JP2009302435A - Semiconductor device - Google Patents

Semiconductor device Download PDF

Info

Publication number
JP2009302435A
JP2009302435A JP2008157587A JP2008157587A JP2009302435A JP 2009302435 A JP2009302435 A JP 2009302435A JP 2008157587 A JP2008157587 A JP 2008157587A JP 2008157587 A JP2008157587 A JP 2008157587A JP 2009302435 A JP2009302435 A JP 2009302435A
Authority
JP
Japan
Prior art keywords
insulating film
gate
film
dielectric constant
hfet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008157587A
Other languages
Japanese (ja)
Other versions
JP5301208B2 (en
Inventor
Yukihiko Maeda
就彦 前田
Masanobu Hiroki
正伸 廣木
Takashi Kobayashi
隆 小林
Takatomo Enoki
孝知 榎木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2008157587A priority Critical patent/JP5301208B2/en
Publication of JP2009302435A publication Critical patent/JP2009302435A/en
Application granted granted Critical
Publication of JP5301208B2 publication Critical patent/JP5301208B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
    • H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/51—Insulating materials associated therewith
    • H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
    • H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/2003—Nitride compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To achieve a MIS structure HFET, using a nitride semiconductor, which reduces a gate leakage current more effectively and improves device reliability during application of a large gate voltage. <P>SOLUTION: In the heterostructure field-effect transistor having a gate insulating film between the nitride semiconductor 1 and a gate electrode 3, the gate insulating film comprises a first insulating film 6 close to the nitride semiconductor 1 and a second insulating film 7 close to the gate electrode 3 as components, the first insulating film 6 is an insulating film of 4 to 200 nm in thickness made of an insulator of ≥20 in dielectric constant, for example, HfO<SB>2</SB>, HfAlO, HfON, and ZrO<SB>2</SB>, and the second insulating film 7 is an insulating film which is made of SiO<SB>2</SB>or Al<SB>2</SB>O<SB>3</SB>and ≥2 nm thick and is smaller in film thickness than the first insulating film 6. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は半導体装置に関し、特に、高温・高出力・高耐圧の超高周波化合物半導体電界効果トランジスタに関する。   The present invention relates to a semiconductor device, and more particularly, to an ultrahigh frequency compound semiconductor field effect transistor having high temperature, high output, and high breakdown voltage.

窒化物半導体を用いたヘテロ構造電界効果トランジスタ（Heterostructure Field Effect Transistor：ＨＦＥＴ）（たとえばＧａＮ系ＨＦＥＴ）は、次世代の高温・高出力・高耐圧の超高周波トランジスタとして非常に有望であり、その実用化に向けて現在盛んに研究が行われている（たとえば下記非特許文献１参照）。   Heterostructure field effect transistors (HFETs) using nitride semiconductors (for example, GaN-based HFETs) are very promising as next-generation high-frequency, high-power, high-voltage ultrahigh-frequency transistors, and their practical use Currently, active research is being conducted toward the realization (see, for example, Non-Patent Document 1 below).

しかし、ＧａＮ系ＨＦＥＴは、ゲートリーク電流が大きく、これを低減することが重要な課題となっている。この課題を解決するＨＦＥＴ構造として、ゲート電極の下方の障壁層窒化物半導体上に絶縁膜（ゲート絶縁膜）を積層した、いわゆる絶縁ゲート構造（ＭＩＳ構造：Metal-Insulator-Semiconductor構造）のＨＦＥＴ（ＭＩＳ構造ＨＦＥＴ）が注目されており、ＭＩＳ構造の採用によって、ゲートリーク電流の低減が可能となるとともに、一般に、ゲート耐圧も増大し、その結果として大きなゲート電圧の印加に際してのデバイス信頼性を向上することが可能となる。
M. Asif Khan, et al., IEEE Electron Device Lett. 21, 63-65 (2000). However, the GaN-based HFET has a large gate leakage current, and reducing it is an important issue. As an HFET structure that solves this problem, an HFET having a so-called insulated gate structure (MIS structure: Metal-Insulator-Semiconductor structure) in which an insulating film (gate insulating film) is stacked on a barrier layer nitride semiconductor below a gate electrode. MIS structure HFET) has attracted attention, and by adopting the MIS structure, it is possible to reduce the gate leakage current and generally increase the gate breakdown voltage, resulting in improved device reliability when applying a large gate voltage. It becomes possible to do.
M. Asif Khan, et al., IEEE Electron Device Lett. 21, 63-65 (2000).

ＭＩＳ構造ＨＦＥＴのゲート絶縁膜としては、（１）誘電率が高い、（２）絶縁性が高い（バンドギャップが大きい）、また、（３）窒化物半導体と高品質の半導体／絶縁体界面の形成が可能、なる条件を満たす絶縁膜が望ましいが、これらすべての条件を同時に満たす絶縁膜が現在知られていないため、望ましい絶縁膜種や絶縁膜構造に関しての検討が現在進められている。   As the gate insulating film of the MIS structure HFET, (1) the dielectric constant is high, (2) the insulating property is high (the band gap is large), and (3) the nitride semiconductor and the high-quality semiconductor / insulator interface An insulating film that satisfies the conditions that can be formed is desirable, but since an insulating film that satisfies all these conditions is not known at present, studies are being made on desirable insulating film types and insulating film structures.

このような状況の中で、ＧａＮ系ＭＩＳ構造ＨＦＥＴにおいて、ゲートリーク電流をより効果的に低減し、また、大きなゲート電圧の印加に際してのデバイス信頼性の向上も可能とする、ＭＩＳ構造ＨＦＥＴを実現することが望まれていた。   Under such circumstances, in GaN-based MIS structure HFETs, MIS structure HFETs that reduce gate leakage current more effectively and improve device reliability when applying large gate voltages are realized. It was hoped to do.

本発明は上記の要望に鑑みてなされたものであり、本発明が解決しようとする課題は、窒化物半導体を用いたＭＩＳ構造ＨＦＥＴにおいて、ゲートリーク電流をより効果的に低減し、また、大きなゲート電圧の印加に際してのデバイス信頼性の向上も可能とする、ＭＩＳ構造ＨＦＥＴを実現することである。   The present invention has been made in view of the above-mentioned demands, and the problem to be solved by the present invention is that the gate leakage current is more effectively reduced and the MIS structure HFET using a nitride semiconductor is greatly reduced. An object of the present invention is to realize a MIS structure HFET that can improve device reliability when a gate voltage is applied.

本発明においては、上記課題を解決するために、請求項１に記載のように、
窒化物半導体とゲート電極との間にゲート絶縁膜を有するヘテロ構造電界効果トランジスタである半導体装置において、前記ゲート絶縁膜は、前記窒化物半導体に近い側の第１の絶縁膜と、前記ゲート電極に近い側の第２の絶縁膜とを構成要素とし、前記第１の絶縁膜が、ＨｆＯ２、ＨｆＡｌＯ、ＨｆＯＮ、ＺｒＯ２を例とする、誘電率が２０以上の絶縁物からなる厚さ４ｎｍ以上２００ｎｍ以下の絶縁膜であり、前記第２の絶縁膜が、ＳｉＯ２またはＡｌ２Ｏ３からなる厚さ２ｎｍ以上かつ前記第１の絶縁膜の膜厚以下の絶縁膜であることを特徴とする半導体装置を構成する。 In the present invention, in order to solve the above problem, as described in claim 1,
In the semiconductor device which is a heterostructure field effect transistor having a gate insulating film between a nitride semiconductor and a gate electrode, the gate insulating film includes a first insulating film on a side close to the nitride semiconductor, and the gate electrode The first insulating film is made of an insulator having a dielectric constant of 20 or more, for example, HfO 2 , HfAlO, HfON, ZrO 2. It is an insulating film having a thickness of 200 nm or less, and the second insulating film is an insulating film made of SiO 2 or Al 2 O 3 and having a thickness of 2 nm or more and not more than the thickness of the first insulating film. A semiconductor device is configured.

また、本発明においては、請求項２に記載のように、
請求項１に記載の半導体装置において、前記ゲート絶縁膜は、前記窒化物半導体と前記第１の絶縁膜との間に挿入された第３の絶縁膜を構成要素とし、前記第３の絶縁膜が、Ｓｉ３Ｎ４からなる厚さ０．５ｎｍ以上２．０ｎｍ以下の薄層であることを特徴とする半導体装置を構成する。 In the present invention, as described in claim 2,
2. The semiconductor device according to claim 1, wherein the gate insulating film includes a third insulating film inserted between the nitride semiconductor and the first insulating film as a component, and the third insulating film. Is a thin layer made of Si 3 N 4 and having a thickness of 0.5 nm to 2.0 nm.

窒化物半導体のヘテロ構造電界効果トランジスタ（Heterostructure Field Effect Transistor：ＨＦＥＴ）の一形態である、絶縁ゲート構造のＨＦＥＴ（ＭＩＳ構造ＨＦＥＴ）において、主要なゲート絶縁膜として、高誘電率膜であるＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物の厚膜が積層され、かつ、前記の高誘電率膜の上に、高障壁を有する（すなわちバンドギャップの大きい）ＳｉＯ２あるいはＡｌ２Ｏ３の薄層膜が積層されていることを特徴とする、２層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを構成することによって、ゲートリーク電流をより効果的に低減し、また、大きなゲート電圧の印加に際してのデバイス信頼性の向上も可能とする、ＭＩＳ構造ＨＦＥＴが実現する。 In an HFET having an insulated gate structure (MIS structure HFET), which is a form of a heterostructure field effect transistor (HFET) of a nitride semiconductor, HfO 2 that is a high dielectric constant film is used as a main gate insulating film. SiO 2 or Al 2 having a high barrier (that is, having a large band gap) on which a thick film of an insulator having a dielectric constant of 20 or more such as HfAlO or ZrO 2 is laminated. By forming a MIS structure HFET having a two-layer insulated gate structure, characterized in that a thin layer film of O 3 is laminated, the gate leakage current can be more effectively reduced and a large gate voltage can be obtained. An MIS structure HFET that can improve device reliability upon application is realized.

また、さらに、上記のＭＩＳ構造ＨＦＥＴにおいて、主要なゲート絶縁膜である高誘電率膜（ＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物）と、窒化物半導体との間に、高品質の半導体／絶縁体界面を形成するためのＳｉ３Ｎ４の極薄層膜が挿入されていることを特徴とする、３層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを用いることによって、ゲートリーク電流をより効果的に低減し、また、大きなゲート電圧の印加に際してのデバイス信頼性の向上も可能とすることに加えて、いわゆる電流コラプス現象（大きな負のゲート電圧や大きなドレイン電圧を印加した際、それらが大きくない場合に比べて、ドレイン電流が大きく低減してしまう、望ましくない現象）をほぼ消失させることを可能とする、ＭＩＳ構造ＨＦＥＴが実現する。 Furthermore, in the MIS structure HFET, a high dielectric constant film (an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 ), which is a main gate insulating film, and a nitride semiconductor By using a MIS structure HFET having a three-layer insulated gate structure, characterized in that an ultrathin layer film of Si 3 N 4 for forming a high quality semiconductor / insulator interface is inserted In addition to reducing leakage current more effectively and improving device reliability when a large gate voltage is applied, a so-called current collapse phenomenon (a large negative gate voltage or a large drain voltage is applied) It is possible to substantially eliminate the undesirable phenomenon that the drain current is greatly reduced compared to the case where they are not large. IS structure HFET is realized.

本発明においては、窒化物半導体を用いたＭＩＳ構造ＨＦＥＴにおいて、窒化物半導体上に、ゲート絶縁膜の主要な構成要素である第１の絶縁膜として、高誘電率膜であるＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物の厚膜が形成され、かつ、前記第１の絶縁膜の上に、ゲート絶縁膜の構成要素である第２の絶縁膜として、高障壁を有する（すなわちバンドギャップの大きい）ＳｉＯ２あるいはＡｌ２Ｏ３の薄層膜が積層されていることを特徴とする、２層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを構成する。 In the present invention, in a MIS structure HFET using a nitride semiconductor, a high dielectric constant film such as HfO 2 , HfAlO, or the like is used as the first insulating film which is a main component of the gate insulating film on the nitride semiconductor. A thick film of an insulator having a dielectric constant of 20 or more such as ZrO 2 is formed, and a high barrier is provided on the first insulating film as a second insulating film that is a component of the gate insulating film A MIS structure HFET having a two-layer insulated gate structure, characterized in that a thin layer film of SiO 2 or Al 2 O 3 (that is, a large band gap) is laminated.

また、さらに、上記のＭＩＳ構造ＨＦＥＴにおいて、第１の絶縁膜（ＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物）と窒化物半導体との間に、ゲート絶縁膜の構成要素である第３の絶縁膜として、高品質の半導体／絶縁体界面を形成するための、Ｓｉ３Ｎ４の極薄層膜が挿入されていることを特徴とする、３層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを構成する。 Further, in the MIS structure HFET, a component of the gate insulating film is provided between the first insulating film (an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 ) and the nitride semiconductor. As the third insulating film, an Si 3 N 4 ultrathin layer film for forming a high-quality semiconductor / insulator interface is inserted. A MIS structure HFET is formed.

本発明による作用を、図を用いて説明する。   The effect | action by this invention is demonstrated using figures.

図９は、ＧａＮ系ＨＦＥＴの層構造および電極配置を模式的に示したものである。図において、障壁層半導体とチャネル層障壁層とからなるる障壁層半導体／チャネル層半導体ヘテロ構造（窒化物半導体１）上に、ソース電極２、ゲート電極３、ドレイン電極４が配置され、電界効果トランジスタが構成されている様子が示されている。   FIG. 9 schematically shows the layer structure and electrode arrangement of a GaN-based HFET. In the figure, a source electrode 2, a gate electrode 3, and a drain electrode 4 are arranged on a barrier layer semiconductor / channel layer semiconductor heterostructure (nitride semiconductor 1) composed of a barrier layer semiconductor and a channel layer barrier layer. A state in which the transistor is configured is shown.

図１０は、ＧａＮ系ＭＩＳ構造ＨＦＥＴの層構造および電極配置を模式的に示したものであり、窒化物半導体１の障壁層半導体上に絶縁膜５が積層され、ゲート電極３下の絶縁膜５が、ゲート絶縁膜としての役割を担う様子が示されている。なお、図１０においては、ソース・ゲート電極間およびゲート・ドレイン電極間にも、ゲート電極３下と同じ絶縁膜５が積層されているが、前記電極間領域における絶縁膜５は、ゲート絶縁膜としてではなく、表面パッシベーション膜としての役割を担っている。   FIG. 10 schematically shows the layer structure and electrode arrangement of a GaN-based MIS structure HFET. An insulating film 5 is stacked on the barrier layer semiconductor of the nitride semiconductor 1, and the insulating film 5 below the gate electrode 3. However, it is shown that it plays a role as a gate insulating film. In FIG. 10, the same insulating film 5 as that under the gate electrode 3 is laminated between the source and gate electrodes and between the gate and drain electrodes, but the insulating film 5 in the interelectrode region is a gate insulating film. Instead, it plays a role as a surface passivation film.

図１１は、ＨＦＥＴとＭＩＳ構造ＨＦＥＴのゲートリーク電流特性（ゲートリーク電流のゲート電圧依存性）を模式的に示して比較したものであり、ＭＩＳ構造においては、ゲート電極と障壁層半導体の間に絶縁膜（ゲート絶縁膜）が挿入されている結果、逆方向（負）電圧および正方向（正）電圧のゲートリーク電流が低減するとともに、正方向のゲート耐圧（印加可能なゲート電圧）が増大する様子が示されている。このように、ＧａＮ系ＨＦＥＴにおいては、ＭＩＳ構造を採用することによって、ゲートリーク電流およびゲート耐圧の点で、大きく特性を向上させることが可能となる。   FIG. 11 schematically shows and compares the gate leakage current characteristics (the gate voltage dependency of the gate leakage current) of the HFET and the MIS structure HFET. In the MIS structure, the gate electrode and the barrier layer semiconductor have a comparison. As a result of inserting the insulating film (gate insulating film), the gate leakage current of the reverse direction (negative) voltage and the positive direction (positive) voltage is reduced and the gate breakdown voltage (applicable gate voltage) in the positive direction is increased. The state of doing is shown. Thus, in the GaN-based HFET, by adopting the MIS structure, it is possible to greatly improve the characteristics in terms of gate leakage current and gate breakdown voltage.

表１は、窒化物半導体および絶縁膜のバンドギャップＥｇおよび誘電率ε（比誘電率）の値を、窒化物半導体ＧａＮ、ＡｌＮ、およびＩｎＮ、ゲート絶縁膜の侯補である絶縁膜Ｓｉ３Ｎ４、ＳｉＯ２、Ａｌ２Ｏ３、ＺｒＯ２、ＨｆＯ２に対して示したものであり、特徴による分類がなされている。最も一般的なゲート絶縁膜は、窒化物半導体との間に高品質の半導体／絶縁体界面が形成可能なＳｉ３Ｎ４であるが、バンドギャップが表１の絶縁膜の中で最も小さく（したがって絶縁性が低く）、誘電率も窒化物半導体よりも小さい。また、ＳｉＯ２およびＡｌ２Ｏ３はバンドギャップが大きい絶縁膜、ＺｒＯ２およびＨｆＯ２は誘電率の高い絶縁膜、という特徴を有する。 Table 1 shows the values of the band gap E g and the dielectric constant ε (relative dielectric constant) of the nitride semiconductor and the insulating film, and the insulating film Si 3 that compensates for the nitride semiconductors GaN, AlN, and InN, and the gate insulating film. These are shown for N 4 , SiO 2 , Al 2 O 3 , ZrO 2 , and HfO 2 , and are classified according to characteristics. The most common gate insulating film is Si 3 N 4 capable of forming a high-quality semiconductor / insulator interface with a nitride semiconductor, but the band gap is the smallest among the insulating films in Table 1 ( Therefore, the insulating property is low) and the dielectric constant is smaller than that of the nitride semiconductor. Further, SiO 2 and Al 2 O 3 are characterized by an insulating film having a large band gap, and ZrO 2 and HfO 2 are characterized by an insulating film having a high dielectric constant.

Figure 2009302435
ＭＩＳ構造ＨＦＥＴのゲート絶縁膜としては、（１）誘電率が高い、（２）絶縁性が高い（バンドギャップが大きい）、また、（３）窒化物半導体と高品質の半導体／絶縁体界面の形成が可能、なる条件を満たす絶縁膜が望ましいが、表１に示されているように、これらすべての条件を同時に満たす絶縁膜の侯補は現在知られていない。そこで、望ましい絶縁膜種および絶縁膜構造についての検討が必要とされる。
Figure 2009302435
 As the gate insulating film of the MIS structure HFET, (1) the dielectric constant is high, (2) the insulating property is high (the band gap is large), and (3) the nitride semiconductor and the high-quality semiconductor / insulator interface Although an insulating film that satisfies the condition that it can be formed is desirable, as shown in Table 1, there is currently no known compensation for an insulating film that satisfies all these conditions simultaneously. Therefore, it is necessary to study a desirable insulating film type and insulating film structure.

以下に、本発明において採用された絶縁膜種および絶縁膜構造と、その効果について説明する。   Hereinafter, the insulating film type and insulating film structure employed in the present invention and the effects thereof will be described.

まず、ＭＩＳ構造において高誘電率絶縁膜を用いることによって可能となる、膜厚の大きい絶縁ゲート膜を有するＭＩＳ構造の利点を説明する。   First, an advantage of the MIS structure having an insulating gate film having a large thickness, which is made possible by using a high dielectric constant insulating film in the MIS structure, will be described.

図１は、低誘電率・大バンドギャップ（高障壁）のゲート絶縁膜（誘電率εｌｏｗ、膜厚ｄｌｏｗｋ、たとえばＳｉＯ２膜）を有するＭＩＳ構造ＨＦＥＴ（高障壁絶縁膜ＭＩＳ構造ＨＦＥＴ、図１の上部に示す）と、高誘電率・小バンドギャップのゲート絶縁膜（誘電率εｈｉｇｈ、膜厚ｄｈｉｇｈｋ、たとえば厚膜ＨｆＯ２膜）を有するＭＩＳ構造ＨＦＥＴ（高誘電率膜ＭＩＳ構造ＨＦＥＴ、図１の下部に示す）のポテンシャル形状を模式的に比較したものであり、ここでは、両構造における真性の利得（相互コンダクタンス）が等しいという条件のもとでの比較とするために、両構造の誘電率と膜厚との間には、ｄｌｏｗｋ/εｌｏｗ＝ｄｈｉｇｈｋ/εｈｉｇｈなる関係が成り立っているものとする（ゲート絶縁膜に対応する絶縁膜容量（ｄ/εに反比例）が利得を決定、容量が大きい方が利得大）。 FIG. 1 shows a MIS structure HFET (high barrier insulating film MIS structure HFET) having a low dielectric constant / large band gap (high barrier) gate insulating film (dielectric constant ε low , film thickness d lowk , eg, SiO 2 film). MIS structure HFET (high dielectric constant film MIS structure HFET) having a high dielectric constant and small band gap gate insulating film (dielectric constant ε high , film thickness d highk , for example, thick film HfO 2 film) ) (Shown in the lower part of FIG. 1), and in order to make a comparison under the condition that the intrinsic gain (transconductance) in both structures is equal, between the dielectric constant and thickness of the structure, corresponding to (the gate insulating film is assumed that d lowk / ε low = d highk / ε high the relationship is made up absolute Membrane capacitance (inversely proportional to d / epsilon) is determined gain, high gain better capacity is large).

このように、利得が同じという条件で比較すると、図１に示されているように、高誘電率絶縁膜ＭＩＳ構造は高障壁絶縁膜ＭＩＳ構造に比べて、ゲート絶縁膜の障壁層の高さは低くなるものの、ゲート絶縁膜の膜厚は大きくなる（ｄｈｉｇｈｋ＞ｄｌｏｗｋ）、というトレードオフ関係が存在する。ゲート絶縁膜の効果、すわなち、ゲートリーク電流の抑制効果およびゲート耐圧の増大効果は、絶縁膜の障壁層が高く膜厚が大きいほど大きくなるので、前述のトレードオフ関係の結果、ゲート絶縁膜の効果の、両ＭＩＳ構造の真性の絶縁膜物性に依存する相異は、一般に小さくなる。 Thus, when compared under the condition that the gain is the same, as shown in FIG. 1, the high dielectric constant insulating film MIS structure is higher in the height of the barrier layer of the gate insulating film than the high barrier insulating film MIS structure. However, there is a trade-off relationship that the thickness of the gate insulating film is increased (d highk > d lowk ). The effect of the gate insulating film, that is, the effect of suppressing the gate leakage current and the effect of increasing the gate withstand voltage increases as the barrier layer of the insulating film increases and the film thickness increases. The difference in film effects depending on the intrinsic insulating film physical properties of both MIS structures is generally small.

そこで、両ＭＩＳ構造の優劣を考える際には、真性の絶縁膜物性の相異よりも、窒化物半導体が、現状においては転位や点欠陥などの結晶欠陥を非常に多く含んでいる材料であることを考慮することが重要になってくる。すなわち、窒化物半導体においては、障壁層半導体表面に欠陥が存在する結果、その上に積層する絶縁膜も前記の欠陥の影響を受けることとなり、絶縁膜の膜質は、たとえばＳｉ上のような完全性の高い結晶表面上に積層する場合とは異なってくる。このような状況は、たとえば代表的な窒化物半導体障壁層であるＡｌＧａＮにおいて、Ａｌ組成が大きくなると、さらに著しくなる。その結果、窒化物半導体上のゲート絶縁膜は、絶縁膜形成の初期において、窒化物半導体上の結晶欠陥の影響を受け、真性の絶縁膜物性が必ずしも反映されない領域が部分的に生じ、このような領域が、ゲートリーク電流の電流リーク経路あるいはゲート耐圧の本来の増大の妨げとなるような状況が生じる。しかし、ゲート絶縁膜の膜厚が小さい時に顕著なこのような状況は、一般に、ゲート絶縁膜の膜厚の増大によって大きく緩和することが可能である。   Therefore, when considering the superiority or inferiority of both MIS structures, nitride semiconductors are materials that contain a large amount of crystal defects such as dislocations and point defects at present, rather than differences in intrinsic insulating film properties. It is important to consider this. In other words, in a nitride semiconductor, defects exist on the surface of the barrier layer semiconductor. As a result, the insulating film laminated thereon is also affected by the defects, and the film quality of the insulating film is, for example, perfect as on Si. This is different from the case of stacking on a highly crystalline surface. Such a situation becomes more remarkable when the Al composition is increased in AlGaN, which is a typical nitride semiconductor barrier layer, for example. As a result, the gate insulating film on the nitride semiconductor is affected by crystal defects on the nitride semiconductor in the initial stage of forming the insulating film, and a region where the intrinsic insulating film properties are not necessarily reflected is partially generated. A situation occurs in which such a region hinders the inherent increase in the current leakage path of the gate leakage current or the gate breakdown voltage. However, such a conspicuous situation when the thickness of the gate insulating film is small can generally be relieved greatly by increasing the thickness of the gate insulating film.

したがって、ＧａＮ系ＭＩＳ構造ＨＦＥＴにおいては、ＭＩＳ構造において高誘電率絶縁膜を用いることによって可能となる、膜厚の大きい絶縁ゲート膜を有するＭＩＳ構造、すなわち、高誘電率絶縁膜ＭＩＳ構造が、高障壁絶縁膜ＭＩＳ構造に比べて、大きな優位性を有することになる。   Therefore, in the GaN-based MIS structure HFET, a MIS structure having an insulating gate film with a large thickness, that is, a high dielectric constant insulating film MIS structure, which can be achieved by using a high dielectric constant insulating film in the MIS structure, Compared with the barrier insulating film MIS structure, it has a great advantage.

図２は、図１に示された高障壁絶縁膜ＭＩＳ構造ＨＦＥＴおよび高誘電率絶縁膜ＭＩＳ構造ＨＦＥＴ（図の下部）の、それぞれ複数のデバイスにおける、ゲートリーク電流特性を模式的に比較したものである。図中、実線と点線に挟まれた領域がばらつきの範囲を示している。   FIG. 2 is a schematic comparison of gate leakage current characteristics in a plurality of devices of the high barrier insulating film MIS structure HFET and the high dielectric constant insulating film MIS structure HFET (lower part of the figure) shown in FIG. It is. In the figure, the region between the solid line and the dotted line indicates the range of variation.

高障壁絶縁膜ＭＩＳ構造ＨＦＥＴにおいては、絶縁膜の膜厚が小さいために、窒化物半導体の結晶欠陥の影響が露に特性に現れ、ゲート耐圧が本来よりも低下しているデバイスも無視できない割合で存在する（図の上部）のに対して、高誘電率絶縁膜ＭＩＳ構造ＨＦＥＴにおいては、絶縁膜の膜厚が大きいために、前記のような欠点が大きく緩和され、その結果、デバイスによるゲート耐圧のばらつきが消失し、換言すれば、大きなゲート電圧の印加に際してのデバイス信頼性が向上している様子（図の下部）が示されている。   In the high barrier insulating film MIS structure HFET, since the film thickness of the insulating film is small, the influence of the crystal defects of the nitride semiconductor appears in the characteristics, and the device whose gate withstand voltage is lower than the original cannot be ignored In the high dielectric constant insulating film MIS structure HFET, since the insulating film thickness is large, the above-described drawbacks are greatly relieved. This shows that the variation in breakdown voltage disappears, in other words, the device reliability is improved when a large gate voltage is applied (lower part of the figure).

図３は、本発明による、高誘電率高障壁２層絶縁ゲート構造の層構造を模式的に示したものである。図において、ゲートリーク電流をさらに低減するために、図１における高誘電率絶縁膜ＭＩＳ構造ＨＦＥＴにおいて、第１の絶縁膜６である高誘電率絶縁膜の一部が、第２の絶縁膜７である膜厚の小さい高障壁絶縁膜で置き換えられた、２層絶縁ゲート構造の層構造が示されている。   FIG. 3 schematically shows a layer structure of a high dielectric constant high barrier two-layer insulated gate structure according to the present invention. In the drawing, in order to further reduce the gate leakage current, in the high dielectric constant insulating film MIS structure HFET in FIG. 1, a part of the high dielectric constant insulating film which is the first insulating film 6 is formed by the second insulating film 7. A layer structure of a two-layer insulated gate structure replaced with a high-barrier insulating film having a small film thickness is shown.

ここで、図３に示された層構造を有するＭＩＳ構造ＨＦＥＴにおいては、その真性の利得が、図１における高誘電率絶縁膜ＭＩＳ構造ＨＦＥＴの真性の利得と等しくなるように、高障壁層絶縁膜（誘電率εｌｏｗ）の膜厚（ｄｔｈｉｎ）を与えた場合、その下に積層されている、主要なゲート絶縁膜としての高誘電率絶縁膜（誘電率εｈｉｇｈ）の膜厚（ｄｔｈｉｃｋ）は、

ｄｔｈｉｃｋ＝ｄｈｉｇｈｋ− (εｈｉｇｈ/εｌｏｗ)ｄｔｈｉｎ

なる関係で与えられているものとする。すなわち、前記の関係が成り立つ時には、図３における２層絶縁膜（高障壁絶縁膜（誘電率εｌｏｗ、膜厚ｄｔｈｉｎ）／高誘電率絶縁膜（誘電率εｈｉｇｈ、膜厚ｄｔｈｉｃｋ））は、図１における単層の高誘電率絶縁膜（誘電率εｈｉｇｈ、膜厚ｄｈｉｇｈｋ）と、絶縁膜容量が等しくなり、ＭＩＳ構造ＨＦＥＴの真性の利得は等しくなる。 Here, in the MIS structure HFET having the layer structure shown in FIG. 3, the high barrier layer insulation is set so that the intrinsic gain becomes equal to the intrinsic gain of the high dielectric constant insulating film MIS structure HFET in FIG. When the film thickness (d thin ) of the film (dielectric constant ε low ) is given, the film thickness (d of the high dielectric constant insulating film (dielectric constant ε high ) as the main gate insulating film laminated below the film (d thin ) thick ))

d thick = d highk − (ε high / ε low ) d thin

Is given by the relationship. That is, when the above relationship is established, the two-layer insulating film in FIG. 3 (high barrier insulating film (dielectric constant ε low , film thickness d thin ) / high dielectric constant insulating film (dielectric constant ε high , film thickness d thick )) 1 is equal to the single-layer high-dielectric-constant insulating film (dielectric constant ε high , film thickness d highk ) in FIG. 1, and the intrinsic gain of the MIS structure HFET is equal.

また、主要なゲート絶縁膜としての高誘電率絶縁膜（第１の絶縁膜６）を用いることによる、膜厚の条件として、

ｄｔｈｉｃｋ≧ｄｔｈｉｎ

なる条件が、本発明の特徴となる。この時、

ｄｔｈｉｎ≦｛(εｌｏｗ/(εｈｉｇｈ + εｌｏｗ)}ｄｈｉｇｈｋ

であり、εｈｉｇｈ〜２０とすると、高障壁層絶縁膜がＳｉＯ２、Ａｌ２Ｏ３の時、ｄｔｈｉｎはｄｈｉｇｈｋのそれぞれ１/６、１/３以下となる。 In addition, as a condition of film thickness by using a high dielectric constant insulating film (first insulating film 6) as a main gate insulating film,

d thick ≧ d thin

This condition is a feature of the present invention. At this time,

d thin ≦ {(ε low / (ε high + ε low )} d highk

Assuming that ε high ˜20, when the high barrier layer insulating film is SiO 2 or Al 2 O 3 , d thin is 1/6 or 1/3 or less of d highk , respectively.

図４は、図３に層構造が示されている本発明による高誘電率高障壁２層ゲート絶縁膜のポテンシャル形状を模式的に示したものであり、主要なゲート絶縁膜である高誘電率絶縁膜の上に、膜厚の小さい高障壁絶縁膜（大バンドギャップ絶縁膜）が積層されている様子が示されている。   FIG. 4 schematically shows the potential shape of the high dielectric constant high barrier two-layer gate insulating film according to the present invention whose layer structure is shown in FIG. 3, and the high dielectric constant which is the main gate insulating film. A state in which a high barrier insulating film (large band gap insulating film) having a small film thickness is stacked on the insulating film is shown.

高誘電率絶縁膜において、窒化物半導体表面の欠陥による絶縁膜の膜質への悪影響を厚膜化により軽減した状況においては、高誘電率絶縁膜の膜厚をさらに増大させるよりも、膜厚が小さくても高障壁絶縁膜を積層することにより、ゲートリーク電流をより有効に低減することが可能となる。これは、高誘電率絶縁膜に残存する、定常状態に近づきつつある不完全な構造の影響が、絶縁膜の２層化により新たに形成される絶縁膜界面の存在、および、より高い障壁層の設置によって、有効に断ち切られるためであると考えられる。   In a high dielectric constant insulating film, in a situation where the adverse effect on the film quality of the insulating film due to defects on the surface of the nitride semiconductor is reduced by increasing the film thickness, the film thickness is larger than increasing the film thickness of the high dielectric constant insulating film. Even if it is small, the gate leakage current can be more effectively reduced by stacking the high barrier insulating film. This is because the influence of the incomplete structure remaining in the high dielectric constant insulating film, which is approaching the steady state, is due to the presence of the insulating film interface newly formed by the two-layered insulating film, and the higher barrier layer. It is thought that it is because it is cut off effectively by the installation of.

図５は、図４に示される、本発明による高誘電率高障壁２層ゲート絶縁膜を用いたＭＩＳ構造ＨＦＥＴの構成を模式的に示したものである。図において、窒化物半導体１とゲート電極３との間にゲート絶縁膜を有するヘテロ構造電界効果トランジスタであって、該ゲート絶縁膜は、窒化物半導体１に近い側の第１の絶縁膜６（高誘電率絶縁膜）と、ゲート電極３に近い側の第２の絶縁膜７（高障壁絶縁膜）とを構成要素としていることを特徴とするヘテロ構造電界効果トランジスタが示されている。この場合のゲート絶縁膜は、第１の絶縁膜６と第２の絶縁膜７とを構成要素とする２層ゲート絶縁膜である。   FIG. 5 schematically shows the structure of the MIS structure HFET shown in FIG. 4 using the high dielectric constant high barrier two-layer gate insulating film according to the present invention. In the figure, a heterostructure field effect transistor having a gate insulating film between a nitride semiconductor 1 and a gate electrode 3, the gate insulating film being a first insulating film 6 (on the side close to the nitride semiconductor 1) ( A hetero-structure field effect transistor is shown in which a high dielectric constant insulating film) and a second insulating film 7 (high barrier insulating film) closer to the gate electrode 3 are constituent elements. The gate insulating film in this case is a two-layer gate insulating film having the first insulating film 6 and the second insulating film 7 as constituent elements.

図６は、図５に示された高誘電率高障壁２層ゲート絶縁膜ＭＩＳ構造ＨＦＥＴ（図４にポテンシャル形状を示す）のゲートリーク特性を、単層の高誘電率ゲート絶縁膜ＭＩＳ構造ＨＦＥＴ（図１の下部にポテンシャル形状を示す）のそれと比較して示したものであり、薄層の高障壁絶縁膜（第２の絶縁膜７）を付加した結果、ゲートリーク電流が低減する様子が示されている。これで、本発明による、高誘電率高障壁２層ゲート絶縁膜の作用が示された。   6 shows the gate leakage characteristics of the high dielectric constant high barrier two-layer gate insulating film MIS structure HFET shown in FIG. 5 (the potential shape is shown in FIG. 4), and the single-layer high dielectric constant gate insulating film MIS structure HFET. (The potential shape is shown in the lower part of FIG. 1) Compared to that of FIG. 1, as a result of adding a thin high-barrier insulating film (second insulating film 7), the state in which the gate leakage current is reduced is shown. It is shown. Thus, the operation of the high dielectric constant high barrier two-layer gate insulating film according to the present invention is shown.

図７は、本発明による、高誘電率高障壁３層絶縁ゲート構造の層構造と、これを用いたＭＩＳ構造ＨＦＥＴの構成を模式的に示したものである。図において、高品質の半導体／絶縁体界面の形成が可能なＳｉ３Ｎ４膜（第３の絶縁膜８）を、窒化物半導体１の薄層障壁層半導体と高誘電率絶縁膜（第１の絶縁膜６）の間に、薄層として挿入した層構造が示されている。すなわち、図７に示された層構造は、図５に示された層構造に、第３の絶縁膜８を付加してなる層構造である。この第３の絶縁膜８もゲート絶縁膜の構成要素となっていて、この場合のゲート絶縁膜は、第１の絶縁膜６と、第２の絶縁膜７と第３の絶縁膜８とを構成要素とする３層ゲート絶縁膜である。ここで、Ｓｉ３Ｎ４膜は、良質な界面の形成のためには、膜厚は非常に小さくても十分であり、また、この時には、Ｓｉ３Ｎ４膜の挿入による利得の低下は無視することができる。 FIG. 7 schematically shows a layer structure of a high dielectric constant, high barrier, three-layer insulated gate structure according to the present invention and a configuration of a MIS structure HFET using the layer structure. In the figure, a Si 3 N 4 film (third insulating film 8) capable of forming a high-quality semiconductor / insulator interface is formed of a thin barrier layer semiconductor of a nitride semiconductor 1 and a high dielectric constant insulating film (first dielectric film). A layer structure inserted as a thin layer is shown between the insulating films 6). That is, the layer structure shown in FIG. 7 is a layer structure in which the third insulating film 8 is added to the layer structure shown in FIG. The third insulating film 8 is also a component of the gate insulating film. In this case, the gate insulating film includes the first insulating film 6, the second insulating film 7, and the third insulating film 8. A three-layer gate insulating film as a constituent element. Here, the Si 3 N 4 film, for the formation of high-quality interface, the thickness is also very small enough, also at this time, ignoring the reduction in gain due to the insertion of the Si 3 N 4 film can do.

図８に、本発明による、極薄膜のＳｉ３Ｎ４膜（第３の絶縁膜８）が挿入された高誘電率高障壁３層ゲート絶縁膜のポテンシャル形状を模式的に示した。 FIG. 8 schematically shows a potential shape of a high dielectric constant high barrier three-layer gate insulating film in which an ultra-thin Si 3 N 4 film (third insulating film 8) is inserted according to the present invention.

図７に示される、極薄層のＳｉ３Ｎ４膜が挿入された３層ゲート絶縁膜のＭＩＳ構造ＨＦＥＴは、ゲートリーク特性およびゲート耐圧のデバイス信頼性においては、図６に示される２層ゲート絶縁膜のＭＩＳ構造ＨＦＥＴと全く同じ性能であるが、極薄膜のＳｉ３Ｎ４膜が挿入された３層ゲート絶縁膜のＭＩＳ構造ＨＦＥＴにおいては、高品質の半導体／絶縁体界面が形成される結果、２層ゲート絶縁膜のＭＩＳ構造ＨＦＥＴにおいて有意に観察された、いわゆる電流コラプス現象（大きな負のゲート電圧や大きなドレイン電圧を印加した際、それらが大きくない場合に比べて、ドレイン電流が大きく低減してしまう、望ましくない現象）が低減し、ほぼ消失した。 The MIS structure HFET having a three-layer gate insulating film in which an extremely thin Si 3 N 4 film is inserted as shown in FIG. 7 has two layers as shown in FIG. 6 in terms of gate leakage characteristics and device reliability of gate breakdown voltage. The MIS structure HFET with the gate insulating film has exactly the same performance, but the high-quality semiconductor / insulator interface is formed in the MIS structure HFET with the three-layer gate insulating film in which an extremely thin Si 3 N 4 film is inserted. As a result, a so-called current collapse phenomenon (a large negative gate voltage or a large drain voltage is applied when a large negative gate voltage or a large drain voltage is applied), which is significantly observed in a MIS structure HFET having a two-layer gate insulating film. Undesirable phenomenon that is greatly reduced) has been reduced and almost disappeared.

以上の説明のように、ＧａＮ系ＭＩＳ構造ＨＦＥＴにおいて、主要なゲート絶縁膜として、高誘電率絶縁膜（ＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物）の厚膜が積層され、かつ、前記の高誘電率絶縁膜の上に、高障壁を有する（すなわちバンドギャップの大きい）ＳｉＯ２あるいはＡｌ２Ｏ３の薄層膜が積層されていることを特徴とする、２層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを用いることにより、ゲートリーク電流をより効果的に低減し、また、大きなゲート電圧の印加に際してのデバイス信頼性の向上も可能とする、ＭＩＳ構造ＨＦＥＴを実現することが可能となる。 As described above, in the GaN-based MIS structure HFET, as a main gate insulating film, a thick film of a high dielectric constant insulating film (an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 ) is laminated. And a thin layer film of SiO 2 or Al 2 O 3 having a high barrier (that is, having a large band gap) is laminated on the high dielectric constant insulating film. By using a MIS structure HFET having an insulated gate structure, a gate leakage current can be more effectively reduced, and a device reliability can be improved when a large gate voltage is applied. Is possible.

また、さらに、上記のＭＩＳ構造ＨＦＥＴにおいて、主要なゲート絶縁膜である高誘電率膜（ＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物）と、窒化物半導体との間に、高品質の半導体／絶縁体界面を形成するための、Ｓｉ３Ｎ４の極薄層膜が挿入されていることを特徴とする、３層絶縁ゲート構造を有するＭＩＳ構造ＨＦＥＴを用いることにより、付加的な効果として、電流コラプス現象を低減し、ほぼ消失させることが可能となる。 Furthermore, in the MIS structure HFET, a high dielectric constant film (an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 ), which is a main gate insulating film, and a nitride semiconductor By using a MIS structure HFET having a three-layer insulated gate structure, in which an ultrathin layer film of Si 3 N 4 is inserted to form a high-quality semiconductor / insulator interface, As an additional effect, the current collapse phenomenon can be reduced and substantially eliminated.

以上で、本発明による作用がすべて示された。   As described above, all the effects of the present invention are shown.

［実施の形態例１］
図５において、障壁層半導体がＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）であり、チャネル層半導体がＧａＮである窒化物半導体１が用いられ、主要なゲート絶縁膜（第１の絶縁膜６）である高誘電率膜としてＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物が用いられ、高障壁ゲート絶縁膜（第２の絶縁膜７）としてＳｉＯ２あるいはＡｌ２Ｏ３が用いられる。 [Embodiment 1]
In FIG. 5, a nitride semiconductor 1 in which the barrier layer semiconductor is Al X Ga 1-X N (0 <X ≦ 1) and the channel layer semiconductor is GaN is used, and the main gate insulating film (first insulating film) is used. An insulator having a dielectric constant of 20 or more such as HfO 2 , HfAlO, or ZrO 2 is used as the high dielectric constant film as the film 6), and SiO 2 or Al 2 as the high barrier gate insulating film (second insulating film 7). O 3 is used.

主要なゲート絶縁膜である高誘電率膜（第１の絶縁膜６）のＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物の膜厚は、４ｎｍ以上２００ｎｍ以下とする。これは、絶縁膜成膜初期に形成された欠陥構造の低減には、４ｎｍ以上の膜厚が必要であり、一方、２００ｎｍを超える膜厚では、ＨＦＥＴの利得の低下が大きくなり、不都合であるためである。 The film thickness of an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 of the high dielectric constant film (first insulating film 6) which is a main gate insulating film, is 4 nm to 200 nm. This is disadvantageous in that the thickness of 4 nm or more is required to reduce the defect structure formed in the initial stage of the insulating film formation, whereas the film thickness exceeding 200 nm increases the gain of the HFET. Because.

高障壁ゲート絶縁膜（第２の絶縁膜７）であるＳｉＯ２あるいはＡｌ２Ｏ３の膜厚は、２ｎｍ以上かつ前記高誘電率膜（第１の絶縁膜６）の膜厚以下とする。これは、絶縁膜の高障壁の効果を得るためには、２ｎｍ以上の膜厚が必要であり、一方、高誘電率絶縁膜の膜厚を超える高障壁層絶縁膜の膜厚は、高誘電率絶縁膜を主要なゲート絶縁膜とする本発明の構造として不要であるためである。 The film thickness of SiO 2 or Al 2 O 3 which is the high barrier gate insulating film (second insulating film 7) is 2 nm or more and not more than the film thickness of the high dielectric constant film (first insulating film 6). In order to obtain the high barrier effect of the insulating film, a film thickness of 2 nm or more is necessary. On the other hand, the film thickness of the high barrier layer insulating film exceeding the film thickness of the high dielectric constant insulating film is high dielectric constant. This is because the structure of the present invention in which the rate insulating film is the main gate insulating film is unnecessary.

障壁層半導体としてＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）のＡｌ組成および膜厚、チャネル層半導体としてＧａＮの膜厚は任意とする。これは、前記の任意の値に対して、本発明の効果が得られるためである。 The Al composition and film thickness of Al X Ga 1-X N (0 <X ≦ 1) as the barrier layer semiconductor and the film thickness of GaN as the channel layer semiconductor are arbitrary. This is because the effect of the present invention can be obtained with respect to the above-mentioned arbitrary value.

本実施の形態例として、図５に示された構造において、障壁層半導体として１５ｎｍのＡｌ０．４Ｇａ０．６Ｎ、チャネル層半導体として２μｍのＧａＮ、なる層構造を、ｃ面サファイア基板あるいはＳｉＣ基板上に有機金属気相成長法（ＭＯＶＰＥ：Metal Organic Vapor Phase Epitaxy）等の結晶成長法によって成長し、また、高誘電率ゲート絶縁膜として５０ｎｍのＨｆＯ２膜を、高障壁ゲート絶縁膜として８ｎｍのＡｌ２Ｏ３膜を、ＰＬＤ法（ＰＬＤ：Pulsed Laser Deposition）等の絶縁膜堆積法によって堆積した構造を用いて、本発明によるＨＦＥＴを作製したところ、ゲートリーク電流は、−２０Ｖの逆方向電圧にて１０−１０Ａ/ｍｍ台、＋５Ｖの正方向電圧にて１×１０−５Ａ/ｍｍ以下の非常に低い値が得られた。 As an example of this embodiment, in the structure shown in FIG. 5, a layer structure of 15 nm Al 0.4 Ga 0.6 N as a barrier layer semiconductor and 2 μm GaN as a channel layer semiconductor is used as a c-plane sapphire substrate or It is grown on a SiC substrate by a crystal growth method such as metal organic vapor phase epitaxy (MOVPE), and a 50 nm HfO 2 film is used as a high dielectric gate insulating film as a high barrier gate insulating film. When an HFET according to the present invention was fabricated using a structure in which an 8 nm Al 2 O 3 film was deposited by an insulating film deposition method such as a PLD method (PLD: Pulsed Laser Deposition), the gate leakage current was -20V reverse. A very low value of the order of 10 −10 A / mm in the directional voltage and 1 × 10 −5 A / mm or less was obtained in the positive direction voltage of + 5V.

また、作製した複数のデバイスにおいて、前記のゲートリーク電流特性の均一性が確認され、ゲート耐圧も、＋８Ｖの正方向電圧においても異常な電流リークの発生が確認されたデバイスは存在せず、ゲート耐圧におけるデバイス信頼性の高さが確認された。   In addition, in the manufactured devices, the uniformity of the gate leakage current characteristics was confirmed, and there was no device in which abnormal current leakage was confirmed even when the gate breakdown voltage was +8 V in the positive direction voltage. The high device reliability at the withstand voltage was confirmed.

本実施の形態例においては、障壁層半導体としてＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）、チャネル層半導体としてＧａＮを用いた、ＡｌＸＧａ１−ＸＮ/ＧａＮなる障壁層半導体／チャネル層半導体ヘテロ構造を用いたが、障壁層半導体／チャネル層半導体ヘテロ構造が、たとえば、ＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）/ＩｎＹＧａ１−ＹＮ（０＜Ｙ≦１）、Ｉｎ１−ＸＡｌＸＮ（０．６３≦Ｘ≦１）/ＧａＮ、Ｉｎ１−ＸＡｌＸＮ（０．６３≦Ｘ≦１）/ＩｎＹＧａ１−ＹＮ（０＜Ｙ≦１）等のいかなる構造であっても本発明の範囲内とする。 In the embodiment of the present embodiment, Al X Ga 1-X N (0 <X ≦ 1) as a barrier layer semiconductor, using GaN as a channel layer semiconductor, Al X Ga 1-X N / GaN becomes barrier layer semiconductor / Although the channel layer semiconductor heterostructure is used, the barrier layer semiconductor / channel layer semiconductor heterostructure is, for example, Al X Ga 1-X N (0 <X ≦ 1) / In Y Ga 1-Y N (0 <Y ≦ 1), In 1-X Al X N (0.63 ≦ X ≦ 1) / GaN, In 1-X Al X N (0.63 ≦ X ≦ 1) / In Y Ga 1-Y N (0 <Y Any structure such as ≦ 1) is within the scope of the present invention.

また、本実施の形態例においては、高誘電率絶縁膜としてＨｆＯ２膜を用いたが、この絶縁膜がＺｒＯ２、、ＨｆＯＮ、ＨｆＡｌＯ等の、誘電率が２０以上のいかなる高誘電率絶縁膜であっても本発明の範囲内とする。 In this embodiment, an HfO 2 film is used as the high dielectric constant insulating film. However, this insulating film is made of ZrO 2 , HfON, HfAlO, or any other high dielectric constant insulating film having a dielectric constant of 20 or more. However, it is within the scope of the present invention.

また、本実施の形態例においては、薄膜障壁層半導体／チャネル層半導体ヘテロ構造はすべてのデバイス領域で全く同構造であるが、ソース・ゲート電極間およびゲート・ドレイン電極間の薄膜障壁層半導体／チャネル層半導体ヘテロ構造に対して、ソース抵抗を低減するための、イオン注入が施されている場合も、ゲート電極下の層構造が図５に示された構造であるＨＦＥＴはすべて本発明の範囲内とする。   In the present embodiment, the thin film barrier layer semiconductor / channel layer semiconductor heterostructure has the same structure in all device regions, but the thin film barrier layer semiconductor / between the source and gate electrodes and between the gate and drain electrodes. Even when the channel layer semiconductor heterostructure is subjected to ion implantation for reducing the source resistance, all the HFETs in which the layer structure under the gate electrode has the structure shown in FIG. 5 are within the scope of the present invention. Within.

また、本実施の形態例においては、障壁層半導体の膜厚はすべてのデバイス領域で全く同じであるが、ソース抵抗を低減するために、ソース・ゲート電極間およびゲート・ドレイン電極間の障壁層半導体の膜厚が、ゲート電極下の障壁層半導体の膜厚よりも大きい、いわゆるリセスゲート構造が採用されている場合も、ゲート電極下の層構造が図５に示された構造であるＨＦＥＴはすべて本発明の範囲内とする。   In this embodiment, the thickness of the barrier layer semiconductor is exactly the same in all device regions. However, in order to reduce the source resistance, the barrier layer between the source and gate electrodes and between the gate and drain electrodes is used. Even when a so-called recess gate structure is employed in which the thickness of the semiconductor is larger than the thickness of the barrier layer semiconductor under the gate electrode, all the HFETs whose layer structure under the gate electrode is the structure shown in FIG. Within the scope of the present invention.

［実施の形態例２］
図７において、障壁層半導体がＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）であり、チャネル層半導体がＧａＮである窒化物半導体１が用いられ、主要なゲート絶縁膜である高誘電率膜（第１の絶縁膜６）としてＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物が用いられ、高障壁絶縁膜（第２の絶縁膜７）としてＳｉＯ２あるいはＡｌ２Ｏ３が、用いられ、障壁層半導体と高誘電率絶縁膜（第１の絶縁膜６）の間に挿入された高品質界面形成絶縁膜（第３の絶縁膜８）としてＳｉ３Ｎ４が用いられる。本構造は、実施の形態例１において、障壁層半導体と高誘電率絶縁膜（第１の絶縁膜６）の間に、高品質形成絶縁膜（第３の絶縁膜８）であるＳｉ３Ｎ４を挿入した構造である。 [Embodiment 2]
In FIG. 7, a nitride semiconductor 1 in which the barrier layer semiconductor is Al X Ga 1-X N (0 <X ≦ 1), the channel layer semiconductor is GaN, and a high dielectric constant that is a main gate insulating film is used. An insulator having a dielectric constant of 20 or more such as HfO 2 , HfAlO or ZrO 2 is used as the film (first insulating film 6), and SiO 2 or Al 2 O as the high barrier insulating film (second insulating film 7). 3 is used, and Si 3 N 4 is used as the high-quality interface forming insulating film (third insulating film 8) inserted between the barrier layer semiconductor and the high dielectric constant insulating film (first insulating film 6). It is done. This structure is Si 3 N which is a high quality formation insulating film (third insulating film 8) between the barrier layer semiconductor and the high dielectric constant insulating film (first insulating film 6) in the first embodiment. 4 is inserted.

主要なゲート絶縁膜である高誘電率膜（第１の絶縁膜６）のＨｆＯ２、ＨｆＡｌＯあるいはＺｒＯ２など、誘電率が２０以上の絶縁物の膜厚は、４ｎｍ以上２００ｎｍ以下とする。これは、絶縁膜成膜初期に形成された欠陥構造の低減には、４ｎｍ以上の膜厚が必要であり、一方、２００ｎｍを超える膜厚では、ＨＦＥＴの利得の低下が大きくなり、不都合であるためである。 The film thickness of an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, or ZrO 2 of the high dielectric constant film (first insulating film 6) which is a main gate insulating film, is 4 nm to 200 nm. This is disadvantageous in that the thickness of 4 nm or more is required to reduce the defect structure formed in the initial stage of the insulating film formation, whereas the film thickness exceeding 200 nm increases the gain of the HFET. Because.

高障壁ゲート絶縁膜（第２の絶縁膜７）であるＳｉＯ２あるいはＡｌ２Ｏ３の膜厚は、２ｎｍ以上かつ前記高誘電率膜（第１の絶縁膜６）の膜厚以下とする。これは、絶縁膜の高障壁の効果を得るためには、２ｎｍ以上の膜厚が必要であり、一方、高誘電率絶縁膜の膜厚を超える高障壁層絶縁膜の膜厚は、高誘電率絶縁膜を主要なゲート絶縁膜とする本発明の構造として不要であるためである。 The film thickness of SiO 2 or Al 2 O 3 which is the high barrier gate insulating film (second insulating film 7) is 2 nm or more and not more than the film thickness of the high dielectric constant film (first insulating film 6). In order to obtain the high barrier effect of the insulating film, a film thickness of 2 nm or more is necessary. On the other hand, the film thickness of the high barrier layer insulating film exceeding the film thickness of the high dielectric constant insulating film is high dielectric constant. This is because the structure of the present invention in which the rate insulating film is the main gate insulating film is unnecessary.

高品質界面形成絶縁膜（第３の絶縁膜８）であるＳｉ３Ｎ４の膜厚は、０．５ｎｍ以上２．０ｎｍ以下とする。これは、高品質の半導体／絶縁膜界面の形成には、０．５ｎｍ以上の膜厚が必要であり、一方、２．０ｎｍを超える膜厚とすると、ゲート容量の減少によってＨＦＥＴの利得が有意に低下してしまうためである。 The film thickness of Si 3 N 4 which is a high quality interface forming insulating film (third insulating film 8) is 0.5 nm or more and 2.0 nm or less. This is because the formation of a high-quality semiconductor / insulating film interface requires a film thickness of 0.5 nm or more. On the other hand, if the film thickness exceeds 2.0 nm, the gain of the HFET is significant due to a decrease in gate capacitance. It is because it will fall.

障壁層半導体としてＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）のＡｌ組成および膜厚、チャネル層半導体としてＧａＮの膜厚は任意とする。これは、前記の任意の値に対して、本発明の効果が得られるためである。 The Al composition and film thickness of Al X Ga 1-X N (0 <X ≦ 1) as the barrier layer semiconductor and the film thickness of GaN as the channel layer semiconductor are arbitrary. This is because the effect of the present invention can be obtained with respect to the above-mentioned arbitrary value.

本実施の形態例として、図７に示された構造において、障壁層半導体として１５ｎｍのＡｌ０．４Ｇａ０．６Ｎ、チャネル層として２μｍのＧａＮ、なる層構造を、ｃ面サファイア基板あるいはＳｉＣ基板上に有機金属気相成長法（ＭＯＶＰＥ：Metal Organic Vapor Phase Epitaxy）等の結晶成長法によって成長し、また、１．０ｎｍのＳｉ３Ｎ４膜をＥＣＲ（Electron Cyclotron Resonance）スパッタ法等の絶縁膜堆積法によって堆積し、さらに、高誘電率ゲート絶縁膜として５０ｎｍのＨｆＯ２膜を、高障壁ゲート絶縁膜として８ｎｍのＡｌ２Ｏ３膜を、ＰＬＤ法（ＰＬＤ：Pulsed Laser Deposition）等の絶縁膜堆積法によって堆積した構造を用いて、本発明によるＨＦＥＴを作製したところ、ゲートリーク電流は、−２０Ｖの逆方向電圧にて１０−１０Ａ/ｍｍ台、＋５Ｖの正方向電圧にて１×１０−５Ａ/ｍｍ以下の非常に低い値が得られた。 As an example of this embodiment, in the structure shown in FIG. 7, a layer structure comprising 15 nm Al 0.4 Ga 0.6 N as a barrier layer semiconductor and 2 μm GaN as a channel layer is formed as a c-plane sapphire substrate or SiC. It is grown on a substrate by a crystal growth method such as metal organic vapor phase epitaxy (MOVPE), and a 1.0 nm Si 3 N 4 film is insulated by an ECR (Electron Cyclotron Resonance) sputtering method or the like. In addition, a 50 nm HfO 2 film is used as a high dielectric constant gate insulating film, an 8 nm Al 2 O 3 film is used as a high barrier gate insulating film, and insulation such as PLD (Pulsed Laser Deposition) is used. When an HFET according to the present invention was fabricated using a structure deposited by a film deposition method, the gate leakage current was 10 −10 A / min at a reverse voltage of −20 V. A very low value of 1 × 10 −5 A / mm or less was obtained at a positive voltage of + 5V in the mm range.

また、作製した複数のデバイスにおいて、前記のゲートリーク電流特性の均一性が確認され、ゲート耐圧も、＋８Ｖの正方向電圧においても異常な電流リークの発生が確認されたデバイスは存在せず、ゲート耐圧におけるデバイス信頼性の高さが確認された。   In addition, in the manufactured devices, the uniformity of the gate leakage current characteristics was confirmed, and there was no device in which abnormal current leakage was confirmed even when the gate breakdown voltage was +8 V in the positive direction voltage. The high device reliability at the withstand voltage was confirmed.

さらに、ドレイン電流を、−１０Ｖのゲートストレス印加の前後で測定したところ、ストレス前後でのドレイン電流は一致し、電流コラプス現象が無視できることが確認された。この点は、実施の形態例１においては、前記のストレス後に、ドレイン電流が約１０％減少してしまう程度の電流コラプス現象が観測された状況との相異点である。このように、実施の形態例２は、実施の形態例１よりもデバイスの作製プロセスがより複雑になるという欠点を有するが、電流コラプス現象がほぼ消失するという利点を有する。   Furthermore, when the drain current was measured before and after applying the gate stress of −10 V, it was confirmed that the drain current before and after the stress coincided and the current collapse phenomenon can be ignored. This point is different from the situation in which the current collapse phenomenon in which the drain current is reduced by about 10% after the stress is observed in the first embodiment. As described above, the second embodiment has the disadvantage that the device manufacturing process becomes more complicated than the first embodiment, but has the advantage that the current collapse phenomenon is almost eliminated.

本実施の形態例においては、障壁層半導体としてＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）、チャネル層半導体としてＧａＮを用いた、ＡｌＸＧａ１−ＸＮ/ＧａＮなる障壁層半導体／チャネル層半導体ヘテロ構造を用いたが、障壁層半導体／チャネル層半導体ヘテロ構造が、たとえば、ＡｌＸＧａ１−ＸＮ（０＜Ｘ≦１）/ＩｎＹＧａ１−ＹＮ（０＜Ｙ≦１）、Ｉｎ１−ＸＡｌＸＮ（０．６３≦Ｘ≦１）/ＧａＮ、Ｉｎ１−ＸＡｌＸＮ（０．６３≦Ｘ≦１）/ＩｎＹＧａ１−ＹＮ（０＜Ｙ≦１）等のいかなる構造であっても本発明の範囲内とする。 In the embodiment of the present embodiment, Al X Ga 1-X N (0 <X ≦ 1) as a barrier layer semiconductor, using GaN as a channel layer semiconductor, Al X Ga 1-X N / GaN becomes barrier layer semiconductor / Although the channel layer semiconductor heterostructure is used, the barrier layer semiconductor / channel layer semiconductor heterostructure is, for example, Al X Ga 1-X N (0 <X ≦ 1) / In Y Ga 1-Y N (0 <Y ≦ 1), In 1-X Al X N (0.63 ≦ X ≦ 1) / GaN, In 1-X Al X N (0.63 ≦ X ≦ 1) / In Y Ga 1-Y N (0 <Y Any structure such as ≦ 1) is within the scope of the present invention.

また、本実施の形態例においては、高誘電率絶縁膜としてＨｆＯ２膜を用いたが、絶縁膜がＺｒＯ２、ＨｆＯＮ、ＨｆＡｌＯ等の、誘電率が２０以上のいかなる高誘電率絶縁膜であっても本発明の範囲内とする。 In this embodiment, an HfO 2 film is used as the high dielectric constant insulating film. However, the insulating film is any high dielectric constant insulating film having a dielectric constant of 20 or more, such as ZrO 2 , HfON, HfAlO, or the like. However, it is within the scope of the present invention.

また、本実施の形態例においては、薄膜障壁層半導体／チャネル層半導体ヘテロ構造はすべてのデバイス領域で全く同構造であるが、ソース・ゲート電極間およびゲート・ドレイン電極間の薄膜障壁層半導体／チャネル層半導体ヘテロ構造に対して、ソース抵抗を低減するための、イオン注入が施されている場合も、ゲート電極下の層構造が図７に示された構造であるＨＦＥＴはすべて本発明の範囲内とする。   In the present embodiment, the thin film barrier layer semiconductor / channel layer semiconductor heterostructure has the same structure in all device regions, but the thin film barrier layer semiconductor / between the source and gate electrodes and between the gate and drain electrodes. Even when the channel layer semiconductor heterostructure is subjected to ion implantation for reducing the source resistance, all the HFETs having the layer structure under the gate electrode shown in FIG. 7 are within the scope of the present invention. Within.

また、本実施の形態例においては、障壁層半導体の膜厚はすべてのデバイス領域で全く同じであるが、ソース抵抗を低減するために、ソース・ゲート電極間およびゲート・ドレイン電極間の障壁層半導体の膜厚が、ゲート電極下の障壁層半導体の膜厚よりも大きい、いわゆるリセスゲート構造が採用されている場合も、ゲート電極下の層構造が図７に示された構造であるＨＦＥＴはすべて本発明の範囲内とする。   In this embodiment, the thickness of the barrier layer semiconductor is exactly the same in all device regions. However, in order to reduce the source resistance, the barrier layer between the source and gate electrodes and between the gate and drain electrodes is used. Even when a so-called recessed gate structure is employed in which the thickness of the semiconductor is larger than the thickness of the barrier layer semiconductor under the gate electrode, all the HFETs whose layer structure under the gate electrode has the structure shown in FIG. Within the scope of the present invention.

低誘電率・大バンドギャップのゲート絶縁膜と、高誘電率・小バンドギャップのゲート絶縁膜のポテンシャル形状を模式的に比較した図である。FIG. 6 is a diagram schematically comparing potential shapes of a low dielectric constant / large band gap gate insulating film and a high dielectric constant / small band gap gate insulating film. 高障壁絶縁膜ＭＩＳ構造ＨＦＥＴおよび高誘電率絶縁膜ＭＩＳ構造ＨＦＥＴの、それぞれ複数のデバイスにおける、ゲートリーク電流特性を模式的に比較した図である。It is the figure which compared typically the gate leakage current characteristic in each of several devices of high barrier insulating film MIS structure HFET and high dielectric constant insulating film MIS structure HFET. 本発明による高誘電率高障壁２層絶縁ゲート構造の層構造を模式的に示した図である。It is the figure which showed typically the layer structure of the high dielectric constant high barrier 2 layer insulated gate structure by this invention. 本発明による高誘電率高障壁２層ゲート絶縁膜のポテンシャル形状を模式的に示した図である。It is the figure which showed typically the potential shape of the high dielectric constant high barrier 2 layer gate insulating film by this invention. 本発明による高誘電率高障壁２層ゲート絶縁膜を用いたＭＩＳ構造ＨＦＥＴの構成を模式的に示した図である。It is the figure which showed typically the structure of MIS structure HFET using the high dielectric constant high barrier 2 layer gate insulating film by this invention. 高誘電率高障壁２層ゲート絶縁膜ＭＩＳ構造ＨＦＥＴのゲートリーク特性を、単層の高誘電率ゲート絶縁膜ＭＩＳ構造ＨＦＥＴのそれと比較して示した図である。It is the figure which showed the gate leak characteristic of the high dielectric constant high barrier 2 layer gate insulating film MIS structure HFET compared with that of the single layer high dielectric constant gate insulating film MIS structure HFET. 本発明による、高誘電率高障壁３層絶縁ゲート構造の層構造と、これを用いたＭＩＳ構造ＨＦＥＴの構成を模式的に示した図である。It is the figure which showed typically the layer structure of the high dielectric constant high barrier 3 layer insulated gate structure by this invention, and the structure of MIS structure HFET using the same. 本発明による、極薄膜のＳｉ３Ｎ４膜が挿入された高誘電率高障壁３層ゲート絶縁膜のポテンシャル形状を模式的に示した図である。According to the invention, it is a diagram of the potential shape schematically showing a high dielectric constant high barrier 3-layer gate insulating film the Si 3 N 4 film of very thin film is inserted. ＧａＮ系ＨＦＥＴの層構造および電極配置を模式的に示した図である。It is the figure which showed typically the layer structure and electrode arrangement | positioning of GaN-type HFET. ＧａＮ系ＭＩＳ構造ＨＦＥＴの層構造および電極配置を模式的に示した図である。It is the figure which showed typically the layer structure and electrode arrangement | positioning of GaN-type MIS structure HFET. ＨＦＥＴとＭＩＳ構造ＨＦＥＴのゲートリーク電流特性（ゲートリーク電流のゲート電圧依存性）を模式的に示して比較した図である。It is the figure which showed typically and compared the gate leak current characteristic (gate voltage dependence of gate leak current) of HFET and MIS structure HFET.

符号の説明Explanation of symbols

１：窒化物半導体、２：ソース電極、３：ゲート電極、４：ドレイン電極、５：絶縁膜、６：第１の絶縁膜、７：第２の絶縁膜、８：第３の絶縁膜。   1: nitride semiconductor, 2: source electrode, 3: gate electrode, 4: drain electrode, 5: insulating film, 6: first insulating film, 7: second insulating film, 8: third insulating film.

Claims (2)

窒化物半導体とゲート電極との間にゲート絶縁膜を有するヘテロ構造電界効果トランジスタである半導体装置において、
前記ゲート絶縁膜は、前記窒化物半導体に近い側の第１の絶縁膜と、前記ゲート電極に近い側の第２の絶縁膜とを構成要素とし、
前記第１の絶縁膜が、ＨｆＯ２、ＨｆＡｌＯ、ＨｆＯＮ、ＺｒＯ２を例とする、誘電率が２０以上の絶縁物からなる厚さ４ｎｍ以上２００ｎｍ以下の絶縁膜であり、
前記第２の絶縁膜が、ＳｉＯ２またはＡｌ２Ｏ３からなる厚さ２ｎｍ以上かつ前記第１の絶縁膜の膜厚以下の絶縁膜であることを特徴とする半導体装置。 In a semiconductor device which is a heterostructure field effect transistor having a gate insulating film between a nitride semiconductor and a gate electrode,
The gate insulating film is composed of a first insulating film on the side close to the nitride semiconductor and a second insulating film on the side close to the gate electrode,
The first insulating film is an insulating film having a thickness of 4 nm to 200 nm made of an insulator having a dielectric constant of 20 or more, such as HfO 2 , HfAlO, HfON, ZrO 2 ,
The semiconductor device, wherein the second insulating film is an insulating film made of SiO 2 or Al 2 O 3 and having a thickness of 2 nm or more and not more than the thickness of the first insulating film. 請求項１に記載の半導体装置において、
前記ゲート絶縁膜は、前記窒化物半導体と前記第１の絶縁膜との間に挿入された第３の絶縁膜を構成要素とし、
前記第３の絶縁膜が、Ｓｉ３Ｎ４からなる厚さ０．５ｎｍ以上２．０ｎｍ以下の薄層であることを特徴とする半導体装置。 The semiconductor device according to claim 1,
The gate insulating film includes a third insulating film inserted between the nitride semiconductor and the first insulating film as a component,
The semiconductor device, wherein the third insulating film is a thin layer made of Si 3 N 4 and having a thickness of 0.5 nm to 2.0 nm.
JP2008157587A 2008-06-17 2008-06-17 Semiconductor device Expired - Fee Related JP5301208B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008157587A JP5301208B2 (en) 2008-06-17 2008-06-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008157587A JP5301208B2 (en) 2008-06-17 2008-06-17 Semiconductor device

Publications (2)

Publication Number Publication Date
JP2009302435A true JP2009302435A (en) 2009-12-24
JP5301208B2 JP5301208B2 (en) 2013-09-25

Family

ID=41549002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008157587A Expired - Fee Related JP5301208B2 (en) 2008-06-17 2008-06-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JP5301208B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108615A1 (en) * 2010-03-02 2011-09-09 次世代パワーデバイス技術研究組合 Semiconductor transistor
JP2011233695A (en) * 2010-04-27 2011-11-17 Sharp Corp NORMALLY-OFF TYPE GaN-BASED FIELD EFFECT TRANSISTOR
JP2013041969A (en) * 2011-08-15 2013-02-28 Advantest Corp Semiconductor device, method for manufacturing the same, and testing apparatus
WO2013073315A1 (en) * 2011-11-14 2013-05-23 シャープ株式会社 Field-effect transistor and method of manufacturing thereof
EP2600404A2 (en) * 2011-12-01 2013-06-05 Power Integrations, Inc. GaN high voltage HFET with passivation plus gate dielectric multilayer structure
JP2014183125A (en) * 2013-03-18 2014-09-29 Fujitsu Ltd Semiconductor device
CN104425620A (en) * 2013-09-03 2015-03-18 三星电子株式会社 Semiconductor device and method of fabricating the same
US9508822B2 (en) 2013-03-28 2016-11-29 Toyoda Gosei Co., Ltd. Semiconductor device
JP2016539496A (en) * 2013-10-15 2016-12-15 蘇州晶湛半導体有限公司Ｅｎｋｒｉｓ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ，Ｉｎｃ． Group III nitride semiconductor device and manufacturing method thereof
US10084052B2 (en) 2014-09-29 2018-09-25 Denso Corporation Semiconductor device and method for manufacturing the same
CN109659361A (en) * 2017-10-12 2019-04-19 电力集成公司 Grid pile stack for heterojunction device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108321198B (en) 2017-01-17 2021-06-08 株式会社东芝 Semiconductor device, power supply circuit, computer, and method for manufacturing semiconductor device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002324813A (en) * 2001-02-21 2002-11-08 Nippon Telegr & Teleph Corp <Ntt> Heterostructure field-effect transistor
JP2004039728A (en) * 2002-07-01 2004-02-05 Toshiba Corp Semiconductor device and its manufacturing method
JP2006173294A (en) * 2004-12-15 2006-06-29 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device
JP2006222414A (en) * 2005-01-14 2006-08-24 Matsushita Electric Ind Co Ltd Semiconductor apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002324813A (en) * 2001-02-21 2002-11-08 Nippon Telegr & Teleph Corp <Ntt> Heterostructure field-effect transistor
JP2004039728A (en) * 2002-07-01 2004-02-05 Toshiba Corp Semiconductor device and its manufacturing method
JP2006173294A (en) * 2004-12-15 2006-06-29 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device
JP2006222414A (en) * 2005-01-14 2006-08-24 Matsushita Electric Ind Co Ltd Semiconductor apparatus

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108615A1 (en) * 2010-03-02 2011-09-09 次世代パワーデバイス技術研究組合 Semiconductor transistor
JP2011181752A (en) * 2010-03-02 2011-09-15 Advanced Power Device Research Association Semiconductor transistor
CN102792449A (en) * 2010-03-02 2012-11-21 先进动力设备技术研究协会 Semiconductor transistor
EP2544240A1 (en) * 2010-03-02 2013-01-09 Advanced Power Device Research Association Semiconductor transistor
US9875899B2 (en) 2010-03-02 2018-01-23 Fuji Electric Co., Ltd. Semiconductor transistor
EP2544240A4 (en) * 2010-03-02 2013-08-28 Advanced Power Device Res Ass Semiconductor transistor
JP2011233695A (en) * 2010-04-27 2011-11-17 Sharp Corp NORMALLY-OFF TYPE GaN-BASED FIELD EFFECT TRANSISTOR
JP2013041969A (en) * 2011-08-15 2013-02-28 Advantest Corp Semiconductor device, method for manufacturing the same, and testing apparatus
WO2013073315A1 (en) * 2011-11-14 2013-05-23 シャープ株式会社 Field-effect transistor and method of manufacturing thereof
JP2013105863A (en) * 2011-11-14 2013-05-30 Sharp Corp Field-effect transistor and method of manufacturing the same
US9343541B2 (en) 2011-12-01 2016-05-17 Power Integrations, Inc. Method of fabricating GaN high voltage HFET with passivation plus gate dielectric multilayer structure
EP2600404A2 (en) * 2011-12-01 2013-06-05 Power Integrations, Inc. GaN high voltage HFET with passivation plus gate dielectric multilayer structure
JP2014183125A (en) * 2013-03-18 2014-09-29 Fujitsu Ltd Semiconductor device
US10074728B2 (en) 2013-03-28 2018-09-11 Toyoda Gosei Co., Ltd. Semiconductor device
US9508822B2 (en) 2013-03-28 2016-11-29 Toyoda Gosei Co., Ltd. Semiconductor device
EP2843706A3 (en) * 2013-09-03 2016-02-24 Samsung Electronics Co., Ltd Semiconductor device and method of fabricating the same
US9929239B2 (en) 2013-09-03 2018-03-27 Samsung Electronics Co., Ltd. Semiconductor device and method of fabricating the same
CN104425620A (en) * 2013-09-03 2015-03-18 三星电子株式会社 Semiconductor device and method of fabricating the same
US9306008B2 (en) 2013-09-03 2016-04-05 Samsung Electronics Co., Ltd. Semiconductor device and method of fabricating the same
US10516042B2 (en) 2013-10-15 2019-12-24 Enkris Semiconductor, Inc. III group nitride semiconductor device and manufacturing method thereof
JP2016539496A (en) * 2013-10-15 2016-12-15 蘇州晶湛半導体有限公司Ｅｎｋｒｉｓ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ，Ｉｎｃ． Group III nitride semiconductor device and manufacturing method thereof
KR101902663B1 (en) * 2013-10-15 2018-09-28 엔크리스 세미컨덕터, 아이엔씨. Group-ⅲ nitride semiconductor device and manufacturing method therefor
US10084052B2 (en) 2014-09-29 2018-09-25 Denso Corporation Semiconductor device and method for manufacturing the same
CN109659361A (en) * 2017-10-12 2019-04-19 电力集成公司 Grid pile stack for heterojunction device
EP3480854A3 (en) * 2017-10-12 2019-08-14 Power Integrations, Inc. Gate stack for heterostructure device
JP2019075558A (en) * 2017-10-12 2019-05-16 パワー・インテグレーションズ・インコーポレーテッド Gate stack for heterostructure device
US11114539B2 (en) 2017-10-12 2021-09-07 Power Integrations, Inc. Gate stack for heterostructure device
CN109659361B (en) * 2017-10-12 2022-03-04 电力集成公司 Gate stack for heterojunction devices
JP7330605B2 (en) 2017-10-12 2023-08-22 パワー・インテグレーションズ・インコーポレーテッド Gate stack for heterostructure devices
TWI835753B (en) * 2017-10-12 2024-03-21 美商電源整合公司 Heterostructure semiconductor device and method of fabricating the same

Also Published As

Publication number Publication date
JP5301208B2 (en) 2013-09-25

Similar Documents

Publication Publication Date Title
JP5301208B2 (en) Semiconductor device
US11594413B2 (en) Semiconductor structure having sets of III-V compound layers and method of forming
JP5608238B2 (en) Semiconductor structure
CN103545361B (en) Compound semiconductor device and manufacture method, supply unit and high frequency amplifier
US8338862B2 (en) Semiconductor device
US8729604B2 (en) Compound semiconductor device, method for manufacturing the device and electric device
JP6591169B2 (en) Semiconductor device and manufacturing method thereof
JPWO2006132418A1 (en) Field effect transistor
JP2008270521A (en) Field-effect transistor
JP2013207274A (en) Semiconductor device and semiconductor device manufacturing method
JP2010232377A (en) Semiconductor device
US11594625B2 (en) III-N transistor structures with stepped cap layers
US10243049B2 (en) Nitride semiconductor device
WO2017002317A1 (en) Semiconductor device substrate, semiconductor device, and method for manufacturing semiconductor device
JP6966689B2 (en) Nitride semiconductor device and its manufacturing method
JP6604036B2 (en) Compound semiconductor device and manufacturing method thereof
JP2007250950A (en) Heterostructure field effect transistor using nitride semiconductor
JP2005086102A (en) Field effect transistor and method of manufacturing field effect transistor
JP2010206125A (en) Gallium nitride-based high electron mobility transistor
US12068410B2 (en) Semiconductor power device
JP6687831B2 (en) Compound semiconductor device and manufacturing method thereof
JP2012049170A (en) Nitride semiconductor device
JP2008288405A (en) Hetero structure field effect transistor
JP2012004178A (en) Field effect transistor
JP2016181570A (en) Semiconductor device and manufacturing method of the same

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100721

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20120530

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20120530

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130228

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130618

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130619

R150 Certificate of patent or registration of utility model

Ref document number: 5301208

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees