JP2009266887A5 - - Google Patents

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Publication number
JP2009266887A5
JP2009266887A5 JP2008111444A JP2008111444A JP2009266887A5 JP 2009266887 A5 JP2009266887 A5 JP 2009266887A5 JP 2008111444 A JP2008111444 A JP 2008111444A JP 2008111444 A JP2008111444 A JP 2008111444A JP 2009266887 A5 JP2009266887 A5 JP 2009266887A5
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JP
Japan
Prior art keywords
window
flange
flange portion
receives
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008111444A
Other languages
English (en)
Japanese (ja)
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JP5110649B2 (ja
JP2009266887A (ja
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Priority to JP2008111444A priority Critical patent/JP5110649B2/ja
Priority claimed from JP2008111444A external-priority patent/JP5110649B2/ja
Publication of JP2009266887A publication Critical patent/JP2009266887A/ja
Publication of JP2009266887A5 publication Critical patent/JP2009266887A5/ja
Application granted granted Critical
Publication of JP5110649B2 publication Critical patent/JP5110649B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008111444A 2008-04-22 2008-04-22 半導体製造装置 Active JP5110649B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008111444A JP5110649B2 (ja) 2008-04-22 2008-04-22 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008111444A JP5110649B2 (ja) 2008-04-22 2008-04-22 半導体製造装置

Publications (3)

Publication Number Publication Date
JP2009266887A JP2009266887A (ja) 2009-11-12
JP2009266887A5 true JP2009266887A5 (cg-RX-API-DMAC7.html) 2011-05-12
JP5110649B2 JP5110649B2 (ja) 2012-12-26

Family

ID=41392394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008111444A Active JP5110649B2 (ja) 2008-04-22 2008-04-22 半導体製造装置

Country Status (1)

Country Link
JP (1) JP5110649B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013229494A (ja) * 2012-04-26 2013-11-07 Sharp Corp 半導体成長装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219912A (ja) * 1986-03-20 1987-09-28 Toshiba Mach Co Ltd プラズマｃｖｄ装置
JP2884556B2 (ja) * 1994-06-10 1999-04-19 信越石英株式会社 枚葉式ウェーハ熱処理装置
US6406543B1 (en) * 1998-07-23 2002-06-18 Applied Materials, Inc. Infra-red transparent thermal reactor cover member
JP2003124206A (ja) * 2001-10-18 2003-04-25 Tokyo Electron Ltd 熱処理装置

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