JP2009300181A - Inspection device and inspection system of tube - Google Patents

Inspection device and inspection system of tube Download PDF

Info

Publication number
JP2009300181A
JP2009300181A JP2008153287A JP2008153287A JP2009300181A JP 2009300181 A JP2009300181 A JP 2009300181A JP 2008153287 A JP2008153287 A JP 2008153287A JP 2008153287 A JP2008153287 A JP 2008153287A JP 2009300181 A JP2009300181 A JP 2009300181A
Authority
JP
Japan
Prior art keywords
tube
image
slit
inspection
glass tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008153287A
Other languages
Japanese (ja)
Other versions
JP5083055B2 (en
Inventor
Tatsuya Oda
竜也 小田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2008153287A priority Critical patent/JP5083055B2/en
Publication of JP2009300181A publication Critical patent/JP2009300181A/en
Application granted granted Critical
Publication of JP5083055B2 publication Critical patent/JP5083055B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device and an inspection system of a tube capable of performing appearance defect inspection of a transparent small-diameter tube highly accurately without being affected by a tube thickness part. <P>SOLUTION: In the device which is formed by arranging in due order in the optical axis direction, a light source 19, a slit plate 21 having a plurality of slits 34 in the tubular axis direction, a glass tube 15 transferred in the optical axis orthogonal direction, and an imaging device 20, the glass tube 15 is imaged by using the slit plate 21 as a background, and image processing is performed by an image processing apparatus 24, to thereby detect appearance defects of the glass tube 15. The slit plate 21 is formed so that, when being viewed through the glass tube 15, the slits 34 form an image in a narrower range than an inner diameter dimension of the glass tube 15, and that a slit outer shielding part 35b forms an image shielding the tube thickness part. The imaging device 20 photographs simultaneously both a slit image and an outer shape image of the glass tube 15 or the like. The image processing apparatus 24 detects the appearance defects of the glass tube 15 based on the slit image and the outer shape image or the like. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、管軸方向に移送される透明管体の外観欠陥を検出する管体の検査装置及び連続的に管引き成形され移送される透明管体を成形ライン上で外観検査する管体の検査システムに関する。   The present invention relates to a tubular body inspection apparatus for detecting an appearance defect of a transparent tubular body transported in the tube axial direction, and a tubular body for inspecting a transparent tubular body continuously formed and drawn on a molding line. It relates to the inspection system.

従来、透明な管体の外観を検査する検査装置としては、例えば、特許文献1に示すようなものがある。特許文献1に示されたものは、管軸方向に所定速度で連続移送される透光性ガラス管を挟むように撮像装置と光源とを設け、撮像装置で撮影した撮影画像を画像処理装置で画像処理し、ガラス管の肉厚による肉厚遮光部分の位置座標を基準に、その内方側に設定した検査枠内で異物不良等を検出する。そして、ガラス管の位置変動に対しては、その変動に対応する肉厚遮光部分の位置座標の変化に追随させて検査枠の設定位置を変化させ、異物不良等の検出が行なわれるようになっている。   Conventionally, as an inspection apparatus for inspecting the appearance of a transparent tubular body, for example, there is an apparatus as shown in Patent Document 1. The one disclosed in Patent Document 1 is provided with an imaging device and a light source so as to sandwich a translucent glass tube that is continuously transported at a predetermined speed in the tube axis direction, and an image processing device captures a captured image captured by the imaging device. Image processing is performed, and a foreign matter defect or the like is detected in an inspection frame set on the inner side with reference to the position coordinates of the thickness light shielding portion due to the thickness of the glass tube. Then, with respect to fluctuations in the position of the glass tube, the setting position of the inspection frame is changed in accordance with the change in the position coordinates of the thick light-shielding portion corresponding to the fluctuation, and foreign matter defects and the like are detected. ing.

これは、管径が23mm〜32mmと太く、肉厚が2.4mm程度で、管引き速度が10m/分〜20m/分と遅いCRT用のネック管や数十m/分の蛍光灯用ガラス管では、ガラス管の位置変動に追随させて検査可能である。しかし、管径が2mm〜4mm、肉厚が0.2mm〜0.5mm、管引き速度が80m/分〜400m/分と、比較的小管径で、管引き速度の速いガラス管等の透明な管体の場合には、管肉厚遮光部分の内方側に設定し得る検査枠が非常に小さなものとなり、さらに、管引き速度が比較的高速度であるため、管の振動に対し位置座標による対応処理では追いつかなくなり、検査枠内に管肉厚部分が写り込み、その透過像も検知してしまうことになって正確な外観欠陥の検出ができず、良品を不良品と判断してしまうことになる。   This is a thick tube with a tube diameter of 23 mm to 32 mm, a wall thickness of about 2.4 mm, and a slow tube drawing speed of 10 m / min to 20 m / min. The tube can be inspected by following the position variation of the glass tube. However, the tube diameter is 2 mm to 4 mm, the wall thickness is 0.2 mm to 0.5 mm, and the tube drawing speed is 80 m / min to 400 m / min. In the case of a simple tube, the inspection frame that can be set on the inner side of the tube thickness light-shielding part is very small, and the tube drawing speed is relatively high, so that the position of the tube against vibration of the tube Corresponding processing by coordinates cannot catch up, the tube thickness part is reflected in the inspection frame, and the transmitted image is also detected, so it is not possible to accurately detect the appearance defect, and the non-defective product is judged as a defective product Will end up.

このため、小管径で、移動速度が高速である透明な管体の外観欠陥の検査に際しても、管肉厚部分の影響を受けることなく、高い精度で検査を行うことができ、誤判断による歩留低下を排除することができる検査装置及び検査システムが望まれている。   For this reason, when inspecting the appearance defect of a transparent tubular body with a small tube diameter and a high moving speed, it is possible to inspect with high accuracy without being affected by the tube thickness portion. There is a demand for an inspection apparatus and an inspection system that can eliminate a decrease in yield.

また、特許文献1以外にも、例えば特許文献2に示されるような、スリットを使って管状部材の表面に照明領域(明領域)と影部分(暗領域)とを形成して管状部材の表面欠陥を検査する方法及び装置がある。なお、特許文献2においては、スリットをカメラに対し背景となるように配置していない。
特開2005−114645号公報 特開2005−208054号公報
In addition to Patent Document 1, for example, as shown in Patent Document 2, the surface of the tubular member is formed by forming an illumination region (bright region) and a shadow portion (dark region) on the surface of the tubular member using a slit. There are methods and apparatus for inspecting for defects. In Patent Document 2, the slit is not arranged so as to be the background with respect to the camera.
JP 2005-114645 A JP 2005-208054 A

上記のような状況に鑑みて本発明はなされたもので、その目的とするところは、小管径で、移動速度が高速である透明な管体の外観欠陥の検査に際しても、管肉厚部分の影響を受けることなく、高い精度で検査を行うことができ、誤判断による歩留低下を排除することができる管体の検査装置及び検査システムを提供することにある。   The present invention has been made in view of the situation as described above, and the object of the present invention is to provide a tube thickness portion even when inspecting the appearance defect of a transparent tube having a small tube diameter and a high moving speed. It is an object of the present invention to provide an inspection apparatus and inspection system for a tubular body that can be inspected with high accuracy without being influenced by the above-described method and can eliminate a decrease in yield due to erroneous determination.

本発明の管体の検査装置及び検査システムは、
管体の検査装置が、光源と、この光源の光軸方向に対向配置した撮像装置と、この撮像装置と前記光源との間を光軸に直交する管軸方向に回転しながら移送される光源光に透明な管体と、管軸方向の複数のスリットを有して前記管体と前記光源との間の所定位置に配置されたスリット板と、このスリット板を背景として前記撮像装置によって撮影された前記管体の撮影画像を画像処理し、撮影されたスリット画像から該管体の外観欠陥を検出する画像処理装置を備えた検査装置であって、前記スリット板は、前記管体を通して見た時、前記スリットが該管体の内径寸法より狭い所定径方向範囲内の画像として得られるように形成されていると共に、前記スリットの外方側遮光部分が該管体の管肉厚部を遮光する画像となるように形成されているものであり、前記撮像装置は、前記スリット画像と共に前記管体の外形画像または管肉厚部画像を同時に撮影するものであり、前記画像処理装置は、前記スリット画像と前記外形画像または前記管肉厚部画像に基づいて前記管体の外観欠陥の検出を行うものであることを特徴とするものであり、
さらに、前記スリット板が、前記スリットに近傍に、前記外形画像または前記管肉厚部画像を撮影するための前記スリット直交方向の位置検出開口を有していることを特徴とするものであり、
さらに、前記撮像装置は、前記管体の直径寸法以上の撮像範囲を有すると共に、前記管体が全周にわたり撮影可能となるよう前記光源と共に少なくとも4対配設されていることを特徴とするものであり、
さらに、前記画像処理装置は、前記外形画像または前記管肉厚部画像に基づいて前記管体の位置を検出することにより、管肉厚部による前記スリット画像への影響の有無を検出することを特徴とするものである。
The tubular body inspection apparatus and inspection system of the present invention are:
A tube inspection device includes a light source, an imaging device disposed opposite to the optical axis of the light source, and a light source transferred between the imaging device and the light source while rotating in the tube axis direction perpendicular to the optical axis. Photographed by the imaging device with a tube body transparent to light, a slit plate having a plurality of slits in the tube axis direction and disposed at a predetermined position between the tube body and the light source. An inspection apparatus including an image processing device that performs image processing on a captured image of the tubular body and detects an appearance defect of the tubular body from the captured slit image, wherein the slit plate is viewed through the tubular body. The slit is formed so as to be obtained as an image within a predetermined radial direction range narrower than the inner diameter dimension of the tubular body, and the outer light-shielding portion of the slit reduces the tube thick portion of the tubular body. It is formed to be an image that blocks light The imaging device is configured to simultaneously capture the outer shape image or the tube thickness portion image of the tubular body together with the slit image, and the image processing device is configured to capture the slit image and the outer shape image or the tube thickness. It is characterized by detecting the appearance defect of the tubular body based on the thick part image,
Furthermore, the slit plate has a position detection opening in the direction perpendicular to the slit for photographing the outer shape image or the tube thickness part image in the vicinity of the slit,
Furthermore, the imaging device has an imaging range equal to or larger than the diameter of the tube, and at least four pairs of the light sources are arranged with the light source so that the tube can be photographed over the entire circumference. And
Further, the image processing device detects the presence or absence of an influence on the slit image by the tube thick part by detecting the position of the tube based on the outline image or the tube thick part image. It is a feature.

また、管体の検査システムが、連続的にガラス管の管引き成形を行う成形ラインと、この成形ラインに設置され管軸方向に所定管引き速度で連続移送される透明な管体の異物等の不良検出をする上記の検査装置と、この検査装置による検査後の前記管体を所定長に切断する切断装置と、前記検査装置より前記成形ラインの移送方向下流側の所定離間距離だけ隔たった位置に設置され、前記切断装置で切断された前記管体のうち前記検査装置で不良判定された不良管体を排除する排除装置を備えるものであって、前記排除装置での不良管体の排除が、前記検査装置での不良判定時点から、前記検査装置、前記排除装置間の所定離間距離と前記管引き速度とに基づいて算出された時間経過後に行われるよう設定されていることを特徴とするシステムである。   In addition, the tube inspection system has a molding line that continuously draws a glass tube, and a foreign object such as a transparent tube that is installed in the forming line and is continuously transferred in the tube axis direction at a predetermined tube drawing speed. The above-described inspection apparatus for detecting defects, a cutting apparatus for cutting the tube body after inspection by the inspection apparatus into a predetermined length, and a predetermined separation distance downstream of the inspection line in the transfer direction of the molding line. An exclusion device that eliminates a defective tubular body that has been determined to be defective by the inspection device among the tubular bodies that are installed at a position and has been cut by the cutting device, and that eliminates the defective tubular body by the exclusion device. Is set to be performed after elapse of a time calculated based on a predetermined separation distance between the inspection device and the exclusion device and the tube drawing speed from the time when a defect is determined in the inspection device. System It is.

本発明によれば、小管径で、移動速度が高速である透明な管体の外観欠陥の検査に際しても、管肉厚部分の影響を受けることなく、高い精度で検査を行うことができ、誤判断による歩留低下を排除することができる等の効果を奏する。   According to the present invention, even when inspecting the appearance defect of a transparent tubular body having a small tube diameter and a high moving speed, it is possible to perform inspection with high accuracy without being affected by the tube thickness portion, There is an effect that it is possible to eliminate a decrease in yield due to misjudgment.

以下本発明の一実施形態を、図1乃至図5を参照して説明する。図1は検査システムの構成図であり、図2は検査装置の断面図であり、図3は検査装置を説明するために示す図であり、図4はスリット板の平面図であり、図5は画像処理装置に表示された画面を示す図である。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1 is a block diagram of the inspection system, FIG. 2 is a cross-sectional view of the inspection apparatus, FIG. 3 is a view for explaining the inspection apparatus, FIG. 4 is a plan view of the slit plate, and FIG. FIG. 4 is a diagram showing a screen displayed on the image processing apparatus.

図1乃至図5において、透明な管体である透光性ガラス管の検査システム1は、ダンナー成形法による管引き成形装置2の管引き成形ライン3のラインが水平となるように構成されている部分に沿って、順に検査装置4、切断装置5、排除装置6を設置して構成されている。管引き成形装置2は、図示しないガラス溶融炉によって溶融された溶融ガラス7を所定温度に保持し貯溜するガラス溶融容器8と、このガラス溶融容器8の底部に形成されたガラス流下口9の下方に配設され、駆動機構10により所定回転速度で一定方向に回転するスリーブ11を備えている。スリーブ11は先端が下方となるよう所定の傾斜角度で傾斜していると共に、スリーブ11の軸心に沿いガス圧送路12が貫通して設けられていて、このガス圧送路12を通じ、圧ガス供給源13から供給されたブローエアが先端開口から噴出するようになっている。   1 to 5, a transparent glass tube inspection system 1 that is a transparent tube body is configured such that a line of a tube drawing line 3 of a tube drawing device 2 by a Danner forming method is horizontal. An inspection device 4, a cutting device 5, and an exclusion device 6 are installed in that order along the existing portion. The tube forming apparatus 2 includes a glass melting container 8 that holds and stores a molten glass 7 melted by a glass melting furnace (not shown) at a predetermined temperature, and a glass flow outlet 9 formed at the bottom of the glass melting container 8. And a sleeve 11 that rotates in a predetermined direction at a predetermined rotational speed by a drive mechanism 10. The sleeve 11 is inclined at a predetermined inclination angle so that the tip is downward, and a gas pressure feed path 12 is provided through the sleeve 11 along the axis of the sleeve 11. Pressure gas is supplied through the gas pressure feed path 12. Blow air supplied from the source 13 is ejected from the opening of the tip.

そして、ガラス溶融容器8のガラス流下口9から適正に粘性が調整された溶融ガラス7がリボン状に流下し、スリーブ11の上方の根元側表面に巻き付く。その後、巻き付いた溶融ガラス7は、重力により根元側から下方の先端側に移動し、先端開口から噴出する所定圧力のブローエアによって管状に成形され、管引き成形ライン3の検査装置4と切断装置5の間に配置された管引き機14によって、例えば直径が2mm〜4mm、管肉厚が0.2mm〜0.5mmの所定管外径、所定管肉厚の連続した透光性ガラス管15の管引きが、管軸Oを中心にしてゆっくり回転しながら連続して管軸方向に行われる。   Then, the molten glass 7 whose viscosity is appropriately adjusted flows down in a ribbon shape from the glass flow-down port 9 of the glass melting container 8 and winds around the root-side surface above the sleeve 11. Thereafter, the wound molten glass 7 moves from the root side to the lower tip side by gravity and is formed into a tubular shape by blow air of a predetermined pressure ejected from the tip opening, and the inspection device 4 and the cutting device 5 in the tube drawing line 3. For example, a continuous glass tube 15 having a predetermined tube outer diameter of a diameter of 2 mm to 4 mm and a tube thickness of 0.2 mm to 0.5 mm and a predetermined tube thickness of The tube drawing is continuously performed in the tube axis direction while slowly rotating around the tube axis O.

このとき、例えば管引き成形ライン3に沿って移送されるガラス管15の管外径が第1の管外径測定器16、第2の管外径測定器17でそれぞれ測定され、測定結果はブロー圧制御部18に入力され、それに基づき、管外径が所定寸法となるよう圧ガス供給源13の制御が行われる。なお、管引き速度vについては、図示しないがガラス管15の速度を測定し管引き機14を調節することによって、例えば、80m/分〜400m/分の所定管引き速度を維持するようになっている。   At this time, for example, the tube outer diameter of the glass tube 15 transferred along the tube drawing line 3 is measured by the first tube outer diameter measuring device 16 and the second tube outer diameter measuring device 17, respectively. Based on the input to the blow pressure control unit 18, the control of the pressurized gas supply source 13 is performed so that the outer diameter of the pipe becomes a predetermined dimension. As for the tube drawing speed v, although not shown, a predetermined tube drawing speed is maintained, for example, by measuring the speed of the glass tube 15 and adjusting the tube drawing machine 14, for example, 80 m / min to 400 m / min. ing.

また、検査装置4は、透光性ガラス管15の異物、泡、すじ等による外観欠陥の有無を検査するもので、それぞれ4つの光源19、撮像装置20、スリット板21が光軸L方向に、光源19と撮像装置20が対向配置され、さらに光源19と撮像装置20の間にスリット板21が配置されるようにして収納された正八角形の角環状の筐体22を備え、環状筐体22の環状面の中心部を直交方向に管引き成形ライン3上のガラス管15が移送される撮像部23と、撮像部23の撮影画像を処理する画像処理装置24を備えた制御部25と、環状筐体22を管引き成形ライン3の適正な位置に支持する図示しない筐体支持部を備えている。なお、スリット板21は、ガラス管15と光源19との間に配置されており、ガラス管15と撮像装置20、スリット板21の位置関係は、例えば直径が2mm〜4mm、管肉厚が0.2mm〜0.5mmであるガラス管15の中心から距離30mmの位置にスリット板21が位置し、ガラス管15の中心から距離145mmの位置に撮像装置20が位置する関係となっている。   The inspection device 4 inspects the presence or absence of appearance defects due to foreign matter, bubbles, streaks, etc. in the translucent glass tube 15, and each of the four light sources 19, the imaging device 20, and the slit plate 21 is in the optical axis L direction. The light source 19 and the imaging device 20 are arranged opposite to each other, and further, a regular octagonal rectangular annular housing 22 is housed so that the slit plate 21 is disposed between the light source 19 and the imaging device 20. An image pickup unit 23 to which the glass tube 15 on the tube drawing line 3 is moved in a direction orthogonal to the center of the annular surface 22, and a control unit 25 having an image processing device 24 for processing a photographed image of the image pickup unit 23; A casing support (not shown) for supporting the annular casing 22 at an appropriate position on the pipe forming line 3 is provided. The slit plate 21 is disposed between the glass tube 15 and the light source 19, and the positional relationship between the glass tube 15, the imaging device 20, and the slit plate 21 is, for example, a diameter of 2 mm to 4 mm and a tube thickness of 0. The slit plate 21 is located at a distance of 30 mm from the center of the glass tube 15 that is .2 mm to 0.5 mm, and the imaging device 20 is located at a position of 145 mm from the center of the glass tube 15.

そして、撮像部23を構成する正八角形の角環状の筐体22には、8つの外壁26と内壁27の間を、同じく8つの隔壁28によって区画することにより、同形状の8つの小区画29が形成されており、対向する小区画29は、それぞれの内壁27が互いに平行面となっている。また、片方側の各小区画29の他方側小室対向面には、例えば100mm×100mmサイズを有する青色LED(発光ダイオード)アレイ30の前面に光拡散板31を配置してなる光源19が設けられ、電源32によって対向する他方側の小区画29方向に青色LEDアレイ30の発光光を、光拡散板31を透過させて光源光として投射するようになっている。   The regular octagonal annular housing 22 constituting the imaging unit 23 is divided into eight small partitions 29 having the same shape by dividing the space between the eight outer walls 26 and the inner wall 27 by the eight partition walls 28. In each of the opposing small sections 29, the inner walls 27 are parallel to each other. Further, a light source 19 having a light diffusion plate 31 disposed on the front surface of a blue LED (light emitting diode) array 30 having a size of, for example, 100 mm × 100 mm is provided on the surface facing the other side chamber in each small section 29 on one side. The light emitted from the blue LED array 30 is transmitted through the light diffusing plate 31 and projected as light source light in the direction of the other small section 29 facing the power source 32.

また、環状筐体22の他方側の各小区画29は、片方側小区画対向面、すなわち光源19に対向する面に所定直径の撮影開口33が形成されており、撮影開口33を有する各小区画29内には、所定の撮影範囲を持ち、ガラス管15の前面から背面までの間の明瞭な映像が得られるよう被写界深度がガラス管15の直径寸法以上となっているCCD(固体撮像素子)カメラで構成される撮像装置20が、その光軸Lを撮影開口33の中心を通り、移送されるガラス管15の管軸Oに直角に交差させ、対向する光源19の中心に至るように設けられている。   Each of the small sections 29 on the other side of the annular housing 22 has a photographing opening 33 having a predetermined diameter formed on one surface facing the small section, that is, a surface facing the light source 19. A CCD (solid state) having a predetermined photographing range in the section 29 and having a depth of field equal to or larger than the diameter of the glass tube 15 so that a clear image from the front to the back of the glass tube 15 can be obtained. The imaging device 20 composed of an imaging device) camera has its optical axis L passing through the center of the imaging aperture 33, intersecting the tube axis O of the glass tube 15 to be transferred at right angles, and reaching the center of the opposing light source 19. It is provided as follows.

これにより、ガラス管15の管軸Oを中心とする円周上の片方側に、隣り合うものと光軸Lを45度ずらした状態で撮像装置20が配置され、その光軸Lがガラス管15の管軸Oの同一点で交差し、同様に撮像装置20に対応する光源19が他方側に位置し、各撮像装置20、各光源19は、管軸Oに直交する同一平面内に配置される。そして、このように光軸Lを45度ずらして撮像装置20を管軸Oに直交する同一平面内に配置することで、少なくとも4つの撮像装置20の隣り合うものとの間での撮影範囲を重複したものとすることができ、ガラス管15の全周の撮影が可能となる。   Accordingly, the imaging device 20 is arranged on one side of the circumference around the tube axis O of the glass tube 15 with the optical axis L shifted by 45 degrees from the adjacent one, and the optical axis L is the glass tube. Crossing at the same point of the 15 tube axes O, similarly, the light sources 19 corresponding to the imaging device 20 are located on the other side, and the imaging devices 20 and the light sources 19 are arranged in the same plane orthogonal to the tube axis O. Is done. Then, the imaging range between at least four imaging devices 20 is increased by arranging the imaging device 20 in the same plane orthogonal to the tube axis O by shifting the optical axis L by 45 degrees in this way. It is possible to overlap, and the entire circumference of the glass tube 15 can be photographed.

また、ガラス管15と光源19との間に配置されたスリット板21は、移送される高い温度のガラス管15の熱によって熱変形しない薄鋼板等で形成されており、さらにスリット板21には、例えば幅2mmで所定の長さを有する3本のスリット34が、幅2mmのスリット間遮光部分35aを間に設けてガラス管15の管軸方向に、加工端にチッピング等の不具合が生じないレーザ加工などにより形成されている。スリット34の長さについては、管引き成形ライン3上を移送されるガラス管15の移送速度、すなわち管引き速度vや撮影から次の撮影までの撮像装置20の撮影間隔等を考慮し、ガラス管15が管軸方向に連続して全周撮影できるようなものとなっている。そしてスリット34を形成することでスリット板21には、スリット34の外方側にガラス管15の管肉厚部が写り込まないよう、例えば10mm以上の幅を有するスリット外方遮光部分35bが設けられる。   The slit plate 21 disposed between the glass tube 15 and the light source 19 is formed of a thin steel plate or the like that is not thermally deformed by the heat of the transferred high-temperature glass tube 15. For example, three slits 34 having a width of 2 mm and a predetermined length are provided with an inter-slit light-shielding portion 35 a having a width of 2 mm so that defects such as chipping at the processing end do not occur in the tube axis direction of the glass tube 15. It is formed by laser processing or the like. With regard to the length of the slit 34, the glass tube 15 transported on the tube drawing line 3 is taken into consideration in consideration of the transfer speed of the glass tube 15, that is, the tube drawing speed v, the shooting interval of the imaging device 20 from shooting to the next shooting, etc. The tube 15 is configured so that it can continuously shoot all around the tube axis direction. By forming the slit 34, the slit plate 21 is provided with a slit outer light-shielding portion 35b having a width of, for example, 10 mm or more so that the thick portion of the glass tube 15 does not appear on the outer side of the slit 34. It is done.

またさらにスリット板21には、ガラス管15の位置を検出するための位置検出開口36が、スリット34の片端部側の近傍に、遮光部分を間に設けるようにしてスリット34に直交する方向に形成されており、位置検出開口36によってガラス管15の外形または管肉厚部を撮像装置20で撮影することができるようになっている。なお、ガラス管15の位置を検出するためには、少なくとも片方側の外形または管肉厚部が撮影できればよく、位置検出開口36の大きさも、それに対応した大きさとなっている。   Further, the slit plate 21 has a position detection opening 36 for detecting the position of the glass tube 15 in the direction orthogonal to the slit 34 in the vicinity of one end side of the slit 34 so as to provide a light shielding portion therebetween. The position detection opening 36 allows the imaging device 20 to take an image of the outer shape or the tube thick portion of the glass tube 15. In order to detect the position of the glass tube 15, it is only necessary to photograph at least the outer shape or the tube thick portion on one side, and the size of the position detection opening 36 is also a size corresponding thereto.

そして、このように形成されたスリット板21は、3本のスリット34の中央にあるスリット34の中心を光軸Lが通るようにして、ガラス管15から所定距離だけ離れた位置に配置される。これにより、スリット板21を背景にしてガラス管15を撮像装置20で撮影した画像には、ガラスの屈折によりガラス管15の管肉厚部はスリット板21のスリット外方遮光部分35bで遮光されて画像として現れなくなる。   The slit plate 21 thus formed is arranged at a position away from the glass tube 15 by a predetermined distance so that the optical axis L passes through the center of the slit 34 at the center of the three slits 34. . Accordingly, in the image obtained by photographing the glass tube 15 with the imaging device 20 against the slit plate 21, the thick portion of the glass tube 15 is shielded by the slit outer light shielding portion 35 b of the slit plate 21 due to the refraction of the glass. Will not appear as an image.

一方、3本のスリット34の画像は、ガラス管15の管肉厚部を除いた内径部内、すなわち、内径寸法より狭い所定径方向範囲内に得られるようになっている。スリット34の画像が得られる径方向範囲については、ガラス管15が移送される際に上下左右に少し振動することから、その際に管肉厚部がスリット34に重なり、写り込んでくることがないような寸法、すなわちガラス管15の内径寸法の70%〜80%、例えば直径が2mm〜4mm、管肉厚が0.2mm〜0.5mmであるガラス管15の検査においては、片側0.2mm〜1.0mmずつ内径寸法より狭い寸法の範囲とし、スリット板21にスリット34を形成する位置、ガラス管15に対するスリット板21の位置等により調節される。   On the other hand, the images of the three slits 34 are obtained in the inner diameter portion excluding the tube thickness portion of the glass tube 15, that is, in a predetermined radial direction range narrower than the inner diameter dimension. About the radial direction range where the image of the slit 34 is obtained, when the glass tube 15 is transferred, it vibrates a little up and down, left and right, and at that time, the thick part of the tube overlaps the slit 34 and may be reflected. In the inspection of the glass tube 15 having no dimension, that is, 70% to 80% of the inner diameter of the glass tube 15, for example, the diameter is 2 mm to 4 mm and the tube wall thickness is 0.2 mm to 0.5 mm. The range is smaller than the inner diameter by 2 mm to 1.0 mm, and is adjusted by the position where the slit 34 is formed in the slit plate 21, the position of the slit plate 21 relative to the glass tube 15, and the like.

また、撮像部23の撮影画像を処理する画像処理装置24を備えた制御部25は、画像処理装置24を構成する各撮像装置20からの各撮影画像信号をそれぞれ処理するよう設けられたパーソナルコンピュータ等の個別処理装置37と、画像処理装置24からの出力信号を受けて排除装置6等を制御するライン制御装置38とで構成されている。そして、個別処理装置37では、撮像装置20からの撮影画像信号が入力されると、予め入力設定した初期設定値や閾値等と、設定されているプログラムを用いて所定の画像処理が行われ、撮影画像に含まれる異物等を検出し、それが不良であるか否かの判断を行った後、出力信号をライン制御装置38に出力する。   In addition, the control unit 25 including the image processing device 24 that processes the captured image of the imaging unit 23 is a personal computer provided to process each captured image signal from each imaging device 20 constituting the image processing device 24. And the like, and a line control device 38 that receives the output signal from the image processing device 24 and controls the exclusion device 6 and the like. Then, in the individual processing device 37, when a captured image signal is input from the imaging device 20, predetermined image processing is performed using the preset initial setting value, threshold value, and the like, and the set program, After detecting a foreign substance or the like included in the photographed image and determining whether or not it is defective, an output signal is output to the line control device 38.

そして個別処理装置37での画像処理は、先ず、個別処理装置37の表示画面を使い初期設定値、閾値の設定を行う。設定は、例えば1画素を1単位として行われ、図5の表示画面にクロスハッチングで示すスリット板画像39における良品ガラス管15におけるスリット画像40の形状、位置などを縞模様の基準として入力し、異物やその他の欠点によって歪む縞模様の不良の歪み状態等の閾値を入力することにより行なわれる。図5中、41はガラス管画像、42aはスリット間遮光部分画像、42bはスリット外方遮光部分画像である。   In the image processing in the individual processing device 37, first, initial setting values and threshold values are set using the display screen of the individual processing device 37. The setting is performed, for example, with one pixel as one unit, and the shape, position, and the like of the slit image 40 in the non-defective glass tube 15 in the slit plate image 39 shown by cross hatching are input to the display screen of FIG. This is performed by inputting a threshold value such as a defective state of a striped pattern that is distorted by a foreign object or other defects. In FIG. 5, 41 is a glass tube image, 42a is a light shielding part image between slits, and 42b is a light shielding part image outside a slit.

各初期設定値や閾値等の設定が終わった後、対応する撮像装置20のCCDカメラから撮影画像信号を受け、撮影画像を取り込む。続いて、撮影画像信号のS/N比を上げる等の種々処理を行い、良否判断が可能な状態にする。続いて、得られた画像における異物や欠陥について良否判断部で良、不良の判断を行う。この判断の結果、異物等が不良である場合には、ライン制御装置38に不良信号を発信し、不良でない場合には次の撮影画像信号を取り込み、良、不良の判断を行い、これを繰り返すようにして連続したガラス管15の外観欠陥検査を行う。   After the setting of each initial setting value, threshold value, and the like is completed, the captured image signal is received from the CCD camera of the corresponding imaging device 20 and the captured image is captured. Subsequently, various processes such as increasing the S / N ratio of the photographed image signal are performed to make it possible to determine whether the quality is acceptable. Subsequently, the quality determination unit determines whether the foreign matter or defect in the obtained image is good or bad. If the result of this determination is that the foreign matter or the like is defective, a defect signal is transmitted to the line control device 38, and if it is not defective, the next captured image signal is fetched to determine whether it is good or bad, and this is repeated. Thus, the appearance defect inspection of the continuous glass tube 15 is performed.

なお、個別処理装置37では、位置検出開口36を介して得られるガラス管画像41により、ガラス管15位置の変動を常時チェックし、通常の振動等での管肉厚部の写り込みを防ぐために、例えば内径位置より片側0.2mm〜1.0mmずつ中心方向に広げられているスリット外方遮光部分35bから、何らかの要因によってガラス管15の上下左右への振動が大きくなってはみ出し、管肉厚部がスリット34に重なり、写り込む等することの影響を受けて管肉厚部による歪みを不良とし、良品を不良品として判断されないよう異常発生を通報するようになっている。   In the individual processing device 37, the glass tube image 41 obtained through the position detection opening 36 is constantly checked for fluctuations in the position of the glass tube 15 to prevent reflection of the thick portion of the tube due to normal vibration or the like. For example, from the slit outer light-shielding portion 35b that is spread in the center direction by 0.2 mm to 1.0 mm on one side from the inner diameter position, the vibration in the vertical and horizontal directions of the glass tube 15 increases and protrudes due to some factor. Due to the influence of the part overlapping the slit 34 and being reflected, the distortion caused by the tube thickness part is regarded as defective, and the occurrence of an abnormality is reported so that a non-defective product is not judged as a defective product.

また、不良信号を受信したライン制御装置38は、検査装置4と排除装置6の離間距離Q1とガラス管15の移送速度、すなわち管引き速度v、さらに検査装置4と切断装置5の離間距離Q2と切断装置5でのガラス管15の切断長fとから、検査装置4で検出された異物等の不良が有る切断後のガラス管15fを割り出し、それを管引き成形ライン3上から排除するよう排除装置6の動作を制御する。これによって、排除装置6で異物等の不良が有るガラス管15fが管引き成形ライン3上から排除され、排除装置6以降の管引き成形ライン3上には良品の切断後のガラス管15fが流れ、次工程に移送されることになる。   Further, the line control device 38 that has received the failure signal, the separation distance Q1 between the inspection device 4 and the exclusion device 6, the transfer speed of the glass tube 15, that is, the tube drawing speed v, and the separation distance Q2 between the inspection device 4 and the cutting device 5. And the cutting length f of the glass tube 15 in the cutting device 5, the glass tube 15 f after cutting having a defect such as a foreign matter detected by the inspection device 4 is determined, and it is excluded from the tube drawing line 3. The operation of the exclusion device 6 is controlled. As a result, the glass tube 15f having a defect such as a foreign substance is excluded from the tube drawing line 3 in the rejecting device 6, and the glass tube 15f after cutting the non-defective product flows on the tube forming line 3 after the removing device 6. Then, it is transferred to the next process.

以上の通り構成することで、管引き成形ライン3上で成形され移送されるガラス管15について連続して異物等の検査を行うことができることになり、またガラス管15を、検査範囲を重複させながら検査できるため、誤検出を低減することができ、さらに不良品は自動的に確実に排除できる。この結果、所定長に切断後のガラス管15fの品質を所定品質水準に維持することができ、またこうした検査を、手間をかけることなく行うことができる。   By configuring as described above, the glass tube 15 formed and transferred on the tube drawing line 3 can be continuously inspected for foreign matters and the like, and the glass tube 15 is overlapped with the inspection range. Inspection can be performed while reducing false detections, and defective products can be automatically and reliably eliminated. As a result, the quality of the glass tube 15f after being cut to a predetermined length can be maintained at a predetermined quality level, and such an inspection can be performed without taking time and effort.

なお、上記の実施形態においては光源19に青色LEDを用いたが、青色フィルタを用いて投射する光源光を青色にしてもよく、また用いる撮像装置20により最適な波長の光源光を選択するようにしてもよい。またさらに、スリット板21にスリット34をガラス管15の管軸方向に3本形成して縞模様ができるようにしたが、2本もしくは4本以上であってもよく、また管軸方向に対して交差する斜め方向、または直交する縦方向のスリットを複数本形成するようにしてもよい。さらに、ガラス管15の位置を検出するために、スリット板21に設けた位置検出開口36を介してガラス管15の外形または管肉厚部を撮影するようにしたが、位置検出開口36を介することなく、スリット板21からはみ出ているガラス管15の外形または管肉厚部を直接撮影するようにしてもよい。   In the above embodiment, a blue LED is used as the light source 19, but the light source light projected using the blue filter may be blue, and the light source light having the optimum wavelength is selected by the imaging device 20 to be used. It may be. Furthermore, the slit plate 21 is formed with three slits 34 in the tube axis direction of the glass tube 15 so that a striped pattern can be formed. It is also possible to form a plurality of slits in the oblique direction intersecting each other or in the perpendicular direction perpendicular to each other. Further, in order to detect the position of the glass tube 15, the outer shape or the tube thickness portion of the glass tube 15 is photographed through the position detection opening 36 provided in the slit plate 21. Instead, the outer shape of the glass tube 15 protruding from the slit plate 21 or the tube thick portion may be directly photographed.

本発明の一実施形態である検査システムを示す構成図である。It is a lineblock diagram showing the inspection system which is one embodiment of the present invention. 本発明の一実施形態である検査装置の断面図である。It is sectional drawing of the inspection apparatus which is one Embodiment of this invention. 本発明の一実施形態の検査装置を説明するために示す図である。It is a figure shown in order to demonstrate the test | inspection apparatus of one Embodiment of this invention. 本発明の一実施形態におけるスリット板の平面図である。It is a top view of the slit board in one embodiment of the present invention. 本発明の一実施形態における画像処理装置に表示された画面を示す図である。It is a figure which shows the screen displayed on the image processing apparatus in one Embodiment of this invention.

符号の説明Explanation of symbols

3…成形ライン
4…検査装置
5…切断装置
6…排除装置
15…ガラス管
19…光源
20…撮像装置
21…スリット板
24…画像処理装置
34…スリット
35b…スリット外方遮光部分
36…位置検出開口
DESCRIPTION OF SYMBOLS 3 ... Molding line 4 ... Inspection apparatus 5 ... Cutting apparatus 6 ... Exclusion apparatus 15 ... Glass tube 19 ... Light source 20 ... Imaging apparatus 21 ... Slit plate 24 ... Image processing apparatus 34 ... Slit 35b ... Slit outer light shielding part 36 ... Position detection Opening

Claims (5)

光源と、この光源の光軸方向に対向配置した撮像装置と、この撮像装置と前記光源との間を光軸に直交する管軸方向に回転しながら移送される光源光に透明な管体と、管軸方向の複数のスリットを有して前記管体と前記光源との間の所定位置に配置されたスリット板と、このスリット板を背景として前記撮像装置によって撮影された前記管体の撮影画像を画像処理し、撮影されたスリット画像から該管体の外観欠陥を検出する画像処理装置を備えた検査装置であって、
前記スリット板は、前記管体を通して見た時、前記スリットが該管体の内径寸法より狭い所定径方向範囲内の画像として得られるように形成されていると共に、前記スリットの外方側遮光部分が該管体の管肉厚部を遮光する画像となるように形成されているものであり、
前記撮像装置は、前記スリット画像と共に前記管体の外形画像または管肉厚部画像を同時に撮影するものであり、
前記画像処理装置は、前記スリット画像と前記外形画像または前記管肉厚部画像に基づいて前記管体の外観欠陥の検出を行うものであることを特徴とする管体の検査装置。
A light source, an imaging device disposed opposite to the optical axis direction of the light source, and a tube body transparent to the light source light transferred between the imaging device and the light source while rotating in the tube axis direction orthogonal to the optical axis; A slit plate having a plurality of slits in the tube axis direction and disposed at a predetermined position between the tube body and the light source, and photographing of the tube body photographed by the imaging device with the slit plate as a background An inspection apparatus including an image processing apparatus that performs image processing of an image and detects an appearance defect of the tubular body from a captured slit image,
The slit plate is formed so that the slit is obtained as an image in a predetermined radial direction range narrower than the inner diameter dimension of the tube body when viewed through the tube body, and the light shielding portion on the outer side of the slit. Is formed so as to be an image that shields the tube thick portion of the tube body,
The imaging device captures the outer shape image or the tube thickness part image of the tube together with the slit image,
The tube inspection apparatus according to claim 1, wherein the image processing device detects an appearance defect of the tube based on the slit image and the outer shape image or the tube thick portion image.
前記スリット板が、前記スリットに近傍に、前記外形画像または前記管肉厚部画像を撮影するための前記スリット直交方向の位置検出開口を有していることを特徴とする請求項1記載の管体の検査装置。   2. The tube according to claim 1, wherein the slit plate has a position detection opening in a direction perpendicular to the slit for photographing the outer shape image or the tube thickness portion image in the vicinity of the slit. Body inspection device. 前記撮像装置は、前記管体の直径寸法以上の撮像範囲を有すると共に、前記管体が全周にわたり撮影可能となるよう前記光源と共に少なくとも4対配設されていることを特徴とする請求項1記載の管体の検査装置。   2. The imaging apparatus according to claim 1, wherein the imaging apparatus has an imaging range equal to or larger than a diameter dimension of the tubular body, and at least four pairs of the light source are disposed with the light source so that the tubular body can be photographed over the entire circumference. The tube inspection apparatus described. 前記画像処理装置は、前記外形画像または前記管肉厚部画像に基づいて前記管体の位置を検出することにより、管肉厚部による前記スリット画像への影響の有無を検出することを特徴とする請求項1記載の管体の検査装置。   The image processing device detects the presence or absence of an influence on the slit image by a tube thick part by detecting the position of the tubular body based on the outer shape image or the tube thick part image. The tube inspection device according to claim 1. 連続的にガラス管の管引き成形を行う成形ラインと、この成形ラインに設置され管軸方向に所定管引き速度で連続移送される透明な管体の異物等の不良検出をする上記請求項1記載の検査装置と、この検査装置による検査後の前記管体を所定長に切断する切断装置と、前記検査装置より前記成形ラインの移送方向下流側の所定離間距離だけ隔たった位置に設置され、前記切断装置で切断された前記管体のうち前記検査装置で不良判定された不良管体を排除する排除装置を備えるものであって、前記排除装置での不良管体の排除が、前記検査装置での不良判定時点から、前記検査装置、前記排除装置間の所定離間距離と前記管引き速度とに基づいて算出された時間経過後に行われるよう設定されていることを特徴とするガラス管の検査システム。   2. A molding line for continuously drawing a glass tube, and detecting defects such as foreign matter in a transparent tube that is installed in the molding line and is continuously transferred in a tube axis direction at a predetermined tube drawing speed. The inspection apparatus described above, a cutting apparatus that cuts the tubular body after inspection by the inspection apparatus into a predetermined length, and a position separated from the inspection apparatus by a predetermined separation distance on the downstream side in the transfer direction of the molding line, An exclusion device that excludes a defective tube that has been determined to be defective by the inspection device among the tubes cut by the cutting device is provided, and the removal of the defective tube by the exclusion device is the inspection device. Inspection of a glass tube, which is set to be performed after a lapse of time calculated based on a predetermined separation distance between the inspection device and the exclusion device and the tube drawing speed from the point of failure determination at system
JP2008153287A 2008-06-11 2008-06-11 Tube inspection device and inspection system Expired - Fee Related JP5083055B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008153287A JP5083055B2 (en) 2008-06-11 2008-06-11 Tube inspection device and inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008153287A JP5083055B2 (en) 2008-06-11 2008-06-11 Tube inspection device and inspection system

Publications (2)

Publication Number Publication Date
JP2009300181A true JP2009300181A (en) 2009-12-24
JP5083055B2 JP5083055B2 (en) 2012-11-28

Family

ID=41547246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008153287A Expired - Fee Related JP5083055B2 (en) 2008-06-11 2008-06-11 Tube inspection device and inspection system

Country Status (1)

Country Link
JP (1) JP5083055B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101413023B1 (en) * 2013-10-04 2014-07-04 주식회사 서울금속 Apparatus for inspecting basic material of screw and method for inspecting basic material of screw
TWI604080B (en) * 2017-04-24 2017-11-01 台灣積體電路製造股份有限公司 Nozzle hole inspection system and method
CN108627518A (en) * 2018-04-25 2018-10-09 华中科技大学 A kind of round steel surface imaging regulating device and method
JP2018165626A (en) * 2017-03-28 2018-10-25 株式会社東京精密 Surface foreign matter detection device and surface foreign matter detection method using the same
JP2021505854A (en) * 2017-11-30 2021-02-18 コーニング インコーポレイテッド Pipe dimension measurement system
CN112414942A (en) * 2020-11-27 2021-02-26 长安大学 Visual cable detection device with adjustable detection space closed shooting distance

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138853A (en) * 1988-11-18 1990-05-28 Matsushita Electron Corp Striae detection for glass tube
JP2002156337A (en) * 2000-11-16 2002-05-31 Toshiba Corp Inspection method of light transmissive body, inspection device, inspection program and recording medium
JP2005114645A (en) * 2003-10-10 2005-04-28 Asahi Techno Glass Corp Apparatus and system for inspecting glass tube

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138853A (en) * 1988-11-18 1990-05-28 Matsushita Electron Corp Striae detection for glass tube
JP2002156337A (en) * 2000-11-16 2002-05-31 Toshiba Corp Inspection method of light transmissive body, inspection device, inspection program and recording medium
JP2005114645A (en) * 2003-10-10 2005-04-28 Asahi Techno Glass Corp Apparatus and system for inspecting glass tube

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101413023B1 (en) * 2013-10-04 2014-07-04 주식회사 서울금속 Apparatus for inspecting basic material of screw and method for inspecting basic material of screw
JP2018165626A (en) * 2017-03-28 2018-10-25 株式会社東京精密 Surface foreign matter detection device and surface foreign matter detection method using the same
JP2021167845A (en) * 2017-03-28 2021-10-21 株式会社東京精密 Surface foreign matter detection device and surface foreign matter detection method using the same
JP7301914B2 (en) 2017-03-28 2023-07-03 株式会社東京精密 Surface foreign matter detection device and surface foreign matter detection method using the same
TWI604080B (en) * 2017-04-24 2017-11-01 台灣積體電路製造股份有限公司 Nozzle hole inspection system and method
JP2021505854A (en) * 2017-11-30 2021-02-18 コーニング インコーポレイテッド Pipe dimension measurement system
US11920914B2 (en) 2017-11-30 2024-03-05 Corning Incorporated Tubing dimensional measurement system
CN108627518A (en) * 2018-04-25 2018-10-09 华中科技大学 A kind of round steel surface imaging regulating device and method
CN108627518B (en) * 2018-04-25 2019-10-25 华中科技大学 A kind of round steel surface imaging regulating device and method
CN112414942A (en) * 2020-11-27 2021-02-26 长安大学 Visual cable detection device with adjustable detection space closed shooting distance
CN112414942B (en) * 2020-11-27 2023-09-01 长安大学 Visual cable detection device with adjustable detection space closed shooting distance

Also Published As

Publication number Publication date
JP5083055B2 (en) 2012-11-28

Similar Documents

Publication Publication Date Title
JP5083055B2 (en) Tube inspection device and inspection system
JP5583102B2 (en) Glass substrate surface defect inspection apparatus and inspection method
WO2010024082A1 (en) Defect inspecting system, and defect inspecting method
KR20080031922A (en) Apparatus and methods for inspecting a composite structure for defects
JP4876201B1 (en) Glass bottle inspection device and telecentric lens unit
TW201502498A (en) Inspection system
JP2006220498A (en) Lens inspection device
JP4668354B1 (en) Transparent tube bubble detection device and bubble detection method
JP4362335B2 (en) Inspection device
JP2009216628A (en) Defect detector and defect detection method
JP2005172608A (en) Appearance inspecting apparatus
JP4188198B2 (en) Glass tube inspection device and inspection system
JP2013019786A (en) Inside tube wall inspection apparatus and inside tube wall inspection method
JP2008076223A (en) Inspection method of cylindrical transparent body, and inspection apparatus used for it
JP5109837B2 (en) Appearance inspection apparatus and appearance inspection system for transparent tube
JP2014009969A (en) Image processing device, image processing method, and exposure pattern inspection device
JP4876758B2 (en) Inspection method and inspection apparatus for hollow fiber membrane module
JP2010043985A (en) Optical fiber inspection apparatus
JP2009174918A (en) Defect inspecting device and method, and manufacturing method of plate-like body
JP2008107348A (en) Machine for inspection of glass container
JP2007033240A (en) Flaw detecting method of sheet and flaw detector
JP2009103615A (en) Hole detection device
US9766188B2 (en) Method and device for optically inspecting faults
JP5652279B2 (en) Filtration membrane plate inspection device by image processing
JP2016125968A (en) Check device and method for checking

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110216

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20110427

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120620

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120626

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120710

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120807

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120820

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150914

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees