JP2009294224A - Nondestructive analysis method, and nondestructive analysis device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nondestructive analysis method and a nondestructive analysis device for easily obtaining high contrast image in an object at one time. <P>SOLUTION: When an object 2 is irradiated with monochromatic parallel X-rays 1, refracted X-rays 3 or the like from the object 2 is made incident on a transmission-type analyzer crystal 4a, and the refracted X-rays 3 or the like are divided into X-rays 41a along the forward diffraction direction and X-rays 42a along the diffraction direction by dynamical diffraction by the transmission-type analyzer crystal 4a, the thickness of the transmission-type analyzer crystal 4a is set in advance to a thickness such that the intensity of either one of the X-rays 41a along the forward diffraction direction and the X-rays 42a along the diffraction direction is nearly zero when there is no object. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a nondestructive analysis method and apparatus for irradiating an object with electromagnetic waves or particle beams so that analysis can be performed while the inner structure of the object remains in a nondestructive state.

  As a technique for nondestructive analysis of the internal structure of an object, various techniques for obtaining an image in the object using, for example, X-rays have already been proposed. For example, techniques known in Patent Documents 1 and 2 are known.

  The technique known in Patent Document 1 irradiates an object with monochromatic X-rays, guides the refraction X-rays from the object to a crystal analyzer (also referred to as a crystal analyzer plate, crystal analyzer, etc.), and transmits X from the crystal analyzer. An image in an object is obtained by a line beam and a diffracted X-ray beam, and the fact that the crystal analysis body has an angle analysis capability is utilized. An image obtained from each of the transmitted X-ray beam and the diffracted X-ray beam is a pair of similar images having different contrasts (images having opposite signs, that is, one is black and white and the other is black and white).

  In the method known from Patent Document 2, the object is irradiated with monochromatic X-rays, the refraction X-rays from the object are guided to the crystal analyte, and the reflected X-ray obtained by Bragg reflection of the crystal analyte is used. Internal image information is obtained. In addition, by irradiating an object with monochromatic X-rays and guiding them to a set of asymmetric reflection type crystal analytes that reflect refracted X-rays from the object twice, an image distorted by the first reflection is obtained for the second time. A technique for obtaining an image whose distortion is corrected by reflection has already been proposed.

Japanese Patent No. 2694049 US Pat. No. 5,850,425

  However, these conventional nondestructive analysis techniques have the following problems. That is, in the method described in Patent Document 1, when the angle analysis capability of the transmission crystal analyte is used, it is considered that the atomic plane of the monochromator that generates monochromatic X-rays is parallel to the atomic plane of the crystal analyte. Therefore, there is a problem that the influence of the wavelength distribution remains, and further, since it is not considered to make the crystal analyte a specific thickness, an image of the desired object cannot be obtained at one time. Accordingly, it is necessary to perform a complicated operation of accumulating black and white images and black and white images while gradually rotating the crystal analysis object, and synthesizing and forming a contrast image using a computer.

  In addition, any of the above non-destructive analysis techniques is mainly configured to obtain an X-ray image that is object information by superimposing the X-ray on the bright-field image, that is, the X-ray having an influence of the intensity of the directly incident X-ray. Then, only an image with poor contrast and difficult to distinguish was obtained.

  The present invention has been made in view of the above circumstances, eliminates the problems of the prior art, and particularly in dark field images, that is, does not affect the intensity of electromagnetic waves such as directly incident X-rays or particle beams, and is unnecessary. It is possible to reduce or reduce the background illumination of the electromagnetic wave or particle beam, and to realize a configuration mainly for obtaining an image that is information of the object by the electromagnetic wave or particle beam. It is another object of the present invention to provide a new nondestructive analysis method and nondestructive analysis apparatus that can be easily obtained.

  In order to achieve the above object, the present invention irradiates an object with a monochromatic parallel electromagnetic wave or a particle beam, causes the electromagnetic wave or particle beam from the object to enter the transmission crystal analyte, and the electromagnetic wave emitted from the transmission crystal analyte or In obtaining an image in an object with a particle beam, the thickness of the transmission crystal analyte is set so that the monochromatic parallel electromagnetic wave or particle beam passes through the monochromatic parallel electromagnetic wave or particle beam in a state where there is no object in the irradiation path. Such that the intensity of one of the forward diffraction X-rays and diffraction diffraction X-rays obtained by the dynamic diffraction action of the transmission crystal analyte is substantially zero when incident on the crystal analyzer. Then, when an object is placed in the irradiation path of the monochromatic parallel electromagnetic wave or particle beam, the electromagnetic wave or particle beam from the object is made incident on the transmission type crystal analyte, and the forward diffracted electromagnetic wave Others; and obtaining an image of said object by detecting either the particle beam and the direction of diffraction diffracted electromagnetic wave or particle beam as dark field image.

  Furthermore, the present invention irradiates an object with a monochromatic parallel electromagnetic wave or particle beam, causes the electromagnetic wave or particle beam from the object to enter the transmission crystal analyte, and the electromagnetic wave or particle beam emitted from the transmission crystal analyte causes the object to enter the object. When the transmission type crystal analyte is incident on the transmission type crystal analyte in a state where there is no object in the irradiation path of the monochromatic parallel electromagnetic wave or particle beam. In addition, the intensity of any one of the forward diffracted electromagnetic wave or particle beam and the diffracted diffracted electromagnetic wave or particle beam emitted from the transmission type crystal analyte is cyclic in one direction according to the emission position from the transmission type crystal analyte. This transmission type crystal analyzer has a wedge shape that is substantially zero, and places the object in the irradiation path of the monochromatic parallel electromagnetic wave or particle beam, and transmits the electromagnetic wave or particle beam from the object. A slit-shaped front obtained through the slit while moving a slit plate in which an elongated slit is formed in a direction perpendicular to the one direction on the exit surface side of the transmission type crystal analyte when being incident. One of the directional diffracted electromagnetic wave or particle beam and the diffracted diffracted electromagnetic wave or particle beam is sequentially detected and synthesized to obtain an image in the object as a dark field image.

  Further, the present invention irradiates an object with a monochromatic parallel electromagnetic wave or particle beam, causes the electromagnetic wave or particle beam from the object to enter the reflective crystal analyte, and the electromagnetic wave or particle beam emitted from the reflective crystal analyte When obtaining an image of the object, an image in the object is obtained as a dark field image based on transmitted electromagnetic waves or particle beams transmitted from the reflective crystal analyte by the dynamic diffraction action of the reflective crystal analyte. And

  As described above in detail, the invention of this application makes it easy to create a high-contrast image of the internal structure of any object, whether biological or non-biological, crystalline or non-crystalline, single or composite, solid or liquid, etc. A new non-destructive analysis method and non-destructive analysis device that can be obtained as a dark field image and a bright field image are provided.

  In particular, compared with X-ray fluoroscopy images that have not been seen in the past, X-ray images based on dark-field images have a simple structure, very high contrast, and high accuracy in the structure of the object to be analyzed. It is extremely easy to see and has a great feature that it can be easily analyzed.

It is the figure which illustrated one Embodiment of invention of this application at the time of using a transmission-type crystal analysis body. It is the figure which illustrated another one Embodiment of invention of this application at the time of using a transmission-type crystal analysis body. It is a figure for demonstrating the dynamic diffraction effect | action in a transmission-type crystal analyte. It is a figure for demonstrating the bright-field image and dark-field image in a transmission type crystal analyzer. It is the figure which illustrated the theoretical curve of the kinetic diffraction action which a transmission type crystal analyzer has. It is the figure which illustrated the relationship between the thickness of a transmissive | pervious crystal analyzer, and O wave and G wave. It is the figure which illustrated another one Embodiment of invention of this application at the time of using a transmission-type crystal analyte. (A) is the figure which illustrated one Embodiment of invention of this application at the time of using a reflection type crystal analyte, (b) is the perspective view which illustrated the reflection type crystal analyte. It is the figure which illustrated another one Embodiment of invention of this application at the time of using a reflection type crystal analyte. It is the figure which illustrated one Embodiment of this invention of this application at the time of installing an asymmetric monochromator between an object and a transmission-type crystal analyzer. It is the figure which illustrated one Embodiment of the invention of this application at the time of installing an asymmetric monochromator between a transmission type crystal analyzer and an X-ray detection apparatus. It is the figure which showed one Example of the nondestructive analysis by invention of this application. It is the figure which showed another one Example of the nondestructive analysis by invention of this application. It is the figure which showed another one Example of the nondestructive analysis by invention of this application. It is the figure which showed another one Example of the nondestructive analysis by invention of this application.

[First Embodiment] In the invention of this application, first, as illustrated in FIGS. 1 and 2, for example, the object 2 to be analyzed is irradiated with monochromatic parallel X-rays 1 (I _I ). X-rays 3 such as transmitted X-rays, refracted X-rays, diffracted X-rays, and small angle scattered X-rays (hereinafter, for convenience of explanation, these are collectively referred to as refracted X-rays) are transmitted to the transmission crystal analyte 4a. This is based on the dynamic diffraction action of the transmissive crystal analyte 4a when it is incident, and the thickness of the transmissive crystal analyte 4a is determined in advance when there is no object. The intensity of one of the forward diffracted X-rays 41a (also referred to as incident direction diffracted X-rays or transmitted direction diffracted X-rays, which has the same meaning) and diffraction direction diffracted X-rays 42a obtained by the dynamic diffraction action, X-ray shadow directly incident compared to the other intensity One of the dark-field image 5 and the bright-field image 6 of the image in the object 2 is set by setting the thickness to be substantially zero (including exactly zero, hereinafter the same) in the X-ray intensity with less One or both can be obtained at once.

  More specifically, as illustrated in an enlarged manner in FIG. 3, the dynamic diffraction action is an effect caused by multiple scattering of X-rays in a crystal that is almost completely, and thus X-rays are generated in the crystal. Waves (referred to as O waves) in the forward direction (also referred to as the incident direction or transmission direction) and waves in the diffraction direction (referred to as G waves) are repeatedly reflected many times on a large number of crystal lattice planes. It comes out spectroscopically.

  At this time, the relationship between the O wave and the G wave and the thickness of the transmission crystal analyzer 4a can be expressed by the following equation.

  In the invention of this application, in the above equation 1,

The transmission crystal analysis in which either one of the O wave intensity I _O and the G wave intensity I _G becomes substantially zero at the X-ray intensity less affected by the directly incident X-ray compared to the other. The thickness H of the body 4a is selected. At this time, the wave that is substantially zero constructs the dark field image 5, and the other wave constructs the bright field image 6. That is, the relationship is as follows.

The fact that dark-field / bright-field images by O-waves / G-waves are realized according to the selection of the thickness H will be further described with reference to FIG. 4. First, the monochromatic parallel X-ray 1 [P (W)] is applied to the object 2. When irradiated, refracted X-rays 3 [R (W)] scattered and refracted by the scattering / refractive action Q (W) of the object 2 are generated. When this refracted X-ray 3 [R (W)] is incident on the transmission crystal analyzer 4a at the oblique angle θ to the lattice plane of the monochromatic parallel X-ray 1 satisfying Equation 1 and the crystal of the transmission crystal analyzer 4a. In response to the dynamic diffraction action I _O (W), I _G (W) of the transmission type crystal analyzer 4a, it is split into O waves in the forward direction and G waves in the diffraction direction. FIG. 5 illustrates a more detailed theoretical curve for the dynamic diffraction effects I _O (W) and I _G (W). At this time, when the thickness of the transmission-type crystal analytes 4a was H _O in the number 3, the dark-field image 5 receives the O wave dynamical diffraction action I _{O (W),} G waves It constructs a bright-field image 6 receives the dynamical diffraction action I _{G (W),} that the case of the H _G is reversed, darkfield undergoing G waves dynamical diffraction effects I _{G (W)} The O-wave receives the dynamic diffraction action I _O (W), and the bright field image 6 is constructed.

The important point here is that the thickness of the transmission crystal analyte 4a satisfying the above relationship appears in a certain cycle. For example, when the transmission crystal analyzer 4a is made of diamond-type crystal silicon having a crystal lattice size of 5.411５ and silicon 4, 4, 0 reflection is used, as illustrated in FIG. the thickness H _is present _{I O} or _{I G} is substantially 0 in the cycle of 67.5μm for 35 keV. Here when the _I O = 0 takes the maximum value _{I G, I O} take _I G = 0 when taking the maximum value. Therefore, by adjusting the thickness of the transmission crystal analyte 4a in accordance with this period, the image of the object 2 can be obtained at a high contrast at a time without rotating the transmission crystal analyte 4a as in the prior art. Either one or both of the dark field image 5 and the bright field image 6 can be obtained.

  For example, in consideration of the periodicity, even when the transmission type crystal analyte 4a is formed in a wedge shape or the like in which the above thickness appears periodically, as shown in FIG. 6, from the dark field image to the bright field image periodically. Are successively obtained in the form of slits. Therefore, for example, as illustrated in FIG. 7, a slit 11 is provided on the output side of the transmission crystal analyte 4 a, and the slit 11 and the wedge-shaped transmission crystal analyte 4 a are slid relative to the object 2. Or, conversely, the object 2 is slid relative to the slit 11 and the wedge-shaped transmission crystal analyte 4a, so that a plurality of slit-state images that have passed through the slit 11 can be obtained and synthesized. Thus, an image with an arbitrary field of view, that is, one or both of a dark field image and a bright field image can be obtained.

  Note that the intensity of any one of the O wave, that is, the forward diffraction X-ray 41a and the G wave, that is, the diffraction direction diffraction X-ray 42a, is less affected by the directly incident X-ray than the other intensity. Although it is clear from the above description that the intensity is substantially zero, unnecessary X-rays having the influence of the intensity of the directly incident X-rays are not superimposed, and unnecessary X that is used as background illumination of a strong image. This means that the line intensity becomes substantially zero, that is, the theoretical intensity in the absence of the object 2 becomes substantially zero.

  The thickness range of the transmission crystal analyte 4a that can be set to such an intensity varies depending on various factors such as the crystal lattice size and the intensity / wavelength of the incident refraction X-ray 3 such as the above formula 1. However, for example, several μm to several tens of mm are possible. Further, in this case, it is practically desirable that the required finishing accuracy of the transmission crystal analyte 4a is 1% or less of the thickness.

The forward-direction diffracted X-ray 41a and the diffracted-direction diffracted X-ray 42a from the transmission crystal analyte 4a set to the above thickness are detected by the X-ray detector 10 (see FIGS. 1 and 2), and X-ray detection is performed. An image is generated by an image processing apparatus (not shown but configured to receive X-ray detection data) using the X-ray detection data from the apparatus 10. Bright-field image 6 from the dark field image 5, I _G from I _O is generated in the example of FIG.

[Second Embodiment] The invention of this application is applied to an asymmetric monochromator 8 in the case of using a reflective crystal analyte 4b as illustrated in FIGS. 8 (a), 8 (b) and FIG. The power of the reflective crystal analyte 4b when the object 2 to be analyzed is irradiated with the monochromatic parallel X-ray 1 (I _I ) and the refracted X-ray 3 etc. 3 from the object 2 is incident on the reflective crystal analyte 4b. By utilizing the diffractive diffraction action, the refracted X-rays 3 satisfy the diffraction condition and pass through the reflective crystal analyte 4b by the dynamic diffraction action of the reflective crystal analyte 4b. In this case, by selectively setting the angle between the monochromatic parallel X-ray 1 and the reflective crystal analyte 4b and the thickness of the reflective crystal analyte 4b, the transmitted X-ray 41b (from the reflective crystal analyte 4b ( It is also possible to obtain a dark field image 5 generated by I _T ).

In this case, furthermore, the angle between the monochromatic parallel X-ray 1 and the reflection type crystal analyte 4b is separately selected, the diffraction condition is satisfied by the dynamic diffraction action of the reflection type crystal analyte 4b, and the reflection under the Bragg reflection condition is achieved. A bright-field image 6 generated by the X-ray 42b (I _B ) can also be obtained.

  In particular, when eliminating or reducing unnecessary X-rays that are directly incident on the reflective crystal analyte 4b and are superimposed on the dark field image 5, that is, X-rays that are unnecessary background illumination of the dark field image 5, By using the asymmetric reflection type crystal analysis body 4b shown in FIGS. 8 and 9, it is possible to obtain a dark field image with good contrast by sufficiently reflecting and reducing such X-rays.

[Third Embodiment]
<X-ray detection apparatus> In the first and second embodiments described above, the X-ray detection apparatus 10 detects X-rays from the transmission crystal analysis body 4a and the reflection crystal analysis body 4b. The X-ray detection apparatus 10 includes a two-dimensional detector (for example, an X-ray film, a nuclear plate, an X-ray imaging tube, an X-ray fluorescence intensifier, an X-ray image intensifier, an X-ray imaging plate, an X-ray For example, a flat panel or a cylindrical panel based on a CCD, an X-ray amorphous body, or the like, or a line sensor one-dimensional detector can be used.

  Which X-ray detection apparatus 10 is used may be arbitrarily selected depending on the type and state of the object 2 to be analyzed. In addition, for example, combined scanning using an object movement, rotation, inclination, etc. and a line sensor one-dimensional detector or two-dimensional detector is useful for generating tomographic images and stereoscopic images by the image processing apparatus described below. By introducing X-ray CT (computer tomography) technology, a new non-destructive analysis image can be obtained.

  <Image Processing Apparatus> An image processing apparatus (not shown) is configured as a normal X as either one or both of the dark field image 5 and the bright field image 6 based on the X-ray detection data from the X-ray detection apparatus 10. A line-scattered image can be generated, and a dark-field / bright-field tomographic image or a stereoscopic image may be generated by image synthesis processing or the like.

  <X-ray source> An X-ray source (not shown) for irradiating the object 2 may be arbitrarily selected depending on the object 2 to be analyzed. For example, for industrial materials, wavelength = about 0.5 mm Hereinafter, effective focus = approx. 0.5 mm × 0.5 mm or less, output = approx. 50 W or more capable of generating X-rays, for medical use, wavelength = approx. 0.3 mm or less, effective focus = approx. 0.5 mm One that can generate X-rays of × 0.5 mm or less and an output = about 1000 W (pulse acceptable) or more can be used.

  <Monochromatic collimating means> When the X-ray from the X-ray source reaches the object 2, it needs to be a monochromatic beam and a parallel beam (also referred to as plane wave). This monochromatic parallelization can be achieved, for example, by using a multilayer monochrome mirror as a parabolic mirror. It is also possible to collect a parallel beam by converging with a parabolic reflecting mirror or capillary, and then monochromatic with a monochromator or an asymmetric monochromator. In the example of FIG. 1, incident X-rays 7 from an X-ray source (not shown) are made monochromatic parallel by an asymmetric monochromator 8, and in the example of FIG. 2, the asymmetric monochromator 8 (not shown) is used. The monochromatic parallel X-ray 1 is irradiated to the object 2 by changing the direction by the collimator 9. The collimator 9 itself may be used as a monochromator for monochromatic parallelization. Of course, the monochromatic parallelizing means is not limited to these, and various conventionally known means can be appropriately used.

  When a monochromator or an asymmetric monochromator 8 is used as the monochromatic collimating means, the atomic plane 80 passes through the monochromator or the asymmetric monochromator 8 as shown in FIGS. It is a very important point to be provided so as to be parallel to the atomic planes 40a and 40b of the type crystal analysis body 4a and the reflection type crystal analysis body 4b (in FIG. 2, the atomic plane 90 of the collimator 9 is also parallel). As a result, the angle sensitivity of the diffracted X-rays that satisfy the achromatic condition and the angle spread of the obtained diffraction X-rays becomes as small as possible, so that the angle sensitivity becomes higher and all the phenomena such as refraction in the object 2 are fixed at the angle. It can be captured by the body 4a and the reflective crystal analysis body 4b.

  In FIG. 1, the asymmetric monochromator 8 and the transmission crystal analyte 4a are integrated with each other, in FIG. 2, the collimator 9 and the transmission crystal analyzer 4a are integrated with each other, and in FIG. Although the monochromator 8 and the reflective crystal analyzer 4b are U-shaped integrated with each other, it goes without saying that they may be separated or loosely connected. FIG. 9 shows an example in which the asymmetric monochromator 8 and the reflective crystal analyzer 4b are separated from each other. In any case, the asymmetric monochromator 8 and the collimator 9 are assembled, processed, and adjusted so that the atomic planes 80, 90, 40a, and 40b are parallel to each other. There is a need.

  <Enlarged Image Acquisition Unit> When it is desired to obtain an enlarged image of the X-rays from the transmission-type crystal analysis body 4a and the reflection-type crystal analysis body 4b, for example, as illustrated in FIG. The incident X-ray 7 from the object 2 is made to be monochromatic parallel by the asymmetric monochromator 8, the monochromatic parallel X-ray 1 is irradiated onto the object 2, and the refraction X-ray 3 from the object 2 is further composed of one or more sheets. The dark field image 5 generated by the forward diffracted X-rays 41a and the diffracted diffracted X-rays 42a from the transmissive crystal analyzer 4a by being incident on the transmissive crystal analyzer 4a through the asymmetric monochromators 8a and 8b. It is also possible to obtain the bright field image 6 as an enlarged image and an image with an increased resolution.

  Further, for example, as illustrated in FIG. 11, a forward asymmetric diffracted X-ray 41a and a diffracted diffracted X-ray 42a from the transmission crystal analyzer 4a are further combined into one or a plurality of composite asymmetric monochromators 8c, It is also possible to obtain the dark field image 5 and the bright field image 6 as enlarged images by outputting to the X-ray detection apparatus 10 via 8d.

  10 and 11 show an embodiment in which the transmission type crystal analyte 4a is used, but even in the case where the reflection type crystal analyte 4b is used, similarly, it is composed of one or more composites. By setting the asymmetric monochromators 8a, 8b, 8c, and 8d before and after the reflection type crystal analyzer 4b, an enlarged image and a high resolution image can be obtained.

  Like FIG. 1, FIG. 10 also has asymmetric monochromators 8 and 8b and a transmission crystal analyzer 4a integrated with each other (FIG. 11 is substantially the same as FIG. 1). As long as the surface 80 and the atomic surface 40a are parallel to each other, they may be separated or loosely connected.

  [Fourth Embodiment] By the way, in the first and second embodiments, as a crystal analysis body, a transmission type (transmission type crystal analysis body 4a) and a reflection type (reflection type crystal analysis body 4b) are used. However, in addition to this, a crystal analyte that can be used in common is prepared, and the thickness is adjusted in advance at the time of analysis. By making it usable for the reflection type, it is possible to realize a non-destructive analyzer for both types. That is, if the thickness is adjusted so that both the thickness condition described in the first embodiment and the thickness condition described in the second embodiment are satisfied at the same time, the crystal analyte can be changed to a transmission type or a reflection type. Can also be used.

  Accordingly, for example, FIGS. 2 and 8 can be provided as a dual-type shared analyzer, not exclusively for the transmissive crystal analyzer 4a and the reflective crystal analyte 4b.

  For example, when used in the transmission type, the refraction X-rays 3 etc. are incident obliquely from above as shown in FIG. 2, and when used in the reflection type, the refraction X-rays etc. from directly above as shown in FIG. 8A. 3 is preferably incident (slant incidence is possible with a reflection type), so that the incident X-rays 7 or the monochromatic parallel X-rays 1 are collimated 9 or from the direction as shown in FIGS. The asymmetric monochromator 8 must be configured to irradiate, and the X-ray detection device 10 must also be configured to be set at the position shown in FIGS. 2 and 8A.

  Therefore, if the crystal analyzer set to the above thickness condition is used, the transmission type and the reflection type can be arbitrarily selected simply by changing the incident direction of the refracted X-rays 3 and the like, and non-destructive analysis common to both types is realized. it can.

  The invention of this application has the features as described above. Hereinafter, examples will be described with reference to the accompanying drawings, and the embodiments will be described in more detail.

  [Example 1] FIG. 12 shows an image of an object 2 in which boron fiber having a diameter of 140 μm is embedded in aluminum having a thickness of 1.0 mm according to the embodiment of FIG. As the transmission type crystal analysis body 4a, diamond type crystal silicon 4, 4, 0 reflection is used. When the thickness was adjusted to H satisfying the relationship of the above formulas 1 and 3, as shown in FIG. 12, the dark field image 5 in which the boron fiber was clearly projected by the G wave, that is, the diffraction direction diffraction X-ray 42a, was obtained. Obtained. It goes without saying that a bright-field image 6 is also obtained at the same time.

  [Example 2] FIG. 13 shows an image of an object 2 in which nylon fiber having a diameter of 0.4 mm is embedded in a wax having a thickness of 7.0 mm according to the embodiment of FIG. As the transmission crystal analyzer 4a, a diamond crystal silicon is used. When the thickness was adjusted to H satisfying the relationship of the above formulas 1 and 3, as shown in FIG. 13, the dark field image 5 in which the nylon fiber was clearly projected by the G wave, that is, the diffraction direction diffraction X-ray 42a, was obtained. Obtained. It goes without saying that a bright-field image 6 is also obtained at the same time.

  [Embodiment 3] FIG. 14 shows an image of an object 2 made of a cocoon containing an insect according to the embodiment of FIG. Diamond-type crystal silicon was used as the transmission crystal analysis body 4a, and the monochromatic parallel X-ray 1 had an energy of 35 keV. As is clear from FIG. 14, a dark field image 5 in which insects are clearly displayed was obtained. It goes without saying that a bright-field image 6 is also obtained at the same time.

[Example 4] FIG. 15 shows an image of a dried fish as the object 2 to be analyzed according to the embodiment of FIG. Crystal silicon 4,4,0 reflection was used as the reflective crystal analysis body 4b, and its thickness was set to 1 mm. As is clear from FIG. 15, a dark field image 5 was obtained in which the dried fish was clearly projected by the transmitted X-rays 41 b (I _T ). In addition, it goes without saying that the bright-field image 11 is also obtained by the reflected X-ray 42b (I _B ).

  Of course, the invention of this application is not limited to the above examples, and various modes are possible for details.

  In addition, the invention of this application is carried out based on Equations (1), (2), and (3) by using other electromagnetic waves or particle beams such as neutron rays and electron beams instead of X-rays as the method or apparatus described above. It is easy to do, and an excellent non-destructive analysis with other electromagnetic waves or particle beams is possible as with X-rays. In this case, for example, a transmitted particle beam, a refracted particle beam, a diffracted particle beam, or a small angle scattered particle beam from the object 2 is made incident on the transmissive crystal analyte 4a and the reflective crystal analyte 4b, and instead of the X-ray detection device 10. Using the particle beam detector, the forward-direction diffracted particle beam and the diffraction-direction diffracted particle beam from the transmission-type crystal analyte 4a, or the transmitted particle beam and the reflected particle beam from the reflection-type crystal analyzer 4b are converted into the dark field image 5 and What is necessary is just to make it produce | generate an image with the image processing apparatus which can detect as the bright-field image 6 and can perform image processing using the particle beam detection data.

Examples of electromagnetic waves other than X-rays (10 ⁻³ nm to 10 nm) include gamma rays (10 ⁻² nm or less), ultraviolet rays (1 nm to 400 nm), visible rays (400 nm to 800 nm), and infrared rays (800 nm to 4000 nm). Any of them can be used for the nondestructive analysis according to the invention of this application. The source of these electromagnetic wave names and wavelength ranges is “electromagnetic waves” in the “Revised 4th Edition Physics Dictionary” (Baifukan, published in 1998), but the electromagnetic wave names and wavelength ranges in this source are not unique. Any electromagnetic wave can be applied as long as the nondestructive analysis according to the invention of the application is possible.

  The invention of the above application is non-destructive, high contrast, and non-destructive in structure and function for any object such as food, medicine, medical diagnostic object, semiconductor, organic / inorganic substance, etc. It is also possible to provide a new integrated system such as an inspection / processing system, a medical diagnosis system, and a state / morphological change observation system capable of analyzing at a high resolution (for example, at least several tens of micrometers). . Thereby, in every field | area, it becomes possible to specify an object useful for the said field | area correctly from various objects, and to provide it as products and products, such as a new useful food and a useful chemical | medical agent.

  In particular, in the field of fine technology where remarkable progress in technological innovation is seen, it is possible to achieve a high synergistic effect by implementing the invention of this application. For example, by elucidating the physiological state of the brain, liver, etc. of animals, humans, etc., elucidating the occurrence / growth state of cancer, and further clarifying the causal relationship between the occurrence / growth process of cancer and the state of morphological change and medication, It becomes possible to identify and provide an object that is suitable as a new drug among all objects.

  In addition, in the structural analysis in the polymer field such as protein structural analysis, it is analyzed and elucidated by combining with the structural analysis at the atomic structure level in X-ray diffraction analysis etc., corresponding to what kind of macro form the structure is. New drugs, antibodies, etc. can be designed and provided.

DESCRIPTION OF SYMBOLS 1 Monochromatic parallel X-ray 2 Object 3 Refraction X-ray etc. 4a Transmission type | mold crystal analysis body 40a Atomic surface 41a Forward direction diffraction X-ray 42a Diffraction direction diffraction X-ray 4b Reflection type crystal analysis object 40b Atomic surface 41b Transmission X-ray 42b Reflection X-ray 5 dark field image 6 bright field image 7 incident X-ray 8 asymmetric monochromator 8a, 8b, 8c, 8d asymmetric monochromator 80 atomic plane 9 collimator 90 atomic plane 10 X-ray detector 11 slit

Claims (6)

Non-destructive image obtained by irradiating an object with a monochromatic parallel electromagnetic wave or particle beam, causing the electromagnetic wave or particle beam from the object to enter the transmission crystal analyte, and obtaining the image in the object by the electromagnetic wave or particle beam emitted from the transmission crystal analyte An analysis method,
When the thickness of the transmission type crystal analyte is not incident on the monochromatic parallel electromagnetic wave or particle beam irradiation path and the monochromatic parallel electromagnetic wave or particle beam is incident on the transmission type crystal analyte, The monochromatic parallel electromagnetic wave or particle beam is set to a thickness such that the intensity of one of the forward diffracted X-rays and the diffracted diffracted X-rays obtained by the kinetic diffraction action of the transmission type crystal analyte is substantially zero. When an object is placed in the irradiation path, the electromagnetic wave or particle beam from the object is incident on this transmission crystal analyte, and either the forward diffracted electromagnetic wave or particle beam and the diffracted electromagnetic wave or particle beam And detecting an image in the object as a dark field image. An object is irradiated with a monochromatic parallel electromagnetic wave or particle beam, the electromagnetic wave or particle beam from the object is incident on a transmission crystal analyte, and an image in the object is obtained by the electromagnetic wave or particle beam X-ray emitted from the transmission crystal analyte. A non-destructive analyzer,
When the thickness of the transmission type crystal analyte is not incident on the monochromatic parallel electromagnetic wave or particle beam irradiation path and the monochromatic parallel electromagnetic wave or particle beam is incident on the transmission type crystal analyte, The monochromatic parallel electromagnetic wave or particle beam is set to a thickness such that the intensity of one of the forward diffracted X-rays and the diffracted diffracted X-rays obtained by the kinetic diffraction action of the transmission type crystal analyte is substantially zero. When an object is placed in the irradiation path, the electromagnetic wave or particle beam from the object is incident on this transmission crystal analyte, and either the forward diffracted electromagnetic wave or particle beam and the diffracted electromagnetic wave or particle beam And a non-destructive analyzer for obtaining an image in the object as a dark field image. Non-destructive image obtained by irradiating an object with a monochromatic parallel electromagnetic wave or particle beam, causing the electromagnetic wave or particle beam from the object to enter the transmission crystal analyte, and obtaining the image in the object by the electromagnetic wave or particle beam emitted from the transmission crystal analyte An analysis method,
When the transmission-type crystal analyte is incident on the transmission-type crystal analyte in the state where there is no object in the irradiation path of the monochrome-parallel electromagnetic wave or the particle beam, the transmission-type crystal analysis The intensity of any one of the forward diffracted electromagnetic wave or particle beam and the diffracted diffracted electromagnetic wave or particle beam emitted from the body periodically becomes substantially zero in one direction according to the emission position from the transmission crystal analyzer. When the object is placed in the irradiation path of the monochromatic parallel electromagnetic wave or particle beam and the electromagnetic wave or particle beam from the object is incident on the transmission type crystal analyte, it is orthogonal to the one direction. A slit-shaped forward diffracted electromagnetic wave obtained through the slit while moving a slit plate in which a long and narrow slit is formed in the direction to be moved in the one direction on the emission surface side of the transmission crystal analyte Nondestructive analysis method others, characterized in that obtaining an image of said object as a dark field image by combining with either the sequential detection of the particle beam and the direction of diffraction diffracted electromagnetic wave or particle beam. Non-destructive image obtained by irradiating an object with a monochromatic parallel electromagnetic wave or particle beam, causing the electromagnetic wave or particle beam from the object to enter the transmission crystal analyte, and obtaining the image in the object by the electromagnetic wave or particle beam emitted from the transmission crystal analyte An analyzer,
When the transmission-type crystal analyte is incident on the transmission-type crystal analyte in the state where there is no object in the irradiation path of the monochrome-parallel electromagnetic wave or the particle beam, the transmission-type crystal analysis The intensity of any one of the forward diffracted electromagnetic wave or particle beam and the diffracted diffracted electromagnetic wave or particle beam emitted from the body periodically becomes substantially zero in one direction according to the emission position from the transmission crystal analyzer. When the object is placed in the irradiation path of the monochromatic parallel electromagnetic wave or particle beam and the electromagnetic wave or particle beam from the object is incident on the transmission type crystal analyte, it is orthogonal to the one direction. A slit-shaped forward diffracted electromagnetic wave obtained through the slit while moving a slit plate in which a long and narrow slit is formed in the direction to be moved in the one direction on the emission surface side of the transmission crystal analyte Other non-destructive analysis apparatus characterized by obtaining an image of said object as a dark field image by sequentially detect and combining one of the particle beam and the direction of diffraction diffracted electromagnetic wave or particle beam. An object is irradiated with a monochromatic parallel electromagnetic wave or particle beam, the electromagnetic wave or particle beam from the object is incident on the reflective crystal analyte, and an image in the object is obtained by the electromagnetic wave or particle beam X-ray emitted from the reflective crystal analyte. A non-destructive analysis method,
A nondestructive analysis method characterized in that an image in the object is obtained as a dark field image on the basis of transmitted electromagnetic waves or particle beams transmitted from the reflective crystal analyte by dynamic diffraction action of the reflective crystal analyte. An object is irradiated with a monochromatic parallel electromagnetic wave or particle beam, the electromagnetic wave or particle beam from the object is incident on the reflective crystal analyte, and an image in the object is obtained by the electromagnetic wave or particle beam X-ray emitted from the reflective crystal analyte. A non-destructive analyzer,
A non-destructive analyzer characterized in that an image in the object is obtained as a dark field image based on a transmitted electromagnetic wave or particle beam transmitted from the reflective crystal analyte by a dynamic diffraction action of the reflective crystal analyte.

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