JP2010015480A - Drawing apparatus and method for creating data for input of drawing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing apparatus shortening transfer time of drawing data without deteriorating estimation accuracy of drawing time. <P>SOLUTION: The drawing apparatus 100 includes: a division part 114 for receiving drawing data including figure data of an optional angle figure in which a figure code of the optional angle figure having an angle other than integer times of 45°, a division method code indicating a division number and a division method for approximately dividing the optional angle figure by a plurality of non-optional angle figures other than the optional angle figure are defined, from the external of the drawing apparatus and approximately dividing the optional angle figure into a plurality of non-optional angle figures in accordance with the division number defined in the figure data of the optional angle figure included in the drawing data and the division method indicated by the division method code; and a drawing part 150 for drawing the plurality of non-optional angle figures in a sample by using electron beams 200. In this drawing apparatus 100, the transfer time of drawing data can be shortened without deteriorating the estimation accuracy of the drawing time. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a drawing apparatus and a drawing apparatus input data creation method, and more particularly to a drawing data creation method including arbitrary-angle graphic data having an angle other than an integer multiple of 45 degrees and the drawing data input. The present invention relates to a drawing apparatus.

  Lithography technology, which is responsible for the progress of miniaturization of semiconductor devices, is an extremely important process for generating a pattern among semiconductor manufacturing processes. In recent years, with the high integration of LSI, circuit line widths required for semiconductor devices have been reduced year by year. In order to form a desired circuit pattern on these semiconductor devices, a highly accurate original pattern (also referred to as a reticle or a mask) is required. Here, the electron beam (electron beam) drawing technique has an essentially excellent resolution, and is used for producing a high-precision original pattern.

FIG. 7 is a conceptual diagram for explaining the operation of a conventional variable shaping type electron beam drawing apparatus.
In a first aperture 410 in a variable shaping type electron beam drawing apparatus (EB (Electron beam) drawing apparatus), a rectangular, for example, rectangular opening 411 for forming the electron beam 330 is formed. Further, the second aperture 420 is formed with a variable shaping opening 421 for shaping the electron beam 330 having passed through the opening 411 of the first aperture 410 into a desired rectangular shape. The electron beam 330 irradiated from the charged particle source 430 and passed through the opening 411 of the first aperture 410 is deflected by the deflector, passes through a part of the variable shaping opening 421 of the second aperture 420, and passes through a predetermined range. The sample is irradiated on a stage that moves continuously in one direction (for example, the X direction). That is, the drawing area of the sample 340 mounted on the stage in which the rectangular shape that can pass through both the opening 411 of the first aperture 410 and the variable shaping opening 421 of the second aperture 420 is continuously moved in the X direction. Drawn on. A method of creating an arbitrary shape by passing both the opening 411 of the first aperture 410 and the variable shaping opening 421 of the second aperture 420 is referred to as a variable shaping method.

  FIG. 8 is a conceptual diagram showing a conventional flow from creation of drawing data to drawing. In FIG. 8, when performing electron beam drawing, first, a layout of a semiconductor integrated circuit is designed, and layout data (design data) in which a pattern layout is defined is generated. The design data is stored in the magnetic disk device 400 of another data processing device on the user side that uses the drawing device. Then, the design data is converted in the data processing device, and drawing data (drawing device input data) that can be input to the electron beam drawing device is generated (S400). The generated drawing device input data is stored in the magnetic disk device 402. Here, in a drawing apparatus, an aperture that forms an angle that is an integer multiple of 45 degrees is usually arranged. Therefore, it is difficult to draw a figure (an arbitrary angle figure) having an angle other than an integer multiple of 45 degrees as it is. However, at the stage where the layout of the semiconductor integrated circuit is designed, an arbitrary angle graphic 510 may be included in addition to a graphic (non-arbitrary angle graphic 520) configured only by an integer multiple of 45 degrees. Therefore, conventionally, a plurality of non-arbitrary angle graphic groups 512 such as a rectangle (rectangle) or a trapezoid composed only of an integer multiple of 45 degrees so as to be within the required accuracy before being input to the drawing apparatus. And approximated by division (see, for example, Patent Document 1). If the shape of the non-arbitrary figure 520 is complicated, it is similarly divided by a plurality of rectangular non-arbitrary figures 522, 524 and the like.

  FIG. 9 is a diagram illustrating an example of a flow up to generation of an approximate figure of an arbitrary angle figure. Each process in FIG. 9 shows an example of an internal process for a divided approximate portion of an arbitrary angle graphic in the data conversion process (S400) shown in FIG. The arbitrary-angle figure 427 in the design data stored in the magnetic disk device 400 is first divided into a triangle 431 (or a trapezoid) having at least one side parallel to the x direction or the y direction and another figure 429 (S401). ). The divided triangle 431 is rotated in a direction that is easy to determine in determining the figure type (S402). Thereafter, the figure type is determined (S404). For example, it is determined that the graphic type is the graphic type indicated by the triangle 1-2. Then, the tip portion that is less than or equal to the reference dimension that cannot or cannot be an approximate figure is deleted, and a figure 432 with the tip cut off is generated (S406). And it cuts into the some arbitrary angle figure 434,436,438 so that the figure 432 may be comprised at an angle of 90 degrees or less (S408). Here, it is shown as a recursive cut. Then, in dividing and approximating the plurality of arbitrary angle figures 434, 436, and 438 with a plurality of non-arbitrary angle figures, a more optimal division method is determined (S410). Then, an approximate figure group divided and approximated by a plurality of non-arbitrary angle figures 444, 446, and 448 of a predetermined type according to this division method is generated (S412). The processing determined for each type is sequentially performed. Data of a plurality of non-arbitrary angle figures 444, 446, 448 generated in this way is stored in the magnetic disk device 402. As described above, the drawing device input data generated outside the drawing device and stored in the magnetic disk device 402 is collectively transferred and input to the magnetic disk device 504 in the electron beam drawing device. Then, a plurality of stages of data conversion processing are performed on the drawing data in the drawing apparatus, and data (shot data) in a format in the drawing apparatus having a shot size as shown by the graphic groups 516 and 526 is generated ( S504). The generated shot data is stored in the magnetic disk device 506 in the drawing apparatus. Then, in the drawing apparatus, a pattern is drawn based on the generated shot data (S506).

Here, the arbitrary-angle figure is represented by a large number of figures by division approximation, and the dimensions are often different from each other. Therefore, the arbitrary-angle figure cannot be easily defined by the array arrangement. For this reason, the amount of data increases as compared with graphic data of other non-arbitrary-angle figures that are not divided and approximated. When an arbitrary angle figure is frequently used in the design data or when high approximation accuracy is required, the data amount of the drawing device input data input to the drawing device increases. For this reason, there is a problem that it takes time to transfer data from the outside into the drawing apparatus, and as a result, the entire drawing time increases. With the recent high integration of LSI, an increase in drawing time has become a serious problem that cannot be overlooked.
JP 2008-085248 A

  As described above, an arbitrary angle figure has a larger data amount than figure data of other non-arbitrary angle figures that are not divided and approximated. As the amount of data increases, there is a problem that the entire drawing time increases. Here, it is also conceivable that the processing from the above-described S402 to S412 of FIG.

  FIG. 10 is a conceptual diagram showing a flow from drawing data creation to drawing when processing up to division approximation of an arbitrary angle figure is performed in the drawing apparatus. 10 is the same as FIG. 8 until the design data is stored in the magnetic disk device 400. In FIG. Then, the design data is converted in the data processing apparatus outside the drawing apparatus, and drawing data (drawing apparatus input data) that can be input to the electron beam drawing apparatus is generated (S500). Here, drawing data (drawing device input data) that can be input to the electron beam drawing apparatus without changing the arbitrary angle figure division approximation as described with reference to FIGS. 8 and 9 without changing the arbitrary angle figure 510 is generated. The The generated drawing device input data is stored in the magnetic disk device 402. In the graphic data portion of the arbitrary angle graphic of the drawing device input data, an arbitrary angle graphic code, a number of bytes representing the graphic size, a flag indicating the type of graphic layout expression, and graphic coordinates (x1) , Y1) and figure size (Lx, Ly). As described above, the drawing device input data generated outside the drawing device and stored in the magnetic disk device 402 is collectively transferred and input to the magnetic disk device 504 in the electron beam drawing device. Then, in the drawing apparatus, first, the processes from the above-described S402 to S412 of FIG. 9 to the division approximation of the arbitrary angle figure are performed in the drawing apparatus (S401). In this way, the arbitrary angle graphic 510 is divided and approximated into a plurality of non-arbitrary angle graphic groups 512. Thereafter, a plurality of stages of data conversion processing is performed on the drawing data, and data (shot data) in a format within the drawing apparatus having a shot size as indicated by the graphic groups 516 and 526 is generated (S504). The generated shot data is stored in the magnetic disk device 506 in the drawing apparatus. Then, in the drawing apparatus, a pattern is drawn based on the generated shot data (S506).

  By configuring as described above, the amount of data of an arbitrary angle figure becomes equivalent to the figure data of other non-arbitrary angle figures before the input to the drawing apparatus, and the entire data amount can be reduced. . Therefore, it is possible to reduce the time for transferring data from the outside into the electron beam drawing apparatus. However, the load increases in the drawing apparatus. In addition, the following problems occur. In general, the drawing apparatus estimates the drawing time before starting drawing and shows it to the user. This is because an arbitrary angle graphic has already been divided and approximated into a plurality of non-arbitrary angle graphic groups before being input to the drawing apparatus, so that a highly accurate estimation is possible. However, in the method shown in FIG. 10, it is unclear how an arbitrary angle graphic is divided and approximated into a plurality of non-arbitrary angle graphic groups before being input to the drawing apparatus. It will deteriorate. Furthermore, it seems that the user side does not want to perform such graphic operations in the drawing apparatus because the degree of freedom in processing decreases when the method of division approximation is determined in the drawing apparatus.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a drawing apparatus and a drawing apparatus input data creation method that can overcome such problems and reduce drawing data transfer time without degrading drawing time estimation accuracy. To do.

The drawing device of one embodiment of the present invention includes:
Dividing and approximating the number of divisions when dividing and approximating an arbitrary angle figure with a figure code indicating an arbitrary angle figure having an angle other than an integer multiple of 45 degrees and a plurality of non-arbitrary angle figures consisting only of an integer multiple of 45 degrees A storage unit for inputting and storing drawing data including graphic data of an arbitrary angle figure in which a division method code indicating a division method at the time is defined;
Reads drawing data from the storage unit, and divides and approximates an arbitrary angle figure into multiple non-arbitrary figures according to the number of divisions defined in the figure data of the arbitrary angle figure included in the drawing data and the division method indicated by the division method code A dividing part to be
A drawing unit that draws a plurality of non-arbitrary figures on a sample using a charged particle beam;
It is provided with.

  With such a configuration, an arbitrary angle figure may be divided and approximated to a plurality of non-arbitrary angle figures according to the number of divisions and the division method indicated by the division method code in the drawing apparatus. That is, in the drawing apparatus, an operation for obtaining the division method indicated by the number of divisions and the division method code becomes unnecessary.

  Further, it is preferable that the division method code indicates a division direction and a divided figure shape.

  The dividing unit may divide an arbitrary angle figure by the number of divisions in the divided figure shape toward the dividing direction.

A method for creating drawing device input data according to an aspect of the present invention includes:
Inputting design data including graphic data of an arbitrary angle figure having an angle other than an integer multiple of 45 degrees, and storing the design data in a storage device;
The design data is read out, and a division method code indicating a division method and a division method when division approximation is included when an arbitrary angle figure is divided and approximated by a plurality of non-arbitrary angle figures formed only by an integer multiple of 45 degrees is included. A process of converting graphic data of an arbitrary angle graphic to create drawing device input data,
It is provided with.

  Particularly, the created drawing device input data includes graphic data in a state of an arbitrary angle figure without dividing and approximating an arbitrary angle figure into a plurality of non-arbitrary angle figures.

  According to the present invention, it is possible to shorten the drawing data transfer time without degrading the drawing time estimation accuracy.

  Hereinafter, in the embodiment, a configuration using an electron beam will be described as an example of a charged particle beam. However, the charged particle beam is not limited to an electron beam, and a beam using charged particles such as an ion beam may be used. As an example of the charged particle beam apparatus, a charged particle beam drawing apparatus, particularly, a variable shaping type electron beam drawing apparatus will be described.

  FIG. 1 is a conceptual diagram illustrating a configuration of a drawing apparatus according to the first embodiment. In FIG. 1, the drawing apparatus 100 includes a drawing unit 150 and a control unit 160. The drawing unit 150 includes a drawing chamber 103 and an electronic lens barrel 102 disposed on the upper portion of the drawing chamber 103. In the electron column 102, an electron gun 201, an illumination lens 202, a first aperture 203, a projection lens 204, a deflector 205, a second aperture 206, an objective lens 207, and a deflector 208 are provided. An XY stage 105 is arranged in the drawing chamber 103, and a sample 101 to be drawn is arranged on the XY stage 105. Examples of the sample 101 include a wafer on which a semiconductor device is formed and an exposure mask that transfers a pattern to the wafer. Further, this mask includes, for example, mask blanks on which no pattern is formed. The control unit 160 includes magnetic disk devices 140 and 142, a control computer 110, a memory 112, and a deflection control circuit 120. The components of the control unit 160 are connected to each other via a bus (not shown). The control computer 110 has functions such as a dividing unit 114 and a data conversion processing unit 116. Functions such as the division unit 114 and the data conversion processing unit 116 may be executed by software, or may be configured by hardware using an electric circuit. Or you may make it implement by the combination of the hardware and software by an electrical circuit. Alternatively, a combination of such hardware and firmware may be used. Information input to the control computer 110 or information during and after the arithmetic processing is stored in the memory 112 each time. In FIG. 1, description of components other than those necessary for describing the first embodiment is omitted. The drawing apparatus 100 may normally include other necessary configurations.

  FIG. 2 is a conceptual diagram showing a flow from drawing data creation to drawing in the first embodiment. In FIG. 2, when performing electron beam drawing, first, a layout of a semiconductor integrated circuit is designed, and layout data (design data) in which a pattern layout is defined is generated. The design data is stored in a magnetic disk device 240 of another data processing device on the user side that uses the drawing device. As described above, at the stage where the layout of the semiconductor integrated circuit is designed, an arbitrary angle figure 10 may be included in addition to a figure (non-arbitrary angle figure 20) configured only by an integer multiple of 45 degrees. . As described above, the data processing apparatus outside the drawing apparatus inputs drawing data including graphic data of an arbitrary angle figure having an angle other than an integer multiple of 45 degrees, and stores the drawing data in the magnetic disk device 240. Then, the design data is converted in a data processing apparatus outside the drawing apparatus, and drawing data (drawing apparatus input data) that can be input to the electron beam drawing apparatus is generated (S100). During the data conversion processing shown in S100, drawing data (drawing device input data) that can be input to the electron beam drawing apparatus in the state of the arbitrary angle graphic without generating the division approximation of the arbitrary angle graphic is generated. Here, the data processing of an arbitrary angle figure during the data conversion processing shown in S100 will be described.

FIG. 3 is a diagram illustrating an example of a data processing flow of an arbitrary angle graphic in the first embodiment. Each process in FIG. 3 shows an example of an internal process for a data processing portion of an arbitrary figure in the data conversion process (S100) shown in FIG. The data processing apparatus outside the drawing apparatus reads design data from the magnetic disk device 240, and divides and approximates an arbitrary angle figure by dividing it into a plurality of non-arbitrary figures having only an integer multiple of 45 degrees. Drawing data of an arbitrary angle figure is converted so as to include a division method code indicating a division method for approximation, and drawing apparatus input data is created. Specifically, it is processed as follows. The arbitrary-angle figure 27 in the design data stored in the magnetic disk device 240 is first divided into a triangle 30 (or a trapezoid) having at least one side parallel to the x direction or y direction and another figure 29 (S101). ). Here, in order to make the contents easy to understand, the triangle 30 will be described below. The divided triangle 30 is rotated in a direction that is easy to determine in determining the graphic type (S402). Thereafter, the figure type is determined (S104). For example, it is determined that the graphic type is the graphic type indicated by the triangle 1-2. Then, the tip portion that is less than or equal to the reference dimension that cannot or cannot be an approximate figure is deleted, and the figure 32 with the tip cut off is generated (S106). This step may be omitted if there is no tip portion that is less than or equal to the reference dimension that cannot or cannot be an approximate figure. Next, the figure 32 is cut into a plurality of arbitrary angle figures 34, 36, and 38 so that the figure 32 is formed at an angle of 90 degrees or less (S108). Here, it is shown as a recursive cut. This step may be omitted if the original figure is configured only at an angle of 90 degrees or less. Then, in dividing and approximating the plurality of arbitrary angle figures 34, 36, and 38 with a plurality of non-arbitrary angle figures, a more optimal division method and the number N of divisions are determined and set (S110). In FIG. 3, the division method 1 and the division number N ₁ are additionally defined in the graphic data of the arbitrary angle graphic 34 for the arbitrary angle graphic 34. Further, the division method 2 and the division number N ₂ are additionally defined in the graphic data of the arbitrary angle graphic 36 for the arbitrary angle graphic 36. Dividing method 1 and the number of divisions N ₃ for any angle figure 38 is additionally defined in the graphic data in any angle figure 38.

  As described above, in the graphic data portion of the arbitrary angle graphic of the generated drawing device input data, the arbitrary angle graphic code, the flag indicating the data amount, the graphic coordinates (x1, y1), the graphic size (Lx, Ly) ), A division number N and a division method code indicating the division method are defined.

  In FIG. 2, the arbitrary angle graphic 10 remains as it is because the arbitrary angle graphic 10 is constituted by only an angle of 90 degrees or less by the data processing step (S100). However, the graphic data of the arbitrary angle graphic 10 includes an arbitrary angle graphic code, a number of bytes representing the graphic size, a flag indicating the type of graphic layout expression, graphic coordinates (x1, y1), graphic A size (Lx, Ly), a division number N, and a division method code indicating a division method are defined. The non-arbitrary angle figure 20 is converted into non-arbitrary angle figures 22 and 24 constituted by only an angle of 90 degrees or less.

  The drawing device input data generated as described above is stored in the magnetic disk device 242 of the data processing device outside the drawing device 100. Thus, the created drawing device input data includes graphic data in the state of an arbitrary angle figure without dividing and approximating the arbitrary angle figure into a plurality of non-arbitrary angle figures. Therefore, the amount of data can be greatly reduced as compared with the case of dividing and approximating an arbitrary angle figure into a plurality of non-arbitrary angle figures.

  FIG. 4 is a diagram showing an example of the data amount when an arbitrary angle figure is divided and approximated. In FIG. 4, when the arbitrary angle graphic 10 is divided and approximated into a plurality of non-arbitrary angle graphic groups 12, the graphic coordinates (x1, y1) and graphic size (Lx, Ly) for each graphic in the non-arbitrary angle graphic group 12 are as follows. Will be defined. In addition, a graphic code indicating the arbitrary angle graphic 10 at the head thereof, and a flag indicating the number of bytes of the graphic size and the type of graphic layout expression are defined. 3 bytes for the x value of the graphic coordinates (x1, y1), 3 bytes for the y value of the graphic coordinates (x1, y1), 3 bytes for the Lx value of the graphic size (Lx, Ly), and the graphic size (Lx, Ly) If 3 bytes are required for the Ly value, 12 bytes are required for each figure. Since these are required by the number N of figures to be divided, a total of 12 N bytes are required. If one byte is required for the graphic code and one byte for the flag, two more bytes are required at the head. Therefore, when the arbitrary angle figure 10 is divided and approximated, 2 + 12 N bytes are required.

  FIG. 5 is a diagram showing an example of the data amount when the number of divisions and the division method code are added without dividing and approximating an arbitrary angle figure as shown in the first embodiment. If 3 bytes are required for the division number N and 1 byte is required for the division method code, a total of 12 bytes of figure coordinates (x1, y1) and figure size (Lx, Ly) are also required. If the number of divisions and the division method code are added instead, a total of 18 bytes can be used. If arbitrary angle figures are frequently used in the drawing device input data, the amount of data is greatly reduced.

As described above, the drawing device input data generated outside the drawing device and stored in the magnetic disk device 242 is collectively transferred to the magnetic disk device 140 in the drawing device 100. Since the amount of data for drawing device input is greatly reduced, the transfer time can be greatly reduced. Further, although not shown in the drawing, the drawing time is estimated in the drawing apparatus 100. Since the division method indicated by the division number N and the division method code is already shown, the divided figure is predicted. Can do. Therefore, it is possible to estimate the drawing time with the same accuracy as in the past. Then, in the drawing apparatus 100, the dividing unit 114 reads out drawing data as drawing apparatus input data from the magnetic disk device 140, and the number of divisions N defined in the graphic data of the arbitrary angle figure 10 included in the drawing data. Then, according to the division method indicated by the division method code, the arbitrary angle figure 10 is divided and approximated to a plurality of non-arbitrary angle figure groups 12 (S202). In FIG. 3, the arbitrary angle graphic 34 is divided and approximated into a plurality of non-arbitrary angle graphic groups 44 according to the division number N ₁ and the division method 1. Further, according to the division number N ₂ and division method 2, it divides approximating any angle figure 36 into a plurality of non-arbitrary angle figure group 46. Further, according to the division number N ₃ and the division method 1, the arbitrary angle figure 38 is divided and approximated into a plurality of non-arbitrary angle figure groups 48. Since the division number N and the division method code have already been set, the division unit 114 may follow them. For example, if the division method code indicates the division direction and the divided figure shape, the division method code indicated by the division method code having the same number of divisions N in the division direction (for example, the x direction) indicated by the division method code. An arbitrary angle figure may be divided. The height in the y direction may be set so that, for example, the center of the upper side of each figure to be divided matches the height of the side forming an arbitrary angle. Therefore, it is not necessary to calculate the division number N and the division method that satisfy the required accuracy. Therefore, the calculation load can be greatly reduced. The data conversion processing unit 116 further performs data conversion processing of a plurality of stages on the drawing data, and the format data (shot data) in the drawing apparatus having the shot size as shown by the graphic groups 16 and 26 in FIG. It is generated (S204). The generated shot data is stored in the magnetic disk device 142 in the drawing apparatus. Then, in the drawing apparatus, a pattern is drawn based on the generated shot data (S206). The shot data is output to the deflection control circuit 120, and the deflection control circuit 120 outputs a signal for controlling each deflector to the drawing unit 150. The drawing unit 150 uses the electron beam 200 to draw each figure including a plurality of non-arbitrary-angle figures that are divided and approximated on the sample 101. The operation of the drawing unit 150 will be described below.

  When drawing a pattern on the sample 101, the operation is as follows. The electron beam 200 emitted from the electron gun 201 illuminates the entire first aperture 203 having a rectangular hole, for example, a rectangular hole, by the illumination lens 202. Here, the electron beam 200 is first shaped into a rectangle, for example, a rectangle, by passing through the opening of the first aperture 203. Then, the electron beam 200 of the first aperture image that has passed through the first aperture 203 is projected onto the second aperture 206 by the projection lens 204. The position of the first aperture image on the second aperture 206 is deflection-controlled by the deflector 205, and the beam shape and size can be changed. Then, the electron beam 200 of the second aperture image that has passed through the second aperture 206 is focused by the objective lens 207, deflected by the deflector 208, and the sample 101 on the XY stage 105 that is movably disposed. A desired position is irradiated.

Here, in the above-described example, the case where the number of divisions and the division method code are added to the graphic data has been described, but the present invention is not limited to this.
FIG. 6 is a diagram illustrating another example of graphic data of an arbitrary angle graphic in the first embodiment. In FIG. 6, in the graphic data portion of the arbitrary angle graphic of the drawing device input data generated by the external data processing device, the arbitrary angle graphic code, how many bytes the graphic size is expressed, and the arrangement of the graphic A flag indicating the type of expression, graphic coordinates (x1, y1), graphic size (Lx, Ly), slit width, and a division method code indicating a division method are defined. Thus, it is also preferable to define the slit width instead of the number of divisions. In such a case, assuming that the division method code indicates the division direction and the divided figure shape, the division method code is sequentially displayed in the divided figure shape indicated by the division method code having the same slit width in the division direction (for example, the x direction) indicated by the division method code. An arbitrary angle figure may be divided. The height in the y direction may be set so that, for example, the center of the upper side of each figure to be divided matches the height of the side forming an arbitrary angle.

  As described above, according to the first embodiment, when the ratio of the arbitrary angle figure in the design data is large or when high approximation accuracy is required, the data amount of the drawing device input data can be reduced. it can. At the same time, the processing of the main part of the arbitrary angle graphic processing (S102 to S110 in FIG. 3) is performed outside the drawing apparatus, so that the load on the drawing apparatus can be prevented from increasing so much. In this way, the amount of data transferred to the drawing apparatus is reduced, and the overall drawing time can be shortened as compared with the prior art by not increasing the load of the drawing apparatus so much. In addition, the accuracy of estimating the drawing time before the start of drawing can be kept equal to that of the prior art as compared with the case where all arbitrary angle figures are processed in the drawing apparatus. Furthermore, it is possible to meet the demand of a user who desires to perform graphic calculation of an arbitrary angle graphic outside the drawing apparatus.

  In the above description, what is described as “to part” or “to process” can be configured by a computer-operable program. Or you may make it implement by not only the program used as software but the combination of hardware and software. Alternatively, a combination of hardware and firmware may be used. When configured by a program, the program is recorded on a recording medium such as the magnetic disk devices 140 and 142, the memory 112, a magnetic tape device (not shown), FD, CD, DVD, MO, or ROM.

  The embodiments have been described above with reference to specific examples. However, the present invention is not limited to these specific examples.

  In addition, although descriptions are omitted for parts and the like that are not directly required for the description of the present invention, such as a device configuration and a control method, a required device configuration and a control method can be appropriately selected and used. For example, although the description of the control unit configuration for controlling the drawing apparatus 100 is omitted, it goes without saying that the required control unit configuration is appropriately selected and used.

  In addition, all charged particle beam drawing apparatuses, charged particle beam drawing methods, drawing apparatus input data creation methods, drawing apparatus input data conversion methods, which include elements of the present invention and can be appropriately modified by those skilled in the art, And their devices are within the scope of the present invention.

1 is a conceptual diagram illustrating a configuration of a drawing apparatus according to Embodiment 1. FIG. FIG. 3 is a conceptual diagram illustrating a flow from creation of drawing data to drawing in the first embodiment. 6 is a diagram showing an example of a data processing flow of an arbitrary angle graphic in the first embodiment. FIG. It is a figure which shows an example of the data amount at the time of carrying out the division | segmentation approximation of the arbitrary angle figures. As shown in the first embodiment, it is a diagram illustrating an example of a data amount when a division number and a division method code are added without dividing and approximating an arbitrary angle figure. FIG. 11 is a diagram showing another example of graphic data of an arbitrary angle graphic in the first embodiment. It is a conceptual diagram for demonstrating operation | movement of the conventional variable shaping type | mold electron beam drawing apparatus. It is a conceptual diagram which shows the flow from the data creation for conventional drawing to drawing. It is a figure which shows an example of the flow until the approximate figure production | generation of arbitrary angle figures. It is a conceptual diagram which shows the flow from the data creation for drawing to drawing in the case of performing the process to the division | segmentation approximation of arbitrary-angle figures in a drawing apparatus.

Explanation of symbols

10, 27, 30, 34, 36, 38 Arbitrary angle figure 427, 431, 434, 436, 438, 510 Arbitrary angle figure 12, 44, 46, 48, 444, 446, 448, 512 Non-arbitrary angle figure group 16, 26, 516, 526 Figure group 20, 22, 24, 520, 522, 524 Non-arbitrary angle figure 29, 32, 429, 432 Figure 100 Drawing apparatus 101, 340 Sample 102 Electronic column 103 Drawing room 105 XY stage 110 Control computer 112 Memory 114 Dividing unit 116 Data conversion processing unit 120 Deflection control circuit 140, 142, 240, 242, 400, 402, 504, 506 Magnetic disk device 150 Drawing unit 160 Control unit 200 Electron beam 201 Electron gun 202 Illumination lenses 203, 410 1st aperture 206,420 2nd aperture 204 Shadow lens 205, 208 the deflector 207 an objective lens 330 electron beam 411 opening 421 variable-shaped opening 430 a charged particle source

Claims (5)

The number of divisions and the number of divisions when dividing and approximating the arbitrary angle figure with a figure code indicating an arbitrary angle figure having an angle other than an integer multiple of 45 degrees and a plurality of non-arbitrary angle figures consisting only of an integer multiple of 45 degrees A storage unit for inputting and storing drawing data including graphic data of the arbitrary angle figure in which a division method code indicating a division method for approximation is defined;
The drawing data is read out from the storage unit, and the plurality of arbitrary angle graphics are selected according to the number of divisions defined in the graphic data of the arbitrary angle graphics included in the drawing data and the division method indicated by the division method code. A dividing unit that divides and approximates a non-arbitrary angle figure of
A drawing unit that draws the plurality of non-arbitrary angles on a sample using a charged particle beam;
A drawing apparatus comprising:   The drawing apparatus according to claim 1, wherein the division method code indicates a division direction and a divided figure shape.   The drawing apparatus according to claim 2, wherein the dividing unit divides the arbitrary angle figure by the number of divisions in the divided figure shape in the division direction. Inputting design data including graphic data of an arbitrary angle figure having an angle other than an integer multiple of 45 degrees, and storing the design data in a storage device;
A division method code that reads out the design data and divides and approximates the arbitrary angle figure by a plurality of non-arbitrary angle figures that are formed only by an integer multiple of 45 degrees; and a division method code that indicates a division method for the division approximation; Converting the arbitrary-angle graphic data so as to include the drawing device input data,
A drawing apparatus input data creation method characterized by comprising:   5. The created drawing device input data includes graphic data in an arbitrary angle figure state without dividing and approximating the arbitrary angle figure into the plurality of non-arbitrary angle figures. Of creating drawing device input data.

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