JP2009258102A - X-ray intensity adjusting body, x-ray foreign matter inspection method using it, and x-ray foreign matter inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily use an X-ray intensity adjusting body at the time of nondestructive inspection. <P>SOLUTION: The X-ray intensity adjusting body 1 is provided with a circular opening part 1a on the upper surface and a circular hole part 1b on the bottom face. In the internals of the X-ray intensity adjusting body 1, a tapered part 1c forming a conical surface is formed connecting from the opening part 1a to the hole part 1b. By using the X-ray intensity adjusting body 1 at the time of taking X-ray image of an inspection object 11 of spherical shape together with the X-ray intensity adjusting body 1, the intensity of the X-ray image transmitted through the inspection object 11 and the X-ray intensity adjusting body 1 is made approximately uniform over the whole of the inspection object 11, and a precise nondestructive inspection is thereby performed. If the inspection object 11 is mounted in the tapered part 1c through the opening part 1a with the X-ray intensity adjusting body 1 arranged between an X-ray area camera 3 and an X-ray source 2, the inspection object 11 is easily inspected. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an X-ray intensity adjusting body used when non-destructive inspection is performed for the presence or absence of foreign matter or voids on the surface or inside of an inspection object by irradiating the inspection object with X-rays, and X using the same The present invention relates to a line foreign object inspection method and an X-ray foreign object inspection apparatus.

  In an X-ray foreign substance inspection apparatus that performs non-destructive inspection by capturing an X-ray image of an inspection object, for example, a cylindrical shape or a spherical shape, X-rays may be emitted at the center and the periphery depending on the shape of the inspection object. The transmission distance may be non-uniform, which may make the image of the inspection object ambiguous and make it impossible to discriminate foreign matter or the like. Therefore, for example, it is known to attach an adjustment body along the outer shape of the object to be inspected so that the inspection can be reliably performed in the vicinity of the end boundary of the object to be inspected (for example, Patent Document 1). However, in the apparatus described in Patent Document 1, the adjustment bodies are separately provided on both sides of the inspection object, and each time an inspection object is inspected, the inspection object is set on the X-ray sensor, Thereafter, it is necessary to perform an operation of positioning and arranging the adjusting body with respect to the inspection object. Therefore, when many inspection objects are inspected from one to the next, or when inspection objects are inspected while being conveyed by a conveyor or the like, the configuration described in Patent Document 1 can be applied. Can not.

JP 2004-354215 A

  The present invention has been made in view of the above problems, and is an object to be inspected that can be easily used during non-destructive inspection, and in which the X-ray transmission distance is nonuniform in the central portion and the peripheral portion. An object of the present invention is to provide an X-ray intensity adjusting body capable of accurately inspecting, an X-ray foreign substance inspection method using the X-ray foreign substance inspection method, and an X-ray foreign substance inspection apparatus.

  In order to achieve the above object, an invention according to claim 1 is directed to an X-ray image captured by an X-ray area camera by causing X-rays irradiated from an X-ray source and transmitted through an inspection object to enter the X-ray area camera. Based on the X-ray foreign matter inspection for determining the presence or absence of foreign matters or defects in or on the surface of the inspection object, and the intensity of the X-ray passing through the inspection object and reaching the X-ray area camera is substantially equal. An X-ray intensity adjusting body formed in such a shape that surrounds an opening provided in the upper part and cuts in a plane substantially perpendicular to the X-ray transmission direction from the upper part to the lower part. It has a taper part formed so that an area may increase.

  According to a second aspect of the present invention, there is provided an X-ray intensity adjusting body for making the intensity of X-rays incident on the X-ray area camera substantially uniform between the object to be inspected and the X-ray area camera. The X-rays irradiated from the X-ray area camera are incident on the X-ray area camera, and an X-ray image is taken by the X-ray area camera. Based on the taken X-ray image, the inside of the inspection object is taken. Or an X-ray foreign matter inspection method for determining the presence or absence of foreign matters or defects on the surface, wherein the X-ray intensity adjuster surrounds an opening provided in an upper portion and emits X-rays downward from the upper portion. A taper portion formed so that a cross-sectional area in a plane substantially perpendicular to the transmission direction is increased, and the X-ray intensity adjusting body is disposed between the X-ray area camera and the X-ray source; An object to be inspected is placed on the tapered portion through the opening, and X It is intended to capture an image.

  According to a third aspect of the present invention, there is provided a holding table for holding an inspection object, an X-ray source for irradiating the inspection object with X-rays, and X-rays irradiated from the X-ray source and transmitted through the inspection object. An X-ray area camera that captures an X-ray image, and an abnormality / defect determination unit that determines the presence or absence of an abnormality or defect in or on the surface of the inspection object based on the X-ray image captured by the X-ray area camera. The X-ray inspection apparatus provided further comprises an X-ray intensity adjusting body formed in a shape such that the intensity of the X-ray that passes through the inspection object and reaches the X-ray camera is substantially uniform. The line strength adjusting body has a tapered portion formed so as to surround an opening provided in the upper portion and to increase a cross-sectional area in a plane substantially perpendicular to the X-ray transmission direction from the upper portion to the lower portion. Is.

  According to a fourth aspect of the present invention, based on an X-ray image picked up by an X-ray area camera, which is irradiated from an X-ray source and transmitted through the inspection object, the inspection object is used. Is used for X-ray foreign matter inspection to determine the presence or absence of foreign matter or defects inside or on the surface, and is formed so that the intensity of X-rays passing through the inspection object and reaching the X-ray area camera is substantially uniform. In addition, the X-ray intensity adjusting body is formed in a plate shape so that the X-ray transmittance varies depending on the shape of the inspection object.

  According to a fifth aspect of the present invention, an X-ray intensity adjusting body for making the intensity of X-rays incident on the X-ray area camera substantially uniform between the object to be inspected and the X-ray area camera is provided. The X-rays irradiated from the X-ray area camera are incident on the X-ray area camera, and an X-ray image is taken by the X-ray area camera. Based on the taken X-ray image, the inside of the inspection object is taken. Or an X-ray foreign matter inspection method for determining the presence or absence of foreign matter or defects on the surface, wherein the X-ray intensity adjusting body is arranged so that the X-ray transmittance varies from site to site in accordance with the shape of the inspection object. The X-ray intensity adjusting body is disposed between the X-ray area camera and the X-ray source, and then an inspection object is placed on the upper surface of the X-ray intensity adjusting body, An X-ray image is captured.

  According to a sixth aspect of the present invention, there is provided a holding table for holding an inspection object, an X-ray source for irradiating the inspection object with X-rays, and X-rays irradiated from the X-ray source and transmitted through the inspection object. An X-ray area camera that captures an X-ray image, and an abnormality / defect determination unit that determines the presence or absence of an abnormality or defect in or on the surface of the inspection object based on the X-ray image captured by the X-ray area camera. The X-ray inspection apparatus provided further comprises an X-ray intensity adjusting body formed in a shape such that the intensity of the X-ray that passes through the inspection object and reaches the X-ray camera is substantially uniform. The line intensity adjusting body is formed in a plate shape so that the X-ray transmittance differs for each part according to the shape of the inspection object.

  According to the present invention, since the inspection object can be inspected by placing the inspection object on the taper portion from the opening at the top of the X-ray intensity adjusting body, the inspection object has high accuracy. Can be easily inspected. For example, since the X-ray intensity adjusting body can be placed on a conveyor or the like, even when a large number of objects are inspected sequentially while being conveyed by the conveyor or the like, the objects to be inspected can be easily inspected. Can be possible.

  Further, according to another aspect of the present invention, the inspection object can be inspected by placing the inspection object on the upper surface of the plate-like X-ray intensity adjusting body. The inspection object can be easily inspected. For example, since the X-ray intensity adjusting body can be placed on a conveyor or the like, even when a large number of objects are inspected sequentially while being conveyed by the conveyor or the like, the objects to be inspected can be easily inspected. Can be possible.

The perspective view which shows the X-ray intensity adjustment body which concerns on 1st Embodiment of this invention. The figure which shows the state which images the X-ray image of a to-be-inspected object in an X-ray foreign material inspection apparatus using the said X-ray intensity adjustment body. The sectional side view which shows the imaging part of the X-ray foreign material inspection apparatus in the said state. The figure which shows an example of the X-ray image imaged using the said X-ray intensity adjustment body. The figure which shows the state which image-captures an X-ray image, conveying a to-be-inspected object on a conveyor in an X-ray foreign material inspection apparatus using the said X-ray intensity adjustment body. (A) is a perspective view which shows the modified example of the said X-ray intensity adjustment body, (b) is a perspective view which shows the state which mounted the to-be-inspected object on the X-ray intensity adjustment body. The perspective view which shows another modification of the said X-ray intensity adjustment body. The sectional side view which shows the imaging part of the X-ray foreign material inspection apparatus in the state which images an X-ray image using the X-ray intensity adjustment body which concerns on 2nd Embodiment of this invention. (A) is a figure which shows an example of the X-ray image imaged about the said X-ray intensity adjustment body, (b) is an example of the X-ray image of the to-be-inspected object imaged without using the said X-ray intensity adjustment body. FIG. The figure which shows an example of the X-ray image imaged using the said X-ray intensity adjustment body. (A) is the perspective view before the assembly which shows the structure of the said X-ray intensity adjustment body, (b) is the perspective view after an assembly. (A) is the perspective view before the assembly which shows the structure of the X-ray intensity | strength adjustment body different from the above, (b) is a cross-sectional perspective view after an assembly.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an example of an X-ray intensity adjusting body (intensity adjusting block) according to this embodiment. The X-ray intensity adjusting body 1 is integrally formed using, for example, a material whose X-ray transmittance is substantially equal to an inspection object 11 described later. The X-ray intensity adjusting body 1 has a cylindrical shape whose outer shape is an axial direction in the vertical direction, and has a circular opening 1a having an outer surface as an edge at the upper portion, and a circular shape at the center portion of the lower surface. It has a hole 1b. Inside the X-ray intensity adjusting body 1, a tapered portion 1c having a conical surface shape is formed from the opening 1a to the hole 1b. That is, the taper portion 1c surrounds the opening portion 1a from the upper part of the X-ray intensity adjusting body 1 downward so as to increase the cross-sectional area in a substantially horizontal plane substantially perpendicular to the X-ray transmission direction as will be described later. Is formed. The X-ray intensity adjusting body 1 is used together with the X-ray foreign substance inspection apparatus 10 when inspecting the inspection object 11.

  FIG. 2 shows an X-ray foreign substance inspection apparatus 10 at the time of inspection of the inspection object 11 performed using the X-ray intensity adjusting body 1. The X-ray foreign substance inspection apparatus 10 is arranged so that the X-ray source 2 that emits X-rays, the X-ray control apparatus 2a that controls the X-ray source 2, and the X-rays emitted from the X-ray source 2 are incident. The X-ray area camera 3 that captures an X-ray image transmitted through the inspection object 11, and the X-ray image captured by the X-ray area camera 3 are analyzed, so that the inside or the surface of the inspection object 11 is detected. The image processing apparatus 5 and the like function as foreign matter detection means for determining whether or not a defect such as a foreign matter or a gap exists. When inspecting the inspection object 11, the X-ray intensity adjusting body 1 is arranged between the X-ray area camera 3 and the X-ray source 2, and then the inspection object 11 is placed on the X-ray intensity adjustment body 1. In this state, an X-ray image is captured by the X-ray area camera 3. The inspection object 11 is placed on the taper portion 1 c through the opening 1 a of the X-ray intensity adjusting body 1. Since the X-ray source 2 is a point light source, for example, the inspection object 11 is arranged so that a substantially central portion is located directly below the X-ray source 2.

  The X-ray source 2 is controlled by the X-ray control device 2a, and emits X-rays radially at a predetermined irradiation angle with the vertical downward direction as the center. X-rays emitted from the X-ray source 2 pass through the inspection object 11 and the X-ray intensity adjusting body 1 and are detected by the X-ray area camera 3. The X-ray area camera 3 converts incident X-rays into electrical signals and outputs them. Thereby, an X-ray image is captured by the X-ray area camera 3.

  FIG. 3 shows an X-ray image capturing unit at the time of inspection of the inspection object 11 in the present embodiment. In the figure, a two-dot chain line indicates an example of an X-ray optical path. Since the inspection object 11 has, for example, a substantially spherical shape, the X-ray intensity adjusting body 1 has an X-ray transmission distance (shown by a bold line in the drawing) that passes through the inspection object 11 and the X-ray intensity adjustment body 1. The distance of the portion is formed so as to be substantially equal over substantially the entire area of the inspection object 11 according to the shape of the inspection object 11. For example, when the shape of the inspection object 11 is a sphere as shown in FIGS. 1 and 3, a mortar is used so that the cross section in the X-ray transmission direction increases as the distance from the center of the X-ray intensity adjusting body 21 increases. A tapered portion 1c is formed. That is, X-rays emitted vertically from the X-ray source 2 pass through the central portion of the inspection object 11, pass through the hole portion 1 b, and enter the X-ray area camera 3. At this time, since the X-ray passes through the center of the inspection object 11, the transmission distance in the inspection object 11 becomes the maximum. On the other hand, X-rays emitted from the X-ray source 2 toward the side of the inspection object 11 pass through the inspection object 11 and the X-ray intensity adjusting body 1 and enter the X-ray area camera 3. At this time, the transmission distance in the inspection object 11 is shorter than the transmission distance of the X-rays emitted vertically, but the transmission distance in the inspection object 11 is further transmitted by passing through the X-ray intensity adjusting body 1. The total of the transmission distance in the X-ray intensity adjusting body 1 is approximately equal to the transmission distance in the inspection object 11 of the X-rays emitted vertically. Since the X-ray intensity adjusting body 1 has the tapered portion 1c, the transmission distance of the X-ray transmitted through the inspection object 11 in the X-ray intensity adjusting body 1 depends on the irradiation angle of the X-ray from the vertical. As the position through which X-rays pass increases away from the center of the inspection object 11, it gradually increases. That is, as the X-ray irradiation angle from the vertical increases, the transmission distance in the inspection object 11 becomes shorter, while the transmission distance in the X-ray intensity adjusting body 1 becomes longer. The total transmission distance of X-rays in both of the line intensity adjusting bodies 1 is substantially equal over substantially the entire area of the inspection object 11.

  Since the X-ray source 2 is a point light source, the X-ray irradiation distance from the X-ray source 2 to the X-ray area camera 3 is directly below the X-ray source 2 on the X-ray area camera 3. It gets longer as it gets away from the area. Since the intensity of the X-ray is inversely proportional to the square of the irradiation distance from the X-ray source 2, the taper portion 1c of the X-ray intensity adjusting body 1 is formed in consideration of the difference in the irradiation distance. That is, the taper portion 1c is formed so as to increase in height as it approaches the side surface so that the difference in X-ray intensity in each portion on the X-ray area camera 3 caused by the difference in irradiation distance is made uniform. Yes.

  FIG. 4 shows an example of an X-ray image 100 of the inspection object 11 imaged using the X-ray intensity adjusting body 1. In the figure, the dark shaded portion indicates that the intensity of X-rays incident on the X-ray area camera 3 is relatively low. In the present embodiment, the intensity of X-rays emitted from the X-ray source 2 toward the side of the inspection object 11 in a top view and having a large irradiation angle from the vertical is incident on the X-ray area camera 3. By passing through the X-ray intensity adjusting body 1, it becomes substantially the same as the X-rays emitted vertically. That is, on the X-ray image 100, since the X-ray intensity is substantially equal over substantially the entire area of the inspection object 11, the density of the image 110a by X-rays transmitted through the inspection object 11 or the X-ray intensity adjusting body 1 is At least in the part that completely includes the inspection object 11 up to the end, it becomes substantially uniform. Therefore, as shown in the figure, even when a foreign object or the like is present in the vicinity of a portion that is an end portion when the inspection object 11 is viewed from above, an image 60 of the foreign object or the like appears clearly on the X-ray image 100. Therefore, it is possible to detect a foreign object or the like with high accuracy.

  As described above, in this embodiment, after the X-ray intensity adjusting body 1 is arranged in the X-ray foreign substance inspection apparatus 10, the inspection object 11 is placed on the tapered portion 1c through the opening 1a on the upper portion. By placing, the inspection object 11 can be inspected, so that the inspection object 11 can be inspected easily and accurately.

  In addition, this X-ray intensity adjustment body 1 can be arrange | positioned on the conveyor etc. which convey the to-be-inspected object 11, for example. FIG. 5 shows the X-ray foreign matter inspection apparatus 15 in a state where the inspection object 11 and the X-ray intensity adjusting body 1 are placed on the conveyor 4. In this way, by using the X-ray intensity adjusting body 1, it is possible to easily inspect the inspection object even when a non-destructive inspection is sequentially performed while a large number of inspection objects are conveyed by a conveyor or the like. It is possible to arrange and perform high-precision inspection.

  In the present embodiment, the shape of the X-ray intensity adjusting body is not limited to a cylindrical shape. FIGS. 6A and 6B show an example of an X-ray intensity adjusting body having a rectangular parallelepiped shape whose bottom is square, for example. As shown in FIG. 6 (a), a square opening 21a having an edge at the upper end of each side surface of the X-ray intensity adjusting body 21 is formed at the top of the X-ray intensity adjusting body 21. A hole 21b having a shape similar to the opening 21a is formed at the center of the lower surface. And in the inside of the X-ray intensity adjusting body 21, from the opening 21a to the hole 21b, the taper part comprised of four inclined surfaces that pass through each side of the opening 21a and the side of the hole 21b corresponding to that side. 21c is formed so as to surround the opening 21a. The taper part 21c is formed so that the cross-sectional area in the horizontal plane of the X-ray intensity adjusting body 21 increases downward from the upper part.

  As shown in FIG. 6B, even when this X-ray intensity adjusting body 21 is used, for example, the spherical inspection object 11 is mounted on the tapered portion 21 c through the opening 21 a of the X-ray intensity adjusting body 21. It is possible to easily perform highly accurate nondestructive inspection. Here, in this case, since the tapered portion 21c is formed in the shape of a side surface of a quadrangular pyramid, the intensity of X-rays transmitted through the spherical inspection object 11 is equal when the X-ray irradiation angles from the vertical are equal. Even then, the transmission distance in the X-ray intensity adjusting body 21 may be slightly different. For this reason, the captured X-ray image is subtle but uneven as compared with the case where the X-ray intensity adjusting body 1 is used. However, the degree of such unevenness hardly affects the determination of the presence or absence of foreign matter and the like, and the X-ray intensity adjusting body 21 is used as compared with the case where the X-ray intensity adjusting body 21 is not used. By doing so, it can be said that the X-ray intensity can be made substantially uniform for the entire inspection object 11, and the nondestructive inspection can be performed with high accuracy.

  FIG. 7 shows an example of an X-ray intensity adjusting body having a rectangular parallelepiped shape whose bottom is rectangular, for example. The X-ray intensity adjusting body 31 can be used, for example, when inspecting the cylindrical inspection object 12, and has a rectangular opening 31a on the upper surface and smaller than the opening 31a on the lower surface. It has a rectangular hole 31b. Then, inside the X-ray intensity adjusting body 31, from the opening 31a to the hole 31b, each side of the opening 31a and four slopes passing through the side of the hole 31b corresponding to the side have a cross section in the horizontal plane. A rectangular tapered portion 31c is formed so as to surround the opening 31a. The taper part 31c is formed so that the cross-sectional area in the horizontal plane of the X-ray intensity adjusting body 31 increases downward from the upper part.

  When the inspection object 12 is inspected using the X-ray intensity adjusting body 31, the inspection object 12 is set so that the longitudinal direction of the inspection object 12 coincides with the longitudinal direction of the tapered portion 31c. It can be easily arranged on the X-ray intensity adjusting body 31 so that the cylindrical side surface of the inspection object 12 comes into contact with the tapered portion 31c through the opening 31a of the intensity adjusting body 31. As a result, X-rays that pass through a portion near the cylindrical side surface away from the central axis of the inspection object 12 have a longer transmission distance in the X-ray intensity adjusting body 31 even if the transmission distance in the inspection object 12 is short. . Therefore, the intensity of the transmitted X-ray can be made substantially uniform for the entire inspection object 12, and a highly accurate nondestructive inspection can be easily performed.

  Next, an X-ray intensity adjusting body (intensity adjusting plate) according to the second embodiment of the present invention will be described. FIG. 8 shows an example of nondestructive inspection using the X-ray intensity adjusting body 51 which is a plate-like member. The X-ray X-ray intensity adjusting body 51 is configured to have different X-ray transmittance for each part, and can be used particularly effectively when, for example, inspecting a spherical inspection object 11. . The X-ray intensity adjusting body 51 has, for example, a multi-layer structure in which intensity adjusting sheets 511 to 516 having a certain X-ray transmittance are stacked in layers as shown in FIG. By providing the sheets 511 to 516 with cutouts or the like having shapes and sizes different from those of the other layers, the X-ray intensity adjusting body 51 as a whole has a stepwise difference in X-ray transmittance. Can be configured. In the X-ray intensity adjusting body 51 shown in FIG. 11, the transmittance gradually decreases as the distance from the center of the X-ray intensity adjusting body 51 increases in plan view. In addition, as shown in FIG. 12, by combining a plurality of ring-shaped intensity adjustment sheets 511 to 516 having different X-ray transmittances, the X-ray intensity adjuster 51 as a whole has an X-ray transmittance for each part. Can be configured differently. In addition, the hatching density of the cut surface in FIG. 12B indicates the X-ray absorption rate, and the outer strength adjustment sheet is formed of a material having a higher X-ray absorption rate than the inner strength adjustment sheet. The transmittance decreases stepwise as the distance from the center of the X-ray intensity adjusting body 51 increases in plan view. By configuring the X-ray intensity adjusting body 51 with such a structure, the X-ray transmittance for each part can be set and adjusted easily and accurately, and the X-ray intensity adjusting body 51 can be manufactured at low cost. Can be manufactured. Note that the X-ray intensity adjusting body 51 may be formed, for example, so that the concentration of a substance having a low X-ray transmittance is different for each part.

  The nondestructive inspection using the X-ray intensity adjusting body 51 can be performed in the same manner as the nondestructive inspection performed using the X-ray intensity adjusting body 1 described above. That is, first, in the X-ray foreign substance inspection apparatus, the X-ray intensity adjusting body 51 is positioned at a predetermined position between the X-ray source 2 and the X-ray area camera 3 corresponding to the position where the inspection object 11 is to be placed. And place it. And the to-be-inspected object 11 is arrange | positioned in the predetermined position of the upper surface of the X-ray intensity adjustment body 51, ie, the perpendicular lower part of the X-ray source 2, an X-ray image is imaged, and the presence or absence of a foreign material etc. is detected.

  FIGS. 9A and 9B show the case where it is assumed that only the X-ray intensity adjusting body 51 or only the inspection object 11 is placed on the X-ray area camera 3 to capture an X-ray image. An example of an X-ray image is shown. FIG. 10 shows an example of an X-ray image of the inspection object 11 imaged using the X-ray intensity adjusting body 51. The X-ray intensity adjusting body 51 is a part close to the center of the inspection object 11 in a state where the inspection object 11 is placed, corresponding to the vicinity of the center 51a in the X-ray image 140a of FIG. The portion through which the X-rays that have passed through are transmitted is configured such that the X-ray transmittance is high. And about the site | part through which the X-ray which permeate | transmitted the site | part which left | separated from the center part of the to-be-inspected object 11 like the site | part slightly separated from the center part 51a in the X-ray image 140a of FIG. As the distance from the center of the object 11 increases, the X-ray transmittance gradually decreases.

  When the X-ray intensity adjusting body 51 is not used, as shown in FIG. 9B, the X-ray transmission distance of the peripheral portion in the top view is short, and therefore in the vicinity of the range 11a indicating the inspection object 11. The intensity of X-rays increases. Therefore, even if a foreign object or the like is present in the vicinity of the peripheral edge in the top view of the inspection object 11, the image 60 may not be confirmed in the X-ray image 140b. In contrast, when an X-ray image is captured using the X-ray intensity adjusting body 51, the X-ray intensity adjusting body 51 is transmitted through X-ray intensity that is low when it passes through the inspection object 11. On the other hand, the intensity of the X-ray having a high intensity when transmitted through the object to be inspected 11 can be reduced by transmitting the portion having a low transmittance of the X-ray intensity adjusting body 51. it can. As a result, the intensity of the X-ray transmitted through the X-ray intensity adjusting body 51 and incident on the X-ray area camera 3 becomes substantially uniform for the entire inspection object 11, and in the X-ray image 140, as shown in FIG. Since the density of the image 110a indicating the inspection object 11 is substantially uniform, the image 60 such as a foreign object existing near the periphery of the inspection object 11 becomes clear, and the foreign object or the like can be detected with high accuracy. Therefore, also in the second embodiment, the X-ray intensity adjusting body 51 is easily disposed by placing the inspection object 11 on the X-ray intensity adjusting body 51 after the X-ray intensity adjusting body 51 is disposed above the X-ray area camera 3. Accurate non-destructive inspection can be performed.

  In addition, this invention is not limited to the structure of the said embodiment. For example, the X-ray intensity adjusting body 1 according to the first embodiment can be used at the time of inspecting a rectangular parallelepiped inspection object, for example. That is, the X-ray intensity adjusting body 1 is used at the time of inspecting an inspection object having such a shape that the X-ray transmission distance is shortened particularly in a portion that becomes an edge portion in a top view, so that the high-accuracy in the same manner as described above. Inspection can be performed. At this time, in the same manner as described above, the X-ray image can be captured by an easy operation in which the inspection object is simply placed on the tapered portion 1c through the opening 1a.

1, 21, 31, 51 X-ray intensity adjusting body 1a, 21a, 31a Opening 1c, 21c, 31c Taper 2 X-ray source 3 X-ray area camera 11, 12 Inspected object

Claims (6)

X-rays irradiated from the X-ray source and transmitted through the inspection object are incident on the X-ray area camera, and based on the X-ray image captured by the X-ray area camera, the foreign matter inside or on the surface of the inspection object or X-ray intensity adjustment that is used for X-ray foreign matter inspection to determine the presence or absence of defects, and is shaped so that the intensity of X-rays that pass through the inspection object and reach the X-ray area camera is substantially uniform Body,
X has a taper portion formed so as to surround an opening provided in the upper portion and to increase a cross-sectional area in a plane substantially perpendicular to the X-ray transmission direction downward from the upper portion. Line strength adjustment body. An X-ray intensity adjusting body for making the intensity of X-rays incident on the X-ray area camera substantially uniform is provided between the object to be inspected and the X-ray area camera, and the object to be inspected is irradiated from the X-ray source. X-rays transmitted through the X-ray area camera are incident on the X-ray area camera, and an X-ray image is captured by the X-ray area camera. Based on the captured X-ray image, a foreign matter or a defect inside or on the surface of the inspection object is detected. An X-ray foreign matter inspection method for determining presence or absence,
The X-ray intensity adjusting body has a tapered portion formed so as to surround an opening provided in the upper portion and to increase a cross-sectional area in a plane substantially perpendicular to the X-ray transmission direction downward from the upper portion. Have
The X-ray intensity adjusting body is disposed between the X-ray area camera and the X-ray source, and then an object to be inspected is placed on the tapered portion through the opening to capture an X-ray image. X-ray foreign matter inspection method characterized by the above. A holding table that holds the inspection object, an X-ray source that irradiates the inspection object with X-rays, and an X-ray that is irradiated from the X-ray source and transmitted through the inspection object is incident to capture an X-ray image. An X-ray inspection apparatus comprising: a line area camera; and an abnormality / defect determination unit that determines the presence or absence of an abnormality or a defect in or on the surface of an inspection object based on an X-ray image captured by the X-ray area camera ,
An X-ray intensity adjusting body that is formed in a shape such that the intensity of the X-ray that passes through the inspection object and reaches the X-ray camera is substantially uniform;
The X-ray intensity adjusting body has a tapered portion formed so as to surround an opening provided in the upper portion and to increase a cross-sectional area in a plane substantially perpendicular to the X-ray transmission direction downward from the upper portion. An X-ray inspection apparatus characterized by comprising: X-rays irradiated from the X-ray source and transmitted through the inspection object are incident on the X-ray area camera, and based on the X-ray image captured by the X-ray area camera, the foreign matter inside or on the surface of the inspection object or An X-ray intensity adjuster that is used for X-ray foreign matter inspection to determine the presence or absence of defects and is formed so that the intensity of X-rays that pass through the inspection object and reach the X-ray area camera is substantially uniform. There,
An X-ray intensity adjusting body, wherein the X-ray intensity adjusting body is formed in a plate shape so that the X-ray transmittance varies from site to site depending on the shape of the inspection object. An X-ray intensity adjusting body for making the intensity of X-rays incident on the X-ray area camera substantially uniform is provided between the object to be inspected and the X-ray area camera, and the object to be inspected is irradiated from the X-ray source. X-rays transmitted through the X-ray area camera are incident on the X-ray area camera, and an X-ray image is captured by the X-ray area camera. Based on the captured X-ray image, a foreign matter or a defect inside or on the surface of the inspection object is detected. An X-ray foreign matter inspection method for determining presence or absence,
The X-ray intensity adjusting body is formed in a plate shape so that the X-ray transmittance is different for each part according to the shape of the inspection object,
The X-ray intensity adjusting body is disposed between the X-ray area camera and the X-ray source, and then an inspection object is placed on the upper surface of the X-ray intensity adjusting body to capture an X-ray image. X-ray foreign matter inspection method characterized by the above. A holding table that holds the inspection object, an X-ray source that irradiates the inspection object with X-rays, and an X-ray that is irradiated from the X-ray source and transmitted through the inspection object is incident to capture an X-ray image. An X-ray inspection apparatus comprising: a line area camera; and an abnormality / defect determination unit that determines the presence or absence of an abnormality or a defect in or on the surface of an inspection object based on an X-ray image captured by the X-ray area camera ,
An X-ray intensity adjusting body that is formed in a shape such that the intensity of the X-ray that passes through the inspection object and reaches the X-ray camera is substantially uniform;
The X-ray intensity adjusting device is formed in a plate shape so that the X-ray transmittance is different for each part according to the shape of the inspection object.

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