JP2009239859A - Method of manufacturing tuning fork vibration reed - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To expand an adjustment range of an oscillation frequency. <P>SOLUTION: A base material 10 includes a base part 16, and a plurality of arm sections 18 arranged and extended in a direction crossing the thickness direction of the base part 16 from the base part 16. At each of the arm sections 18, the base material 10 is prepared, which has a first side 13 opposing the adjacent arm section 18 and a second side 15 facing a side opposite to the first side 13, and has an exposure region 30 in which at least one of the first and second sides 13, 15 is exposed. The exposure region 30 is etched. By etching, the width of the arm section 18 is reduced, thus lowering flexural rigidity in the width direction of the plurality of arm sections 18. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a tuning fork type resonator element.

Conventionally, in order to adjust the vibration frequency of a vibrating piece used in an oscillator or the like, it is known to remove a part of the metal film of the vibrating arm with a laser beam (Patent Document 1). Specifically, by removing a part of the metal film, the weight is reduced and the vibration frequency is adjusted. However, adjustment by weight has a limited adjustment range because the adjustment amount is small.
JP 2002-252546 A

  An object of the present invention is to expand the adjustment range of the vibration frequency.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1] A method for manufacturing a tuning fork type resonator element according to this application example is as follows.
A base including a base and a plurality of arms extending side by side in a direction intersecting a thickness direction of the base from the base, each arm being a first side surface facing the adjacent arm and Providing a base material having a second side surface facing away from the first side surface and having an exposed region in which at least one of the first and second side surfaces is exposed;
Etching the exposed region,
The width of the arm portion is reduced by the etching, and the bending rigidity of the plurality of arm portions in the width direction is lowered. According to this application example, the vibration frequency can be adjusted by adjusting the width of the arm and adjusting the bending rigidity. Since the frequency adjustment based on the width of the arm portion has a larger adjustment amount than the adjustment based on the weight, the adjustment range of the vibration frequency can be expanded.
[Application Example 2] A method for manufacturing a tuning fork type resonator element according to this application example is as follows.
A base material including a base and a plurality of arms extending side by side in the direction crossing the base in the thickness direction of the base, each arm being a first side surface facing the adjacent arm; and Providing a substrate having a second side facing the opposite side of the first side;
Forming a reinforcing film on the first or second side surface,
The reinforcement film increases the bending rigidity of the plurality of arm portions in the width direction. According to this application example, the vibration frequency can be adjusted by adjusting the width of the arm and adjusting the bending rigidity. Since the frequency adjustment based on the width of the arm portion has a larger adjustment amount than the adjustment based on the weight, the adjustment range of the vibration frequency can be expanded.
[Application Example 3] In the method of manufacturing a tuning-fork type resonator element according to this application example,
A step of forming a lower electrode film on at least one of the first and second surfaces defining the thicknesses of the plurality of arms and facing in opposite directions; a step of forming a piezoelectric film; and an upper electrode film Forming first and second piezoelectric laminates in which the piezoelectric film is sandwiched between the lower electrode film and the upper electrode film, and the first piezoelectric laminate The lower electrode film and the upper electrode film of the second piezoelectric laminate are connected, and the upper electrode film of the first piezoelectric laminate and the lower electrode film of the second piezoelectric laminate are connected. Is done.
Application Example 4 A method for manufacturing a tuning fork type resonator element according to this application example includes a base portion and a plurality of arm portions extending side by side in a direction intersecting the thickness direction of the base portion from the base portion, and has piezoelectricity. Each of the arm portions is provided with a base material having a first side surface facing the adjacent arm portion and a second side surface facing the opposite side to the first side surface; Forming first and second side surfaces, first and second surfaces defining thicknesses of the plurality of arm portions and facing opposite directions, forming a surface electrode film, and the first and second surfaces Forming a reinforcing film on the side surface.
Application Example 5 In the method for manufacturing a tuning-fork type resonator element according to this application example, the width of the plurality of arm portions is further increased by etching the reinforcing film formed on the first and second side surfaces. Adjusting the bending stiffness with respect to the direction.

(First embodiment)
1 to 2 are diagrams for explaining a method for manufacturing a tuning fork type resonator element according to the first embodiment of the invention. In the present embodiment, a base material 10 is prepared. The substrate 10 may be made of a piezoelectric material such as quartz (for example, a Z cut plate, an AT cut plate, an X cut plate), or may be made of silicon. The substrate 10 has first and second surfaces 12, 14 that define a thickness facing away from each other. The base material 10 includes a base portion 16 and a plurality (a pair) of arm portions 18 that extend from the base portion 16 so as to be orthogonal to the thickness direction thereof. This shape can be obtained by etching the plate material (at least one of wet etching and dry etching). The arm portion 18 includes a first side surface 13 that faces the adjacent arm portion 18 and a second side surface 15 that faces away from the first side surface 13. The distance between the first and second side surfaces 13 and 15 is the width of the arm portion 18. The base material 10 has an exposed region 30 (a region not covered with an electrode film or the like) at least one of the first and second side surfaces 13 and 15.

  A lower electrode film 20 is formed on the surface (first or second surface 12, 14) excluding the first and second side surfaces 13, 15 of the arm portion 18. Although not shown, the lower electrode film 20 is formed so as to reach the base 16. The formation of the lower electrode film 20 may include a process of forming a conductive film by sputtering or vapor deposition and then patterning the conductive film by etching. Or after forming the patterned mask in the base material 10, you may form a electrically conductive film in the area | region which is not covered with the mask of the base material 10. FIG. A piezoelectric film 22 is formed on the lower electrode film 20. The piezoelectric film 22 is made of a material having higher piezoelectricity than quartz, such as ZnO, AlN, PZT. The piezoelectric film 22 is formed on the arm portion 18. For forming the piezoelectric film 22, a CVD method, a PVD method, a sol-gel method, or the like can be applied in addition to the technology for forming the lower electrode film 20 except for the material. An upper electrode film 24 is formed on the piezoelectric film 22. A technique for forming the lower electrode film 20 can be applied to the formation of the upper electrode film 24. The upper electrode film 24 is also formed so as to reach the base 16.

  A piezoelectric laminate 26 is constituted by the piezoelectric film 22 sandwiched between the lower electrode film 20 and the upper electrode film 24. One arm portion 18 is provided with a pair of piezoelectric laminates 26 on each of the first and second surfaces 12 and 14. Each of the pair of piezoelectric laminates 26 extends along the length direction of the arm portion 18 and is adjacent to the width direction of the arm portion 18. Further, the pair of piezoelectric laminates 26 may be formed to extend to the base portion 16, but the effect of exciting the arm portion 18 by the base piezoelectric laminate body 26 in the region of the base portion 16 is small. The pair of piezoelectric laminates 26 are located at both ends in the width direction of the arm portion 18 so that when the piezoelectric film 22 of one piezoelectric laminate 26 expands, the piezoelectric film 22 of the other piezoelectric laminate 26 contracts. Driven.

  As shown in FIG. 1, a weight metal film 28 is formed on at least one of the first and second surfaces 12 and 14 of the arm portion 18. The weight metal film 28 is formed on the distal end portion of the arm portion 18 on the side opposite to the base portion 16.

As shown in FIG. 2, the exposed regions 30 of the first and second side surfaces 13 and 15 are etched. For the etching, dry etching using a plasma gas such as CF ₄ or C ₂ F ₆ can be applied. When etching the exposed region 30, the first and second surfaces 12, 14 may be etched.

  According to the present embodiment, since the exposed region 30 is etched, the width of the arm portion 18 is reduced, and the arm portion 18 can be easily bent in the width direction. And by adjusting the width | variety of the some arm part 18, the ease of bending of the width direction of the arm part 18 can be adjusted, and a vibration frequency can be adjusted. Since the frequency adjustment by the width of the plurality of arm portions 18 has a larger adjustment amount than the adjustment by weight, the adjustment range of the vibration frequency can be expanded.

The bending rigidity EI in the width direction is used as an index of the difficulty and ease of bending of the arm 18. As shown in FIG. 12, when a bending moment M (S indicates a neutral surface) is applied to the arm portion 18 (beam in a broad sense), the arm portion 18 has a curvature 1 / ρ (= dθ / dx). )
1 / ρ = M / EI
Have the relationship. The higher the bending stiffness EI, the less likely it is to bend.

  E is the Young's modulus specific to the material, and I is the second moment of section.

  The secondary moment of section I is the sum of the values obtained by multiplying the small cross-sectional element dA by the square of the distance y from the neutral axis AX where the tensile stress is 0 when it is bent. Defined in

I = ∫ _A y ² dA
As shown in FIG. 13, the secondary moment I of the cross section of the arm portion 18 having a rectangular cross section having a side length (thickness) t parallel to the neutral axis AX and a side length (width) w perpendicular to the neutral axis AX. _w is
I _w = ^tw 3/12
It becomes. Therefore, since the cross-sectional secondary moment and the bending rigidity in the width direction are proportional to the cube of the width w of the arm portion 18, the ease of bending in the width direction can be largely controlled by adjusting the width.

The vibration frequency F in the width direction of the arm 18, the length L of the arm 18, and the width (length in the vibrating direction) w of the arm 18 are:
F = k · w / L ² (k: proportional constant)
Have the relationship. The change in the thickness of the arm portion 18 does not affect the vibration frequency in the width direction.

  FIG. 3 is a diagram for explaining a method for manufacturing a tuning fork vibrator using the tuning fork vibrating piece manufactured by the method according to the first embodiment of the present invention. In the present embodiment, the exposed region 30 of at least one of the first and second side surfaces 13 and 15 is etched by the process described above, the width of the arm portion 18 is reduced by etching, and the arm portion 18 is moved in the width direction. The tuning-fork type vibrating piece 1 that is easy to bend is obtained.

  In the tuning fork vibrator manufacturing method, a package 32 is prepared. The package 32 includes a bottom portion 34 for fixing the tuning fork type vibrating piece 1 and a frame wall portion 36 surrounding the bottom portion 34. The package 32 may be entirely formed of metal, but when it is mainly formed of non-metal such as ceramics, the upper end surface of the frame wall portion 36 is metallized. The bottom 34 is formed with a vent hole 38 for evacuation. A fixed electrode 40 is formed on the inner surface of the package 32 (bottom 34). External terminals 42 are formed on the outer surface of the package 32 (bottom 34). The fixed electrode 40 and the external terminal 42 are electrically connected by a wiring (not shown). The external terminals 42 are mounted on a circuit board wiring pattern (not shown) by soldering or the like. A ring 44 is fixed to the frame wall portion 36 of the package 32 by brazing.

  Then, the tuning fork type resonator element 1 is accommodated in the package 32. The tuning fork type resonator element 1 is disposed such that the upper electrode film 24 faces the fixed electrode 40 with the first or second surface 12 or 14 facing the bottom 34. Here, it is desirable that the weight metal film 28 described later is disposed so as to face the bottom 34 of the package 32. The tuning fork type resonator element 1 is fixed so that the arm portion 18 extends from the base portion 16 toward the frame wall portion 36. The base portion 16 is fixed to the bottom portion 34, and the arm portion 18 is lifted from the package 32. The bottom portion 34 has a low area facing the tip portion of the arm portion 18, so that it is difficult to contact the bottom portion 34 even if the arm portion 18 is bent.

  The package 32 and the tuning fork type resonator element 1 are fixed by the joining member 46. The joining member 46 may be a metal material such as a conductive resin material or solder. Metallic materials are preferred because they do not emit gas when heated. The joining member 46 joins the base portion 16 and the package 32 and holds the arm portion 18 in a state of floating from the package 32. The joining member 46 electrically and mechanically joins the upper electrode film 24 and the fixed electrode 40 in the base portion 16.

  A lid 48 is fixed to the ring 44. The lid 48 overlaps the package 32 to which the tuning fork type vibrating piece 1 is fixed and closes the opening of the package 32. The lid 48 has a through hole 50 that penetrates the front surface and the back surface. The through hole 50 has a circular opening shape. The lid 48 includes a light transmissive member 52 made of a material such as glass or resin. The light transmissive member 52 is in close contact with the inner surface of the through hole 50.

  After the opening of the package 32 is closed by the lid 48, the inside of the package 32 closed by the lid 48 is evacuated through the ventilation hole 38 formed in the package 32, and then the ventilation hole 38 is closed by the brazing material 54. .

  The method for manufacturing a tuning fork vibrator may further include a step of trimming the weight metal film 28 at the tip of the arm 18. This step is performed after the opening of the package 32 is closed by the lid 48 (for example, after the evacuation step). This step is performed by irradiating the weight metal film 28 with a laser beam through the light transmissive member 52. By doing so, the weight metal film 28 can be lightened. The heavier the tip part of the arm part 18 on which the weight metal film 28 is formed, the lower the vibration frequency of the arm part 18, and the lighter the vibration frequency of the arm part 18 becomes. This can be used to adjust the frequency. The above-described frequency adjustment by etching the arm portion 18 is referred to as coarse adjustment, and the frequency adjustment by trimming the weight metal film 28 can be referred to as fine adjustment. The trimming of the weight metal film 28 may be performed using an ion beam instead of the laser beam. In that case, ion beam irradiation is performed before the tuning fork type vibrating piece 1 is attached to the package 32, or before the weight metal film 28 faces the opening of the package 32 and the cover 48 closes the opening. Ion beam irradiation is performed.

  FIG. 4 is a cross-sectional view for explaining the operation of the tuning fork vibrator according to the first embodiment of the present invention. The tuning fork vibrator manufactured according to the present embodiment includes a configuration that is obvious from the above process.

  In the present embodiment, the upper electrode film 24 and the lower electrode film 20 are connected to an AC power supply by a cross wiring, and an alternating voltage as a drive voltage is applied. The direction of the electric field between the upper electrode film 24 and the lower electrode film 20 determines whether the piezoelectric film 22 expands or contracts. In one arm 18, the pair of piezoelectric laminates 26 provided on the first and second surfaces 12 and 14 so as to be positioned at the end close to the first side surface 13 is formed on the first surface 12 side. When the piezoelectric film 22 extends, the lower electrode films 20 and the upper electrode films 24 of the respective piezoelectric laminates 26 are electrically connected so that the piezoelectric film 22 on the second surface 14 side also extends. The same applies to the piezoelectric laminate 26 located at the end close to the second side surface 15. Further, the lower electrode film 20 of one piezoelectric laminate 26 and the upper electrode film 24 of the other piezoelectric laminate 26 are electrically connected. The electrical connection is made in this way because the crystal axis direction is determined by the growth direction of the piezoelectric film 22, so the crystal orientation of the piezoelectric film 22 is plane-symmetrical on the first surface 12 side and the second surface 14 side. Because it becomes.

  In addition, the piezoelectric laminate 26 near the first side surface 13 of one arm 18 and the piezoelectric laminate 26 near the first side 13 of the other arm 18 have the same potential between the lower electrode films 20. Thus, the upper electrode films 24 are electrically connected so as to have the same potential. The same applies to the piezoelectric laminate 26 close to the second side surface 15.

  A voltage is applied between the upper electrode film 24 and the lower electrode film 20 to stretch the piezoelectric film 22 close to the second side face 15 and to shrink the piezoelectric film 22 close to the first side face 13. The portions 18 are bent so as to approach each other. Next, by extending the piezoelectric film 22 close to the first side surface 13 and contracting the piezoelectric film 22 close to the second side surface 15, the arm portion 18 is bent in the direction in which the first or second side surfaces 13 and 15 are separated. To do. The arm 18 is bent and vibrated by repeating expansion and contraction of the piezoelectric film 22. When driven at the natural vibration frequency of the fundamental wave mode, the pair of arm portions 18 are excited to be in antiphase vibrations and bend and vibrate.

  A tuning fork vibrator can be used to constitute an oscillator or sensor. When an oscillator is constituted by an oscillation circuit including a tuning fork type vibrator, an AC signal with high frequency accuracy can be obtained. A sensor using a tuning fork type vibrator is a sensor that detects the physical quantity by utilizing the change in the frequency of the tuning fork type resonator element according to the physical quantity. For example, a sensor that detects stress generated by temperature, acceleration, Coriolis force generated by angular velocity, and the like can be given as an example.

(Modification)
FIG. 5 is a diagram for explaining a modification of the method for manufacturing the tuning-fork type resonator element according to the first embodiment of the invention. In this modification, instead of etching the arm portion 18, the reinforcing film 60 is formed on the first or second side surfaces 13 and 15. For example, the reinforcing film 60 is formed by forming a film using SiO ₂ , Au, Cr, Al, or the like. The reinforcing film 60 increases the width of the arm portion 18 to increase the bending rigidity of the plurality of arm portions 18 in the width direction. The other configurations and processes correspond to those described in the above embodiment. Also in this modification, the vibration frequency can be adjusted by adjusting the width of the arm portion 18 and adjusting the bending rigidity. Furthermore, the bending rigidity in the width direction of the plurality of arm portions 18 may be adjusted by etching the reinforcing film 60.

(Second Embodiment)
FIG. 6 is a diagram for explaining a method for manufacturing a tuning-fork type vibrating piece according to the second embodiment of the present invention. In the substrate 110 prepared in this embodiment, the piezoelectric laminate 126 is provided on the first surface 112, but the first surface 112 is not provided with the piezoelectric laminate 126. Different from the embodiment. Also in the present embodiment, the exposed region 130 is etched on at least one of the first and second side surfaces 113 and 115 to adjust the width of the arm portion 118. Thereby, the vibration frequency can be adjusted. The contents described in the first embodiment are applicable to other structures and processes.

  As a modification, a reinforcing film 160 may be formed on the first or second side surfaces 113 and 115 as shown in FIG. For other structures and processes, the contents described in the modification of the first embodiment are applicable.

  FIG. 8 is a cross-sectional view for explaining the operation of the tuning fork vibrator according to the second embodiment of the present invention. The tuning fork vibrator manufactured according to the present embodiment includes a configuration that is obvious from the above process.

  Also in this embodiment, the upper electrode film 124 and the lower electrode film 120 are connected to an AC power supply by a cross wiring, and an alternating voltage as a drive voltage is applied. However, unlike the first embodiment, since the piezoelectric laminate 126 is provided only on the first surface 112, the vibration of the arm portion 118 includes not only a bend but also a twist component.

(Third embodiment)
9 and 10 are views for explaining a method for manufacturing a tuning-fork type resonator element according to the third embodiment of the invention. In the substrate 310 prepared in this embodiment, the surface electrode film 320 is formed on the first and second surfaces 312 and 314, and the side electrode film 330 is formed on the first and second side surfaces 313 and 315. ing. In the present embodiment, the substrate 310 itself is a piezoelectric body (for example, quartz).

  Then, a reinforcing film 360 is formed on the first and second side surfaces 313 and 315 (precisely above the first and second side surfaces 313 and 315 and on the side electrode film 330). The details are as described in the modification of the first embodiment. The reinforcing film 360 may be attached to the first and second surfaces 312 and 314. However, in the example of FIG. In order to form, the reinforcement film 360 is not formed in the 2nd surface 314 which opposes a stand. Also in this embodiment, the vibration frequency can be adjusted by adjusting the width of the arm portion 318 by etching the reinforcing film 360 and adjusting the bending rigidity.

  FIG. 11 is a cross-sectional view for explaining the operation of the tuning fork vibrator according to the third embodiment of the present invention. The tuning fork vibrator manufactured according to the present embodiment includes a configuration that is obvious from the above process.

  In the present embodiment, a voltage is applied between the surface electrode film 320 formed on the first and second surfaces 312 and 314 and the side electrode film 330 formed on the first and second side surfaces 313 and 315. Apply. An electric field is generated by the applied voltage as shown by an arrow in FIG. The surface electrode film 320 and the side electrode film 330 are connected to an AC power supply by a cross wiring, and an alternating voltage as a drive voltage is applied. As a result, the arm portions 318 are excited and flexurally vibrated so that the vibrations are in reverse phase with each other (the tip sides of the arm portions 318 are close to and away from each other). Further, the alternating voltage as the drive voltage is adjusted so as to vibrate in the basic mode.

  The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same purposes and results). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

It is a figure explaining the manufacturing method of the tuning fork type vibration piece which concerns on the 1st Embodiment of this invention. It is a figure explaining the manufacturing method of the tuning fork type vibration piece which concerns on the 1st Embodiment of this invention. It is a figure explaining the manufacturing method of the tuning fork type vibrator using the tuning fork type vibration piece manufactured by the method concerning a 1st embodiment of the present invention. FIG. 5 is a cross-sectional view for explaining the operation of the tuning fork vibrator according to the first embodiment of the present invention. It is a figure explaining the modification of the manufacturing method of the tuning fork type vibration piece which concerns on the 1st Embodiment of this invention. It is a figure explaining the manufacturing method of the tuning fork type vibration piece which concerns on the 2nd Embodiment of this invention. It is a figure explaining the modification of the manufacturing method of the tuning fork type vibration piece which concerns on the 2nd Embodiment of this invention. It is sectional drawing explaining operation | movement of the tuning fork type vibrator according to the second embodiment of the present invention. It is a figure explaining the manufacturing method of the tuning fork type vibration piece which concerns on the 3rd Embodiment of this invention. It is a figure explaining the manufacturing method of the tuning fork type vibration piece which concerns on the 3rd Embodiment of this invention. It is sectional drawing explaining operation | movement of the tuning fork type | formula vibrator concerning the 3rd Embodiment of this invention. It is a figure showing the bending moment and deflection of an arm part. It is a figure explaining a section secondary moment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Tuning fork type vibration piece, 10 ... Base material, 12 ... 1st surface, 13 ... 1st side surface, 14 ... 2nd surface, 15 ... 2nd side surface, 16 ... Base part, 18 ... Arm part, 20 ... Lower electrode film, 22 ... Piezoelectric film, 24 ... Upper electrode film, 26 ... Piezoelectric laminate, 28 ... Weight metal film, 30 ... Exposed region, 32 ... Package, 34 ... Bottom, 36 ... Frame wall, 38 ... Through Pore, 40 ... fixed electrode, 42 ... external terminal, 44 ... ring, 46 ... joining member, 48 ... lid, 50 ... through hole, 52 ... light transmissive member, 54 ... brazing material, 60 ... reinforcing film, 110 ... base Material: 112: First surface 113: First side 114: Second surface 115: Second side 118: Arm part 120: Lower electrode film 124: Upper electrode film 126: Piezoelectric Laminated body 130 ... exposed area 160 ... reinforcement 310 ... Base material, 312 ... First surface, 313 ... First side, 314 ... Second surface, 315 ... Second side, 318 ... Arm part, 320 ... Surface electrode film, 330 ... Side electrode film 360 ... Reinforcing membrane

Claims (5)

A base including a base and a plurality of arms extending side by side in a direction intersecting a thickness direction of the base from the base, each arm being a first side surface facing the adjacent arm and Providing a base material having a second side surface facing away from the first side surface and having an exposed region in which at least one of the first and second side surfaces is exposed;
Etching the exposed region,
A method for manufacturing a tuning-fork type vibrating piece in which the width of the arm portion is reduced by the etching to lower the bending rigidity of the plurality of arm portions in the width direction. A base including a base and a plurality of arms extending side by side in a direction intersecting a thickness direction of the base from the base, each arm being a first side surface facing the adjacent arm; and Providing a substrate having a second side facing away from the first side;
Forming a reinforcing film on the first or second side surface,
A method for manufacturing a tuning-fork type vibrating piece in which bending strength in the width direction of the plurality of arm portions is increased by the reinforcing film. In the manufacturing method of the tuning fork type resonator element according to claim 1 or 2,
At least one of the first and second surfaces defining the thickness of the plurality of arms and facing in opposite directions,
Forming a lower electrode film;
Forming a piezoelectric film;
Forming an upper electrode film;
Further comprising
First and second piezoelectric laminates in which the piezoelectric film is sandwiched between the lower electrode film and the upper electrode film are formed, and the lower electrode film and the second piezoelectric laminate of the first piezoelectric laminate are formed. A method for producing a tuning fork type resonator element, wherein the upper electrode film of the body is connected, and the upper electrode film of the first piezoelectric laminate and the lower electrode film of the second piezoelectric laminate are connected. A base and a plurality of arms extending side by side in a direction intersecting the thickness direction of the base from the base, and a base material having piezoelectricity, and each of the arms is adjacent to the adjacent arm Providing a base material having a first side surface and a second side surface facing the opposite side of the first side surface;
Forming first and second side surfaces, first and second surfaces defining thicknesses of the plurality of arm portions and facing opposite directions, and a surface electrode film;
Forming a reinforcing film on the first and second side surfaces;
A method for manufacturing a tuning-fork type vibrating piece having In the manufacturing method of the tuning fork type vibration piece according to claim 4,
A method for manufacturing a tuning fork type resonator element, comprising: adjusting a bending rigidity of the plurality of arm portions in the width direction by etching the reinforcing film formed on the first and second side surfaces.

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