JP2009226634A5 - - Google Patents

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Publication number
JP2009226634A5
JP2009226634A5 JP2008072076A JP2008072076A JP2009226634A5 JP 2009226634 A5 JP2009226634 A5 JP 2009226634A5 JP 2008072076 A JP2008072076 A JP 2008072076A JP 2008072076 A JP2008072076 A JP 2008072076A JP 2009226634 A5 JP2009226634 A5 JP 2009226634A5
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JP
Japan
Prior art keywords
master
sub
substrate
submaster
manufacturing
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Application number
JP2008072076A
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English (en)
Japanese (ja)
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JP2009226634A (ja
JP5130977B2 (ja
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Application filed filed Critical
Priority to JP2008072076A priority Critical patent/JP5130977B2/ja
Priority claimed from JP2008072076A external-priority patent/JP5130977B2/ja
Publication of JP2009226634A publication Critical patent/JP2009226634A/ja
Publication of JP2009226634A5 publication Critical patent/JP2009226634A5/ja
Application granted granted Critical
Publication of JP5130977B2 publication Critical patent/JP5130977B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008072076A 2008-03-19 2008-03-19 サブマスター成形型の製造方法 Expired - Fee Related JP5130977B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008072076A JP5130977B2 (ja) 2008-03-19 2008-03-19 サブマスター成形型の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008072076A JP5130977B2 (ja) 2008-03-19 2008-03-19 サブマスター成形型の製造方法

Publications (3)

Publication Number Publication Date
JP2009226634A JP2009226634A (ja) 2009-10-08
JP2009226634A5 true JP2009226634A5 (https=) 2011-04-21
JP5130977B2 JP5130977B2 (ja) 2013-01-30

Family

ID=41242642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008072076A Expired - Fee Related JP5130977B2 (ja) 2008-03-19 2008-03-19 サブマスター成形型の製造方法

Country Status (1)

Country Link
JP (1) JP5130977B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10259178B2 (en) 2011-12-16 2019-04-16 Konica Minolta, Inc. Method for producing lens array, and molding mold

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03202330A (ja) * 1989-10-30 1991-09-04 Sharp Corp マイクロレンズの製造方法
JP2002321227A (ja) * 2001-04-25 2002-11-05 Canon Inc 光学素子成形用母型の製造方法、及び該母型を用いた光学素子の製造方法、該製造方法による光学素子
KR100605613B1 (ko) * 2005-07-14 2006-08-01 학교법인 포항공과대학교 소수성 표면을 갖는 고분자 기재 제조용 몰드의 제조 방법
US8011916B2 (en) * 2005-09-06 2011-09-06 Canon Kabushiki Kaisha Mold, imprint apparatus, and process for producing structure

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