JP2010018740A - Apparatus and method for lamination - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for lamination, with an adhesive scarcely going beyond and capable of more surely removing foams. <P>SOLUTION: The apparatus for lamination has the following scheme: a press tool 22 is placed on sheets 31 and 32 disposed by sandwiching an adhesive therebetween. The underside of the press tool 22 is provided with a plurality of projections arranged zigzag-fashion, and the press tool 22 is unidirectionally moved along a guide rail 23 while pressing the sheets 31 and 32 by these projections. Pressure is applied onto the adhesive in between the sheets 31 and 32 by the projections, and foams are extruded toward the edges of the sheet joint as the press tool 22 moves. Part of the adhesive moves through the gap in between the sheets by the projections' press onto the opposite side to the moving direction of the press tool 22. Thereby, the amount of the adhesive going beyond the edges of the sheet joint may be reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a laminating apparatus and a laminating method for laminating a flexible sheet-like (panel-like or film-like) second member on a first member.

  There are various processes for bonding sheet-like members in the manufacturing process of electronic devices. For example, in a liquid crystal display device used for a display of a television or a computer, there is a step of attaching an optical film on a display panel. A cholesteric liquid crystal display device capable of color display is manufactured by bonding three display panels of a red display panel, a green display panel, and a blue display panel with an adhesive. In this type of electronic device, the display quality is significantly impaired when air bubbles enter the joint. Therefore, the sheet-like members are joined with care so that bubbles do not enter.

Conventionally, a wafer is supported on the surface of a pair of dome-shaped support members that are opposed to each other, and a technique in which a pair of substrates to which an adhesive (sealant) is attached is floated by air, and the wafer is air-aired. A technique for extruding and joining is known.
JP-A-10-123541 Japanese Patent Laid-Open No. 7-66093

  In order to prevent bubbles from entering the joint portion, for example, when a sheet-like member is bonded, it is conceivable to press the top of the sheet with a roller to push out the bubbles from the joint portion. However, in that case, excess adhesive is pushed out to the outside of the joint as well as bubbles.

  In the case of a liquid crystal display device, there is a display panel provided with terminals for connection to a drive circuit at the end of the display panel. When these terminals are covered with an adhesive, the display panel may be electrically connected to the drive circuit. become unable. Therefore, the process of removing the adhesive agent adhering to a terminal is needed. In addition, air bubbles may remain in the joint due to the rotation of the roller. Therefore, there is a demand for a bonding apparatus and a bonding method that prevent adhesives from sticking out and more reliably remove bubbles.

  According to one aspect, a plurality of support members that support a workpiece formed by stacking a first member, an adhesive, and a flexible sheet-like second member, and a plurality of the support members that are spaced apart from each other. A pressing jig that applies pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member; and the pressing jig along the object to be processed And a moving unit that relatively moves the bonding device.

  Moreover, according to another one viewpoint, the process which arrange | positions the to-be-processed object formed by laminating | stacking the 1st member, an adhesive agent, and the flexible sheet-like 2nd member on a support part, and mutual A step of applying pressure to the second member of the object to be processed from the side opposite to the support portion by a pressing jig provided with a plurality of pressure applying members arranged apart from each other; and There is provided a bonding method including a step of relatively moving along a processed object.

  Further, according to another aspect, the first member, an adhesive, and a support portion that supports an object to be processed formed by laminating a flexible sheet-like second member; and the first member And a pressing jig provided with a plurality of pressure applying members arranged in a region corresponding to a joint portion between the second member and the pressure member, and driving the pressure applying members of the pressing jig in a predetermined order. There is provided a bonding apparatus including a pressure application member driving unit that applies pressure to an object to be processed and a control unit that controls the pressure application member driving unit.

  Still further, according to another aspect, a support portion for supporting an object to be processed formed by laminating a first member, an adhesive, and a flexible sheet-like second member, and a pressure applying member. And a pressing jig for applying pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member, and scanning the pressing jig along the object to be processed. A bonding apparatus is provided that includes a scanning unit that applies pressure to the entire joint portion between the first member and the second member, and a control unit that controls the scanning unit.

  Still further, according to another aspect, the step of placing on the supporting portion a workpiece formed by laminating the first member, the adhesive, and the flexible sheet-like second member, and pressure Applying a pressure to the second member of the object to be processed by a pressing jig provided with an applying member; scanning the pressing jig along the object to be processed; And a step of applying pressure to the entire joint with the two members.

  In the bonding apparatus and the bonding method according to the one aspect, a pressing jig having a plurality of pressure application members arranged apart from each other is used. This holding jig is arranged on a member to be processed formed by laminating a first member, an adhesive, and a second member, and moves along the object to be processed. When there is a bubble between the first member and the second member, the bubble is pushed by the adhesive applied with pressure by the pressure application member, and moves with the movement of the holding jig. And finally, it is pushed out of the joint. In this way, bubbles between the first member and the second member are removed.

  In addition, since the pressure jig includes a plurality of pressure application members that are spaced apart from each other, the adhesive between the first member and the second member is applied to the pressure application member when the pressure jig moves. Go through the gap between them. For this reason, the amount of the adhesive that moves in the moving direction of the pressing jig is small, and as a result, the amount of the adhesive that is pushed out to the outside of the joint is also small.

  In the bonding apparatus and the bonding method according to the other aspect described above, a pressure jig provided with a pressure application member is scanned along the workpiece to apply pressure to the entire joint. In this case, if there is a bubble between the first member and the second member, the bubble moves with the movement of the holding jig, and the bubble is finally pushed out of the joint. On the other hand, the adhesive in the vicinity of the pressure application member easily moves to the rear side in the movement direction of the pressure application member through the periphery of the pressure application member. For this reason, the quantity of the adhesive agent extruded to the outer side of a junction part decreases.

  Hereinafter, embodiments will be described with reference to the accompanying drawings.

(First embodiment)
FIG. 1 is a schematic diagram illustrating a configuration of a bonding apparatus according to the first embodiment. FIG. 2A is a plan view (bottom view) of the pressing jig 22 of the bonding apparatus as viewed from below, and FIG. 2B is a front view of the pressing jig 22. Furthermore, FIG. 3 is a schematic diagram showing a bonding method using the bonding apparatus according to the first embodiment.

  As shown in FIG. 1, the bonding apparatus according to the present embodiment includes a table (supporting portion) 21, a holding jig 22, a guide rail 23, a holding jig driving unit (moving unit) 24, and a control unit. 25.

  The table 21 is formed of a glass plate having a flat surface, for example. The two sheets 31 and 32 (first member and second member) to be bonded are placed on the table 21 with an adhesive applied to the upper surface of one sheet 31 as described later.

  A holding jig 22 is disposed above the table 21. The pressing jig 22 is driven by a pressing jig driving unit 24 and moves in a direction parallel to the table 21 along the guide rail 23. The control unit 25 controls the movement of the pressing jig 22 via the pressing jig driving unit 24.

  As shown in FIGS. 2A and 2B, a plurality of columnar protrusions 22 a are arranged in a staggered manner on the lower surface side of the pressing jig 22. The lower end side of these protrusions 22a is formed in a hemispherical shape. In addition, the Y-axis direction of Fig.2 (a) is a moving direction of the pressing jig 22 at the time of bonding.

  The protrusion 22a is formed of a resin having a small sliding friction such as POM (polyacetal). The diameter of the protrusions 22a is 1 mm, for example, and the arrangement pitch in the vertical and horizontal directions (X-axis direction and Y-axis direction in FIG. 2A) is 5 mm, for example. As schematically shown in FIG. 2B, the holding jig 22 is preferably provided with a spring 22 b (biasing member) that presses the protrusion 22 a toward the sheets 31 and 32 with an appropriate pressure. . The width (length in the X-axis direction) of the holding jig 22 is set to be the same as or slightly larger than the width of the sheets 31 and 32 to be joined.

  As shown in FIG. 3, an adhesive 33 is applied to the upper surface of one sheet 31, and the other sheet 32 is joined thereon. At least the upper sheet 32 has flexibility, and when it is joined to the sheet 31, it is arranged slightly curved or inclined upward as shown in FIG. Then, the pressing jig 22 is disposed on the sheet 32, pressure is applied to the sheet 32, and the pressing jig 22 is gradually moved from one side toward the other side. Although depending on the adhesive to be used, the moving speed of the pressing jig 22 is preferably about 1 to 5 mm / second.

  FIG. 4 is a schematic diagram showing the movement of the adhesive accompanying the movement of the holding jig 22. When pressure is applied to the sheet 32 by the holding jig 22, a portion of the sheet 32 that is in contact with the protrusion 22 a is bent, and the pressure is transmitted to the adhesive 33. In FIG. 4, a portion indicated by reference numeral 51 indicates a region that receives the pressure most strongly by the protrusion 22a, and a portion indicated by reference numeral 52 indicates a region around the region 51 that receives the pressure slightly by the protrusion 22a. Further, a portion indicated by reference numeral 53 indicates a region around the region 52 and receives a strong pressure by the projection 22a, and a reference symbol 54 indicates a region around the region 53 and receives a low pressure by the protrusion 22a. Further, reference numeral 55 denotes a region where the pressure by the protrusion 22a of the pressing jig 22 is not substantially transmitted.

  In the present embodiment, the protrusions 22a of the holding jig 22 are arranged in a staggered manner, and the sheet 32 is pressed with an appropriate pressure. Therefore, as shown in FIG. 4, the pressure is applied to the adhesive in the forward direction of the protrusion 22a by the movement of the pressing jig 22, and the bubbles 33a are pressed by the pressure of the adhesive to join the joints of the sheets 31, 32. Move towards the end of the. Finally, the bubbles 33a are pushed out to the outside of the joint portion of the sheets 31 and 32. Thereby, it is possible to prevent the bubbles 33a from remaining between the sheets 31 and 32.

  Further, since the pressure is applied to the adhesive 33 in front of the movement direction of the protrusion 22a by the movement of the pressing jig 22, the adhesive 33 moves to a lower pressure. In this embodiment, since the protrusions 22a are arranged in a staggered manner, a part of the adhesive 33 is pressed and cured through a region where the pressure between the protrusions 22a is low, as indicated by a black arrow in FIG. The tool 22 moves backward in the moving direction. Thereby, the amount of adhesive in the moving direction of the holding jig 22 is reduced, and the amount of adhesive pushed out to the outside of the joint portion of the sheets 31 and 32 is remarkably reduced. Therefore, the terminals arranged at the end portions of the sheets 31 and 32 are not covered with the adhesive, and the process of removing the adhesive attached to the terminals can be omitted.

  In the above embodiment, the case where the holding jig 22 moves on the sheets 31 and 32 has been described. However, the position of the holding jig 22 may be fixed and the sheets 31 and 32 may move. Further, both the holding jig 22 and the sheets 31 and 32 may be moved.

(Liquid crystal display device)
A cholesteric liquid crystal display device capable of color display is manufactured by bonding together a red display panel, a green display panel, and a blue display panel with an adhesive. In this case, if bubbles enter between the display panels, the display quality is significantly impaired.

  FIG. 5A is a plan view showing an example of a display panel of a cholesteric liquid crystal display device, and FIG. 5B is a sectional view of the same.

  The display panel 35 has a structure in which a cholesteric liquid crystal layer 13 is sandwiched between a lower transparent substrate 11 and an upper transparent substrate 15 as shown in a sectional view of FIG. Both the lower transparent substrate 11 and the upper transparent substrate 15 are formed of a flexible resin film or the like. In addition, a spacer (not shown) is disposed between the transparent substrates 11 and 15, and the interval between the transparent substrates 11 and 15 is kept constant.

  As shown in FIGS. 5A and 5B, a plurality of row electrodes 12 extending in the horizontal direction are arranged on the upper surface (surface on the liquid crystal side) of the transparent substrate 11 side by side at a constant pitch in the vertical direction. ing. A plurality of column electrodes 14 extending in the vertical direction are arranged on the lower surface (liquid crystal side surface) of the transparent substrate 15 side by side at a constant pitch in the horizontal direction.

  The row electrodes 12 and the column electrodes 14 extend to the outside of the display portion (indicated by a one-dot chain line in FIG. 5), and the tip portions serve as terminals connected to the drive circuit. The row electrode 12 and the column electrode 14 are made of a transparent conductor such as ITO (Indium-Tin Oxide). A portion where the row electrode 12 and the column electrode 14 intersect each other is a pixel. An image can be displayed on the display panel 32 by electrically controlling the state of the cholesteric liquid crystal for each pixel.

  The display color of the display panel 32 is related to the twist pitch of the liquid crystal molecules. Using the bonding apparatus according to any one of the first embodiment described above and the second to fourth embodiments described later, the red display panel, the green display panel, and the blue display panel are overlapped and joined. Thus, a display device capable of color display (multicolor display) is manufactured.

  In addition, it cannot be overemphasized that the bonding apparatus of 1st Embodiment mentioned above and the 2nd-4th embodiment mentioned later can be used not only for bonding of a liquid crystal panel but for bonding of other sheet-like members. is there.

(Modification)
6A and 6B are a bottom view and a front view showing Modification 1 of the holding jig. Moreover, Fig.7 (a), (b) is the bottom view and front view which show the modification 2 of a pressing jig.

  In Modification 1 shown in FIGS. 6A and 6B, two jig units 62 a and 62 b are arranged in parallel to form a holding jig 61. In the jig unit 62a, a plurality of protrusions 63a are arranged in a straight line at a constant pitch in the longitudinal direction of the jig unit 62a. In addition, a plurality of protrusions 63b are also arranged on the jig unit 62b in a straight line at a constant pitch in the longitudinal direction of the jig unit 62b. However, the arrangement of the protrusions 63a of the jig unit 62a is shifted by 1/2 pitch from the arrangement of the protrusions 63b of the jig unit 62b so that the protrusions 63a and 63b are arranged in a staggered manner. The protrusions 63a and 63b are formed in a cylindrical shape with a diameter of 1 mm by a resin such as POM, and the tips thereof are hemispherical.

  7 (a) and 7 (b), a predetermined number of jig units 64 each provided with only one cylindrical protrusion 64a made of a resin such as POM are provided in the horizontal and vertical directions. Only the holding jig 65 is arranged side by side. Also in this case, the protrusions 64a are arranged in a staggered pattern.

  In these modified examples 1 and 2, a plurality of jig units (jig units 62a, 62b, 64) are combined in accordance with the size of a member (sheet) to be joined, etc., and a holding jig (pressing jig 61, 65). Accordingly, it is possible to cope with the bonding of sheets of various sizes.

  FIG. 8 is a bottom view showing a third modification of the holding jig, and FIGS. 9A and 9B are views showing the operation thereof.

  Similar to the holding jig 61 of the first modification, the holding jig 68 of the third modification has two jig units 62 a and 62 b arranged in parallel. These jig units 62a and 62b are moved in the vertical direction by actuators 69a and 69b driven by signals supplied from the control unit 25.

  FIG. 10 is a timing chart of signals supplied from the control unit 25 to the actuators 69a and 69b. In this timing chart, when the signal is at “H” level, the jig unit 62a (or the jig unit 62b) moves downward, and as shown in FIG. 9A, the protrusion 63a (or protrusion 63b). ) Presses the sheet 32. When the signal is at the “L” level, the jig unit 62a (or the jig unit 62b) moves upward, and the protrusion 63a (or the protrusion 63b) becomes the sheet 32 as shown in FIG. 9B. Get away from. The timing for raising and lowering the holding jig units 62a and 62b is set according to the moving speed of the holding jig 68, the viscosity of the adhesive, and the like.

  As described above, in the first embodiment (see FIGS. 1 to 4), as the pressing jig 22 moves, the adhesive 33 moves to the rear side in the moving direction through the gap between the protrusions 22a. . In Modification 3, as shown in FIGS. 9 and 10, the holding jig units 62a and 62b are sequentially moved in the vertical direction, so that the adhesive 33 easily passes between the protrusions 63a and 63b. Thereby, the protrusion amount of the adhesive 33 to the end portions of the sheets 31 and 32 is further reduced.

(Second Embodiment)
FIG. 11 is a schematic diagram illustrating a configuration of a bonding apparatus according to the second embodiment. FIG. 12 is a plan view (bottom view) when the pressing jig 72 of the bonding apparatus is viewed from below.

  As shown in FIG. 11, the bonding apparatus according to this embodiment includes a table 71, a holding jig 72 having a large number of jig units, and a large number of actuators that individually move the jig units up and down. An actuator group (pressure application member drive unit) 74, a horizontal movement stage (XY stage) 75, a vertical movement stage (Z stage) 76, and a control unit 77 are included.

  The table 71 is formed of, for example, a glass plate having a flat surface. On the table 71, the two sheets 31 and 32 to be bonded are placed with an adhesive interposed therebetween. A holding jig 72 is disposed above the table 71. The holding jig 72 has a large number of jig units provided with protrusions 73 on the lower side. The holding jig 72 needs to have protrusions 73 arranged in a two-dimensional direction at a constant pitch (for example, 5 mm) in a region having the same size as the joint portion of the sheets 31 and 32.

  Here, in order to simplify the description, it is assumed that four jig units 72a to 72d are provided in the holding jig 72 as shown in FIG. In this case, the actuator group 74 includes four actuators 74a to 74d. The jig units 72a to 72d are individually connected to the actuators 74a to 74d, respectively, as schematically shown in FIG. The jig units 72a to 72d are individually driven by the actuators 74a to 74d to move in the vertical direction.

  The protrusions 73 on the lower surface side of the jig units 72a to 72d are formed in a columnar shape by a resin such as POM, and are arranged linearly at a constant pitch along the longitudinal direction of the jig units 72a to 72d. However, in the adjacent jig units 72a to 72d, the protrusions 73 are shifted by a half pitch. The tips of these protrusions 73 are also formed in a hemispherical shape.

  As shown in FIG. 11, the holding jig 72 and the actuator group 74 (actuators 74 a to 74 d) are supported below the horizontal movement stage 75 so as to be movable in the horizontal direction. The horizontal movement stage 75 is supported by a vertical movement stage 76 so as to be movable in the vertical direction. The control unit 77 controls the actuators 74a to 74d, the horizontal movement stage 75, and the vertical movement stage 76. Instead of moving the holding jig 72 by the horizontal moving stage 75 and the vertical moving stage 76, the position of the holding jig 72 may be fixed and the table 71 may be moved in the horizontal direction and the vertical direction.

  13A and 13B are schematic views showing the operation of the jig unit 74a. FIG. 14 is a timing chart of signals supplied from the control unit 76 to the actuators 74a to 74d.

  The actuator 74a moves the jig unit 72a downward when the signal is at the “H” level. Thereby, as shown in FIG. 13A, the protrusion 73 presses the sheet 32. The actuator 74a moves the jig unit 72a upward when the signal is at the “L” level. Thereby, as shown in FIG. 13B, the protrusion 73 is separated from the sheet 32. 13 (a) and 13 (b), the operation has been described taking the jig unit 72a as an example, but the operations of the other jig units 72b to 72d are the same as those of the jig unit 72a.

  The arrows in FIG. 12 indicate the driving order of the actuators 74a to 74d. The protrusions 73 of the jig units 72a to 72d press the sheet 32 in the order indicated by the arrows.

  In the present embodiment, the jig units 72a to 72d are moved up and down in the driving order shown in FIGS. Thereby, a part of the adhesive between the sheets 31 and 32 is pressed by the protrusion 73 and moves in the driving order direction indicated by the arrow in FIG. Along with the movement of the adhesive, bubbles existing between the sheets 31 and 32 also move in the driving order direction and are pushed out from the end portions of the joint portions of the sheets 31 and 32.

  In this embodiment, since there is a gap between the protrusions 73 that press the sheet 32, a part of the adhesive pressed by the protrusion 73 passes through the gap between the protrusions 73 in the direction opposite to the arrow in FIG. Moving. Therefore, as in the first embodiment, the amount of adhesive protruding from the end portions of the sheets 31 and 32 is reduced. This prevents the adhesive from adhering to the terminals of the sheets 31 and 32.

  In both the first and second embodiments, the tips of the projections (projections 22a, 63a, 63b, 64a, 73) are hemispherical. However, as shown in FIG. May be in the form of a roller, or may have a rotatable ball as shown in FIG.

(Third embodiment)
FIG. 16 is a schematic diagram illustrating a configuration of a bonding apparatus according to the third embodiment. FIG. 17A is a plan view (bottom view) of the pressing jig 81 of the bonding apparatus as seen from below, and FIG. 17B is a front view of the pressing jig 81. In FIG. 16, the same components as those in FIG.

  In the first embodiment, the protrusions 22a are arranged in a staggered manner on the lower surface side of the holding jig 22 (see FIG. 1), whereas in the present embodiment, the air nozzles 82 are staggered on the lower surface side of the holding jig 81. (See FIG. 17B). The opening diameter of the air nozzle 82 is, for example, 2.5 to 4 mm. The arrangement pitch of the air nozzles 82 in the horizontal direction and the vertical direction is, for example, 5 mm. These air nozzles 82 are connected to an air supply source (not shown), and inject high-pressure air in response to a signal from the control unit 25. Instead of air, nitrogen gas or other fluid may be ejected from the nozzle 82.

  The holding jig 81 is supported by the guide rail 23 as in the first embodiment, and is moved in a direction parallel to the table 21 along the guide rail 23 by the holding jig driving unit 24.

  FIG. 18 is a schematic diagram illustrating a sheet bonding method using the bonding apparatus of the present embodiment. As shown in FIG. 18, an adhesive 33 is applied to the upper surface of the sheet 31, and the sheet 32 is bonded thereon. At least the upper sheet 32 has flexibility, and when it is joined to the sheet 31, it is arranged slightly curved or inclined upward as shown in FIG. Then, a pressing jig 81 is disposed on the sheet 32, and air is ejected from the air nozzle 82 to apply pressure to the sheet 32. The pressure of the air is set to such an extent that the sheet 32 is deflected by the air jet and the pressure can be applied to the adhesive 33.

  In this manner, the holding jig 81 is gradually moved from one side to the other side in a state where air is ejected from the air nozzle 82. In this case, the pressure distribution in the adhesive 33 is as shown in FIG. Accordingly, as in the first embodiment, the bubbles 33a existing between the sheets 31 and 32 can be moved together with the movement of the pressing jig 81 and pushed out from the end of the sheet joining portion.

  Further, since the pressure of the adhesive 33 in the area between the air nozzles 82 is lower than the pressure of the adhesive 33 in the area immediately below the air nozzle 82, a part of the adhesive 33 in the moving direction of the pressing jig 81 is partly air. It moves rearward in the moving direction of the pressing jig 81 through a region where the pressure between the nozzles 82 is low (see the black arrow in FIG. 4). Thereby, the protrusion amount of the adhesive 33 from the edge part of a sheet | seat junction part is reduced, and it is prevented that the adhesive agent 33 adheres to the terminal arrange | positioned at the edge part of the sheets 31 and 32. FIG.

  In the present embodiment, in addition to the same effects as those of the first embodiment, since the pressing jig 81 does not contact the sheets 31 and 32, there is no possibility that the sheets 31 and 32 are wrinkled. There is also.

(Fourth embodiment)
FIG. 19 is a schematic diagram illustrating a configuration of a bonding apparatus according to the fourth embodiment. As shown in FIG. 19, the bonding apparatus according to the present embodiment includes a table 91, an air injection unit 92, an X direction moving unit (scanning unit) 93, a Y direction moving unit (scanning unit) 94, A vertical direction (Z direction) moving unit 95 and a control unit 96 are provided.

  The sheets 31 and 32 to be bonded are arranged on the table 91. Above the table 91, an air injection section 92 having an air nozzle 92a is disposed. The air injection unit 92 is connected to an air supply source (not shown), and injects high-pressure air from the air nozzle 92 a toward the sheets 31 and 32 in response to a signal from the control unit 96.

  The air injection unit 92 is supported by the X direction moving unit 93 so as to be movable in the X direction (direction parallel to the upper surface of the table 91). The X-direction moving unit 93 is supported by the Y-direction moving unit 94 so as to be movable in the Y direction (a direction parallel to the upper surface of the table 91 and perpendicular to the X direction). Further, the Y-direction moving unit 94 is supported by the vertical direction moving unit 95 so as to be movable in the vertical direction. These X direction moving unit 93, Y direction moving unit 94 and vertical direction moving unit 95 are driven and controlled by the control unit 96.

  FIG. 20 is a schematic diagram illustrating a sheet bonding method using the bonding apparatus of the present embodiment. With reference to FIG. 19, FIG. 20, the bonding method using the bonding apparatus which concerns on this embodiment is demonstrated.

  First, the sheet 31 having an adhesive applied to the upper surface is disposed on the table 91, and the sheet 32 is disposed thereon. Thereafter, the vertical moving unit 95 is controlled to set the interval between the air nozzle 92a and the sheet 32 to a predetermined value. Further, the X direction moving unit 93 and the Y direction moving unit 94 are controlled to arrange the air nozzle 92a at one of the corners of the sheet 32 as shown in FIG.

  Next, air is jetted from the air nozzle 92a. The air jet partially deflects the sheet 32, and pressure is applied to the adhesive between the sheets 31 and 32. Thereafter, the control unit 96 controls the X direction moving unit 93 and the Y direction moving unit 94 to move the air nozzle 92a at a constant speed in the X direction as indicated by an arrow in FIG. When the air nozzle 92a moves to the end of the sheet 32, the air nozzle 92a moves by a constant distance (for example, 5 mm) in the Y direction and then moves at a constant speed in the -X direction. In this way, the movement in the X direction, the Y direction, and the −X direction is sequentially repeated, and pressure is applied to the entire surface of the sheet 32 by air.

  In this case, if there is a bubble between the sheets 31 and 32, the bubble is pushed by the adhesive to which pressure is applied by air injection, and moves away from the air injection unit. Therefore, by moving (scanning) the air nozzle 92 in a zigzag manner as shown in FIG. 20, the air bubbles can be driven out of the sheet joining portion.

  In this embodiment, the air nozzle 92a for injecting air is moved (scanned) in a zigzag manner as shown in FIG. 20 to apply pressure to the adhesive between the sheets 31 and 32, so that the adhesive is around the air nozzle 92a. To move easily. For this reason, there exists an effect that the quantity of the adhesive agent which protrudes from the junction part of the sheets 31 and 32 can be reduced remarkably.

  Further, in the present embodiment, since there is only one air nozzle, there is an advantage that it is easy to increase the pressure of air ejected from the air nozzle as compared with the third embodiment.

  In the fourth embodiment, the case where the position of the table 91 is fixed and the air injection unit 92 is moved has been described. However, the table 91 may be moved while the position of the air injection unit 92 is fixed. Moreover, it is good also as a structure which moves both the air injection part 92 and the table 91. FIG. Furthermore, instead of the air injection unit 92, a pressing jig having a protrusion that contacts the sheet 32 may be used.

  The following additional notes are further disclosed with respect to various aspects including the above-described embodiment.

(Supplementary Note 1) A support part for supporting an object to be processed by laminating a first member, an adhesive, and a flexible sheet-like second member;
A pressing jig that includes a plurality of pressure applying members arranged apart from each other, and applies pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member;
And a moving unit that relatively moves the pressing jig along the object to be processed.

  (Appendix 2) The bonding according to appendix 1, wherein the pressure application member is one of a columnar member that contacts the object to be processed and a nozzle that ejects fluid to the object to be processed. apparatus.

  (Supplementary note 3) The supplementary note 1 or 2, wherein the pressing jig is a combination of a plurality of jig units each having one or a plurality of pressure members according to the size of the object to be processed. The bonding apparatus as described.

(Additional remark 4) The process of arrange | positioning the to-be-processed object formed by laminating | stacking the 1st member, an adhesive agent, and the flexible sheet-like 2nd member on a support part,
Applying pressure to the second member of the object to be processed from the opposite side to the second member by a pressing jig provided with a plurality of pressure applying members arranged apart from each other;
A step of relatively moving the pressing jig along the object to be processed.

(Additional remark 5) The support part which supports the to-be-processed object formed by laminating | stacking the 1st member, an adhesive agent, and the sheet-like 2nd member which has flexibility,
A holding jig in which a plurality of pressure applying members are arranged in a region corresponding to a joint portion between the first member and the second member;
A pressure application member driving unit that drives the pressure application members of the holding jig in a predetermined order to apply pressure to the workpiece;
And a control unit that controls the pressure application member driving unit.

(Additional remark 6) The process of supporting the to-be-processed object formed by laminating | stacking the 1st member, an adhesive agent, and the flexible sheet-like 2nd member on a support part,
Arranging a pressing jig provided with a plurality of pressure applying members arranged in a region corresponding to a region where the first member and the second member are to be joined above the workpiece;
A step of driving the pressure applying members of the pressing jig in a predetermined order to apply pressure to the object to be processed.

(Supplementary Note 7) A support unit for supporting an object to be processed by laminating a first member, an adhesive, and a flexible sheet-like second member;
A pressing jig that includes a pressure applying member, and applies pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member;
A scanning unit that scans the pressing jig along the object to be processed and applies pressure to the entire joint portion of the first member and the second member;
And a control unit that controls the scanning unit.

(Additional remark 8) The process of arrange | positioning the to-be-processed object formed by laminating | stacking the 1st member, the adhesive agent, and the flexible sheet-like 2nd member on a support part,
Applying pressure to the second member of the object to be processed by a pressing jig provided with a pressure applying member;
And a step of scanning the pressing jig along the object to be processed and applying pressure to the entire joint portion of the first member and the second member.

  (Supplementary note 9) The bonding method according to any one of supplementary notes 4, 6, and 8, wherein the first member and the second member are both liquid crystal display panels.

FIG. 1 is a schematic diagram illustrating a configuration of a bonding apparatus according to the first embodiment. Fig.2 (a) is a bottom view of the pressing jig of the bonding apparatus based on 1st Embodiment, FIG.2 (b) is the front view similarly. FIG. 3 is a schematic diagram illustrating a bonding method using the bonding apparatus according to the first embodiment. FIG. 4 is a schematic diagram showing the movement of the adhesive accompanying the movement of the pressing jig. FIG. 5A is a plan view showing an example of a display panel of a cholesteric liquid crystal display device, and FIG. 5B is a sectional view of the same. Fig.6 (a) is a bottom view which shows the modification 1 of a pressing jig. FIG. 6B is a front view of the same. Fig.7 (a) is a bottom view which shows the modification 2 of a pressing jig, FIG.7 (b) is the front view similarly. FIG. 8 is a bottom view showing Modification 3 of the holding jig. FIGS. 9A and 9B are views showing the operation of the pressing jig of the third modification. FIG. 10 is a timing chart of signals supplied from the control unit to the actuator. FIG. 11 is a schematic diagram illustrating a configuration of a bonding apparatus according to the second embodiment. FIG. 12 is a bottom view of the pressing jig of the bonding apparatus according to the second embodiment. 13A and 13B are schematic views showing the operation of the jig unit. FIG. 14 is a timing chart of signals supplied from the control unit to the actuator. FIGS. 15A and 15B are diagrams showing an example of the tip shape of the protrusion. FIG. 16 is a schematic diagram illustrating a configuration of a bonding apparatus according to the third embodiment. FIG. 17A is a bottom view of the pressing jig of the bonding apparatus according to the third embodiment, and FIG. 17B is a front view of the pressing jig. FIG. 18 is a schematic diagram illustrating a sheet bonding method using the bonding apparatus according to the third embodiment. FIG. 19 is a schematic diagram illustrating a configuration of a bonding apparatus according to the fourth embodiment. FIG. 20 is a schematic diagram illustrating a sheet bonding method using the bonding apparatus according to the fourth embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11,15 ... Transparent substrate, 12 ... Row electrode, 13 ... Liquid crystal layer, 14 ... Column electrode, 21 ... Table, 22 ... Holding jig, 22a ... Projection, 22b ... Spring, 23 ... Guide rail, 24 ... Holding down Tool drive unit 25 ... Control unit 31, 32 ... Sheet, 33 ... Adhesive, 33a ... Bubble, 35 ... Display panel, 61, 65, 68 ... Holding jig, 62a, 62b, 64 ... Jig unit, 63a 63b, 64a ... projection, 69a, 69b ... actuator, 71 ... table, 72 ... holding jig, 72a-72d ... jig unit, 73 ... projection 74 ... actuator group, 74a-74d ... actuator, 75 ... horizontal movement stage , 76 ... Vertical movement stage, 77 ... Control section, 81 ... Holding jig, 82 ... Air nozzle, 91 ... Table, 92 ... Air injection section, 92a ... Nozzle, 93 X-direction moving unit, 94 ... Y-direction moving unit, 95 ... vertical moving unit, 96 ... control unit.

Claims (5)

A support part for supporting an object to be processed formed by laminating a first member, an adhesive, and a flexible sheet-like second member;
A pressing jig that includes a plurality of pressure applying members arranged apart from each other, and applies pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member;
And a moving unit that relatively moves the pressing jig along the object to be processed. A step of disposing an object to be processed on a support portion by laminating a first member, an adhesive, and a flexible sheet-like second member;
Applying pressure to the second member of the object to be processed from the opposite side to the second member by a pressing jig provided with a plurality of pressure applying members arranged apart from each other;
A step of relatively moving the pressing jig along the object to be processed. A support part for supporting an object to be processed formed by laminating a first member, an adhesive, and a flexible sheet-like second member;
A holding jig in which a plurality of pressure applying members are arranged in a region corresponding to a joint portion between the first member and the second member;
A pressure application member driving unit that drives the pressure application members of the holding jig in a predetermined order to apply pressure to the workpiece;
And a control unit that controls the pressure application member driving unit. A support part for supporting an object to be processed formed by laminating a first member, an adhesive, and a flexible sheet-like second member;
A pressing jig that includes a pressure applying member, and applies pressure to the second member of the object to be processed from the side opposite to the support portion by the pressure applying member;
A scanning unit that scans the pressing jig along the object to be processed and applies pressure to the entire joint portion of the first member and the second member;
And a control unit that controls the scanning unit. A step of disposing an object to be processed on a support portion by laminating a first member, an adhesive, and a flexible sheet-like second member;
Applying pressure to the second member of the object to be processed by a pressing jig provided with a pressure applying member;
And a step of scanning the pressing jig along the object to be processed and applying pressure to the entire joint portion of the first member and the second member.

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