JP2009248551A - Substrate position and angle correction device in screen printing machine - Google Patents

Substrate position and angle correction device in screen printing machine Download PDF

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JP2009248551A
JP2009248551A JP2008103193A JP2008103193A JP2009248551A JP 2009248551 A JP2009248551 A JP 2009248551A JP 2008103193 A JP2008103193 A JP 2008103193A JP 2008103193 A JP2008103193 A JP 2008103193A JP 2009248551 A JP2009248551 A JP 2009248551A
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substrate
substrates
angle
axis direction
printing table
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JP5053913B2 (en
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Takehiko Murakami
武彦 村上
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Minami Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce costs by simplifying a substrate position and angle correction means with respect to a mask. <P>SOLUTION: All of the substrates 3 held on a printing table 1 are pushed up concurrently by lower suckers 5. The moving frame 7 of a positioning unit 6 is moved, and the position and angle confirmation marks 3a, 3a marked on the substrates 3 are read by a camera equipment 8. A displacement determination device 9 confirms the positions and angles of the substrates 3 according to the position and angle confirmation marks 3a, 3a of the substrates 3 read by the camera equipment 8 and determines the degree of displacement by checking them against an appropriate position and angle not causing printing displacement corresponding to a predetermined mask. With the substrates 3 sucked and lifted by an upper sucker 10, operation for correcting displacement in an X-axis direction, a Y-axis direction and a θ-direction is performed based on a result determined by the displacement determination device 9. After the forgoing process is applied to all of the substrates 3, printing is performed simultaneously on all of the substrates 3. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、スクリーン印刷機における基板の位置及び角度補正装置に関するものである。   The present invention relates to a substrate position and angle correction device in a screen printing machine.

スクリーン印刷機は、マスク上のペースト状印刷材をスキージによってマスクのマスク孔から押し出し、基板に所定のパターンを印刷するものである。そして、基板の所定位置に正確にパターンを印刷するためには、マスクに対する基板の位置及び角度が正確でなければならない。   The screen printer presses a paste-like printing material on a mask from a mask hole of the mask with a squeegee and prints a predetermined pattern on a substrate. And in order to print a pattern correctly on the predetermined position of a board | substrate, the position and angle of a board | substrate with respect to a mask must be exact.

このために、スクリーン印刷機においては、基板の上面に表示された位置及び角度確認用マークを読み取るためのカメラ装置と、基板を支持すると共にX軸方向、Y軸方向、Z軸方向の移動とθ方向の回転を行う基板支持台とが備えられている。   Therefore, in the screen printing machine, a camera device for reading the position and angle confirmation marks displayed on the upper surface of the substrate, and the movement in the X-axis direction, the Y-axis direction, and the Z-axis direction while supporting the substrate. and a substrate support that rotates in the θ direction.

ところで、基板の位置及び角度を適正な位置及び角度に補正するには、斯かる基板支持台をもって基板を動かすことによって行うが、例えば特開2001−62995号公開公報(特許文献1)の図2(本願の図8)に示す如く、基板支持台100は、上面の所定箇所に位置及び角度確認用マーク101a、101aを表示した基板101を図示しないコンベアから受け取って支持する支持枠102と、該支持枠102を基板の進行方向(X軸方向)及びこれと直交する方向(Y軸方向)、垂直方向(Z軸方向)に移動させると共に水平方向(θ方向)にも回転させる移動支持台103とかなるものであり、そして該移動支持台103は駆動源として3個のサーボモータを必要とすることからコストが高くつくという問題点があった。尚、図8において104はマスク、105はマスク孔、106はマスク枠、107はスキージである。また、カメラ装置は図示を省略している。   By the way, in order to correct the position and angle of the substrate to an appropriate position and angle, it is performed by moving the substrate with such a substrate support. For example, FIG. 2 of Japanese Patent Laid-Open No. 2001-62995 (Patent Document 1). As shown in FIG. 8 of the present application, the substrate support base 100 includes a support frame 102 that receives and supports a substrate 101 displaying position and angle confirmation marks 101a, 101a at predetermined positions on the upper surface from a conveyor (not shown), A movable support base 103 that moves the support frame 102 in the substrate traveling direction (X-axis direction), the direction orthogonal to the substrate (Y-axis direction), the vertical direction (Z-axis direction), and the horizontal direction (θ direction). In addition, since the movable support base 103 requires three servo motors as a driving source, there is a problem that the cost is high. In FIG. 8, 104 is a mask, 105 is a mask hole, 106 is a mask frame, and 107 is a squeegee. The camera device is not shown.

特開2001−62995号公開公報JP 2001-62995 A

また、スクリーン印刷機においてはチップ状に個片化された基板を搬送トレーに整列して保持させ、該搬送トレーを印刷テーブル上に整列して保持し、各搬送トレーの夫々の基板を同時に印刷する場合があり、図9乃至図12にはその場合を示している。   In a screen printing machine, substrates separated into chips are held in alignment on a transfer tray, the transfer tray is aligned and held on a printing table, and each substrate in each transfer tray is printed simultaneously. FIG. 9 to FIG. 12 show such a case.

110はスクリーン印刷機における印刷テーブルである。111はチップ状に個片化された基板であり、上面の所定箇所に位置及び角度確認用マーク111a、111aを表示している。112は前記チップ状に個片化された基板111を整列させて保持する搬送トレーであり、上面の適所に所定の間隔で基板受容凹部113を設けている。   Reference numeral 110 denotes a print table in the screen printer. Reference numeral 111 denotes a substrate that is separated into chips, and displays position and angle confirmation marks 111a and 111a at predetermined positions on the upper surface. Reference numeral 112 denotes a transport tray for aligning and holding the substrates 111 separated into chips, and substrate receiving recesses 113 are provided at predetermined intervals on the upper surface.

114は前記印刷テーブル110の上面の適所に所定の間隔で配設された、4個一組の可動受け台114Aと、該可動受け台114Aの中央下部に設置された吸着装置114Bとからなる治具であり、前記搬送トレー112の夫々を整列して保持するものである。また、該可動受け台114Aは、夫々が軸114aを回動支点として所定のタイミングで内外方向に回動し、前後左右の外側から挟み込むようにして前記搬送トレー112を保持するものである。そしてこのとき搬送トレー112は該可動受け台114Aの内側の段部114bに受け支えられるものである。また、前記吸着装置114Bは、所定のタイミングで上昇し、前記可動受け台114Aに受け支えられた搬送トレー112の下面を吸着するものである。   Reference numeral 114 denotes a cure comprising a set of four movable cradles 114A disposed at appropriate positions on the upper surface of the printing table 110, and a suction device 114B installed at the lower center of the movable cradle 114A. It is a tool and holds each of the transport trays 112 in alignment. The movable cradle 114A holds the transport tray 112 so as to rotate inward and outward at a predetermined timing with the shaft 114a as a rotation fulcrum, and sandwiched from the front, rear, left and right sides. At this time, the transport tray 112 is supported and supported by the step portion 114b inside the movable receiving base 114A. The suction device 114B is lifted at a predetermined timing and sucks the lower surface of the transport tray 112 supported and supported by the movable receiving base 114A.

ところで、チップ状に個片化された基板111は、搬送トレー112の基板受容凹部113のサイズに合わせて作られるが、チップ状に個片化する際の工程でバラツキが出て全てが同一のサイズではない。±20μm程度の違いが出る。このため、基板111によっては搬送トレー112の各基板受容凹部113内において遊びが生じ、搬送トレー112の基板受容凹部113の中心位置に且つ正しい角度になっていない場合が生じる。即ち、X軸方向、Y軸方向、θ方向にズレる場合がある。例えば図12に示す如く、基板111が基板受容凹部113内においてその中心が図上右側や右の上下側にずれたり(aの場合)、或いは図上左側や左の上下側にずれたり(bの場合)、更には傾いた状態となったり(cの場合)するものが出る。そして、この状態において一つの搬送トレー112における全ての基板111に同時に印刷すると、基板111によってはマスクに対する位置が適正でないため正規の位置からずれた位置に印刷されたり、向きがずれたり、印刷ムラが生じたりすることになる。このため、従来この点の改善が要望されていたが、これを具体化した例はなく、且つ特許文献にも見当たらない。   By the way, the substrate 111 divided into chips is made in accordance with the size of the substrate receiving recess 113 of the transport tray 112. However, there is variation in the process of dividing into chips and all are the same. It's not size. A difference of about ± 20μm appears. For this reason, depending on the substrate 111, play occurs in each of the substrate receiving recesses 113 of the transport tray 112, and the center position of the substrate receiving recess 113 of the transport tray 112 may not be at the correct angle. That is, there are cases in which there is a shift in the X-axis direction, the Y-axis direction, or the θ direction. For example, as shown in FIG. 12, the center of the substrate 111 in the substrate receiving recess 113 is shifted to the upper right or left side in the drawing (in the case of “a”), or is shifted to the upper left or right side in the drawing (b). In the case of c), there is a further tilted state (in the case of c). In this state, if all the substrates 111 in one transport tray 112 are simultaneously printed, depending on the substrate 111, the position with respect to the mask may not be appropriate, so that printing may be performed at a position shifted from the normal position, the orientation may be shifted, or printing unevenness may occur. Will occur. For this reason, there has been a demand for improvement in this respect, but there is no example in which this is realized, and there is no patent document.

本発明は上記の点に鑑みなされたものであって、マスクに対する基板の位置及び角度の補正手段を、従来より簡略化した構成とし、もって大幅なコストの軽減を図ることができると共に、チップ状に個片化された基板を搬送トレーに整列して保持させ、該搬送トレーを印刷テーブル上に整列して保持し、各搬送トレーの夫々の基板を同時に印刷する場合にも対応することができるようになしたスクリーン印刷機における基板の位置及び角度補正装置を提供しようとするものである。   The present invention has been made in view of the above points, and the correction means for the position and angle of the substrate with respect to the mask has a simpler structure than the conventional one, so that the cost can be greatly reduced and the chip shape can be reduced. It is possible to cope with the case where the separated substrates are aligned and held on the transport tray, the transport tray is aligned and held on the printing table, and the respective substrates of each transport tray are printed simultaneously. An object of the present invention is to provide an apparatus for correcting the position and angle of a substrate in a screen printing machine.

而して、本発明の要旨とするところは、上面の所定箇所に位置及び角度確認用マークを表示した基板を保持する印刷テーブルにおける前記基板の直下位置に設置した、真空装置に接続し、適宜のタイミングで上昇して前記基板を押し上げると共に適宜のタイミングで前記基板の吸引、停止を行う下部吸着装置と、前記印刷テーブル上において所定のタイミングで前記基板上に移動する移動架台と、前記移動架台に設置し、前記基板に表示した位置及び角度確認用マークを読み取るカメラ装置と、前記カメラ装置で読み取った基板の位置及び角度確認用マークから基板の位置及び角度を確認し、予め設定されたマスクと対応する適正位置及び角度と照合してズレの程度を判定するズレ判定装置と、前記移動架台に設置し、適宜のタイミングで昇降して前記基板の吸引、停止を行うと共に基板を吸引して上昇した状態において前記ズレ判定装置による判定結果を基にX軸方向、Y軸方向、θ方向のズレ補正動作を行う上部吸着装置とをもって構成した位置決めユニットとからなるスクリーン印刷機における基板の位置及び角度補正装置にある。   Thus, the gist of the present invention is that it is connected to a vacuum device installed at a position directly below the substrate in a printing table that holds the substrate on which the position and angle confirmation marks are displayed at predetermined positions on the upper surface. A lower suction device that pushes up the substrate by raising the timing and sucks and stops the substrate at an appropriate timing, a moving gantry that moves onto the substrate at a predetermined timing on the printing table, and the moving gantry A camera device that reads the position and angle confirmation marks displayed on the substrate, and confirms the position and angle of the substrate from the substrate position and angle confirmation marks read by the camera device, and sets a mask in advance. And a deviation determination device that determines the degree of deviation by comparing with the appropriate position and angle corresponding to the An upper suction device that performs the displacement correction operation in the X-axis direction, the Y-axis direction, and the θ-direction based on the determination result by the displacement determination device in a state where the substrate is sucked and stopped and the substrate is sucked and raised. And a position and angle correction device for a substrate in a screen printing machine.

また、上記構成において、複数の基板に同時に印刷する場合には、印刷テーブルに複数の基板を所定の間隔で整列して保持し、移動架台を前記複数の基板の間隔に合わせたストロークでX軸方向及びY軸方向に移動可能とするものである。   In the above configuration, when printing on a plurality of substrates at the same time, the plurality of substrates are aligned and held on the printing table at a predetermined interval, and the moving frame is moved along the X axis with a stroke that matches the interval between the plurality of substrates. It is possible to move in the direction and the Y-axis direction.

また、上記複数の基板に同時に印刷する場合であって、印刷テーブルに複数の基板を所定の間隔で整列して保持するようになすには、印刷テーブルに、コンベアから基板を受け取って支持する複数の基板支持枠を所定の間隔で整列して設けるか、或いは中央部を貫通孔とした複数の基板受容凹部を所定間隔で整列して設けた搬送トレーにおける前記基板受容凹部に基板を受容し、該搬送トレーを介して行うものである。   Further, in the case of simultaneously printing on the plurality of substrates, in order to keep the plurality of substrates aligned and held at a predetermined interval on the printing table, the plurality of substrates receiving and supporting the substrates from the conveyor on the printing table. The substrate support frame is arranged at a predetermined interval, or a substrate is received in the substrate receiving recess in a transfer tray provided with a plurality of substrate receiving recesses having a through hole at the center portion at a predetermined interval, It is performed through the transport tray.

本発明は、上記の如き構成であり、マスクに対する基板の位置及び角度の補正手段を、従来より簡略化した構成としたから、大幅なコストの軽減を図ることができるものである。加えてチップ状に個片化された基板を搬送トレーに整列して保持させ、該搬送トレーを印刷テーブル上に整列して保持し、各搬送トレーの夫々の基板を同時に印刷する場合にも対応することができるものである。   The present invention is configured as described above, and the means for correcting the position and angle of the substrate with respect to the mask has been simplified as compared with the prior art, so that significant cost reduction can be achieved. In addition, the substrate separated into chips can be aligned and held on the transport tray, the transport tray can be aligned and held on the printing table, and each substrate on each transport tray can be printed simultaneously. Is something that can be done.

以下、本発明に係るスクリーン印刷機における基板の位置及び角度補正装置を実施するための最良の形態について、図面を参照して説明する。   The best mode for carrying out a substrate position and angle correction apparatus in a screen printing machine according to the present invention will be described below with reference to the drawings.

図1は本発明に係るスクリーン印刷機における基板の位置及び角度補正装置の第1実施形態の概略的説明図、図2は要部の拡大斜視図、図3は位置決めユニットを省略して示した平面図、図4は作用説明図である。   FIG. 1 is a schematic explanatory view of a first embodiment of a substrate position and angle correction device in a screen printing machine according to the present invention, FIG. 2 is an enlarged perspective view of a main part, and FIG. FIG. 4 is a plan view and FIG.

本実施形態は、複数の基板に同時に印刷する場合であって、印刷テーブルに複数の基板を所定の間隔で整列して保持する場合である。尚、個々の基板ごとに印刷を行う場合にも対応することができるが、略同様の構成、作用であるから説明は省略する。   In the present embodiment, printing is performed on a plurality of substrates at the same time, and the plurality of substrates are aligned and held at a predetermined interval on a printing table. Although it is possible to cope with the case where printing is performed for each individual substrate, the description is omitted because the configuration and operation are substantially the same.

而して、本実施形態は、印刷テーブル1の上面にコンベア(図示せず。)から基板を受け取って支持する複数の基板支持枠2、2、2を所定の間隔で整列して設けている。また基板3は、その上面の所定箇所に位置及び角度確認用マーク3a、3aを表示している。   Thus, in this embodiment, a plurality of substrate support frames 2, 2, 2 that receive and support a substrate from a conveyor (not shown) are arranged on the upper surface of the printing table 1 at predetermined intervals. . The substrate 3 displays position and angle confirmation marks 3a and 3a at predetermined positions on the upper surface thereof.

4は基板の位置及び角度補正装置である。また、該基板の位置及び角度補正装置4は、前記基板3を前記基板支持枠2を介して保持する印刷テーブル1における前記基板3の直下位置に設置した、真空装置(図示せず。)に接続し、適宜のタイミングで上昇して前記基板3を押し上げると共に適宜のタイミングで前記基板3の吸引、停止を行う下部吸着装置5と、前記印刷テーブル1上において所定のタイミングで前記基板3上に移動する移動架台7と、前記移動架台7に設置し、前記基板3に表示した位置及び角度確認用マーク3a、3aを読み取るカメラ装置8と、前記カメラ装置8で読み取った基板3の位置及び角度確認用マーク3a、3aから基板3の位置及び角度を確認し、予め設定されたマスクと対応する適正位置及び角度と照合してズレの程度を判定するズレ判定装置9と、前記移動架台7に設置し、適宜のタイミングで昇降して前記基板3の吸引、停止を行うと共に基板3を吸引して上昇した状態において前記ズレ判定装置9による判定結果を基にX軸方向、Y軸方向、θ方向のズレ補正動作を行う上部吸着装置10とをもって構成した位置決めユニット6とからなるものである。また、前記移動架台7は、前記複数の基板3の間隔に合わせたストロークでX軸方向及びY軸方向に移動可能となしている。   Reference numeral 4 denotes a substrate position and angle correction device. Further, the substrate position and angle correction device 4 is installed in a vacuum device (not shown) installed at a position directly below the substrate 3 in the printing table 1 that holds the substrate 3 via the substrate support frame 2. Connected, raised at an appropriate timing to push up the substrate 3 and suck and stop the substrate 3 at an appropriate timing, and on the printing table 1 on the substrate 3 at a predetermined timing A moving gantry 7 that moves, a camera device 8 that is installed on the moving gantry 7 and that reads the position and angle confirmation marks 3a and 3a displayed on the substrate 3, and the position and angle of the substrate 3 that is read by the camera device 8 A deviation determination device that confirms the position and angle of the substrate 3 from the confirmation marks 3a and 3a, and compares the position and angle with a preset mask to determine the degree of deviation. And when the substrate 3 is lifted and lowered at an appropriate timing to suck and stop the substrate 3, and the substrate 3 is sucked and lifted, the X axis is based on the determination result by the shift determination device 9. The positioning unit 6 is composed of the upper suction device 10 that performs the displacement correction operation in the direction, the Y-axis direction, and the θ direction. Further, the movable frame 7 is movable in the X-axis direction and the Y-axis direction with a stroke that matches the interval between the plurality of substrates 3.

次に、本実施形態に係る基板の位置及び角度補正装置4の作用について説明する。
図4(a)はコンベアによって移送された基板3を基板支持枠2を介して印刷テーブル1上に保持した状態を示すものである。
Next, the operation of the substrate position and angle correction device 4 according to this embodiment will be described.
FIG. 4A shows a state in which the substrate 3 transferred by the conveyor is held on the printing table 1 via the substrate support frame 2.

次に、図4(b)に示す如く、各基板3に対応する全ての下部吸着装置5が一斉に所定の位置まで上昇し、基板3を吸引してこれを水平状態において基板支持枠2から押し上げる。また、該下部吸着装置5は、基板3を押し上げた位置において停止し、そして基板3の全てに同時に印刷するまでその状態を維持する。   Next, as shown in FIG. 4 (b), all the lower suction devices 5 corresponding to the respective substrates 3 are lifted to a predetermined position all at once, and the substrates 3 are sucked from the substrate support frame 2 in a horizontal state. Push up. The lower suction device 5 stops at the position where the substrate 3 is pushed up, and maintains that state until all the substrates 3 are printed simultaneously.

次に、図4(c)に示す如く、位置決めユニット6の移動架台7が一つの基板3の直上の位置に移動し、カメラ装置8によって基板3の位置及び角度確認用マーク3a、3aを読み取る。そして、ズレ判定装置9によってカメラ装置8で読み取った基板3の位置及び角度確認用マーク3a、3aから基板3の位置及び角度を確認し、予め設定されたマスクと対応する印刷ズレの起こらない適正位置及び角度と照合してズレの程度を判定する。   Next, as shown in FIG. 4C, the moving base 7 of the positioning unit 6 moves to a position immediately above one substrate 3, and the position of the substrate 3 and the angle confirmation marks 3a, 3a are read by the camera device 8. . Then, the position and angle of the substrate 3 are confirmed from the position and angle confirmation marks 3a and 3a of the substrate 3 read by the camera device 8 by the displacement determination device 9, and appropriateness that does not cause printing displacement corresponding to a preset mask. The degree of deviation is determined by collating with the position and angle.

次に、図4(d)に示す如く、上部吸着装置10が下降して基板3を吸引する。そして、図4(e)に示す如く、基板3を吸引して所定の位置まで上昇し、この位置において該上部吸着装置10が前記ズレ判定装置9による判定結果を基にX軸方向、Y軸方向、θ方向のズレ補正動作を行う。   Next, as shown in FIG. 4D, the upper suction device 10 descends to suck the substrate 3. Then, as shown in FIG. 4E, the substrate 3 is sucked and raised to a predetermined position. At this position, the upper suction device 10 is moved in the X-axis direction and the Y-axis based on the determination result by the displacement determination device 9. The deviation correction operation in the direction and θ direction is performed.

次に、図4(f)に示す如く、上部吸着装置10が再び下降して基板3の吸引を停止し、またこれと同期して下部吸着装置5が基板3を吸着する。   Next, as shown in FIG. 4F, the upper suction device 10 descends again to stop sucking the substrate 3, and the lower suction device 5 sucks the substrate 3 in synchronization therewith.

最後に、図4(g)に示す如く、上部吸着装置10が上昇して補正作業が完了する。この後位置決めユニット6の移動架台7が次に処理すべき基板3の直上の位置に移動し、前記図4(c)以降の動作を行う。そして、斯かる作業を順次繰り返し、全ての基板3について補正作業が完了したら、その位置において全ての基板3に対して同時に印刷を行うものである。   Finally, as shown in FIG. 4G, the upper suction device 10 is raised and the correction work is completed. After that, the moving base 7 of the positioning unit 6 moves to a position immediately above the substrate 3 to be processed next, and the operations shown in FIG. Then, such operations are sequentially repeated, and when the correction operation is completed for all the substrates 3, printing is simultaneously performed on all the substrates 3 at that position.

斯くして印刷が完了した基板は、下部吸着装置5と共に下降して再び印刷テーブル上に保持され、その吸着を解かれた後、次の工程に移送される。   Thus, the printed substrate is lowered together with the lower suction device 5 and held on the printing table again. After the suction is released, the substrate is transferred to the next step.

次に、図5乃至図7に示した本発明の第2実施形態について説明する。   Next, a second embodiment of the present invention shown in FIGS. 5 to 7 will be described.

本実施形態は、前記第1実施形態と同様に複数の基板に同時に印刷する場合であって、印刷テーブルに複数の基板を所定の間隔で整列して保持する場合である。   This embodiment is a case where printing is simultaneously performed on a plurality of substrates as in the first embodiment, and a case where a plurality of substrates are aligned and held at a predetermined interval on a printing table.

而して、本実施形態は、中央部を貫通孔11aとした複数の基板受容凹部11、11、11・・・を所定間隔で整列して設けた搬送トレー12における前記基板受容凹部11、11、11・・・に基板3を受容し、該搬送トレー12を介して印刷テーブル1に複数の基板3を所定の間隔で整列して保持するようになしている。また、本実施形態における搬送トレー12は、3行8列に整列して基板受容凹部11、11、11・・・を設けている。尚、13は印刷テーブル1の上面に設けた搬送トレー12の保持部材である。   Thus, in the present embodiment, the substrate receiving recesses 11, 11 in the transport tray 12 provided with a plurality of substrate receiving recesses 11, 11, 11,. , 11... Are received, and a plurality of substrates 3 are arranged and held on the printing table 1 via the transport tray 12 at predetermined intervals. Further, the transport tray 12 in the present embodiment is provided with substrate receiving recesses 11, 11, 11... Aligned in 3 rows and 8 columns. Reference numeral 13 denotes a holding member for the transport tray 12 provided on the upper surface of the printing table 1.

次に、本実施形態における基板の位置及び角度補正装置4の作用について説明する。
図7(a)は搬送トレー12が移送されて印刷テーブル1上に保持された状態を示すものであり、夫々の基板3は該搬送トレー12の基板受容凹部11内に保持されている。
Next, the operation of the substrate position and angle correction device 4 in this embodiment will be described.
FIG. 7A shows a state where the transport tray 12 is transferred and held on the printing table 1, and each substrate 3 is held in the substrate receiving recess 11 of the transport tray 12.

次に、図7(b)に示す如く、各基板3に対応する全ての下部吸着装置5が一斉に所定の位置まで上昇し、基板3を吸引してこれを水平状態において基板受容凹部11から押し上げる。また、該下部吸着装置5は、基板3を押し上げた位置において停止し、そして基板3の全てに同時に印刷するまでその状態を維持する。   Next, as shown in FIG. 7 (b), all the lower suction devices 5 corresponding to the respective substrates 3 are lifted to a predetermined position all at once, and the substrates 3 are sucked from the substrate receiving recesses 11 in the horizontal state. Push up. The lower suction device 5 stops at the position where the substrate 3 is pushed up, and maintains that state until all the substrates 3 are printed simultaneously.

次に、図7(c)に示す如く、位置決めユニット6の移動架台7が一つの基板3の直上の位置に移動し、カメラ装置8によって基板3の位置及び角度確認用マーク3a、3aを読み取る。そして、ズレ判定装置9によってカメラ装置8で読み取った基板3の位置及び角度確認用マーク3a、3aから基板3の位置及び角度を確認し、予め設定されたマスクに対応する印刷ズレの起こらない適正位置及び角度と照合してズレの程度を判定する。   Next, as shown in FIG. 7C, the moving base 7 of the positioning unit 6 moves to a position immediately above one substrate 3, and the position of the substrate 3 and the angle confirmation marks 3 a and 3 a are read by the camera device 8. . Then, the position and angle of the substrate 3 are confirmed from the position and angle confirmation marks 3a and 3a of the substrate 3 read by the camera device 8 by the displacement determination device 9, and appropriateness that does not cause printing displacement corresponding to a preset mask. The degree of deviation is determined by collating with the position and angle.

次に、図7(d)に示す如く、上部吸着装置10が下降して基板3を吸引する。そして、図7(e)に示す如く、基板3を吸引して所定の位置まで上昇し、この位置において該上部吸着装置10が前記ズレ判定装置9による判定結果を基にX軸方向、Y軸方向、θ方向のズレ補正動作を行う。   Next, as shown in FIG. 7D, the upper suction device 10 descends to suck the substrate 3. Then, as shown in FIG. 7E, the substrate 3 is sucked and raised to a predetermined position. At this position, the upper suction device 10 is based on the determination result by the displacement determination device 9 in the X-axis direction and the Y-axis. The deviation correction operation in the direction and θ direction is performed.

次に、図7(f)に示す如く、上部吸着装置10が再び下降して基板3の吸引を停止し、またこれと同期して下部吸着装置5が基板3を吸着する。   Next, as shown in FIG. 7 (f), the upper suction device 10 descends again to stop sucking the substrate 3, and the lower suction device 5 sucks the substrate 3 in synchronization therewith.

最後に、図7(g)に示す如く、上部吸着装置10が上昇して補正作業が完了する。この後位置決めユニット6の移動架台7が次に処理すべき基板3の直上の位置に移動し、前記図7(c)以降の動作を行う。そして、斯かる作業を順次繰り返し、一つの搬送トレー12の全ての基板3について補正作業が完了したら、その位置において、即ち搬送トレー12の上方において全ての基板3に対して同時に印刷を行うものである。   Finally, as shown in FIG. 7G, the upper suction device 10 is raised and the correction work is completed. After that, the moving base 7 of the positioning unit 6 moves to a position immediately above the substrate 3 to be processed next, and the operations shown in FIG. Then, such operations are sequentially repeated, and when the correction operation is completed for all the substrates 3 in one transport tray 12, printing is performed simultaneously on all the substrates 3 at that position, that is, above the transport tray 12. is there.

斯くして印刷が完了した基板は、下部吸着装置5と共に下降して再び搬送トレー上に保持され、その吸着を解かれた後、次の工程に移送される。   Thus, the printed substrate is lowered together with the lower suction device 5 and held on the transport tray again. After the suction is released, the substrate is transferred to the next step.

本発明に係るスクリーン印刷機における基板の位置及び角度補正装置の第1実施形態の概略的説明図である。It is a schematic explanatory drawing of 1st Embodiment of the position and angle correction apparatus of the board | substrate in the screen printer concerning this invention. 同要部の拡大斜視図である。It is an expansion perspective view of the principal part. 位置決めユニットを省略して示した同平面図である。It is the same top view which abbreviate | omitted and showed the positioning unit. 同作用説明図である。FIG. 本発明に係るスクリーン印刷機における基板の位置及び角度補正装置の第2実施形態の概略的説明図である。It is a schematic explanatory drawing of 2nd Embodiment of the board | substrate position and angle correction apparatus in the screen printer which concerns on this invention. 位置決めユニットを省略して示した同平面図である。It is the same top view which abbreviate | omitted and showed the positioning unit. 同作用説明図である。FIG. 従来の基板支持台の説明図である。It is explanatory drawing of the conventional board | substrate support stand. 従来の搬送トレーを介して複数の基板を印刷テーブル上に保持する場合の印刷テーブルの平面図である。It is a top view of a printing table in the case of holding a plurality of substrates on a printing table via a conventional conveyance tray. 同治具部分の拡大平面図である。It is an enlarged plan view of the jig part. 同治具部分の拡大断面図である。It is an expanded sectional view of the jig part. 搬送トレーの基板受容凹部内における基板の状態の説明図である。It is explanatory drawing of the state of the board | substrate in the board | substrate receiving recessed part of a conveyance tray.

符号の説明Explanation of symbols

1 印刷テーブル
2 基板支持枠
3 基板
4 基板の位置及び角度補正装置
5 下部吸着装置
6 位置決めユニット
7 移動架台
8 カメラ装置
9 ズレ判定装置
10 上部吸着装置
11 基板受容凹部
12 搬送トレー
DESCRIPTION OF SYMBOLS 1 Printing table 2 Substrate support frame 3 Substrate 4 Substrate position and angle correction device 5 Lower suction device 6 Positioning unit 7 Moving stand 8 Camera device 9 Displacement determination device 10 Upper suction device 11 Substrate receiving recess 12 Transport tray

Claims (4)

上面の所定箇所に位置及び角度確認用マークを表示した基板を保持する印刷テーブルにおける前記基板の直下位置に設置した、真空装置に接続し、適宜のタイミングで上昇して前記基板を押し上げると共に適宜のタイミングで前記基板の吸引、停止を行う下部吸着装置と、前記印刷テーブル上において所定のタイミングで前記基板上に移動する移動架台と、前記移動架台に設置し、前記基板に表示した位置及び角度確認用マークを読み取るカメラ装置と、前記カメラ装置で読み取った基板の位置及び角度確認用マークから基板の位置及び角度を確認し、予め設定されたマスクと対応する適正位置及び角度と照合してズレの程度を判定するズレ判定装置と、前記移動架台に設置し、適宜のタイミングで昇降して前記基板の吸引、停止を行うと共に基板を吸引して上昇した状態において前記ズレ判定装置による判定結果を基にX軸方向、Y軸方向、θ方向のズレ補正動作を行う上部吸着装置とをもって構成した位置決めユニットとからなるスクリーン印刷機における基板の位置及び角度補正装置。   Connected to a vacuum device installed at a position directly below the substrate on the printing table that holds the substrate displaying the position and angle confirmation mark at a predetermined position on the upper surface, raised at an appropriate timing and pushed up the substrate A lower suction device that sucks and stops the substrate at a timing, a moving gantry that moves on the printing table at a predetermined timing on the printing table, and a position and angle confirmation that is installed on the moving gantry and displayed on the substrate The position and angle of the substrate are confirmed from the camera device that reads the mark for use and the position and angle confirmation mark of the substrate that is read by the camera device, and is compared with an appropriate position and angle corresponding to a preset mask. A displacement determination device that determines the degree and a device that is installed on the movable frame and lifts and lowers at an appropriate timing to suck and stop the substrate. A screen printing machine comprising a positioning unit including an upper suction device that performs a displacement correction operation in the X-axis direction, the Y-axis direction, and the θ-direction based on the determination result by the displacement determination device in a state where the substrate is sucked and raised The position and angle correction device of the substrate in 印刷テーブルに複数の基板を所定の間隔で整列して保持し、移動架台を前記複数の基板の間隔に合わせたストロークでX軸方向及びY軸方向に移動可能となした請求項1記載のスクリーン印刷機における基板の位置及び角度補正装置。   2. The screen according to claim 1, wherein a plurality of substrates are aligned and held on the printing table at a predetermined interval, and the movable frame can be moved in the X-axis direction and the Y-axis direction with a stroke that matches the interval between the plurality of substrates. A substrate position and angle correction device in a printing machine. 印刷テーブルに、コンベアから基板を受け取って支持する複数の基板支持枠を所定の間隔で整列して設け、該複数の基板支持枠を介して印刷テーブルに複数の基板を所定の間隔で整列して保持するようになした請求項2記載のスクリーン印刷機における基板の位置及び角度補正装置。   A plurality of substrate support frames that receive and support substrates from a conveyor are arranged at predetermined intervals on the printing table, and a plurality of substrates are aligned at predetermined intervals via the plurality of substrate support frames. 3. The apparatus for correcting the position and angle of a substrate in a screen printing machine according to claim 2, wherein the apparatus is held. 中央部を貫通孔とした複数の基板受容凹部を所定間隔で整列して設けた搬送トレーにおける前記基板受容凹部に基板を受容し、該搬送トレーを介して印刷テーブルに複数の基板を所定の間隔で整列して保持するようになした請求項2記載のスクリーン印刷機における基板の位置及び角度補正装置。
A substrate is received in the substrate receiving recess in a transport tray in which a plurality of substrate receiving recesses having a through hole in the center are arranged at a predetermined interval, and the plurality of substrates are placed on the printing table via the transport tray at a predetermined interval. 3. The apparatus for correcting the position and angle of a substrate in a screen printing machine according to claim 2, wherein the apparatus is arranged and held by the apparatus.
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JP2014012361A (en) * 2012-07-04 2014-01-23 Yamaha Motor Co Ltd Transportation fixture
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EP3693168A1 (en) 2019-01-03 2020-08-12 ASM Assembly Systems Singapore Pte. Ltd. Alignment of single workpieces
CN109551871A (en) * 2019-01-14 2019-04-02 东莞市凯格精密机械有限公司 A kind of more substrates contraposition printing process and para-position printing machine
WO2020147358A1 (en) * 2019-01-14 2020-07-23 东莞市凯格精密机械有限公司 Multi-substrate alignment printing method and alignment printing machine
CN109551871B (en) * 2019-01-14 2024-02-13 东莞市凯格精机股份有限公司 Multi-substrate alignment printing method and alignment printer
EP3928985A1 (en) * 2020-06-22 2021-12-29 ASM Assembly Systems Singapore Pte. Ltd. Workpiece alignment and printing
CN113895142A (en) * 2020-06-22 2022-01-07 先进装配系统新加坡有限公司 Alignment and printing of workpieces
WO2023038720A1 (en) * 2021-09-09 2023-03-16 Illinois Tool Works Inc. Component loading verification system and method
US11778750B2 (en) 2021-09-09 2023-10-03 Illinois Tool Works Inc. Stencil printer with component loading verification system and method
EP4299319A2 (en) 2022-06-23 2024-01-03 ASMPT SMT Singapore Pte. Ltd Alignment of singulated substrates

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