JP2009300383A - Device and system for evaluating pressure sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for evaluating pressure sensor, capable of reducing greatly cost and time required for evaluation, without requiring a large-scale experimental facility, when evaluating a dynamic characteristic of a pressure sensor. <P>SOLUTION: A constitution is adopted for the device for evaluating pressure sensor, for generating a target pressure waveform used for dynamic characteristic evaluation of a pressure sensor to be measured by driving a movable part by generating a driving force corresponding to an input waveform. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

 The present invention relates to a pressure sensor evaluation apparatus and a pressure sensor evaluation system that are particularly suitable for evaluating dynamic characteristics of a pressure sensor used for side collision detection of a vehicle.

  It is a well-known fact that front airbags, side airbags, and the like are effective as devices for protecting passengers from vehicle frontal collisions and side collisions. In the case of a frontal collision accident, since there is a space such as an engine room, there is a time margin in the time τF required from the occurrence of a collision until the frontal airbag is deployed. This time τF varies depending on the condition of the frontal collision, but is approximately in the range of 10 to 20 msec. On the other hand, in the case of a side collision accident, there is only a space for one door between the opponent vehicle and the like colliding with the occupant, and the time τS required from the side collision to the deployment of the side airbag is approximately 5 -10 msec or less.

  There are various types of collision detection sensors, but the current mainstream acceleration sensor cannot detect a collision until the acceleration of the entire vehicle changes, that is, the collision detection time is relatively long. Therefore, although the time τF required for deploying the front airbag can be achieved, it is difficult to achieve the time τS required for deploying the side airbag.

On the other hand, in recent years, it is possible to detect a side collision in a short time by installing a pressure sensor inside the door and detecting the pressure change caused by the volume change of the door interior space when the door is deformed at the side collision. Possible airbag systems are attracting attention. For example, Patent Document 1 below discloses an airbag system that detects a side collision by installing a pressure sensor inside the door as described above.
Japanese National Patent Publication No. 7-508950

  The technique of Patent Document 1 relates to an air bag system that actually detects a side collision by installing a pressure sensor in a vehicle. As a previous step, the pressure sensor is used as a side air bag sensor. In order to develop an airbag system that ensures high reliability before it can be used, whether the selected pressure sensor meets the performance requirements of the system or whether it causes unexpected abnormal operation in detail Need to be evaluated.

  Normally, sensor manufacturers and purchasers of pressure sensors evaluate and calibrate pressure sensors under static pressure without temporal pressure changes, predict the upper limit frequency by theoretical considerations using detailed physical models, and The operation is guaranteed and the traceability with the national standard of static pressure is guaranteed. As described above, as a pressure sensor evaluation method, it is common to perform static characteristic evaluation under static pressure without temporal pressure change. However, when evaluating a pressure sensor for a side airbag, It is required to evaluate dynamic characteristics under a dynamic pressure equivalent to the pressure change inside the door when a side collision occurs.

  FIG. 5 is a schematic diagram showing the time change PC (t) of the door internal pressure when the side collision occurs. As shown in FIG. 5, before the side collision occurs (before time T0), the door internal pressure coincides with the atmospheric pressure P0, and after the side collision occurs (after time T0), the door internal pressure reaches the maximum from the atmospheric pressure P0. After rapidly increasing to the pressure PM, it gradually decreases toward atmospheric pressure. In FIG. 5, ΔP / ΔT represents a pressure change (pressure gradient) per unit time in the time TM required for the door internal pressure to reach the maximum ultimate pressure PM from the atmospheric pressure P0. For dynamic characteristic evaluation of the pressure sensor for the side airbag, it is necessary to reproduce the maximum ultimate pressure PM, the time TM, the pressure gradient ΔP / ΔT, and the pressure time change PC (t) as shown in FIG.

  However, in the past, evaluation methods and evaluation devices for static characteristic evaluation under static pressure of pressure sensors have been established, but dynamic characteristic evaluation under dynamic pressure, particularly the pressure range targeted for side airbags, It has been difficult to say that an evaluation method and an evaluation apparatus relating to dynamic characteristic evaluation with the pressure gradient ΔP / ΔT are sufficiently established. Therefore, in the past, each automobile manufacturer used a collision test facility using an actual vehicle and repeatedly performed a collision experiment under various collision conditions to evaluate the dynamic characteristics of the pressure sensor for the side airbag. In addition, enormous costs and time were required to evaluate the pressure sensor.

  The present invention has been made in view of the above-described circumstances, and does not require a large-scale experimental facility when performing dynamic characteristic evaluation of a pressure sensor, and can greatly reduce the cost and time required for evaluation. An object of the present invention is to provide a pressure sensor evaluation device and a pressure sensor evaluation system.

  In order to achieve the above-mentioned object, the present invention provides a dynamic solution of a pressure sensor to be measured by generating a driving force according to an input waveform and driving a movable part as a first solution means for a pressure sensor evaluation apparatus. A target pressure waveform used for characteristic evaluation is generated.

 Further, as a second solving means related to the pressure sensor evaluation apparatus, in the first solving means, a pressure deriving port for containing a pressure medium therein and introducing an internal pressure into a pressure introducing port of the pressure sensor to be measured. Is provided, and the target pressure waveform is generated inside the pressure generator by compressing and pulling the pressure medium by driving the movable portion.

Further, as a third solution means related to the pressure sensor evaluation apparatus, in the second solution means,
The pressure generator is provided with a pressure outlet for introducing an internal pressure into a pressure inlet of a reference pressure sensor serving as a reference for the pressure sensor to be measured.

 Further, as a fourth solving means related to the pressure sensor evaluation apparatus, in the second or third solving means, a voice coil is provided as the movable portion, and a Lorentz force corresponding to an input waveform to the voice coil is generated. And a voice coil motor for driving the voice coil.

 Further, as a fifth solving means according to the pressure sensor evaluation apparatus, in the fourth solving means, a cylinder is provided as the pressure generating body, and the piston is slid in the cylinder by the voice coil motor. The target pressure waveform is generated inside the cylinder.

 On the other hand, as a first means for solving the pressure sensor evaluation system, a target pressure waveform used for dynamic characteristic evaluation of the pressure sensor to be measured is stored in advance, and a waveform for generating an input waveform corresponding to the target pressure waveform at the start of the evaluation A control device, a pressure sensor evaluation device for generating a target pressure waveform to be used for dynamic characteristic evaluation of the pressure sensor to be measured by generating a driving force according to the input waveform and driving a movable portion; and the pressure sensor evaluation A pressure sensor to be measured which detects a target pressure waveform generated by the apparatus and outputs a signal corresponding to the target pressure waveform; and a measuring apparatus which measures an output signal of the pressure sensor to be measured. To do.

 Further, as a second solution means related to the pressure sensor evaluation system, in the first solution means, the pressure sensor evaluation device includes a pressure medium inside and supplies an internal pressure to a pressure inlet of the pressure sensor to be measured. A pressure generating body provided with a pressure outlet for introduction, and generating the target pressure waveform in the pressure generating body by compressing and pulling the pressure medium by driving the movable portion; It is characterized by that.

 Further, as a third solution means related to the pressure sensor evaluation system, in the second solution means, a reference pressure sensor serving as a reference for the pressure sensor to be measured is provided, and the pressure generator in the pressure sensor evaluation apparatus includes A pressure deriving port for introducing an internal pressure into a pressure introducing port of the reference pressure sensor is provided, and the measuring device measures output signals of the pressure sensor to be measured and the reference pressure sensor. And

 Further, as a fourth solution means related to the pressure sensor evaluation system, in the second or third solution means, the pressure sensor evaluation device has a voice coil as the movable portion, and an input waveform to the voice coil. And a voice coil motor that drives the voice coil by generating a Lorentz force according to the frequency.

 Further, as a fifth solving means related to the pressure sensor evaluation system, in the fourth solving means, the pressure sensor evaluation device includes a cylinder as the pressure generator, and the piston is moved inside the cylinder by the voice coil motor. The target pressure waveform is generated inside the cylinder by sliding.

 Further, as a sixth solving means relating to the pressure sensor evaluation system, in any one of the first to fifth solving means, the waveform control device is caused by the inherent transfer characteristic of the pressure sensor evaluation device. The input waveform that enables correction of an error occurring in the target pressure waveform is generated.

  The pressure sensor evaluation apparatus according to the present invention is easy to realize that a target pressure waveform used for dynamic characteristic evaluation of a pressure sensor to be measured is generated by generating a driving force according to an input waveform and driving a movable part. Because the configuration is adopted, it is possible to significantly reduce the cost and time required for evaluation without the need for large-scale experimental facilities as in the past when evaluating the dynamic characteristics of the pressure sensor to be measured. Become.

  In addition, by adopting a configuration in which the target pressure waveform is applied only to the pressure inlet of the pressure sensor to be measured, it is possible to reduce the overall size of the device, reduce development and manufacturing costs, explode due to the generated impact pressure, etc. It is possible to avoid accidents. In addition, as a result of reducing the size and weight of the entire device, maintenance is easy without taking up space, and the impact on running costs and the environment can be ignored.

Hereinafter, an embodiment of a pressure sensor evaluation device and a pressure sensor evaluation system according to the present invention will be described with reference to the drawings.
[Pressure sensor evaluation device]
FIG. 1A is a schematic cross-sectional view showing a schematic configuration of a pressure sensor evaluation apparatus 10 according to the present embodiment. As shown in FIG. 1A, a pressure sensor evaluation apparatus 10 includes a magnetic path forming member 11 made of a cylindrical magnetic material, and a cylindrical shape arranged along the inner periphery of the magnetic path forming member 11. The permanent magnet 12, a cylindrical bobbin 13 that is coaxially arranged with respect to the central axis of the permanent magnet 12, and that can be moved up and down along the central axis, and a predetermined number of turns along the outer periphery of the bobbin 13 , A cylindrical piston 16 coaxially connected to the bobbin 13 via a piston rod 15, and a cylindrical cylinder arranged with the opening for inserting the piston 16 facing downward 17.

  Among the above components, the magnetic path forming member 11, the permanent magnet 12, the bobbin 13 and the voice coil 14 generate a Lorentz force corresponding to the input waveform to the voice coil 14, thereby causing the voice coil 14 (bobbin 13). A voice coil motor to be driven is configured.

  Pressure deriving ports 17a and 17b for deriving the internal pressure of the cylinder 17 to the outside are provided in the upper bottom portion of the cylinder 17, and a pressure sensor (hereinafter referred to as an object to be evaluated) is provided above the pressure deriving port 17a. A measurement pressure sensor S) is disposed, and a reference pressure sensor RS which is a reference sensor for the pressure sensor S to be measured is disposed above the pressure outlet 17b.

  FIG. 1B is a cross-sectional view showing a general configuration of the pressure sensor S to be measured. As shown in FIG. 1B, the pressure sensor S to be measured is a substrate S3 in which a pressure sensor element S2 is mounted inside a sensor case S1 provided with a pressure introduction port Sa for introducing external pressure. Is arranged. That is, the pressure sensor S to be measured is disposed in the cylinder 17 so that the pressure introduction port Sa communicates with the pressure outlet port 17a of the cylinder 17. The pressure sensor element S2 detects the internal pressure of the cylinder 17 introduced through the pressure introduction port Sa and the pressure introduction path Sb of the sensor case S1, and outputs an analog voltage signal indicating the detection result. The analog voltage signal output from the pressure sensor element S2 is sent to an external measuring device (not shown) via the substrate S3 and its output lead wire S4. The configuration of the reference pressure sensor RS is the same.

  In the pressure sensor evaluation apparatus 10 configured as described above, when a predetermined voltage waveform is applied to the voice coil 14, a Lorentz force corresponding to the voltage waveform acts on the voice coil 14 to cause the piston 16 to vibrate up and down. 17 has a pressure waveform (pressure change) having the same shape as the voltage waveform. That is, as shown in FIG. 5, the pressure change PC (t) inside the door at the time of actual side collision is set as the target pressure waveform, and the voltage waveform eC (t) having the same shape as the target pressure waveform PC (t) is used as the voice. By applying to the coil 14, the target pressure waveform PC (t) can be generated inside the cylinder 17. Therefore, by using the pressure sensor evaluation apparatus 10 according to the present embodiment, when performing the dynamic characteristic evaluation of the pressure sensor S to be measured, a large-scale experimental facility is not required, and the cost and time required for the evaluation are greatly increased. It becomes possible to reduce.

  Note that the target pressure waveform PC (t) reproducible by the pressure sensor evaluation apparatus 10 is not limited to one type, but by changing the input waveform (voltage waveform) to the voice coil 14 assuming various collision accident situations. It is possible to reproduce complicated and various target pressure waveforms. For example, not only a single collision waveform but also all the worst cases and combinations that can be assumed, such as “when a small animal collides with the side of the vehicle immediately after encountering a side collision accident with another vehicle” An air pressure change can be applied to the pressure sensor S to be measured.

  Moreover, in the pressure sensor evaluation apparatus 10 in this embodiment, since the target pressure waveform is applied only to the pressure inlet Sa of the pressure sensor S to be measured, the space to which pressure is applied is as small as several to several tens of cubic centimeters. The entire apparatus can be reduced in size. By reducing the size of the entire apparatus as described above, the following various merits can be obtained.

(1) FIG. 2A shows a case where a target pressure waveform is applied only to the pressure introduction port Sa of the pressure sensor S to be measured, that is, a small space such as the sensor inner space V1 (cm ³ ). FIG. 2B shows a case where the pressure sensor evaluation apparatus 10 drives a large space V2 (cm ³ ) such as a measurement chamber in which the measured pressure sensor S can be stored. When the same pressure sensor evaluation apparatus 10 is used, it is clear that the pressure peak value in the cylinder 17 becomes larger when the small space V1 is driven than when the large space V2 is driven. Therefore, a method of applying a necessary pressure only to the inner space of the pressure sensor S to be measured like the pressure sensor evaluation apparatus 10 in the present embodiment is extremely effective for downsizing. The ratio CHA: V1 between the space CHA inside the cylinder 17 and the sensor internal space V1 is preferably about 4.0 cm: 0.5 cm (= 8: 1).

(2) By reducing the size, the output of the high-speed bipolar power source necessary for waveform reproduction can be reduced.
Although depending on the waveform to be reproduced, it was confirmed by experiments that an instantaneous power of about 50 to 180 W was required to drive the cylinder space CHA of about 4 cubic cm to obtain the target pressure waveform. Therefore, if the calculation is performed simply by ignoring uncertain factors such as efficiency, the volume of the sample chamber having a side of 10 cm as shown in FIG. 4 = 250, that is, a high-speed bipolar power supply corresponding to an instantaneous power of 12.5 to 45 kW is required, and a small-scale and inexpensive device cannot be realized.

(3) By reducing the size of the piston 16, the mass of the piston 16 is reduced. As a result, inertia at the time of sliding at high speed is reduced. As a result, the waveform rise characteristic that can be reproduced can be improved, and the upper limit of the frequency spectrum of the target pressure waveform Can be high.
(4) In the case of an increase in size, there is a risk of injury due to contact with sliding parts, explosion of the chamber, dropping of parts or pinching during maintenance, etc., but safety can be ensured by downsizing.
(5) Since the cylinder 17 has only to be brought into close contact with only the pressure inlet Sa of the pressure sensor S to be measured, there is no size dependency on the sensor case S1. Even if the sensor case S1 is large, it is not necessary to make the pressure sensor evaluation apparatus 10 large-scale.
(6) Downsizing reduces the burden on the global environment, such as reducing the number of components and power during operation, and also contributes to running costs, labor for long-term maintenance, and cost reduction.

[Pressure sensor evaluation system]
FIG. 3 is a schematic configuration diagram of the pressure sensor evaluation system according to the present embodiment. As shown in FIG. 2, the pressure sensor evaluation system 100 includes a control computer 110, a voltage waveform generator 120, a power amplifier 130, a current probe 140, a signal conditioner 150, and data in addition to the pressure sensor evaluation apparatus 10 described above. A measurement / collection device 160 is provided. Of these components, the control computer 110 and the voltage waveform generator 120 constitute a waveform control device according to the present invention, and the data measurement / collection device 160 corresponds to the measurement device according to the present invention. It is.

  The control computer 110 is a PC (Personal Computer), for example, which stores digital data of the target pressure waveform PC (t) in a storage medium such as a hard disk in advance, and at the start of evaluation, the target pressure waveform PC (t) Are read from the storage medium and output to the voltage waveform generator 120. The voltage waveform generator 120 is a voltage waveform eC (t) that is an analog voltage signal having the same shape as the target pressure waveform PC (t) based on the digital data of the target pressure waveform PC (t) input from the control computer 110. And output to the power amplifier 130. The power amplifier 130 performs power amplification of the voltage waveform eC (t) input from the voltage waveform generator 120 and applies the voltage waveform eC (t) after power amplification to the voice coil 14 of the pressure sensor evaluation apparatus 10.

  In this way, the voltage waveform eC (t) is applied to the voice coil 14 of the pressure sensor evaluation device 10, whereby the target pressure waveform PC (t) is generated inside the cylinder 17 and is arranged in the pressure sensor evaluation device 10. The measured pressure sensor S and the reference pressure sensor RS output an analog voltage signal corresponding to the target pressure waveform PC (t) to the data measurement / collection device 160.

  The current probe 140 detects the output current of the power amplifier 130 and outputs a signal indicating the detection result to the signal conditioner 150. The signal conditioner 150 converts the output signal of the current probe 140 into a signal that can be input to the data measurement / collection device 160 and outputs the signal to the data measurement / collection device 160. The current probe 140 and the signal conditioner 150 are provided for monitoring the applied current so as not to exceed the maximum power that can be applied to the pressure sensor evaluation apparatus 10.

  The data measurement / collection device 160 includes output signals from the measured pressure sensor S and the reference pressure sensor RS (detection result of the target pressure waveform PC (t)) and an output signal from the signal conditioner 150 (to the pressure sensor evaluation device 10). Detection result of the applied current) is converted into digital data and output to the control computer 110.

  Here, when the voltage waveform eC (t) having the same shape as the target pressure waveform PC (t) is directly applied to the pressure sensor evaluation apparatus 10 as described above, the inherent transfer function TF (f) of the pressure sensor evaluation apparatus 10. A pressure waveform P <b> 1 (t) that has undergone deformation in accordance with is generated inside the cylinder 17. In general, since the shapes of PC (t) and P1 (t) are different, accurate dynamic characteristic evaluation of the pressure sensor cannot be performed as it is. Therefore, in order to obtain the same pressure waveform as the target pressure waveform PC (t), a correction voltage waveform e2 (t) that takes into account the deformation due to the transfer function TF (f) is generated in advance, and the waveform is sent to the pressure sensor evaluation apparatus 1. It is necessary to apply.

Hereinafter, a specific example for obtaining the correction voltage waveform e2 (t) will be described.
1) First, a voltage waveform eC (t) having the same shape as the target pressure waveform PC (t) is applied to the pressure sensor evaluation apparatus 10, and the output signal e1 (t) of the standard pressure sensor RS at that time is measured and collected. It is digitally converted by the device 160 and recorded in the control computer 110.
2) Using the control computer 110, the digital data of e1 (t) is subjected to arithmetic processing such as high-frequency limiting filter processing (LPF), window function processing, total data count adjustment for FFT, offset removal, and the like.

3) FFT is performed on eC (t) and e1 (t) to obtain EC (f) and E1 (f).
EC (f) = FFT (eC (t))
E1 (f) = FFT (e1 (t))
4) The inverse transfer function RTF (f) is obtained from the following equation.
RTF (f) = EC (f) / E1 (f)
5) Multiply the inverse transfer function RTF (f) by EC (f) to obtain E2 (f).
E2 (f) = RTF (f) · EC (f)
6) Inverse FFT transforms E2 (f).
e2 (t) = IFFT (E2 (f))
This e2 (t) is a correction voltage waveform to be obtained.

  In FIG. 4, when a voltage waveform eC (t) having the same shape as the target pressure waveform PC (t) is applied to the pressure sensor evaluation apparatus 10 without correction, the voltage waveform e1 (t ) And a voltage waveform e3 output from the pressure sensor S to be measured when the corrected voltage waveform e2 (t) calculated as described above is applied to the pressure sensor evaluation apparatus 10 are shown. As shown in FIG. 4, it is clear that e3 (t) is more similar to the voltage waveform eC (t), that is, the target pressure waveform PC (t) than e1 (t). It can be confirmed that the reproduction of the actual collision waveform which is the object of the present invention is realized.

The pressure sensor evaluation device 10 and the pressure sensor evaluation system 100 according to an embodiment of the present invention have been described above. However, the present invention is not limited to the above embodiment, and the following modifications may be considered.
(1) In the above embodiment, the case where the configuration in which the target pressure waveform is generated by driving the piston 16 by using the voice coil motor is exemplified, but other than this, for example, the Coulomb force by the electric field, the hydraulic pressure, etc. A configuration using hydraulic pressure or compressed air as a driving force, or a configuration using a piezoelectric, electrostrictive, magnetostrictive actuator and lever displacement expansion mechanism may be adopted. Alternatively, these may be used in combination.

(2) In the above-described embodiment, the case where air is used as the pressure medium in the cylinder 17 has been described as an example. However, intermediate properties between other gases, liquids, plastic solids, gels, sols, and other fluids and solids are described. You may use the substance which has, or these combination as a pressure medium. Furthermore, it is good also as a structure which piston 16 transmits a driving force directly to pressure sensor element S2 of the to-be-measured pressure sensor S, without using a pressure medium.

(3) In the above embodiment, a configuration is adopted in which the piston 16 is driven to make the pressure in the cylinder 17 coincide with the target pressure waveform. However, for example, a closed space containing a pressure medium by an elastic body such as rubber instead of the cylinder 17. And a target pressure waveform may be generated inside the closed space by applying a force from one or more directions to the closed space by the piston 16. Further, instead of the cylinder 17, a bellows-like sealed structure containing a pressure medium is used, and the bellows-like sealed structure is compressed and pulled to generate a target pressure waveform inside the bellows-like sealed structure. It is also good. In addition, a structure in which the internal pressure is changed by driving a fitting having a concave structure such as a brown tube and a lid, or a rod, lever, or gear fixed to a moving part such as a voice coil without using the piston 16 and the cylinder 17. A mechanism such as a mechanism that directly transmits a driving force to the pressure sensor element S2 of the pressure sensor S to be measured may be employed.

(4) In the above embodiment, the case where a technique using discrete mathematics such as FFT and IFFT is employed for calculating the correction voltage waveform e2 (t) has been described as an example. For example, Fourier transform, inverse Fourier transform, Fourier A technique using continuous mathematics such as a series, or a technique using both mathematical expression processing software and numerical processing software may be employed. In the above-described embodiment, the method of correcting the voltage waveform to obtain the target pressure waveform is adopted. However, the method of correcting the current waveform, the method of correcting the power waveform, and the driving force in which the pulse interval is equivalent to the correction waveform is generated. For example, a method of obtaining a target pressure waveform by adjusting so may be adopted.

It is a schematic cross section which shows the structure of the pressure sensor evaluation apparatus 10 which concerns on one Embodiment of this invention. It is explanatory drawing regarding size reduction of the pressure sensor evaluation apparatus 10 which concerns on one Embodiment of this invention. 1 is a schematic configuration diagram of a pressure sensor evaluation system 100 according to an embodiment of the present invention. When the input waveform of the pressure sensor evaluation apparatus 10 according to the embodiment of the present invention is corrected according to the transfer characteristics of the apparatus, the output signal of the measured pressure sensor S obtained for each of the cases when the input waveform is not corrected is compared and displayed. Is, It is a schematic diagram which shows the time change PC (t) of the door internal pressure at the time of side collision occurrence.

Explanation of symbols

 DESCRIPTION OF SYMBOLS 10 ... Pressure sensor evaluation apparatus, 11 ... Magnetic path formation member, 12 ... Permanent magnet, 13 ... Bobbin, 14 ... Voice coil, 15 ... Piston rod, 16 ... Piston, 17 ... Cylinder, 100 ... Pressure sensor evaluation system, 110 ... Control computer, 120 ... Voltage waveform generator, 130 ... Power amplifier, 140 ... Current probe, 150 ... Signal conditioner, 160 ... Data measurement / collection device

Claims (11)

 A pressure sensor evaluation apparatus for generating a target pressure waveform used for dynamic characteristic evaluation of a pressure sensor to be measured by generating a driving force according to an input waveform and driving a movable part.   A pressure generator including a pressure medium therein and having a pressure outlet for introducing the internal pressure into the pressure inlet of the pressure sensor to be measured; and compressing the pressure medium by driving the movable part The pressure sensor evaluation apparatus according to claim 1, wherein the target pressure waveform is generated inside the pressure generator by performing tension.   3. The pressure according to claim 2, wherein the pressure generator is provided with a pressure outlet for introducing an internal pressure into a pressure inlet of a reference pressure sensor serving as a reference for the pressure sensor to be measured. Sensor evaluation device.   4. The voice coil motor according to claim 2, further comprising a voice coil as the movable part, and a Lorentz force corresponding to an input waveform to the voice coil to drive the voice coil. Pressure sensor evaluation device.   5. The pressure sensor evaluation according to claim 4, wherein a cylinder is provided as the pressure generator, and the target pressure waveform is generated in the cylinder by sliding a piston in the cylinder by the voice coil motor. apparatus. A waveform control device that stores in advance a target pressure waveform used for dynamic characteristic evaluation of the pressure sensor to be measured, and generates an input waveform corresponding to the target pressure waveform at the start of evaluation,
A pressure sensor evaluation device that generates a target pressure waveform to be used for dynamic characteristic evaluation of a pressure sensor to be measured by generating a driving force according to the input waveform and driving a movable portion;
A pressure sensor to be measured that detects a target pressure waveform generated by the pressure sensor evaluation device and outputs a signal corresponding to the target pressure waveform;
A measuring device for measuring an output signal of the pressure sensor to be measured;
A pressure sensor evaluation system comprising:   The pressure sensor evaluation apparatus includes a pressure generator including a pressure medium therein and provided with a pressure outlet for introducing an internal pressure into a pressure inlet of the pressure sensor to be measured, and drives the movable portion. The pressure sensor evaluation system according to claim 6, wherein the target pressure waveform is generated inside the pressure generator by compressing and pulling the pressure medium. A reference pressure sensor serving as a reference for the pressure sensor to be measured;
The pressure generator in the pressure sensor evaluation apparatus is provided with a pressure outlet for introducing an internal pressure into a pressure inlet of the reference pressure sensor,
The pressure sensor evaluation system according to claim 7, wherein the measuring device measures output signals of the pressure sensor to be measured and the reference pressure sensor.   The pressure sensor evaluation device includes a voice coil as the movable portion, and includes a voice coil motor that drives the voice coil by generating a Lorentz force according to an input waveform to the voice coil. Item 9. The pressure sensor evaluation system according to Item 7 or 8.   The pressure sensor evaluation device includes a cylinder as the pressure generator, and generates a target pressure waveform inside the cylinder by sliding a piston in the cylinder by the voice coil motor. Item 10. The pressure sensor evaluation system according to Item 9.   The said waveform control apparatus produces | generates the said input waveform which can correct | amend the error which arises in the said target pressure waveform resulting from the intrinsic | native transfer characteristic of the said pressure sensor evaluation apparatus. The pressure sensor evaluation system according to claim 1.

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