JP2010021138A - Organic electroluminescent device and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic electroluminescent device which restrains light-emitting luminance variations in a pixel and light-emitting variations among the pixels and is excellent on stability and life characteristics, and its manufacturing method. <P>SOLUTION: The organic electroluminescent device includes a positive electrode for pouring in holes, a layer with a light-emitting function having a plurality of various light-emitting colors, a negative electrode for pouring electrons, and a liquid-repellent layer for separating ranges into a plurality of respective light-emitting colors, wherein the layer having the light-emitting function provides a pixel range at an inner side rather than a range separated by the liquid-repellent layer. Liquid-drop separation is carried out on an end face of the liquid-repellent layer in this structure, and the pixel range becomes a stable range of film thickness since the pixel range is regulated inside the range separated by the liquid-repellent layer even though film thickness variations are generated by swelling of the liquid-drop caused by surface tension at this end face. The organic electroluminescent device restrains light-emitting luminance variations in the pixel and light-emitting variations among the pixels, and has excellent stability and excellent life characteristics. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an organic electroluminescent device and a method for manufacturing the same, and is used particularly for displays and display elements such as mobile phones and televisions, various light sources, etc., and has a wide luminance range from low luminance to high luminance for light source applications. The present invention relates to an organic electroluminescent device using an organic electroluminescent element which is an electroluminescent element to be driven.

  An organic electroluminescent element is a light-emitting device that utilizes the electroluminescence phenomenon of a solid fluorescent material, and is partially put into practical use as a small display.

  Organic electroluminescent elements can be classified into several groups depending on the material used for the layer having a light emitting function (hereinafter referred to as light emitting layer). One typical example is a low molecular organic electroluminescent device using a low molecular weight organic compound in the light emitting layer, which is mainly produced by using a vacuum deposition method. The other is a polymer organic electroluminescent device using a polymer compound in the light emitting layer.

  Polymer organic electroluminescent devices can be formed by spin coating, ink-jet, printing, etc. by using a solution in which the material constituting each functional layer is dissolved. It is attracting attention as a technology that can be expected to increase the area.

  A typical polymer organic electroluminescent device is produced by laminating a plurality of functional layers such as a charge injection layer and a light emitting layer between an anode and a cathode. When an active matrix type display is manufactured using this polymer organic electroluminescent element, a plurality of organic electroluminescent elements are formed on the same substrate together with a driving circuit such as a TFT (thin film transistor). There is a need to.

  For example, in a bottom emission type organic electroluminescent element in which a polymer film is formed as a light emitting layer by a coating method, first, a glass substrate in which ITO (indium tin oxide) as an anode is formed on a glass or plastic substrate. A PEDOT: PSS (mixture of polythiophene and polystyrene sulfonic acid: hereinafter referred to as PEDOT) thin film as a charge injection layer is formed by spin coating, inkjet, nozzle coating, dispensing, printing, or the like. PEDOT is a material that has become a de facto standard as a charge injection layer, and functions as a hole injection layer by being disposed on the anode side.

  An interlayer having a function as an electron blocking layer on the PEDOT layer and a polyphenylene vinylene (hereinafter referred to as PPV) and a derivative thereof, or a polyfluorene and a derivative thereof, a dendrimer and a derivative thereof, particularly iridium, etc. A dendrimer having a phosphorescent emission center is formed by the above coating method such as spin coating. Then, a metal layer as a cathode is formed on these light emitting layers by vacuum deposition, electron beam deposition, sputtering, or the like, thereby completing the device.

  In such a polymer organic electroluminescent element, PEDOT, an interlayer, and a light emitting layer are formed for each pixel in an inkjet method and other coating methods, and variations in the size and film thickness of each layer are likely to occur. For example, this unevenness in film thickness has problems such as luminance unevenness and a decrease in lifetime due to current concentration in a thin film thickness portion, which causes pixel variations and thus affects the lifetime.

Therefore, various configurations have been proposed in order to arrange the charge injection layer and the light emitting layer with high accuracy (for example, Patent Document 1).
The organic electroluminescent element includes a plurality of organic electroluminescent elements constituting a plurality of pixels of different colors, and a light emitting layer and a carrier transport layer are sandwiched between the first and second electrodes to emit light. The alignment accuracy is relaxed by integrating the layer and the carrier transport layer. In this example, low molecular organic materials such as NPB and Alq are used for both the hole transport layer and the electron transport layer.

  Similarly, in order to prevent misalignment, a light emitting layer is formed so as to overlap a region for separating pixels, and an electron transport layer or a hole transport composed of a boundary portion formed between adjacent light emitting layers and an organic layer is formed. There has also been proposed a structure formed so as to coincide with a boundary portion of a charge injection layer such as a layer. (For example, Patent Document 2)

  In each of the structures disclosed in Patent Documents 1 and 2, a light emitting layer and a charge injection layer are provided on a region for separating pixels (pixel restricting portion), and an electrode is formed on these layers by vacuum deposition. Is done.

When manufacturing large-screen displays, mask vapor deposition is used when forming low-molecular-weight organic materials separately for each RGB. However, when the mask size increases, deflection and elongation become problematic and high accuracy is required. It is difficult to perform the alignment. On the other hand, a method in which a substance constituting the light emitting layer is made into a solution and applied separately using a coating / printing method has been widely studied. For example, Patent Document 3 discloses a leak current by making the film-forming range of the light-emitting layer equal to or more than the film-forming range of the hole injection / transport layer in the method of manufacturing an organic electroluminescent element using the inkjet method. There has been proposed a method of suppressing the above, and a liquid repellent layer (bank) made of polyimide is formed in an opening of an insulating film made of SiO ₂ . However, there is a problem that the coating liquid (organic resin) rises in the liquid repellent layer and the film thickness becomes non-uniform. Even if the leakage is improved, the variation in the film thickness of the light emitting layer is not improved. Unevenness in thickness caused unevenness in brightness and reduced life due to current concentration on the thin film thickness.

Therefore, in order to suppress this scooping, a method of reducing the scooping by applying hydrophobic processing to the surface of the liquid repellent layer has also been proposed (Patent Document 4). In this case, although the creeping is reduced, there is a problem that the organic resin layer rises in the pixel region due to the surface tension, and the film thickness is larger in the central portion than in the peripheral portion. Thus, in Patent Document 4, in an organic electroluminescent element having a bank structure, CF ₄ plasma treatment is performed on the upper part of the liquid repellent layer, thereby increasing the droplet holding volume and improving the holding power by surface tension. There has been proposed an element structure in which droplet separation is performed. In the formation of the element structure, ultraviolet irradiation is performed prior to the application of the layer having a light emitting function. Therefore, even if fluorine atoms adhere to the lyophilic region, the fluorine atoms can be removed by ultraviolet rays. In other words, the lyophilicity of the lyophilic region is not lowered, and a hole injection layer in a good state can be formed.

JP 2003-257656 A JP 2004-119304 A International Publication No. 01/074121 Specification JP 2007-111616 A

However, even with the configuration of Patent Document 4, when the liquid repellent layer reduces light extraction from the layer having a light emitting function, and when the liquid repellent layer is formed of an organic material, impurities from the organic material are mixed. As a result, there was a problem that the light emission characteristics deteriorated.
Further, there has been a problem that the luminous efficiency is lowered due to contamination by fluorine plasma used for water repellency on the upper and side surfaces of the organic liquid repellent layer.

The present invention has been made in view of the above circumstances, and provides a stable and excellent organic electroluminescent device and a method for manufacturing the same that suppress variations in light emission luminance within each pixel and light emission unevenness between pixels. The purpose is to do. In particular, when the display elements that require light emission in a plurality of emission colors, that is, when full-color displays or multi-color displays are applied, particularly when the light-emitting material is applied in a solution, variations in the light emission luminance within each pixel. Another object of the present invention is to provide an organic electroluminescent device that suppresses light emission unevenness between pixels and is stable and has excellent lifetime characteristics, and a method for manufacturing the same.
Another object of the present invention is to improve the light emission efficiency of the organic electroluminescent device.

Therefore, the organic electroluminescent device of the present invention has a first electrode formed on the substrate and a light emitting function provided on the first electrode and having a plurality of different emission colors according to the first electrode. A layer having the light emitting function, a second electrode disposed so as to sandwich the layer having the light emitting function with the first electrode, and a region provided for the plurality of light emitting colors provided around the first electrode. The pixel layer is defined inside the region separated by the liquid-repellent layer.
According to this configuration, liquid droplet separation is performed at the end face of the liquid repellent layer, but even if the film thickness varies due to the rise of liquid droplets caused by surface tension at the end face, the pixel region is not affected by the liquid repellent layer. Therefore, the pixel area is an area where the film thickness is stable. It is possible to provide an organic electroluminescent device having excellent lifetime characteristics.
In addition, although an anode is arrange | positioned on a board | substrate, even if it arrange | positions in contact with a board | substrate, it may be arrange | positioned upwards without contacting. In addition, although the arrangement relationship between the anode and the cathode in this embodiment mode is such that the anode is provided on the side close to the substrate, the cathode may be provided on the side close to the substrate.

Further, the organic electroluminescent device of the present invention is formed between either the first electrode or the second electrode and a layer having a light emitting function, and emitting light from the layer having a light emitting function. A pixel restricting portion that restricts the region to form a pixel region, and the layer having the light emitting function is integrally formed across the pixel restricting portion in the region separated by the liquid repellent layer Including
According to this configuration, since the layer having the light emitting function is integrally formed over the pixel restricting portion in the region separated by the liquid repellent layer, the layer having the light emitting function is formed. The coating liquid for forming the film is filled in a wider area, is smoothly filled in the common area surrounded by the liquid repellent layer, and can stably form a stable film thickness, and Only the region having a more stable film thickness defined by the pixel restricting portion is the region contributing to light emission. For this reason, even if there is a region with an unstable film thickness near the end face (boundary surface) of the region separated by the liquid repellent layer, the region is covered with the pixel restricting portion, and a non-light emitting region to which no voltage is applied It becomes. Furthermore, although the step due to the pixel restricting portion cannot be eliminated, the coating layer is more formed because the layer having the light emitting function is integrally formed for a plurality of pixels as compared with the case where the layer is separated for each pixel. It flows on this step in a wide area, and a more stable coating film can be obtained. Therefore, good color separation is possible even for fine pixels, and the film thickness of the layer having a light emitting function in the pixel region is stable, so that the organic electroluminescent device has a long life and high reliability. Can be formed.

The present invention includes the organic electroluminescent device, wherein the liquid repellent layer is a self-assembled film.
With this configuration, since the liquid repellent layer can be formed without using fluorine plasma or the like, it is possible to prevent a decrease in light emission efficiency due to contamination by fluorine plasma.

Further, the present invention includes the organic electroluminescent device, wherein the liquid repellent layer is formed in a line shape so that the region is integrated for each line.
With this configuration, since a common area is provided for each line, fluidization of the coating liquid becomes smoother, and a uniform coating film can be formed.

Further, the present invention includes the organic electroluminescent device according to the above-described organic electroluminescent device, wherein at least the end of the pixel restricting portion that restricts the light emitting region has a thickness of 200 nanometers or less.
The film thickness of the pixel restricting portion is preferably thin in terms of the performance of the layer having a light emitting function formed in the upper layer, but since it is short-circuited when a pinhole or the like is formed, it is preferable that the film thickness is 10 nm to 200 nm. In particular, it can be said that the thickness is particularly preferably 10 nm to 100 nm.

Further, the present invention includes the organic electroluminescent device, wherein an opening end of the pixel restricting portion is positioned inside an inner edge of the opening end of the liquid repellent layer.
According to this configuration, it is possible to exclude the unstable film thickness region including the rising portion due to the presence of the liquid repellent layer from the light emitting region, and thus it is possible to obtain stable and reliable light emission.

In the organic electroluminescent device according to the present invention, an opening end of the liquid repellent layer may be disposed outside an outer end of the first electrode or the second electrode located on the substrate side. Includes the one with the inner edge located.
According to this configuration, it is possible to exclude the unstable film thickness region including the rising portion due to the presence of the liquid repellent layer from the light emitting region, and thus it is possible to obtain stable and reliable light emission.

Further, the present invention provides the organic electroluminescent device, wherein the layer having the light emitting function is integrally formed on the pixel regulating portion side and controls one injection of electrons or holes. Including those containing.
According to this configuration, the charge injection layer has a buffer function for reducing a step caused by the pixel restricting portion with respect to a layer having a light emitting function formed thereon, and a more stable film thickness. Can be obtained.

Further, the present invention includes the above organic electroluminescent device, wherein the charge injection layer is a transition metal oxide layer.
According to this configuration, even if they are integrally formed, there is no lateral leakage and the device is stable, so that it is possible to improve element characteristics.

The present invention includes the organic electroluminescent device, wherein the layer having the light emitting function includes a coating film.
According to this configuration, it is not necessary that all the layers having a light emitting function are coating films, and at least one layer may be a coating film.

The present invention includes the organic electroluminescent device, wherein the pixel restricting portion is an inorganic insulating film.
According to this configuration, the inorganic insulating film can stably ensure excellent insulating properties.

The present invention includes the organic electroluminescent device, wherein the pixel restricting portion is a silicon nitride film.
According to this configuration, since the silicon nitride film is dense and highly insulating, the insulating property can be ensured even if it is thin, so that the step difference can be reduced. Further, silicon oxide may be used instead of the silicon nitride film. Silicon oxide also has high insulating properties, and excellent insulating properties can be secured with a small film thickness.

In addition, the present invention includes the organic electroluminescent device, wherein one electrode defines a pixel region without the pixel restricting portion.
According to this configuration, the thickness can be further reduced.

Further, the present invention provides the above-described method for producing an organic electroluminescent device, wherein, among the layers having the light emitting function, at least a layer having a light emitting region is in a region separated by the liquid repellent layer. Filling a solution of a viscosity of
According to this configuration, it is only necessary to fill a wider area with the solution, so that it is possible to form a uniform coating film without voids.

Further, in the method of manufacturing the organic electroluminescent device according to the present invention, the step of forming the liquid repellent layer includes a step of forming a self-assembled film by a coating method and a step of patterning by ultraviolet irradiation. Including.
With this configuration, since the liquid repellent layer can be formed without using fluorine plasma or the like, it is possible to prevent a decrease in light emission efficiency due to contamination by fluorine plasma.

Further, the present invention provides the above organic electroluminescent device manufacturing method, wherein the transition metal oxide is formed on the entire substrate surface on which the liquid repellent layer is formed by a dry process prior to the step of forming the liquid repellent layer. Including a step of forming a charge injection layer.
According to this configuration, since the transition metal oxide layer is formed by a dry process, the band gap can be reduced, the charge injection characteristics can be improved, and the step difference can be reduced. it can. Note that a charge injection layer (interlayer) such as PEDOT may be formed on the surface of the substrate on which the liquid repellent layer is formed by a coating method prior to the formation of the layer for forming the light emitting region.

Further, the present invention includes the organic electroluminescent device, wherein the filling step is a step of filling the region separated by the liquid repellent layer with a solution by an ink jet method.
According to this configuration, even if the liquid repellent layer crawls up, the light emitting region is restricted by the pixel restricting portion, so that a light emitting region having a stable film thickness can be obtained. In particular, when a large-sized substrate is used, an organic functional film having a uniform thickness can be formed in the substrate, thereby producing an effect that a panel with less light emission unevenness can be manufactured.

Further, the present invention includes the organic electroluminescent device, wherein the filling step is a step of filling the region separated by the liquid repellent layer with a solution by a nozzle coating method or a dispensing method. .
According to this configuration, even if the liquid repellent layer crawls up, the light emitting region is restricted by the pixel restricting portion, so that an effect of obtaining a light emitting region having a stable film thickness can be achieved.

Further, the present invention includes the organic electroluminescent device, wherein the surface of the first electrode and the surface of the layer on which the self-assembled film between the first electrodes is formed are on the same plane. .
According to this configuration, since the surface of the first electrode and the surface of the layer on which the self-assembled film is formed between the first electrodes are on the same plane, the self-assembled film is exposed by ultraviolet irradiation or the like. Thus, when the lyophilic portion is produced, the liquid repellent portion does not remain because the stepped portion is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized.

The present invention includes the above organic electroluminescent device, wherein the end portion of the first electrode has a tapered cross section.
According to this configuration, since the end portion of the first electrode has a taper-shaped cross section, when the lyophilic portion of the self-assembled film is formed by ultraviolet rays, the step portion is not sufficiently exposed to ultraviolet rays. The liquid part does not remain and the film thickness is stabilized.

In the organic electroluminescent device, the present invention has a transparent conductive film on the first electrode, and the width of the transparent conductive film in the liquid repellent layer direction is the liquid repellent layer direction of the first electrode. Including those larger than the width of.
According to this configuration, droplet separation is performed at the end face of the liquid repellent layer, but even if the film thickness varies due to the bulge of the droplet caused by surface tension at this end face, it is defined as a transparent conductive film. The pixel region is defined inside the region separated by the liquid repellent layer, and the pixel region is a region having a stable film thickness. As a result, it is possible to provide an organic electroluminescent device that suppresses variations in light emission luminance within each pixel and light emission unevenness between pixels, is stable and has excellent life characteristics.
Furthermore, the liquid repellent portion does not remain because the stepped portion is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized.

In the organic electroluminescent device according to the present invention, a pixel restricting layer is provided between the first electrodes, and an end portion of the pixel restricting layer covers an end portion of the first electrode. The end of each includes a tapered shape.
According to this configuration, the step of the first electrode end portion is relaxed by the pixel restricting layer formed on the first layer, and the end portion of the pixel restricting layer is tapered, so that it is self-excited by ultraviolet rays. When the lyophilic portion of the organized film is produced, the liquid repellent portion does not remain because the stepped portion is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized.

The figure which shows the principal part of the organic electroluminescent apparatus of Embodiment 1 of this invention, (a) is a top view, (b) is AA sectional drawing of (a). The figure which shows the manufacturing process of the organic electroluminescent apparatus of Embodiment 1 of this invention. The figure which shows the organic electroluminescent apparatus of Embodiment 2 of this invention, (a) is a top view, (b) is AA sectional drawing of (a), (c) is BB of (a). Cross section The figure which shows the organic electroluminescent apparatus of Embodiment 3 of this invention, (a) is a top view, (b) is AA sectional drawing of (a), (c) is BB of (a). Cross section The figure which shows the organic electroluminescent apparatus of Embodiment 4 of this invention, (a) is a top view, (b) is AA sectional drawing of (a), (c) is BB of (a). Cross section The figure which shows the organic electroluminescent apparatus of Embodiment 5 of this invention, (a) is a top view, (b) is AA sectional drawing of (a), (c) is BB of (a). Cross section The figure which shows the organic electroluminescent apparatus of Embodiment 6 of this invention, (a) is a top view, (b) is AA sectional drawing of (a), (c) is BB of (a). Cross section Equivalent circuit diagram of display device according to embodiment 6 of the present invention Layout explanatory diagram of a display device according to a sixth embodiment of the present invention Upper surface explanatory drawing of the display apparatus of Embodiment 6 of this invention. The figure which shows the organic electroluminescent apparatus of Embodiment 7 of this invention. The figure which shows the organic electroluminescent apparatus of Embodiment 8 of this invention. The figure which shows the organic electroluminescent apparatus of Embodiment 9 of this invention. The figure which shows the organic electroluminescent apparatus of Embodiment 10 of this invention.

(Embodiment 1)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A and FIG. 1B are a top view and a cross-sectional view taken along line A-A showing a part of one line of the organic electroluminescent device according to the embodiment of the present invention. As shown in FIG. 1, the organic electroluminescent device according to the first embodiment includes a plurality of organic electroluminescent devices on a glass substrate 11 on which elements (not shown) such as TFTs are formed in a semiconductor thin film laminated on the surface. The organic electroluminescent elements are arranged in a matrix, and have an anode 12 as a first electrode for injecting holes on the glass substrate 11 and an opening in a part of the anode 12. A pixel restricting portion 13 for controlling a light emitting region of a layer having a light emitting function by controlling injection of at least one of holes or electrons, and a layer 14 having a light emitting function for emitting light of a plurality of different colors; The cathode 15 as the second electrode for injecting electrons and the liquid repellent layer 16 that separates regions for each of a plurality of emission colors, and the layer 14 having the light emitting function is the liquid repellent layer 16. Within the isolated area, before And wherein the integrally formed astride over the pixel restricting portion 13. The layer 14 having a light emitting function has an opening of the pixel restricting portion 13 inside the region separated by the liquid repellent layer 16, and the pixel region is defined by this opening. Here, as shown in the enlarged view of the main part in FIG. 2, the liquid repellent layer is composed of a self-organized film pattern formed so as to be separated into lines for each color. A region surrounded by the liquid repellent layer is filled with a resin layer serving as a light emitting layer by an inkjet method or the like, and is integrally formed for each line. An area corresponding to the opening O of the pixel restricting portion 13 is a light emitting area.

  This organic electroluminescent device emits light because the layer 14 having the light emitting function is integrally formed over the pixel restricting portion 13 in the region separated by the liquid repellent layer 16. The coating liquid for forming the functional layer is filled in a wider area, smoothly filled in the common area surrounded by the liquid repellent layer, and is formed with a stable film thickness and uniformity. be able to. In addition, only a region having a more stable film thickness defined by the pixel restricting portion is a region contributing to light emission. For this reason, even if there is a region with an unstable film thickness in the vicinity of the liquid repellent layer 16, the region is covered with the pixel restricting portion 13 and is a region to which no voltage is applied. Furthermore, although the step due to the pixel restricting portion cannot be eliminated, the coating layer is more formed because the layer having the light emitting function is integrally formed for a plurality of pixels as compared with the case where the layer is separated for each pixel. It flows on this step in a wide area, and a more stable coating film can be obtained. Therefore, even if the width direction is narrow, the length direction is integrally formed and long, so that fine color separation is possible, and the thickness of the layer having a light emitting function in the pixel region is stable. It is possible to form a long-life and highly reliable organic electroluminescent element. In addition, the liquid repellent layer is composed of a self-assembled film, which is thin and can be formed without using fluorine plasma, suppresses plasma damage, and provides a highly reliable organic electroluminescent device. It becomes possible.

Next, a method for manufacturing the organic electroluminescent device according to the first embodiment of the present invention will be described.
First, as shown in FIG. 2A, an ITO thin film is formed on a glass substrate 11 by a sputtering method, and this is patterned by photolithography to form an anode 12.

Next, a silicon nitride film is formed by a sputtering method, and this is patterned by photolithography, thereby forming the pixel restricting portion 13.
Subsequently, as shown in FIG. 2B, a metal oxide thin film is formed by vacuum deposition, and this is patterned by photolithography, thereby forming the charge injection layer 14a.

Thereafter, a self-assembled film is formed by a coating method and selectively irradiated with ultraviolet rays to hydrophilize the self-assembled film, and a pattern of the liquid repellent layer 16 is formed as shown in FIG. To do.
Thereafter, as shown in FIG. 2D, a light emitting layer 14b made of a polymer material is applied by a coating method. Then, it is cured by heat treatment.
Finally, the cathode 15 (see FIG. 1) is formed by vapor deposition.

  As described above, according to the method of the present invention, since the light emitting layer 14b formed by applying the polymer material is patterned by the liquid repellent layer, the manufacturing is easy and the area can be increased. In addition, since the liquid repellent layer is formed of a self-assembled film, it is possible to form an organic electroluminescent device with high luminous efficiency and high reliability without being damaged by plasma.

(Liquid repellent layer)
The liquid repellent layer is formed as follows. By forming a self-assembled film made of fluoroalkylsilane or the like on the surface, this functions as a liquid repellent layer and performs a liquid repellent treatment. By this liquid repellent treatment, a liquid repellent layer 16 made of a self-assembled film is formed. The liquid repellent layer 16 causes the liquid material having a light emitting function to have a predetermined contact angle with respect to the entire surface of the anode 12 and the pixel regulating portion 13 formed on the surface.

  The organic molecular film for treating the substrate surface has a functional group that can bind to the substrate and a functional group that modifies the surface properties of the substrate, such as a lyophilic group or a liquid repellent group, on the opposite side (controls the surface energy). And a carbon straight chain or a partially branched carbon chain connecting these functional groups, and is bonded to a substrate and self-assembles to form a molecular film, for example, a monomolecular film.

  A self-assembled film is a compound composed of a binding functional group capable of reacting with a constituent atom of an underlayer such as a substrate and other linear molecules, and having extremely high orientation due to the interaction of the linear molecules Is a film formed by orienting. Since this self-assembled film is formed by orienting single molecules, the film thickness can be extremely reduced, and the film is uniform at the molecular level. That is, since the same molecule is located on the surface of the film, uniform and excellent liquid repellency can be imparted to the surface of the film.

  For example, when fluoroalkylsilane is used as the compound having high orientation, each compound is oriented so that the fluoroalkyl group is located on the surface of the film, and a self-assembled film is formed. Uniform liquid repellency is imparted to the surface.

  Examples of the compound that forms such a self-assembled film include heptadecafluoro-1,1,2,2 tetrahydrodecyltriethoxysilane, heptadecafluoro-1,1,2,2 tetrahydrodecyltrimethoxysilane, heptadeca Fluoro-1,1,2,2 tetrahydrodecyltrichlorosilane, tridecafluoro-1,1,2,2 tetrahydrooctyltriethoxysilane, tridecafluoro-1,1,2,2 tetrahydrooctyltrimethoxysilane, trideca Fluoroalkylsilanes (hereinafter referred to as “FAS”) such as fluoro-1,1,2,2 tetrahydrooctyltrichlorosilane, trifluoropropyltrimethoxysilane, and the like. In use, one compound is preferably used alone, but two or more kinds of compounds may be used in combination. In the present embodiment, it is preferable to use the FAS as the compound that forms the self-assembled film in order to provide adhesion to the substrate and good liquid repellency.

FAS is generally represented by the structural formula RnSiX _(4-n) . Here, n represents an integer of 1 to 3, and X is a hydrolyzable group such as a methoxy group, an ethoxy group, or a halogen atom. R is a fluoroalkyl group, and (CF ₃ ) (CF ₂ ) _x (CH ₂ ) _y [where x is 0
When an integer of 10 or less and y represents an integer of 0 or more and 4 or less] and a plurality of R or X are bonded to Si, R or X may all be the same. , May be different. The hydrolyzable group represented by X forms silanol by hydrolysis and reacts with the hydroxyl group of the base such as the substrate (glass) to bond to the substrate with a siloxane bond. On the other hand, since R has a fluoro group such as (CF ₃ ) on the surface, the base surface such as a substrate is modified to a surface that is difficult to wet (surface energy is low).

  And the liquid repellency can be controlled by partially removing the functional group (for example, fluoro group) of the self-assembled film with ultraviolet light or the like and allowing the hydroxyl group to partially exist on the surface.

In the self-assembled film, the above raw material compound and the object to be processed (in this example, the glass substrate 11 on which the anode and the pixel restricting portion are formed) are placed in the same sealed container. It is formed on the surface of the object to be processed by leaving it for about a day. Further, by maintaining the entire sealed container at, for example, 100 ° C., a self-assembled film can be formed on the surface of the object to be processed in about 3 hours.
Although the method for forming the liquid repellent layer from the gas phase has been described above, the self-assembled film can be formed from the liquid phase. For example, the self-assembled film can be formed on the surface of the object to be processed by immersing the object to be processed in a solution containing the raw material compound, washing and drying.

  Note that before the self-assembled film is formed, pretreatment can be performed by irradiating the surface of the object to be processed with ultraviolet light or washing with a solvent.

(Pixel regulation part)
In addition, a pixel restricting portion 13 that restricts the light emitting region is provided on the light transmitting electrode ITO formed as the anode 12 on the light transmitting glass substrate 11. Here, the thickness of the pixel restricting portion has a lower limit depending on the material and process of the insulating film used for the pixel restricting portion, and it is preferable that the layer having the light emitting function formed in the upper layer is thin in terms of performance. Since it is short-circuited if possible, it is preferably used in the range of 10 nm to 200 nm, particularly preferably 10 nm to 100 nm.

The pixel restricting portion is made of an insulating inorganic material such as SiO ₂ , SiN, SiON, Al ₂ O ₃ , or AlN, or an organic material such as polyimide. However, when the film thickness is an extremely thin region as described above, it is advantageous to use an inorganic material for dielectric breakdown or the like. Inorganic materials other than those described above can be used as long as they have no pinholes and have excellent insulating properties.

(Hole injection layer)
After that, as the hole injection layer 14a, a material such as the above polythiophene-based PEDT: PSS is formed by spin coating, an inkjet method, or a nozzle coating method as long as it is organic. In addition, polyaniline-based materials can also be used. Inorganic hole injection layers are also known, and molybdenum oxide, tungsten oxide, vanadium oxide, ruthenium oxide, and the like are used. In addition, a carbon compound such as fullerene can be deposited and used. These are formed by a vacuum evaporation method, an electron beam evaporation method, or a sputtering method. The film thickness is preferably between 5 nm and 200 nm.
A film formed by vapor deposition or sputtering of a carbon compound such as molybdenum oxide, tungsten oxide, or fullerene is preferably used. In particular, transition metal oxides are particularly preferable because they have a high ionization potential, facilitate hole injection into a light-emitting material, and are excellent in stability. It is effective to increase the hole injection layer that these oxides have a defect level during or after film formation.

(Light emitting layer / interlayer)
An organic semiconductor material is applied on the hole injection layer (14a) to form a light emitting layer (14b). An electron injection layer 14c is formed between the light emitting layer 14b and the cathode. At this time, if an interlayer (intermediate layer) is provided as a hole blocking layer or the like between the light emitting layer and the hole injection layer, the light emission efficiency is improved. As the hole blocking layer, a polyfluorene-based polymer material having a higher LUMO (minimum empty orbit) level or a lower electron mobility than the material used for the light emitting layer is used, but this is not limited. It is not a thing. The light emitting layer may be of any type as long as it can be dissolved in a solvent and coated to form a thin film, including polyfluorene-based, polyphenylene vinylene-based, pendant-type, dendrimer-type, and coating-type low-molecular weight types. The light-emitting layer (layer having a light-emitting function) can include a plurality of materials having a light-emitting function, and the mobility and injectability of holes and electrons, and emission chromaticity can be adjusted. Moreover, when using a luminescent material as a dopant, the coating liquid which mixed the dopant with the host material can be used. As the dopant, a known fluorescent material or phosphorescent material can be used. These materials may be so-called low molecules, polymers or oligomers. It is also possible to take various combinations such as adding a low molecular dopant to a high molecular host material.

(cathode)
In addition, a metal or alloy having a low work function is used as the cathode 15 of the organic electroluminescent element. However, in order to form an organic electroluminescent element having a top emission structure, a conductive film made of a translucent material is used. A transparent cathode can be formed by laminating. The ultra-thin film made of a material having a low work function is not limited to a Ba—Al two-layer structure, but a Ca—Al two-layer structure, or Li, Ce, Ca, Ba, In, Mg, Ti, etc. Metals, oxides thereof, halides typified by fluoride, Mg alloys such as Mg-Ag alloy, Mg-In alloy, Al alloys such as Al-Li alloy, Al-Sr alloy, Al-Ba alloy Etc. are used. Alternatively the ultra-thin film of a laminated structure such as LiO 2 / _Al or LiF / Al, layered structure of the transparent conductive film is also suitable as a cathode material. Further, transition metal oxides such as TiOx, MoOx, WOx, TiOx, and ZnO that have oxygen deficiency and show conductivity can be used as an electron injection layer.

(Layer structure)
The layer structure may be a so-called top emission type in which emitted light is extracted from the opposite side of the substrate in addition to a bottom emission type in which emitted light is extracted from the substrate side. In this case, an anode that reflects light is preferably used as the anode, and a substantially light-transmitting cathode is used as the cathode. The cathode and anode may have a multilayer structure. Furthermore, it is possible to adopt a so-called reverse structure in which the electrode closer to the substrate is a cathode. Even in this structure, there are a bottom emission type and a top emission type.

  Various layer configurations can be adopted as the layer configuration. For example, a three-layer structure of a hole transport layer / electron blocking layer / the above-described organic light emitting material layer (both not shown) may be sequentially formed from the anode 12 side, or the layer 14 having a light emitting function may be formed from the cathode 15 side. A two-layer structure of an electron transport layer / organic light-emitting material layer (both not shown), or a two-layer structure of a hole transport layer / organic light-emitting material layer (both not shown), or the anode 12 in this order from the anode 12 side. It is good also as a 7 layer structure (all are not shown in figure) like a hole injection layer / hole transport layer / electron block layer / organic light emitting material layer / hole block layer / electron transport layer / electron injection layer in this order. Alternatively, the layer 14 having a light emitting function may be a single layer structure made of only the organic light emitting material described above. As described above, in the embodiment, when the layer 14 having a light emitting function is referred to, the layer 14 having a light emitting function has a multilayer structure having functional layers such as a hole transport layer, an electron block layer, and an electron transport layer. Including cases. The same applies to other embodiments described later.

(Embodiment 2)
In this embodiment, an organic electroluminescent device in which organic electroluminescent elements are two-dimensionally arranged is shown. FIG. 3A is a top view, and FIG. 3B is A in FIG. FIG. 3A is a cross-sectional view taken along the line A-B, and FIG. 3C is a cross-sectional view taken along the line B-B in FIG. In the present embodiment, the pixel restricting portions 13 are arranged vertically and horizontally, and an opening O is formed in a region constituting the pixel region Ar. The pixel restricting portion 13 has a liquid repellent layer 16 formed on the hole injection layer 14 a patterned on the anode 12. The opening end of the liquid repellent layer 16 is configured so as to be positioned on the pixel restricting portion 13, that is, the liquid repellent layer 16 is positioned outside the pixel region.

  According to this configuration, liquid droplet separation is performed at the end face of the liquid repellent layer, but even if the film thickness varies due to the rise of liquid droplets caused by surface tension at the end face, the pixel region is not affected by the liquid repellent layer. Therefore, the pixel area is an area where the film thickness is stable. It is possible to provide an organic electroluminescent device having excellent lifetime characteristics.

(Embodiment 3)
Also in the present embodiment, an organic electroluminescent device in which organic electroluminescent elements are two-dimensionally arranged is configured as in the second embodiment. 4A is a top view, FIG. 4B is an AA sectional view of FIG. 4A, and FIG. 4C is a BB sectional view of FIG. 4A. The present embodiment is different from the second embodiment in that the hole injection layer 14a is integrally formed over a plurality of pixel regions above the pixel restricting portion 13; It is formed in the same manner as Form 2. The hole injection layer 14a is arranged vertically and horizontally on the pixel restricting portion 13, and an opening O is formed in a region constituting the pixel region Ar. The pixel restricting portion 13 has a liquid repellent layer 16 formed on the hole injection layer 14 a formed on the anode 12. The opening end of the liquid repellent layer 16 is configured so as to be positioned on the pixel restricting portion 13, that is, the liquid repellent layer 16 is positioned outside the pixel region.

  In addition, a transition metal oxide layer such as molybdenum oxide formed by a dry process is interposed as a hole injection layer 14a continuously formed across a plurality of light emitting portions between the light emitting layer and the anode, and the upper layer Further, an inter layer 14S such as an electronic block layer is disposed.

  That is, the present invention is an organic electroluminescent device in which a plurality of light emitting portions each including at least one set of electrodes and a layer having a light emitting function formed between the electrodes is formed on a substrate, In addition to the light emitting layer made of at least one kind of organic semiconductor, it has a hole injection layer disposed between at least one of the pair of electrodes and the light emitting layer. The oxide layer of the transition metal such as molybdenum oxide is formed continuously over a plurality of light emitting portions. This is because the lateral conductivity is small, and even if it is integrally formed across a plurality of pixels, there is almost no crosstalk, so there is little pixel variation, and it is possible to obtain highly accurate light emission characteristics.

  In this configuration, when the transition metal oxide layer is arranged on the lower layer side than the light emitting layer, the transition metal oxide layer is integrally formed across a plurality of pixels, whereby the interlayer 14S and the light emitting layer 14b are formed. Since the contact angle with respect to the organic light emitting material is the same on both the anode 12 and the pixel restricting portion 13 on the anode 12 and the pixel restricting portion 13, the liquid at the time of application at the open end of the pixel restricting portion 13 is formed. A relatively flat surface can be achieved without a drop. Therefore, it is possible to obtain a pattern with higher accuracy when forming the electrode formed on the layer having the light emitting function.

(Embodiment 4)
Next, a fourth embodiment of the present invention will be described.
Also in the present embodiment, an organic electroluminescent device in which organic electroluminescent elements are two-dimensionally arranged is configured as in the second and third embodiments. 5A is a top view, FIG. 5B is an AA cross-sectional view of FIG. 5A, and FIG. 5C is a BB cross-sectional view of FIG. 5A. In the first to third embodiments, the liquid repellent layer 16 is formed vertically and horizontally. However, in the present embodiment, the liquid repellent layer 16 is formed in a line shape, and the interlayer 14S and the light emitting layer 14b are formed. Are formed so as to form an integral line in the vertical direction. In the present embodiment, as in the second embodiment, the hole injection layer 14 a is formed in a pattern below the pixel restricting portion 13. The pixel restricting portions 13 are arranged vertically and horizontally, and an opening O is formed in a region constituting the pixel region Ar. The pixel restricting portion 13 is formed on a hole injection layer 14a formed on the anode 12, and a liquid repellent layer 16 is further formed thereon. The opening end of the liquid repellent layer 16 is configured so as to be positioned on the pixel restricting portion 13, that is, the liquid repellent layer 16 is positioned outside the pixel region.

  In addition, a transition metal oxide layer such as molybdenum oxide formed by a dry process is interposed as a hole injection layer 14a continuously formed across a plurality of light emitting portions between the light emitting layer and the anode, and the upper layer Further, an inter layer 14S such as an electronic block layer is disposed.

  That is, the present invention is an organic electroluminescent device in which a plurality of light emitting portions each including at least one set of electrodes and a layer having a light emitting function formed between the electrodes is formed on a substrate, In addition to the light emitting layer made of at least one kind of organic semiconductor, a hole injection layer disposed between the anode and the light emitting layer in the set of electrodes is included. The interlayer 14S and the light emitting layer 14b are characterized by being continuously formed in a line shape across a plurality of light emitting portions. This is because the lateral conductivity is small, and even if it is integrally formed across a plurality of pixels, there is almost no crosstalk, so there is little pixel variation, and it is possible to obtain highly accurate light emission characteristics.

  In this configuration, when the interlayer 14S and the light emitting layer 14b are formed, they are integrally formed in a line shape and formed with a stable film thickness in the line direction, while slightly rising near the interface with the liquid repellent layer. However, since the pixel restricting portion 13 is formed on the inner side of the end portion of the liquid repellent layer, the pixel region contributing to light emission is a region having a stable film thickness. It is possible to form an organic electroluminescent element having a high height.

  In addition, according to this configuration, an organic electroluminescent light emitting device having extremely high emission intensity and stable characteristics can be obtained by using an oxide of a transition metal as the charge injection layer. It is possible to maintain stable characteristics without becoming unstable even when the current density is increased, such as PEDOT in which loose coupling due to Coulomb interaction between two kinds of polymer materials is easily released. The emission intensity can be stabilized. Thus, by arranging the charge injection layer made of a transition metal oxide integrally on the substrate side across a plurality of pixels, the light emission intensity of the element over a wide range of current density in the organic electroluminescent light emitting device can be obtained. The luminous efficiency can be maintained at a high level, and the lifetime is also improved. Therefore, even when a transition metal oxide layer is placed on either the substrate side, the upper layer side, or both sides of the layer having a light emitting function, the carrier injection characteristics are stable and the light emission efficiency is improved. Can be achieved. In addition, the oxide used in the present invention is substantially transparent in the visible light region, and has a characteristic that the charge injection characteristics do not change greatly even if the film thickness has some variation.

(Embodiment 5)
Next, a fifth embodiment of the present invention will be described.
In the present embodiment, the anode 12 and the hole injection layer 14a are patterned individually for each element without using the pixel restricting portion 13, and the anode 12 and the hole injection layer are formed on the upper layer. The liquid repellent layer 16 is formed so as to have a rectangular opening O outside the pattern 14a, and an interlayer 14S and a light emitting layer 14b are formed on the liquid repellent layer 16. Therefore, as in the second, third, and fourth embodiments, an organic electroluminescent device in which organic electroluminescent elements are two-dimensionally arranged is configured. 6A is a top view, FIG. 6B is an AA cross-sectional view of FIG. 6A, and FIG. 6C is a BB cross-sectional view of FIG. 6A.
In the present embodiment, the liquid repellent layer 16 is formed so as to have the opening O ₀ and the interlayer 14S.
And the light emitting layer 14b is formed in the opening O ₀ but, in this embodiment, the pixel restricting portion 1
3 is used, the anode and the hole injection layer are individually patterned, thereby defining the pixel region Ar. The opening end of the liquid repellent layer 16 is configured to be located outside the anode 12 and the hole injection layer 14a, that is, outside the pixel region.

  Also here, as the hole injection layer 14a, a transition metal oxide layer such as molybdenum oxide formed by a dry process is used.

  That is, the present invention is an organic electroluminescent device in which a plurality of light emitting portions each including at least one set of electrodes and a layer having a light emitting function formed between the electrodes is formed on a substrate, In addition to the light emitting layer made of at least one kind of organic semiconductor, a hole injection layer disposed between the anode and the light emitting layer in the set of electrodes is included. A pixel region is configured by separately forming an anode, a hole injection layer, an interlayer 14S, and a light emitting layer 14b.

  In this configuration, when the interlayer 14S and the light emitting layer 14b are formed, they are individually formed, and a slight scooping is formed in the vicinity of the interface with the liquid repellent layer, but the anode 12 is located inside the end of the liquid repellent layer. As a result, the pixel region that contributes to light emission is located on the inner side of the scooping region and has a stable film thickness, thus forming a long-life and highly reliable organic electroluminescent device. It becomes possible to do.

(Embodiment 6)
Next, a sixth embodiment of the present invention will be described.
Also in this embodiment, the anode 12 and the hole injection layer 14a are patterned separately for each element without using the pixel restricting portion 13, and the anode 12 and the hole injection layer are formed on the upper layer. The liquid repellent layer 16 is formed in a line shape outside the pattern 14 a, and the interlayer 14 S and the light emitting layer 14 b are integrally formed in the vertical direction on the liquid repellent layer 16. As in the second, third, and fourth embodiments, an organic electroluminescent device in which organic electroluminescent elements are arranged two-dimensionally is configured. 7A is a top view, FIG. 7B is an AA cross-sectional view of FIG. 7A, and FIG. 7C is a BB cross-sectional view of FIG. 7A.
Similar to the fourth embodiment, the liquid repellent layer 16 is also formed in a line shape in this embodiment, and the interlayer 14S and the light emitting layer 14b are integrally formed in a line shape in the vertical direction. However, in this embodiment, the pixel region Ar is defined by individually patterning the anode and the hole injection layer without using the pixel restricting portion 13. The opening (O ₁ ) end of the liquid repellent layer 16 is configured to be located outside the anode 12 and the hole injection layer 14a, that is, outside the pixel region.

  Also here, as the hole injection layer 14a, a transition metal oxide layer such as molybdenum oxide formed by a dry process is used.

  That is, the present invention is an organic electroluminescent device in which a plurality of light emitting portions each including at least one set of electrodes and a layer having a light emitting function formed between the electrodes is formed on a substrate, In addition to the light emitting layer made of at least one kind of organic semiconductor, a hole injection layer disposed between the anode and the light emitting layer in the set of electrodes is included. The anode and the hole injection layer are individually formed to constitute a pixel region, and the interlayer 14S and the light emitting layer 14b are continuously formed in a line across a plurality of light emitting portions. This is because the lateral conductivity is small, and even if it is integrally formed across a plurality of pixels, there is almost no crosstalk, so there is little pixel variation, and it is possible to obtain highly accurate light emission characteristics.

  In this configuration, when the interlayer 14S and the light emitting layer 14b are formed, they are integrally formed in a line shape and formed with a stable film thickness in the line direction, while slightly rising near the interface with the liquid repellent layer. However, since the anode 12 is formed on the inner side of the end portion of the liquid repellent layer, the pixel region contributing to light emission is located on the inner side of the scooping region and becomes a region having a stable film thickness. Therefore, it is possible to form an organic electroluminescent element having a long lifetime and high reliability.

As a modification of this embodiment, in the structure of Embodiments 1 to 7, the transition metal oxide layer may be arranged on the upper layer side than the layer having a light emitting function. In addition, the transition metal oxide layer protects the underlying light-emitting layer and can avoid sputtering damage or plasma damage. Therefore, a sputtering method suitable for a large-area substrate is used for forming the electrode. Can be used. Therefore, a top emission type in which a transparent electrode such as ITO is formed by sputtering on the upper surface of a layer having a light emitting function can also be produced without damage to the organic layer. Also, when the cathode is formed as an individual electrode instead of a single electrode, it is possible to avoid etching damage to the light emitting layer.

  As described above, according to the present invention, it is possible to realize an organic electroluminescent light-emitting device that operates stably over a wide luminance range up to high luminance and has excellent lifetime characteristics.

  According to the present invention, in the organic electroluminescent light emitting device, a pixel restriction in which an effective area of a first electrode (here, an anode) formed on a substrate of the pair of electrodes is formed of an insulating film. The transition metal oxide layer is integrally formed so as to cover the pixel restricting portion.

(Film formation method)
Further, among the functional layers constituting the organic electroluminescent device of the present invention, the formation of the transition metal oxide layer is not limited to the above method, but vacuum deposition, electron beam deposition, molecular beam Desirable are dry processes such as epitaxy, sputtering, reactive sputtering, ion plating, laser ablation, thermal CVD, plasma CVD, and MOCVD. In addition, oxide nanoparticles or the like can also be applied. In this case, the sol-gel method, Langmuir-Blodgett method (LB method), layer-by-layer method, spin coating method, inkjet method, dip coating method, spray method, etc. can be selected as appropriate. Needless to say, any method can be used as long as it can be formed so as to achieve the effects of the present invention.

  When the layer having a light emitting function of the present invention (light emitting layer, or hole injection layer or electron injection layer formed as necessary) is formed of a polymer material, spin coating, casting, dipping It may be a wet film formation method such as a method, a bar coating method, a printing method using a roll, or an ink jet method. This eliminates the need for a large-scale vacuum apparatus, so that it is possible to form a film with an inexpensive facility, and it is possible to easily create an organic electroluminescent element with a large area, and also an organic electroluminescent device. Since the adhesion between each layer of the element is improved, a short circuit in the element can be suppressed, and a highly stable organic electroluminescent element can be formed. When these organic materials are applied, they are generally dissolved in an organic solvent. As long as the boiling time of the solvent allows the drying time, the use of a high-boiling solvent having a boiling point exceeding 200 ° C. results in less drying unevenness.

  The glass substrate 11 is a single plate of colorless and transparent glass. Examples of the glass substrate 11 include transparent or translucent soda lime glass, barium / strontium-containing glass, lead glass, aluminosilicate glass, borosilicate glass, barium borosilicate glass, quartz glass and other transition metal oxide glasses, inorganic fluoride. Inorganic glass such as compound glass can be used. In the case of adopting a top emission structure, an opaque substrate such as silicon can also be used.

(Embodiment 7)
Next, a seventh embodiment of the present invention will be described with reference to FIG.
Fig.11 (a) is a top view of the organic electroluminescent apparatus concerning this Embodiment, FIG.11 (b) is sectional drawing in AA in Fig.11 (a).
In FIG. 11, reference numeral 11 denotes a substrate, which includes a planarizing film described later. Reference numeral 12 denotes an anode. Reference numeral 20 denotes a part where the liquid-repellent self-assembled film is made lyophilic by applying ultraviolet rays, and 26 is a part where the liquid-repellent property is left. FIG. 11 shows (a) substrate preparation, (b) anode formation, (c) self-assembled film formation, (d) lyophilic part / liquid repellent part formation, (e) organic light emitting layer formation, (f) cathode formation. It is a figure of the organic electroluminescent apparatus at the time of finishing the said (D) process in the manufacturing process of the organic electroluminescent apparatus called. FIG.11 (c) is a top view corresponding to Embodiment 6 in the same time, FIG.11 (d) is sectional drawing in AA in FIG.11 (c).
In the present embodiment, the surface 21 of the anode 12 and the surface 22 of the layer on which the self-assembled film is formed between the anodes are on the same plane, and the width 24 of the opening of the liquid repellent layer 26 made of the self-assembled film is It is characterized by being larger than the width 23 of the anode.

  In order to realize such a structure, (a) in the anode forming step, a step of filling the space between the anodes with a planarizing film may be added. That is, as shown in FIG. 11D, after the anode is formed by a normal photolithography process, a resin or the like is spin-coated thicker than the anode, and plasma etching is performed on the entire surface until the surface of the anode appears. Alternatively, a substrate having a step corresponding to the pixel may be prepared, an anode material may be formed on the entire surface, and plasma etching may be performed on the entire surface until the substrate surface appears.

  According to this configuration, since a bank made of an organic material such as a polyimide resin is not used, light emission characteristics are not deteriorated due to contamination of impurities from the organic material. In addition, since the liquid repellent layer can be formed without using fluorine plasma or the like, it is possible to prevent a decrease in light emission efficiency due to contamination by fluorine plasma.

  Further, since the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is larger than the width 23 of the anode, the area on the anode 12 is a stable film thickness. That is, droplet separation is performed at the end face 27 of the liquid repellent layer 26, but even if the film thickness varies due to the bulge of the droplet caused by surface tension at this end face, the pixel region defined as the anode 12 Is defined on the inner side of the region separated by the liquid repellent layer, the pixel region is a region having a stable film thickness. It is possible to provide an organic electroluminescent device which is suppressed, stable and excellent in life characteristics.

  Further, since the surface 21 of the anode 12 and the surface 22 of the layer on which the self-assembled film is formed between the anodes are on the same plane, when the lyophilic portion 20 of the self-assembled film is produced by ultraviolet rays, FIG. The liquid repellent part does not remain because the stepped part such as 28 of d) is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized.

  In addition, when the liquid repellent portion is provided in a line shape as shown in FIG. 11A, since the common area is provided for each line, the fluidization of the coating liquid becomes smoother and a uniform coating film can be formed. . At this time, the anode may have a multilayer structure. In addition, although the arrangement | positioning relationship of the anode and cathode of this Embodiment showed the aspect in which an anode is provided in the side close | similar to a board | substrate, the form in which a cathode is provided in the side close | similar to a board | substrate may be sufficient.

(Embodiment 8)
Next, an eighth embodiment of the present invention will be described with reference to FIG.
FIG. 12A is a plan view of the organic electroluminescent device according to this embodiment, and FIG. 12B is a cross-sectional view taken along line AA in FIG.
In FIG. 12, 11 is a substrate and 12 is an anode. Reference numeral 20 denotes a portion that has been made lyophilic by irradiating the liquid-repellent self-assembled film with ultraviolet rays, and 26 is a portion that remains liquid-repellent.

  FIG. 12 shows (a) substrate preparation, (b) anode formation, (c) self-assembled film formation, (d) lyophilic part / liquid repellent part formation, (e) organic light emitting layer formation, and (f) cathode formation. It is a figure of the organic electroluminescent apparatus at the time of finishing the said (D) process in the manufacturing process of the organic electroluminescent apparatus called. FIG. 12C is a plan view corresponding to the sixth embodiment at the same time, and FIG. 12D is a cross-sectional view taken along line AA in FIG.

  The present embodiment is characterized in that the end portion 30 of the anode 12 has a tapered shape, and the width 24 of the opening of the liquid repellent layer 26 made of a self-organized film is larger than the width 23 of the anode. In order to realize such a structure, (a) in the anode formation process, when patterning the anode in the photolithography process, use a halftone mask at the end portion, and leave a resist whose thickness decreases toward the end portion. That's fine. According to this configuration, since a bank made of an organic material such as a polyimide resin is not used, light emission characteristics are not deteriorated due to contamination of impurities from the organic material. In addition, since the liquid repellent layer can be formed without using fluorine plasma or the like, a decrease in light emission efficiency due to contamination by fluorine plasma can be prevented.

  Further, since the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is larger than the width 23 of the anode, the area on the anode 12 is a stable film thickness. That is, droplet separation is performed at the end face 27 of the liquid repellent layer 26, but even if the film thickness varies due to the bulge of the droplet caused by surface tension at this end face, the pixel region defined as the anode 12 Is defined inside the region separated by the liquid repellent layer. The pixel area is an area with a stable film thickness. As a result, it is possible to suppress variations in light emission luminance within each pixel and light emission unevenness between pixels, and to provide an organic electroluminescent device that is stable and has excellent lifetime characteristics. It becomes possible to provide.

  Furthermore, since the end portion 30 of the anode 12 has a tapered shape, when the lyophilic portion 20 of the self-assembled film is produced by ultraviolet rays, the stepped portions such as 28 in FIG. Therefore, the liquid repellent part does not remain, and the film thickness is stabilized. Also, as shown in FIG. 12 (a), when the liquid repellent part is provided in a line shape, it becomes a common region for each line, so that the fluidization of the coating liquid becomes smoother and a uniform coating film can be formed. Become. The anode may have a multilayer structure. In addition, although the arrangement relationship between the anode and the cathode in this embodiment mode is such that the anode is provided on the side close to the substrate, the cathode may be provided on the side close to the substrate.

(Embodiment 9)
Next, a ninth embodiment of the present invention will be described with reference to FIG.
FIG. 13A is a plan view of the organic electroluminescent device according to the present embodiment, and FIG. 13B is a cross-sectional view taken along line AA in FIG.
In FIG. 13, 11 is a substrate, and 12 is an anode. Reference numeral 20 denotes a portion that has been made lyophilic by irradiating the liquid-repellent self-assembled film with ultraviolet rays, and 26 is a portion that remains liquid-repellent. A transparent conductive film 40 is formed on the anode 12 and below the self-assembled film, and controls optical resonance of the organic electroluminescent device. ITO or the like can be used as the transparent conductive film.

  FIG. 13 shows (a) substrate preparation, (b) anode formation, (c) self-assembled film formation, (d) lyophilic part / liquid repellent part formation, (e) organic light emitting layer formation, and (f) cathode formation. It is a figure of the organic electroluminescent apparatus at the time of finishing the said (D) process in the manufacturing process of the organic electroluminescent apparatus called. FIG.13 (c) is a top view corresponding to Embodiment 6 in the same time, FIG.13 (d) is sectional drawing in AA in FIG.13 (c).

  In the present embodiment, a transparent conductive film 40 having a width 42 wider than the width 41 of the anode 12 is formed on the anode 12, and the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is made of the transparent conductive film. It is characterized by being larger than the width 43. In order to realize such a structure, (a) in the anode forming process, after forming the anode in the photolithography process, a transparent conductive film is formed on the anode by sputtering or the like, and a width wider than the width 41 of the anode 12 is formed. What is necessary is just to pattern by photolithography so that it may have 42.

  According to this configuration, since a bank made of an organic material such as a polyimide resin is not used, light emission characteristics are not deteriorated due to contamination of impurities from the organic material. In addition, since the liquid repellent layer can be formed without using fluorine plasma or the like, a decrease in light emission efficiency due to contamination by fluorine plasma can be prevented. Furthermore, since the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is larger than the width 43 of the transparent conductive film 40, the area on the anode 12 is a stable film thickness.

  That is, droplet separation is performed at the end face 27 of the liquid repellent layer 26, but even if the film thickness varies due to the bulge of the droplet caused by the surface tension at this end face, it is defined as the transparent conductive film 40. A pixel region is defined inside the region separated by the liquid repellent layer. The pixel area is an area with a stable film thickness. As a result, it is possible to suppress variations in light emission luminance within each pixel and light emission unevenness between pixels, and to provide an organic electroluminescent device that is stable and has excellent lifetime characteristics. It becomes possible to provide.

  Further, the step 28 at the end of the anode 12 is relaxed by the transparent conductive film 40 formed on the anode 12, and when the lyophilic portion 20 of the self-assembled film is formed by ultraviolet rays, 28 in FIG. The liquid repellent part does not remain because the stepped part is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized. In addition, when the liquid repellent part is provided in a line shape as shown in FIG. 13A, a common region is provided for each line, so that the fluidization of the coating liquid becomes smoother and a uniform coating film can be formed. . The anode may have a multilayer structure. Further, although the arrangement relationship between the anode and the cathode in the present embodiment shows a mode in which the anode is provided on the side close to the substrate, a mode in which the cathode is provided on the side close to the substrate may be employed.

(Embodiment 10)
Next, a tenth embodiment of the present invention will be described with reference to FIG.
FIG. 14A is a plan view of the organic electroluminescent device according to the present embodiment, and FIG. 14B is a cross-sectional view taken along line AA in FIG.
In FIG. 14, 11 is a substrate and 12 is an anode. Reference numeral 20 denotes a portion that has been made lyophilic by irradiating the liquid-repellent self-assembled film with ultraviolet rays, and 26 is a portion that remains liquid-repellent. Reference numeral 50 denotes a pixel regulating layer formed between the anodes 12 so that the end portion covers the end portion of the anode 12. The pixel regulation layer is formed under the self-assembled film.

  FIG. 14 shows (a) substrate preparation, (b) anode formation, (c) self-assembled film formation, (d) lyophilic part / liquid repellent part formation, (e) organic light emitting layer formation, and (f) cathode formation. It is a figure of the organic electroluminescent apparatus at the time of finishing the said (D) process in the manufacturing process of the organic electroluminescent apparatus called.

FIG. 14C is a plan view corresponding to the sixth embodiment at the same time, and FIG. 14D is a cross-sectional view taken along line AA in FIG. 14C. In the present embodiment, the pixel restricting layer 50 is formed between the anodes 12 so that the end 51 covers the end of the anode 12, and the pixel restricting layer 50 further includes a tapered portion 51 at the end. And the portion 52 other than the end portion has no step, and the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is larger than the width 23 of the anode 12.
In order to realize such a structure, (a) in the anode forming process, after forming the anode in the photolithography process, a pixel regulation layer is formed on the anode thicker than the anode 12 and patterned using a halftone mask. It ’s fine. As the pixel regulation layer, an insulator such as SiO ₂ can be used.

  According to this configuration, since a bank made of an organic material such as a polyimide resin is not used, light emission characteristics are not deteriorated due to contamination of impurities from the organic material. In addition, since the liquid repellent layer can be formed without using fluorine plasma or the like, it is possible to prevent a decrease in light emission efficiency due to contamination by fluorine plasma.

  Further, since the width 24 of the opening of the liquid repellent layer 26 made of a self-assembled film is larger than the width 23 of the anode, the area on the anode 12 is a stable film thickness. That is, droplet separation is performed at the end face 27 of the liquid repellent layer 26, but even if the film thickness varies due to the bulge of the droplet caused by surface tension at this end face, the pixel region defined as the anode 12 Is defined on the inner side of the region separated by the liquid repellent layer, the pixel region is a region having a stable film thickness. As a result, it is possible to provide an organic electroluminescent device that suppresses variations in light emission luminance within each pixel and light emission unevenness between pixels, is stable and has excellent life characteristics.

  Further, the step 28 at the end of the anode 12 is relaxed by the pixel restricting layer 50 formed on the anode 12, and the end 51 of the pixel restricting layer 50 is tapered, so that the self-organized film is formed by ultraviolet rays. When the lyophilic portion 20 is produced, the liquid repellent portion does not remain because the stepped portion as shown in FIG. 14D is not sufficiently exposed to ultraviolet rays, and the film thickness is stabilized.

  Further, when the liquid-repellent portion is provided in a line shape as shown in FIG. 14A, since it becomes a common area for each line, the fluidization of the coating liquid becomes smoother and a uniform coating film can be formed. . At this time, the anode may have a multilayer structure. The arrangement relationship between the anode and the cathode in the present embodiment shows an aspect in which the anode is provided on the side close to the substrate, but the cathode may be provided on the side close to the substrate.

(Embodiment 11)
(Substrate TFT)
Next, a display device using the organic electroluminescent light emitting device of the present invention will be described. The display device of the present embodiment is basically a light emitting device similar to the organic electroluminescent light emitting device of the second embodiment shown in FIG. 3 in which a molybdenum oxide layer is interposed on the anode side as a functional layer. An active matrix display device is configured using the above. FIG. 8 shows an equivalent circuit diagram of the active matrix display device, FIG. 9 shows a layout explanatory diagram, and FIG. 10 shows a top explanatory diagram. This display device has an active matrix type in which a drive circuit is formed in each pixel. This constitutes a display device.

  As shown in FIGS. 8 to 10, the display device 140 includes an organic electroluminescent element (electroluminescent) 110 forming a pixel, a switching transistor 130, and a current transistor 120 as a light detecting element. A plurality of driving circuits composed of two TFTs (T1, T2) and a capacitor C are arranged in the vertical and horizontal directions, and the gate electrode of the first TFT (T1) of each driving circuit arranged in the horizontal direction is connected to the scanning line 143. The scanning signal is supplied, and the drain electrode of the first TFT of each driving circuit arranged in the vertical direction is connected to the data line to supply the light emission signal. A driving power source (not shown) is connected to one end of the electroluminescent element (electroluminescent), and one end of the capacitor C is grounded. Reference numeral 143 denotes a scanning line, 144 denotes a signal line, 145 denotes a common power supply line, 147 denotes a scanning line driver, 148 denotes a signal line driver, and 149 denotes a common power supply line driver.

Sectional explanatory drawing (refer FIG. 3) of the organic electroluminescent element which comprises an organic electroluminescent apparatus, FIG. 10 is an upper surface explanatory drawing of this display apparatus. As shown in FIGS. 3 and 10, on a glass substrate 100 on which a driving thin film transistor (not shown) is formed, an anode (Al) 12, a molybdenum oxide layer (transition metal oxide layer) 14a, and an electron as an organic buffer layer Block layer: Interlayer 14S, light emitting layer 14b (red light emitting layer 14R, green light emitting layer 14G, blue light emitting layer 14B), and cathode 15 are formed to form a top emission type organic electroluminescent element. As the structure, the anode and the charge injection layer are formed separately, the light emitting layer is defined by the silicon oxide layer as the pixel restricting portion 13 and the liquid repellent layer 16, and the cathode 15 is in a direction perpendicular to the anode. It is formed in a running stripe. In this driving thin film transistor, for example, an organic semiconductor layer (polymer layer) is formed on a glass substrate 100, which is covered with a gate insulating film, a gate electrode is formed thereon, and a gate insulating film is formed thereon. Source / drain electrodes are formed through through holes. Then, a polyimide film or the like is applied thereon to form an insulating layer (flat layer), on which an anode (ITO) 12, a molybdenum oxide layer 14a, an interlayer 14S, and a light emitting layer 14b (14R, 14G, 14B) A buffer layer (not shown) made of an organic semiconductor layer, such as a molybdenum oxide layer, and a two-layer cathode 15 (Ba—Al ultrathin film, ITO) are formed to form an organic electroluminescent element. is doing. In FIG. 10, although capacitors and wirings are omitted, they are also formed on the same glass substrate. A plurality of pixels composed of such TFTs and organic electroluminescent elements are formed in a matrix on the same substrate to constitute an active matrix display device.

  The layer 14 having a light emitting function emits light by an ink jet method on the opening O of the liquid repellent layer 16 formed in a pattern of a self-regulating film on the pixel restricting portion 13 formed of a silicon oxide layer (insulating layer). A layer is formed.

That is, in manufacturing, first, the scanning line 143, the signal line 144, the switching TFT 130 formed on the glass substrate 100, the electrode 12 made of an aluminum pattern constituting the pixel electrode (see FIGS. 9 and 3), the transition metal A pixel restricting portion 13 is formed on the oxide layer 13 and then an opening is provided.
Then, a self-assembled film is applied to the upper layer and patterned by irradiating with ultraviolet rays using a mask, thereby forming a pattern of the liquid repellent layer 16.
Thereafter, TFB is applied as a buffer layer as required by an ink jet method. This TFB layer may be applied to the entire surface in the same manner as the transition metal oxide layer, or may be applied only to a portion corresponding to the opening.
Then, after a drying process, a polymer organic EL material corresponding to a desired color (any of RGB) is applied to a position corresponding to the opening by an inkjet method to form a light emitting layer 14b (14R, 14G, 14B). To do.
Further, a buffer layer (not shown) is formed, and finally a cathode 15 (see FIG. 3) is formed in a region where the display pixel 141 is disposed.

According to this configuration, since the pattern of the liquid repellent layer can be formed without using plasma irradiation, an organic electroluminescent device with high luminous efficiency can be obtained, and high-speed driving is possible and reliability. A high display device can be provided. The light emitting layer is filled in an area defined by the liquid repellent layer 16 whose size is controlled with high accuracy in an area larger than the pixel area. For this reason, the light emitting layer can be reliably formed without misalignment by the ink jet method, and the region with unstable film thickness at the peripheral portion does not become a pixel region, so the film thickness and size are controlled with high accuracy. A pixel region having a light emitting layer can be obtained.
Therefore, the light emitting layer is formed on the uniformly formed surface, and the surface can be maintained in a smooth state. The light emitting layer is uniformly formed, there is no electric field concentration, and the electric field applied by the anode and the cathode is reduced. It is uniformly applied to the light emitting layer, and good light emission characteristics can be obtained. Further, each light emitting layer is formed uniformly, and good light emission characteristics can be obtained without variation in light emission characteristics.
Further, when the cathode 15 is formed or patterned, if the light emitting layer is covered with at least a buffer layer made of a molybdenum oxide layer, it can be protected from sputtering damage or plasma damage, and a highly reliable film can be formed. It becomes.

  Next, an example of a lighting device using a light emitting device in which a plurality of electroluminescent elements are two-dimensionally arranged will be described with reference to FIG. For the electroluminescent elements 110 arranged two-dimensionally, for example, a configuration in which all the electroluminescent elements 110 are simultaneously turned on / off can be realized very easily. However, even in such a configuration in which the light is turned on / off all at once, at least one electrode (for example, a pixel electrode made of Al (see the anode 12 in FIG. 3 and the like)) is an individual electroluminescent element 1. It is desirable to have a structure separated into units. This is because even if the display pixel 141 is defective due to some factor, the defect remains in the display pixel 141, so that the manufacturing yield of the entire lighting device can be improved. The lighting device having such a configuration can be applied to a general lighting fixture in a home, for example. In this case, since the lighting device can be configured to be extremely thin, it can be easily installed not only on the ceiling but also on the wall surface.

  In addition, the light emission pattern of the electroluminescent device arranged two-dimensionally can be easily controlled by supplying arbitrary data, and the electroluminescent device according to the present invention can emit light. Since the area can be configured with a size of about 40 μm square, for example, an application can be configured in which data is supplied to the lighting device and also used as a panel type display device. Of course, in this case, the display pixel 141 needs to be painted in red, green, and blue according to the position, but by using the ink jet method, it is possible to increase the number of colors very easily.

  Conventionally, when a lighting device and a display device are compared, the light emission luminance of the lighting device is larger. However, since the electroluminescent element 110 according to the present invention can have a sufficiently large area and has extremely high light emission luminance, the lighting device and the display device can be used together. In this case, the illumination device and the display device require a mechanism for adjusting the light emission luminance due to the difference in function (that is, the use mode). For this mechanism, for example, the configuration shown in the first embodiment is adopted. This can be realized by controlling the drive current to adjust the light emission luminance of each electroluminescent element. That is, when used as a lighting device, all the electroluminescent elements are driven with a larger current, and when used as a display device, the current value is small and controlled according to the gradation (i.e., in the image data). In response, each electroluminescent element may be driven. In such an application, the power source when functioning as a lighting device and the power source when functioning as a display device may be a single power source. However, for example, the dynamic range of a digital-analog converter that controls the drive current is controlled. In the case where the number of gradations when using as a display device is large, the power supply (not shown) connected to the common power supply line 145 shown in FIGS. 8 and 9 is switched according to the use mode. It is desirable to have a configuration. Of course, even in a mode of use as a lighting device, in a mode where brightness control is necessary (that is, a lighting device having a dimming function), it is easily handled by current value control according to the gradation described above. be able to. Moreover, since the electroluminescent element of the present invention can be formed not only on the glass substrate 100 but also on a resin substrate such as PET, it can be applied as various illumination devices.

  Note that the thin film transistor may be an organic transistor. A structure in which an organic electroluminescent element is stacked on a thin film transistor or a structure in which a thin film transistor is stacked on an organic electroluminescent element is also effective.

  In addition, in order to obtain a high-quality electroluminescent display device, an electroluminescent substrate on which an organic electroluminescent element is formed and a TFT substrate on which a TFT, a capacitor, a wiring, and the like are formed are electroluminescent. The electrodes on the cent substrate and the electrodes on the TFT substrate may be bonded so as to be connected using a connection bank (protruding portion serving as a liquid repellent layer).

The transition metal oxide layer is formed so that the specific resistance in the stacking direction is about one third of the specific resistance in the plane direction. In addition, by setting the film thickness to 40 nm, which has not been considered in the past, the surface of the light emitting region can be satisfactorily reduced after the surface is smoothed and smoothed by the thick MoO ₃ layer. It is configured to regulate.

Here, a buffer layer (electron blocking layer) made of TFB is interposed between the thick MoO ₃ layer as the transition metal oxide layer 116 and the first electrode 112 made of the Al layer as the anode. This buffer layer may be omitted.

Example 1
As shown in FIGS. 7A, 7B, and 7C, a hole injection layer made of a molybdenum oxide layer is formed on a glass substrate 11 on which an ITO pattern patterned as an individual electrode is formed as an anode 12. Thereafter, patterning is performed so as to determine the pixel region by dry etching. The pixel size was 120 μm * 300 μm, and the number of pixels was 200 * 200 pixels. Next, the liquid repellent layer 16 was formed with a self-assembled film. That is, the glass substrate on which the anode 12 and the hole injection layer are formed is dipped in a solution for forming a self-assembled film, dried, and then selectively exposed using ultraviolet rays, whereby a self-assembled film in an exposed region is obtained. The line-shaped liquid repellent layer 16 was formed on the pixel restricting portion by removing the film and leaving the liquid repellent layer corresponding to the non-exposed area. The pixel restricting portion and the end portion of the liquid repellent layer were formed so as to be 5 μm apart. Next, a green light emitting material having a TFB of 20 nm and a polyfluorene skeleton as an interlayer was dissolved in a xylene solvent, and formed to have a thickness of 80 nm after drying. In addition, in the inkjet method, it apply | coated in the shape of a line over each pixel pinched | interposed into the liquid repellent layer. Similarly, the red light emitting material and the blue light emitting material were applied in a line shape across the pixels sandwiched between the liquid repellent layers. Thereby, compared with the method of dropping a droplet for each pixel, the variation in the amount of droplets is alleviated and the uniformity when light is emitted is improved. After drying and baking the organic light emitting material, 5 nm of barium and 100 nm of aluminum were vacuum deposited as a cathode. The cathode was formed so as to cover all the pixels on the stripe.

As described above, with respect to the obtained sample, a DC voltage of 7 V was applied between the anode and the cathode, and the emission profile was measured. The light emission profile was taken with a high-definition CCD camera.
Next, the current was set so that these samples had an initial luminance of 5000 cd, constant current driving was performed, and the luminance half-life was measured. As a result, the emission was considered to be very good. It can be seen that the distortion of the profile and the resulting reduction in emission lifetime is improved by the present invention.
Similar results were obtained when tungsten oxide was used instead of molybdenum oxide.

(Example 2)
In Example 1, except that the hole injection layer was formed from molybdenum oxide by PEDT: PSS, good characteristics could be obtained when an organic electroluminescent device was produced in the same manner as in Example 1.

(Example 3)
Next, RGB coating was performed using a low-temperature polysilicon substrate in which a thin film transistor was formed on a glass substrate. A planarizing film was formed on the TFT substrate with an insulating organic material. On the substrate, ITO was formed as a transparent electrode by a sputtering method, and thereafter pixel restricting portions were similarly formed of SiN with respective thicknesses, and dry etching was performed so as to obtain a desired light emitting region. Thereafter, a liquid repellent layer 16 made of a self-assembled film was formed for each pixel column. Thereby, the liquid repellent layer was divided into stripes for each row of elements. That is, as a hole injection layer, tungsten oxide was formed with a thickness of 50 nm by sputtering instead of PEDT: PSS. Tungsten oxide was sputtered entirely including the upper part of the liquid repellent layer. This is characterized in that the resistance in the lateral direction is lower than that of PEDT and crosstalk does not occur. Next, for each row divided by the liquid repellent layer, TFB was applied as an interlayer 14S so as to have a thickness of 20 nm using a dispenser. After drying and baking it, as a light emitting layer, using a dispenser in the same manner, inks of red light emitting material, green light emitting material and blue light emitting material are prepared in each row divided by the liquid repellent layer, and on average Application was performed so as to obtain a thickness of 80 nm. Thereafter, 5 nm of barium and 100 nm of aluminum were vacuum-deposited as a cathode. The cathode was formed so as to cover all the pixels on the stripe. A part of the TFT of the obtained sample was operated by an external circuit, and the light emission state and the lifetime were evaluated. The results obtained with the green light-emitting column were measured.

In this case, the same results and tendency as in Example 1 were obtained.
That is, if the liquid-repellent layer is formed so that the pixel regulating portion film thickness is 200 nm or less and has a stripe-shaped light emitting region and the distance between the end portion of the pixel and the liquid-repellent layer is 5 nm or more, the luminance half-life is reduced. It was shown that the emission profile was almost rectangular.

  The organic electroluminescent device and the image forming apparatus of the present invention are the organic electroluminescent device, particularly uniform light emission luminance within a pixel or stable light emission over a long period of time, which is a problem when the light emitting layer is applied in a coating type. For example, it can be applied not only to applications that require multicolor light emission of televisions and displays, but also to exposure devices, printers, facsimiles, etc. that use monochromatic light emission. In addition, the organic electroluminescent element can obtain the three primary colors of Red, Green, and Blue by selecting an organic light emitting material. For example, when using an exposure apparatus that exposes each color of RGB, a type that directly exposes photographic paper. It can also be applied to the image forming apparatus.

11 glass substrate 12 anode 13 pixel restricting portion 14 emitting function having a layer 15 cathode 16 repellent layer 100 glass substrate _{O, O 0, O 1} opening

Claims (20)

A first electrode formed on the substrate; a layer provided on the first electrode and having a light emitting function having a plurality of different emission colors according to the first electrode; and a layer having the light emitting function A second electrode disposed so as to be sandwiched between the first electrode, and a liquid repellent layer that is provided around the first electrode and separates a region for each of the plurality of emission colors,
An organic electroluminescent device in which the layer having the light emitting function has a pixel region defined inside a region separated by the liquid repellent layer. The organic electroluminescent device according to claim 1,
Formed between either the first electrode or the second electrode and a layer having a light emitting function, and
A pixel restricting portion for restricting a light emitting region of the layer having the light emitting function to form a pixel region;
An organic electroluminescent device in which the layer having the light emitting function is integrally formed across the pixel regulating portion in a region separated by the liquid repellent layer. An organic electroluminescent device according to claim 1 or 2,
An organic electroluminescent device in which the liquid repellent layer is a self-assembled film. The organic electroluminescent device according to claim 2 or 3, wherein the liquid repellent layer is formed in a line shape so that the region is integrated for each line. The organic electroluminescent device according to any one of claims 2 to 4, wherein the thickness of at least an end portion of the pixel restricting portion on the side of restricting the light emitting region is set to 200 nanometers or less. Cent equipment. An organic electroluminescent device according to any one of claims 2 to 5,
An organic electroluminescent device in which an opening end of the pixel restricting portion is positioned inside an inner edge of the opening end of the liquid repellent layer. An organic electroluminescent device according to any one of claims 2 to 5,
An organic electroluminescent device in which an inner edge of an opening end of the liquid repellent layer is positioned outside one outer end located on the substrate side of the first electrode or the second electrode. An organic electroluminescent device according to any one of claims 2 to 7,
The layer having the light emitting function is an organic electroluminescent device including a charge injection layer that is integrally formed on the pixel regulating portion side and controls injection of one of electrons or holes. An organic electroluminescent device according to claim 8,
The organic electroluminescent device, wherein the charge injection layer is a transition metal oxide layer. An organic electroluminescent device according to any one of claims 2 to 9,
The layer having the light emitting function is an organic electroluminescent device including a coating film. An organic electroluminescent device according to any one of claims 2 to 10,
The pixel restricting portion is an organic electroluminescent device that is an inorganic insulating film. It is a manufacturing method of the organic electroluminescent device according to any one of claims 1 to 11,
Prior to forming a layer having at least a light emitting region among the layers having the light emitting function,
Forming a liquid repellent layer;
A method for producing an organic electroluminescent device, comprising a step of filling a solution having a desired viscosity in a region separated by the liquid repellent layer to form a layer having the light emitting region. It is a manufacturing method of the organic electroluminescent device according to claim 10,
The step of forming the liquid repellent layer is a method of manufacturing an organic electroluminescent device including a step of forming a self-assembled film by a coating method and a step of patterning by ultraviolet irradiation. It is a manufacturing method of the organic electroluminescent device according to claim 12,
Prior to the step of forming the liquid repellent layer,
A method for producing an organic electroluminescent device, comprising a step of forming a charge injection layer made of a transition metal oxide on a whole substrate surface on which the liquid repellent layer is formed by a dry process. A method for producing an organic electroluminescent device according to any one of claims 12 to 14,
The filling step includes
A method for producing an organic electroluminescent device, which is a step of filling a region separated by the liquid repellent layer with an ink jet method. A method for producing an organic electroluminescent device according to any one of claims 12 to 15,
The filling step includes
An organic electroluminescent device manufacturing method, which is a step of filling a solution into a region separated by the liquid repellent layer by a nozzle coating method or a dispensing method. An organic electroluminescent device according to claim 3,
An organic electroluminescent device in which a surface of the first electrode and a surface of a layer on which a self-assembled film between the first electrodes is formed are on the same plane. An organic electroluminescent device according to claim 3,
An organic electroluminescent device in which an end portion of the first electrode has a tapered cross section. An organic electroluminescent device according to claim 3,
An organic electroluminescent device having a transparent conductive film on the first electrode, wherein the width of the transparent conductive film in the liquid repellent layer direction is larger than the width of the first electrode in the liquid repellent layer direction. An organic electroluminescent device according to claim 3,
An organic electroluminescent device having a pixel restricting layer between the first electrodes, an end of the pixel restricting layer covering an end of the first electrode, and an end of the pixel restricting layer having a tapered shape.

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