JP2010019657A - Inspection device using color illumination - Google Patents

Inspection device using color illumination Download PDF

Info

Publication number
JP2010019657A
JP2010019657A JP2008179784A JP2008179784A JP2010019657A JP 2010019657 A JP2010019657 A JP 2010019657A JP 2008179784 A JP2008179784 A JP 2008179784A JP 2008179784 A JP2008179784 A JP 2008179784A JP 2010019657 A JP2010019657 A JP 2010019657A
Authority
JP
Japan
Prior art keywords
light source
line
line light
camera
color
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008179784A
Other languages
Japanese (ja)
Other versions
JP5268094B2 (en
Inventor
Munetoshi Numata
宗敏 沼田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lossev Technology Corp
Original Assignee
Lossev Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lossev Technology Corp filed Critical Lossev Technology Corp
Priority to JP2008179784A priority Critical patent/JP5268094B2/en
Publication of JP2010019657A publication Critical patent/JP2010019657A/en
Application granted granted Critical
Publication of JP5268094B2 publication Critical patent/JP5268094B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To certainly detect the flaw of an inspection target having a specular inspecting surface using a plurality of color light sources. <P>SOLUTION: This inspection device is constituted so that an optical axis is allowed to coincides with the normal line direction of the inspection surface 2 to arrange a color line TV camera 3, rodlike line light sources 4, 5 and 6 of three colors: red, green and blue are arranged in the position parallel to the linear visual field of the color line TV camera 3 traversing the inspection surface 2 and separated from the optical axis of the color line TV camera 3, a half mirror 7 is arranged between the inspecting surface 2 and the color line TV camera 3, the green color line light source 5 is arranged so that the light thereof is allowed to irradiate the inspecting surface 2 in coaxial relation to the optical axis of the color line TV camera 3 via the half mirror 7, the red color line light source 4 and the blue color line light source 6 are arranged in parallel to each other so as to hold the green color line light source 5 and the lights of both of the red color line light source 4 and the blue color line light source 6 are allowed to irradiate the inspecting surface 2 from an oblique direction via the half mirror 7 so as to hold the light path of the green color line light source 5. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、シリコンウェハ等の鏡面状の検査面に存在する凹凸状の欠陥や汚れ等を、カラー照明を用いて検査する装置に関する。   The present invention relates to an apparatus for inspecting uneven defects, dirt, and the like present on a mirror-like inspection surface such as a silicon wafer by using color illumination.

図２に示すように、検査対象物例えば帯状シート３１の欠陥検査には、カラーラインＴＶカメラ３３と、それぞれが赤色（Ｒ）、緑色（Ｇ）、青色（Ｂ）に発光する３色の棒状のライン光源３４、３５、３６と、ハーフミラー３７とを用いた検査装置が用いられている。ライン光源３５は、ハーフミラー３７を介して帯状シート３１の検査面３２の法線方向から検査面３２に対して光を照射し、ライン光源３４、３６は、ライン光源３５の光路を挟んで斜め方向から検査面３２に対して光を照射し、カラーラインＴＶカメラ３３は、検査面３２の法線方向から矢印方向に走行する帯状シート３１の検査面３２を撮像し、得られた画像信号を画像処理装置３８に送る。   As shown in FIG. 2, for defect inspection of an inspection object, for example, a belt-like sheet 31, a color line TV camera 33 and three-color bar shapes each emitting red (R), green (G), and blue (B). The inspection apparatus using the line light sources 34, 35, and 36 and the half mirror 37 is used. The line light source 35 irradiates the inspection surface 32 with light from the normal direction of the inspection surface 32 of the belt-like sheet 31 via the half mirror 37, and the line light sources 34 and 36 are diagonally sandwiching the optical path of the line light source 35. Light is applied to the inspection surface 32 from the direction, and the color line TV camera 33 images the inspection surface 32 of the belt-like sheet 31 that runs in the direction of the arrow from the normal direction of the inspection surface 32 and outputs the obtained image signal. The image is sent to the image processing device 38.

検査面３２に欠陥がなく平坦な場合、カラーラインＴＶカメラ３３に入光する光は、真上から照射するライン光源３５の反射光が最も強く、ライン光源３４、３６の反射光はライン光源３５の反射光よりも弱くなるため、撮像した画像上でライン光源３５の色がもっとも濃く観察される。これに対し、検査面３２に欠陥、例えば半球状の欠陥穴が存在する場合、光を反射する欠陥穴表面の微小角の違いにより各ライン光源の光の反射角に変化が生じ、カラーラインＴＶカメラ３３に入光する各色の反射光の強弱が変化するため、撮像した画像上で欠陥穴は平坦な場合の色とは異なる色で着色されたように観察される。このように、画像上でのＲ、Ｇ、Ｂの濃度の変化から検査面３２の欠陥を容易に検出することができる。このとき、斜め方向から照射するライン光源（ライン光源３４、３６）の入射角を大きくとれば、欠陥部における反射光の濃淡がより大きく表れ、検査装置の欠陥検出分解能を高めることができる。   When the inspection surface 32 is flat and free from defects, the light incident on the color line TV camera 33 is the strongest reflected light from the line light source 35 irradiated from directly above, and the reflected light from the line light sources 34 and 36 is the line light source 35. Therefore, the color of the line light source 35 is observed most intensely on the captured image. On the other hand, when a defect, for example, a hemispherical defect hole, exists on the inspection surface 32, the light reflection angle of each line light source changes due to a difference in minute angle on the surface of the defect hole that reflects light. Since the intensity of the reflected light of each color that enters the camera 33 changes, the defect hole is observed as if it was colored with a color different from the color when it is flat on the captured image. Thus, the defect of the inspection surface 32 can be easily detected from the change in the density of R, G, and B on the image. At this time, if the incident angle of the line light source (line light source 34, 36) irradiated from an oblique direction is increased, the density of the reflected light at the defect portion appears larger, and the defect detection resolution of the inspection apparatus can be increased.

しかし、鏡面状の検査面を有する検査対象物を検査する場合、例えばシリコンウェハ等の表面を検査する場合、ライン光源の光は検査面３２で鏡面反射し、光がほとんど拡散しないので、ライン光源３４、３６の入射角を大きくとると、ライン光源３５の反射光以外はカラーラインＴＶカメラ３３に入らなくなり、複数のカラー光源を利用した欠陥検査ができなってしまう。   However, when inspecting an inspection object having a mirror-like inspection surface, for example, when inspecting the surface of a silicon wafer or the like, the light from the line light source is specularly reflected by the inspection surface 32 and the light hardly diffuses. If the incident angles 34 and 36 are increased, light other than the reflected light from the line light source 35 cannot enter the color line TV camera 33, and defect inspection using a plurality of color light sources cannot be performed.

また、カラーラインＴＶカメラ３３がすべてのライン光源の反射光を受光できるように
ライン光源３４、３６の入射角を小さくとったりすることもできるが、カラーラインＴＶカメラ３３の視野、ハーフミラー３７との干渉を避けなければならず、小さくできる角度にも限界がある。 In addition, the incident angle of the line light sources 34 and 36 can be reduced so that the color line TV camera 33 can receive the reflected light of all the line light sources, but the field of view of the color line TV camera 33 and the half mirror 37 can be reduced. Interference must be avoided, and the angle that can be reduced is limited.

一方、検査対象物３１の法線に対し、光軸を傾けたカラーラインＴＶカメラ３３とこれと対向する方向に同じ入射角をもつライン光源３５を配置するという方法がある。このときハーフミラー３７は使わず、ライン光源３４とライン光源３６はライン光源３５をはさんで隣接かつ平行に配置され、ライン光源３５の検査対象物３１への入射角よりもライン光源３４の入射角がわずかに小さく、ライン光源３６の入射角がわずかに大きくなるように配置する。このとき、スペクトル（分光特性）の波長では離れている赤色光源と、青色光源とを互いに隣接して配置したりすると、撮像した画像上で赤色に反応する画素、青色に反応する画素の赤色成分、青色成分とが混合してしまい、どのライン光源に反応する画素かを正確に検出しにくくなるという問題が生じる。さらに、得られた画像信号には必ずノイズが含まれ、Ｒ、Ｇ、Ｂの濃度比率にもノイズが含まれ不安定となることから、この問題はさらに顕著となる。また、カメラの光軸が検査面に対して傾いているため、フォーカスを合わせにくいという問題もある。
特許第３５８５２２２号公報 特許第３５８５２２５号公報 On the other hand, there is a method in which a color line TV camera 33 whose optical axis is inclined with respect to the normal line of the inspection object 31 and a line light source 35 having the same incident angle in a direction facing the color line TV camera 33 are arranged. At this time, the half mirror 37 is not used, and the line light source 34 and the line light source 36 are arranged adjacent to and parallel to each other with the line light source 35 interposed therebetween, and the incidence of the line light source 34 is larger than the incident angle of the line light source 35 to the inspection object 31. The angle is slightly small and the line light source 36 is arranged so that the incident angle is slightly large. At this time, if a red light source and a blue light source that are separated at the wavelength of the spectrum (spectral characteristics) are arranged adjacent to each other, the red component of the pixel that reacts to red and the pixel that reacts to blue on the captured image As a result, a problem arises in that it is difficult to accurately detect which line light source the pixel reacts with when the blue component is mixed. Further, since the obtained image signal always includes noise, and the density ratios of R, G, and B also include noise and become unstable, this problem becomes more remarkable. In addition, since the optical axis of the camera is inclined with respect to the inspection surface, there is a problem that it is difficult to focus.
Japanese Patent No. 3585222 Japanese Patent No. 3585225

本発明の課題は、複数のカラー光源を利用して、鏡面状の検査面を有する検査対象物の欠陥を確実に検出できるようにすることである。   An object of the present invention is to make it possible to reliably detect a defect of an inspection object having a specular inspection surface by using a plurality of color light sources.

上記課題のもとに、本発明は、カラー照明を用いた検査装置を、検査対象物（１）の検査面（２）の法線方向に光軸を一致させて配置されるカラーラインＴＶカメラ（３）と、検査面（２）を横切るカラーラインＴＶカメラ（３）のライン状視野に対して平行に設置され、かつカラーラインＴＶカメラ（３）の光軸から離れた位置に配置される赤緑青３色の棒状のライン光源（４，５，６）と、検査面（２）とカラーラインＴＶカメラ（３）との間に配置され、ライン光源（４，５，６）の光を反射して検査面（２）に導くハーフミラー（７）とを有するものとして構成し、ハーフミラー（７）で反射した緑色ライン光源（５）の光がカラーラインＴＶカメラ（３）の光軸と同軸になるように緑色ライン光源（５）を配置し、緑色ライン光源（５）を挟んで赤色ライン光源（４）および青色ライン光源（６）を平行に並べて配置し、ハーフミラー（７）で反射した赤色ライン光源（４）の光およびハーフミラー（７）で反射した青色ライン光源（６）の光が緑色ライン光源（５）の光路を挟んで検査面（２）に対し斜め方向から照射されるようにしている。   Based on the above problems, the present invention provides a color line TV camera in which an inspection apparatus using color illumination is arranged with the optical axis aligned with the normal direction of the inspection surface (2) of the inspection object (1). (3) and the color line TV camera (3) crossing the inspection surface (2) are installed in parallel to the line-shaped visual field, and are arranged at positions away from the optical axis of the color line TV camera (3). It is arranged between the red, green and blue three-color rod-shaped line light source (4, 5, 6) and the inspection surface (2) and the color line TV camera (3), and the light from the line light source (4, 5, 6) It is configured to have a half mirror (7) that is reflected and guided to the inspection surface (2), and the light of the green line light source (5) reflected by the half mirror (7) is the optical axis of the color line TV camera (3). Place the green line light source (5) so that it is coaxial with the green line light source 5) A red line light source (4) and a blue line light source (6) are arranged side by side in parallel with the light of the red line light source (4) reflected by the half mirror (7) and reflected by the half mirror (7). The light of the blue line light source (6) is irradiated from an oblique direction to the inspection surface (2) across the optical path of the green line light source (5).

本発明のカラー照明を用いた検査装置では、鏡面状の検査面が反射した赤緑青３色の複数のライン光源の光をカラーラインＴＶカメラが受光できるように、カラーラインＴＶカメラ、ライン光源、ハーフミラーを配置したから、鏡面状の検査面について複数のカラー光源を利用した欠陥検査ができる。これにより、鏡面状の検査面の欠陥部が撮像した画像上で着色して見えるため、微小欠陥を着実に検出できる。   In the inspection apparatus using the color illumination according to the present invention, the color line TV camera, the line light source, the light source of the plurality of line light sources of red, green, and blue reflected by the specular inspection surface can be received by the color line TV camera. Since the half mirror is arranged, the defect inspection using a plurality of color light sources can be performed on the specular inspection surface. Thereby, since the defect part of the mirror-like inspection surface appears colored on the imaged image, the minute defect can be detected steadily.

カラーラインＴＶカメラの光軸から離れた位置にライン光源を配置し、ライン光源の光をハーフミラーにより反射させて検査面に照射しているから、検査面に対し法線方向からライン光源の光を照射しつつ、カラーラインＴＶカメラを検査面の法線方向に光軸を一致させて配置でき、検査面を法線方向（真上）から撮像することができる。また、カラーラインＴＶカメラを検査面の真上に配置できるから、カラーラインＴＶカメラのフォーカス等を容易に調整できる。   The line light source is arranged at a position away from the optical axis of the color line TV camera, and the light from the line light source is reflected by the half mirror to irradiate the inspection surface. , The color line TV camera can be arranged with the optical axis aligned with the normal direction of the inspection surface, and the inspection surface can be imaged from the normal direction (directly above). Further, since the color line TV camera can be arranged right above the inspection surface, the focus of the color line TV camera can be easily adjusted.

赤緑青３色のライン光源のうち、緑色ライン光源をその光がハーフミラーを介してカラーラインＴＶカメラの光軸と同軸に検査面に照射されるように配置し、緑色ライン光源を挟んで赤色ライン光源および青色ライン光源を平行に並べて配置し、赤色ライン光源および青色ライン光源の光がハーフミラーを介して緑色ライン光源の光路を挟んで検査面に対し斜め方向から照射されるようにしたから、すなわち、スペクトル的に最も離れている赤色ライン光源と青色ライン光源とが最も離れるようにライン光源を配置したから、カラーラインＴＶカメラの撮像画像上で赤色に反応する画素、青色に反応する画素の赤色成分、青成分とが混合してしまうことを防止できる。これにより、光源の色と照射角度とを対応させ、欠陥表面の微小角の違いをこれに対応する光源の色の違いで識別する方法において、撮像した画像上でどの色のライン光源に反応した画素かを正確に検出することができる。特に、撮像した画像上の１画素のＲＧＢ濃度比率からどのライン光源に反応したかを判断するためにライン光源の角度を求めるやり方における角度分解能のＳＮ比を高くすることができる。   Of the three line light sources of red, green, and blue, the green line light source is arranged so that the light is irradiated on the inspection surface coaxially with the optical axis of the color line TV camera via a half mirror, and the red light is sandwiched between the green line light sources. The line light source and the blue line light source are arranged in parallel so that the light from the red line light source and the blue line light source is irradiated from an oblique direction to the inspection surface across the optical path of the green line light source through the half mirror. That is, since the line light sources are arranged so that the spectrally farthest red line light source and blue line light source are farthest apart, pixels that react to red and pixels that react to blue on the captured image of the color line TV camera It is possible to prevent the red component and the blue component from being mixed. As a result, in the method of matching the color of the light source with the irradiation angle and identifying the difference in the minute angle of the defect surface by the difference in the color of the corresponding light source, which color light source responded to the captured image It is possible to accurately detect whether it is a pixel. In particular, it is possible to increase the SN ratio of the angular resolution in the method of obtaining the angle of the line light source in order to determine which line light source has responded from the RGB density ratio of one pixel on the captured image.

図１は、本発明装置のカラー照明を用いた検査装置の一実施例を示している。カラー照明を用いた検査装置は、検査対象物１の鏡面状の検査面２を撮像するカラーラインＴＶカメラ３と、検査面２を横切るカラーラインＴＶカメラ３のライン状視野に対して平行に設置され、かつカラーラインＴＶカメラ３の光軸から離れた位置に配置される赤緑青３色の棒状のライン光源４、５、６と、検査面２とカラーラインＴＶカメラ３との間に配置され、ライン光源４、５、６の光を反射して検査面２に導くハーフミラー７とを有している。なお、検査対象物１は、図の矢印方向へ一定速度で走行している。   FIG. 1 shows an embodiment of an inspection apparatus using color illumination of the apparatus of the present invention. The inspection apparatus using color illumination is installed in parallel to the line-shaped visual field of the color line TV camera 3 that images the mirror-like inspection surface 2 of the inspection object 1 and the color line TV camera 3 that crosses the inspection surface 2. Are arranged between the inspection surface 2 and the color line TV camera 3, and the red, green, and blue three-color rod-shaped line light sources 4, 5, 6 disposed at a position away from the optical axis of the color line TV camera 3. And a half mirror 7 that reflects the light from the line light sources 4, 5, 6 and guides it to the inspection surface 2. The inspection object 1 is traveling at a constant speed in the direction of the arrow in the figure.

カラーラインＴＶカメラ３は、検査対象物１の検査面２の法線方向に光軸を一致させて配置されており、検査対象物１の検査面２を検査面２の真上から撮像し、赤、緑、青の３色のカラー映像信号を画像処理装置８に送る。カラーラインＴＶカメラ３のライン状視野は、検査対象物１の走行方向に対し直交、つまり検査対象物１の検査面２を横切るように設定されている。   The color line TV camera 3 is arranged with the optical axis aligned with the normal direction of the inspection surface 2 of the inspection object 1, images the inspection surface 2 of the inspection object 1 from directly above the inspection surface 2, Three color video signals of red, green and blue are sent to the image processing device 8. The line visual field of the color line TV camera 3 is set so as to be orthogonal to the traveling direction of the inspection object 1, that is, to cross the inspection surface 2 of the inspection object 1.

各ライン光源４、５、６からの光は、それぞれのライン光源管の帯状照射窓により規制されている。これにより、一部の方向だけに照射光が照射されるようになっている。   Light from each line light source 4, 5, 6 is regulated by a strip-shaped irradiation window of each line light source tube. Thereby, irradiation light is irradiated only in a part of direction.

ハーフミラー７および緑色ライン光源５は、ハーフミラー７で反射した緑色ライン光源５の光がカラーラインＴＶカメラ３の光軸と同軸に検査面２に照射されるように配置されている。すなわち、緑色ライン光源５の光は、検査面２に対し真上から照射される。本実施例では、ハーフミラー７は、その反射面とカラーラインＴＶカメラ３の光軸のなす角度が４５°となるように配置され、緑色ライン光源５は、その光軸がカラーラインＴＶカメラ３の光軸に対して直角となるように配置されている。   The half mirror 7 and the green line light source 5 are arranged so that the light of the green line light source 5 reflected by the half mirror 7 is irradiated on the inspection surface 2 coaxially with the optical axis of the color line TV camera 3. In other words, the light of the green line light source 5 is irradiated onto the inspection surface 2 from directly above. In this embodiment, the half mirror 7 is arranged so that the angle formed by the reflection surface thereof and the optical axis of the color line TV camera 3 is 45 °, and the green line light source 5 has the optical axis of the color line TV camera 3. Are arranged so as to be perpendicular to the optical axis.

赤色ライン光源４および青色ライン光源６は、緑色ライン光源５を挟んで平行に並べて配置されている。本実施例では、赤色ライン光源４は緑色ライン光源５の上側に配置され、青色ライン光源６は緑色ライン光源５の下側に配置され、ハーフミラー７で反射した赤色ライン光源４の光およびハーフミラー７で反射した青色ライン光源６の光は、緑色ライン光源５の光路を挟んで検査面２に対し斜め方向から照射されるようになっている。ハーフミラー７で反射した赤色ライン光源４の光の光路と、カラーラインＴＶカメラ３の光軸のなす角度（入射角）は、検査面２で反射した赤色ライン光源４の光（の拡散成分）がカラーラインＴＶカメラ３に入光するように設定される。青色ライン光源６の入射角についても同様である。なお本実施例では、赤色ライン光源４を緑色ライン光源５の上側に設置し、青色ライン光源６を緑色ライン光源５の下側に設置しているが、赤色ライン光源４と青色ライン光源６の位置関係を逆にしてもよい。つまり、緑色ライン光源５を挟んで赤色ライン光源４と青色ライン光源６とが配置されてさえいれば、それらの相対的な位置関係は問わない。   The red line light source 4 and the blue line light source 6 are arranged in parallel with the green line light source 5 interposed therebetween. In the present embodiment, the red line light source 4 is disposed above the green line light source 5, the blue line light source 6 is disposed below the green line light source 5, and the light of the red line light source 4 reflected by the half mirror 7 and the half of the light. The light of the blue line light source 6 reflected by the mirror 7 is applied to the inspection surface 2 from an oblique direction across the optical path of the green line light source 5. The angle (incident angle) formed by the optical path of the light of the red line light source 4 reflected by the half mirror 7 and the optical axis of the color line TV camera 3 is the light (diffuse component) of the red line light source 4 reflected by the inspection surface 2. Is set to enter the color line TV camera 3. The same applies to the incident angle of the blue line light source 6. In this embodiment, the red line light source 4 is installed above the green line light source 5 and the blue line light source 6 is installed below the green line light source 5. The positional relationship may be reversed. That is, as long as the red line light source 4 and the blue line light source 6 are arranged with the green line light source 5 interposed therebetween, the relative positional relationship between them does not matter.

検査対象物１の検査面２が鏡面の場合、反射光の指向性が強くほとんど拡散しないため、反射光は入射角の正反射方向付近の限られた角度範囲でのみ集中して観測される。したがって、各ライン光源の反射光をカラーラインＴＶカメラ３が受光できるようにするためには、赤色ライン光源４および青色ライン光源６の光の入射角は比較的小さく取る必要がある。なお、赤色ライン光源４および青色ライン光源６の検査面２に対する入射角を微調整できるように、各ライン光源の前記帯状照射窓の位置、および各ライン光源の上下方向位置を調整できるようにしてもよい。また、ハーフミラー７の傾斜角度を調整できるようにしてもよい。   When the inspection surface 2 of the inspection object 1 is a mirror surface, the directivity of the reflected light is strong and hardly diffuses, so that the reflected light is concentrated and observed only in a limited angle range near the regular reflection direction of the incident angle. Therefore, in order for the color line TV camera 3 to receive the reflected light of each line light source, the incident angles of the red line light source 4 and the blue line light source 6 need to be relatively small. The position of the band-shaped irradiation window of each line light source and the vertical position of each line light source can be adjusted so that the incident angles of the red line light source 4 and the blue line light source 6 with respect to the inspection surface 2 can be finely adjusted. Also good. Further, the inclination angle of the half mirror 7 may be adjusted.

鏡面状の検査面２に欠陥がなく平坦な場合、カラーラインＴＶカメラ３に入光する光は、真上から照射する緑色ライン光源５の反射光が最も強く、赤色ライン光源４、青色ライン光源６の反射光は緑色ライン光源５の反射光よりも弱くなるため、画像上では緑色ライン光源５の色がもっとも濃く観察される。検査面２に欠陥、例えば半球状の欠陥穴が存在する場合、光を反射する欠陥穴表面の微小角の違いにより各ライン光源の光の反射角に違いが生じ、カラーラインＴＶカメラ３に入光する各色の反射光の強弱が変化するため、画像上で欠陥穴は正常な平坦の場合の色とは異なる色で着色されたように観察される。これにより、検査面２の凹凸状の欠陥を検出することができる。   When the mirror-like inspection surface 2 is flat and has no defect, the light incident on the color line TV camera 3 has the strongest reflected light of the green line light source 5 irradiated from directly above, and the red line light source 4 and the blue line light source. Since the reflected light 6 is weaker than the reflected light of the green line light source 5, the color of the green line light source 5 is observed most intensely on the image. When a defect such as a hemispherical defect hole exists on the inspection surface 2, the reflection angle of the light of each line light source varies depending on the minute angle of the defect hole surface that reflects light, and enters the color line TV camera 3. Since the intensity of the reflected light of each color changes, the defect hole is observed on the image as if it was colored with a color different from the normal flat color. Thereby, the uneven defect of the inspection surface 2 can be detected.

また、鏡面状の検査面２上に汚れや異物がある場合、その部位では、各ライン光源の光は鏡面反射しないで拡散反射する。したがって、検査面２に汚れ等がない正常な面の場合と比べて各ライン光源の反射光の強さは全体的に弱くなる。これにより、検査面２上の汚れや異物を検出することができる。   Further, when there is dirt or foreign matter on the mirror-like inspection surface 2, the light of each line light source is diffusely reflected at that portion without being specularly reflected. Therefore, the intensity of the reflected light of each line light source is generally weaker than that of a normal surface where the inspection surface 2 is free from dirt and the like. Thereby, dirt and foreign matter on the inspection surface 2 can be detected.

上述した実施例では、検査対象物は直線上に走行するものを示したが、円盤状の搬送装置上に載置された検査対象物の欠陥を検出する用途にも本発明を適用できる。この場合、検査対象物の回転方向と交わるようにライン状視野を置く。   In the above-described embodiments, the inspection object is shown as traveling on a straight line, but the present invention can also be applied to applications for detecting defects in the inspection object placed on a disk-shaped transfer device. In this case, the line-shaped visual field is set so as to intersect with the rotation direction of the inspection object.

本発明によるカラー照明を用いた検査装置の斜面図である。1 is a perspective view of an inspection apparatus using color illumination according to the present invention. ラインＴＶカメラを用いた一般的な欠陥検査装置の斜面図である。It is a perspective view of a general defect inspection apparatus using a line TV camera.

符号の説明Explanation of symbols

１ 検査対象物
２ 検査面
３ カラーラインＴＶカメラ
４ 赤色ライン光源
５ 緑色ライン光源
６ 青色ライン光源
７ ハーフミラー
８ 画像処理装置
３１ 帯状シート
３２ 検査面
３３ カラーラインＴＶカメラ
３４ ライン光源
３５ ライン光源
３６ ライン光源
３７ ハーフミラー
３８ 画像処理装置 DESCRIPTION OF SYMBOLS 1 Inspection object 2 Inspection surface 3 Color line TV camera 4 Red line light source 5 Green line light source 6 Blue line light source 7 Half mirror 8 Image processing apparatus 31 Strip sheet 32 Inspection surface 33 Color line TV camera 34 Line light source 35 Line light source 36 Line Light source 37 Half mirror 38 Image processing device

Claims (1)

検査対象物（１）の検査面（２）の法線方向に光軸を一致させて配置されるカラーラインＴＶカメラ（３）と、
検査面（２）を横切るカラーラインＴＶカメラ（３）のライン状視野に対して平行に設置され、かつカラーラインＴＶカメラ（３）の光軸から離れた位置に配置される赤緑青３色の棒状のライン光源（４，５，６）と、
検査面（２）とカラーラインＴＶカメラ（３）との間に配置され、ライン光源（４，５，６）の光を反射して検査面（２）に導くハーフミラー（７）とを有し、
緑色ライン光源（５）は、ハーフミラー（７）で反射した緑色ライン光源（５）の光がカラーラインＴＶカメラ（３）の光軸と同軸になるように配置され、
赤色ライン光源（４）および青色ライン光源（６）は、緑色ライン光源（５）を挟んで平行に並べて配置され、ハーフミラー（７）で反射した赤色ライン光源（４）の光およびハーフミラー（７）で反射した青色ライン光源（６）の光が緑色ライン光源（５）の光路を挟んで検査面（２）に対し斜め方向から照射されるようにしたことを特徴とするカラー照明を用いた検査装置。 A color line TV camera (3) arranged with its optical axis aligned with the normal direction of the inspection surface (2) of the inspection object (1);
Three colors of red, green, and blue that are installed parallel to the line-shaped field of view of the color line TV camera (3) that crosses the inspection surface (2) and that are located away from the optical axis of the color line TV camera (3) A rod-shaped line light source (4, 5, 6);
A half mirror (7) disposed between the inspection surface (2) and the color line TV camera (3) and reflecting the light from the line light sources (4, 5, 6) to the inspection surface (2) is provided. And
The green line light source (5) is arranged so that the light of the green line light source (5) reflected by the half mirror (7) is coaxial with the optical axis of the color line TV camera (3),
The red line light source (4) and the blue line light source (6) are arranged in parallel with the green line light source (5) in between, and the light of the red line light source (4) reflected by the half mirror (7) and the half mirror ( 7) Use of color illumination characterized in that the light of the blue line light source (6) reflected in 7) is irradiated from an oblique direction to the inspection surface (2) across the optical path of the green line light source (5). Inspection equipment.
JP2008179784A 2008-07-10 2008-07-10 Inspection equipment using color illumination Expired - Fee Related JP5268094B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008179784A JP5268094B2 (en) 2008-07-10 2008-07-10 Inspection equipment using color illumination

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008179784A JP5268094B2 (en) 2008-07-10 2008-07-10 Inspection equipment using color illumination

Publications (2)

Publication Number Publication Date
JP2010019657A true JP2010019657A (en) 2010-01-28
JP5268094B2 JP5268094B2 (en) 2013-08-21

Family

ID=41704722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008179784A Expired - Fee Related JP5268094B2 (en) 2008-07-10 2008-07-10 Inspection equipment using color illumination

Country Status (1)

Country Link
JP (1) JP5268094B2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011208941A (en) * 2010-03-26 2011-10-20 Fujitsu Ltd Flaw inspection device and flaw inspection method
JP2013044635A (en) * 2011-08-24 2013-03-04 Kobe Steel Ltd Defect detecting device
JP2014092477A (en) * 2012-11-05 2014-05-19 Ricoh Elemex Corp Inspection device
CN103913465A (en) * 2014-04-04 2014-07-09 北京科技大学 Multi-information fused online high-temperature casting blank surface defect detection method
KR101442770B1 (en) * 2012-09-07 2014-09-23 주식회사 힘스 Substrate inspection apparatus
CN104132946A (en) * 2013-05-03 2014-11-05 政美应用股份有限公司 LED wafer detection apparatus and method thereof
JP2014238292A (en) * 2013-06-06 2014-12-18 株式会社ブリヂストン Appearance inspection device and appearance inspection method
CN107561089A (en) * 2017-09-15 2018-01-09 深圳市牧激科技有限公司 Endoporus detection optical system and endoporus detection device
JP2019117104A (en) * 2017-12-27 2019-07-18 株式会社マイクロ・テクニカ Inspection system
JP2021148633A (en) * 2020-03-19 2021-09-27 Ｎｅｃプラットフォームズ株式会社 Illumination device, illumination device control method, exterior appearance inspection device, and program

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4986082A (en) * 1972-12-21 1974-08-17
JPS63275129A (en) * 1987-05-07 1988-11-11 Toshiba Corp Object shape inspection method
JP2003121371A (en) * 2001-10-10 2003-04-23 Nippon Steel Corp Scratch-inspecting apparatus and method
JP3585222B2 (en) * 2000-12-01 2004-11-04 株式会社ロゼフテクノロジー Inspection equipment using multiple lighting
JP2006313146A (en) * 2005-04-08 2006-11-16 Omron Corp Defect inspection method, and defect inspection device using same
JP2007240434A (en) * 2006-03-10 2007-09-20 Omron Corp Surface condition testing method and surface condition testing device
JP2008241408A (en) * 2007-03-27 2008-10-09 Kyushu Institute Of Technology Method for inspecting defect in surface of object

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4986082A (en) * 1972-12-21 1974-08-17
JPS63275129A (en) * 1987-05-07 1988-11-11 Toshiba Corp Object shape inspection method
JP3585222B2 (en) * 2000-12-01 2004-11-04 株式会社ロゼフテクノロジー Inspection equipment using multiple lighting
JP2003121371A (en) * 2001-10-10 2003-04-23 Nippon Steel Corp Scratch-inspecting apparatus and method
JP2006313146A (en) * 2005-04-08 2006-11-16 Omron Corp Defect inspection method, and defect inspection device using same
JP2007240434A (en) * 2006-03-10 2007-09-20 Omron Corp Surface condition testing method and surface condition testing device
JP2008241408A (en) * 2007-03-27 2008-10-09 Kyushu Institute Of Technology Method for inspecting defect in surface of object

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011208941A (en) * 2010-03-26 2011-10-20 Fujitsu Ltd Flaw inspection device and flaw inspection method
JP2013044635A (en) * 2011-08-24 2013-03-04 Kobe Steel Ltd Defect detecting device
KR101442770B1 (en) * 2012-09-07 2014-09-23 주식회사 힘스 Substrate inspection apparatus
JP2014092477A (en) * 2012-11-05 2014-05-19 Ricoh Elemex Corp Inspection device
CN104132946A (en) * 2013-05-03 2014-11-05 政美应用股份有限公司 LED wafer detection apparatus and method thereof
JP2014238292A (en) * 2013-06-06 2014-12-18 株式会社ブリヂストン Appearance inspection device and appearance inspection method
CN103913465A (en) * 2014-04-04 2014-07-09 北京科技大学 Multi-information fused online high-temperature casting blank surface defect detection method
CN107561089A (en) * 2017-09-15 2018-01-09 深圳市牧激科技有限公司 Endoporus detection optical system and endoporus detection device
CN107561089B (en) * 2017-09-15 2024-04-02 深圳市牧激科技有限公司 Inner hole detection optical system and inner hole detection equipment
JP2019117104A (en) * 2017-12-27 2019-07-18 株式会社マイクロ・テクニカ Inspection system
JP2021148633A (en) * 2020-03-19 2021-09-27 Ｎｅｃプラットフォームズ株式会社 Illumination device, illumination device control method, exterior appearance inspection device, and program

Also Published As

Publication number Publication date
JP5268094B2 (en) 2013-08-21

Similar Documents

Publication Publication Date Title
JP5268094B2 (en) Inspection equipment using color illumination
JP5825278B2 (en) Defect inspection apparatus and defect inspection method
US9062859B2 (en) Wafer edge inspection illumination system
TWI443327B (en) Defect detection device and defect detection method
JP4511978B2 (en) Surface flaw inspection device
TW200813421A (en) Surface inspection device
JP2010117337A (en) Surface defect inspection device
JP2007285983A (en) Method and device for detecting damage or the like of workpiece
US20100245810A1 (en) Inspection method based on captured image and inspection device
JP2019184589A (en) Device and method for inspecting defect
JP6205780B2 (en) Illumination device and inspection device
JP2008128811A (en) Defect inspection device
JP2006292412A (en) Surface inspection system, surface inspection method and substrate manufacturing method
JP3591160B2 (en) Surface inspection equipment
JP2007114125A (en) Method for inspecting film thickness irregularities
JP5890953B2 (en) Inspection device
JP6801860B2 (en) Appearance inspection device for the object to be inspected
TW201629470A (en) Separable multiple illumination sources in optical inspection
TWI786522B (en) Surface inspection device, surface inspection method, steel manufacturing method, steel quality control method, and steel manufacturing equipment
JP2007278989A (en) Apparatus and method for testing
JP2006242828A (en) Surface defect detection device
JP7136064B2 (en) Apparatus for inspecting surface of object to be inspected and method for inspecting surface of object to be inspected
JP2011099726A (en) Surface flaw inspection device and surface flaw inspection method
JP5787668B2 (en) Defect detection device
JP7070537B2 (en) Surface inspection equipment and surface inspection method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110602

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120718

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120820

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130501

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130501

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees