JP2009510535A - Fシータ対物レンズおよびfシータ対物レンズを備えたスキャナ装置 - Google Patents
Fシータ対物レンズおよびfシータ対物レンズを備えたスキャナ装置 Download PDFInfo
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- JP2009510535A JP2009510535A JP2008533935A JP2008533935A JP2009510535A JP 2009510535 A JP2009510535 A JP 2009510535A JP 2008533935 A JP2008533935 A JP 2008533935A JP 2008533935 A JP2008533935 A JP 2008533935A JP 2009510535 A JP2009510535 A JP 2009510535A
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- Prior art keywords
- lens
- objective lens
- theta objective
- theta
- scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 27
- 230000005499 meniscus Effects 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000011521 glass Substances 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000004075 alteration Effects 0.000 description 7
- 238000012935 Averaging Methods 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/50—Optics for phase object visualisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Lens Barrels (AREA)
Abstract
Description
Claims (8)
- 高出力のレーザー光を平坦な画像野にフォーカシングするためのFシータ対物レンズ(1)において、
光路に前後して配置された少なくとも2つ、有利にはちょうど2つのレンズ(2,3)が設けられており、該レンズは1kWより大きいレーザー光の出力に対して耐性を有し、少なくとも1つのレンズ(3)は1つまたは2つの非球面状のレンズ面(8)を有する
ことを特徴とするFシータ対物レンズ。 - 前記レンズ(2,3)のうち少なくとも1つ、有利には全てのものが合成石英ガラスから成る、請求項1記載のFシータ対物レンズ。
- 前記光路に配置された第1のレンズは有利には球面状のメニスカスレンズ(2)である、請求項1または2記載のFシータ対物レンズ。
- 前記光路に配置された第2のレンズは有利には非球面状のレンズ面(8)を有するフォーカシングレンズ(3)である、請求項1から3までのいずれか1項記載のFシータ対物レンズ。
- 高出力のレーザー光のためのスキャナ装置(12)において、レーザー光を偏向するための少なくとも1つの平坦なスキャナ鏡が設けられており、該スキャナ鏡の後方の光路に請求項1から4までのいずれか1項記載のFシータ対物レンズが配置されている
ことを特徴とするスキャナ装置。 - Fシータ対物レンズ(1)よりも前方の光路に波面補正光学系が配置されている、請求項5記載のスキャナ装置。
- 前記波面補正光学系は1つまたは2つの非球面状のレンズ面を備えたコリメーションレンズ(15)を有する、請求項6記載のスキャナ装置。
- 前記波面補正光学系は位相補正プレートを有する、請求項6または7記載のスキャナ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202005015719U DE202005015719U1 (de) | 2005-10-07 | 2005-10-07 | F/theta-Objektiv und Scannervorrichtung damit |
PCT/EP2006/009636 WO2007042198A1 (de) | 2005-10-07 | 2006-10-05 | F/theta-objektiv und scannervorrichtung damit |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009510535A true JP2009510535A (ja) | 2009-03-12 |
JP2009510535A5 JP2009510535A5 (ja) | 2011-02-03 |
JP4681651B2 JP4681651B2 (ja) | 2011-05-11 |
Family
ID=35502379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008533935A Active JP4681651B2 (ja) | 2005-10-07 | 2006-10-05 | Fシータ対物レンズおよびfシータ対物レンズを備えたスキャナ装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8102581B2 (ja) |
EP (1) | EP1934644B1 (ja) |
JP (1) | JP4681651B2 (ja) |
CN (1) | CN101438195B (ja) |
AT (1) | ATE516516T1 (ja) |
DE (1) | DE202005015719U1 (ja) |
WO (1) | WO2007042198A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007011902A1 (de) | 2007-03-13 | 2008-07-24 | Daimler Ag | Laserschweißvorrichtung |
DE102008029946A1 (de) | 2008-06-26 | 2009-12-31 | Limo Patentverwaltung Gmbh & Co. Kg | Scannvorrichtung für einen Laserstrahl |
CN104238071B (zh) * | 2013-06-24 | 2016-12-28 | 大族激光科技产业集团股份有限公司 | 一种F‑theta光学镜头及激光加工系统 |
TW201704800A (zh) * | 2015-07-22 | 2017-02-01 | Showin Technology Co Ltd | 光學掃描模組及其光學掃描鏡頭 |
CN105116554A (zh) * | 2015-09-08 | 2015-12-02 | 上海嘉强自动化技术有限公司 | 一种高效型连续扩束聚焦系统 |
KR101709566B1 (ko) * | 2016-06-01 | 2017-03-07 | (주)한빛레이저 | 펄스 레이저를 이용한 각인 장치 |
DE102017209325B4 (de) * | 2016-06-30 | 2021-11-04 | Jenoptik Optical Systems Gmbh | F-Theta-Objektiv mit zumindest einer ersten und einer zweiten optischen Baugruppe und eine Anordnung zur Lasermaterialbearbeitung mit einem F-Theta-Objektiv |
DE102016211811B4 (de) | 2016-06-30 | 2022-02-24 | Trumpf Laser Gmbh | F-Theta-Objektiv und Scannervorrichtung damit |
KR102603393B1 (ko) | 2016-12-06 | 2023-11-17 | 삼성디스플레이 주식회사 | 레이저 가공 장치 |
EP3693767A1 (de) * | 2019-02-05 | 2020-08-12 | Fisba AG | Vorrichtung zur lichtemission |
CN110045498A (zh) * | 2019-04-01 | 2019-07-23 | 深圳市速腾聚创科技有限公司 | 光扫描装置和激光雷达 |
DE102020202549B4 (de) | 2020-02-28 | 2022-05-05 | Trumpf Laser Gmbh | Optische Anordnung mit einem F-Theta-Objektiv |
US11945043B2 (en) * | 2020-11-20 | 2024-04-02 | Concept Laser Gmbh | Energy beam generation systems and optical systems with expanded scan fields |
KR102578688B1 (ko) * | 2023-04-20 | 2023-09-14 | 제놉스 주식회사 | 보호 윈도우 교체 시기 모니터링 기능이 구비된 에프세타 렌즈 모듈 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001051191A (ja) * | 1999-08-10 | 2001-02-23 | Sumitomo Electric Ind Ltd | fθレンズ |
JP2001062578A (ja) * | 1999-06-23 | 2001-03-13 | Sumitomo Electric Ind Ltd | レーザ穴開け加工装置 |
JP2004512549A (ja) * | 2000-10-10 | 2004-04-22 | スリーエム イノベイティブ プロパティズ カンパニー | 直接レーザイメージング装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5736709A (en) * | 1996-08-12 | 1998-04-07 | Armco Inc. | Descaling metal with a laser having a very short pulse width and high average power |
CN2284378Y (zh) * | 1996-11-11 | 1998-06-17 | 华中理工大学 | 大轴弯曲光电测量仪 |
JP4208209B2 (ja) * | 1998-06-22 | 2009-01-14 | フジノン株式会社 | コリメータレンズおよびこれを用いた光走査装置 |
KR100461300B1 (ko) * | 2002-10-21 | 2004-12-16 | 삼성전자주식회사 | 온도보정된 콜리메이팅 렌즈 및 이를 이용한 광주사장치 |
CN2585256Y (zh) * | 2002-12-18 | 2003-11-05 | 上海市激光技术研究所 | 二个孔径光阑置于前端的fθ物镜 |
CN1438510A (zh) * | 2003-01-08 | 2003-08-27 | 王青山 | 一种分区多行扫描式激光投影机 |
CN1299409C (zh) * | 2005-03-02 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | 具有单模光纤耦合及空间滤波器的激光二极管 |
-
2005
- 2005-10-07 DE DE202005015719U patent/DE202005015719U1/de not_active Expired - Lifetime
-
2006
- 2006-10-05 CN CN2006800459764A patent/CN101438195B/zh active Active
- 2006-10-05 JP JP2008533935A patent/JP4681651B2/ja active Active
- 2006-10-05 EP EP06806048A patent/EP1934644B1/de active Active
- 2006-10-05 AT AT06806048T patent/ATE516516T1/de active
- 2006-10-05 WO PCT/EP2006/009636 patent/WO2007042198A1/de active Application Filing
-
2008
- 2008-04-07 US US12/098,918 patent/US8102581B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001062578A (ja) * | 1999-06-23 | 2001-03-13 | Sumitomo Electric Ind Ltd | レーザ穴開け加工装置 |
JP2001051191A (ja) * | 1999-08-10 | 2001-02-23 | Sumitomo Electric Ind Ltd | fθレンズ |
JP2004512549A (ja) * | 2000-10-10 | 2004-04-22 | スリーエム イノベイティブ プロパティズ カンパニー | 直接レーザイメージング装置 |
Also Published As
Publication number | Publication date |
---|---|
EP1934644A1 (de) | 2008-06-25 |
US20080259427A1 (en) | 2008-10-23 |
JP4681651B2 (ja) | 2011-05-11 |
CN101438195B (zh) | 2012-06-13 |
DE202005015719U1 (de) | 2005-12-08 |
CN101438195A (zh) | 2009-05-20 |
WO2007042198A1 (de) | 2007-04-19 |
EP1934644B1 (de) | 2011-07-13 |
ATE516516T1 (de) | 2011-07-15 |
US8102581B2 (en) | 2012-01-24 |
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