electrode by the voltage applied from these high voltage power supplies. The counter electrode is grounded via the housing 2. Air ions are generated by the corona discharge, and the generated air ions are transported along with the air flow generated by the fan 3 toward an object (not shown) to be neutralized.

  The static eliminator 1 may further include a cleaning mechanism 6 that cleans each electrode needle. The cleaning mechanism 6 includes a rotating member 61 configured to be rotatable coaxially with the rotation axis of the fan 3, a plurality of (four in the illustrated example) rods 62a to 62d radially attached to the rotating member 61, And cleaning portions 63a to 63d attached to the tip of the rod. Each cleaning unit is configured to be able to contact the corresponding electrode needle in one direction or both directions by the rotation of the rotating member 61, thereby cleaning the corresponding electrode needle. As the cleaning unit, a brush or a polishing film can be used, and a suitable polishing film includes a “wrapping film sheet” commercially available from Sumitomo 3M Limited.

  The rotation member 61 of the cleaning mechanism 6 is driven by an actuator 64, and an electromagnetic solenoid is used as the actuator 64 in the illustrated embodiment. As an actuator other than the electromagnetic solenoid, a hydraulic actuator or an actuator having a shape memory alloy and using Joule heat generated by an input current can be used. In the illustrated embodiment, the electromagnetic solenoid 64 is controlled by an electrical signal from a control circuit (not shown). Moreover, you may use other well-known means, such as a stepping motor, as a drive source.

  In the illustrated example, the actuator, that is, the electromagnetic solenoid 64 is disposed on the side of the fan 3 with respect to the peripheral portion of the fan 3, that is, the blowing direction. The power of the electromagnetic solenoid 64 is transmitted to the rotating member 61 by the connecting means 65. As the connecting means 65, a known belt, chain, wire, crank mechanism or the like can be used. Use of a flat belt or wire having a simple structure is advantageous from the viewpoint of manufacturing cost and weight reduction of the static eliminator. Further, since each cleaning unit does not require high positioning accuracy with respect to each electrode needle, there is no particular problem even with a flat belt or a wire that may cause a slight slip.

  The detailed structure of each electrode needle assembly will now be described along with some preferred embodiments. Although the following description will be given with respect to the electrode needle assembly 4a, the other electrode needle assemblies 4b to 4d may have the same configuration as the electrode needle assembly 4a.

  2A and 2B show a first embodiment of the electrode needle assembly 4a. As shown in FIG. 1 and FIG. 1, the electrode needle assembly 4 a is disposed in the base member 43 and an electrode needle base portion, that is, a base member 43, which is fixed on the outer periphery of the fan 3 on the housing 2. A holding portion for electrode needles configured to hold the electrode needles 41 and 42, for example, a holding member 44, and a fixing member 45 for fixing the holding member 44 to the base member 43. The fixing member 45 cooperates to constitute a holding portion for the electrode needle.

  The base member 43 is made of an insulating material such as ABS resin or PP resin, and has electrode needle insertion holes 431 and 432 through which the electrode needles 41 and 42 can be inserted, and a holding member 44 that can be inserted. A member insertion hole 433 is provided on the end face. The holding member insertion hole 433 extends in a direction different from the electrode needle insertion hole (vertical in the illustrated example), and each electrode needle insertion hole and the holding member insertion hole communicate with each other inside the base member 43. On the other hand, the holding member 44 is made of a conductive material such as metal, and has electrode needle receiving holes 441 and 442 that can receive the electrode needles 41 and 42 when disposed in the base member 43. One end of the electric wire 46 is connected to the holding member 44, and the other end of the electric wire 46 is connected to the above-described high voltage power source 5a. Therefore, the voltage from the high voltage power source 5 a can be applied to each electrode needle through the holding member 44. The number of electrode needle insertion holes of the base member and the number of electrode needle receiving holes of the holding member can be appropriately changed (for example, 3 or more for each), and the number of electrode needles attached to the electrode needle assembly can be freely set with the number as the upper limit. You will be able to choose.

  The fixing member 45 is, for example, a fixing screw, and the fixing screw holds the electrode needle through a screw insertion hole 434 formed in the upper portion of the base member 43 and communicating with the holding member insertion hole 433 in the base member. The holding member 44 can be pressed against the inner surface of the base member 43. Here, as shown in FIG. 3A, the holding member insertion hole 433 has an ellipse having a major axis in the vertical direction (insertion direction of the fixing screw 45) or a track shape extended in this direction. That is, the size of the holding member insertion hole 433 is configured to be larger than the size of the holding member 44 in a direction orthogonal to the direction in which the electrode needle extends. On the other hand, each electrode needle penetrates the base member 43. According to such a configuration, the plurality of electrode needles can be collectively fixed to the base member by pressing the holding member 44 that has received the electrode needles 41 and 42 against the base member 43. The size and position of the holding member insertion hole 433 are such that when the holding member 44 is pressed down to the lowest part of the holding member insertion hole 433, the electrode needles 41 and 42 are connected to the inner surface of the electrode needle insertion hole 433 and the electrode needle of the holding member 44. The electrode needles are set so as to be in contact with the inner surfaces of the receiving holes 441 and 442. Conversely, if the fixing screw 45 is loosened as shown in FIG. 3B, the longitudinal position of the tip of each electrode needle (only the electrode needle 41 is shown) can be adjusted simultaneously and individually. In addition, by setting the number of electrode needle insertion holes of the base member and the number of electrode needle receiving holes of the holding member to a plurality, the number of electrode needles to be used can be easily increased or decreased with the number as the upper limit.

  In the example of FIG. 3, the electrode needle penetrates the base member 43 in the longitudinal direction, but the electrode needle end portion remains in the wall portion 435 (see FIG. 3A) on the electrode needle end side of the base member. It is good also as a structure. The fixing screw may be made of any material, but is preferably made of an insulating material such as ceramic or resin.

  The holding member 44 is not limited to a cylindrical shape as illustrated, and may have a prismatic shape, for example. Further, if the electrode needle insertion hole of the base member and the electrode needle receiving hole of the holding member are formed as long holes extending in the lateral direction, it is not necessary to form a plurality according to the number of electrode needles to be used.

  4A and 4B show an electrode needle assembly 1004a according to the second embodiment. The main difference between the second embodiment and the first embodiment is that a leaf spring is used as the holding member. The electrode needle assembly 1004a is disposed on the housing 2 and fixed to the outer periphery of the fan 3, and is fixed to the outer periphery of the fan 3. The electrode needle assembly 1004a is disposed in the base member 1043 and holds the electrode needles 1041 and 1042. An electrode needle holding portion configured to be capable, for example, a holding member 1044 and a fixing member 1045 for fixing the holding member 1044 to the base member 1043. The holding member 1044 and the fixing member 1045 cooperate to form an electrode needle. The holding part for the construction is configured.

  The base member 1043 is made of an insulating material such as ABS resin or PP resin, and electrode needle insertion holes 1431 and 1432 into which the electrode needles 1041 and 1042 can be inserted, respectively, and a holding member insertion hole 1433 into which the holding member 1044 can be inserted. Have The holding member insertion hole 1433 extends in a direction different from the electrode needle insertion hole (vertical in the illustrated example), and each electrode needle insertion hole and the holding member insertion hole communicate with each other inside the base member 1043. One end of the electric wire 1046 is connected to the holding member 1044, and the other end of the electric wire 1046 is connected to the above-described high voltage power source 5a. Therefore, the voltage from the high voltage power source 5a can be applied to each electrode needle through the holding member 1044.

  The holding member 1044 includes first and second plate-like members 1441 and 1442 that are elastically connected to each other via a connecting portion 1443, and has a plate spring shape as a whole. For example, a punching of a metal plate It can be manufactured by bending or the like. The holding member 1044 is configured such that each electrode needle inserted through the electrode needle insertion hole of the base member can be sandwiched between the two plate-like members. Preferably, in order to facilitate insertion of each electrode needle and improve positioning accuracy, at least one of the plate members (only the second plate member 1442 in the illustrated example) receives the electrode needles 1041 and 1042, respectively. Receiving grooves 1444 and 1445. The holding member insertion hole 1433 of the base member 1043 is formed in a shape (rectangular shape in the illustrated example) corresponding to the shape of the leaf spring 1044 to be inserted. If the spring force is applied to the electrode needle inserted in the leaf spring 1044, the electrode needle can be held lightly between the leaf springs by using the spring force. Improves.

  The fixing member 1045 is, for example, a fixing screw, and the fixing screw holds the electrode needle through a screw insertion hole 1434 formed in the upper portion of the base member 1043 and communicating with the holding member insertion hole 1433 in the base member. The holding member 1044 can be pressed against the base member 1043. Even with such a configuration, the tip position of each electrode needle can be individually and easily adjusted by the same operation as in the first embodiment. If the leaf spring 1044 itself is configured to be able to grip each electrode needle with an appropriate force, the fixing screw 1045 can be omitted.

  In the first and second embodiments described above, a stopper for positioning the electrode needle can be disposed at a position facing the end portion on the opposite side of the discharge portion (tip) of the electrode needle. The stopper can be formed as a wall surface for contacting the electrode needle so as not to retract the electrode needle from a desired position. For example, the stopper may be an inner surface of a holding member insertion hole formed in the base member. However, it may be a member provided separately or integrally on the outside of the base member.

  5A and 5B show an electrode needle assembly 2004a according to the third embodiment. The electrode needle assembly 2004a is disposed on the housing 2 and fixed to the outer peripheral portion of the fan 3, and the electrode needle base portion, that is, the base member 2043, and the electrode needle assembly 204a are disposed in the base member 2043 and the electrode needles 2041 and 2042 are disposed therein. An electrode needle biasing member 2044 configured to bias in the longitudinal direction and an adjustment member 2045 for adjusting the tip position of the electrode needle to a predetermined position are provided. In the present embodiment, the electrode needles 2041 and 2042 are formed as a substantially integrated body via the connection portion 2047, and have a U-shape or a U-shape as a whole.

  The base member 2043 is made of an insulating material such as ABS resin or PP resin, and electrode needle insertion holes 2431 and 2432 through which the electrode needles 2041 and 2042 can be inserted, respectively, and a biasing member insertion hole into which the biasing member 2044 can be inserted. 2433. The biasing member insertion hole 2433 extends in a direction different from the electrode needle insertion hole (vertical in the illustrated example), and each electrode needle insertion hole and the biasing member insertion hole communicate with each other inside the base member 2043. In this embodiment, since the electrode needle insertion direction is opposite to that of the first and second embodiments described above, the base member 2043 has an opening (a groove in the illustrated example) on the opposite side of the electrode needle insertion hole. 2435.

  On the other hand, the biasing member 2044 is made of a conductive material such as metal, and has a first plate-like member 2441 having a curved surface so as to have elasticity, and a substantially rigid first member disposed opposite to the concave side of the first plate-like member 2441. 2 plate-like member 2442. The first plate-like member 2441 has a substantially rectangular shape, and the second plate-like member 2442 has a slightly larger rectangular shape than the first plate-like member, but is not limited to these shapes. Since one end 2443 in the long side direction of the first plate member 2441 is fixed to the second plate member 2442 and the other end 2444 in the long side direction is a free end, the urging member 2044 is a plate as a whole. Form a spring. One end of the electric wire 2046 is connected to the first plate-like member 2441, and the other end of the electric wire 2046 is connected to the above-described high voltage power source 5a. Therefore, the voltage from the high voltage power source 5a can be applied to each electrode needle through the biasing member 2044.

  As shown in FIG. 5B, in a state where each electrode needle is inserted into the electrode needle insertion hole of the base member 2043 and the biasing member 2044 is inserted into the biasing member insertion hole 2433 of the base member 2043, the electrode needle The connecting portion 2047 abuts on the first plate-like member 2441 and is biased toward the distal end side of the electrode needle. Therefore, an adjustment member, for example, an adjustment screw 2045 is inserted through a screw insertion hole 2434 (see FIG. 5A) formed between the electrode needle insertion hole 2431 and the electrode needle insertion hole 2432 of the base member, and connected. The longitudinal position of the tip of the electrode needle can be adjusted by pressing and displacing the portion 2047 against the urging force of the leaf spring in the direction opposite to the urging direction. Therefore, in this embodiment, the urging member and the adjustment member cooperate to constitute a holding portion that holds the electrode needle in a predetermined position.

  The change in the number of electrode needles in the third embodiment can be performed by replacing the electrode needle assembly with one having a different number of electrode needles provided on the base member. In the present embodiment, since the positions of the plurality of electrode needles are defined in advance, it is not necessary to adjust the positions of the electrode needles, and assembly and adjustment operations are easy. However, one electrode needle may be provided for one electrode needle assembly.

  6A and 6B show an electrode needle assembly 3004a according to the fourth embodiment. As shown in FIG. 6A, the electrode needle assembly 3004a is fixed in the base member 3043 and an electrode needle base portion, that is, a base member 3043, which is fixedly disposed on the outer periphery of the fan 3 on the housing 2. It has electrode needle holders, ie, holding members 3441 and 3442, which are arranged and configured to hold the electrode needles 3041 and 3042, respectively. The base member 3043 is made of an insulating material such as ABS resin or PP resin, and includes holding member housings that can accommodate the electrode needle insertion holes 3431 and 3432 through which the electrode needles 3041 and 3042 can be inserted, and the holding members 3441 and 3442, respectively. Parts 3433 and 3434. Each electrode needle insertion hole and each holding member insertion hole communicate with each other inside the base member 3043. Since each holding member accommodating portion has a dimension substantially equal to the outer shape of each holding member and opens upward, the holding member accommodated in the accommodating portion from above does not rattle in the base member. Be placed. Further, the base member 3043 has a lid member 3435 for closing the holding member accommodating portion that is open.

  On the other hand, the holding members 3441 and 3442 are made of a conductive material such as metal and have electrode needle gripping portions 3443 and 3444 that can grip the electrode needles 3041 and 3042, respectively, when disposed in the base member 3043. The electrode needle gripping portions 3443 and 3444 are configured to hold each electrode needle with an appropriate gripping force when the electrode needles 3041 and 3042 are inserted into the electrode insertion holes 3431 and 3432, respectively. In addition, convex surfaces 3446 and 3447 that are elastically displaced with respect to each other are provided. Both holding members in the illustrated example have a substantially rectangular shape in a side view, and the electrode needle gripping portion is formed on one side of the rectangle facing the electrode needle insertion holes 3431 and 3432 when the holding member is disposed in the base member. It is formed. The two holding members are connected to each other by a connecting member 3445 made of a conductive material on a side opposite to one side where the electrode needle gripping portion is formed. As shown in FIG. 6B, at least one of the holding members (the holding member 3441 in the illustrated example) is connected to one end of the electric wire 3046, and the other end of the electric wire 3046 is connected to the high voltage power source 5a. . Therefore, the voltage from the high voltage power source 5a can be applied to each electrode needle through the holding member.

  The gripping force generated by the convex surfaces 3446 and 3447 of the electrode needle gripping portions 3443 and 3444 keeps the electrode needle stationary unless an external force is applied, but the operator intentionally moves the electrode needle in the longitudinal direction. It is set to an allowable size. Therefore, in this embodiment, it is possible to easily and independently adjust the tip position of each electrode needle without using the fixing screw or the adjusting screw described above. However, in order to ensure the fixation of the electrode needles, a fixing screw or the like for fixing each electrode needle may be further provided. In addition, the holding member in the illustrated example has a substantially rectangular shape when viewed from the side, but may be circular (C-shaped) or U-shaped.

  Each electrode needle does not need to pass through the base member 3043 at the time of assembly (FIG. 6B), but in order to prevent the tip of the electrode needle from flapping (for example, the tip position fluctuates up and down), As shown in FIG. 6 (a), on the opposite side of the base member 3043 where the electrode needle insertion holes 3441 and 3442 are formed, the electrode needles inserted into the electrode needle insertion holes 3441 and 3442 come into contact with each other. In addition, electrode needle insertion holes 3441 'and 3442' are preferably formed.

  Each of the above-described embodiments has been described by taking a DC type static eliminator as an example, but the present invention can be similarly implemented in an AC type static eliminator. In the AC type static eliminator, it is not always necessary to dispose the electrode needles at opposite positions. For example, one electrode needle may be provided. All the electrode needles can be electrically connected to one AC power source, and corona discharge is performed between the electrode needles and the counter electrode arranged to face the electrode needles.

It is a top view of the static eliminator which concerns on this invention. (A) It is a disassembled perspective view of the electrode needle | hook assembly which concerns on 1st Embodiment, (b) It is an assembly perspective view. (A) It is a side view of the structure of FIG.2 (b), and is a figure which shows the state which loosened the fixing screw in (b) (a). (A) It is a disassembled perspective view of the electrode needle | hook assembly which concerns on 2nd Embodiment, (b) It is an assembly perspective view. (A) It is a disassembled perspective view of the electrode needle | hook assembly which concerns on 3rd Embodiment, (b) It is an assembly top view. (A) It is a disassembled perspective view of the electrode needle | hook assembly which concerns on 4th Embodiment, (b) It is an assembly perspective view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Charger 2 Housing 3 Fan 4a-4d Electrode needle assembly 41, 42 Electrode needle 43 Base member 44 Holding member 45 Fixing member

Claims (6)

A housing and at least one electrode needle for generating ions by corona discharge, an electrode needle assembly disposed in the housing, and a blower unit that generates an air flow for carrying the ions generated by the electrode needle And a power source for applying a voltage to the at least one electrode needle,
The electrode needle assembly includes at least one electrode needle;
A base portion made of an insulating material having an electrode needle insertion hole through which the at least one electrode needle can be inserted, and being fixedly disposed on the housing;
Provided in the base portion and electrically connected to the power source, and inserted into the electrode needle insertion hole of the base member so that the tip of each of the at least one electrode needle is positioned at a predetermined position A holding part for holding each of the electrode needles;
Having a static eliminator.   The holding portion is inserted into the electrode needle receiving hole, and a holding member made of a conductive material having an electrode needle receiving hole capable of receiving each of the electrode needles inserted into the electrode needle insertion holes of the base member. The static eliminator according to claim 1, further comprising: a fixing member that fixes the at least one electrode needle to the holding member.   The holding portion includes two plate-shaped members made of conductive materials that can be elastically displaced from each other, and each of the electrode needles inserted into the electrode needle insertion holes of the base member is sandwiched between the two plate-shaped members. The static eliminator according to claim 1, further comprising: a holding member; and a fixing member that fixes the at least one electrode needle sandwiched between the two plate-like members to the holding member.   The holding portion biases the electrode needle inserted through the electrode needle insertion hole of the base member in the longitudinal direction thereof, a biasing member made of a conductive material, and a direction opposite to the biasing direction by the biasing member The static eliminator according to claim 1, further comprising an adjustment member that displaces the at least one electrode needle.   The holding portion includes convex surfaces made of two conductive materials facing each other and elastically displaceable with respect to each other, and each of the electrode needles inserted through the electrode needle insertion holes of the base member is interposed between the two convex surfaces. The static eliminator of Claim 1 provided with the holding member to hold | grip.   The gripping force acting on each of the at least one electrode needle by the two convex surfaces holds each of the at least one electrode needle immovably unless an external force is applied, but an operator intentionally holds the at least one electrode needle. The static eliminator according to claim 5, wherein the static eliminator is set to a size that allows movement of two electrode needles in a longitudinal direction thereof.

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