JP2009250028A - 4-valve piezoelectric pump with built-in driver - Google Patents

4-valve piezoelectric pump with built-in driver Download PDF

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JP2009250028A
JP2009250028A JP2008094564A JP2008094564A JP2009250028A JP 2009250028 A JP2009250028 A JP 2009250028A JP 2008094564 A JP2008094564 A JP 2008094564A JP 2008094564 A JP2008094564 A JP 2008094564A JP 2009250028 A JP2009250028 A JP 2009250028A
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housing
port
pump
piezoelectric vibrator
piezoelectric
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JP5000571B2 (en
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Jiro Nakajima
二郎 中島
Hitoshi Onishi
人司 大西
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To attain miniaturization and thinning to a limit, while satisfying a UL standard, in a 4-valve piezoelectric pump with built-in driver for respectively arranging suction side and delivery side check valves between a pair of pump rooms and a single suction port and between the pair of pump rooms and a single delivery port on the obverse-reverse of a piezoelectric vibrator, by storing a control board mounted with the piezoelectric vibrator and a power supply controlling electric part to the piezoelectric vibrator in a housing. <P>SOLUTION: This 4-valve piezoelectric pump with built-in driver is provided so that the suction port and the delivery port extending in the parallel direction to a reference bottom surface are projected in one end part of one of a pair of housings having a sandwiching surface for sandwiching the piezoelectric vibrator, and the sandwiching surface of this port housing is inclined in the direction for separating from the reference bottom surface for separating from the suction port and the delivery port, and is positioned in an end part on the opposite side of the suction port and the delivery port in the port housing, and a control board storage space is formed so that at least a part overlaps in a plan view with the piezoelectric vibrator and the pump room. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、振動する圧電振動子によってポンプ作用を得る4バルブ圧電ポンプに関し、特に該圧電振動子に対する給電制御用電気部品を搭載した制御基板をハウジング内に収納するドライバ内蔵4バルブ圧電ポンプに関する。   The present invention relates to a four-valve piezoelectric pump that obtains a pump action by a vibrating piezoelectric vibrator, and more particularly to a driver-embedded four-valve piezoelectric pump that houses a control board on which a power supply control electrical component for the piezoelectric vibrator is mounted in a housing.

4バルブ圧電ポンプは、圧電振動子の表裏(上下)にそれぞれポンプ室を形成する一方、単一の吸入ポートと、単一の吐出ポートを設け、一対のポンプ室と吸入ポートとの間にそれぞれ該吸入ポートから該一対のポンプ室への流体流を許容しその逆方向の流体流を許さない第一、第二の吸入側逆止弁を設け、一対のポンプ室と吐出ポートとの間にそれぞれ該一対のポンプ室から吐出ポートへの流体流を許容しその逆方向の流体流を許さない第一、第二の吐出側逆止弁を設けたものである(特許文献4)。   The 4-valve piezoelectric pump forms pump chambers on the front and back sides (upper and lower sides) of the piezoelectric vibrator, while providing a single suction port and a single discharge port between the pair of pump chambers and the suction port. First and second suction-side check valves that allow fluid flow from the suction port to the pair of pump chambers but do not allow fluid flow in the opposite direction are provided between the pair of pump chambers and the discharge port. First and second discharge-side check valves are provided that allow fluid flow from the pair of pump chambers to the discharge port but do not allow fluid flow in the opposite direction (Patent Document 4).

このドライバ内蔵4バルブ圧電ポンプは、圧電振動子を振動させると、一対のポンプ室の一方の容積が拡大して他方の容積が縮小することから、圧電振動子が正逆いずれに振動するときでも、一対の逆止弁の一方が閉じて他方が開く動作を繰り返し、ポンプ作用が得られる。圧電振動子の表裏の一方のみにポンプ室を設ける2バルブ圧電振動子ポンプに比して、脈動の周期を半分にした高効率化(高流量化)が可能である。
特開平6-288355号公報 特開2004-060640号公報 特表2004-517240号公報 特開2005-337068号公報 特開2006-299962号公報 特開2007-071099号公報
In this four-valve piezoelectric pump with a built-in driver, when the piezoelectric vibrator is vibrated, one volume of the pair of pump chambers is enlarged and the other volume is reduced. Therefore, even when the piezoelectric vibrator vibrates forward or backward. The operation of closing one of the pair of check valves and opening the other is repeated to obtain a pumping action. Compared with a two-valve piezoelectric vibrator pump in which a pump chamber is provided only on one of the front and back sides of the piezoelectric vibrator, high efficiency (high flow rate) can be achieved by halving the pulsation cycle.
JP-A-6-288355 JP 2004-060640 A Special Table 2004-517240 JP 2005-337068 A JP 2006-299962 JP 2007-071099

このように原理的には優れる4バルブ圧電ポンプを小型化するには、圧電振動子と、この圧電振動子に駆動電圧を与える駆動基板(ドライバ)とを同一のハウジング内に収納したドライバ内蔵型とすることが得策である。しかし、圧電振動子に駆動電圧を与える駆動基板は、高電圧を発するため、圧電ポンプのハウジングに内蔵すると、UL規格を満足することが困難になる。   In order to reduce the size of the four-valve piezoelectric pump that is excellent in principle as described above, a driver built-in type in which a piezoelectric vibrator and a driving substrate (driver) that applies a driving voltage to the piezoelectric vibrator are housed in the same housing. Is a good idea. However, since the drive substrate that applies the drive voltage to the piezoelectric vibrator generates a high voltage, it is difficult to satisfy the UL standard if it is built in the housing of the piezoelectric pump.

本発明は従って、UL規格を満足させた上で、極限までの小型化、薄型化を図ったドライバ内蔵4バルブ圧電ポンプを得ることを目的とする。また本発明は、圧電振動子を挟着する一対のハウジングを組み立てることで実質的な流路構造を構成できるドライバ内蔵4バルブ圧電ポンプを得ることを目的とする。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to obtain a driver-embedded four-valve piezoelectric pump that satisfies the UL standard and is extremely small and thin. It is another object of the present invention to obtain a driver built-in four-valve piezoelectric pump capable of constructing a substantial flow path structure by assembling a pair of housings sandwiching a piezoelectric vibrator.

本発明は、ハウジング内に、その表裏にポンプ室を形成する圧電振動子と、該圧電振動子に対する給電制御用電気部品を搭載した制御基板を収納し、上記一対のポンプ室と単一の吸入ポートとの間にそれぞれ該吸入ポートから該一対のポンプ室への流体流を許容しその逆方向の流体流を許さない第一、第二の吸入側逆止弁を設け、上記一対のポンプ室と単一の吐出ポートとの間にそれぞれ該一対のポンプ室から吐出ポートへの流体流を許容しその逆方向の流体流を許さない第一、第二の吐出側逆止弁を設け、圧電振動子を振動させてポンプ作用を得るドライバ内蔵4バルブ圧電ポンプにおいて、ハウジングを、圧電振動子を挟着する挟着面を有する一対のハウジングから構成し、この一対のハウジングの一方のハウジングの一端部に、該ハウジングの基準底面と平行な方向に延びる吸入ポートと吐出ポートを突出させ、この吸入ポートと吐出ポートを有する有ポートハウジングの上記挟着面を、吸入ポートと吐出ポートから離れるに従って、該基準底面から離れる方向に傾斜させて圧電振動子平面を基準底面に対して傾斜させ、有ポートハウジングに、吸入ポートと吐出ポートの反対側の端部に位置させて、少なくとも一部が圧電振動子及びポンプ室と平面視重複する上記制御基板の収納空間を形成したことを特徴としている。   According to the present invention, a piezoelectric vibrator that forms pump chambers on the front and back sides of a housing and a control board on which electric parts for power supply control for the piezoelectric vibrator are mounted are housed in a housing. A pair of first and second suction side check valves are provided between the ports and the first and second suction side check valves that allow fluid flow from the suction port to the pair of pump chambers but do not allow fluid flow in the opposite direction. A first discharge valve and a second discharge side check valve that allow fluid flow from the pair of pump chambers to the discharge port and do not allow fluid flow in the opposite direction between the first discharge port and the single discharge port. In a 4-valve piezoelectric pump with a built-in driver that vibrates a vibrator and obtains a pump action, the housing is composed of a pair of housings having a sandwiching surface for sandwiching the piezoelectric vibrator, and one end of one of the pair of housings. Part of the The suction port and the discharge port extending in a direction parallel to the reference bottom surface of the ring are projected, and the holding surface of the port housing having the suction port and the discharge port is separated from the reference bottom surface as the distance from the suction port and the discharge port increases. The piezoelectric vibrator plane is inclined with respect to the reference bottom surface by being inclined away from the reference bottom surface, and is positioned on the opposite end of the suction port and the discharge port on the ported housing, and at least a part of the piezoelectric vibrator and the pump chamber And a storage space for the control board that overlaps in plan view.

有ポートハウジングの制御基板収納空間を形成する壁面の肉厚は、非均一とするのがよい。   The wall thickness forming the control board storage space of the ported housing should be non-uniform.

また、無ポートハウジングは、その圧電振動子の径方向に沿う方向の壁面の肉厚を非均一とし、吸入ポートと吐出ポートに向けて肉厚を増大させることが望ましい。   In the non-port housing, it is desirable that the wall thickness in the direction along the radial direction of the piezoelectric vibrator is non-uniform, and the thickness is increased toward the suction port and the discharge port.

一対のハウジングはともに合成樹脂材料の成形品から構成することができる。   Both the pair of housings can be formed of a molded product of a synthetic resin material.

圧電振動子は、導電性金属薄板からなる少なくとも一枚のシムと少なくとも一層の圧電体層との交互積層構造を有する。   The piezoelectric vibrator has an alternately laminated structure of at least one shim made of a conductive metal thin plate and at least one piezoelectric layer.

本発明のドライバ内蔵4バルブ圧電ポンプによれば、圧電振動子を挟着する一対のハウジングの一端部に、該ハウジングの基準底面と平行な方向に延びる吸入ポートと吐出ポートを突出させ、これらのポートを有する有ポートハウジングの圧電振動子挟着面を、吸入ポートと吐出ポートから離れるに従って、基準底面から離れる方向に傾斜させて圧電振動子平面を基準底面に対して傾斜させ(非平行とし)、有ポートハウジングに、吸入ポートと吐出ポートの反対側の端部に位置させて、少なくとも一部が圧電振動子及びポンプ室と平面視重複する制御基板の収納空間を形成したので、制御基板収納空間を形成する壁面の肉厚を十分確保してUL規格を満足しながら、小型化、薄型化を図ることができる。   According to the four-valve piezoelectric pump with a built-in driver of the present invention, the suction port and the discharge port extending in a direction parallel to the reference bottom surface of the housing are protruded from one end of the pair of housings sandwiching the piezoelectric vibrator. The piezoelectric vibrator clamping surface of the port housing with a port is inclined in a direction away from the reference bottom surface as the distance from the suction port and the discharge port is increased, and the piezoelectric vibrator plane is inclined with respect to the reference bottom surface (non-parallel). The control board storage space is formed in the port housing with the control board storage space positioned at the opposite end of the suction port and the discharge port and at least partially overlapping the piezoelectric vibrator and the pump chamber in plan view. It is possible to achieve a reduction in size and thickness while ensuring a sufficient thickness of the wall surface forming the space and satisfying the UL standard.

最初に、図8について、ドライバ内蔵4バルブ圧電ポンプの動作原理を説明する。この圧電振動子ポンプは、アッパハウジング10、ロアハウジング20、圧電振動子30、及び4つのアンブレラ(逆止弁)11、12、21、22を基本的な構成要素としている。アッパハウジング10と圧電振動子30の間、及びロアハウジング20と圧電振動子30の間にはそれぞれ、アッパポンプ室(可変容積室)13とロアポンプ室(可変容積室)23が形成されている。単一の吸入ポート31は、吸入側流路14Hと24Hに連通しており、吸入側流路14Hは吸入側逆止弁11を介してアッパポンプ室13に連通し、吸入側流路24Hは吸入側逆止弁21を介してロアポンプ室23に連通している。また、単一の吐出ポート32は、吐出側流路15Dと吐出側流路25Dに連通しており、吐出側流路15Dは吐出側逆止弁12を介してアッパポンプ室13に連通し、吐出側流路25Dは吐出側逆止弁22を介してロアポンプ室23に連通している。   First, with reference to FIG. 8, the operation principle of the driver-embedded 4-valve piezoelectric pump will be described. The piezoelectric vibrator pump includes an upper housing 10, a lower housing 20, a piezoelectric vibrator 30, and four umbrellas (check valves) 11, 12, 21, and 22 as basic components. An upper pump chamber (variable volume chamber) 13 and a lower pump chamber (variable volume chamber) 23 are formed between the upper housing 10 and the piezoelectric vibrator 30, and between the lower housing 20 and the piezoelectric vibrator 30, respectively. The single suction port 31 communicates with the suction side flow paths 14H and 24H, the suction side flow path 14H communicates with the upper pump chamber 13 via the suction side check valve 11, and the suction side flow path 24H It communicates with the lower pump chamber 23 via the side check valve 21. The single discharge port 32 communicates with the discharge-side flow path 15D and the discharge-side flow path 25D, and the discharge-side flow path 15D communicates with the upper pump chamber 13 via the discharge-side check valve 12. The side flow path 25D communicates with the lower pump chamber 23 via the discharge side check valve 22.

このドライバ内蔵4バルブ圧電ポンプは、圧電振動子30が正逆に弾性変形(振動)すると、アッパポンプ室13とロアポンプ室23のいずれか一方の容積が増大し他方の容積が減少する。アッパポンプ室13の容積が増大する行程はロアポンプ室23の容積が減少する行程であり、アッパポンプ室13の容積が増大するから吸入側逆止弁11が開いて吸入ポート31からアッパポンプ室13内に流体が流入し、ロアポンプ室23の容積が減少するからロアポンプ室23内の流体が吐出側逆止弁22を開いて吐出ポート32に流出する(図8(B))。逆にアッパポンプ室13の容積が減少する行程はロアポンプ室23の容積が増大する行程であり、ロアポンプ室23の容積が増大するから吸入側逆止弁21が開いて吸入ポート31からロアポンプ室23内に流体が流入し、アッパポンプ室13の容積が減少するからアッパポンプ室13内の流体が吐出側逆止弁12を開いて吐出ポート32に流出する(図8(A))。従って、吐出ポート32における脈動の周期を短くする(圧電振動子30の上下の一方のみにポンプ室が形成される場合に比して半分にする)ことができる。   In the four-valve piezoelectric pump with a built-in driver, when the piezoelectric vibrator 30 is elastically deformed (vibrated) in the forward and reverse directions, the volume of one of the upper pump chamber 13 and the lower pump chamber 23 increases and the other volume decreases. The stroke in which the volume of the upper pump chamber 13 increases is the stroke in which the volume of the lower pump chamber 23 decreases. Since the volume of the upper pump chamber 13 increases, the suction side check valve 11 opens and fluid flows from the suction port 31 into the upper pump chamber 13. Flows in and the volume of the lower pump chamber 23 decreases, so that the fluid in the lower pump chamber 23 opens the discharge side check valve 22 and flows out to the discharge port 32 (FIG. 8B). Conversely, the stroke in which the volume of the upper pump chamber 13 decreases is a stroke in which the volume of the lower pump chamber 23 increases. Since the volume of the lower pump chamber 23 increases, the suction side check valve 21 opens and the suction port 31 opens into the lower pump chamber 23. Since the fluid flows into the upper pump chamber 13 and the volume of the upper pump chamber 13 decreases, the fluid in the upper pump chamber 13 opens the discharge-side check valve 12 and flows out to the discharge port 32 (FIG. 8A). Therefore, the pulsation cycle at the discharge port 32 can be shortened (halved compared to the case where the pump chamber is formed only on one of the upper and lower sides of the piezoelectric vibrator 30).

本実施形態は、以上の動作原理のドライバ内蔵4バルブ圧電ポンプを小型(薄型)な簡易な構造で実現するものであり、図1ないし図7は、その第一の実施形態を示している。図1ないし図7では、図8と共通の構成要素には同一の符号を付している。   In this embodiment, the driver built-in four-valve piezoelectric pump having the above operation principle is realized with a small (thin) simple structure, and FIGS. 1 to 7 show the first embodiment. In FIG. 1 to FIG. 7, the same reference numerals are given to the same components as those in FIG.

本実施形態のドライバ内蔵4バルブ圧電ポンプは、吸入ポート31と吐出ポート32を有する有ポートハウジング10と、これらのポートを有しない無ポートハウジング20を有している。有ポートハウジング10は、基準底面10Bを有し、吸入ポート31と吐出ポート32は、該有ポートハウジング10の一端部に互いに平行に、基準底面10Bと平行に突出している。有ポートハウジング10の基準底面10Bの反対側には、圧電振動子30を挟着する挟着面10Sが形成されている。この挟着面10Sは、基準底面10Bとは非平行であって、吸入ポート31と吐出ポート32から離れるに従って、基準底面10Bから離れる方向に傾斜している。この傾斜角度θ(図2)は、例えば3゜±1゜である。   The driver-embedded four-valve piezoelectric pump of this embodiment includes a port housing 10 having a suction port 31 and a discharge port 32, and a non-port housing 20 that does not have these ports. The ported housing 10 has a reference bottom surface 10B, and the suction port 31 and the discharge port 32 protrude in parallel to one end of the ported housing 10 and in parallel to the reference bottom surface 10B. On the opposite side of the reference bottom surface 10 </ b> B of the ported housing 10, a clamping surface 10 </ b> S for clamping the piezoelectric vibrator 30 is formed. The sandwiching surface 10S is not parallel to the reference bottom surface 10B, and is inclined in a direction away from the reference bottom surface 10B as the distance from the suction port 31 and the discharge port 32 increases. The inclination angle θ (FIG. 2) is, for example, 3 ° ± 1 °.

有ポートハウジング10には、ポンプ室13を形成する凹部13aと、この凹部13aに連通する吸入側流路14Hと吐出側流路15Dが形成されていて、この吸入側流路14Hと吐出側流路15Dが吸入ポート31と吐出ポート32に連通している。   The port housing 10 is formed with a recess 13a that forms a pump chamber 13, and a suction-side flow path 14H and a discharge-side flow path 15D that communicate with the recess 13a. The suction-side flow path 14H and the discharge-side flow The passage 15D communicates with the suction port 31 and the discharge port 32.

有ポートハウジング10にはまた、その吸入ポート31と吐出ポート32を有する側の端部に、無ポートハウジング20側に向かって突出する吸入接続突起16Hと吐出接続突起16Dが形成されており、この吸入接続突起16Hと吐出接続突起16Dの中心部に、吸入側流路14Hに連通する吸入接続流路14Haと、吐出側流路15Dに連通する吐出接続流路15Daが形成されている。吸入接続突起16Hと吐出接続突起16Dは、平面矩形で、その先端部に、軸線方向に対して適当な角度傾斜した吸入接続斜面16Haと吐出接続斜面16Daが形成されている。   The port housing 10 is also formed with suction connection protrusions 16H and discharge connection protrusions 16D projecting toward the non-port housing 20 side at the end on the side having the suction port 31 and the discharge port 32. A suction connection channel 14Ha that communicates with the suction side channel 14H and a discharge connection channel 15Da that communicates with the discharge side channel 15D are formed at the center of the suction connection projection 16H and the discharge connection projection 16D. The suction connection projection 16H and the discharge connection projection 16D are rectangular in shape, and a suction connection slope 16Ha and a discharge connection slope 16Da that are inclined at an appropriate angle with respect to the axial direction are formed at the front ends thereof.

無ポートハウジング20には、ポンプ室23を形成する凹部23aと、この凹部23aに連通する吸入側流路24Hと吐出側流路25Dが形成されている。無ポートハウジング20の端部には、有ポートハウジング10の吸入接続突起16Hと吐出接続突起16Dが嵌まり込む凹部26Hと26D(図3)が形成されており、この凹部26Hと26Dの奥部に、有ポートハウジング10の吸入接続斜面16Haと吐出接続斜面16Daに対応する吸入側接続斜面26Haと吐出接続斜面26Daが形成されている。以上の有ポートハウジング10と無ポートハウジング20は、合成樹脂材料により容易に成形することができる   The non-port housing 20 is formed with a recess 23a that forms a pump chamber 23, and a suction-side channel 24H and a discharge-side channel 25D that communicate with the recess 23a. Recesses 26H and 26D (FIG. 3) into which the suction connection protrusion 16H and the discharge connection protrusion 16D of the port housing 10 are fitted are formed at the end of the non-port housing 20, and the inner parts of the recesses 26H and 26D are formed. Further, a suction side connection slope 26Ha and a discharge connection slope 26Da corresponding to the suction connection slope 16Ha and the discharge connection slope 16Da of the port housing 10 are formed. The ported housing 10 and the portless housing 20 described above can be easily molded from a synthetic resin material.

有ポートハウジング10の吸入接続突起16Hと吐出接続突起16Dを、無ポートハウジング20の凹部26Hと26Dに嵌め、両者の吸入接続斜面16Haと26Haの間、及び吐出接続斜面16Daと26Daの間にそれぞれOリング27を挟着すると、吸入側と吐出側の液密な流路が完成する。   The suction connection projection 16H and the discharge connection projection 16D of the port housing 10 are fitted into the recesses 26H and 26D of the non-port housing 20, respectively, between the suction connection slopes 16Ha and 26Ha, and between the discharge connection slopes 16Da and 26Da, respectively. When the O-ring 27 is sandwiched, a liquid-tight flow path on the suction side and the discharge side is completed.

逆止弁11と12は、無ポートハウジング20の吸入側流路24Hと吐出側流路25Dの凹部23a側の端部に設けられ、逆止弁21と22は、有ポートハウジング10の吸入側流路14Hと吐出側流路15Dの凹部13a側の端部に設けられている。図示実施形態の逆止弁11、12、21、22は、同一の形態のアンブレラバルブであり、図6に示すように、流路に接着もしくは溶着固定される穴あき基板41に、弾性材料からなるアンブレラ42を装着してなっている。図6は、吐出側の逆止弁12と22を描いているが、吸入側の逆止弁11と21は、流れ方向が図示例とは逆になる。   The check valves 11 and 12 are provided at the end of the non-port housing 20 on the suction side flow path 24H and the discharge side flow path 25D on the recess 23a side, and the check valves 21 and 22 are provided on the suction side of the port housing 10 It is provided at the end of the flow path 14H and the discharge side flow path 15D on the recess 13a side. The check valves 11, 12, 21, and 22 in the illustrated embodiment are umbrella valves of the same form, and as shown in FIG. 6, an elastic material is attached to the perforated substrate 41 that is bonded or welded to the flow path. Umbrella 42 is installed. FIG. 6 depicts the discharge-side check valves 12 and 22, but the flow directions of the suction-side check valves 11 and 21 are opposite to those in the illustrated example.

圧電振動子30は、有ポートハウジング10の挟着面10Sと無ポートハウジング20の挟着面20Sとの間に、Oリング33を介して液密に挟着保持され、凹部13aとの間にポンプ室13を構成し、凹部23aとの間にポンプ室23を構成する。圧電振動子30は、導電性金属薄板からなる少なくとも一枚のシムと少なくとも一層の圧電体層との交互積層構造を有するもので、圧電体層に交番電界を与えることにより正逆に振動する周知のものであり、本実施形態は、圧電振動子30の構成の如何は問わない。例えばユニモルフ、バイモルフのいずれのタイプでもよい。   The piezoelectric vibrator 30 is held in a liquid-tight manner via an O-ring 33 between the sandwiching surface 10S of the port housing 10 and the sandwiching surface 20S of the non-port housing 20, and between the recess 13a. The pump chamber 13 is comprised and the pump chamber 23 is comprised between the recessed parts 23a. The piezoelectric vibrator 30 has an alternately laminated structure of at least one shim made of a conductive metal thin plate and at least one piezoelectric layer, and vibrates forward and backward by applying an alternating electric field to the piezoelectric layer. In this embodiment, the configuration of the piezoelectric vibrator 30 is not limited. For example, any type of unimorph and bimorph may be used.

本実施形態は、有ポートハウジング10の挟着面10Sと無ポートハウジング20の挟着面20Sが、吸入ポート31と吐出ポート32から離れるに従って、有ポートハウジング10の基準底面10Bから離れる方向に傾斜している。有ポートハウジング10には、吸入ポート31と吐出ポート32とは反対側の端部に位置させて、制御基板50を収納する収納凹部18が形成されている。   In the present embodiment, the clamping surface 10S of the port housing 10 and the clamping surface 20S of the non-port housing 20 are inclined in a direction away from the reference bottom surface 10B of the port housing 10 as they are separated from the suction port 31 and the discharge port 32. is doing. The port housing 10 is formed with a storage recess 18 for storing the control board 50 at the end opposite to the suction port 31 and the discharge port 32.

駆動基板50上には、図4、図5に示すように、圧電振動子30に対する給電制御を行う電気部品53と、これら電気部品53間を接続するプリント配線(図示せず)が形成されている。プリント配線は、図示しない給電ラインによって圧電振動子30に接続されており、該圧電振動子30の圧電体層に対して駆動高電圧を供給する。   As shown in FIGS. 4 and 5, an electrical component 53 that controls power feeding to the piezoelectric vibrator 30 and a printed wiring (not shown) that connects the electrical components 53 are formed on the drive substrate 50. Yes. The printed wiring is connected to the piezoelectric vibrator 30 by a power supply line (not shown), and supplies a driving high voltage to the piezoelectric layer of the piezoelectric vibrator 30.

収納凹部18は、圧電振動子30の基準底面10Bに対する傾斜配置を利用して高さを確保した有ポートハウジング10の端部(吸入ポート31と吐出ポート32とは反対側の端部)に設けているため、有ポートハウジング10全体を高く(厚く)することなく、容易に大きな体積を確保することができる。また、収納凹部18の内端部は、少なくとも一部が圧電振動子30及びポンプ室13(23)と平面視重複する位置まで達していて、小型化が図られている。そして、このように、収納凹部18の内端部一部を、圧電振動子30及びポンプ室13(23)と平面視重複する位置まで延ばしても、圧電振動子30の基準底面10Bの傾斜配置によって、ポンプ室13(23)と収納凹部18を隔離する壁面18S(図6)の厚さを十分確保することができる。このため、薄型の有ポートハウジング10であってもUL規格を満足することができる。   The housing recess 18 is provided at the end of the ported housing 10 (the end opposite to the suction port 31 and the discharge port 32) that secures a height by using an inclined arrangement with respect to the reference bottom surface 10B of the piezoelectric vibrator 30. Therefore, a large volume can be easily secured without increasing (thickening) the entire ported housing 10. Further, at least a part of the inner end portion of the storage recess 18 reaches a position overlapping with the piezoelectric vibrator 30 and the pump chamber 13 (23) in plan view, so that the size is reduced. Thus, even if a part of the inner end portion of the storage recess 18 is extended to a position overlapping the piezoelectric vibrator 30 and the pump chamber 13 (23) in plan view, the reference bottom surface 10B of the piezoelectric vibrator 30 is inclined. Thus, it is possible to sufficiently secure the thickness of the wall surface 18S (FIG. 6) that separates the pump chamber 13 (23) and the storage recess 18 from each other. For this reason, even the thin port housing 10 can satisfy the UL standard.

さらに、図示実施形態では、有ポートハウジング10の収納凹部18の底壁18W(図6)の厚さ、及び圧電振動子30の径方向に沿う方向の無ポートハウジング20の壁面20Wの厚さを非均一(不均一)にしている。より具体的には、底壁18Wは収納凹部18の奥部に行くに従って厚さを増し、無ポートハウジング20の壁面20Wは、吸入ポート31と吐出ポート32に向けて厚さを増大させている。このように、ハウジングの壁面厚さを非均一にすることで、ポンプ運転時(圧電振動子30の振動時)の共振の可能性を少なくし、騒音の発生を防止することができる。   Furthermore, in the illustrated embodiment, the thickness of the bottom wall 18W (FIG. 6) of the housing recess 18 of the port housing 10 and the thickness of the wall surface 20W of the portless housing 20 in the direction along the radial direction of the piezoelectric vibrator 30 are set. Non-uniform (non-uniform). More specifically, the bottom wall 18 </ b> W increases in thickness as it goes deeper into the housing recess 18, and the wall surface 20 </ b> W of the non-port housing 20 increases in thickness toward the suction port 31 and the discharge port 32. . Thus, by making the wall thickness of the housing non-uniform, it is possible to reduce the possibility of resonance during pump operation (during vibration of the piezoelectric vibrator 30) and to prevent generation of noise.

本実施形態のドライバ内蔵4バルブ圧電ポンプは、有ポートハウジング10傾斜挟着面10Sと無ポートハウジング20の傾斜挟着面20Sとの間にOリング33を介して圧電振動子30を挟着し、有ポートハウジング10の吸入接続突起16Hと吐出接続突起16Dを、無ポートハウジング20の凹部26Hと26Dに嵌め、両者の吸入接続斜面16Haと26Haの間、及び吐出接続斜面16Daと26Daの間にそれぞれOリング27を挟着して組み立てるだけで、液密構造の4バルブ圧電ポンプを得ることができる。有ポートハウジング10と無ポートハウジング20の位置決めは、有ポートハウジング10に設けた位置決め穴19Aと、無ポートハウジング20に設けた位置決め突起19B(図5、図1、図7)によって行うことができる。   In the four-valve piezoelectric pump with a built-in driver according to this embodiment, the piezoelectric vibrator 30 is sandwiched between an inclined sandwiching surface 10S of the port housing 10 and the tilted sandwiching surface 20S of the portless housing 20 via an O-ring 33. The suction connection projection 16H and the discharge connection projection 16D of the port housing 10 are fitted into the recesses 26H and 26D of the non-port housing 20, and between the suction connection slopes 16Ha and 26Ha and between the discharge connection slopes 16Da and 26Da. A four-valve piezoelectric pump with a liquid-tight structure can be obtained simply by assembling the O-ring 27. Positioning of the port housing 10 and the non-port housing 20 can be performed by a positioning hole 19A provided in the port housing 10 and a positioning projection 19B (FIGS. 5, 1 and 7) provided in the non-port housing 20. .

また、有ポートハウジング10の収納凹部18には、無ポートハウジング20を結合する前に、制御基板50を挿入し、その給電端子を圧電振動子30の圧電体層に接続する。その後、有ポートハウジング10に無ポートハウジング20を結合すると、無ポートハウジング20の蓋部28が収納凹部18を閉塞し、UL規格を満足させる。蓋部28には、図4に示すように、電源供給ポート29が設けられている。   In addition, the control board 50 is inserted into the housing recess 18 of the port housing 10 before the non-port housing 20 is coupled, and the power supply terminal is connected to the piezoelectric layer of the piezoelectric vibrator 30. Thereafter, when the non-port housing 20 is coupled to the port housing 10, the lid portion 28 of the non-port housing 20 closes the housing recess 18, thereby satisfying the UL standard. As shown in FIG. 4, the lid 28 is provided with a power supply port 29.

以上の実施形態では、一対のハウジングの一方(有ポートハウジング10)に吸入ポート31と吐出ポート32の双方を設けたが、他方のハウジング(無ポートハウジング20)に両ポートを形成してポートを有する有ポートハウジングとしても良く、あるいはハウジング10とハウジング20にそれぞれ一つずつのポートを設け、双方のハウジングをポートを有する有ポートハウジングとすることもできる。その際のルールは、吸入側流路突起を有する側の有ポートハウジングに、吸入ポートを設け、吐出側流路突起を有する側の有ポートハウジングに、吐出ポートを設けるというルールである。   In the above embodiment, both the suction port 31 and the discharge port 32 are provided in one of the pair of housings (ported housing 10), but both ports are formed in the other housing (portless housing 20). It is also possible to provide a port housing having a port, or it is possible to provide one port for each of the housing 10 and the housing 20 and to make both housings a port housing having a port. The rule at that time is a rule that a suction port is provided in the ported housing on the side having the suction side flow passage projection, and a discharge port is provided in the ported housing on the side having the discharge side flow passage projection.

本発明によるドライバ内蔵4バルブ圧電ポンプを圧電ポンプに適用した実施形態を示す平面図である。It is a top view which shows embodiment which applied the 4-valve piezoelectric pump with a built-in driver by this invention to the piezoelectric pump. 同正面図である。It is the same front view. 同左側面図である。It is the left side view. 同右側面図である。It is the same right view. 図1のV-V線に沿う断面図である。It is sectional drawing which follows the VV line of FIG. 図1のVI-VI線に沿う断面図である。It is sectional drawing which follows the VI-VI line of FIG. 図5のVII-VII線に沿う断面を含む平面図である。It is a top view including the cross section which follows the VII-VII line of FIG. (A)、(B)は、ドライバ内蔵4バルブ圧電ポンプの原理を示すスケルトン図である。(A) and (B) are skeleton diagrams showing the principle of a driver-embedded four-valve piezoelectric pump.

符号の説明Explanation of symbols

10 有ポートハウジング
10B 基準底面
10S 20S 挟着面
11 12 21 22 逆止弁
13 ポンプ室
13a 凹部
14H 24H 吸入側流路
15D 25D 吐出側流路
16H 吸入接続突起
16D 吐出接続突起
16Ha 吸入接続斜面
16Da 吐出接続斜面
18 収納凹部
20 無ポートハウジング
23 ポンプ室
23a 凹部
26H 26D 凹部
26Ha 26Da 吸入側接続斜面
27 Oリング
28 蓋部
30 圧電振動子
31 吸入ポート
32 吐出ポート
33 Oリング
50 制御基板
DESCRIPTION OF SYMBOLS 10 Port housing 10B Reference | standard bottom face 10S 20S Clamping face 11 12 21 22 Check valve 13 Pump chamber 13a Recess 14H 24H Suction side flow path 15D 25D Discharge side flow path 16H Suction connection protrusion 16D Discharge connection protrusion 16Ha Suction connection slope 16Da Discharge Connection slope 18 Storage recess 20 Portless housing 23 Pump chamber 23a Recess 26H 26D Recess 26Ha 26Da Inlet side connection slope 27 O-ring 28 Lid 30 Piezoelectric vibrator 31 Suction port 32 Discharge port 33 O-ring 50 Control board

Claims (5)

ハウジング内に、その表裏にポンプ室を形成する圧電振動子と、該圧電振動子に対する給電制御用電気部品を搭載した制御基板を収納し、上記一対のポンプ室と単一の吸入ポートとの間にそれぞれ該吸入ポートから該一対のポンプ室への流体流を許容しその逆方向の流体流を許さない第一、第二の吸入側逆止弁を設け、上記一対のポンプ室と単一の吐出ポートとの間にそれぞれ該一対のポンプ室から吐出ポートへの流体流を許容しその逆方向の流体流を許さない第一、第二の吐出側逆止弁を設け、圧電振動子を振動させてポンプ作用を得るドライバ内蔵4バルブ圧電ポンプにおいて、
上記ハウジングを、圧電振動子を挟着する挟着面を有する一対のハウジングから構成し、
この一対のハウジングの一方のハウジングの一端部に、該ハウジングの基準底面と平行な方向に延びる上記吸入ポートと吐出ポートを突出させ、
この吸入ポートと吐出ポートを有する有ポートハウジングの上記挟着面を、吸入ポートと吐出ポートから離れるに従って、該基準底面から離れる方向に傾斜させて圧電振動子平面を基準底面に対して傾斜させ、
上記有ポートハウジングに、吸入ポートと吐出ポートの反対側の端部に位置させて、少なくとも一部が圧電振動子及びポンプ室と平面視重複する上記制御基板の収納空間を形成したことを特徴とするドライバ内蔵4バルブ圧電ポンプ。
In the housing, a piezoelectric vibrator that forms pump chambers on the front and back sides thereof and a control board on which electric parts for power supply control for the piezoelectric vibrator are mounted are housed between the pair of pump chambers and a single suction port. Are provided with first and second suction-side check valves that allow fluid flow from the suction port to the pair of pump chambers but do not allow fluid flow in the opposite direction. First and second discharge-side check valves that allow fluid flow from the pair of pump chambers to the discharge port and do not allow fluid flow in the opposite direction are provided between the discharge ports and the piezoelectric vibrator. In the 4-valve piezoelectric pump with a built-in driver to obtain
The housing is composed of a pair of housings having a sandwiching surface for sandwiching the piezoelectric vibrator,
The suction port and the discharge port extending in a direction parallel to the reference bottom surface of the housing are protruded from one end of one housing of the pair of housings,
Inclining the piezoelectric vibrator plane with respect to the reference bottom surface by inclining the clamping surface of the ported housing having the suction port and the discharge port away from the reference bottom surface as the distance from the suction port and the discharge port increases.
A housing space for the control board is formed in the ported housing at the end opposite to the suction port and the discharge port, and at least a part thereof overlaps the piezoelectric vibrator and the pump chamber in plan view. 4-valve piezoelectric pump with built-in driver.
請求項1記載のドライバ内蔵圧電ポンプにおいて、上記有ポートハウジングの制御基板収納空間を形成する壁面の肉厚は、非均一であるドライバ内蔵4バルブ圧電ポンプ。 2. The driver built-in piezoelectric pump according to claim 1, wherein the wall surface forming the control board housing space of the port housing has a non-uniform wall thickness. 請求項1または2記載のドライバ内蔵圧電ポンプにおいて、上記吸入ポートと吐出ポートを有しない無ポートハウジングは、その圧電振動子の径方向に沿う方向の壁面の肉厚が非均一であり、吸入ポートと吐出ポートに向けて肉厚を増大させているドライバ内蔵4バルブ圧電ポンプ。 3. The piezoelectric pump with a built-in driver according to claim 1, wherein the non-port housing without the suction port and the discharge port has a non-uniform wall thickness in a direction along a radial direction of the piezoelectric vibrator. And a 4-valve piezoelectric pump with a built-in driver that increases the wall thickness toward the discharge port. 請求項1ないし3のいずれか1項記載のドライバ内蔵4バルブ圧電ポンプにおいて、上記一対のハウジングはともに合成樹脂材料の成形品からなっているドライバ内蔵4バルブ圧電ポンプ。 4. The driver built-in four-valve piezoelectric pump according to claim 1, wherein both of the pair of housings are made of a synthetic resin material. 請求項1ないし4のいずれか1項記載のドライバ内蔵4バルブ圧電ポンプにおいて、圧電振動子は、導電性金属薄板からなる少なくとも一枚のシムと少なくとも一層の圧電体層との交互積層構造を有するドライバ内蔵4バルブ圧電ポンプ。 5. The four-valve piezoelectric pump with a built-in driver according to claim 1, wherein the piezoelectric vibrator has an alternately laminated structure of at least one shim made of a conductive metal thin plate and at least one piezoelectric layer. 4-valve piezoelectric pump with built-in driver.
JP2008094564A 2008-04-01 2008-04-01 4-valve piezoelectric pump with built-in driver Expired - Fee Related JP5000571B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111255667A (en) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 Piezoelectric actuating micro-driver of low-orbit satellite microfluidic system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07151060A (en) * 1993-11-29 1995-06-13 Tosoh Corp Piezoelectric pump
JP2007071099A (en) * 2005-09-07 2007-03-22 Alps Electric Co Ltd Diaphragm pump
JP2007120488A (en) * 2005-09-27 2007-05-17 Alps Electric Co Ltd Diaphragm pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07151060A (en) * 1993-11-29 1995-06-13 Tosoh Corp Piezoelectric pump
JP2007071099A (en) * 2005-09-07 2007-03-22 Alps Electric Co Ltd Diaphragm pump
JP2007120488A (en) * 2005-09-27 2007-05-17 Alps Electric Co Ltd Diaphragm pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111255667A (en) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 Piezoelectric actuating micro-driver of low-orbit satellite microfluidic system

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