JP2010020206A - Microscope apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope apparatus that reduces the load on a user by reducing the operating time including the time required for inputting an iterative operation and by eliminating the iterative operation, while the microscope apparatus reproduces the iterative operation that can be eliminated without being operated by the user, in the iterative operation performed by the microscope apparatus until the microscope apparatus obtains an image of a sample. <P>SOLUTION: The microscope apparatus includes: an electrically-driven microscope 1 in which each portion of the microscope, which is driven, is made to be electrically driven; a control unit 11 for controlling the electrically-driven microscope 1; an imaging unit 10 for obtaining the image by using the electrically-driven microscope 1; a recording unit 12 for recording an observation condition of the electrically-driven microscope 1; and a controller 13 for inputting and outputting information between the control unit 11 and the controller. Moreover, the control unit 11 operates each portion of the electrically-driven microscope 1 based on the information on the observation condition recorded in the recording unit 12 and the information inputted by the controller 13, so that each portion thereof is driven to move to a predetermined position. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a microscope apparatus that includes an imaging device and in which each part of the microscope is motorized.

  2. Description of the Related Art Conventionally, a microscope apparatus that can reliably and easily reproduce complicated adjustments or settings of a microscope has been proposed. For example, devices have been proposed that adjust the diameter of the aperture stop and field stop according to the aperture of the objective lens to avoid image deterioration due to unnecessary light rays, and those that set an appropriate exposure time according to the specimen. . Patent Document 1 proposes a method for recognizing a specimen from a macro image and reproducing the setting of a microscope. Further, Patent Document 2 proposes a method for reproducing a microscope setting using a past sample image.

According to the above proposal, the operator can easily and surely reproduce the setting of the microscope without depending on the memory, freeing from complicated operation of the microscope, and reducing the burden on the operator. In addition, the microscope setting can be more reliably reproduced by an auxiliary means for reproducing the microscope setting.
JP 2002-14288 A JP 2004-309768 A

  However, in the scene where many specimens are handled, the adjustment of the microscope according to the above proposal is a setup work before the microscope observation, and the majority of the work is the operation of the microscope repeated thereafter. For example, based on cell shape and color information, the microscope stage is moved at a low magnification and then switched to a high magnification for confirmation. In such a microscope operation, a series of operations such as stage movement, objective lens switching, focusing, and objective lens switching are repeated. Such a series of operations is not a complicated operation, but if the number of operations increases, the burden on the user increases. In addition, a burden on the user is also great for operations such as photographing a sample at an accurate constant pitch.

  In view of the above circumstances, the present invention includes the time required for the microscope apparatus to reproduce a repetitive operation that can be omitted without the user's operation and to input the repetitive operation in the repetitive operation until the specimen image acquisition by the microscope. An object of the present invention is to provide a microscope apparatus that reduces the burden on the user by shortening the operation time and eliminating repeated operations.

  In order to achieve the above object, a microscope apparatus according to a first aspect of the present invention includes an electric microscope in which each unit to be driven in the microscope is motorized, a control unit that controls the electric microscope, and an image acquisition by the electric microscope. Image acquisition means capable of recording, recording means for recording observation conditions of the electric microscope, and input / output means for inputting / outputting information to / from the control means, and the control means includes the recording means Control is performed so that each part of the electric microscope is driven to a predetermined position based on the observation condition information recorded in the means and the information input by the input / output means.

  The microscope apparatus according to a second aspect of the present invention is the microscope apparatus according to the first aspect, wherein the input / output means displays an operation item display section that displays a request from the microscope apparatus and the operation item display section. And a response unit that inputs a response to the requested request alternatively.

  The microscope device according to a third aspect of the present invention is the microscope device according to the first aspect, wherein the control unit branches control starting from an instruction to change the observation position, and sets an observation condition based on an instruction to acquire an image. Control is made so as to start recording.

  According to the present invention, in a repetitive operation until the specimen image acquisition by the microscope, the microscope apparatus reproduces a repetitive operation which can be omitted without a user operation, and includes an operation time including a time required for inputting the repetitive operation. The burden on the user can be reduced by shortening and eliminating the repeated operation.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram showing a configuration of a microscope apparatus according to an embodiment of the present invention.
In FIG. 1, an electric microscope 1 includes a focusing unit 4 that moves a sample 3 in the direction of the optical axis 2 and performs focusing, a stage 5 that moves the sample in a plane orthogonal to the optical axis 2, and a plurality of objectives. A revolver 6 that is mounted with a lens and switches an observation magnification, a turret (observation method switching turret) 7 that is mounted with a plurality of cubes and switches the wavelength of fluorescence observation, an epi-illumination light source 8 used for fluorescence observation, and a transmission light source 9 used for transmission observation In addition, an imaging device 10 that acquires an image of the specimen 3 is installed. An optical axis 2 indicates the optical axis of the electric microscope 1. When the revolver 6 and the turret 7 are switched, the objective lens and cube to be used are aligned with the optical axis 2.

  The epi-illumination light source 8 and the transmission light source 9 are automatically turned ON / OFF according to the cube used in the turret 7. In addition, each unit driven in the electric microscope 1 uses, as a driving source, a driving unit configured by a stepping motor that can be driven by a pulse and a sensor such as a photo interrupter that can detect the position of the movable unit with respect to the fixed unit. Thus, open control is performed by the control unit 11. Connected to the control unit 11 is a recording unit 12 that records the settings (including the observation conditions of the electric microscope 1) of each unit of the microscope apparatus. Input to the control unit 11 is performed by the controller 13 connected to the control unit 11. The controller 13 is also input / output means for inputting / outputting information to / from the control unit 11.

FIG. 2 is a front view of the controller 13.
As shown in the figure, on the front side of the controller 13, a Z key 21 for moving the focusing unit 4 to focus on the specimen 3, an XY key 22 for moving the stage 5, An RE key 23 for rotating the revolver 6, a TU key 24 for rotating the turret 7, a response key 25 for an operator to respond to a request from the microscope apparatus, and an operator's next key An operation item display unit 26 for displaying operation items, an image display unit 27 for displaying an image acquired by the imaging apparatus 10, and a START key 28 for inputting a control start instruction for the microscope apparatus are provided. ing. Here, the operation item display unit 26 is also a display unit that displays a request from the microscope apparatus to the operator, and the response key 25 selects “YES” or “NO” as a response (answer) to the request. It is also a key to select and enter.

  Note that the Z key 21, the XY key 22, the RE key 23, and the TU key 24 for setting each part driven in the electric microscope 1 can be operated at any time regardless of the repetitive operation control described below.

  Next, a control example of repetitive operation will be described as a control example of the microscope apparatus according to the present embodiment. Here, an example of the control will be described using a test for Cryptosporidium, which is a water quality test. In this test, a sample stained with fluorescence (for example, staining with FITC (fluorescein isothiocyanate)) is first searched for particles of about 5 μm that exhibit green specific fluorescence by observing with low B (for example, 20 times) B excitation. Next, when the particles are detected, it is checked whether or not a specific form is shown by differential interference method of high magnification (for example, 100 times), and the number is counted. In this examination, when it is confirmed that a specific form is shown by high-magnification differential interference, the part is imaged and left as an image.

  In the control example of the repetitive operation according to the present embodiment, the work is advanced while the worker selects “YES” or “NO” by the response key 25 according to the content displayed on the operation item display unit 26.

FIG. 3 is a flowchart showing an outline of a control example of the repetitive operation. FIG. 4 is a flowchart showing details of a control example of the repetitive operation.
In the following, the outline of the control example will be described first with reference to FIG. 3, and then the details of the control example will be described with reference to FIG. Here, a control example from the start of the first operation to the end of the second operation will be described focusing on a control example at the time of performing the automatic scanning.

  As shown in FIG. 3, in the control example of the repetitive operation according to this embodiment, first, the microscope apparatus is initially set (step (hereinafter simply referred to as “S”) 1). In this initial setting, for example, a counter provided in the control unit 11 is reset.

  Next, it is determined whether or not automatic scanning is performed (S2). If the determination result is YES, an observation range for automatic scanning is input and automatic scanning is performed (S3). On the other hand, if the determination result in S2 is NO, automatic scanning is not performed (S4). In this case, for example, manual scanning is performed.

  Next, it is determined whether or not the current observation position (observation site) is a target point (target site), the observation conditions used in the first screening are recorded in the recording unit 12, and the number of image acquisitions is determined. The counter to be counted is incremented (S5).

  Next, it is determined whether the operation is the first operation or the repetitive operation (the same operation as the first operation), and the following processing is performed according to the determination result (S6). When it is determined that the operation is the first operation, an observation condition input request is displayed on the operation item display unit 26. Further, in this case, the observation condition is recorded in the recording unit 12 as the photographing is performed. On the other hand, when it is determined that the operation is a repetitive operation, the microscope apparatus automatically switches the observation condition from the first operation.

  Next, it is determined whether the operation is the first operation or the repetitive operation, and the following processing is performed according to the determination result (S7). If it is determined that the operation is the first operation, the position change instruction is input by the operator when various observations at the point of interest are completed. On the other hand, if it is determined that the operation is a repetitive operation, the position change request is not displayed to repeat the first operation, and the microscope apparatus automatically changes the position based on the information recorded in the recording unit 12. To control.

  Next, depending on whether the operation is the first operation, the repetitive operation, another observation at the point of interest, the end of the work, or the like, the corresponding processing is performed, and the control branch destination is set to S3. , S4, S6, or end (S8). For example, when it is the first operation and the position change is performed, the detailed observation at the same point has been completed, so the value of the repetitive register m described later is switched to 1 (m = 1) The control branch destination is changed to S3 or S4. When the value of the repeat register m becomes 1 in this way, subsequent operations are controlled as repeat operations. In this case, the value of a counter i described later is recorded in a number register n described later, and the number of observations at the same point is recorded. The value of the number register n is used to determine whether or not the observation at the same point in the subsequent operation is completed.

A control example of such repetitive operations will be described in more detail with reference to FIG.
In the figure, S21 corresponds to S1 in FIG. In S21, the values of the counters provided in the control unit 11 and the registers provided in the recording unit 12 are set to initial values. As a result, the value of the counter i, the value of the number register n, and the value of the repetition register m are set to 0 (i = 0, n = 0, m = 0). Here, i is the value of a counter that counts the number of times an image is acquired by changing the magnification and observation method at the same location. I is also a value indicating an observation condition. In this example, the observation condition i when i = 0 indicates an observation condition in which the objective lens in the revolver 6 is 20 times and the cube in the turret 7 is a B-excitation fluorescent filter. n is the value of the number register of the recording unit 12 in which the number of times counted by the counter is recorded. m is the value of the repeat register of the recording unit 12 in which a value indicating whether the operation is the first operation or the repeat operation is recorded. m = 0 indicates the first operation, and m = 1 indicates the repetitive operation (second and subsequent operations).

  S22 to S24 correspond to S2 in FIG. In S22 to S24, first, “automatic scan?” Is displayed on the operation item display unit 26 (S22), and the operator is inquired whether or not the stage 5 is to be automatically scanned. As described above, the microscope apparatus first confirms the execution of automation of the stage operation that is frequently performed in the repetitive operation with respect to the operator. When the operator depresses “YES” or “NO” of the response key 25 as an answer input to S22, “YES” or “NO” is input as the answer input (S23). When the input in S23 is completed, it is determined from the input contents whether or not automatic scanning is to be performed (S24). Here, when the input of S23 is “YES” of the response key 25, the determination result of S24 is YES, and when the input of the response key 25 is “NO”, the determination result of S24 is NO.

  S25 to S27 correspond to S3 in FIG. In S25 to S27, first, “observation range input?” Is displayed on the operation item display unit 26 (S25), and the operator is inquired about the operation range (observation range) in the automatic scanning of the stage 5. When the operator designates the observation range as an answer input to S25, the designated observation range is inputted as the answer input (S26). Note that the observation range is instructed by the operator by instructing the sample 3 in a rectangular range. Here, the rectangular range is determined by designating two points, the upper left point and the lower right point of the rectangular range, and the two points are determined by the operator's operation of the XY key 22. By moving the stage 5, first, the position that becomes the upper left point of the rectangular range is moved to the center of the image display unit 27, then “YES” of the response key 25 is pressed, and then the lower right position of the rectangular range Is moved to the center of the image display unit 27 and then “YES” of the response key 25 is pressed. When the input of S26 is completed, the objective lens in the revolver 6 and the cube in the turret 7 are switched according to the observation condition i, and the stage 5 is moved to the start point of the automatic scanning range (the above rectangular range) to start automatic scanning ( S27). For example, when i = 0, the revolver 6 is driven to switch the objective lens 20 times, and the turret 7 is driven to switch to the cube of the B excitation fluorescent filter. The moving speed of the stage 5 during automatic scanning is calculated by the control unit 11 according to the input observation condition i, and is automatically set to a speed at which the target point can be confirmed while the stage 5 is moving. Further, the scanning is performed so as to satisfy the designated scanning range (the above rectangular range) by the horizontal scanning, that is, in the manner of the raster scanning for electron beam drawing of the cathode ray tube.

  S28 to 30 correspond to S4 in FIG. In S28 to S30, first, the objective lens in the revolver 6 and the cube in the turret 7 are switched according to the observation condition i (S28). For example, when i = 0, the revolver 6 is driven to switch the objective lens 20 times, and the turret 7 is driven to switch to the cube of the B excitation fluorescent filter. Next, when the operator presses the XY key 22 as an input of the stage position (S29), the stage 5 is moved to the corresponding position (S30).

  S31 to 37 correspond to S5 in FIG. In S31 to S37, first, “change attention point?” Is displayed on the operation item display unit 26 (S31), and whether the position of the image displayed on the image display unit 27 is the attention point of the sample 3 or not. Contact the worker. That is, the operator is inquired as to whether or not the particles from that position emit B excitation of about 5 μm. When the operator depresses “YES” or “NO” of the response key 25 as an answer input to S31, “YES” or “NO” is input as the answer input (S32). When the input in S32 is completed, it is determined from the input contents whether or not it is a point of interest (S33). Here, when the input of S32 is “YES” of the response key 25, the determination result of S33 is YES, and when the response key 25 is “NO”, the determination result of S33 is NO. If the determination result in S33 is YES, the stage 5 is stopped (S34), and the observation condition i is recorded in the recording unit 12 (S35). For example, when i = 0, information indicating that the observation method i is an observation method using a 20-times objective lens and a cube of a B-excitation fluorescent filter is recorded in the recording unit 12. When the recording of the observation condition i is completed, i is incremented (i = i + 1) (S36). For example, when i = 0, i = 1. On the other hand, when the determination result in S33 is NO, the branch destination differs depending on whether or not automatic scanning is selected. When automatic scanning is selected (when the input of S23 is “YES” of the response key 25) (S37 is YES), the process returns to S61, and when automatic scanning is not selected (the input of S23 is a response). If the key 25 is “NO” (NO in S37), the process returns to S62. That is, when automatic scanning is selected, the stage 5 is moved until “YES” of the response key 25 is pressed in S32.

When the process returns to S61, i is set to 0 (S61), and the process returns to S27. When the process returns to S62, i is set to 0 (S62), and the process returns to S29.
S38 to 47 correspond to S6 in FIG. In S38 to S46, it is first determined whether or not the value of the repeat register m is 1 (S38). When this determination result is NO (when the value of the repeat register m is 0 (that is, when it is the first operation)), “change observation condition?” Is displayed on the operation item display unit 26 (S39). Then, the operator is inquired whether to input observation conditions. As an answer input to S39, if the operator operates the RE key 23 and the TU key 24 to observe the point of interest with the objective lens set to 100 times and the observation method as the differential interference observation, the answer input As shown, the observation condition is set such that the objective lens is 100 times and the cube is used for differential interference (S40). As a result, the operator inputs the observation condition i. For example, when i = 1, the observation condition 1 is input. When S40 ends or when S38 becomes YES (that is, the second and subsequent operations), the objective lens in the revolver 6 and the cube in the turret 7 are switched according to the observation condition i (S41). For example, when i = 1, the revolver 6 is driven and the objective lens is switched 100 times according to the observation condition i, and the turret 7 is driven and switched to the cube for differential interference. When S41 is completed, “Imaging?” Is displayed on the operation item display unit 26 (S43), and the operator is inquired whether or not to perform imaging. When the operator depresses “YES” or “NO” of the response key 25 as an answer input to S43, “YES” or “NO” is input as the answer input (S43). When the input of S43 is completed, it is determined from the input contents whether or not shooting (imaging) is performed (S44). Here, when the input of S43 is “YES”, the determination result of S44 is YES, and when the input of S43 is “NO”, the determination result of S44 is NO. If the determination result in S44 is YES, photographing (imaging) is performed (S45), and the observation condition i is recorded in the recording unit 12 (S46). For example, when i = 1, as the observation condition i, information on the observation condition that is a 100 × objective lens and a cube for differential interference is recorded in the recording unit 12. On the other hand, when the determination result in S44 is NO, the branch destination differs depending on whether or not automatic scanning is selected. When automatic scanning is selected (when the input of S23 is “YES” of the response key 25) (S47 is YES), the process returns to S61, and when automatic scanning is not selected (the input of S23 is a response). If the key 25 is “NO” (NO in S47), the process returns to S62. Thus, when the determination result in S44 is NO, it is determined that shooting is unnecessary, and the process returns to the process of changing the observation position.

  S48 to 51 correspond to S7 in FIG. In S48 to 51, it is first determined whether or not the value of the repeat register m is not 0 (S48). When this determination result is NO (when the value of the repetitive register m is 0 (that is, the first operation)), “position change?” Is displayed on the operation item display unit 26 (S49), and the observation position is changed. The operator is inquired whether or not to change the observation position after completing a series of observations. When the operator presses “YES” or “NO” of the response key 25 as an answer input to S49, “YES” or “NO” is input as the answer input (S50). On the other hand, when the determination result in S48 is YES (when m ≠ 0 (when m = 1)), the position is not changed (S51). When the determination result in S48 is YES, the position change flag is set to 0, and when the determination result is NO, the position change flag is set to 1.

  S52 to 59 correspond to S8 in FIG. In S52 to 59, it is first determined from the contents of the position change flag whether or not to change the position (S52). Here, when the content of the position change flag is 1, the determination result of S52 is YES, and when the content of the position change flag is 0, the determination result of S52 is NO. If the determination result in S52 is YES, the repetition register m is set to 1 (m = 1), and the value of the number register n is set to i (n = i) (S53). As described above, m = 1 indicates that the operation is repetitive. For example, when n = 1, n = i indicates that the number of times the image is acquired by changing the magnification and the observation method at the same point (same position) is 1. Indicates that After S53, it is determined whether or not automatic scanning is selected (S54). Here, when automatic scanning is not selected (when the input of S23 is “NO” of the response key 25) (S54 is NO), the process returns to S62. On the other hand, when the automatic scanning is selected (when the input of S23 is “YES” of the response key 25) (S54 is YES), has the scanning range (the above-mentioned observation range) reached the end point? It is determined whether or not scanning is completed (S55). Here, when the determination result is YES, this flow ends, and when it is NO, the process returns to S61. On the other hand, if the determination result in S52 is NO, “End?” Is displayed on the operation item display unit 26 (S56), and the operator is inquired whether to end the work. When the operator presses “YES” or “NO” of the response key 25 as an answer input to S56, “YES” or “NO” is input as the answer input (S57). When the input of S57 is completed, it is determined from the input contents whether or not to end (S58). Here, when the input of S57 is “YES” of the response key 25, the determination result of S58 is YES, and when the input of the response key 25 is “NO”, the determination result of S58 is NO. If the determination result in S58 is YES, this flow ends. On the other hand, if the determination result in S58 is NO, it is determined whether or not the value of the number register n is the same as the value of i (n = i) (S59). If the determination result is YES, The process proceeds to S54, and in the case of NO, the process returns to S36, and observation by another observation method at the same point (same position) is performed. As described above, the repetitive operation is repeatedly performed until an end instruction is given by the operator or until the end point of the scanning range is reached.

  According to the operation shown in FIG. 4, the content recorded in the recording unit 12 by the first operation becomes the content shown in FIG. In the second and subsequent operations (repetitive operations), control is performed based on information on the contents recorded in the recording unit 12.

Here, as an example of the control related to the second and subsequent operations, the control related to the second operation will be described with reference to FIG.
The control for the second operation, that is, the repetitive operation starts from S61 or S62. However, since automatic scanning is selected here, starting from S61, resuming the automatic operation of the stage 5, Processing such as stopping at, recording of observation conditions, etc. is executed. Further, in the control related to the repetitive operation, each part is automatically switched from the information on the content of the first operation recorded in the recording unit 12, and the observation condition is changed.

  In the control related to this repetitive operation, first, i = 0 is set (S61). The setting of i = 0 is resetting of the counter value and resetting of the number of image acquisitions at the same point (same location).

  Next, since i = 0, the revolver 6 is driven and the objective is driven based on the information on the observation condition 0 (20 times the objective lens and the cube is the B excitation cube) recorded in the recording unit 12. The lens is switched to 20 times, and the turret 7 is driven to switch to the cube of the B excitation fluorescent filter. Further, the stage 5 is automatically operated from the point of interest when the response key 25 “YES” is input in the previous S32. Scanning is resumed (S27).

  Next, the process of S31 and 32 is performed. If “YES” is input as an answer input, the determination result in S33 is YES, the stage 5 is stopped (S34), and the observation condition i is recorded in the recording unit 12 (S35). At this time, since i = 0, information on the same condition (information on the observation condition with a 20 × objective lens and a cube of the B excitation fluorescent filter) is overwritten and recorded as the observation condition i.

Next, i = i + 1 is set (S36). At this time, i = 0 + 1 = 1.
Next, determination of S38 is performed. At this time, since m = 1 (that is, repetitive operation), the determination result in S38 is YES, and the processes in S39 and S40 are not performed. Therefore, in repetitive operations, the operator is not required to input observation conditions, and can omit inputting observation conditions.

  If the determination result in S38 is YES, since i = 1, the revolver is based on the information of the observation condition 1 (the objective lens is 100 times and the cube is the differential interference cube) recorded in the recording unit 12. 6 is driven to switch the objective lens 100 times, and the turret 7 is driven to switch to a cube for differential interference (S41). As described above, in the second operation, the observation condition is automatically set from the information recorded in the recording unit 12 at the first operation.

  Next, the processes of S42 and 43 are performed. Here, if “YES” is input as an answer input, the determination result in S44 is YES, photographing is performed (S45), and the observation condition i is recorded in the recording unit 12 (S46). At this time, since i = 1, information on the same condition (information on the observation condition with a 100 × objective lens and a cube for differential interference) is overwritten as the observation condition i.

Next, determination of S48 is performed. At this time, since m = 1 (that is, repetitive operation), the determination result in S48 is YES, and the position change flag is set to 0.
Next, determination of S52 is performed. At this time, since the content of the position change flag is 0, the determination result in S52 is NO. As described above, during the repetitive operation, it is automatically determined whether or not to change the position.

  Next, the processing of S56 and 57 is performed. If “NO” is input as an answer input, the determination result in S58 is NO, and the determination in S59 is performed. At this time, since the value of the number register n is 1 and the value of i is 1, the determination result in S59 is YES.

  If the determination result in S59 is YES, the determination in S54 is performed. At this time, since automatic scanning is selected, the determination result in S54 is YES, and the determination in S55 is performed. At this time, if the scanning is not finished (S55 is NO), the process returns to S61 and the third operation is started. If the scanning is finished (S55 is YES), this flow is finished.

  According to the control example of the repetitive operation according to the present embodiment described with reference to FIGS. 3 to 5, the value of the repetitive operation register m is switched by an observation position change instruction (see S50) from the operator. (See S53), the control can be branched as the first operation when m = 0 and as the repetitive operation when m = 1. In addition, during the repetitive operation, the microscope apparatus switches the setting of the objective lens and the like of the electric microscope 1 from the information recorded in the recording unit 12 without performing the display requesting the change of the observation condition (see S49). Therefore, it is not necessary for the operator to switch the electric microscope 1. That is, the operator can concentrate on the work without being conscious of the next operation of the electric microscope 1, and the burden on the operator in the repetitive operation can be reduced. Furthermore, since the input by the operator is mainly the selection of “YES” or “NO” of the response key 25, the input operation can be simplified, the burden on the microscope operation by the operator can be reduced, and further. The operator can concentrate on the work.

Note that the control example related to the above-described repetitive scanning can be modified as follows.
FIG. 6 is a diagram showing a part of a flowchart showing the modified example, and shows processing added between S26 and S27 shown in FIG.

  As shown in FIG. 6, the process added between S26 and S27 is a process related to the quantitative feed control. In the processing related to the quantitative feed control, first, “quantitative feed?” Is displayed on the operation item display unit 26 (S101), and the operator is inquired whether or not to perform the quantitative feed. When the operator presses “YES” or “NO” of the response key 25 as an answer input to S101, “YES” or “NO” is input as the answer input (S102). When the input of S102 is completed, it is determined from the input contents whether or not the quantitative feed is to be performed (S103). Here, when the input of S102 is “YES” of the response key 25, the determination result of S103 is YES, and when the response key 25 is “NO”, the determination result of S103 is NO.

  If the determination result in S103 is YES, “quantitative feed amount?” Is displayed on the operation item display unit 26 (S104), and the operator is inquired about the quantitative feed amount. When the operator instructs the fixed amount as a response input to S104, the specified fixed amount is input as the response input (S105). The operator instructs the fixed feed amount by operating the XY key 22 to move the stage 5 and pressing “YES” on the response key 25 when the operator moves the stage 5 by a predetermined amount. . In this case, the movement amount when the predetermined amount is moved is determined as the fixed amount. Thus, in the automatic scanning of the stage 5 performed in the next S27, the stage 5 is quantitatively fed by the quantitative feed amount instructed in S105. Such a quantitative feed is useful for frequency inspection and the like.

  On the other hand, when the determination result in S103 is NO, S104 and 105 are skipped, and in the automatic scanning of the stage 5 performed in the next S27, as described with reference to FIG. Move stage 5 below.

  As described above, according to the microscope apparatus according to the present embodiment, the control unit 11 places each part of the electric microscope 1 at a predetermined position based on the observation condition information recorded in the recording unit 12 and the information input to the controller 13. By controlling to drive, the setting of the electric microscope 1 is semi-automatically performed by the microscope apparatus during the repetitive operation, so that the operator can perform the repetitive operation without being aware of the microscope operation. . Therefore, the burden on the operator's microscope operation can be reduced. In addition, the work efficiency can be improved by the smooth repetitive operation.

  In addition, the operation item display unit 26 and the response key 25 clarify the relationship between the input content requested by the microscope apparatus and the response, and the control of the microscope apparatus becomes easy, thereby reducing the burden on the operator. Is possible.

  Further, by processing an observation position change instruction as a starting point of control related to repetitive operations and / or processing an image acquisition instruction (imaging instruction) as a trigger for recording observation conditions, an operator should input items to control. Can be reduced. Therefore, the burden on the operator can be reduced.

  In the microscope apparatus according to the present embodiment, only the revolver 6 and the turret 7 are automatically switched in the repetitive operation. However, the present invention is not limited to this, and the switching of other electric parts is automatically performed. In this case, the same effect can be obtained.

  Although the present invention has been described in detail above, the present invention is not limited to the above-described embodiment, and it is needless to say that various improvements and changes may be made without departing from the gist of the present invention.

It is a figure which shows the structure of the microscope apparatus which concerns on one embodiment. It is a front view of a controller. It is a flowchart which shows the outline | summary of the control example of repetitive operation. It is a flowchart which shows the detail of the example of control of repetitive operation. It is a figure which shows the content recorded on the recording part by operation for the first time. It is a figure which shows a part of flowchart which shows the modification of the example of control which concerns on repeated scanning.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electric microscope 2 Optical axis 3 Specimen 4 Semi-focus part 5 Stage 6 Revolver 7 Turret 8 Incident light source 9 Transmitted light source 10 Imaging device 11 Control part 12 Recording part 13 Controller 21 Z key 22 XY key 23 RE key 24 TU key 25 Response key 26 Operation Item Display Unit 27 Image Display Unit 28 Start Key

Claims (3)

An electric microscope in which each part to be driven in the microscope is motorized;
Control means for controlling the electric microscope;
Image acquisition means capable of acquiring an image with the electric microscope;
Recording means for recording observation conditions of the electric microscope;
Input / output means for inputting / outputting information to / from the control means;
Have
The control means controls to drive each part of the electric microscope to a predetermined position based on the observation condition information recorded in the recording means and the information input by the input / output means.
A microscope apparatus characterized by that. The input / output means includes
An operation item display section for displaying a request from the microscope apparatus;
A response unit that alternatively inputs a response to the request displayed on the operation item display unit;
including,
The microscope apparatus according to claim 1. The control means includes
Branch control from the observation position change instruction as the starting point, and control to start recording the observation conditions from the image acquisition instruction as the starting point.
The microscope apparatus according to claim 1.

Images