JP2009288206A - Line type light source device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a line type light source device having high versatility of components, capable of exchanging easily a light source during a maintenance period. <P>SOLUTION: A light source unit 7, formed by boding a light source substrate 11 on which a plurality of LED light sources 13 are mounted linearly to a radiation member 12, is fixed to a body housing 5, and a wiring line 19, extending from a driving control part 6 is connected to the light source substrate 11 via a compression connector 16. When exchanging an LED light source 13, the whole light source unit 7 is exchanged. In this case, since the light source substrate 11 is connected to the wiring line 19 via the compression connector 16, the connector can be inserted/extracted automatically with superior work efficiency. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a line type light source device in which a light source substrate is held on a heat sink and the heat sink is fixed to a main body housing.

  In surface inspection performed in the process of manufacturing a substrate such as a semiconductor wafer or a liquid crystal wafer, illumination light is irradiated onto the substrate, which is an object to be irradiated, and the reflected light or transmitted light is imaged by an imaging device such as a CCD camera. Then, the image processing is performed to detect adhesion, loss, pattern defect, and the like of foreign matters.

  As a light source device for irradiating illumination light on the surface of an object to be irradiated such as the above substrate, a line in which light emitting diodes (LEDs) are arranged in a line and linear illumination light is irradiated through a diffusion plate, a condenser lens, etc. A type light source device is known.

  For example, in Patent Document 1 below, a light emitting source in which a large number of light emitting diode elements are arranged one-dimensionally, and a semi-cylindrical lens on the front surface of the light emitting source, the curvature of the lens is an intermediate point between the arranged light emitting diode elements. A line-shaped illuminating device is disclosed, which is provided with a curvature that allows light from a light-emitting diode element to be condensed.

Further, in Patent Document 2 below, a plurality of light emitting diodes arranged with their optical axes arranged substantially in a straight line, and irradiation light emitted from each of the light emitting diodes are collected and converted into elongated parallel light beams. A concave cylindrical lens for converting the light from the convex cylindrical lens into a substantially parallel light by being disposed at a position before the position where the light passing through the convex cylindrical lens is focused An inspection illuminating device comprising a cylindrical lens and a light shielding means for blocking light incident on the outer peripheral surface of the convex cylindrical lens or light emitted from the outer peripheral surface of the convex cylindrical lens is disclosed. Yes.
Japanese Utility Model Publication No. 6-44157 WO2001 / 098760

  By the way, since a light source such as an LED light source has a service life, it is necessary to replace the light source regularly or every set usage time. In the line-type light source device disclosed in each of the above-mentioned documents, each LED light source is fixed on a substrate inside the device. Therefore, when replacing this LED light source, the device is disassembled and the substrate is taken out, It was necessary to replace the light sources one by one or each substrate.

  However, such replacement work requires labor and time, so that the work efficiency is low, and when replacing during manufacturing, the time for stopping the production line becomes long and the productivity is lowered. was there.

  In addition, the work of attaching / detaching the LED light source to / from the board and the work of replacing each board must be performed by a person with a certain degree of technical knowledge and experience, so that any user can easily replace the work. It wasn't.

  Furthermore, when replacing each board, it is necessary to prepare a board suitable for each line type light source device according to the length of the line type light source device, and there is a problem that the versatility of the components is poor.

  Accordingly, an object of the present invention is to provide a line-type light source device in which light sources can be easily replaced during maintenance and the versatility of parts is high.

  In order to achieve the above object, a first aspect of the present invention is a light source unit in which a plurality of light sources are mounted in a line, and a light source unit formed by joining a heat radiating member that radiates heat from the light source substrate, A main body housing in which a plurality of light source units are arranged and mounted; and a drive control unit that outputs a drive signal to a light source substrate of each of the light source units. The main body housing receives illumination light emitted from the light source. A cylindrical lens that leads to an illuminating body, a diffusing member that diffuses illumination light emitted from the light source and / or illumination light emitted through the cylindrical lens, and a wiring line connected to a light source substrate of each light source unit; And the drive control unit is connected to the light source substrate of each of the light source units via the wiring line. It is to provide.

  In such a configuration, when the light source unit needs to be replaced due to the life of the light source or the like, the light source unit can be removed from the main body housing and replaced for each light source unit, so that maintenance is easy and workability is good. For example, if the light source substrate and the heat dissipation member are not in close contact with grease containing metal powder or the like, the heat dissipation effect will be reduced, but a light source unit in which the light source substrate and the heat dissipation member are integrated in advance is produced at the factory. In this case, the user only needs to replace each light source unit, so the replacement work can be performed without any special knowledge or skill. Further, by sharing the light source unit, even the line type light source devices having different lengths can be dealt with only by changing the length of the main body housing and the number of the light source units arranged. Furthermore, by arranging the light source unit on one surface of the main body housing, the wall of the one surface of the main body housing can be constituted by the light source unit, and the structure of the main body housing can be simplified.

  According to a second aspect of the present invention, in the first aspect, a positioning pin projects from one of the opposing surfaces of the light source unit and the main body housing, and a positioning hole is formed on the other to fit the positioning pin. It is providing the line type light source device characterized by these.

  In such a configuration, when the light source unit is mounted on the main body housing, the positioning pin protruding from one of the light source unit and the main body housing is simply fitted into the positioning hole formed in the other. Therefore, the positioning can be easily performed, and the light source unit can be easily replaced.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the light source substrate of the light source unit is disposed toward a joint surface side with the main body housing, and the wiring line of the main body housing includes the light source unit. Each having a connection board at a position corresponding to the mounting portion, and when the light source unit is mounted on the main body housing between the light source board and the connection board, the corresponding contacts are elastically connected to each other. An object of the present invention is to provide a line-type light source device that is equipped with a compression connector that abuts.

  In such a configuration, when the light source unit is mounted on the main body housing, the light source board of the light source unit and the connection board provided on the wiring line of the main body housing are conducted through the compression connector, so that the connector connection work is performed. This simplifies the operation of mounting the light source unit.

  According to a fourth aspect of the present invention, there is provided the line type light source device according to any one of the first to third aspects, wherein the drive control unit can individually output a drive signal to the light source substrate of each of the light source units. It is to provide.

  In such a configuration, any one of the plurality of light source units can selectively emit light, and the brightness of the plurality of light source units can be individually changed. Can be changed.

  According to the present invention, a light source board on which a plurality of light sources are mounted in a line is joined to a heat radiating member to form a light source unit, and when this light source unit is attached to a main body housing, wiring provided in the main body housing Since the drive control unit and the light source substrate are electrically connected via the line, it is not necessary to replace the light source itself at the time of maintenance, and it is easy to replace the light source. . Further, since the light source is mounted on the light source substrate in advance, it is not necessary to finely adjust the irradiation direction of the illumination light after replacement, and the workability is good.

  In addition, by arranging a plurality of light source units in the main body housing, the main body housing can be adapted to different lengths of the main body housing. Therefore, it is not necessary to replace the main body housing when replacing the light source. Can be dealt with only by changing the number of light source units arranged accordingly, so that parts management becomes easy and high versatility can be obtained.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a system configuration diagram of a substrate inspection apparatus including a line type light source device, and FIG. 2 is an exploded perspective view of the line type light source device. In the present embodiment, a mode in which the line type light source device is incorporated in the substrate inspection device is shown.

  The substrate inspection apparatus 1 is disposed in an inspection line and has defects such as defects or pattern defects formed on the surface of a large substrate 2 such as a semiconductor wafer or a liquid crystal wafer as an example of an object to be illuminated, and product defects such as adhesion of foreign matter. Inspect.

  The large substrate 2 is movable in the Y direction of FIG. 2 by a transfer device (not shown). A line-type light source device 3 is disposed on a line through which the large substrate 2 of the inspection line passes. As shown in FIGS. 1 and 2, the line type light source device 3 is arranged in a direction (X direction) orthogonal to the transfer direction (Y direction) of the transport device. The length of the light source device 3 is formed longer than the width of the large substrate 2 and is set so that the entire width direction of the large substrate 2 passing therethrough can be irradiated.

  A line-type light receiving unit 4 that receives light emitted from the line-type light source device 3 and transmitted through the large-sized substrate 2 is disposed in the opposite direction across the large-sized substrate 2 of the line-type light source device 3. The line-type light receiving unit 4 includes a plurality of photodiodes, a CCD line sensor, and the like arranged in a line.

  The line-type light source device 3 includes a main body housing 5, a drive control unit 6 fixed to one end of the main body housing 5, and a plurality of line-type light source devices 3 mounted on the upper surface of the main body housing 5 (in the figure, 3) light source units 7.

  As shown in FIG. 2, the main body housing 5 has a pair of opposed side plates 5b, 5b, and both ends of both side plates 5b, 5b are connected and fixed by fixing plates 5c, 5c to form a rectangular parallelepiped shape. . In FIG. 2, one fixing plate 5c is indicated by a one-dot chain line for convenience.

  Further, as shown in FIG. 5, a rod-shaped cylindrical lens 8 that guides illumination light from an LED light source 13 to be described later to the large substrate 2 side is inserted in the lower part of the main body housing 5. Further, a rectangular diffusion plate 9 is fixed above the cylindrical lens 8 as a diffusion member that covers the cylindrical lens 8 and diffuses the illumination light from the LED light source 13 in the X direction. The diffusion plate 9 may be disposed on the emission side of the cylindrical lens 8.

  Each light source unit 7 has a heat radiating member 12 made of aluminum or the like, and is fastened and fixed in a row using a bolt 10 to a joint surface 5 a formed on the upper portion of the main body housing 5. In the present embodiment, since the joining surface 5a formed on the upper surfaces of the side plates 5b, 5b facing each other of the main body housing 5 is connected and fixed by the heat radiating member 12, this heat radiating member 12 is used as the ceiling wall of the main body housing 5. The structure is formed by functioning. Therefore, the structure of the main body housing 5 is relatively simplified and the weight can be reduced.

  As shown in FIGS. 3 and 4, heat radiation fins 12 a that mainly radiate heat from the LED light source 13 (described later) are formed on the heat radiation member 12, and a substrate mounting recess 12 b is formed on the bottom surface. Has been. In addition, the light source substrate 11 is tightly bonded to the substrate mounting recess 12b in a state where the light source substrate 11 is positioned in a predetermined position via thermal conductive grease (not shown) containing thermal conductive particles such as metal powder.

  As shown in FIG. 4, a plurality of LED light sources 13 as light sources are mounted on the light source substrate 11 in a line shape along the longitudinal direction. Furthermore, it extends along the longitudinal direction (X direction) with the circular reference positioning hole 14a at the bottom surface of the heat radiating member 12 and the portion that contacts the joint surface 5a of the side plates 5b, 5b of the main body housing 5. A long hole-like adjustment positioning hole 14b is formed. On the other hand, as shown in FIGS. 5 and 6, positioning pins 15 that fit into the positioning holes 14a and 14b are projected from the joint surfaces 5a of the side plates 5b and 5b facing the positioning holes 14a and 14b. Yes.

  Further, as shown in FIG. 4, a compression connector 16 is mounted on one side of the Y direction, which is a substantially central portion of each light source substrate 11 in the X direction. On the other hand, a connection board 17 is fixed to the inner wall of the side plate 5b via a bracket 18 at a position on the joint surface 5a side of the main body housing 5 facing the compression connector 16. In addition, since this connection board | substrate 17 is arrange | positioned corresponding to the light source unit 7, it is provided in three places in this embodiment. Each connection board 17 is electrically connected to the drive control unit 6 fixed to one end of the main body housing 5 in the X direction via the wiring line 19.

  As shown in FIG. 7, the connector main body 16a of the compression connector 16 is fixed to the light source substrate 11, and a contact 16b having springiness is fixed to the connector main body 16a. One end of the contact 16 b is electrically connected to the contact terminal 11 a of the light source substrate 11. When the light source unit 7 is joined to the joint surface 5 a of the main body housing 5, the contact 16 b of the compression connector 16 is brought into elastic contact with the contact terminal 17 a formed on the connection substrate 17 and is conducted. Thus, in this embodiment, since the wiring line 19 and the light source board 11 arranged in the main body housing 5 are connected via the compression connector 16 mounted on the light source board 11, the LED light source No extra wiring is routed around 13 and therefore the illumination light from the LED light source 13 is not blocked by the wiring.

  The drive control unit 6 individually outputs a drive signal to each light source unit 7 based on a control signal from a control unit 21 configured with a microcomputer. The drive controller 6 is connected to a power source (not shown) that supplies the light source board 11.

  In addition, a control switch 22 is connected to the control unit 21, and an operator operates the control switch 22, for example, to individually adjust the brightness of the LED light source 13 provided in each light source unit 7, Can be turned on / off individually. Therefore, when the X-direction width of the large substrate 2 to be inspected is short, the LED light source 13 that does not need to emit light can be turned off in advance. Alternatively, for example, it is desired to brighten both ends about 10% with respect to the central portion of the width of the large substrate 2 in the X direction. Alternatively, when it is desired to darken, it can be easily set by operating the control switch 22.

  The length of the main body housing 5 is set to at least a size corresponding to the width in the X direction of the large substrate 2 that is the object to be illuminated, but the length of the light source unit 7 is determined in advance. Set to size. Therefore, the length of the main body housing 5 is set to a size obtained by adding the protruding portions at both ends to an integral multiple of the length of the light source unit 7. Since the light source unit 7 is made common, not only product management becomes easy, but also high versatility can be obtained by making parts common.

  Next, the operation of the present embodiment having such a configuration will be described. As shown in FIGS. 1 and 2, the line-type light source device 3 is disposed on the inspection line. Further, the brightness of the LED light source 13 of each light source unit 7 fixed to the line type light source device 3 can be adjusted by operating the control switch 22. In addition, this brightness adjustment can not only set all the LED light sources 13 uniformly, but also can adjust each LED light source 13 individually.

  The illumination light emitted from each LED light source 13 is uniformly diffused by the diffusing plate 8 and then incident on the cylindrical lens 8. The linear illumination light is incident on the condensing position set in advance by the cylindrical lens 8. Irradiated.

  A large substrate 2 is transferred to the inspection line in the Y direction of FIG. 2 by a transfer device (not shown). The illumination light emitted from the cylindrical lens 8 described above is set to be condensed on the large substrate 2, and the large substrate 2 passes below the line type light source device 3 as shown in FIG. 5. In this case, the illumination light transmitted through the large substrate 2 is received by the line-type light receiving unit 4 to inspect product defects such as defects on the surface of the large substrate 2, pattern defects, and adhesion of foreign matters. In this case, the line type light source device 3 is inclined at a predetermined angle with respect to the moving direction of the large substrate 2, the illumination light is irradiated obliquely to the large substrate 2, and the line type light receiving unit 4 is arranged in the reflection direction. You may make it install. Then, the surface of the large substrate 2 is inspected by receiving the reflected light from the large substrate 2 with the line-type light receiving unit 4.

  The main body housing 5 is set in accordance with the width (X direction) of the large-sized substrate 2. However, since the plurality of light source units 7 fixed to the joint surface 5 a of the main body housing 5 are made common, component management is performed. Is easy, and high versatility can be obtained by sharing parts. Further, heat generated from the light source substrate 11 fixed to the substrate mounting recess 12b formed on the bottom surface of the heat radiating member 12 is transmitted to the heat radiating member 12 through the heat conductive grease, and is formed in the heat radiating member 12. Heat is radiated from the radiating fins 12a.

  By the way, the LED light source 13 has a service life and needs to be replaced regularly or every set use time. When replacing the LED light source 13, the heat radiating member 12 is removed from the main body housing 5. Since the heat dissipating member 12 is only fastened to the main body housing 5 by the bolt 10, the heat dissipating member 12 can be easily removed by loosening the bolt 10.

  Further, since the light source substrate 11 on which the LED light source 13 is mounted is fixed to the substrate mounting recess 12b formed on the bottom surface of the heat radiating member 12, it is possible to remove the light source by simply removing the heat radiating member 12 from the main body housing 5. The board | substrate 11 can be removed integrally. Further, since the light source board 9 is electrically connected to the connection board 17 fixed to the main body housing 5 via the compression connector 16, the connector connection is made when the heat radiating member 12 is removed from the main body housing 5. Automatically comes off. Therefore, work for inserting / removing the connector is not required, and workability is improved.

  Thereafter, the light source unit 7 on which the new LED light source is mounted is attached to the joint surface 5 a of the main body housing 5. At this time, the reference positioning holes 14a and 14a and the adjustment positioning holes 14b and 14b respectively formed in the bottom surface of the heat radiating member 12 are fitted to the positioning pins 15 protruding from the joint surface 5a. Then, the heat radiating member 12 is temporarily fixed to the joint surface 5a of the main body housing 5 in a predetermined position. As a result, as shown in FIG. 7A, the contact 16 b of the compression connector 16 mounted on the light source substrate 11 is predetermined with respect to the contact terminal 17 a of the connection substrate 17 fixed to the main body housing 5. Connected in a positioned state.

  After that, when the heat dissipating member 12 is fastened and fixed to the joint surface 5a of the main body housing 5 with bolts 10 and finally tightened, the contact 16b having the spring property becomes the contact terminal of the connection substrate 17 as shown in FIG. It is pressed by 17a to conduct.

  As described above, in this embodiment, when the LED light source 13 is replaced, the entire light source unit 7 in which the light source substrate 11 and the heat radiating member 12 are integrated is replaced. Therefore, the LDE light source 13 is replaced one by one. Compared to the case, the replacement work can be performed efficiently. In addition, since the entire light source unit 7 is replaced, the light source unit 7 in which the light source substrate 11 and the heat radiating member 12 are integrated in advance can be manufactured in the factory, and the user can perform replacement work without special knowledge or technology. It can be performed. Furthermore, by making the light source unit 7 factory production, there is no poor application of the heat conductive grease interposed between the light source substrate 11 and the heat radiating member 12, and the poor adhesion of the light source substrate 11 to the heat radiating member 12, which is high. Reliability can be obtained.

  Further, the light source substrate 11 is bonded to the heat radiating member 12 in a predetermined position, and the heat radiating member 12 is positioned by fitting the positioning holes 14a and 14b to the positioning pins 15, It is not necessary to finely adjust the irradiation direction of the illumination light from the LED light source 13, and the replacement work can be performed more smoothly.

  When the heat radiating member 12 is attached to the main body housing 5, the contact 16 b of the compression connector 16 mounted on the light source board 11 is connected to the contact terminal 17 a formed on the connection board 17 fixed to the main body housing 5. Since the electrical connection is established, the connector connection operation is simplified, and the mounting operation of the heat dissipation member 12 can be performed more smoothly.

  The present invention is not limited to the above-described embodiment. For example, the cylindrical lens 8 is not limited to a rod-shaped lens, and may be a cylindrical plano-convex lens.

It is a system block diagram of a board | substrate inspection apparatus provided with a line type light source device. It is a disassembled perspective view of a line type light source device. It is a perspective view of a light source unit. It is a rear perspective view of a light source unit. It is a sectional side view of a line type light source device. It is VI-VI sectional drawing of FIG. (A) is sectional drawing which shows the connection state of the compression connector in a temporarily fixed state, (b) is sectional drawing which shows the connection state of the compression connector in a final fastening state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1: Board | substrate inspection apparatus 2: Large-sized board | substrate 3: Line type light source device 5: Main body housing 5a: Joining surface 5b: Side plate 5c: Fixed plate 6: Drive control part 7: Light source unit 8: Cylindrical lens 9: Diffusing plate 11: Light source Board 12: Heat radiation member 13: LED light source 14a: Reference positioning hole 14b: Adjustment positioning hole 15: Positioning pin 16: Compression connector 17: Connection board 19: Wiring line

Claims (4)

A light source board in which a plurality of light sources are mounted in a line, and a light source unit formed by joining a heat radiating member that radiates heat from the light source board;
A main body housing in which a plurality of the light source units are arranged and mounted;
A drive control unit that outputs a drive signal to the light source substrate of each light source unit;
The main body housing includes a cylindrical lens that guides illumination light emitted from the light source to a body to be illuminated, and a diffusion member that diffuses illumination light emitted from the light source and / or illumination light emitted via the cylindrical lens. And a wiring line connected to the light source substrate of each light source unit,
The line type light source device, wherein the drive control unit is connected to a light source substrate of each light source unit via the wiring line.   2. The line type light source according to claim 1, wherein a positioning pin projects from one of opposing surfaces of the light source unit and the main body housing, and a positioning hole is formed on the other to fit the positioning pin. apparatus.   The light source board of the light source unit is arranged toward the joint surface side with the main body housing, and the wiring lines of the main body housing have connection boards at positions corresponding to the mounting portions of the light source unit, respectively. A compression connector is mounted between the light source board and the connection board so that when the light source unit is mounted on the main body housing, a corresponding contact is elastically contacted between corresponding contacts. Item 3. A line type light source device according to item 1 or 2.   The line type light source device according to claim 1, wherein the drive control unit can individually output a drive signal to a light source substrate of each light source unit.

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