JP2009247933A - Liquid body discharge method, method of manufacturing organic electroluminescent panel, method of manufacturing color filter, display device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that the quantity of a functional liquid in a pixel on which the liquid is initially discharged is smaller by the quantity corresponding to the natural drying time than the quantity of the liquid discharged finally and remaining on the pixel and as a result, the thickness of respective solidified and formed luminous layers is different from each other to cause the unevenness of luminous luminance among the pixels. <P>SOLUTION: The time elapsed from the start of the discharge of the functional liquid to the first pixel is measured in a step S107. The quantity of a solvent liquid increased with time is calculated in a step S108. The increased quantity of the solvent liquid is discharged from a second head in a step 109. By the way, the quantity of the solvent liquid to be discharged to the pixel is changed with the elapsed time. Then, when the discharge to all pixels is finished, the total quantity of the functional liquid and the solvent liquid present in each pixel is uniformalized. As a result, the film thickness of the respective luminous layers formed by the vacuum drying is uniformalized to suppress the unevenness of the luminance. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid discharge method, an organic EL panel manufacturing method and a color filter manufacturing method using the liquid discharge method, an organic EL panel manufactured by each manufacturing method, and a display device including the color filter, The present invention also relates to an electronic device provided with each of these display devices.

  In recent years, a display device using an electroluminescence element (EL element) which is a thin self-luminous element as a display element has been widely used. The EL element emits emitted light having a desired brightness by passing a current through a light emitting layer formed of a light emitting material. The light emitting layer is formed by, for example, forming a liquid material containing a light emitting material and a nozzle for discharging the liquid material in each of a plurality of discharged regions (pixels) partitioned by banks on the substrate. A predetermined amount is discharged from the head, and then the solvent component contained in the liquid is evaporated and solidified by a drying process such as vacuum drying or heat drying.

  As is well known, the luminance of the emitted light depends on the thickness of the formed light emitting layer. For this reason, the thickness unevenness of the formed light emitting layer becomes the luminance unevenness as it is. Therefore, it is important to form the light emitting layer so that the thickness is uniform.

  However, the solvent component contained in the liquid is evaporated by natural drying even before the drying process is performed. For this reason, the amount of liquid remaining in the liquid discharge area in each discharge target area decreases according to the length of time from the discharge of the liquid substance to the discharge target area until the drying process is performed. become. For example, when the liquid material is discharged to the last discharged region, the remaining amount of the liquid material in the discharged region where the liquid material was discharged first is the liquid material remaining in the discharged region where the liquid material was discharged last Compared to the amount of, the amount is less by the amount corresponding to the natural drying time. Therefore, if the drying process is performed in this state, the drying conditions are different due to the difference in the amount of liquid in each discharge region. As a result, the thickness of the solidified light emitting layer is different. As a result, unevenness in light emission luminance occurs between the respective discharged regions. For this reason, luminance unevenness occurs in the display element in units of pixels, resulting in poor display quality.

  In addition, since the amount of evaporation of the solvent contained in the liquid increases as it approaches the edge of the substrate, the drying speed of the liquid in the peripheral portion of the substrate generally depends on the center of the substrate. It may be faster than the drying speed of the liquid in the part. For this reason, the thickness of the light emitting layer formed by solidifying the liquid material may be different between a portion near the periphery of the substrate and a portion near the center of the substrate in the discharged region. Then, as described above, luminance unevenness occurs in the emitted light in the discharge target region.

  Thus, for example, Patent Document 1 proposes a drying apparatus that makes the thickness of a thin film to be formed uniform by varying the heating temperature for each part of a liquid film (liquid material) formed on a substrate. . Alternatively, Patent Document 2 proposes a drying apparatus that includes a drying unit disposed opposite to a substrate and changes the distance between the substrate and the drying unit so as to equalize the thickness of a thin film to be formed. ing.

JP 2004-330136 A JP 2005-275275 A

  However, in the drying apparatus proposed in Patent Document 1 and Patent Document 2, the drying process conditions are adjusted by adjusting the heating temperature and the drying means according to the size of the substrate and the shape and number of the discharge target regions formed on the substrate. Need to be changed. For this reason, there is a problem in that problems such as a heavy work load such as adjustment of drying processing conditions and a complicated drying apparatus itself occur.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A liquid material discharge method for discharging a liquid material in a predetermined order with respect to a plurality of discharge regions formed on a substrate, wherein the first discharge target among the plurality of discharge regions A measuring step of measuring an elapsed time since the discharge of the liquid material to the area, and an amount of discharge of the liquid material discharged to each of the plurality of discharge target areas in the measured elapsed time And a changing step for changing the amount of the liquid material in a small amount, and a discharging step for discharging the liquid material to each of the plurality of discharge target regions with the changed discharge amount.

  According to this method, the discharge amount of the liquid material discharged to the discharge target region is changed to be small according to the elapsed time. Accordingly, when the discharge is completed for all the discharge target areas, the remaining amount of the liquid material existing in each of the discharge target areas is made substantially uniform in a state where the amount of the liquid substance is reduced by natural drying. Can do. As a result, the thickness of the functional film formed by the subsequent drying process becomes almost uniform without performing the troublesome work of changing the drying process condition, and the performance variation of the functional film is suppressed.

  Application Example 2 In the liquid material discharge method, the liquid material discharge method includes an acquisition step of acquiring a formation position with respect to the substrate for each of the plurality of discharge target regions, and the change step is less in accordance with the elapsed time. The changed discharge amount of the liquid material is further changed according to the acquired formation position.

  According to this method, the discharge amount can be further corrected and changed according to the formation position of the discharge target region on the substrate. As a result, depending on the amount of liquid material present in each discharge area when discharge is completed for all discharge areas, depending on the formation position of the functional film on the substrate in addition to the difference in natural drying state Therefore, the performance variation of the functional film due to the difference in drying processing conditions is suppressed.

  Application Example 3 A liquid material discharge method for discharging a liquid material to a plurality of discharge regions formed on a substrate, and obtaining a formation position on the substrate for each of the plurality of discharge regions. An acquisition step, a change step of changing the discharge amount of the liquid material discharged to each of the plurality of discharge target regions according to the acquired formation position, and a liquid material of the changed discharge amount. A discharge step of discharging into each of the discharge target regions.

  According to this method, the discharge amount of the liquid material discharged to the discharge region can be changed according to the formation position of the discharge region on the substrate. As a result, the thickness of the functional film formed by the subsequent drying process becomes almost uniform without performing the troublesome work of changing the drying process condition, and the performance variation of the functional film is suppressed.

  [Application Example 4] In the liquid material discharge method, the change step is obtained using a distribution profile that defines a drying speed of the liquid material at the formation position of each of the plurality of discharge target regions. The discharge amount of the liquid material is changed according to the formation position of the discharge region.

  According to this method, the discharge amount of the liquid material can be adjusted according to the distribution of the drying speed. As a result, even if there is a difference in the dry state depending on the position of the discharge region on the substrate, the amount of liquid discharged is changed according to the difference in the dry state. Variations in the formed functional film thickness are suppressed.

  Application Example 5 In the above liquid material discharge method, the discharge step includes a step of discharging a liquid mixture of a solute and a solvent from the first head, and a solvent liquid containing only the solvent from the second head. And the step of discharging the mixed liquid and the solvent liquid from each head according to the changed discharge amount.

  According to this method, the discharge amount can be changed by changing the discharge amount ratio of the solute and the solvent in the liquid material discharged to each discharge region. In particular, when it is desired to increase the solvent ratio, the second head can be used.

  Application Example 6 In the liquid material discharge method, the solvent in the mixed solution and the solvent in the solvent solution are different in composition.

  According to this method, for example, solvents having different drying speeds can be used. Therefore, by using the solvent of the solvent liquid as a solvent having a low drying speed, the drying speed can be adjusted with a small discharge amount of the solvent liquid. .

  Application Example 7 In the liquid material discharge method, the liquid material is discharged by changing the discharge amount of the solvent liquid by the changed discharge amount of the liquid material.

  According to this method, the amount of solvent can be corrected in advance according to the difference in film thickness caused by the difference in drying conditions.

  Application Example 8 A method for manufacturing an organic EL panel having a structure in which a plurality of organic layers including a light emitting layer are sandwiched between an anode and a cathode, and using the liquid discharge method, at least of the plurality of organic layers One layer is formed.

  According to this manufacturing method, for example, the film thickness of the light emitting layer formed by the liquid after the drying process becomes substantially uniform, and the luminance unevenness of the organic EL panel is suppressed.

  Application Example 9 A color filter manufacturing method in which a plurality of colors of optical filter layer regions are formed on a glass substrate, wherein the liquid discharge method is used to form at least one color optical filter layer. Features.

  According to this manufacturing method, the film thickness of the color filter layer formed by the liquid material after the drying process becomes substantially uniform, and the luminance unevenness of the transmitted light that passes through the color filter is suppressed.

  Application Example 10 A display device including an organic EL panel manufactured by the method for manufacturing an organic EL panel and a driving unit that drives the organic EL panel to emit light.

  According to this display device, it is possible to obtain a display device including an organic EL panel in which luminance unevenness is suppressed.

  Application Example 11 A display device that converts white light into color light using a color filter, wherein the color filter is a color filter manufactured by the method for manufacturing a color filter.

  According to this display device, it is possible to obtain a display device including a color filter in which unevenness in luminance of transmitted light is suppressed.

  Application Example 12 Electronic equipment including the display device.

  According to the above display device, a display device in which uneven luminance is suppressed can be obtained, and by providing this display device, an electronic apparatus that can display an image with good display quality can be provided.

  Hereinafter, the present invention will be described based on embodiments. FIG. 1 shows a specific example of red (R), green (G), and blue (B) colors using a liquid discharge method according to the present invention for a discharge area partitioned and formed on a substrate P by banks. It is a block diagram which shows one Embodiment of the liquid discharge apparatus which discharges the liquid containing a functional material.

  As shown in FIG. 1, the liquid material discharge device 100 includes a pair of guide rails 101 provided linearly, an air slider provided inside the guide rail 101, and a linear motor (not shown). A moving table 103 that moves in the axial direction (this is the Y-axis direction in this embodiment) is provided. A stage 105 for placing the substrate P is provided on the movable table 103. The stage 105 is configured to be able to suck and fix the substrate P.

  One linear axis direction (which is different from the Y axis direction) at a predetermined distance on the opposite side of the stage 105 from the moving table 103 (this is also referred to as an upward direction in the present embodiment, and vice versa). A pair of guide rails 102 is provided so as to exhibit (in this embodiment, the X-axis direction).

  The liquid material discharge device 100 includes a carriage 200 that moves along the pair of guide rails 102. That is, the carriage 200 is provided with a carriage moving table 112 integrally or separately from both sides of the carriage 200, and an X-axis is provided by an air slider and a linear motor (both not shown) provided inside the guide rail 102. It is configured to be movable along the direction.

  The carriage 200 includes a nozzle head 20 and a nozzle head 30 in which a plurality of nozzles perforated so as to exhibit a predetermined arrangement direction on the lower side and an ejection mechanism for ejecting a liquid material for each nozzle are formed. Is provided. The liquid material supplied to the carriage 200 from a liquid material supply device (not shown) is supplied to the nozzle head 20 and the nozzle head 30 via a flow path (not shown), respectively, and an ejection mechanism (described later) formed for each nozzle. ) To eject liquid droplets from each nozzle.

  The liquid material discharge device 100 includes a control device 10. The control device 10 has a computer function, and based on the input discharge control data, the movement control of the moving table 103 in the Y-axis direction and the movement of the carriage moving table 112 provided in the carriage 200 in the X-axis direction. Control and drive control of the discharge mechanism formed on the nozzle head 20 and the nozzle head 30, that is, discharge control of the liquid material are performed. In the present embodiment, the ejection control data is data including position data indicating the position with respect to the substrate P for each of a plurality of ejection target areas partitioned and formed on the substrate P by banks.

  Next, the nozzles formed in the nozzle heads 20 and 30 will be described with reference to FIG. FIG. 2 is a schematic diagram showing the arrangement of the nozzles drilled in the nozzle heads 20 and 30, and shows the state seen from the lower direction of the carriage 200 (the white arrow in the figure) in FIG. . Here, the horizontal direction in the drawing is shown as the X-axis direction.

  In the present embodiment, as illustrated, the nozzle head 20 includes nozzle blocks 20R, 20G, and 20B that discharge functional liquids (described later) as liquids corresponding to R, G, and B. Each nozzle block 20R, 20G, and 20B is provided with several tens to several hundreds of nozzles at a predetermined pitch. A plurality of nozzles drilled in each nozzle block 20R, 20G, 20B are arranged in a substantially straight line, and the arrangement direction thereof coincides with the X-axis direction.

  Similarly, the nozzle head 30 includes nozzle blocks 30R, 30G, and 30B that discharge a solvent liquid (described later) as a liquid corresponding to R, G, and B. Similar to the nozzle head 20, several tens to several hundreds of nozzles are formed in each nozzle block 30R, 30G, and 30B at a predetermined pitch. The plurality of nozzles drilled in the nozzle blocks 30R, 30G, and 30B are arranged in a substantially straight line, and the arrangement direction thereof is the same as the X-axis direction as in the nozzle head 20.

  The nozzles drilled in each of the nozzle blocks 20R, 20G, and 20B and the nozzle blocks 30R, 30G, and 30B may have a plurality of nozzle rows such as two rows. In some cases, the installation positions are in a staggered arrangement with the nozzle rows shifted by a half pitch. Also, a plurality of nozzle heads 20 and 30 may be provided. Further, a plurality of carriages 200 may be provided. As described above, a necessary number of nozzle heads and carriages are provided in accordance with the number and range of areas to be ejected or the size of the substrate P.

  As described above, the nozzle heads 20 and 30 each have a discharge mechanism for each nozzle, and a pressure is generated on each liquid material in the nozzle heads 20 and 30 to generate a predetermined amount. The liquid material is discharged from the nozzle. Of course, the discharge mechanism has the same structure for all nozzles.

  In the present embodiment, the discharge mechanism has the structure shown in the blow-out portion in FIG. 2, and uses the piezoelectric element 2 as a driving body (actuator). That is, when a voltage waveform is applied between the electrodes COM and GND at both ends of the piezoelectric element 2, the piezoelectric element 2 contracts or expands due to electrostrictive properties, and the diaphragm 3 is bent in the direction of the arrow to thereby form a liquid material flow path. The liquid material existing in the pressurizing chamber 4 formed in the middle is pressurized. As a result, the pressurized liquid is ejected as droplets 9 from the nozzles formed in the bottom surface member 8 of the nozzle head 20. The discharge mechanism may be, for example, a so-called thermal method using a heating element as a driver.

  Next, a display device formed using the liquid material discharge device 100 will be described. FIG. 3 is an explanatory view showing a mobile phone 1 as an electronic apparatus on which an organic EL panel 50 as an example of a display device formed using the liquid material discharge device 100 of the present embodiment is mounted.

  The organic EL panel 50 uses an organic EL element as an electroluminescence element as a display element, and can be reduced in thickness without a backlight. Therefore, the organic EL panel 50 is suitable for a thin electronic device that displays images and characters. Display device. Therefore, it is effective as a display device mounted on a mobile phone as in this embodiment.

  The organic EL panel 50 includes a plurality of pixels capable of emitting any one of R, G, and B, and is configured to display a predetermined color image such as an image or a character. Here, in order to simplify the following description, as shown in FIG. 3, the organic EL panel 50 has 4 pixels in the Y-axis direction (vertical direction in the drawing) and 6 pixels in the X-axis direction (horizontal direction in the drawing). It is assumed that a total of 24 pixels are formed. Needless to say, in practice, many pixels such as several hundred pixels are formed in the X-axis and Y-axis directions.

  FIG. 4 is a schematic diagram showing the entire layout of the organic EL panel 50 together with the circuit configuration. The organic EL panel 50 is an active matrix type device that is driven for display for each pixel as shown in the figure. Each pixel has a region divided into an oval shape by a bank, and is formed by being regularly arranged in the X-axis direction and the Y-axis direction at a substantially central portion of the substrate P. Of course, each pixel may be partitioned into a region shape other than an oval shape. Each pixel corresponds to a region to be ejected.

  In each pixel, an organic EL element is formed as a display element, and TFTs (thin film transistors) 54 and 55 for driving (displaying light emission) the organic EL element and a storage capacitor 56 are formed as drive elements. . Here, it is assumed that the organic EL element has a top emission structure. Accordingly, the driving element is located between the display element and the display element, and is formed between the substrate P and the display element. Of course, the organic EL element may have a bottom emission structure instead of a top emission structure.

  On the outer peripheral portion of the substrate P, a scanning drive circuit 51, a data drive circuit 52, and a power supply terminal 53 are formed. A scanning line Gate is provided from the scanning drive circuit 51, a data line Sig is provided from the data drive circuit 52, and a power supply line Com connected thereto is provided from the power supply terminal 53 to the drive elements formed in the respective pixels. On the other hand, wiring is performed as shown in FIG. 4, and the display element is driven to emit light.

  First, the scanning line Gate is connected to the gate of the TFT 54, and the TFT 54 is controlled to be turned on / off according to a current signal supplied via the scanning line Gate. When the TFT 54 is turned on, a predetermined voltage is held in the holding capacitor 56 by the power supplied from the power supply line Com in accordance with the image signal supplied from the data line Sig connected to the source of the TFT 54. Then, the voltage held in the holding capacitor 56 is applied to the gate of the TFT 55 to turn on the TFT 55. The source and drain of the TFT 55 are connected to the power supply line Com and the anode, respectively, and a current corresponding to the voltage held in the storage capacitor 56, that is, a current corresponding to an image signal is applied to the anode via the power supply line Com. .

  The display element formed in each pixel emits light by passing a current between the anode and the cathode. That is, the current applied to the anode flows to the cathode formed over the surface of all the pixels, so that light is emitted with brightness according to the image signal. The organic EL panel 50 thus displays an image. Therefore, if the thickness of the light emitting layer sandwiched between the anode and the cathode is not uniform, uneven brightness will occur.

  Next, a specific pixel configuration in the organic EL panel 50 will be described with reference to FIG. FIG. 5 is a schematic diagram illustrating a configuration of a functional layer included in each of the R pixel, the G pixel, and the B pixel in the organic EL panel 50. FIG. 5A is a plan view showing a display portion in which R pixels, G pixels, and B pixels are arranged in the X-axis direction (lateral direction in the drawing) among the pixels shown in FIG. FIG. 5B is a schematic cross-sectional view showing the AA cross section in FIG. 5A and shows a state where the formation of the organic EL element is completed. FIG. 5C is a schematic diagram showing a state in which the functional layer of the organic EL element is formed by being applied by discharging a liquid material. In addition, since each dimension is exaggerated as needed for convenience of explanation, it goes without saying that the actual dimension does not necessarily match.

  As shown in FIG. 5A, each pixel has a pixel region partitioned by a bank (hatched portion in the figure) made of an insulating organic material (for example, acrylic resin or polyimide resin) formed by etching or the like. Each has an oval shape. A display element capable of emitting any one of R, G, and B is formed in the pixel region of each pixel.

  In addition, as shown in FIG. 5B, the organic EL element includes a hole injection layer and a light emitting layer (any one of an R light emitting layer, a G light emitting layer, and a B light emitting layer) between the anode and the cathode. Is formed. Therefore, when the formed light emitting layers are different, R pixels, G pixels, and B pixels having different emission colors are obtained.

  In the present embodiment, the hole injection layer is formed by discharging a functional liquid using polyethylene dioxythiophene / polystyrene sulfonic acid (PEDOT / PSS) as a solute and ethylene glycol as a solvent to the pixel region, and then vacuum drying, etc. The PEDOT / PSS film having a predetermined thickness is formed by removing the solvent by performing a drying process. Further, each light emitting layer has a fluorescent material (for example, poly (9,9-dioctylfluorene)) exhibiting any one of R, G, and B as a solute, and 1,3,5-trimethylbenzene as a solvent. A functional liquid, that is, an R functional liquid, a G functional liquid, and a B functional liquid, are sprayed onto each pixel region as a liquid material, and then a drying process such as vacuum drying is performed to form a fluorescent material film having a predetermined thickness. It is a thing.

  An inorganic insulating film is formed between the bank and the anode so that a predetermined width is exposed in the pixel region along the outer periphery of the oval pixel region. This improves lyophilicity with the functional fluid that forms the hole injection layer and each light emitting layer, and prevents the anode and cathode from being short-circuited by forming the hole injection layer and each light emitting layer to the vicinity of the bank. This is to make it happen. Of course, when the hole injection layer and each light emitting layer can be formed up to the vicinity of the bank, it is not necessary to form the inorganic insulating film.

  In addition, since the display element of the present embodiment is a top emission type organic EL element, a reflective layer is formed on the surface side facing the substrate P of the anode so that emitted light is emitted from the cathode side. ing. Of course, when the anode also serves as the reflective layer, it is not necessary to form the reflective layer.

  In addition, the driving element for driving the display element to emit light is formed between the substrate P and the display element at a position overlapping the display element in a plan view. In this embodiment, the TFTs 54 and 55 and the storage capacitor 56 as drive elements are located between the substrate P and formed inside the device layer whose entire surface is flattened as shown in FIG. 5B. Has been.

  In the present embodiment, the hole injection layer and each light emitting layer are formed by discharging and applying a functional liquid to the corresponding pixel region. Specifically, as shown in FIG. 5C, the nozzle blocks 20R, 20G, and 20B provided in the nozzle head 20 are moved from the nozzles to the respective pixel areas corresponding to the R, G, and B pixels. Each functional liquid of R, G, and B is applied by discharging the functional liquid. Thereafter, as described above, the hole injection layer and the light emitting layer for each pixel region are formed by performing a drying process.

  Thus, an organic EL element corresponding to each of the R, G, and B pixels is formed as a display element on the substrate P, and a cathode is further formed to complete an organic EL panel. In the present embodiment, as described above, the functional liquid material for forming the hole injection layer is the same for each of the R, G, and B pixels.

  Now, for a display device having R, G, and B pixels formed in this manner, the light emission luminance of each pixel depends on the thickness of the light emitting layer formed or the magnitude of the current flowing through the light emitting layer. To do. Therefore, it is important to make the thickness of the light emitting layer sandwiched between the anode and the cathode uniform among all the pixels formed on the substrate P. This is because the electrical resistance exhibited by the light emitting layer is uniform between the pixels by equalization, and as a result, the current flowing through the light emitting layer is also uniform between the pixels.

  The same applies to the hole injection layer other than the light emitting layer in order to prevent a difference in current flowing in the light emitting layer. By making the thickness of the hole injection layer uniform among all the pixels formed on the substrate P, and by making the thickness of the hole injection layer uniform in one pixel region, light emission This is because the current flowing through the layers can be made uniform between the pixels and within one pixel region.

  However, as described above, the solvent (ethylene glycol or 1,3,5-trimethylbenzene) contained in the functional liquid has already evaporated due to natural drying before the drying treatment. Therefore, the amount of liquid in which the functional liquid discharged in each pixel (discharged area) remains varies depending on the pixel, depending on the time since the functional liquid was discharged to the first pixel. It becomes a state. If the drying process is performed in such a state, the amount of the remaining functional liquid is different, so that the drying conditions of each pixel are different. For this reason, for example, the thickness of the light emitting layer formed by solidification is different, and unevenness in the light emission luminance occurs between the pixels.

  Similarly, as described above, in the functional liquid drying process, since the functional liquid drying speed in the periphery of the substrate is faster than the functional liquid drying speed in the center of the substrate, the functional liquid is solidified, for example. In some cases, the thickness of the light emitting layer differs between a pixel near the periphery of the substrate and a pixel near the center of the substrate. As a result, as described above, the luminance of the emitted light of all the pixels is not uniform, and luminance unevenness occurs.

  Therefore, in the liquid material discharge device 100 of the present embodiment, the functional liquid is discharged using a discharge method that suppresses the influence on the film thickness due to the reduction of the solvent due to natural drying or the difference in the drying speed on the substrate in the drying process. To do. With respect to this discharge method, the discharge method that suppresses the influence on the film thickness of the light emitting layer due to the decrease in the solvent due to natural drying is a film of the light emitting layer accompanying the difference in the drying speed on the substrate in the drying process according to the first embodiment. A discharge method for suppressing the influence on the thickness will be described below with reference to the second embodiment. In the first embodiment and the second embodiment, description will be made assuming that a light emitting layer is formed as a functional layer. Of course, the two embodiments described below are also applicable to the hole injection layer.

(First embodiment)
First, the outline of the first embodiment will be described with reference to FIG. 6 shows a total of 24 pixels formed on the substrate P in the Y-axis direction (vertical direction in the drawing) and 6 pixels in the X-axis direction (horizontal direction in the drawing). It is a schematic diagram which shows a mode that each R, G, B functional liquid containing the luminescent material and solvent which form is discharged.

  As shown in the drawing, in this embodiment, the substrate P moves in the Y-axis direction, so that the R pixel and the G pixel are moved from the nozzles provided in the nozzle head 20 that moves relative to the lower direction from the top of the drawing as the main scanning direction. , The R function liquid, the G function liquid, and the B function liquid are respectively discharged to the pixels corresponding to the B pixels. Furthermore, from the nozzle provided in the nozzle head 30 that moves relative to the substrate P together with the nozzle head 20, the R solvent liquid, the G solvent liquid, and the B solvent are respectively transferred to the pixels corresponding to the R pixel, the G pixel, and the B pixel. Discharge the solvent liquid. Each solvent solution is a solution of the same solvent as the solvent contained in each functional solution.

  In the present embodiment, it is assumed that functional liquid or solvent liquid is ejected by so-called scan scanning of the nozzle heads 20 and 30 with respect to three pixels continuous in the X-axis direction by one main scanning. That is, for all the pixels formed on the substrate P, first, the functional liquid or the solvent liquid is discharged to the pixels included in the main scanning region indicated by the broken line in the drawing by the first main scanning. Thereafter, the second main operation is performed by the nozzle heads 20 and 30 (two-dot chain lines in the figure) sub-scanned by the movement of the substrate P from the bottom to the top in the Y-axis direction and the movement of the carriage 200 in the X-axis direction. Scanning is performed and functional liquid or solvent liquid is discharged to all pixels. The functional liquid and the solvent liquid may be ejected by a scanning method other than scanning.

  Here, in this embodiment, in order to simplify the description, it is assumed that each nozzle block 20R, 20G, 20B and each nozzle block 30R, 30G, 30B has one nozzle. Of course, as described above, it is needless to say that a large number of nozzles are normally formed, and functional liquids and solvent liquids are discharged from the corresponding nozzles to a large number of pixels partitioned and formed on the normal substrate P, respectively.

  When the main liquid and the sub-scan are thus performed and the functional liquid or the solvent liquid is discharged to all the pixels, the R functional liquid and the R solvent liquid are G functional liquid in the order of the pixels R1 to R8. And the G solvent liquid are discharged in the order of the pixels G1 to G8, and the B functional liquid and the B solvent liquid are discharged in the order of the pixels B1 to B8, respectively. As a result, for example, with respect to all the R pixels, the amount of liquid that the functional liquid discharged to each pixel decreases by natural drying during the time until the functional liquid is discharged to the last pixel R8 Is the largest number of pixels R1, and then decreases according to the order in which the R functional liquid is discharged, such as pixel R2, then pixel R3,.

  Therefore, in this embodiment, for example, in the case of an R pixel, an R solvent liquid corresponding to the amount of the R functional liquid that decreases is ejected to each pixel in advance, and the R function is applied to each R pixel. When the discharge of the liquid or the R solvent liquid is completed, the liquid amounts remaining in all the pixels R1 to R8 are made to be the same. In addition, since the R solvent liquid discharged in advance is a solution of a solvent having the same composition as the solvent contained in the R functional liquid, the composition components of the solvent remaining in the R light emitting layer formed by the drying process are all The same applies to all the pixels R1 to R8. As a result, the characteristics of the R light emitting layer do not differ between the pixels R1 to R8. The same applies to the pixels G1 to G8 that are all G pixels and the pixels B1 to B8 that are all B pixels.

  Now, the liquid material discharge method of the present embodiment will be described with reference to the process flowchart of FIG. The processing shown in FIG. 7 is executed by the control device 10 performing the various control operations described above in accordance with a processing program stored in a memory (not shown) provided in the control device 10 in FIG.

  When this process is started, first, in step S101, a position data reading process is performed from the ejection control data. The position data is data indicating a region to be ejected of the functional liquid partitioned by the bank on the substrate P, that is, a pixel region on the substrate P. Specifically, the control device 10 reads the coordinates of each pixel area partitioned on the substrate P.

  Next, in step S102, a process of calculating the moving process is performed for the main scanning (Y-axis direction) of the substrate and the sub-scanning (X-axis direction) of the substrate for discharging the functional liquid to each pixel. That is, all the steps of moving the nozzle head 20 (nozzle head 30) relative to the substrate P are calculated. At the same time, the functional liquid discharge timing from each nozzle block 20R, 20G, 20B and the solvent liquid discharge timing from each nozzle block 30R, 30G, 30B are calculated.

  Next, in step S103, for the discharge of each of the R, G, and B functional liquids and the respective solvent liquids, the time required from the start of the functional liquid discharge to the first pixel to the completion of the functional liquid discharge to the last pixel. A process of calculating T is performed. The control device 10 uses the moving speed of the substrate P and the moving speed of the carriage 200 to perform the function from the start of discharging the functional liquid to the first pixel from the moving process calculated in the previous processing step S102. A time T required to complete the liquid discharge is calculated. Specifically, it is calculated by dividing the length of the moving process by the moving speed of the substrate P and the moving speed of the carriage 200. It is assumed that the moving speed of the substrate P and the moving speed of the carriage 200 are stored in advance in a memory in the control device 10.

  Next, in step S <b> 104, the functional liquid remaining amount data acquisition process at time T is performed. In this embodiment, it is assumed that the remaining amount data indicating the relationship between time and the remaining amount of the functional liquid is stored in advance in the memory in the control device 10 for each of the R, G, and B functional liquids. Therefore, the control device 10 acquires the amount of functional liquid remaining after the elapse of time T, that is, the amount of solvent to be evaporated, using the stored remaining amount data. As can be understood from the above description, the acquired amount of the solvent is the amount of the solvent liquid to be increased with respect to the pixel that first ejects the functional liquid. The remaining amount data will be described later in step S108.

  In step S105, the substrate main scan (Y-axis direction) and carriage sub-scan (X-axis direction) are started in accordance with the pixel position. Specifically, as shown in FIG. 1, the control device 10 performs main scanning on the substrate P along the pair of guide rails 101 in the Y-axis direction, and scans the carriage 200 along the guide rails 102 in the X-axis direction. Then, the nozzle head 20 and the nozzle head 30 are moved to each pixel position.

  Next, in step S106, functional liquid is discharged from the first head to the pixels. Each time the position of each nozzle block 20R, 20G, 20B comes to a position where the functional liquid should be ejected with respect to each pixel in the main scanning movement of the substrate P, the control device 10 each nozzle block 20R, 20G, 20B. , R, G, and B functional liquids (here, a mixture of a light emitting material and a solvent) are discharged in the same amount. In this embodiment, as shown in FIG. 6, since the main scanning direction is downward from the top of the drawing, the R functional liquid, G functional liquid, and B functional liquid are arranged in the order of the nozzle blocks 20R, 20G, and 20B. Each is discharged to the corresponding pixel.

  Next, in step S107, a process of measuring an elapsed time from the start of functional liquid ejection to the first pixel is performed. The control device 10 has a timer function, and measures the time from the start of discharge of the functional liquid to the first pixel (for example, the pixel R1 in the case of the R functional liquid). Of course, the elapsed time may be calculated and measured from the main scanning and sub-scanning movement steps calculated in step S102 described above and the discharge timing of the functional liquid. By this process, the elapsed time for each pixel is measured.

  Next, in step S108, a calculation process of the increase amount of the solvent solution with respect to the elapsed time is performed. The control device 10 calculates the amount of the solvent liquid to be increased from the functional liquid remaining amount data acquired in step S104 described above. With this process, the amount of the solvent liquid to be increased for each pixel is calculated.

  The state of the process here will be described using FIG. 8 together with the process in step S104. FIG. 8A is a graph showing an example of remaining amount data for each functional liquid used in step S104. FIG. 8B is an increase with respect to the elapsed time calculated from the remaining amount data in step S108. It is a graph which shows the discharge amount of the solvent liquid which should be.

  As shown in FIG. 8A, when the time T required from the start of functional liquid ejection to the first pixel until the completion of functional liquid ejection to the last pixel has elapsed, the R functional liquid decreases to 85%. , G functional fluid is reduced to 80% and B functional fluid is reduced to 75%. Therefore, in step S104, the control device 10 acquires 85% for the R functional liquid, 80% for the G functional liquid, and 75% for the B functional liquid as remaining amount data of the functional liquid at time T.

  Further, in step S108, based on the remaining amount data shown in FIG. 8A, the amount of the solvent liquid for setting the remaining amount of the functional liquid to 100% is set as the discharge amount required according to the elapsed time. calculate. Incidentally, the discharge amount of the solvent liquid to be increased at the discharge start time (that is, the first pixels R1, G1, B1) is 25% for the B solvent liquid, 20% for the G solvent liquid, and 15% for the R solvent liquid. Is shown. As an example, if the time when the R functional liquid is discharged to the pixel R4 is T / 2 hours after the discharge start, the R solvent liquid needs to be discharged with an increase of 10%. Is shown. In this way, the amount of the solvent liquid to be discharged is reduced with the elapsed time.

  Returning to FIG. 7, next, in step S109, the increased amount of the solvent liquid is discharged from the second head. Each time the position of each nozzle block 30R, 30G, 30B comes to a position where the solvent liquid should be ejected with respect to each pixel in the main scanning movement of the substrate P, the control device 10 each nozzle block 30R, 30G, 30B. Thus, each of the R, G, and B solvent liquids is discharged to each pixel by the discharge amount calculated according to the elapsed time in step S108. In this embodiment, as shown in FIG. 6, since the main scanning direction is downward from the top of the drawing, the R solvent liquid, G solvent liquid, and B solvent liquid are arranged in the order of the nozzle blocks 30R, 30G, and 30B. It is discharged to each pixel. By this process, when the discharge process of the functional liquid and the solvent liquid is completed, the total liquid amount of the functional liquid and the solvent liquid existing in all the pixels can be made substantially the same.

  In step S110, the main scanning (Y-axis direction) of the substrate and the sub-scanning (X-axis direction) of the carriage are finished. Thus, when the discharge of the functional liquid and the solvent liquid is finished for all the pixels, the processing by the liquid material discharge method of this embodiment is finished. For the last pixel (pixel R8, pixel G8, pixel B8), since the amount of the solvent liquid to be discharged is “0”, the solvent liquid is not actually discharged.

  As described above, according to the present embodiment, the discharge amount of the solvent liquid (liquid material) discharged to the pixel (discharged region) is gradually decreased according to the elapsed time. Therefore, when the discharge is completed for all the discharge target areas, the total remaining amount of the functional liquid and the solvent liquid present in each pixel is almost uniform in a state where the amount of the liquid is reduced by natural drying. can do. As a result, the film thickness of the light emitting layer formed by the subsequent vacuum drying process becomes substantially uniform, and variations in the light emission luminance of the light emitting layer are suppressed.

  In the first embodiment, the timing at which each functional liquid is discharged to the first pixel is different for each of the R functional liquid, the G functional liquid, and the B functional liquid. In this case, the total amount of the remaining functional liquid and solvent liquid is different between pixels in which different emission colors are formed. However, all the pixels in which the light emitting layer of the same color is formed remain. Since the total liquid volume of the functional liquid and the solvent liquid is the same, the luminance unevenness is suppressed for each emission color. Therefore, it can be expected that the occurrence of luminance unevenness can be suppressed even in the entire display by all pixels. . Of course, the discharge amount of the solvent liquid may be corrected in advance so that the total amount of the functional liquid and the solvent liquid is the same between pixels of different emission colors.

  As is clear from the description in FIG. 6, the function liquid is discharged from one pixel until the solvent liquid is discharged according to the attachment position of the nozzle head 20 and the nozzle head 30 in the carriage 200. There is a scanning time difference (Δt). In this embodiment, this scanning time difference Δt is treated as not considered. This is because the scanning time difference Δt is actually very short in many cases, and the degree of influence on the dry state of the functional liquid is small. When this scanning time difference Δt is taken into consideration, the data between the elapsed times “0 + Δt” and “T + Δt” is used as the remaining amount data instead of the elapsed time 0-T in FIG. That's fine.

(Second embodiment)
Next, the outline of the second embodiment will be described with reference to FIG. 9, as in FIG. 6, a total of 24 pixels, 4 pixels in the Y-axis direction (vertical direction in the drawing) and 6 pixels in the X-axis direction (horizontal direction in the drawing) formed on the substrate P, R, G, It is a schematic diagram which shows a mode that each R, G, B functional liquid containing the luminescent material which forms each color light emitting layer of B is discharged. Since the functional liquid and solvent liquid ejection scan to each pixel by relative movement of the nozzle heads 20 and 30 with respect to the substrate P is the same as in the first embodiment, illustration and description thereof are omitted.

  As described above, since the present embodiment is a discharge method that suppresses the influence on the film thickness of the light emitting layer due to the difference in the drying speed on the substrate in the drying process, first, the pixels formed on the substrate. The difference in the drying speed of the functional liquid will be described.

  As shown in the drawing, when the functional liquid discharged to each pixel is dried by a drying process such as vacuum drying or heat drying on the substrate P, the speed at which the functional liquid in each pixel is dried usually increases in the peripheral portion. It has been conventionally reported that this is due to the low vapor pressure of the solvent in the peripheral portion and the large amount of heat applied to the peripheral portion. Therefore, for example, as shown in the upper part of FIG. 9, the drying rate in the BB cross-section portion of the substrate P exhibits a distribution profile that the drying rate increases as the distance from the center to the end of the substrate P increases. Become.

  In this example, as shown in FIG. 9, when the drying speed of the central portion of the substrate P is 1, the positions of the drying speed are 1.1 times, 1.2 times, 1.3 times,. It is assumed that it has a distribution profile at the position shown in the plane of the substrate P. As a result, the drying speed of the functional liquid varies depending on the position where each pixel is formed on the substrate P. Thus, when the functional liquid discharged to each pixel is dried with different drying speeds, for example, the pixel B8 is dried faster than the pixel B2, so that the film thickness of the light emitting layer to be formed is small. Different brightness unevenness will occur.

  Therefore, in this embodiment, for example, a pixel having a faster drying speed is intended to form a light-emitting layer having a uniform thickness by offsetting the difference in drying speed by discharging more solvent liquid.

  Now, the liquid material discharge method of the present embodiment will be described with reference to the process flowchart of FIG. The processing shown in FIG. 10 is executed by the control device 10 performing the various control operations described above in accordance with a processing program stored in a memory (not shown) provided in the control device 10. In this process, steps having basically the same processing contents as those shown in FIG. 7 are denoted by the same reference numerals. Accordingly, the description of the processing steps with the same reference numerals is omitted, and different steps S103a, S104a, and S107a will be described.

  First, in step S103a, a process of calculating the position of each pixel with respect to the substrate is performed. The control device 10 calculates the position of each pixel with respect to the substrate P from the position data read in step S101. Here, the shape center position of the pixel is calculated as the pixel position. Incidentally, since the pixel shown in FIG. 9 has an oval shape, the intersection of the center lines in the vertical and horizontal directions is the pixel position. Of course, the pixel position is not limited to the shape center. In short, a position where an almost average value of the drying speed is obtained in the pixel is preferable.

  Next, in step S104a, processing for obtaining the drying speed of the functional liquid at each pixel position on the substrate is performed. In this embodiment, it is assumed that the position data on the substrate P of the lines indicating the respective magnifications of the drying speed shown in FIG. 9 is stored in the memory in the control device 10 as a distribution profile of the drying speed. Of course, the user of the liquid material ejecting apparatus 100 may input and store the distribution profile data in the memory using an input unit (not shown). Therefore, the control device 10 acquires the drying speed of the functional liquid at each pixel position using the stored position data. The drying speed may be obtained by actually drying the substrate P on which the functional liquid of the same liquid amount is discharged to all the pixels in advance.

  In this embodiment, the drying speed is 1 time if it is in the range of 1 to 1.1 times, 1.1 times if it is in the range of 1.1 times to 1.2 times, and so on. In other words, the drying speed of the functional liquid at each pixel position is acquired step by step. By doing so, there is an effect that the discharge amount of the solvent liquid is not increased and the discharge process is facilitated. Of course, it is possible to increase the number of sections of the drying speed (including stepless) and to finely classify the discharge amount of the solvent liquid.

  Incidentally, when the distribution profile of the drying speed shown in FIG. 9 is used, the pixel G2, B2, G3, B3, R6, and R7 are multiplied by the drying speed by the process of step S104a, and the pixels R1, G1, B1, R2, and so on. R3, R5, G5, G6, and G7 are acquired at a drying speed of 1.1 times, and pixels R4, G4, B4, B5, B6, B7, R8, G8, and B8 are acquired at a drying speed of 1.2 times.

  Next, in step S107a, a calculation process of the increase amount of the solvent liquid is performed from the drying speed of the functional liquid at the pixel position. The control device 10 calculates the amount of the solvent liquid to be discharged to each pixel from the acquired drying speed of each pixel. In the present embodiment, the amount of the functional liquid discharged to each pixel is “0.1” if the drying rate is increased by 1.1, that is, 1.1 times, and “0.2” if it is 1.2 times. The value multiplied by “2” is calculated as the amount of increase in the solvent liquid. Of course, the optimum amount of solvent liquid may be actually obtained in advance according to the magnification of the drying speed, and the obtained amount of solvent liquid may be used according to the magnification of the drying speed.

  Thereafter, in the same manner as in the first embodiment, in step S109, the functional liquid is ejected to the pixels formed at the respective positions on the substrate P by ejecting the increased amount of the solvent liquid from the second head. The liquid volume of the + solvent liquid can be set to a liquid volume that is dried almost simultaneously in the drying process.

  As described above, according to this embodiment, the total discharge amount of the functional liquid and the solvent liquid (liquid material) discharged to the pixel (discharge target area) can be changed according to the formation position of the pixel on the substrate. it can. As a result, as a result, the film thickness of the light emitting layer formed by the drying process becomes substantially uniform, and variations in the light emission luminance of the light emitting layer are suppressed.

  As mentioned above, although this invention was demonstrated using embodiment and an Example, this invention is not limited to such an embodiment and an Example at all, and in various forms within the range which does not deviate from the meaning of this invention. Of course, it can be implemented. Hereinafter, a modification will be described.

(First modification)
In the above-described embodiment, the increase in the solvent solution for suppressing the influence on the film thickness due to the decrease in the solvent due to natural drying, and the influence on the film thickness due to the difference in the drying speed on the substrate in the drying process. Although the increase discharge process of the solvent liquid for suppressing was demonstrated as a different process, of course, it is not restricted to this. For example, these two processes may be performed simultaneously.

  The processing according to this modification is shown in the flowchart of FIG. The flowchart shown in FIG. 11 shows a case where the process of the first embodiment shown in FIG. 7 and the process of the second embodiment shown in FIG. 10 are performed as one process. In addition, the same code | symbol is attached | subjected about the process same as the process of 1st Example shown in FIG. 7, and the process of 2nd Example shown in FIG.

  As can be seen from the flowchart shown in FIG. 11, the present modification is different from the first and second embodiments in the process in step S109a, that is, the process of discharging the additional increase amount of the solvent liquid from the second head. . Specifically, in step S109a of the present modification, the increase amount of the solvent liquid with respect to the elapsed time calculated in step S108 and the increase amount of the solvent liquid calculated from the drying speed of the functional liquid at the pixel position in step S107a. And the added amount of the solvent solution is discharged to each pixel.

  By doing so, in addition to the difference in the natural dry state, depending on the total liquid amount of the functional liquid and the solvent liquid present in each pixel when the discharge is completed for all the pixels (discharge target area), The performance variation due to the formation position on the substrate generated in the functional film formed after the drying process such as vacuum drying is suppressed.

(Second modification)
In the liquid material ejection device 100 of the above embodiment, the organic EL panel 50 is described as an example of the display device. However, the present invention is not limited to this. For example, a color filter may be formed.

  An example of the formed color filter is shown in FIG. FIG. 12A is a schematic diagram showing how the color filter is formed. FIG. 12B shows an organic EL panel having a top emission structure, in which the organic EL element formed on the entire display surface by the vapor deposition step emits white light emitted between the anode and the cathode by the formed color filter. It is sectional drawing which shows the structure of the display apparatus inject | emitted as color light.

  As shown in FIG. 12 (a), the color filter has a glass plate as a substrate, and is divided into regions divided by light-shielding regions (BM) provided on the glass plate, from each of the nozzle blocks 20R, 20G, and 20B. A functional liquid containing R, G, and B color filter materials and a solvent is discharged, and then the discharged functional liquid is dried. Therefore, the R filter, G filter, and B filter formed after the drying process are solidified due to differences in the natural drying state due to functional liquid discharge time differences and differences in drying process conditions depending on the position of the glass plate. The formed film thickness may vary. Therefore, if the functional liquid and solvent liquid discharging method according to the above embodiment is used, the R filter, the G filter, and the B filter formed after the drying process are almost the same as the formation of the light emitting layer in the organic EL panel described above. It has a uniform film thickness.

  As a result, as shown in FIG. 12B, the uniformity of the emitted light of the organic EL element that is uniformly formed by the vapor deposition process and emits white light uniformly between the anode and the cathode is maintained. It is possible to provide a display device that converts each color light (R light, G light, B light) in a state. The color filter can also be applied to a so-called liquid crystal display device that converts white backlight light whose brightness is controlled by liquid crystal into color light.

(Third Modification)
In the above embodiment, the difference in the thickness of the light emitting layer (functional layer) generated due to the difference in drying conditions, such as the natural drying at the time of discharging the functional liquid or the difference in the drying speed in the drying process after the functional liquid is discharged, is suppressed. For this reason, only the solvent liquid is discharged to each pixel while increasing the predetermined liquid amount, but it is needless to say that the present invention is not limited to this. For example, the liquid volume of both the solvent liquid and the functional liquid may be changed so that the total liquid volume increases by a predetermined liquid volume. In this way, the discharge amount ratio of the solute and the solvent contained in the functional liquid and the solvent liquid discharged to each pixel can be easily changed for each pixel.

  For example, a large amount of the luminescent material contained in the functional liquid may be deposited and solidified around the bank (see FIG. 5B) in the early stage of drying. In such a case, it is possible that a pixel having an early ejection timing has less light emitting material deposited and solidified in a region sandwiched between the anode and the cathode. For this reason, for example, for a pixel with a quick discharge timing of the functional liquid, the functional liquid is increased by an amount corresponding thereto and discharged. Then, the solvent liquid corresponding to the liquid amount obtained by subtracting the increment of the functional liquid from the predetermined liquid amount to be discharged is discharged.

  Alternatively, only the functional liquid may be increased and discharged by a predetermined amount without discharging the solvent liquid. For example, depending on the mixing ratio of the light-emitting material and the solvent, such as a large mixing ratio of the solvent, the difference in the thickness of the light-emitting layer (functional layer) caused by the difference in the drying conditions is suppressed by increasing the amount of the functional liquid alone. Because there are cases where it can be done.

  In this case, the amount of functional liquid discharged is gradually decreased so that the number of pixels discharged first is the largest and the number of pixels discharged last is the smallest. For example, in the case of the R function liquid, the R function liquid having a smaller liquid volume corresponding to the elapsed time is discharged to the pixel R2 than the R function liquid discharged to the pixel R1, and the pixel R3 is discharged. Discharges a smaller amount of the R function liquid corresponding to the elapsed time, and so on, and so on, and the discharge process of the R function liquid is performed up to the pixel R8.

(Fourth modification)
Moreover, in the said Example, although the solvent contained in a functional liquid and the solvent of the solvent liquid were the solvents of the same composition, it is good not only as this but a solvent of a respectively different composition. In that case, it is preferable that the solvent of the solvent liquid has a lower drying rate than the solvent contained in the functional liquid. By doing so, the amount of evaporation increases because the drying rate decreases, so the amount of the solvent solution that increases can be reduced. As a result, the total liquid volume of the functional liquid and the solvent liquid discharged to the pixels can be reduced, which is effective when the liquid volume that can be discharged to each pixel is limited.

  Incidentally, in the above embodiment, if the light emitting layer is formed, the solvent of the solvent liquid may be “cyclohexylbenzene” with respect to the solvent “1,3,5-trimethylbenzene” contained in the functional liquid. If the hole injection layer is formed, the solvent of the solvent liquid may be “diethylene glycol” with respect to the solvent “ethylene glycol” contained in the functional liquid. Any of these solvents has a boiling point higher than that of the solvent contained in the functional liquid and slows drying.

  In the second embodiment, the increase amount of the solvent liquid is calculated using the distribution profile of the drying rate. However, the present invention is not limited to this, and the increase amount of the solvent liquid is calculated without using the distribution profile. Also good. For example, the liquid amount of the solvent liquid discharged to the pixel may be calculated using a value determined in advance according to the distance from the substrate edge to the central portion. In the case where the difference in the actually measured drying conditions is approximately the same for all the substrates, there is no problem with this uniform calculation method.

(Other variations)
Further, in the above-described embodiment, it has been described that the solvent liquid is discharged after the functional liquid is discharged to each pixel. However, the solvent liquid may be discharged first. For example, when the elapsed time for discharging the functional liquid to each pixel is calculated from the main scanning and sub-scanning movement processes and the functional liquid discharge timing, the discharge is performed based on the measured elapsed time. Since the amount of increase in the solvent liquid to be calculated can be calculated, the solvent liquid can be discharged before the functional liquid is discharged.

  In the above embodiment, the organic EL element is formed as the electroluminescence element, and the functional layers formed by applying the liquid droplets by jetting are described as the hole injection layer and the light emitting layer. Of course, it is not limited to this. For example, when an electron injection layer is formed separately from the cathode, the electron injection layer may be a functional layer formed by droplet ejection. Alternatively, in the case where the light emitting layer also serves as the hole injection layer, only the light emitting layer may be a functional layer formed by application of droplets.

  Moreover, in the said Example, although demonstrated as a display apparatus mounted in a mobile telephone, it is good also as mounting not only in this but in electronic devices other than a mobile telephone. For example, a display device formed according to this embodiment is suitable for an electronic device such as a video camera, a digital camera, or a portable personal computer where display with reduced luminance variation is desired.

The block diagram which shows one Embodiment of the liquid discharge apparatus of this invention. The schematic diagram which shows the arrangement | sequence state of the nozzle pierced by the nozzle head with which the liquid discharge apparatus of this embodiment comprises. Explanatory drawing which shows the electronic device carrying the display apparatus formed using the liquid discharge apparatus of this embodiment. The schematic diagram which showed the whole layout of the organic electroluminescent panel with the circuit structure. FIG. 2 is a schematic diagram illustrating a configuration of a functional layer included in each pixel of an R pixel, a G pixel, and a B pixel in an organic EL panel, where (a) is a plan view thereof, (b) is a sectional view thereof, and (c) is an organic EL element. The schematic diagram which showed a mode that this functional layer was apply | coated and formed by discharge of a liquid material. The schematic diagram which shows a mode that each R, G, B functional liquid is discharged to the pixel formed in the board | substrate. The processing flowchart which shows the discharge method of a functional liquid and a solvent liquid in 1st Example. (A) is a graph which shows the residual amount data of the functional liquid after natural drying in 1st Example, (b) is a graph which shows the discharge amount of the solvent liquid which should be increased. The schematic diagram which shows a mode that each functional liquid of R, G, and B is discharged to the pixel formed in the board | substrate. The processing flowchart which shows the discharge method of a functional liquid and a solvent liquid in 2nd Example. The processing flowchart which shows the discharge method of the functional liquid and solvent liquid with respect to the drying conditions of both natural drying and a drying process in a 1st modification. (A) is a schematic diagram which shows the color filter which the liquid material discharge apparatus of a 2nd modification forms, (b) is sectional drawing of the organic electroluminescent panel using the color filter.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Control apparatus, 20 ... Nozzle head, 20R, 20G, 20B ... Nozzle block, 30 ... Nozzle head, 30R, 30G, 30B ... Nozzle block, 50 ... Organic EL panel, 51 ... Scanning drive circuit, 52 ... Data drive circuit 53, feeding terminal, 54, 55, TFT, 56, holding capacity, 100, liquid ejection device, 101, 102, guide rail, 103, moving table, 105, stage, 112, carriage moving table, 200, carriage, P: Substrate.

Claims (12)

A liquid discharge method for discharging a liquid in a predetermined order with respect to a plurality of discharge target areas formed on a substrate,
A measuring step of measuring an elapsed time from the start of discharge of the liquid material in the first discharge target region among the plurality of discharge target regions;
A change step of changing the discharge amount of the liquid material to be discharged to each of the plurality of discharge target regions according to the measured elapsed time;
A discharge step of discharging the liquid material to each of the plurality of discharge target regions with the changed discharge amount;
A liquid material discharge method characterized by comprising: The liquid discharge method according to claim 1,
For each of the plurality of ejection target regions, an acquisition step of acquiring a formation position with respect to the substrate;
The liquid discharge method according to claim 1, wherein the changing step further changes the discharge amount of the liquid material, which is changed according to the elapsed time, according to the acquired formation position. A liquid material discharge method for discharging a liquid material to a plurality of discharge regions formed on a substrate,
An acquisition step of acquiring a formation position with respect to the substrate for each of the plurality of ejection target regions;
A change step of changing the discharge amount of the liquid material discharged to each of the plurality of discharge target regions according to the acquired formation position;
A discharge step of discharging the changed discharge amount of the liquid material to each of the discharge target regions;
A liquid material discharge method characterized by comprising: It is a liquid discharge method according to claim 2 or 3,
In the changing step, using the distribution profile that defines the drying speed of the liquid material at the formation position of each of the plurality of discharge regions, the liquid material corresponding to the acquired formation position of the discharge region is used. A liquid discharge method characterized by changing the discharge amount. A liquid discharge method according to any one of claims 1 to 4,
The discharging step includes a step of discharging a mixed solution of a solute and a solvent from the first head, and a step of discharging a solvent liquid containing only the solvent from the second head,
A liquid material discharge method, wherein the liquid mixture and the solvent liquid are discharged from each head in accordance with the changed discharge amount. A liquid material discharge method according to any one of claims 1 to 5,
The liquid discharge method, wherein the solvent in the mixed liquid and the solvent in the solvent liquid have different compositions. The liquid discharge method according to claim 5 or 6,
A liquid discharge method comprising changing the discharge amount of the solvent liquid by an amount corresponding to the changed discharge amount of the liquid. A method for producing an organic EL panel having a structure in which a plurality of organic layers including a light emitting layer are sandwiched between an anode and a cathode,
8. A method for manufacturing an organic EL panel, comprising forming at least one of the plurality of organic layers by using the liquid discharge method according to claim 1. A method for producing a color filter in which a plurality of color optical filter layer regions are formed on a glass substrate,
A method for producing a color filter, comprising: forming a light filter layer of at least one color using the liquid material discharge method according to claim 1.   A display device comprising: an organic EL panel manufactured by the method for manufacturing an organic EL panel according to claim 8; and a driving unit that drives the organic EL panel to emit light. A display device that converts white light into color light using a color filter,
The display device according to claim 9, wherein the color filter is a color filter manufactured by the method for manufacturing a color filter according to claim 9.   An electronic apparatus comprising the display device according to claim 10.

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