JP2009242206A - Cleaning tool for glass substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning tool for a glass substrate, which has high performance of cleaning the surface of the glass substrate and has long durable life. <P>SOLUTION: A grindstone piece 16 of the cleaning tool 10 includes a matrix resin 24 as a matrix, and a filler (laminar silica or mica) 22 which is harder than the matrix resin 24 and has the strength lower than that of the glass substrate 42. Consequently, the glass substrate 42 is not damaged by the grindstone piece 16 when performing cleaning. Since a sealing resin stuck to the surface of the glass substrate 42 is suitably deleted and glass cullet stuck to the surface of the glass substrate 42 is suitably flipped, the cleaning tool can keep high performance of cleaning on the surface of the glass substrate 42 and the long durable life. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a glass substrate cleaning tool that includes a plurality of grinding stone pieces and wet-cleans the surface of the glass substrate by bringing the plurality of grinding stone pieces into sliding contact with the surface of the glass substrate.

For example, it is desired to clean the surface of the glass substrate in order to remove the sealing resin and glass cullet attached to the surface during the manufacturing process of the liquid crystal plate. On the other hand, for example, Patent Document 1 proposes an apparatus for cleaning the surface of a glass substrate using a tape. Patent Document 2 proposes an apparatus that cleans the surface of a glass substrate using a blade. Patent Document 3 proposes an apparatus for cleaning the surface of a glass substrate using liquid jet. Patent Document 4 proposes an apparatus that cleans the surface of a glass substrate using a brush.
Japanese Patent No. 3728406 Japanese Patent No. 2581993 Japanese Patent No. 3590711 Japanese Patent No. 2512015

  By the way, although the apparatus disclosed by the said patent document 1 has the washing | cleaning capability of the surface of a glass substrate relatively, since it is a single layer tool, its durable life is short and a large amount of industrial waste is generated after use. There was a drawback. Moreover, since the apparatus disclosed by patent document 2 removes the sealing resin and glass cullet adhering to the glass surface using a blade, while being easy to damage the surface of a glass substrate, to soft resin and oil, There was a drawback that it could not be removed. Further, according to the apparatus disclosed in Patent Document 3, since it is necessary to circulate and process the liquid, the apparatus becomes large and expensive, and equipment is required for waste liquid treatment after cleaning. There were drawbacks. Further, according to the apparatus disclosed in Patent Document 4, since the sealing resin and the glass cullet are removed by applying a brush to the surface of the glass substrate, the apparatus becomes relatively simple and small, but the removal capability, There was a drawback that sufficient cleaning ability could not be obtained.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a glass substrate cleaning tool having a high cleaning performance on the surface of a glass substrate and a long durability life.

  The gist of the invention according to claim 1 for solving the above-mentioned problems is as follows: (1) A plurality of grinding stone pieces are provided, and the plurality of grinding stone pieces are brought into sliding contact with the surface of the glass substrate. A glass substrate cleaning tool for wet-cleaning the surface, wherein (2) the grindstone piece includes a base resin and a filler that is harder than the base resin and lower in strength than the glass substrate.

  The gist of the invention according to claim 2 is that, in the invention according to claim 1, the filler is contained in the grindstone piece at a ratio of 2 to 40% by volume.

  The gist of the invention according to claim 3 is that, in the invention according to claim 1 or 2, the grindstone piece is provided with 0 to 40% by volume of artificial pores.

  The gist of the invention according to claim 4 is that, in the invention according to any one of claims 1 to 3, (1) a cylindrical core portion made of metal or hard synthetic resin, and the core portion An elastically deformable cylindrical elastic support portion attached to the outer peripheral surface of the elastic support portion with a predetermined thickness. (2) The grindstone piece is attached to the outer peripheral surface of the elastic support portion to form a cylinder as a whole. It has a shape.

  Further, the gist of the invention according to claim 5 is that, in the invention according to any one of claims 1 to 3, (1) a disc-shaped substrate is provided, and (2) the grindstone piece is It is to form a disk shape as a whole by being attached to one surface of a disk-shaped substrate.

  A gist of the invention according to claim 6 is that, in the invention according to any one of claims 1 to 5, the filler contains mica or flaky silica.

  The gist of the invention according to claim 7 is that, in the invention according to any one of claims 1 to 6, the filler has an aspect ratio of 5 or more.

  According to the glass substrate cleaning tool of the invention of claim 1, the grindstone piece includes a matrix resin as a matrix and a filler that is harder than the matrix resin and lower in strength than the glass substrate. The sealing resin adhering to the surface of the glass substrate is suitably removed without damaging the glass substrate, and the glass cullet adhering to the surface of the glass substrate is suitably blown off, so the high cleaning performance on the surface of the glass substrate And a long endurance life.

  Moreover, according to the cleaning tool for glass substrates of the invention concerning Claim 2, since the said filler is contained in the said grindstone piece in the ratio of 2 thru | or 40 volume%, a glass substrate is not damaged. Since the sealing resin adhering to the surface of the glass substrate is suitably removed and the glass cullet adhering to the surface of the glass substrate is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate can be obtained.

  Further, according to the glass substrate cleaning tool of the invention of claim 3, since the grindstone pieces are provided with 0 to 40% by volume artificial pores, clogging at the time of cleaning is suppressed. The sealing resin adhering to the surface of the glass substrate is suitably removed without damaging the substrate, and the glass cullet adhering to the surface of the glass substrate is suitably blown off. Long durability life can be obtained.

  According to the cleaning tool for a glass substrate of the invention according to claim 4, (1) a cylindrical core portion made of metal or hard synthetic resin, and attached to the outer peripheral surface of the core portion with a predetermined thickness. (2) The grindstone piece is attached to the outer peripheral surface of the elastic support portion to form a cylindrical shape as a whole. Sealing attached to the surface of the glass substrate without damaging the glass substrate by bringing the grinding stone piece elastically supported by the core portion into contact with the surface of the glass substrate while rotating around the axis of the portion Since the resin is suitably deleted and the glass cullet attached to the surface of the glass substrate is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate can be obtained.

  Moreover, according to the cleaning tool for glass substrates of the invention concerning Claim 5, (1) It is provided with a disk-shaped base material, (2) The said grindstone piece sticks to one surface of the disk-shaped base material. As a whole, it forms a disk shape, so that the grindstone piece fixed to one surface of the flexible disk is rotated around the axis of the flexible disk, and the surface of the glass substrate. Since the sealing resin adhering to the surface of the glass substrate is suitably removed without damaging the glass substrate, the glass cullet adhering to the surface of the glass substrate is suitably blown off, so that the glass substrate is not damaged. High cleaning performance and a long durability life can be obtained on the surface.

  Moreover, according to the cleaning tool for glass substrates of the invention concerning Claim 6, since the said filler contains flaky mica or flaky silica, hardness and intensity | strength are lower than a glass substrate, and hardness is higher than base resin. The glass substrate surface is not damaged by flaky silica, which is broken by contact with a high mica or by contact with the glass substrate and is substantially lower in strength and higher in hardness than the base resin. Since the adhering sealing resin is suitably deleted and the glass cullet attached to the surface of the glass substrate is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate can be obtained.

  Moreover, according to the cleaning tool for glass substrates of the invention concerning Claim 7, since the said filler has an aspect ratio of 5 or more, it adheres to the surface of a glass substrate, without damaging a glass substrate further. Since the sealing resin thus removed is suitably removed and the glass cullet attached to the surface of the glass substrate is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate can be obtained.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a plan view showing a glass substrate cleaning apparatus 40 provided with a glass substrate cleaning tool (hereinafter simply referred to as a cleaning tool) 10 according to an embodiment of the present invention. The glass substrate cleaning device 40 includes, for example, a transport conveyor 44 that continuously transports a glass substrate 42 such as a liquid crystal display panel, and an axis C that is orthogonal to the transport direction indicated by an arrow on the transport conveyor 44. And a rotary shaft 48 that is rotatably supported and is driven to rotate by an electric motor 46. The cleaning tool 10 is supported by the rotating shaft 48 so that the outer peripheral sliding contact surface is at a height that allows sliding contact with the glass substrate 42 on the transport conveyor 44. Further, the glass substrate cleaning device 40 has a cleaning liquid discharge that discharges a cleaning liquid such as water or an aqueous cleaning liquid containing a cleaning aid toward a sliding contact portion between the glass substrate 42 and the cleaning tool 10 on the transport conveyor 44. A device 50 is provided. At the time of cleaning, the glass substrate 42 is continuously transported on the transport conveyor 44, and the cleaning tool 10 slides the outer peripheral sliding contact surface on the surface of the glass substrate 42, and the outer peripheral sliding contact surface is the transport direction. By rotating together with the rotating shaft 48 by the electric motor 46 so as to be in the reverse direction, the surface of the glass substrate 42 is wet-cleaned, and the sealing resin and glass cullet adhering to the surface of the glass substrate 42 are removed. It has become so.

  FIG. 2 is a perspective view showing the entire cleaning tool 10. In FIG. 2, the cleaning tool 10 has a columnar shape or a cylindrical shape as a whole, and a cylindrical core material 12 and a composite elastic body layer 14 that functions as an elastic support portion on the outer peripheral surface of the cylindrical core material 12. And a large number of grindstone pieces 16 fixed via each other.

  The cylindrical core 12 is a relatively hard material having a cylindrical shape with an outer diameter of about 100 (mm), an inner diameter of about 76.2 (mm), and a length of about 610 (mm). It is composed of a paper / resin laminated tube, for example, a paper / phenolic resin laminated tube or a paper / epoxy resin laminated tube, which is formed by impregnating a paper as a base material with a thermosetting resin and heating and pressing.

  The composite elastic layer 14 includes a porous soft elastic layer 18 bonded to the outer peripheral surface of the cylindrical core member 12 and a dense material having an outer diameter of, for example, about 136 (mm) provided to cover the outer peripheral surface. A laminated structure with the elastic body layer 20 is used. The composite elastic body layer 14 is elastically depressed when the grindstone piece 16 is pressed in the radial direction of the cylindrical resin grindstone 10, for example, so that the grindstone piece 16 is relatively displaced along the entire surface of the glass substrate 42. It is provided for possible support and slight elastic deformation. The porous soft elastic body layer 18 is made of a sponge-like elastic body such as polyethylene foam having a thickness of about 20 (mm), for example, from the cylindrical core material 12 and the dense elastic body layer 20. Is also soft enough. The dense elastic body layer 20 is a single layer or multiple layers, and is made of, for example, a fiber reinforced rubber tube.

  In addition, the above-mentioned many grindstone pieces 16 have substantially uniform dimensions and shapes, each having a rectangular shape, for example, a substantially square planar shape having a side of about 10 (mm) and a size of about 10 (mm). It has a thickness dimension. These many grindstone pieces 16 are arranged along, for example, a chord winding inclined at an angle of about 20 °, and a lattice pattern partitioned by grids with a side of 10 (mm) is formed on the entire outer peripheral surface of the cleaning tool 10. Is formed. A small gap of about 1.0 to 2.0 (mm), for example, is provided between the grindstone pieces 16, and the grindstone pieces 16 are not in contact with each other. This gap is for facilitating the passage of the cleaning liquid during cleaning.

  FIG. 3 is an enlarged view showing the surface of the above-mentioned grindstone piece 16 at a magnification of about 100 times. FIG. 4 is a diagram showing the surface of the grindstone piece 16 further enlarged at a magnification of about 2000 times. The grindstone piece 16 includes a filler 22 which is solid particles and a base resin 24 made of a thermosetting resin such as an epoxy resin or a phenol resin, and is contained in the base resin 24 at a ratio of 2 to 40% by volume. Filler 22 is bonded to each other by its base material resin 24. In the grindstone structure of the grindstone piece 16, natural pores 26 and 0 to 40 vol% independent artificial pores 28 are formed. The artificial pores 28 are formed by mixing a well-known spherical pore-forming agent such as polyvinylidene chloride as necessary to prevent clogging. They are sufficiently large and exist substantially uniformly distributed in the tissue independently of each other. However, when the volume of the artificial pores 28 increases, the ratio of the base material resin 24 decreases and the resin removal capability decreases as will be described later, so 40% by volume is set as the upper limit. That is, in the grindstone piece 16, artificial pores 28 having a size of about 30 to 500 μm are formed at a rate of 0 to 40% by volume.

  The cleaning tool 10 configured as described above is manufactured through, for example, the steps shown in FIG. Hereinafter, first, in the core material processing step P1, a cylindrical core material 12 that functions as a core portion is prepared by cutting a material of the cylindrical core material 12 of about several meters into a predetermined dimension. In the sponge sheet processing step P2, a thick plate-like sponge sheet 18m having a thickness of about 20 mm, which is a material of the soft elastic body layer 18, is processed into a predetermined shape. As this sponge sheet, for example, rubber sponge C4305 (rubber hardness 25) manufactured by Inoac Corporation is preferably used. The sponge sheet, which is the processed material of the soft elastic body layer 18 before winding, has both end portions in the circumferential direction of the cylindrical core member 12 having inclined end surfaces whose thickness decreases toward the end edge, The end surface in the axial direction of the cylindrical core member 12 forms a trapezoid. However, it may be a parallelogram.

  Next, in the sponge sheet winding adhesion step P3, an adhesive is applied to the entire inner surface of the material of the soft elastic body layer 18 before winding, and an adhesive is applied to the outer peripheral surface of the cylindrical core 12 as necessary. Is applied and wound around the outer peripheral surface of the cylindrical core member 12 and bonded. In this state, the adhesive layer in which the inclined end surfaces of the sponge sheet, which is the material of the soft elastic body layer 18 before being wound, are aligned with each other at the end surface in the axial direction appears as a line toward the circumferential direction toward the outer periphery. ing. The thickness of the adhesive layer in the radial direction is reduced. Processing is corrected as necessary so that the outer diameter is about 128 mm.

  Next, it is a single layer or multiple layers reinforced with glass fiber, carbon fiber, or chemical fiber as necessary, and has an inner diameter of about 128 mm, which is the same as the outer diameter of the soft elastic layer 18, and 1 to With a thickness of about 4 mm, an adhesive is applied to at least one of the inner peripheral surface of the fiber reinforced rubber tube constituting the dense elastic layer 20 and the outer peripheral surface of the soft elastic layer 18. The cylindrical core member 12 around which the soft elastic body layer 18 is wound is inserted from the opening at one end of the fiber reinforced rubber tube, and bonded in this state.

  On the other hand, the grindstone sheet 36 is produced in the grindstone sheet production processes P5 to P7. That is, in the mixing / molding / curing step P5, filler particles that are harder than the base resin (cured epoxy resin matrix) 24 such as flaky silica and mica and lower in strength than the glass substrate 42, an aqueous epoxy resin solution, and The curing agent is put into a stirring mixer, and if necessary, a surfactant and a phase separation adjusting agent are also put in, stirred and mixed for a predetermined time, and defoamed by vacuum treatment as necessary. Next, the fluid mixture thus obtained is poured into a casting mold and then left for a predetermined time, or the fluid mixture poured into the mold is heated to a predetermined temperature of about 60 ° C. As a result, the epoxy resin in the fluid mixture is cured to form an epoxy resin matrix. At this time, the epoxy resin functions as a binder for bonding the filler particles, and the filler particles are bonded to each other. Further, a large number of independent artificial pores 28 derived from bubbles during stirring are formed, and a relatively porous cured molded body is obtained. Here, in the range where the proportion of filler particles exceeds 40% by volume, the viscosity of the fluid mixture rapidly rises, making it difficult to produce in the above step.

  In the subsequent cutting step P6, when a mold having a size sufficiently larger than the grindstone piece 16 is used, a plurality of plates having the same thickness as the grindstone piece 16 are obtained by cutting the porous grindstone. It is divided into shaped whetstones. Next, in the cutting / rubber sheet bonding / dividing step P7, the grid-like cutting is made from the surface side of the plate-shaped grindstone, and a rubber sheet 38 having a thickness of about 1 mm is bonded to the back surface of the sheet-shaped grindstone. The grinding wheel sheet 36 shown in FIG. 6 is obtained in which a large number of grinding wheel pieces 16 are bonded to the rubber sheet 38 by being divided along the grooves formed by the above-described cutting. The grindstone sheet 36 has, for example, a thin plate shape having a width dimension of about 50 (mm), a length dimension of about 150 (mm), and a thickness dimension of about 10 (mm). For example, a common rubber sheet 38 having a thickness of about 1 (mm) is bonded to one surface of the 34 side, so that a plurality of grindstone pieces 16 are independently supported so as to be capable of minute relative displacement.

  In the grindstone sheet bonding step P8, the grindstone sheet 36 is bonded to the outer peripheral surface of the composite elastic body 34 with an adhesive. The grindstone sheet 36 is sequentially attached so that the longitudinal direction of the grindstone sheet 36 is in a direction along a single spiral (vine line) on the outer peripheral surface of the composite elastic body 34. Then, in the outer diameter finishing process P9, the entire diameter dimension is finished by grinding to about 150 (mm), for example, and in the end face cutting process P10, for example, both ends in the axial center direction are 20 (mm) for finishing. The cylindrical resin grindstone 10 is obtained by cutting with a length dimension of about).

  Hereinafter, the experimental result of the performance test of the cylindrical resin grindstone 10 manufactured as described above will be described.

[Cleaning test method]
According to the polishing test conditions shown in Table 1 below, and a plurality of types of cleaning tools similar to the cleaning tool 10 except that the filler 22 in the grindstone piece 16 is different as shown in Table 2, the addition amounts shown in Table 3 are used. Each glass substrate having a size and shape in which foreign substances shown in Table 4 were fixed to the surface was cleaned using the same tool as shown in FIG. 1 using the cleaning tool. Table 5 shows the cleaning test results.

Table 1 [Cleaning test conditions]

Cleaning tool dimensions: 150mmφ × 300mmL × 76.22mmφ
Cleaning tool core dimensions: 150mmφ × 300mmL × 76.22mmφ
Thickness dimension of cleaning tool grindstone piece: 5mm
Glass substrate dimensions: 300mm x 200mm x 2mmt
Tool rotation speed: 500 rpm
Belt (work) feed speed: 1 m / min
Tool rotation direction: Up direction (opposite direction of belt feed) Cleaning method: Wet (water)

Table 2 [Specifications of fillers contained in the grinding stone pieces of cleaning tools used in cleaning tests]

Filler Diameter (μmφ) Thickness (μmφ) Aspect ratio Mica 10.0 1.2 8.3
Flaky silica 15.8 2.7 5.9
Alumina particles 13.7 5.5 2.5
Silica particles 15.2 7.8 1.9

The diameter φ is an average particle diameter (D50), and the thickness t is an average value (D50). The aspect ratio is an average value φ of the maximum diameter (major axis) of the particles / an average value t of the thickness of the particles, that is, φ / t. The mica and flaky silica are flaky in order to have lower strength than the glass substrate, and have an aspect ratio higher than 5. In terms of Mohs hardness, the glass substrate is about 5 to 6 and the epoxy resin matrix is about 1, whereas the mica is about 2 and can be easily deformed. It has low strength and does not damage the glass substrate even if it is not destroyed. In addition, the flaky silica has a hardness sufficiently higher than that of the epoxy resin matrix, but since it is a flaky particle, it is easily destroyed when it comes into sliding contact with the glass, so that the glass is not damaged. It has lower strength than glass.

Table 3 [Composition of the grinding stone pieces of the cleaning tool used in the cleaning test]

No. Addition amount of matrix filler (volume%) Porosity (volume%)
Example 1 Epoxy None 0 0
2 Epoxy mica 2 0
3 Epoxy mica 50
4 Epoxy mica 10 0
5 Epoxy mica 20 0
6 Epoxy Mica 30 0
7 Epoxy mica 40 0
8 Epoxy Flaky silica 0 0
9 Epoxy flaky silica 2 0
10 Epoxy flaky silica 50
11 Epoxy flaky silica 10 0
12 Epoxy flaky silica 20 0
13 Epoxy flaky silica 30 0
14 Epoxy flaky silica 40 0
15 Epoxy flaky silica 10 5
16 Epoxy Flaky silica 10 10
17 Epoxy Flaky Silica 10 20
Comparative Example 18 Epoxy None 0 0
19 Epoxy alumina particles 100
20 Epoxy silica particles 10 0

Table 4 [Foreign matter adhered to glass substrate used for cleaning test]

Material Contents Remarks
Caret 0.1-0.5mm Generated and adhered when glass is cut Resin Epoxy resin Thread and lump, black
Magic ink Commercial product Bold, oily, red

Table 5 [Cleaning test results]

No. Glass cullet Resin Magic ink Remarks
Example 1 × × △
2 △ △ ○
3 ○ △ ○
4 ○ △ ○
5 ○ ○ ○
6 ○ ○ ○
7 ○ ○ ○
8 × × △
9 △ △ ○
10 ○ △ ○
11 ○ ○ ○
12 ○ ○ ○
13 ○ ○ ○
14 ○ ○ ○
15 ○ △ ○
16 ○ ○ ○
17 ○ ○ ○
Comparative Example 18 × × △
19 ○ △ △
20 ○ ○ ○ Scratches

  In the above washing test results, ◯ marks indicate clean removal, Δ marks indicate relatively sufficient removal, and X marks indicate insufficient removal. According to the results of this cleaning test, Examples 2 to 7 and 9 to 17 in which mica and flaky silica were added as fillers at a ratio of 2 to 40% by volume were more than conventional with respect to the removal of glass cullet, resin and magic ink. Remarkably good results were obtained. Further, a more preferable result was obtained when the ratio was 5 to 40% by volume, and a more preferable result was obtained when the ratio was 20 to 40% by volume. However, in Examples 18 to 20 in which general oxide particles such as alumina particles and silica particles were added as fillers, the glass cullet and the resin were not sufficiently removed, or even if it was sufficient, Scratches occurred on the surface. Regarding the removal of glass cullet, the larger the proportion of the filler, the higher the removal capability. If the filler is less than 2% by volume, the removal becomes insufficient. Regarding the removal of the resin, the removal capacity increases as the amount of the matrix resin increases with less filler. Note that, as described above, when the proportion of the filler exceeds 40% by volume, the viscosity is rapidly increased and the production becomes difficult, and thus it is not included in the experiment. From the above results, it is lower in strength or rigidity than the glass substrate that does not damage the glass by being broken upon contact with the glass substrate, and higher hardness than the matrix resin so that the attached resin can be removed efficiently. It has been clarified that a high cleaning effect can be obtained when flaky silica particles or flaky mica provided with is mixed in the matrix resin in the range of 2 to 40% by volume as a filler.

  As described above, according to the cleaning tool 10 of the present embodiment, the grindstone piece 16 includes the base resin 24 as a matrix and the filler 22 that is harder than the base resin 24 and lower in strength than the glass substrate 42. Therefore, the sealing resin adhering to the surface of the glass substrate 42 is suitably removed without damaging the glass substrate 42 by the grindstone piece 16 during cleaning, and the glass cullet adhering to the surface of the glass substrate 42 is suitably repelled. Therefore, high cleaning performance and a long durability life on the surface of the glass substrate 42 can be obtained.

  Further, according to the cleaning tool 10 of the present embodiment, the filler 22 is contained in the grindstone piece 16 at a ratio of 2 to 40% by volume, so that the glass substrate 42 is not damaged by the grindstone piece 16 during cleaning. The sealing resin adhering to the surface of the glass substrate 42 is suitably deleted, and the glass cullet adhering to the surface of the glass substrate 42 is suitably blown off, so that high cleaning performance and long durability life on the surface of the glass substrate 42 are achieved. And is obtained.

  Further, according to the cleaning tool 10 of the present embodiment, since the grindstone piece 16 includes the artificial pores 28 of 0 to 40% by volume, clogging at the time of cleaning is suppressed, so that the glass substrate 42 is damaged. Without cleaning, the sealing resin adhering to the surface of the glass substrate 42 is preferably removed during cleaning, and the glass cullet adhering to the surface of the glass substrate 42 is suitably blown off, so that high cleaning on the surface of the glass substrate 42 is achieved. Performance and long durability life are obtained.

  In addition, the cleaning tool 10 of this embodiment is (1) a metal or hard synthetic resin cylindrical core material (core portion) 12 and a predetermined thickness attached to the outer peripheral surface of the cylindrical core material 12. (2) The grindstone piece 16 is attached to the outer peripheral surface of the composite elastic body layer 14 to form a cylindrical shape as a whole. In the wet cleaning, the grindstone piece 16 elastically supported by the cylindrical core member 12 is rotationally driven around the axis C of the cylindrical core member 12 during the wet cleaning. Since the sealing resin adhering to the surface of the glass substrate 42 is suitably deleted without damaging the glass substrate 42, the glass cullet adhering to the surface of the glass substrate 42 is suitably blown off. , Glass base 42 high at the surface of the cleaning performance and the long service life is obtained.

  Further, according to the cleaning tool 10 of the present embodiment, the filler 22 included in the grindstone piece 16 includes mica or flaky silica, and thus has a hardness and strength lower than those of the glass substrate 42 and is harder than that of the base resin 24. A glass substrate without damaging the glass substrate 42 by flaky silica having a substantially lower strength and higher hardness than the base resin 24 due to contact action by a high mica or by contact with the glass substrate 42 Since the sealing resin adhering to the surface of 42 is suitably deleted and the glass cullet adhering to the surface of the glass substrate 42 is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate 42 are achieved. can get.

  Further, according to the cleaning tool 10 of the present embodiment, the filler 22 is in the form of a flake having an aspect ratio of 5 or more, and therefore, the sealing material adhered to the surface of the glass substrate 42 without damaging the glass substrate 42. Since the stop resin is suitably deleted and the glass cullet attached to the surface of the glass substrate 42 is suitably blown off, high cleaning performance and a long durability life on the surface of the glass substrate 42 can be obtained.

  Next, another embodiment of the present invention will be described. In the following description, parts common to those in the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 7 is a perspective view showing a cleaning tool 60 having a disk shape according to another embodiment of the present invention. In FIG. 7, a cleaning tool 60 includes a disk-shaped base material 62 that is a flexible elastic body made of, for example, synthetic resin, metal, and the surface of the base material 62 directly or as necessary. A plurality of grindstone pieces 16 fixed through an elastically deformable elastic layer similar to the composite elastic body 14 are provided.

  According to the cleaning tool 60 of the present embodiment, the grindstone piece 16 fixed on one surface of the base material 62 of the disc is rotated and driven around the axis of the disc-like base material 62. The sealing resin adhering to the surface of the glass substrate 42 is suitably deleted without damaging the glass substrate 42, and the glass cullet adhering to the surface of the glass substrate 42 is suitably blown off. Therefore, high cleaning performance and a long durability life on the surface of the glass substrate 42 can be obtained.

  As mentioned above, although one Example of this invention was described based on drawing, this invention can be implemented also in an aspect different from the said Example.

  For example, in the above-described embodiment, flaky silica or mica was used as the filler 22 mixed into the base resin 24. However, if the particles are harder than the base resin 24 and lower in strength than the glass substrate 42, It does not necessarily have to be flaky silica or mica.

  Further, although the artificial pores 28 are formed in the grindstone piece 16 of the above-described embodiment, it is not always necessary to provide them.

  In the above-described embodiment, the epoxy resin is used as the base resin 24. However, it is not necessarily an epoxy resin, and may be a thermosetting resin such as a phenol resin, or a thermoplastic resin. There may be.

  Moreover, in the Example, the grindstone piece 16 can be used with a various form in the dimension and shape.

  What has been described above is merely an example of the present invention, and the present invention can be variously modified without departing from the spirit of the present invention.

It is a figure explaining the principal part structure of the glass substrate cleaning apparatus provided with the cleaning tool for glass substrates of one Example of this invention. It is a perspective view which shows the cylindrical glass substrate cleaning tool with which the glass substrate cleaning apparatus of FIG. 1 is equipped. It is an enlarged view which shows the grindstone piece with which the cleaning tool of FIG. 1 and FIG. 2 is equipped. It is a figure which further expands and shows the grindstone piece with which the cleaning tool of FIG. 1 and FIG. 2 is equipped. It is process drawing explaining the manufacturing process of the cleaning tool of FIG. 1 and FIG. It is a perspective view which shows the grindstone sheet used at the manufacturing process of FIG. . It is a perspective view which shows the disk shaped cleaning tool of the other Example of this invention.

Explanation of symbols

10, 60: Glass substrate cleaning tool 12: Cylindrical core material (core part)
14: Composite elastic layer (elastic support part)
16: Wheel piece 22: Filler 24: Base material resin 26: Natural pore 28: Artificial pore

Claims (7)

A glass substrate cleaning tool comprising a plurality of grinding stone pieces and wet-cleaning the surface of the glass substrate by sliding the plurality of grinding stone pieces against the surface of the glass substrate,
The cleaning tool for a glass substrate, wherein the grindstone piece includes a base resin and a filler that is harder than the base resin and lower in strength than the glass substrate.
Whetstone,   The glass substrate cleaning tool according to claim 1, wherein the filler is contained in the grindstone piece at a rate of 2 to 40% by volume.   3. The glass substrate cleaning tool according to claim 1, wherein the grindstone piece is provided with 0 to 40 vol% artificial pores. 4. A cylindrical core portion made of metal or hard synthetic resin, and an elastically deformable cylindrical elastic support portion attached to the outer peripheral surface of the core portion with a predetermined thickness,
The glass substrate cleaning tool according to any one of claims 1 to 3, wherein the grindstone piece forms a cylindrical shape as a whole by being attached to the outer peripheral surface of the elastic support portion. Equipped with a disk-shaped substrate,
4. The glass substrate cleaning tool according to claim 1, wherein the grindstone piece forms a disk shape as a whole by being attached to one surface of the disk-shaped base material. 5.   The glass substrate cleaning tool according to any one of claims 1 to 5, wherein the filler contains mica or flaky silica.   The glass substrate cleaning tool according to claim 6, wherein the filler has an aspect ratio of 5 or more.

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