JP2009236412A - Continuous firing furnace - Google Patents

Continuous firing furnace Download PDF

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JP2009236412A
JP2009236412A JP2008083821A JP2008083821A JP2009236412A JP 2009236412 A JP2009236412 A JP 2009236412A JP 2008083821 A JP2008083821 A JP 2008083821A JP 2008083821 A JP2008083821 A JP 2008083821A JP 2009236412 A JP2009236412 A JP 2009236412A
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air
ejector
furnace
binder component
firing furnace
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JP5491000B2 (en
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Tomofumi Sugifuji
倫史 杉藤
Hajime Oume
元 青梅
Susumu Sakaguchi
進 阪口
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a continuous firing furnace for preventing adhesion of binder components to an inner face of an ejector forcibly exhausting atmosphere gas of a furnace interior containing the binder components. <P>SOLUTION: In the continuous firing furnace with the ejector 9 attached to an atmosphere gas exhaust passage 8a exhausting the atmosphere gas in the furnace containing the binder components generated by a treated product to a furnace exterior, it is composed by providing an air heating means 11 for heating air to a temperature higher than a condensation temperature of the binder components to an air supply passage 10 supplying air to the ejector 9. By supplying the air heated to the temperature higher than the condensation temperature of the binder components by the air heating means 11 to the ejector 9, the binder components in the atmosphere gas forcibly exhausted to the furnace exterior is cooled, and condensation to the inner face of the ejector 9 is prevented. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は連続焼成炉に関し、特に、被処理品から発生するバインダー成分を含んだ炉内の雰囲気ガスを強制排気するためのエジェクターの内面に、バインダー成分が結露して凝着しないように改良した連続焼成炉に関する。   The present invention relates to a continuous firing furnace, and in particular, has been improved so that the binder component does not condense on the inner surface of the ejector for forcibly exhausting the atmospheric gas in the furnace containing the binder component generated from the article to be processed. The present invention relates to a continuous firing furnace.

バインダーを含む被処理品を連続焼成炉で焼成すると、被処理品からバインダー成分が発生するため、このバインダー成分を含んだ炉内の雰囲気ガスを炉外へ排気して触媒で処理するか、或いは、炉内において触媒で処理してから炉外へ排気するようにしている。その場合、バインダー成分を含んだ雰囲気ガスや、炉内において触媒で処理された雰囲気ガスは、排気管に設けたエジェクターにエアーを給気してベンチュリー効果で強制的に排気するのが一般的である。   When the article to be treated containing the binder is baked in a continuous firing furnace, a binder component is generated from the article to be treated, so the atmosphere gas containing the binder component is exhausted out of the furnace and treated with a catalyst, or Then, after treating with a catalyst in the furnace, it is exhausted to the outside of the furnace. In that case, the atmospheric gas containing the binder component or the atmospheric gas treated with the catalyst in the furnace is generally exhausted by the venturi effect by supplying air to the ejector provided in the exhaust pipe. is there.

本出願人も、バインダー成分を処理する触媒ユニットを炉内の触媒活性化温度領域に設け、炉内でバインダー成分を効率良く処理して省エネルギー化を図り、排気管に設けたエジェクターで炉外へ強制排気するように構成した連続焼成炉を既に提案した(特許文献1)。
特開2007−139289号公報
The present applicant also provides a catalyst unit for treating the binder component in the catalyst activation temperature region in the furnace, efficiently treats the binder component in the furnace to save energy, and uses the ejector provided in the exhaust pipe to go outside the furnace. A continuous firing furnace configured to forcibly exhaust has already been proposed (Patent Document 1).
JP 2007-139289 A

しかしながら、エジェクターで強制排気する場合、上記特許文献1の連続焼成炉のようにバインダー成分が炉内で既に触媒で処理されていれば問題を生じることはないが、未処理のバインダー成分を含んだ雰囲気ガスをエジェクターで強制排気すると、次のような問題が生じる。   However, in the case of forced evacuation with an ejector, there is no problem if the binder component has already been treated with a catalyst in the furnace as in the continuous firing furnace of Patent Document 1, but the untreated binder component was included. When the atmospheric gas is forcibly exhausted with an ejector, the following problems occur.

即ち、従来の連続焼成炉では、エジェクターに給気するエアーとして常温の外気をそのまま利用しているため、エジェクターに給気されるエアーによって、バインダー成分を含んだ強制排気される雰囲気ガスが冷やされ、その結果、バインダー成分が結露して、図7に示すようにエジェクター9のエアー吐出ノズル9aより前方の内面にバインダー成分Bが凝着するという問題が生じる。このようにバインダー成分Bが凝着すると、排気不良や排気詰まりが生じて、炉内の雰囲気ガス中のバインダー成分の濃度が高くなるので、得られる焼成品は不良品となる。   That is, in the conventional continuous firing furnace, ambient air is used as it is as air supplied to the ejector, so that the forcedly exhausted atmosphere gas containing the binder component is cooled by the air supplied to the ejector. As a result, the binder component is condensed, and the binder component B adheres to the inner surface in front of the air discharge nozzle 9a of the ejector 9 as shown in FIG. When the binder component B adheres in this manner, exhaust failure or exhaust clogging occurs, and the concentration of the binder component in the atmospheric gas in the furnace increases, so that the obtained fired product becomes a defective product.

本発明は上記の問題に対処すべくなされたもので、その解決しようとする課題は、バインダー成分を含んだ炉内の雰囲気ガスを強制排気するエジェクターの内面にバインダー成分が結露して凝着するのを防止できる連続焼成炉を提供することにある。   The present invention has been made to cope with the above problem, and the problem to be solved is that the binder component is condensed and adhered to the inner surface of the ejector forcibly exhausting the atmospheric gas in the furnace containing the binder component. An object of the present invention is to provide a continuous firing furnace capable of preventing the above.

上記課題を解決するため、本発明に係る連続焼成炉は、被処理品より発生するバインダー成分を含んだ炉内の雰囲気ガスを炉外に排気する雰囲気ガス排気路にエジェクターを取付けた連続焼成炉において、エジェクターにエアーを給気するエアー給気路に、エアーをバインダー成分の凝縮温度より高い温度に加熱するエアー加熱手段を設けたことを特徴とするものである。   In order to solve the above problems, a continuous firing furnace according to the present invention is a continuous firing furnace in which an ejector is attached to an atmosphere gas exhaust path for exhausting the atmosphere gas in the furnace containing the binder component generated from the product to be processed out of the furnace. In the above, an air heating means for heating the air to a temperature higher than the condensation temperature of the binder component is provided in an air supply path for supplying air to the ejector.

本発明の連続焼成炉においては、エアー加熱手段が、エアー給気路に設けたヒータであって、エアーの流れる内部通路を有し、この内部通路に電熱源を内蔵したものであることが好ましい。   In the continuous firing furnace of the present invention, it is preferable that the air heating means is a heater provided in the air supply passage, has an internal passage through which air flows, and an electric heat source is built in the internal passage. .

本発明の連続焼成炉のように、エジェクターにエアーを給気するエアー給気路に、エアーをバインダー成分の凝縮温度より高い温度に加熱するエアー加熱手段を設けてあると、エジェクターにバインダー成分の凝縮温度以上に加熱したエアーを給気することができるので、炉外に強制排気する雰囲気ガス中のバインダー成分がエジェクターの内部で冷やされて内面に凝着することが防止される。従って、エジェクター内面でのバインダー成分の凝着に起因する排気不良や排気詰まりがなくなり、炉内の雰囲気ガス中のバインダー成分の濃度が極めて低く維持されるので、不良品質の焼成品の発生を防止することができる。   As in the continuous firing furnace of the present invention, the air supply passage for supplying air to the ejector is provided with air heating means for heating the air to a temperature higher than the condensation temperature of the binder component. Since air heated to a temperature higher than the condensation temperature can be supplied, the binder component in the atmospheric gas forcibly exhausted outside the furnace is prevented from being cooled inside the ejector and adhering to the inner surface. Therefore, exhaust defects and clogging due to the adhesion of the binder component on the inner surface of the ejector are eliminated, and the concentration of the binder component in the atmosphere gas in the furnace is kept extremely low, preventing the occurrence of defective quality fired products. can do.

そして、エアー加熱手段が、エアー給気路に設けたヒータであって、エアーの流れる内部通路を有し、この内部通路に電熱源を内蔵したものであると、市販品として容易に入手でき、短時間でエアーをバインダー成分の凝縮温度以上に加熱できるので、エジェクター内面におけるバインダー成分の凝着を確実に防止することができる。   And if the air heating means is a heater provided in the air supply passage and has an internal passage through which air flows, and an electric heat source is built in this internal passage, it can be easily obtained as a commercial product, Since air can be heated above the condensation temperature of the binder component in a short time, adhesion of the binder component on the inner surface of the ejector can be reliably prevented.

以下、図面を参照して本発明の具体的な実施形態を詳述する。   Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

図1は本発明の一実施形態に係る連続焼成炉の部分側面図、図2は同連続焼成炉の部分平面図、図3は同連続焼成炉の正面図、図4はエアーフロー図、図5はエアー加熱手段として使用されるヒータ(スポットヒータ)の概略説明図、図6はエアー加熱手段で加熱されたエアーが給気される同連続焼成炉のエジェクターの一部破断図である。   FIG. 1 is a partial side view of a continuous firing furnace according to an embodiment of the present invention, FIG. 2 is a partial plan view of the continuous firing furnace, FIG. 3 is a front view of the continuous firing furnace, and FIG. 5 is a schematic explanatory view of a heater (spot heater) used as an air heating means, and FIG. 6 is a partially cutaway view of an ejector of the same continuous firing furnace in which air heated by the air heating means is supplied.

この連続焼成炉は、図1に示すように、外装壁体1の内部に加熱室2が設けられており、加熱用のマッフル3が加熱室2を貫いて設置されている。加熱室2の上下左右の壁は、セラミックファイバーを真空成形した厚肉板状の硬質の断熱材からなるもので、電気ヒータが内蔵されている。   In this continuous firing furnace, as shown in FIG. 1, a heating chamber 2 is provided inside an exterior wall 1, and a heating muffle 3 is installed through the heating chamber 2. The upper, lower, left, and right walls of the heating chamber 2 are made of a thick plate-like hard heat insulating material obtained by vacuum-forming ceramic fibers, and an electric heater is incorporated therein.

加熱室2を貫通するマッフル3は耐熱鋼製の筒体であって、加熱室2から前方(図1では左方)に突き出したマッフル3の前端部3aが入口側のパージ室となっており、パージガスが供給されてマッフル3内部の雰囲気ガスと外気が遮断されるようになっている。そして、このマッフル3の後端には、図示されていないが、該マッフル3よりも高さが低い耐熱鋼製の冷却用マッフルが接続されており、この冷却用マッフルの後端部が出口側のパージ室になっている。   The muffle 3 that penetrates the heating chamber 2 is a cylinder made of heat-resistant steel, and the front end portion 3a of the muffle 3 protruding forward (leftward in FIG. 1) from the heating chamber 2 is a purge chamber on the inlet side. The purge gas is supplied so that the atmospheric gas and the outside air inside the muffle 3 are blocked. Although not shown, a cooling muffle made of heat-resistant steel having a height lower than that of the muffle 3 is connected to the rear end of the muffle 3, and the rear end of the cooling muffle 3 is connected to the outlet side. It is a purge chamber.

加熱用のマッフル3と冷却用のマッフルには、エンドレスのメッシュの搬送ベルト4が通っており、被処理品W(図3を参照)はこの搬送ベルト4に載って加熱用のマッフル3および冷却用のマッフルの内部を移動しながら、所定の温度プロファイルで焼成処理及び冷却処理が行われるようになっている。   An endless mesh conveyor belt 4 passes through the heating muffle 3 and the cooling muffle, and the workpiece W (see FIG. 3) is placed on the conveyor belt 4 and the heating muffle 3 and the cooling muffle 3 are cooled. While moving through the inside of the muffle, the firing process and the cooling process are performed with a predetermined temperature profile.

また、この連続焼成炉の横には、触媒ユニットを内蔵した燃焼装置5が設置されており、加熱用のマッフル3から排気されたバインダー成分を含む雰囲気ガスが、この燃焼装置5で燃焼されて屋外へ放出されるようになっている。   A combustion device 5 having a built-in catalyst unit is installed beside the continuous firing furnace, and atmospheric gas containing the binder component exhausted from the heating muffle 3 is burned by the combustion device 5. Released to the outdoors.

図1〜図3に示すように、この連続焼成炉の外装壁体1の天壁部1aには、加熱用のマッフル3と連通して、マッフル3内のバインダー成分を含んだ雰囲気ガスを捕集する捕集ボックス6と、この捕集ボックスに対向する排気ボックス7とが設けられている。そして、双方のボックス6,7の間には、図2,図4に示すように、4本の雰囲気ガス排気路8aが並列に設けられており、それぞれの雰囲気ガス排気路8aには、エジェクター9が設けられている。排気ボックス7は、雰囲気ガス排気路8bを通じて燃焼装置5の下部のティーパイプ5a(図4を参照)に接続されている。   As shown in FIGS. 1 to 3, the top wall portion 1 a of the exterior wall 1 of the continuous firing furnace is connected to the heating muffle 3 to capture the atmospheric gas containing the binder component in the muffle 3. A collection box 6 that collects and an exhaust box 7 that faces the collection box are provided. As shown in FIGS. 2 and 4, four atmospheric gas exhaust passages 8a are provided in parallel between both boxes 6 and 7, and each of the atmospheric gas exhaust passages 8a includes an ejector. 9 is provided. The exhaust box 7 is connected to a tee pipe 5a (see FIG. 4) below the combustion device 5 through an atmospheric gas exhaust path 8b.

図4に示すように、エジェクター9にエアーを給気するエアー給気路10は、燃焼装置5にエアーを導入するエアー導入路16から分岐して設けられており、その先端部が4本に分岐して4つのエジェクター9の内部のエアー吐出ノズル9a(図6を参照)に接続されている。エアー導入路16には流量計12、電磁弁13、レギュレーター14、ボール弁15などが設けられており、また、エアー給気路10にも流量計17が設けられて、エアーが流量制御されながら燃焼装置5とエジェクター9に供給されるようになっている。   As shown in FIG. 4, an air supply passage 10 for supplying air to the ejector 9 is provided by branching from an air introduction passage 16 for introducing air to the combustion device 5, and the tip portion thereof is divided into four. It branches and is connected to the air discharge nozzles 9a (see FIG. 6) inside the four ejectors 9. The air introduction path 16 is provided with a flow meter 12, a solenoid valve 13, a regulator 14, a ball valve 15, and the like, and the air supply path 10 is also provided with a flow meter 17, so that air is controlled in flow rate. The fuel is supplied to the combustion device 5 and the ejector 9.

上記のエアー給気路10には、エアー加熱手段として、強制排気される雰囲気ガス中のバインダー成分の凝縮温度より高い温度にエアーを加熱するヒータ11が設けられており、このヒータ11は捕集ボックス6の横に形成された支持部に取付けられている。   The air supply passage 10 is provided with a heater 11 that heats the air to a temperature higher than the condensation temperature of the binder component in the atmospheric gas forcedly exhausted as an air heating means. It is attached to a support formed on the side of the box 6.

図5に示すように、このヒータ11はエアーが流れる内部通路11aを有し、この内部通路11aに電熱源11bを内蔵したものであって、エアーの排出口11cの近傍に設けた温度センサ11dで排出口11cを流れるエアーの温度を検出すると共に、電熱源11bの近傍に設けた温度センサ11eで電熱源11bの温度を検出して、内部通路11aを流れるエアーを温度制御しながら電熱源11bで加熱し、排出口11cから排出するようになっている。   As shown in FIG. 5, the heater 11 has an internal passage 11a through which air flows, an electric heat source 11b is built in the internal passage 11a, and a temperature sensor 11d provided in the vicinity of the air discharge port 11c. In addition, the temperature of the air flowing through the discharge port 11c is detected, and the temperature of the electric heat source 11b is detected by the temperature sensor 11e provided in the vicinity of the electric heat source 11b, and the temperature of the air flowing through the internal passage 11a is controlled while controlling the temperature of the electric heat source 11b. And is discharged from the discharge port 11c.

このようなヒータ11はスポットヒータの商品名で市場において容易に入手でき、3kW程度の出力を有するものは、短時間でエアーを500〜600℃に加熱することができる。従って、例えばグラファイト粉末で成形した被処理品を焼成処理する場合は、280〜500℃でバインダー成分が発生するので、エジェクター9に給気するエアーをバインダー成分の凝縮温度より高い温度に加熱することができる。   Such a heater 11 is easily available in the market under the trade name of a spot heater, and a heater having an output of about 3 kW can heat air to 500 to 600 ° C. in a short time. Therefore, for example, when a product to be processed formed of graphite powder is fired, since a binder component is generated at 280 to 500 ° C., the air supplied to the ejector 9 is heated to a temperature higher than the condensation temperature of the binder component. Can do.

以上のような構成の連続焼成炉では、被処理品Wが搬送ベルト4に載置されて加熱用のマッフル3及び冷却用のマッフルの内部を搬送され、所定の温度プロファイルで焼成処理及び冷却処理が行われる。その際、加熱用マッフル3の内部で被処理品Wから発生するバインダー成分を含んだ雰囲気ガスは、捕集ボックス6に捕集され、雰囲気ガス排気路8aを通って各エジェクター9で強制排気され、排気ボックス7から雰囲気ガス排気路8bを通って燃焼装置5へ送られ、燃焼されて屋外へ放出される。   In the continuous firing furnace configured as described above, the workpiece W is placed on the transport belt 4 and transported through the heating muffle 3 and the cooling muffle, and the firing process and the cooling process are performed at a predetermined temperature profile. Is done. At that time, the atmospheric gas containing the binder component generated from the workpiece W inside the heating muffle 3 is collected in the collection box 6 and forcedly exhausted by each ejector 9 through the atmospheric gas exhaust path 8a. Then, the gas is sent from the exhaust box 7 to the combustion device 5 through the atmospheric gas exhaust passage 8b, and is burned and released to the outdoors.

一方、上記の燃焼装置5に送られるエアーの一部は、エアー給気路10を通って、途中のエアー加熱手段(スポットヒータ)11で瞬時にバインダー成分の凝縮温度より高い温度に加熱されて各エジェクター9に供給され、各エジェクター9の内部の吐出ノズル9aから吐出されて、そのベンチュリー効果により、雰囲気ガス排気路8a中のバインダー成分を含んだ雰囲気ガスを上記のように強制排気する。このとき、各エジェクター9の吐出ノズル9aから吐出されるエアーは、スポットヒータ11でバインダー成分の凝縮温度より高い温度に加熱されているので、図6に示すように、エジェクター内部でバインダー成分が結露してエジェクター9の内面に凝着することはない。従って、エジェクター9の内面へのバインダー成分の凝着に起因する排気不良や排気詰まりがなくなり、加熱用マッフル3の内部のバインダー成分を含む雰囲気ガスが効率よく排気されて、マッフル内部のバインダー成分の濃度が極めて低く維持されるので、不良品質の焼成品の発生を防止することができる。   On the other hand, a part of the air sent to the combustion device 5 passes through the air supply passage 10 and is instantaneously heated to a temperature higher than the condensation temperature of the binder component by the air heating means (spot heater) 11 in the middle. It is supplied to each ejector 9, is discharged from the discharge nozzle 9a inside each ejector 9, and the atmospheric gas containing the binder component in the atmospheric gas exhaust path 8a is forcibly exhausted as described above due to its venturi effect. At this time, since the air discharged from the discharge nozzle 9a of each ejector 9 is heated to a temperature higher than the condensation temperature of the binder component by the spot heater 11, the binder component is condensed inside the ejector as shown in FIG. Thus, it does not adhere to the inner surface of the ejector 9. Therefore, exhaust failure and exhaust clogging due to adhesion of the binder component to the inner surface of the ejector 9 are eliminated, and the atmospheric gas containing the binder component inside the heating muffle 3 is efficiently exhausted, and the binder component inside the muffle 3 Since the concentration is kept extremely low, it is possible to prevent occurrence of defective quality fired products.

以上、代表的な実施形態を挙げて本発明の連続焼成炉を説明したが、本発明はこの実施形態のみに限定されるものではなく、例えばエア加熱手段として燃焼装置5の燃焼熱を利用してエジェクター9へ給気するエアーをバインダー成分の凝縮温度より高い温度に加熱したり、また、上記のスポットヒータ11と燃焼装置5の燃焼熱を併用してエアーを加熱するように構成してもよい。   As described above, the continuous firing furnace of the present invention has been described with reference to typical embodiments. However, the present invention is not limited only to this embodiment. For example, the combustion heat of the combustion device 5 is used as air heating means. The air supplied to the ejector 9 may be heated to a temperature higher than the condensation temperature of the binder component, or the air may be heated by using the spot heater 11 and the combustion heat of the combustion device 5 together. Good.

尚、エジェクターの内面へのバインダー成分の凝着を防止する手段として、例えばエジェクター9の外面をシーズヒータなどで加熱する方法も考えられるが、その場合は、エジェクター9の内面への凝着を防止することはできても、吐出ノズル9aに対する凝着まで防止することはできない。これに対し、本発明の連続焼成炉のようにエアー加熱手段11でエアーそのものを加熱すると、エジェクター9の内面への凝着も、吐出ノズル9aへの凝着も十分に防止できるので、この点でエジェクターの外面を加熱する場合よりも遥かに効果的である。   In addition, as a means for preventing the adhesion of the binder component to the inner surface of the ejector, for example, a method of heating the outer surface of the ejector 9 with a sheathed heater or the like is conceivable, but in that case, the adhesion to the inner surface of the ejector 9 is prevented. Even if it can be done, it cannot prevent the adhesion to the discharge nozzle 9a. On the other hand, when the air itself is heated by the air heating means 11 as in the continuous firing furnace of the present invention, adhesion to the inner surface of the ejector 9 and adhesion to the discharge nozzle 9a can be sufficiently prevented. This is far more effective than heating the outer surface of the ejector.

本発明の一実施形態に係る連続焼成炉の部分側面図である。It is a partial side view of the continuous baking furnace which concerns on one Embodiment of this invention. 同連続焼成炉の部分平面図である。It is a partial top view of the continuous baking furnace. 同連続焼成炉の正面図である。It is a front view of the continuous firing furnace. 同連続焼成炉のエアーフロー図である。It is an airflow figure of the continuous baking furnace. エアー加熱手段として使用されるヒータ(スポットヒータ)の概略説明図である。It is a schematic explanatory drawing of the heater (spot heater) used as an air heating means. エアー加熱手段で加熱されたエアーが給気される同連続焼成炉のエジェクターの一部破断図である。It is a partially broken figure of the ejector of the same continuous baking furnace in which the air heated with the air heating means is supplied. 常温のエアーが給気される従来の連続焼成炉のエジェクターの一部破断図である。It is a partially broken figure of the ejector of the conventional continuous baking furnace in which normal temperature air is supplied.

符号の説明Explanation of symbols

2 加熱室
3 加熱用のマッフル
4 搬送ベルト
6 捕集ボックス
7 排気ボックス
8a,8b 雰囲気ガス排気路
9 エジェクター
9a エアー吐出ノズル
10 エアー給気路
11 エアー加熱手段(スポットヒータ)
16 送気路
2 Heating chamber 3 Heating muffle 4 Conveyor belt 6 Collection box 7 Exhaust box 8a, 8b Atmospheric gas exhaust path 9 Ejector 9a Air discharge nozzle 10 Air supply path 11 Air heating means (spot heater)
16 Airway

Claims (2)

被処理品より発生するバインダー成分を含んだ炉内の雰囲気ガスを炉外に排気する雰囲気ガス排気路にエジェクターを取付けた連続焼成炉において、
エジェクターにエアーを給気するエアー給気路に、エアーをバインダー成分の凝縮温度より高い温度に加熱するエアー加熱手段を設けたことを特徴とする連続焼成炉。
In a continuous firing furnace in which an ejector is attached to an atmosphere gas exhaust path for exhausting the atmosphere gas in the furnace containing the binder component generated from the product to be processed outside the furnace,
A continuous firing furnace characterized in that air heating means for heating air to a temperature higher than the condensation temperature of the binder component is provided in an air supply path for supplying air to the ejector.
エアー加熱手段が、エアー給気路に設けたヒータであって、エアーの流れる内部通路を有し、この内部通路に電熱源を内蔵したものであることを特徴とする請求項2に記載の連続焼成炉。   The continuous heating according to claim 2, wherein the air heating means is a heater provided in the air supply passage, and has an internal passage through which air flows, and an electric heat source is built in the internal passage. Firing furnace.
JP2008083821A 2008-03-27 2008-03-27 Continuous firing furnace Active JP5491000B2 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682162A (en) * 1992-09-02 1994-03-22 Murata Mfg Co Ltd Continuous baking furnace
JPH10251855A (en) * 1997-03-14 1998-09-22 Nichimen Denshi Koken Kk Device for depositing diamond-like carbon film
JP2002020174A (en) * 2000-06-29 2002-01-23 Ibiden Co Ltd Continuous degreasing furnace and method for manufacturing porous silicon carbide sintered compact
JP2003322480A (en) * 2002-04-30 2003-11-14 Ngk Insulators Ltd Exhaust pipe capable of managing exhaust gas flux of heat treatment furnace, its automatic control system, and heat treatment furnace with them
JP2007139289A (en) * 2005-11-17 2007-06-07 Koyo Thermo System Kk Continuous kiln

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682162A (en) * 1992-09-02 1994-03-22 Murata Mfg Co Ltd Continuous baking furnace
JPH10251855A (en) * 1997-03-14 1998-09-22 Nichimen Denshi Koken Kk Device for depositing diamond-like carbon film
JP2002020174A (en) * 2000-06-29 2002-01-23 Ibiden Co Ltd Continuous degreasing furnace and method for manufacturing porous silicon carbide sintered compact
JP2003322480A (en) * 2002-04-30 2003-11-14 Ngk Insulators Ltd Exhaust pipe capable of managing exhaust gas flux of heat treatment furnace, its automatic control system, and heat treatment furnace with them
JP2007139289A (en) * 2005-11-17 2007-06-07 Koyo Thermo System Kk Continuous kiln

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