JP2010021373A - Actuator, stage device, and joining apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage device, which improves operation precision of an actuator, and to provide a joining apparatus including the stage device. <P>SOLUTION: The actuator has: a cylindrical cylinder body; a piston assembly that has a piston body stored in the cylinder body, and a tilted section that is tightened to a drive target and can be tilted freely to the piston body; a scale fixed to one of the cylinder body and the piston assembly; a scale read section fixed to the other of the cylinder body and the piston assembly to read the scale; and a rotation restraint section for restraining the rotation of the piston assembly to the cylinder body. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an actuator, a stage device, and a joining device. More specifically, the present invention relates to an actuator that drives a stage or the like, a stage device that moves up and down or swings an object driven and mounted by the actuator, and a joining device that includes the stage device.

  When manufacturing a stacked semiconductor device, it is required to accurately position the substrates, dies, and the like to be stacked on each other. For this reason, in the joining apparatus which positions and joins a board | substrate etc., the stage apparatus which can position precisely the mounted target object is used. The bonding apparatus also includes a load sensor such as a load cell that detects a load applied to a substrate to be bonded (see Patent Document 1).

In semiconductor manufacturing equipment that requires high operation accuracy, an air actuator that does not affect the surrounding electric and magnetic fields may be used (see Patent Document 2). The air actuator generates driving force using air as a working fluid. Further, by forming the fluid bearing using the same air, generation of dust due to sliding of the member is prevented.
JP 05-160340 A JP 2002-359170 A

  An air actuator may perform feedback control of an operation amount using a linear encoder including a linear scale. The linear scale is arranged so as to move integrally with a driven object such as a stage. However, when the driven object swings with respect to the actuator that generates a linear driving force, the measurement result by the linear encoder does not always accurately reflect the movement amount of the driven object. Therefore, it is required to equip a linear encoder that is completed by the air actuator itself.

  Therefore, in order to solve the above problems, as a first embodiment of the present invention, a cylindrical cylinder body, a piston body accommodated in the cylinder body, and a target to be driven and tiltable with respect to the piston body A piston assembly having an inclining portion, a scale fixed to one of the cylinder body and the piston assembly, a scale reading unit fixed to the other of the cylinder body and the piston assembly and reading the scale, and a cylinder An actuator is provided that includes a rotation restraining portion that restrains rotation of the piston assembly relative to the body.

  In addition, as a second embodiment of the present invention, a stage main body that holds an object on a holding surface, and an actuator that generates a driving force in a normal direction of the holding surface, the actuator includes a cylindrical cylinder main body, A piston main body housed in a cylinder main body, a piston assembly fastened to a stage assembly including a stage main body and tiltable with respect to the piston main body, and one of the cylinder main body and the piston assembly A stage device is provided that includes a scale that is fixed in place, a scale reading unit that is fixed to the other of the cylinder body and the piston assembly, and that reads the scale, and a rotation stopping unit that stops rotation of the piston assembly relative to the cylinder body. Is done.

  The above summary of the invention does not enumerate all necessary features of the present invention, and sub-combinations of these feature groups can also be the invention.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solution of the invention.

  FIG. 1 is a perspective view of the stage apparatus 200. As illustrated, the stage apparatus 200 includes a base 210, an actuator 300, and a stage assembly 201.

  A plurality of actuators 300 are fixed upright on the upper surface of the base 210. Each of the actuators 300 includes a cylinder assembly 310 fixed to the base 210 and a piston assembly 320 that rises relative to the cylinder assembly 310 when supplied with working fluid.

  Each of the actuators 300 includes a linear scale 340 that moves up and down together with the piston assembly 320 and a scale reading unit 330 that is fixed to the cylinder assembly 310. Thereby, the movement amount of the piston assembly 320 in each of the actuators 300 can be known.

  The stage assembly 201 is supported from below by a plurality of actuators 300 as a whole. The stage assembly 201 includes an upper table 222, a reflecting mirror 224, a balance weight 226, and a stage main body 220.

  The upper table 222 is a flat rectangular member, and along its two sides, a pair of reflecting mirrors 224 that are perpendicular to each other are arranged upright. The reflecting mirror 224 reflects laser light or the like irradiated from the outside. Thereby, the position of the stage assembly 201 can be accurately measured in the direction orthogonal to the reflecting surface of the reflecting mirror 224 using an interferometer or the like.

  A stage main body 220 is also mounted on the upper surface of the upper table 222. The stage main body 220 has a holding surface 228 positioned substantially at the center of the upper table 222. The holding surface 228 may be provided with an electrostatic chuck, a vacuum chuck, or the like that holds a mounted object.

  Further, a balance weight 226 is disposed at a position facing the reflecting mirror 224 on the upper table 222. The balance weight 226 compensates for the weight deviation due to the reflecting mirror 224 so that the center of gravity of the upper table 222 and its mounted object coincides with the center of the holding surface 228. Thereby, the controllability when the stage assembly 201 is driven by the actuator 300 can be improved.

  FIG. 2 is a perspective view showing a state in which the upper table 222 and its mounted items are removed from the stage apparatus 200. More specifically, the stage main body 220, the upper table 222, the reflecting mirror 224, and the balance weight 226 are removed from the stage apparatus 200 shown in FIG.

  Below the upper table 222, a load cell 230, a lower table 242, a rotary table 252, a connecting portion 248, and a balance weight 246 are arranged. As will be described later, the lower table 242 is driven by the actuator 300 to move up and down or tilt. Further, the stage assembly 201 includes all of the upper table 222 and its mounted items shown in FIG. 1, the load cell 230, the lower table 242, the rotary table 252, the connecting portion 248, the balance weight 246, and the like. That is, the stage assembly 201 means the entire part that moves up and down or tilts when the actuator 300 is operated.

  The connecting portion 248 is coupled to the top of the piston assembly 320 by a screw 241. As a result, the connecting portion 248 moves up and down together with the piston assembly 320. Further, the connecting portion 248 is also coupled to the lower table 242 by a screw 243. Thereby, the lower table 242 also moves up and down together with the piston assembly 320.

  The rotary table 252 is supported from the lower table 242. Further, the rotary table 252 has a control arm 256 extending laterally. The support structure of the rotary table 252 by the lower table 242 and the operation of the control arm 256 will be described later.

  The load cell 230 includes an actuator side mounting portion 232, a strain body 234, and a stage side mounting portion 236. The actuator side mounting portion 232 is coupled to the upper surface of the rotary table 252 by screws 231.

  Further, in the load cell 230, a screw hole 235 is formed in the stage side attaching portion 236. The above-described upper table 222 is coupled to the stage side mounting portion 236 by screws inserted from below into the screw holes 235.

  The balance weight 246 is attached at a position symmetrical to the control arm 256 of the rotary table 252. As a result, the center of gravity around the lower table coincides with the center of the rotary table 252 and the controllability when the actuator 300 drives the stage assembly 201 is improved.

  FIG. 3 is a perspective view showing the actuator 300 alone. The actuator 300 includes a cylinder assembly 310 and a piston assembly 320 that moves up and down with respect to the cylinder assembly 310.

  The cylinder assembly 310 includes a cylindrical cylinder main body 319, a scale reading unit 330 and a restraining member 362 fixed to the cylinder main body 319. The scale reading unit 330 is fixed to the side surface of the cylinder body 319 with a screw 331 through the bracket 332. The restraining member 362 has a pair of projecting portions 361 and 363 that project outward from the side surface of the cylinder body 319 in the radial direction of the cylinder assembly 310. The scale reading unit 330 is, for example, an optical sensor, and reads a scale formed on the linear scale 340.

  The piston assembly 320 includes a bracket 322, a ball support portion 324, a lid portion 326, a linear scale 340, a tilting member 370, and a guide bar 350. The ball support portion 324 and the lid portion 326 are stacked on the top of the piston assembly 320 and are fixed by screws 371.

  In contrast, the tilting member 370 protrudes from the upper surface of the lid portion 326 and is attached to the piston assembly 320 so as to be tiltable. The tilting member 370 has a pair of screw holes 372 on its top surface.

  The linear scale 340 is supported by the scale support part 342. The scale support portion 342 is fixed to the side surface of the ball support portion 324 with screws 341. The vicinity of the lower end of the linear scale 340 is guided by a guide spring 344 fixed to the cylinder body 319. Thereby, the linear scale 340 moves up and down without contacting any of the side surface of the cylinder body 319 and the scale reading unit 330.

  The bracket 322 protrudes laterally from the side surface of the ball support portion 324. The guide bar 350 is coupled to the bracket 322 with a screw 351 and hangs vertically downward from the vicinity of the tip of the bracket 322. Further, the guide bar 350 is sandwiched between the protrusions 361 and 363 of the restraining member 362. As a result, the displacement of the guide bar 350 is restricted in the tangential direction of the cylinder body 319.

  In the vicinity of the lower end of the guide bar 350, a stop protrusion 352 protruding in the tangential direction of the cylinder body 319 and a stop protrusion 354 protruding in the radial direction of the cylinder body 319 are formed. A sliding member 356 sandwiched between the side surface of the cylinder body 319 is mounted near the lower end of the guide bar 350.

  One stop protrusion 352 contacts the lower surface of the protrusion 361 of the stop member 362 when the piston assembly 320 is raised. Thereby, the piston assembly 320 is prevented from dropping from the cylinder assembly 310. The other stop protrusion 354 contacts the stop member 359 (see FIGS. 1 and 2) fixed on the base 210 when the piston assembly 320 is lowered, and the cylinder assembly 310 and the piston assembly 320. Mitigates the impact of collisions.

  The other part of the piston assembly 320 is disposed inside the cylinder body 319. Therefore, the structures of the cylinder assembly 310 and the piston assembly 320 will be further described with reference to cross-sectional views.

  FIG. 4 is a cross-sectional perspective view of the actuator 300 alone. In addition, the same reference number is attached | subjected to the same component as FIG. 3, and the overlapping description is abbreviate | omitted.

  The piston assembly 320 includes a piston body 329, a hard sphere 390, and a stopper 328 in addition to the members already described. The piston main body 329 is coupled to the lower surface of the ball support portion 324 with a screw 323. The lid part 326 is coupled to the ball support part 324 by a screw 371.

  The piston main body 329 has a dimension approximately complementary to the inner surface of the cylinder main body 319 and is accommodated inside the cylinder main body 319 so as to be movable up and down. As a result, the lid 326, the ball support 324, and the piston main body 329 move up and down integrally along the longitudinal direction of the cylinder main body 319.

  The piston main body 329 has a tapered hole 325 whose diameter increases upward, on the upper surface. The hard sphere 390 is disposed inside the tapered hole 325. The hard sphere 390 is also supported from the side by the inner surface of the sphere support 324. Thereby, the hard sphere 390 is positioned with respect to the piston main body 329. Note that the hard sphere 390 is formed of a material with little deformation and wear, such as ceramics or metal.

  A tilting member 370 is placed on the hard sphere 390. The tilting member 370 includes a protruding portion 374 that protrudes upward from the lid portion 326 and a flange portion 376 that increases in diameter inside the lid portion 326. The protrusion 374 has an outer diameter that is smaller than the inner diameter of the lid 326. On the other hand, the flange portion 376 has an outer diameter larger than the inner diameter of the lid portion 326.

  Further, a spring washer 380 is sandwiched between the lid portion 326 and the flange portion 376. The spring washer 380 presses the tilting member 370 toward the hard sphere 390.

  With such a structure, the tilting member 370 moves up and down as a part of the piston assembly 320 without dropping from the lid 326 when the piston main body 329 moves up or down. Further, since the tilting member 370 is transmitted to the displacement of the piston main body 329 while being tilted with respect to the lid portion 326, the tilting member 370 does not prevent the lower table 242 coupled by the screw 241 and the connecting portion 248 from tilting.

  A stopper 328 is attached to the lower end surface of the piston main body 329 with a screw 321. The lower end of the stopper 328 protrudes downward from the lower end surface of the piston body 329. Thereby, even when the piston main body 329 is lowered, a gap serving as the pressure chamber 318 remains between the bottom surface of the cylinder main body 319 and the lower surface of the piston main body 329.

  In contrast to the piston assembly 320 as described above, the cylinder assembly 310 further includes a pair of joints 314 and 316 and a discharge hole 315. One joint 314 is disposed in the vicinity of the lower end of the side surface of the cylinder body 319. The joint 314 provides a path for supplying or discharging the working fluid to the pressure chamber 318.

  The other joint 316 is disposed above the side surface of the cylinder body 319. A fluid is supplied from the joint 316 between the cylinder body 319 and the piston body 329. Thereby, a laminar flow of fluid is generated between the cylinder main body 319 and the piston main body 329, and a fluid bearing is formed.

  Such a structure prevents the cylinder body 319 and the piston body 329 from sliding directly. The laminar flow forming the fluid bearing is discharged from a discharge hole 315 provided at a position facing the joint 316 in the cylinder body 319. When air is used as the working fluid, for example, air may be supplied from both joints 314 and 314 forming the fluid bearing.

  FIG. 5 is a sectional view showing one section of the actuator 300 alone. FIG. 5 shows a cross section including the linear scale 340.

  The linear scale 340 is supported by the scale support part 342. The scale support portion 342 is fixed to the ball support portion 324 of the piston assembly 320 at the upper end. The ball support portion 324 is fixed with respect to the piston main body 329.

  Therefore, when the piston main body 329 moves up and down with respect to the cylinder main body 319, the linear scale 340 moves up and down together with the piston main body 329 outside the cylinder main body 319. On the other hand, the scale reading unit 330 is fixed with respect to the cylinder body 319.

  FIG. 6 is a cross-sectional view showing another cross section of the actuator 300 alone. FIG. 6 shows a cross section including the guide bar 350.

  The upper end of the guide bar 350 is coupled to the bracket 322 protruding directly from the ball support portion 324 by a screw 351. The ball support portion 324 is fixed with respect to the piston main body 329. Therefore, when the piston main body 329 moves up and down with respect to the cylinder main body 319, the guide bar 350 also moves up and down with the piston assembly 320 outside the cylinder main body 319.

  The guide bar 350 is fixed to the outside of the cylinder body 319. However, the guide bar 350 has a sufficient height with respect to the lifting / lowering stroke of the piston assembly 320. Accordingly, even when the piston assembly 320 moves up and down, the state where the guide bar 350 is sandwiched between the protrusions 361 and 363 of the restraining member 362 is maintained.

  With such a structure, the guide bar 350 is prevented from moving in the circumferential direction of the cylinder body 319. As described above, the rotation stop portion 301 that stops the rotation of the piston assembly 320 relative to the cylinder body 319 is formed by the guide bar 350 and the stop member 362. Therefore, the positional relationship between the linear scale 340 and the scale reading unit 330 is stabilized, and reading accuracy is improved.

  The rotation restricting portion 301 prevents the piston assembly 320 from rotating with respect to the cylinder assembly 310, so that the positional relationship between the linear scale 340 and the scale reading portion 330 is always constant. Therefore, the detection accuracy of the movement amount of the piston assembly 320 by the linear scale 340 and the scale reading unit 330 is stabilized.

  In the actuator 300, the rotation restricting unit 301 may be disposed outside the linear scale 340 and the scale reading unit 330 in the radial direction of the cylinder body 319. Thereby, the rotation of the piston assembly 320 can be efficiently stopped. It is also preferable to supply a working fluid such as air to the gap between the guide bar 350 and the restraining member 362 to form a fluid bearing.

  FIG. 7 is a cross-sectional view showing the structure of an actuator 300 according to another embodiment. Except for the part described below, the actuator 300 shown in FIG. 7 has the same structure as the actuator 300 shown in FIGS. Therefore, the same components are assigned the same reference numerals, and duplicate descriptions are omitted.

  As shown in the figure, in the actuator 300, a rotation restraining portion 301 is disposed inside the cylinder body 319. In other words, the cylindrical guide bar 350 stands upright from the inner bottom of the cylinder body 319. On the other hand, the piston main body 329 has a straight hole-shaped restraining portion 366 that opens at the bottom and extends in the longitudinal direction of the piston main body 329. The upper end of the guide bar 350 is inserted into the stop portion 366.

  Further, both the guide bar 350 and the restraining portion 366 are disposed at positions deviating from the centers of the cylinder body 319 and the piston body 329. Thereby, a rotation restraining portion 301 that restrains the rotation of the piston body 329 relative to the cylinder body 319 is formed.

  In this way, the rotation restricting portion 301 may be disposed inside the cylinder body 319. As a result, the number of parts to be mounted on the outside of the cylinder body 319 is reduced, and the actuator 300 can be downsized.

  FIG. 8 is a partial cross-sectional perspective view showing the stage apparatus 200 in the state shown in FIG. Here, cross sections of the actuator 300, the lower table 242, and the rotary table 252 appear.

  The lower table 242 has a cylindrical bearing portion 244 having an upper opening at the approximate center thereof. On the other hand, the lower table 242 has a cylindrical shaft portion 254 that extends downward from the center of the lower surface. The shaft portion 254 is inserted into the bearing portion 244. Further, a plurality of ball bearings 249 are disposed between the shaft portion 254 and the bearing portion 244.

  Thereby, the rotary table 252 rotates around an axis perpendicular to the base 210 with the shaft portion 254 as an axis. The rotary table 252 is coupled to the actuator side mounting portion 232 of the load cell 230, and the stage side mounting portion 236 of the load cell 230 is coupled to the upper table 222. Accordingly, these members rotate together with the rotary table 252.

  Further, the rotary table 252 has a control arm 256 extending laterally. A driven portion 258 is suspended from the end of the control arm 256 opposite to the rotary table 252. The driven portion 258 is driven in a direction parallel to the base 210 by a bellows actuator 262 having the other end coupled to the lower table 242 side. Thereby, the turntable 252 can be rotated via the control arm 256.

  FIG. 9 is a cross-sectional view of the stage apparatus 200 in the state shown in FIG. This figure shows a state in which the cross section appearing in FIG. 8 is viewed from a direction orthogonal to the cross section. In addition, the same reference number is attached | subjected to the same component as another figure, and the overlapping description is abbreviate | omitted.

  As shown in the figure, the lower table 242 is also separated from the base 210 at the bottom of the bearing portion 244 located at the lowest position. Accordingly, the lower table 242 is exclusively supported by the actuator 300. Further, as already described, the rotary table 252 and the load cell 230 are supported by the lower table 242. Further, the upper structure from the upper table 222 is supported by the load cell 230.

  Accordingly, when the driven actuator 300 expands and contracts in the vertical direction indicated by the arrow Z in the drawing, the stage assembly 201 moves up and down as the piston assembly 320 moves up and down. Further, when the drive amounts of the plurality of actuators 300 are different from each other, the stage assembly 201 can be swung. Accordingly, the object held on the holding surface 228 can be lifted and lowered.

  In each of the load cells 230, the strain generating body 234 has slits 239 that penetrate horizontally and open on both side surfaces. Therefore, the load cell 230 is sensitively deformed with respect to the displacement in the Z-axis direction of the stage side mounting portion 236 relative to the actuator side mounting portion 232. On the other hand, it exhibits high rigidity against deformation in a plane perpendicular to the Z axis.

  Thereby, the displacement of the stage side mounting portion 236 relative to the actuator side mounting portion 232 in the ascending / descending direction is detected with high sensitivity, and the load applied to the stage main body 220 can be accurately detected. Further, the displacement of the stage assembly 201 within a plane orthogonal to the Z axis is regulated by the load cell 230. Therefore, the stage main body 220 can be accurately positioned.

  Thus, the stage main body 220 that holds the object on the holding surface 228, the actuator 300 that generates a driving force in the normal direction of the holding surface 228, the stage-side mounting portion 236 coupled to the stage main body 220, and the driving force of the actuator Receiving side actuator-side mounting portion 232, and strain-generating body 234 that extends in the direction along holding surface 228 and bends in the normal direction of the holding surface while connecting stage-side mounting portion 236 and actuator-side mounting portion 232. The stage apparatus 200 including the load cell 230 having the above is formed.

  FIG. 10 is a plan view of the stage apparatus 200 excluding the stage main body 220. That is, FIG. 10 shows a state in which the stage apparatus 200 in the state shown in FIGS. 2, 8, and 9 is looked down from above. It should be noted that the same reference numerals are assigned to the same components as those in the other drawings, and redundant description is omitted.

  As shown in the figure, the lower table 242 has a substantially triangular shape, and a connecting portion 248 is attached to each of the apexes. In addition, a balance weight 246 is mounted on two sides of the triangular side formed by the lower table 242, and an actuator assembly 260 is mounted on the remaining one side.

  The actuator assembly 260 has a subframe 264 fixed to the lower table 242 and a pair of bellows actuators 262 arranged in the tangential direction of the rotary table 252 inside the subframe 264. A driven portion 258 suspended from the tip of the control arm 256 of the rotary table 252 is sandwiched between the pair of bellows actuators 262. Thereby, the pair of bellows actuators 262 can be complementarily expanded and contracted to rotate the rotary table 252 relative to the lower table 242.

  Here, the pair of balance weights 246 are adjusted so as to compensate for the deviation of the center of gravity caused by the single actuator assembly 260 and the control arm 256. Thereby, the total center of gravity of the series of members supported by the actuator 300 coincides with the center of the rotary table 252. Therefore, when the actuator 300 drives the stage assembly 201 to move up and down or swing, the controllability is improved because there is almost no displacement of the center of gravity of the driven object.

  In addition, the load cells 230 are arranged at equal intervals radially from the center of the rotary table 252 that coincides with the center of gravity of the stage assembly 201 and at an angle of 120 degrees. The actuator 300 also drives the lower table 242 at a position symmetrical to any one of the stage side mounting portions 236 around the center of gravity of the assembly including the lower table 242. Thereby, the action of the driving force of the actuator 300 is balanced with respect to each part of the stage apparatus 200, so that the operation accuracy of the stage apparatus 200 is increased.

  Further, each of the load cells 230 is arranged such that the stage side mounting portion 236 is farther from the center of gravity than the actuator side mounting portion 232. As described above, the stage apparatus 200 includes a plurality of load cells 230, and each of the load cells 230 includes a stage main body 220 and is driven by the actuator 300 together with the stage main body 220, from the center of gravity of the stage assembly 201. The stage-side mounting portion 236 may be disposed radially along the holding surface 228 and in a direction farther from the center of gravity than the actuator-side mounting portion 232. Thereby, the rotary table 250 can be reduced in size and the load of the actuator 300 can be reduced.

  In this embodiment, the stage assembly including the lower table 242 includes an actuator 300 that applies a driving force to the lower table 242 and a stage-side mounting portion 236 that transmits the displacement of the lower table 242 to the upper table 222. The connecting portion 248 and the load cell 230 are arranged so as to be symmetric about the center of gravity of 201. However, the present invention is not limited to such a layout. For example, the stage-side mounting portion 236 and the connecting portion 248 are arranged close to each other, and each of the actuators 300 is located near the stage-side mounting portion 236, for example, a stage. The stage assembly 201 may be driven directly under each of the side attachment portions 236. Thereby, the influence of the tolerance of each part of a movable part is excluded, and precise positioning can be performed.

  FIG. 11 is a cross-sectional view schematically showing the structure of the bonding apparatus 100 provided with the stage apparatus 200. In addition, although the stage apparatus 200 is drawn simply for the purpose of avoiding complicated drawings, the stage apparatus 200 has a structure common to the stage apparatus 200 or the actuator 300 shown in FIGS. To do. In addition, the same reference numerals are given to the same components as those of the stage apparatus 200 or the actuator 300 shown in FIGS. 1 to 10, and redundant description is omitted.

  The joining apparatus 100 includes a frame body 110 and a stage apparatus 200 disposed inside thereof. The frame 110 includes a top plate 112 and a bottom plate 116 that are parallel to each other and a plurality of columns 114 that couple the top plate 112 and the bottom plate 116. The top plate 112, the support column 114, and the bottom plate 116 are each formed of a highly rigid material that does not deform even when some load is applied.

  On the bottom plate 116, a Y stage 120 that moves in a direction orthogonal to the paper surface is mounted. Further, a stage device 200 is mounted on the Y stage 120. A substrate holder 130 holding the substrate 140 is fixed to the lower surface of the top plate 112 by a fixing member 132.

  The stage apparatus 200 includes a base 210, an actuator 300, and a stage assembly 201. The base 210 is mounted on the Y stage 120 and also serves as the X stage. Thereby, the stage apparatus 200 can move to an arbitrary position on the bottom plate 116.

  The plurality of actuators 300 are fixed at the lower end on the base 210 and support the stage assembly 201 at the upper ends. Each of the actuators 300 includes a cylinder assembly 310 fixed to the base 210 and a piston assembly 320 that moves up and down with respect to the cylinder assembly 310, and a stage assembly according to the pressure of the working fluid supplied from the outside. 201 is raised or lowered in the direction indicated by the arrow Z in the figure.

  The stage assembly 201 includes a stage main body 220, a load cell 230, a lower table 242, and a rotary table 250. The lower table 242 is supported from the actuator 300 in the vicinity of the end portion. Moreover, it has the bearing part 244 in the approximate center.

  The rotary table 250 has a lower end shaft portion 254 inserted into the bearing portion 244 and rotates about an axis perpendicular to the lower table 242. The stage main body 220 is coupled to the upper surface of the rotary table 250 via the load cell 230.

  An object such as the substrate 150 is mounted on the upper surface of the stage main body 220. Thereby, the substrate 150 faces the substrate 140 held on the top plate 112 side. Further, by extending the actuator 300, the stage main body 220 raises the substrate 150, and the substrates 140 and 150 are bonded to each other.

  Prior to bonding, the substrate 150 can be positioned with respect to the substrate 140 by moving each of the Y stage 120 and the substrate 210 in the X direction or the Y direction. Further, by changing the driving amount of the actuator 300 to each other, the stage main body 220 can be swung to make the substrates 140 and 150 parallel to each other. Furthermore, by rotating the rotary table 250, the substrates 140 and 150 can be made parallel to each other for rotation around the Z axis.

  Further, when the substrate 150 mounted on the stage main body 220 comes into contact with the substrate 140 fixed to the top plate 112, the load applied to the load cell 230 increases. Thereby, the load applied to the substrates 140 and 150 can be detected.

  In this way, the stage main body 220 that holds the substrate 150 on the holding surface 228, the actuator 300 that generates a driving force in the normal direction of the holding surface 228, the stage-side mounting portion 236 coupled to the stage main body 220, and the actuator The actuator side mounting portion 232 that receives a driving force of 300, and the stage side mounting portion 236 and the actuator side mounting portion 232 are connected to each other and extend in the direction along the holding surface 228 and bend in the normal direction of the holding surface 228. The bonding apparatus 100 including the load cell 230 having the strain body 234 and the substrate holder 130 that holds the other substrate 140 that contacts the substrate 150 when the stage main body 220 is driven by the actuator 300 is formed.

  In the above example, the stage apparatus 200 is mounted on the bonding apparatus 100, but the application of the stage apparatus 200 is not limited to this. That is, it can be used in various applications that require precise positioning, such as a liquid crystal display device and a micromachine manufacturing apparatus, in addition to a semiconductor manufacturing apparatus such as an exposure apparatus.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. In addition, it will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. Furthermore, it is apparent from the description of the scope of claims that embodiments with such changes or improvements can be included in the technical scope of the present invention.

2 is a perspective view showing a structure of a stage device 200. FIG. 1 is a perspective view showing a stage apparatus 200 excluding a part of a stage assembly 201. FIG. It is a perspective view which shows the actuator 300 independently. It is a cross-sectional perspective view of the actuator 300 alone. It is sectional drawing which shows one cross section of the actuator 300 independent. It is sectional drawing which shows the other cross section of the actuator 300 independent. It is sectional drawing which shows the structure of the actuator 300 which concerns on other embodiment. FIG. 3 is a partial cross-sectional perspective view of the stage apparatus 200 shown in FIG. 2. It is sectional drawing of the stage apparatus 200 shown in FIG. It is a top view of the stage apparatus 200 shown in FIG. 2 is a cross-sectional view schematically showing the structure of the bonding apparatus 100. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Joining device, 110 Frame body, 112 Top plate, 114 Prop, 116 Bottom plate, 120 Y stage, 130 Substrate holder, 132 Fixing member, 140, 150 Substrate, 200 Stage device, 201 Stage assembly, 210 Base, 220 Stage main body , 222 Upper table, 224 Reflector, 325 Tapered hole, 226, 246 Balance weight, 228 Holding surface, 230 Load cell, 231, 241, 243, 321, 323, 331, 341, 351, 371 Screw, 232 Actuator side mounting 234 strain generating body, 235 screw hole, 236 stage side mounting part, 239 slit, 340 linear scale, 242 lower table, 244 bearing part, 248 connecting part, 249 ball bearing, 250 rotary table, 252 rotary table 254 shaft part 256 control arm 258 driven part 260 actuator assembly 262 bellows actuator 264 subframe 300 actuator 301 rotation stop part 310 cylinder assembly 314 316 joint 315 discharge hole 318 Pressure chamber, 319 Cylinder body, 320 Piston assembly, 322, 332 Bracket, 324 Ball support part, 326 Cover part, 328 Stopper, 329 Piston body, 330 Scale reading part, 340 Linear scale, 342 Scale support part, 344 Guide Spring, 350 Guide bar, 352, 354 Stop projection, 356 Sliding member, 359, 362 Stop member, 361, 363 Projection, 366 Block, 370 Tilt member, 372 Screw hole, 374 Projection 376 Flange, 380 Spring washer, 390 Hard sphere

Claims (7)

A cylindrical cylinder body;
A piston body housed in the cylinder body, and a piston assembly that is fastened to a drive target and has a tilting portion that is tiltable with respect to the piston body;
A scale fixed to one of the cylinder body and the piston assembly;
A scale reading unit that is fixed to the other of the cylinder body and the piston assembly and reads the scale;
An actuator comprising: a rotation restraining portion that restrains rotation of the piston assembly relative to the cylinder body.   The actuator according to claim 1, wherein the scale is fixed to the piston assembly, and the scale reading unit is fixed to the cylinder body. The rotation stop portion is
A guide bar fixed to one of the cylinder body and the piston assembly and extending in the moving direction of the piston assembly;
The actuator according to claim 1, further comprising: a restraining member that is fixed to the other of the cylinder body and the piston assembly and restricts the guide bar from being displaced in the rotation direction of the piston assembly. .   The actuator according to any one of claims 1 to 3, wherein the rotation restricting portion is disposed outside the scale and the scale reading portion in a radial direction of the cylinder body.   The actuator according to any one of claims 1 to 3, wherein the rotation restricting portion is disposed inside the cylinder body. A stage body for holding an object on a holding surface;
An actuator that generates a driving force in a direction intersecting the holding surface,
The actuator is
A cylindrical cylinder body;
A piston main body housed in the cylinder main body, and a piston assembly that is fastened to a stage assembly including the stage main body and has a tilting portion that is tiltable with respect to the piston main body;
A scale fixed to one of the cylinder body and the piston assembly;
A scale reading unit that is fixed to the other of the cylinder body and the piston assembly and reads the scale;
A stage device comprising: a rotation stopping portion that stops rotation of the piston assembly relative to the cylinder body. A stage body for holding one substrate on the holding surface;
An actuator that generates a driving force in a direction intersecting the holding surface;
A substrate holding unit that holds another substrate that contacts the one substrate when driven by the actuator; and
The actuator is
A cylindrical cylinder body;
A piston body housed in the cylinder body, and a piston assembly that is fastened to a drive target and has a tilting portion that is tiltable with respect to the piston body;
A scale fixed to one of the cylinder body and the piston assembly;
A scale reading unit that is fixed to the other of the cylinder body and the piston assembly and reads the scale;
And a rotation restraining portion that restrains the rotation of the piston assembly relative to the cylinder body.

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