JPH07151060A - Piezoelectric pump - Google Patents

Piezoelectric pump

Info

Publication number
JPH07151060A
JPH07151060A JP29787393A JP29787393A JPH07151060A JP H07151060 A JPH07151060 A JP H07151060A JP 29787393 A JP29787393 A JP 29787393A JP 29787393 A JP29787393 A JP 29787393A JP H07151060 A JPH07151060 A JP H07151060A
Authority
JP
Japan
Prior art keywords
piezoelectric
discharge port
packing
pump
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29787393A
Other languages
Japanese (ja)
Inventor
Toshihiko Okamura
敏彦 岡村
Hironari Osada
裕也 長田
Tomokazu Koike
知一 小池
Masayuki Kudo
正行 工藤
Toshihito Kuramochi
豪人 倉持
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP29787393A priority Critical patent/JPH07151060A/en
Publication of JPH07151060A publication Critical patent/JPH07151060A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To facilitate elimination of air inside a pump chamber in the case that driving is started from the vacant condition by fixing an outer peripheral part of a piezoelectric vibrator by means of a casing provided with a packing, and providing the piezoelectric vibrator with downward inclination from the discharge port side to the suction port side. CONSTITUTION:A piezoelectric vibrator 3 in a piezoelectric pump is prepared by applying electrodes on both surfaces of piezoelectric bodies, applying them to each other with their electrodes being trued up through phosphor bronze plates, and providing a lead wire for an ac current thereto. The piezoelectric vibrator 3 is sealed and supported by the inner peripheral surface of a casing through a fixing packing 4. The casing has a suction port 6 and a discharge port 6', respectively provided with check valves 2, 2'. In such a piezoelectric pump, a portion of an outer peripheral part of the discharge port 6' nearest the packing 4 is formed on a position located by 1mm from an inner end of the packing. A pump chamber has inclination of substantially four degrees, which chamber is prepared by the casing, the piezoelectric vibrator 3 and the fixing packing 4. The side of the discharge port 6 is et higher.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、医療機器、産業機器、
理化学機器等に用いられる圧電ポンプに関する。
The present invention relates to medical equipment, industrial equipment,
The present invention relates to a piezoelectric pump used for physics and chemistry equipment.

【0002】[0002]

【従来の技術】図1は従来の圧電ポンプの構造を示す断
面図である。この圧電ホンプは、ケ−シング1の内周面
に設けた固定用パッキン4を介して圧電振動子3の外周
部を密封支持し、この圧電振動子に交流電圧を印加して
該圧電振動子を振動させることにより、流体を吸込口6
より吸込用チェック弁2を通してポンプ室内に吸い込
み、このポンプ室内に吸い込んだ流体を吐出用チェック
弁2´を通して吐出口6´より流出する構成になってい
る。また、吸込口6/吐出口6´は、圧電振動子の振動
の最も大きな中央部に近い位置に取り付けられている。
2. Description of the Related Art FIG. 1 is a sectional view showing the structure of a conventional piezoelectric pump. The piezoelectric hoop hermetically supports the outer peripheral portion of the piezoelectric vibrator 3 through a packing 4 for fixing provided on the inner peripheral surface of the casing 1, and applies an alternating voltage to the piezoelectric vibrator to apply the piezoelectric vibrator. By vibrating the suction port 6
Further, the suction check valve 2 is sucked into the pump chamber, and the fluid sucked into the pump chamber is discharged from the discharge port 6'through the discharge check valve 2 '. Further, the suction port 6 / discharge port 6'is attached to a position close to the central portion where the vibration of the piezoelectric vibrator is largest.

【0003】[0003]

【発明が解決しようとする課題】上記の従来ポンプでは
ケ−シング、圧電振動子および固定用パッキンから囲ま
れて作られるポンプ室内に空気等のガスが溜まる可能性
が高い。これは、ある程度まで空気が抜けると吸込口か
ら入ってきた流体が吐出口から吐出され、これ以降は空
気が溜まったままの状態で送液されるからである。この
ようにして、ポンプ室に空気が溜まるとポンプ特性であ
る吐出圧力が著しく低下するという問題を生じる。
In the above conventional pump, gas such as air is likely to be accumulated in the pump chamber surrounded by the casing, the piezoelectric vibrator and the fixing packing. This is because when the air escapes to a certain extent, the fluid that has entered through the suction port is discharged through the discharge port, and thereafter, the fluid is sent in a state where the air remains accumulated. In this way, when air is accumulated in the pump chamber, there arises a problem that the discharge pressure, which is a pump characteristic, is significantly reduced.

【0004】[0004]

【課題を解決するための手段】このような問題を解決す
るために、本発明者は鋭意検討した結果、本発明を完成
するに至った。
In order to solve such a problem, the inventor of the present invention has made extensive studies, and as a result, completed the present invention.

【0005】すなわち、本発明は、圧電振動子の外周部
をその振動子の径にあったパッキンを取り付けたケ−シ
ングで挟みこみ固定し、そのケ−シングの片側に流体吸
い込み口および流体吐出口を設け、これら各々に吸い込
み用、吐出用チェック弁を設けてなる圧電ポンプにおい
て、上記ケ−シングに取り付けられた吐出口の最も固定
用パッキンに近い位置が、固定用パッキン内端から5m
m以内に取り付けられ、圧電振動子が吐出口側から吸込
口側に向かって、2°以上の下方傾斜をもって設けられ
ていることを特徴とする圧電ポンプに関する。
That is, according to the present invention, the outer peripheral portion of the piezoelectric vibrator is sandwiched and fixed by a casing having a packing having a diameter corresponding to the vibrator, and a fluid suction port and a fluid discharge port are provided on one side of the casing. In a piezoelectric pump having outlets and suction and discharge check valves provided at the respective outlets, the position of the discharge port attached to the casing closest to the fixing packing is 5 m from the inner end of the fixing packing.
The present invention relates to a piezoelectric pump, wherein the piezoelectric vibrator is mounted within m and is provided with a downward inclination of 2 ° or more from a discharge port side toward a suction port side.

【0006】さらに本発明を詳しく説明する。The present invention will be further described in detail.

【0007】ポンプの吐出口はできるだけ固定用パッキ
ンに近いほうが好ましい。望ましくはポンプの吐出口の
外周部の最も固定用パッキンに近い位置を、固定用パッ
キンの内端の0〜5mm以内に取り付けるのがよい。吐
出口の外周部の最も固定用パッキンに近い位置を固定用
パッキンの内端の5mmより遠い位置に設けると、ポン
プ室内を空の状態から駆動したとき、空気が吐出口と固
定用パッキンとの間に溜り、該パッキンから遠ざかるに
従い溜まる空気の量も増え、空気を除去するのも困難と
なる。
The discharge port of the pump is preferably as close to the fixing packing as possible. Desirably, the outermost portion of the discharge port of the pump is attached to a position closest to the fixing packing within 0 to 5 mm from the inner end of the fixing packing. When the position closest to the fixing packing on the outer peripheral portion of the discharge port is provided at a position farther than 5 mm at the inner end of the fixing packing, when the pump chamber is driven from an empty state, air is discharged between the discharge port and the fixing packing. The amount of air that accumulates in the gap increases with distance from the packing, making it difficult to remove the air.

【0008】また、圧電振動子を吐出口側から吸込口側
に向かって、2°以上の下方傾斜をもって設けることが
好ましい。傾斜をもたせない状態では、ポンプ室内を空
の状態から駆動したとき、空気が抜ける前に流体が吐出
口に流れ込んでしまい、空気が残存してしまう。
Further, it is preferable that the piezoelectric vibrator is provided with a downward inclination of 2 ° or more from the discharge port side toward the suction port side. In the state where the pump chamber is not inclined, when the pump chamber is driven from an empty state, the fluid flows into the discharge port before the air escapes, and the air remains.

【0009】また、吸込口の径は3mm以上が望まし
い。径がそれ未満だと吸い込んだ流体の勢いによって泡
立ってしまい、空気の残存につながる。また、各口に設
けるチェック弁としてはダックビル型、アンブレラ型等
を用いることができる。
The diameter of the suction port is preferably 3 mm or more. If the diameter is less than that, bubbles will be generated due to the force of the sucked fluid, and air will remain. A duck bill type, an umbrella type, or the like can be used as the check valve provided at each port.

【0010】圧電振動子を構成する圧電体としては、セ
ラミックス系、有機系のものが使用でき、具体的には、
セラミックス系ではチタン酸鉛、チタン酸ジルコン酸鉛
等、有機系ではポリフッ化ビニリデン等が挙げられる。
より好ましくは、誘電率3000以上、電気機械結合係
数Kp50%以上の圧電板を金属板を介してその両側に
分極方向を揃えて接着し、直径が30〜70mm、振動
子の厚さが1.3〜2.0mm、静電容量が150〜2
00nFの特性をもつものがよい。これらの圧電振動子
は電気的に絶縁とするため、その表面にエポキシ樹脂等
の絶縁塗料を塗布してもよい。
As the piezoelectric body constituting the piezoelectric vibrator, ceramic type or organic type can be used. Specifically,
Examples of the ceramic type include lead titanate and lead zirconate titanate, and examples of the organic type include polyvinylidene fluoride.
More preferably, a piezoelectric plate having a dielectric constant of 3000 or more and an electromechanical coupling coefficient of Kp50% or more is bonded to both sides of the metal plate with the polarization directions aligned, and the diameter is 30 to 70 mm and the thickness of the vibrator is 1. 3 to 2.0 mm, capacitance is 150 to 2
It is preferable to have a characteristic of 00 nF. Since these piezoelectric vibrators are electrically insulated, an insulating coating material such as epoxy resin may be applied to the surface thereof.

【0011】[0011]

【実施例】以下、本発明を実施例を用いて説明する。EXAMPLES The present invention will be described below with reference to examples.

【0012】図2は本発明の圧電ポンプの一実施例を示
す断面図である。図2において、圧電振動子3は、固定
用パッキン4を介してケ−シング1内周面に密封支持さ
れている。本実施例においては空気の動きを見るために
ケ−シングにアクリルなどの透明な材質を用いた。圧電
振動子3は圧電体の両面に電極を塗布し、リン青銅の金
属板を介して分極方向を揃えて貼り合わせたものに、交
流電圧を印加するためのリ−ド線5を取り付けたものか
らなる。
FIG. 2 is a sectional view showing an embodiment of the piezoelectric pump of the present invention. In FIG. 2, the piezoelectric vibrator 3 is hermetically supported on the inner peripheral surface of the casing 1 via a packing 4 for fixing. In this embodiment, a transparent material such as acrylic is used for the casing to observe the movement of air. The piezoelectric vibrator 3 is one in which electrodes are applied on both sides of a piezoelectric body and the polarization directions are aligned and bonded via a phosphor bronze metal plate, and a lead wire 5 for applying an AC voltage is attached to the piezoelectric vibrator 3. Consists of.

【0013】ところで、本発明において圧電振動子のサ
イズ等は使用する流体により適宜選択することができ
る。ここでは、Pb,Zr,Ti,Laからなる複合酸
化物を焼結して機械加工を施した、誘電率3900、電
気機械結合係数Kp62%の圧電素子2枚をリン青銅板
を介して接着したものを用いた。直径50mmφ、厚み
1.5mm、静電容量は180nFであった。
By the way, in the present invention, the size and the like of the piezoelectric vibrator can be appropriately selected depending on the fluid used. Here, two piezoelectric elements having a permittivity of 3900 and an electromechanical coupling coefficient of Kp62%, which are machined by sintering a composite oxide composed of Pb, Zr, Ti, and La, are bonded via a phosphor bronze plate. I used one. The diameter was 50 mmφ, the thickness was 1.5 mm, and the capacitance was 180 nF.

【0014】ケ−シングには吸込口6と吐出口6´が設
けられ、それぞれには吸込用チェック弁2、吐出用チェ
ック弁2´が取り付けられている。
A suction port 6 and a discharge port 6'are provided in the casing, and a suction check valve 2 and a discharge check valve 2'are attached to each of them.

【0015】本実施例では、吐出口外周部の最も固定用
パッキンに近い位置が固定用パッキン内端の1mmの所
に取り付け、ケ−シング、圧電振動子および固定用パッ
キンから囲まれて作られるポンプ室に4°の傾斜を持た
せ、吐出口側が高くなるような構造にしてある。
In this embodiment, the outermost peripheral portion of the discharge port is attached to the innermost end of the fixing packing at a position 1 mm closest to the fixing packing, and is surrounded by the casing, the piezoelectric vibrator and the fixing packing. The pump chamber has an inclination of 4 ° so that the discharge port side is higher.

【0016】このポンプをポンプ室が空の状態から駆動
し、水を流入させたときの固定用パッキン内周部の空気
の抜け方を観察した。その結果を図3に示す。なお、以
下、図3〜図6において、水の存在する部分を斜線で、
空気が残存している部分を白ぬきで表す。
The pump was driven from a state where the pump chamber was empty, and the way of air escape from the inner peripheral portion of the fixing packing when water was introduced was observed. The result is shown in FIG. In addition, hereinafter, in FIG. 3 to FIG. 6, a portion where water exists is hatched,
The part where the air remains is shown in white.

【0017】比較例1 吐出口外周部の最も固定用パッキンに近い位置が固定用
パッキン内端の20mmの所に設け、ポンプ室に傾斜を
もたせない構造としたほかは、すべて実施例と同様にし
た。この圧電ポンプを駆動させ、水を流入させたときの
空気の抜け方を観察した。その結果を図4に示す。
COMPARATIVE EXAMPLE 1 All the same as in the example except that the outermost peripheral portion of the discharge port was located 20 mm inside the fixing packing at the position closest to the fixing packing, and the pump chamber was not inclined. did. The piezoelectric pump was driven to observe how air escaped when water was introduced. The result is shown in FIG.

【0018】比較例2 吐出口外周部の最も固定用パッキンに近い位置が固定用
パッキン内端の20mmの所に設け、ポンプ室に20度
の傾斜を持たせ吐出口側が高くなるような構造としたほ
かは、すべて実施例と同様にした。この圧電ポンプを駆
動させ、水を流入させたときの空気の抜け方を観察し
た。その結果を図5に示す。
COMPARATIVE EXAMPLE 2 A structure in which the position closest to the fixing packing on the outer peripheral portion of the discharge port is provided 20 mm inside the fixing packing, and the pump chamber is inclined at 20 degrees to increase the discharge port side. Except that, all were the same as in the example. The piezoelectric pump was driven to observe how air escaped when water was introduced. The result is shown in FIG.

【0019】比較例3 吐出口外周部の最も固定用パッキンに近い位置が固定用
パッキン内端の1mmの所に設け、ポンプ室に傾斜をも
たせない構造としたほかは、すべて実施例と同様にし
た。この圧電ポンプを駆動させ、水を流入させたときの
空気の抜け方を観察した。その結果を図6に示す。
Comparative Example 3 All were the same as in the example except that the outermost peripheral portion of the discharge port was provided at a position 1 mm from the inner end of the fixing packing closest to the fixing packing, and the pump chamber was not inclined. did. The piezoelectric pump was driven to observe how air escaped when water was introduced. The result is shown in FIG.

【0020】[0020]

【発明の効果】本発明の圧電ポンプによれば、ポンプ室
内が空の状態から駆動し始めても、ポンプ室内に溜った
空気を除去することができ、吐出圧力、吐出量の低下を
防ぐことが可能となった。
According to the piezoelectric pump of the present invention, the air accumulated in the pump chamber can be removed even when driving is started from an empty state in the pump chamber, and the discharge pressure and the discharge amount can be prevented from lowering. It has become possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】 従来の圧電ポンプの構造を示す縦断面図であ
る。
FIG. 1 is a vertical cross-sectional view showing the structure of a conventional piezoelectric pump.

【図2】 本発明の圧電ポンプの構造をを示す縦断面図
である。
FIG. 2 is a vertical cross-sectional view showing the structure of the piezoelectric pump of the present invention.

【図3】 実施例において、ポンプ室内に空気が残存す
る状態からポンプを駆動させ、ここに水を流入したとき
のポンプ室の空気の残存状態を模式的に示す図である。
FIG. 3 is a diagram schematically showing the remaining state of air in the pump chamber when the pump is driven from the state where air remains in the pump chamber and water flows into the pump chamber in the embodiment.

【図4】 比較例1において、ポンプ室内に空気が残存
する状態からポンプを駆動させ、ここに水を流入したと
きのポンプ室の空気の残存状態を模式的に示す図であ
る。
FIG. 4 is a diagram schematically showing a remaining state of air in the pump chamber when water is flown into the pump by driving the pump in a state where air remains in the pump chamber in Comparative Example 1.

【図5】 比較例2において、ポンプ室内に空気が残存
する状態からポンプを駆動させ、ここに水を流入したと
きのポンプ室の空気の残存状態を模式的に示す図であ
る。
FIG. 5 is a diagram schematically showing a remaining state of air in the pump chamber when water is flown into the pump by driving the pump from a state where air remains in the pump chamber in Comparative Example 2;

【図6】 比較例3において、ポンプ室内に空気が残存
する状態からポンプを駆動させ、ここに水を流入したと
きのポンプ室の空気の残存状態を模式的に示す図であ
る。
FIG. 6 is a diagram schematically showing a remaining state of air in the pump chamber when water is flown into the pump by driving the pump in a state where air remains in the pump chamber in Comparative Example 3;

【符号の説明】[Explanation of symbols]

1 : ケ−シング 2 : 吸込用チェック弁 2´: 吐出用チェック弁 3 : 圧電振動子 4 : 固定用パッキン 5 : リ−ド線 6 : 吸込口 6´: 吐出口 1: Casing 2: Suction check valve 2 ': Discharge check valve 3: Piezoelectric vibrator 4: Fixing packing 5: Lead wire 6: Suction port 6': Discharge port

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電振動子の外周部をその振動子の径に
あったパッキンを取り付けたケ−シングで挟みこみ固定
し、そのケ−シングの片側に流体吸い込み口および流体
吐出口を設け、これら各々に吸い込み用、吐出用チェッ
ク弁を設けてなる圧電ポンプにおいて、 上記ケ−シングに取り付けられた吐出口の最も固定用パ
ッキンに近い位置が、固定用パッキン内端から5mm以
内に取り付けられ、圧電振動子が吐出口側から吸込口側
に向かって、2°以上の下方傾斜をもって設けられてい
ることを特徴とする圧電ポンプ。
1. A piezoelectric vibrator is fixed by sandwiching the outer peripheral portion of the piezoelectric vibrator with a casing fitted with a packing suitable for the diameter of the piezoelectric oscillator, and providing a fluid suction port and a fluid discharge port on one side of the casing. In a piezoelectric pump provided with a suction and discharge check valve for each of these, a position of the discharge port attached to the casing closest to the fixing packing is attached within 5 mm from the inner end of the fixing packing, A piezoelectric pump, wherein the piezoelectric vibrator is provided with a downward inclination of 2 ° or more from the discharge port side toward the suction port side.
JP29787393A 1993-11-29 1993-11-29 Piezoelectric pump Pending JPH07151060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29787393A JPH07151060A (en) 1993-11-29 1993-11-29 Piezoelectric pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29787393A JPH07151060A (en) 1993-11-29 1993-11-29 Piezoelectric pump

Publications (1)

Publication Number Publication Date
JPH07151060A true JPH07151060A (en) 1995-06-13

Family

ID=17852233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29787393A Pending JPH07151060A (en) 1993-11-29 1993-11-29 Piezoelectric pump

Country Status (1)

Country Link
JP (1) JPH07151060A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001066947A1 (en) * 2000-03-06 2001-09-13 Hitachi, Ltd. Liquid feeding device and analyzing device using the device
JP2009250028A (en) * 2008-04-01 2009-10-29 Alps Electric Co Ltd 4-valve piezoelectric pump with built-in driver
US7749444B2 (en) 2004-05-13 2010-07-06 Konica Minolta Sensing, Inc. Microfluidic device, method for testing reagent and system for testing reagent
CN111255667A (en) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 Piezoelectric actuating micro-driver of low-orbit satellite microfluidic system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001066947A1 (en) * 2000-03-06 2001-09-13 Hitachi, Ltd. Liquid feeding device and analyzing device using the device
US7749444B2 (en) 2004-05-13 2010-07-06 Konica Minolta Sensing, Inc. Microfluidic device, method for testing reagent and system for testing reagent
JP2009250028A (en) * 2008-04-01 2009-10-29 Alps Electric Co Ltd 4-valve piezoelectric pump with built-in driver
CN111255667A (en) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 Piezoelectric actuating micro-driver of low-orbit satellite microfluidic system

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