JP2009242123A - Catalyst apparatus - Google Patents

Catalyst apparatus Download PDF

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JP2009242123A
JP2009242123A JP2008087367A JP2008087367A JP2009242123A JP 2009242123 A JP2009242123 A JP 2009242123A JP 2008087367 A JP2008087367 A JP 2008087367A JP 2008087367 A JP2008087367 A JP 2008087367A JP 2009242123 A JP2009242123 A JP 2009242123A
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catalyst
peripheral surface
gas
partition
outer peripheral
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Taro Matsuoka
太郎 松岡
Fumihiro Yamashita
文弘 山下
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Tamura Corp
Tamura FA System Corp
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Tamura Corp
Tamura FA System Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a catalyst apparatus where heat loss can be reduced and where the temperature of nitrogen gas after passing a catalyst can be lowered in the catalyst apparatus. <P>SOLUTION: The catalyst apparatus 200 has a cylindrical catalyst housing body 204 located in a case 205 and a cylindrical partition 203 located so as to surround the periphery of the catalyst housing body 204. The inner peripheral surface of the partition 203 is positioned so as to oppose the outer peripheral surface of the catalyst housing body 204. The outer peripheral surface of the partition 203 is positioned so as to oppose the inner peripheral surface of the case 205. A space formed between the outer peripheral surface of the catalyst housing body 204 and the inner peripheral surface of the partition 203 becomes a first gas flow path 207. A space formed between the outer peripheral surface of the partition 203 and the inner peripheral surface of the case 205 becomes a second gas flow path 208. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

この発明は、高純度窒素ガスを供給する窒素ガス発生装置に用いる触媒装置に関する、   The present invention relates to a catalyst device used in a nitrogen gas generator that supplies high-purity nitrogen gas.

はんだ付け方法として、浸漬はんだ付け法、リフローはんだ付け法が知られている。何れの方法の場合でも、不活性の窒素ガス(N2ガス)の雰囲気中ではんだ付けを行うことによって、酸化が抑制され、はんだ不良を減少させることができ、はんだ付けの品質を向上することができる等の効果がある。例えばリフロー装置の炉体内に窒素ガスを供給する装置が下記の特許文献1に記載されている。 As a soldering method, an immersion soldering method and a reflow soldering method are known. In any case, by performing soldering in an atmosphere of inert nitrogen gas (N 2 gas), oxidation can be suppressed, solder defects can be reduced, and soldering quality can be improved. There are effects such as being able to. For example, a device for supplying nitrogen gas into a furnace of a reflow device is described in Patent Document 1 below.

特開平6−183705号公報JP-A-6-183705

図1は、リフロー装置の一例の概略的構成を示す。プリント配線基板の両面に表面実装用電子部品が搭載された被加熱物が搬送コンベヤの上に置かれ、搬入口71からリフロー装置の炉体内に搬入される。搬送コンベヤが所定速度で矢印方向(図1に向かって左から右方向)へ被加熱物を搬送し、被加熱物が搬出口72から取り出される。   FIG. 1 shows a schematic configuration of an example of a reflow apparatus. An object to be heated, on which electronic components for surface mounting are mounted on both sides of the printed wiring board, is placed on a conveyor, and is carried into the furnace body of the reflow apparatus from the carry-in entrance 71. The conveyor conveys the object to be heated in the direction of the arrow (from left to right as viewed in FIG. 1) at a predetermined speed, and the object to be heated is taken out from the carry-out port 72.

搬入口71から搬出口72に至る搬送経路に沿って、リフロー炉が例えば9個のゾーンZ1からZ9に順次分割され、これらのゾーンZ1〜Z9がインライン状に配列されている。入り口側から7個のゾーンZ1〜Z7が加熱ゾーンであり、出口側の2個のゾーンZ8およびZ9が冷却ゾーンである。冷却ゾーンZ8およびZ9に関連して強制冷却ユニット73が設けられている。各加熱ゾーンには、加熱のために上部炉体74および下部炉体75が対向して設けられ、対向間隙を被加熱物が搬送される。上部炉体74および下部炉体75は、被加熱物に対して熱風(熱せられた雰囲気ガス)を噴出して被加熱物を加熱する。複数のゾーンZ1〜Z9がリフロー時の温度プロファイルにしたがって被加熱物の温度を制御する。   A reflow furnace is sequentially divided into, for example, nine zones Z1 to Z9 along the transfer path from the carry-in entrance 71 to the carry-out exit 72, and these zones Z1 to Z9 are arranged in-line. Seven zones Z1 to Z7 from the inlet side are heating zones, and two zones Z8 and Z9 on the outlet side are cooling zones. A forced cooling unit 73 is provided in relation to the cooling zones Z8 and Z9. In each heating zone, an upper furnace body 74 and a lower furnace body 75 are provided facing each other for heating, and an object to be heated is conveyed through the facing gap. The upper furnace body 74 and the lower furnace body 75 heat the object to be heated by blowing hot air (heated atmosphere gas) onto the object to be heated. Several zone Z1-Z9 controls the temperature of a to-be-heated object according to the temperature profile at the time of reflow.

上部炉体74は、例えばターボファンの構成の送風機と、ヒータと、熱風が通過する多数の小孔を有するパネル(蓄熱部材)とを有し、パネルの小孔を通過した熱風が被加熱物に対して上側から吹きつけられる。下部炉体75も上部炉体74と同様の構成を有し、パネルの小孔を通過した熱風が被加熱物に対して下側から吹きつけられる。   The upper furnace body 74 has, for example, a blower configured as a turbo fan, a heater, and a panel (heat storage member) having a large number of small holes through which hot air passes, and the hot air that has passed through the small holes in the panel is heated. Is sprayed from above. The lower furnace body 75 also has the same configuration as the upper furnace body 74, and hot air that has passed through the small holes in the panel is blown against the object to be heated from below.

窒素ガス発生装置76が設けられ、窒素ガスが配管77を通じてリフロー装置の例えば出口側に配置された噴射管78からリフロー装置内に噴射される。噴射管78の位置は、出口側以外の場所に設けても良い。リフロー装置内に噴射された窒素ガスが炉体内を通って入り口側および出口側の通路を通じて炉外に流出される。   A nitrogen gas generation device 76 is provided, and nitrogen gas is injected into the reflow device through a pipe 77 from an injection pipe 78 disposed on the outlet side of the reflow device, for example. You may provide the position of the injection pipe 78 in places other than an exit side. Nitrogen gas injected into the reflow apparatus passes through the furnace body and flows out of the furnace through passages on the inlet side and the outlet side.

特許文献1の窒素ガス発生装置76では、窒素をリフロー装置に供給するにあたって、膜分離窒素発生装置で分離した比較的低純度の窒素ガスの酸素濃度を低下させるために、窒素ガスに水素を除く常温で気体または液体の可燃性物質を添加した後、触媒装置に通して、低純度の窒素ガスが含有する酸素を除去する。   In the nitrogen gas generator 76 of Patent Document 1, when supplying nitrogen to the reflow device, hydrogen is removed from the nitrogen gas in order to reduce the oxygen concentration of the relatively low purity nitrogen gas separated by the membrane separation nitrogen generator. After adding a gas or liquid flammable substance at room temperature, it is passed through a catalyst device to remove oxygen contained in low-purity nitrogen gas.

触媒装置は、円筒状容器内に触媒が収納され、窒素ガスと可燃性ガスの混合気体が触媒を通過する。触媒装置は、パラジウム(Pd)、白金(Pt)などの貴金属を使用したものである。予め、外部の予熱器によって加熱された窒素ガスが、ヒータによって加熱されて触媒を通過することによって、可燃性物質と窒素ガスに含まれている酸素とが触媒燃焼し、触媒装置から取り出される窒素ガスの酸素濃度がより低いものとされる。触媒通過後の窒素ガスは、その反応熱によって高温になっているので、外部に設けられた熱交換器で原料窒素ガスとの熱交換により冷却された後、水分除去装置で水分が除去され、リフロー装置にガスが供給される。   In the catalyst device, a catalyst is accommodated in a cylindrical container, and a mixed gas of nitrogen gas and combustible gas passes through the catalyst. The catalyst device uses a noble metal such as palladium (Pd) or platinum (Pt). Nitrogen gas heated in advance by an external preheater is heated by a heater and passes through the catalyst, whereby the combustible substance and oxygen contained in the nitrogen gas undergo catalytic combustion, and nitrogen taken out from the catalyst device The oxygen concentration of the gas is assumed to be lower. Since the nitrogen gas after passing through the catalyst has a high temperature due to its reaction heat, it is cooled by heat exchange with the raw material nitrogen gas in a heat exchanger provided outside, and then moisture is removed by a moisture removing device, Gas is supplied to the reflow device.

可燃性ガスを触媒で燃焼させるには、触媒温度を150℃以上にしなければ反応率が低くなるため、触媒通過後の窒素ガスは150℃以上の高温状態である。しかしながら、高温状態の窒素ガスをそのまま排出すると、下流に位置する空圧機器、配管材料の耐熱温度を越えてしまう問題があった。   In order to burn the combustible gas with the catalyst, the reaction rate decreases unless the catalyst temperature is set to 150 ° C. or higher. Therefore, the nitrogen gas after passing through the catalyst is in a high temperature state of 150 ° C. or higher. However, if nitrogen gas in a high temperature state is discharged as it is, there is a problem that the heat resistance temperature of the pneumatic equipment and piping material located downstream is exceeded.

特許文献1に記載された触媒装置では、触媒装置通過前のガスの予熱を外部に設けた予熱器で行っているので、ガスが予熱器から触媒装置に流入する前に冷却され、熱が損失してしまう。   In the catalyst device described in Patent Document 1, since preheating of the gas before passing through the catalyst device is performed by a preheater provided outside, the gas is cooled before flowing into the catalyst device from the preheater, and heat is lost. Resulting in.

したがって、この発明の目的は、熱損失を低減でき、触媒装置内で触媒通過後の窒素ガス温度を低下させることができる触媒装置を提供することにある。   Accordingly, an object of the present invention is to provide a catalyst device that can reduce heat loss and reduce the temperature of nitrogen gas after passing through the catalyst in the catalyst device.

上述した課題を解決するために、この発明は、
酸素を含む窒素ガスに対して可燃性ガスが混合された混合ガスを、触媒で燃焼させ酸素を除去する触媒装置であって、
触媒を収納する触媒収納体と、
触媒収納体の外周面に対向する内周面を有する第1の隔壁と、
第1の隔壁の外周面と対向する内周面を有し、その外周面が外気と接する第2の隔壁と、
触媒収納体内の触媒に通すガスを加熱するヒータとを備え、
触媒収納体の外周面と第1の隔壁の内周面とにより第1の空間が形成され
第1の隔壁の外周面と第2の隔壁の内周面とにより第2の空間が形成され、
混合ガスが、第1の空間を流通した後、触媒収納体に流入し、
触媒収納体に流入したガスが、触媒を流通した後、第2の空間に流入し、
第2の空間に流入したガスが、第2の空間を流通した後、外部に流出する触媒装置である。
In order to solve the above-described problems, the present invention provides:
A catalyst device that removes oxygen by burning a mixed gas in which a combustible gas is mixed with nitrogen gas containing oxygen with a catalyst,
A catalyst housing for housing the catalyst;
A first partition having an inner peripheral surface facing the outer peripheral surface of the catalyst housing;
A second partition having an inner peripheral surface facing the outer peripheral surface of the first partition, the outer peripheral surface being in contact with the outside air;
A heater for heating the gas passed through the catalyst in the catalyst housing,
A first space is formed by the outer peripheral surface of the catalyst housing and the inner peripheral surface of the first partition, and a second space is formed by the outer peripheral surface of the first partition and the inner peripheral surface of the second partition,
After the mixed gas flows through the first space, it flows into the catalyst housing,
After the gas flowing into the catalyst housing flows through the catalyst, it flows into the second space,
The gas that flows into the second space is a catalyst device that flows to the outside after flowing through the second space.

この発明では、熱交換により、熱損失を低減でき、触媒通過後のガスの温度を触媒装置内で低下させることができる。   In the present invention, heat loss can be reduced by heat exchange, and the temperature of the gas after passing through the catalyst can be lowered in the catalyst device.

この発明によれば、熱損失を低減でき、触媒通過後のガスの温度を触媒装置内で低下させることができる。   According to this invention, heat loss can be reduced, and the temperature of the gas after passing through the catalyst can be lowered in the catalyst device.

以下、この発明の実施の形態について図面を参照して説明する。まず、この発明の一実施の形態による触媒装置の構成について説明する。図2は、この発明の一実施の形態による触媒装置の構成を示す断面図である。   Embodiments of the present invention will be described below with reference to the drawings. First, the configuration of a catalyst device according to an embodiment of the present invention will be described. FIG. 2 is a cross-sectional view showing the configuration of the catalyst device according to one embodiment of the present invention.

図2に示す触媒装置200は、膜分離窒素発生装置で分離した比較的低純度の窒素ガスの酸素濃度を低下させるために、酸素を含む窒素ガスに可燃性ガスを混合させたものを、触媒で燃焼させるものである。   The catalyst device 200 shown in FIG. 2 is obtained by mixing a combustible gas with a nitrogen gas containing oxygen in order to reduce the oxygen concentration of the relatively low purity nitrogen gas separated by the membrane separation nitrogen generator. It burns with.

触媒装置200は、ケース205内に設けられた筒状の触媒収納体204と、触媒収納体204の周囲を取り囲むように設けられた筒状の隔壁203とを有する。   The catalyst device 200 includes a cylindrical catalyst storage body 204 provided in a case 205 and a cylindrical partition wall 203 provided so as to surround the periphery of the catalyst storage body 204.

触媒収納体204には、触媒202が担持されている。触媒202は、例えば、パラジウム(Pd)、白金(Pt)等の貴金属を使用したものである。触媒202を通過することによって、可燃性物質と窒素ガスに含まれている酸素とが触媒燃焼し、触媒装置200から取り出される窒素ガスの酸素濃度が、より低いものとされる。   A catalyst 202 is carried on the catalyst housing 204. The catalyst 202 uses a noble metal such as palladium (Pd) or platinum (Pt). By passing through the catalyst 202, the combustible substance and the oxygen contained in the nitrogen gas undergo catalytic combustion, and the oxygen concentration of the nitrogen gas taken out from the catalyst device 200 is made lower.

隔壁203の内周面は、触媒収納体204の外周面に対向するように設けられている。隔壁203の外周面は、ケース205の内周面に対向するように設けられている。触媒収納体204の外周面と隔壁203の内周面との間に形成された空間は、第1のガス流通路207となる。隔壁203の外周面とケース205の内周面との間に形成された空間は、第2のガス流通路208となる。   The inner peripheral surface of the partition wall 203 is provided so as to face the outer peripheral surface of the catalyst housing 204. The outer peripheral surface of the partition wall 203 is provided so as to face the inner peripheral surface of the case 205. A space formed between the outer peripheral surface of the catalyst housing 204 and the inner peripheral surface of the partition wall 203 becomes a first gas flow passage 207. A space formed between the outer peripheral surface of the partition wall 203 and the inner peripheral surface of the case 205 serves as a second gas flow path 208.

触媒装置200において、ガス導入口201から導入されたガスは、図2中の矢印A〜Fの示す順のように、ガス導入口201→第1のガス流通路207→ヒータ206→触媒収納体204→第2のガス流通路208→ガス導出口209の経路で流通する。   In the catalyst device 200, the gas introduced from the gas inlet 201 is in the order indicated by arrows A to F in FIG. 2, the gas inlet 201 → the first gas flow passage 207 → the heater 206 → the catalyst housing. The gas flows through 204 → second gas flow path 208 → gas outlet 209.

第1のガス流通路207を流通するガスは、触媒202と触媒収納体204を介して熱交換を行い、温度が上昇する。同時に、第1のガス流通路207を流通するガスは、第2のガス流通路208を流通する触媒通過後の高温のガスとも隔壁203を介して熱交換を行い、第2のガス流通路208を流通するガスの温度を低下させる。   The gas flowing through the first gas flow passage 207 exchanges heat through the catalyst 202 and the catalyst housing 204, and the temperature rises. At the same time, the gas flowing through the first gas flow passage 207 exchanges heat with the high-temperature gas after passing through the catalyst flowing through the second gas flow passage 208 via the partition wall 203, and the second gas flow passage 208. Reduce the temperature of the gas flowing through.

ヒータ206によって、ガスが所定の温度に加熱された後、触媒収納体204を通過することによって、可燃性ガスと窒素ガスに含まれる酸素とが触媒燃焼される。触媒収納体204通過後のガスは、例えば150℃以上の高温となっており、第2のガス流通路208に流入する。ガスの温度制御のために、温度検出用の例えば熱電対などの温度センサ212と温度センサ212の検出信号が供給され、ヒータ206の供給電力を制御する温度制御部116とが設けられている。   After the gas is heated to a predetermined temperature by the heater 206, the combustible gas and oxygen contained in the nitrogen gas are catalytically combusted by passing through the catalyst housing 204. The gas after passing through the catalyst housing 204 has a high temperature of, for example, 150 ° C. or higher and flows into the second gas flow path 208. In order to control the temperature of the gas, a temperature sensor 212 such as a thermocouple for temperature detection, and a detection signal from the temperature sensor 212 are provided, and a temperature control unit 116 that controls the power supplied to the heater 206 is provided.

第2のガス流通路208を流通するガスは、ケース205の外部とケース205の外壁を介しての熱交換および第1のガス流通路207を流通するガスと隔壁203を介しての熱交換により、温度が例えば80℃以下ぐらいまで低下する。第2のガス流通路208を通過後、温度低下したガスが、ガス導出口209から導出される。   The gas flowing through the second gas flow passage 208 is exchanged by heat exchange between the outside of the case 205 and the outer wall of the case 205 and heat exchange between the gas flowing through the first gas flow passage 207 and the partition wall 203. The temperature drops to about 80 ° C. or lower, for example. After passing through the second gas flow passage 208, the gas whose temperature has decreased is led out from the gas outlet 209.

すなわち、触媒装置200のガス経路において、ガス温度は、以下のように変化する。ガス導入口201→第1のガス流通路207(温度上昇(予熱))→ヒータ206(温度上昇)→触媒収納体204→第2のガス流通路208(温度低下)→ガス導出口209。   That is, in the gas path of the catalyst device 200, the gas temperature changes as follows. Gas inlet 201 → first gas flow passage 207 (temperature rise (preheating)) → heater 206 (temperature rise) → catalyst housing 204 → second gas flow passage 208 (temperature drop) → gas outlet 209.

この発明の一実施形態による触媒装置200では、触媒装置200内で、触媒通過後の高温のガスの温度を、熱交換により低下させることができる。これにより、触媒通過後のガス温度を、下流に位置する空圧機器、配管材料の耐熱温度より、低くすることができる。また、ケース205内のガス流通経路を層状に構成することによって、熱交換によってガス温度を上昇(予熱)または低下させることができ、これにより、熱損失の少ない触媒装置を実現できる。   In the catalyst device 200 according to an embodiment of the present invention, the temperature of the high-temperature gas after passing through the catalyst in the catalyst device 200 can be reduced by heat exchange. Thereby, the gas temperature after passing a catalyst can be made lower than the heat resistance temperature of the pneumatic equipment and piping material located downstream. Further, by configuring the gas flow path in the case 205 in a layered manner, the gas temperature can be increased (preheated) or decreased by heat exchange, thereby realizing a catalyst device with less heat loss.

以上、この発明の実施の形態について具体的に説明したが、この発明は、上述の実施の形態に限定されるものではなく、この発明の技術的思想に基づく各種の変形が可能である。例えばこの発明は、はんだ付け装置以外の装置に対して窒素ガスを供給する場合に対して適用することができる。また、触媒収納体の形状や隔壁の形状は、上述した例に限定されるものではない。さらに例えば、複数の隔壁を設けて、ガス流通路を3層以上にしてもよい。さらに、例えば、ケースに放熱フィンを設けるような構成としてもよい。   Although the embodiment of the present invention has been specifically described above, the present invention is not limited to the above-described embodiment, and various modifications based on the technical idea of the present invention are possible. For example, the present invention can be applied to a case where nitrogen gas is supplied to an apparatus other than the soldering apparatus. Further, the shape of the catalyst housing and the shape of the partition walls are not limited to the above-described examples. Further, for example, a plurality of partition walls may be provided, and the gas flow passage may be three or more layers. Furthermore, for example, a configuration in which heat radiating fins are provided in the case may be employed.

この発明を適用できるリフロー装置の概略を示す略線図である。It is a basic diagram which shows the outline of the reflow apparatus which can apply this invention. この発明の一実施形態による触媒装置の構成を示す略線図である。It is a basic diagram which shows the structure of the catalyst apparatus by one Embodiment of this invention.

符号の説明Explanation of symbols

116・・・温度制御部
200・・・触媒装置
201・・・ガス導入口
202・・・触媒
203・・・隔壁
204・・・触媒収納体
205・・・ケース
206・・・ヒータ
207・・・ガス流通路
208・・・ガス流通路
209・・・ガス導出口
212・・・温度センサ
DESCRIPTION OF SYMBOLS 116 ... Temperature control part 200 ... Catalyst apparatus 201 ... Gas introduction port 202 ... Catalyst 203 ... Partition 204 ... Catalyst storage body 205 ... Case 206 ... Heater 207 ...・ Gas flow passage 208 ... Gas flow passage 209 ... Gas outlet 212 ... Temperature sensor

Claims (3)

酸素を含む窒素ガスに対して可燃性ガスが混合された混合ガスを、触媒で燃焼させ酸素を除去する触媒装置であって、
上記触媒を収納する触媒収納体と、
上記触媒収納体の外周面に対向する内周面を有する第1の隔壁と、
上記第1の隔壁の外周面と対向する内周面を有し、その外周面が外気と接する第2の隔壁と、
上記触媒収納体内の上記触媒に通すガスを加熱するヒータとを備え、
上記触媒収納体の外周面と上記第1の隔壁の内周面とにより第1の空間が形成され
上記第1の隔壁の外周面と上記第2の隔壁の内周面とにより第2の空間が形成され、
外部から導入された上記混合ガスが、上記第1の空間を流通し、上記ヒータにより加熱後、上記触媒収納体に流入し、
上記触媒収納体に流入したガスが、上記触媒を流通した後、上記第2の空間に流入し、
上記第2の空間に流入したガスが、上記第2の空間を流通した後、外部に流出する触媒装置。
A catalyst device that removes oxygen by burning a mixed gas in which a combustible gas is mixed with nitrogen gas containing oxygen with a catalyst,
A catalyst housing for housing the catalyst;
A first partition having an inner peripheral surface facing the outer peripheral surface of the catalyst housing;
A second partition wall having an inner peripheral surface facing the outer peripheral surface of the first partition wall, the outer peripheral surface contacting the outside air;
A heater for heating a gas passed through the catalyst in the catalyst housing,
A first space is formed by the outer peripheral surface of the catalyst housing and the inner peripheral surface of the first partition, and a second space is formed by the outer peripheral surface of the first partition and the inner peripheral surface of the second partition. Formed,
The mixed gas introduced from the outside flows through the first space, and after being heated by the heater, flows into the catalyst housing,
After the gas flowing into the catalyst housing flows through the catalyst, it flows into the second space,
The catalyst device in which the gas flowing into the second space flows out after flowing through the second space.
上記ヒータの温度を制御する温度制御部を備える請求項1記載の触媒装置。   The catalyst device according to claim 1, further comprising a temperature control unit that controls a temperature of the heater. 上記酸素を含む窒素ガスは、窒素分離膜を通して得られたものである請求項1記載の触媒装置。   The catalyst device according to claim 1, wherein the nitrogen gas containing oxygen is obtained through a nitrogen separation membrane.
JP2008087367A 2008-03-28 2008-03-28 Catalyst apparatus Pending JP2009242123A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011049232A1 (en) 2009-10-21 2011-04-28 Ishihara Sangyo Kaisha, Ltd. Diaryltriazole derivative as insecticide, miticide, nematicide or soil pesticide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011049232A1 (en) 2009-10-21 2011-04-28 Ishihara Sangyo Kaisha, Ltd. Diaryltriazole derivative as insecticide, miticide, nematicide or soil pesticide

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