JP2009208090A - Method of manufacturing nozzle plate, and liquid jetting head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a nozzle plate capable of suppressing any raise of a punch-driving surface, and a liquid jetting head fitted with the nozzle plate. <P>SOLUTION: The method of manufacturing the nozzle plate includes: a first recess forming step of forming a recess by driving a first punch 36 to the middle of the thickness direction of a metal plate 31; a second recess forming step of deepening the recess and forming a swollen part 52 in the other side by driving a second punch 50 thinner than the first punch in a non-pierced portion of the recess from one side of the metal plate with the recess formed therein; and a penetrating step of forming the recess into a penetrating hole by removing the swollen part by grinding the other side of the metal plate. The first punch has an insertion-projecting part 40 and a raise-preventing part 42 having a holding surface 41 extending in the direction orthogonal to the axial direction of a columnar portion at a base end of the insertion-projecting part. The first punch is driven in the thickness direction of the metal plate until the holding surface of the raise preventive part is brought into contact with the surface of the metal plate. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a nozzle plate provided in a liquid ejecting apparatus such as an ink jet recording apparatus, and a liquid ejecting head equipped with the nozzle plate, and in particular, a relatively soft metal nozzle plate such as an invar type alloy. It is suitable for.

  A liquid filtering filter of a liquid ejecting head such as an ink jet recording apparatus that ejects liquid droplets from a nozzle opening by causing a pressure fluctuation in a liquid in a pressure chamber is a thin metal plate (for example, Stainless steel plate) has a plurality of fine-diameter through holes. As a method for opening a through hole in a metal plate, there are a method by etching, a press working (plastic working) method using a mold, and the like.

In the case of the above pressing, generally, a punch is pushed in from one surface of a thin metal plate to be a nozzle plate, and the protruding portion protruding to the opposite side is removed in a subsequent polishing step, whereby a nozzle opening and A method of opening a through hole is proposed (for example, Patent Document 1).
JP 2007-137039 A

However, when a small hole is formed in a thin metal plate by the above-described conventional metal plate processing method, an annular ridge may be formed at the opening periphery of the hole.
This occurred because the metal moved by pushing the punch into the metal plate was pushed to the periphery of the hole (so-called flesh escape). And this prominence is remarkable when processing an Invar metal plate material such as 42 alloy than stainless steel. In order to remove this protuberance, the portion is wrapped and removed so that it becomes a flat surface. The process to do was needed.
In addition, when the nozzle opening has a two-stage shape in which a small hole is opened at the bottom of a large hole, if the hole is formed by a single punching process, the punch is easily broken and cannot be put to practical use.

  The present invention has been proposed in view of the above, and an object of the present invention is to provide a method for manufacturing a nozzle plate capable of suppressing the occurrence of the protrusion of the punching surface, and a liquid jet head equipped with the nozzle plate. It is something to try. Further, the present invention provides a method of manufacturing a nozzle plate that is difficult to break even when the nozzle opening has a two-stage shape.

In order to achieve the above-described object, a method for manufacturing a nozzle plate according to the present invention is a method for punching a metal plate by driving a punch halfway in the thickness direction of the metal plate from one surface of the metal plate to the other surface. A recess forming step for forming the recess;
A step of grinding the other surface of the metal plate in which the concave portion is formed to remove the non-penetrating portion at the bottom of the concave portion to form a through hole,
The punch extends in a direction perpendicular to the axial direction of the columnar portion at the base end of the insertion projection formed at the tip of the columnar portion fixed to the punch holder and driven into the metal plate. A raised prevention part having a pressing surface,
The punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge preventing portion comes into contact with the surface of the metal plate.

When the punch is driven, it is preferable that the punch is driven in the thickness direction of the metal plate until the pressing surface of the protrusion preventing portion presses the surface of the metal plate.
Alternatively, the metal plate may be placed on a flat die and the punch may be driven from one surface of the metal plate to the other surface with the other surface of the metal plate in contact with the die surface. Good.

And, the punch is configured such that the insertion protrusion is reduced in diameter toward the tip, and the tip is a flat surface.
It is desirable that the punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion comes into pressure contact with the surface of the metal plate to press the edge of the opening of the recess.

When the nozzle plate is manufactured in this manner, when the concave portion is formed in the metal plate, the pressing surface of the bulge prevention portion formed on the punch is pressed against the surface of the metal plate, so the opening of the concave portion formed in the metal plate is The edge is pressed flat, and even if the metal plate is slightly raised due to this pressing, the metal plate is flatly formed, and when the recessed portion forming process is finished, the raised portion disappears around the opening of the recessed portion. Therefore, even if the metal plate is made of a soft material, it is possible to save the trouble of polishing and removing the ridges and to improve the working efficiency.
Furthermore, when pressed between the die, the surface portion of the metal plate can be cured, and the roundness of the hole can be ensured.

Moreover, the manufacturing method of the nozzle plate which concerns on this invention forms a recessed part in a metal plate by driving a 1st punch in the middle of the plate | board thickness direction of a metal plate toward the other surface from one surface of a metal plate. A first recess forming step;
The second punch, which is thinner than the first punch, is driven from one of the metal plates on which the recess is formed into a non-penetrating portion at the bottom of the recess to increase the depth of the recess and bulge to the other surface. A second recess forming step for forming the portion;
A method of manufacturing a nozzle plate, comprising: a step of grinding the other surface of the metal plate in which the concave portion is formed to remove the bulging portion and using the concave portion as a through hole,
The first punch is formed at the tip of a columnar portion fixed to the punch holder and is driven into the metal plate, and in the direction perpendicular to the axial direction of the columnar portion at the base end of the insertion projection. A raised prevention part having a pressing surface that extends,
The first punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion contacts the surface of the metal plate.

And, the punch is configured such that the insertion protrusion is reduced in diameter toward the tip, and the tip is a flat surface.
It is desirable that the punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion comes into pressure contact with the surface of the metal plate to press the edge of the opening of the recess.

  In this way, the first recess forming step for forming the recess in the metal plate, and by punching a punch thinner than the punch into the non-penetrating portion at the bottom of the recess from one of the metal plates in which the recess is formed, When the concave portion is formed separately from the second concave portion forming step for deepening the depth and forming the bulged portion on the other surface, the load applied to the punch when forming the thin concave portion can be reduced. Punch damage can be reduced. Moreover, since it can suppress that a ridge arises in the edge of the opening of the recessed part formed at a 1st recessed part formation process, even if a metal plate is a soft material, the process of grinding | polishing can be simplified.

  The aforementioned metal plate is preferably made of an Invar type alloy.

  When the nozzle plate is made of an Invar type alloy, the thermal expansion coefficient is the same as that of other parts to be joined, so that a difference in expansion at the joining surface hardly occurs, and troubles such as peeling can be prevented in advance.

  The liquid ejecting head equipped with the nozzle plate manufactured by the above-described manufacturing method maintains the high accuracy of the shape without crushing the hole penetrating the recess, that is, the nozzle opening in the middle of the manufacturing, so that the liquid ejecting characteristics are improved. Can be increased.

  The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments. Hereinafter, an example in which the present invention is applied to the formation of a nozzle substrate of an ink jet recording head (hereinafter simply referred to as a recording head), which is a kind of liquid ejecting head, will be described.

  FIG. 1 is a cross-sectional view of a main part of a recording head 1 in the present embodiment. The illustrated recording head 1 includes a case 2, a flow path unit 3, an actuator unit 5, and the like as main components. The case 2 is a hollow box-shaped member made of synthetic resin, the flow path unit 3 is joined to the front end surface (lower surface), and the actuator unit 5 is accommodated in the accommodation space 4 formed inside, A circuit board (not shown) for supplying a drive signal from the printer main body side to the actuator unit 5 is attached to the base end surface (upper surface) opposite to the flow path unit 3 side.

  The actuator unit 5 supplies a plurality of piezoelectric vibrators 7 arranged in a comb shape, a fixed plate 8 to which the piezoelectric vibrators 7 are joined, and a drive signal from the circuit board to the piezoelectric vibrators 7. For example, the wiring member 9 is a TCP (tape carrier package). Each piezoelectric vibrator 7 is mounted on the fixed plate 8 in a so-called cantilever state in which the fixed end portion is joined to the fixed plate 8 and the free end portion protrudes outward from the front end surface of the fixed plate 8. Yes. The actuator unit 5 is housed and fixed in the housing space 4 by bonding the back surface of the fixed plate 8 to the inner wall surface of the case that defines the housing space 4.

  The flow path unit 3 is manufactured by joining and integrating a flow path unit constituting member including a vibration plate 11, a flow path forming substrate 12, and a nozzle substrate (nozzle plate) 13 with an adhesive. This is a member that forms a series of ink flow paths (a kind of liquid flow path) from the reservoir 15 (liquid chamber) to the nozzle opening 18 through the ink supply port 16 and the pressure generation chamber 17. The pressure generation chamber 17 is formed as a long and narrow chamber in a direction orthogonal to the direction in which the nozzle openings 18 are arranged (nozzle row direction). The reservoir 15 is a chamber into which ink from an ink supply source such as an ink cartridge or a sub tank is introduced. The ink introduced into the reservoir 15 is distributed and supplied to each pressure generating chamber 17 through the ink supply port 16.

  As shown in FIG. 2, the nozzle plate 13 disposed at the bottom of the flow path unit 3 has a plurality of nozzle openings 18 at a pitch (for example, 180 dpi) corresponding to the dot formation density in the recording medium feeding direction such as recording paper. It is a thin metal plate made in a row. The nozzle plate 13 of the present embodiment is made of, for example, a plate material (metal plate 13 ′) made of 42 alloy or the like, and is arranged in a row of nozzle openings 18, that is, a nozzle row, by pressing using a punch (see FIG. 3 and the like). A plurality of nozzle groups are arranged side by side in the scanning direction of the recording head 1. One nozzle row is constituted by, for example, 180 nozzle openings 18. The recording head 1 of the present embodiment is configured to be able to eject a total of eight types of ink, and a total of eight nozzle rows are formed on the nozzle plate 13 corresponding to each ink.

  A flow path forming substrate 12 that is one of the flow path unit constituent members is a flow path base that becomes an ink flow path, specifically, a void that becomes a reservoir 15, a groove that becomes an ink supply port 16, and pressure generation. It is a plate-like member in which an opening serving as the chamber 17 is partitioned. In this embodiment, the flow path forming substrate 12 is produced by subjecting a silicon wafer, which is a crystalline base material, to anisotropic etching.

  The vibration plate 11 disposed on the upper surface of the flow path forming substrate 12 on the side opposite to the nozzle plate 13 is a double-structure composite plate material obtained by laminating an elastic film on a metal support plate such as stainless steel. An island portion 20 for joining the tip of the free end portion of the piezoelectric vibrator 7 is formed at a portion corresponding to the pressure generating chamber 17 of the vibration plate 11. The periphery of the island portion 20 is only an elastic film by removing the support plate in an annular shape by etching or the like. This portion functions as a diaphragm portion, and is configured such that the island portion 20 is displaced while elastically deforming the elastic film as the piezoelectric vibrator 7 expands and contracts. The diaphragm 11 also functions as a compliance unit 21 that seals one open surface of the empty portion of the flow path forming substrate 12 to partition a part of the reservoir 15 and relieve pressure fluctuation in the ink flow path. To do. As for the portion corresponding to the compliance portion 21, the support plate is removed by etching or the like in the same manner as the diaphragm portion to make only the elastic film.

  In the recording head 1 configured as described above, when a drive signal is supplied to the piezoelectric vibrator 7 through the wiring member 9, the piezoelectric vibrator 7 expands and contracts in the longitudinal direction of the element. It moves in a direction close to 17 or a direction away from it. As a result, the volume of the pressure generating chamber 17 changes, and the pressure in the ink in the pressure generating chamber 17 varies. Ink (a kind of liquid) is ejected from the nozzle opening 18 by this pressure fluctuation.

Next, a method of manufacturing the nozzle plate 13 using a press mold will be described with reference to FIG. FIG. 3 is a perspective view for explaining the configuration of the first embodiment of the press die.
The press mold includes a die 32 on which a metal plate 31 that is a material of the nozzle plate 13 is placed, a punch holder (base) 33 attached to a lower surface of a ram (not shown) of the press machine, and a punch holder 33 under the punch holder 33. A pressing plate 35 provided in a state of being movable up and down with respect to the punch holder 33 via an elastic material 34 such as a spring or an elastomer, and a punch 36 provided with a base end fixed to the punch holder 33 and facing downward. Schematic configuration.

  The metal plate 31 is made of, for example, an invar-type alloy having a thickness of about 30 to 100 μm and substantially the same linear expansion coefficient as the above-described flow path forming substrate 12 such as 42 Alloy, and the linear expansion coefficient can be changed by changing the nickel content. Is set to approach the flow path forming substrate 12. This prevents the nozzle plate 13 from warping when returning to room temperature after joining the flow path forming substrate 12 and the metal plate 31 by heating at 200 ° C. to 300 ° C. using a thermosetting resin or the like. This prevents the nozzle plate 13 from being peeled off from the flow path forming substrate 12.

  The die 32 is a flat plate made of steel.

  The punch 36 is formed in a cylindrical shape having an outer diameter of 20 to 30 μm, and is formed at the tip of a cylindrical portion fixed to the punch holder 33 and is inserted into the metal plate 31, and the insertion And a bulge prevention portion 42 having a pressing surface 41 extending in a direction orthogonal to the axial direction of the columnar portion at the base end of the protrusion 40. The insertion protrusion 40 has a truncated cone shape that gradually decreases in diameter toward the distal end, and has a tapered portion and a flat distal end surface formed at the distal end of the tapered portion. A bulge prevention part 42 having a ring-shaped pressing surface 41 extending in a direction perpendicular to the axial direction of the columnar part is formed at the base end of the insertion protrusion 40, and this bulge prevention part 42 is formed. The outer peripheral edge is continuous with the cylindrical portion. That is, the punch 36 in the present embodiment forms a ring-shaped pressing surface 41 at the tip of a cylindrical portion in a direction orthogonal to the axial direction, and an insertion frustoconical insertion protrusion 40 is formed at the central portion of the pressing surface 41. Protrusively configured.

  Next, the case where the recessed part formation process which forms the recessed part (preparation hole) used as the nozzle opening 18 using the press die which consists of an above-described structure is demonstrated. The die 32 is fixed on a support plate such as a bolster (not shown) of the press machine, the punch holder 33 is fixed to the lower surface of the ram, and the relative position between the die 32 and the punch holder 33 (punch 36) or under the punch 36. All mold adjustments such as dead center adjustment have been completed.

  First, a metal plate 31 such as 42 Alloy is placed on a flat die 32 at a predetermined position, and the punch holder 33 is lowered with the tip of the punch 36 facing the metal plate 31. Then, as shown in FIG. 3, the lower surface of the pressing plate 35 comes into contact with the surface of the metal plate 31. Thereafter, when the punch holder 33 is further pushed down while resisting the urging force of the elastic member 34, the punch guide 33 is guided to the through guide hole 43 of the pressing plate 35, and as shown in FIG. 40 is pushed into the metal plate 31, thereby forming a recess on one surface (surface) of the metal plate 31 sandwiched between the flat surface of the die 32. At this time, a portion of the meat pushed away by the insertion of the insertion protrusion 40 of the punch 36 may rise to the edge of the opening of the recess to form a raised portion, but the punch 36 is driven to a predetermined depth. Since the pressing surface 41 of the bulge prevention part 42 is in contact with the surface 31a of the metal plate 31 and crushes the bulge part to level it flat, even if the metal plate 31 is soft such as 42 Alloy, the tip is simply reduced in diameter. The bumps formed when hitting just a conventional punch cannot be made. By punching the punch 36, the metal plate 31 is sandwiched between the flat surface of the die 32 and receives a strong pressing force, so that work hardening occurs in the shaded area in FIG. Therefore, the concave portion is not easily deformed even when an external force is applied thereafter, and the roundness of the hole can be reliably maintained.

  In addition, when the punch 36 descends to the bottom dead center and forms a truncated cone-shaped recess in the metal plate 31, the punch turns upward thereafter. When the punch holder 33 rises with the rise of the ram, the pressing plate 35 starts to rise slightly later than the punch holder 33 due to the restoring force of the elastic material 34, and is separated from the surface 31 a of the metal plate 31. It rises to the dead point.

  Then, the metal plate 31 is moved by a predetermined pitch by the feeder to form the next recess. When this movement (feed) is completed, the above-described operation is repeated again to open the next concave portion in the metal plate 31 at a predetermined pitch. When these operations are repeated, the concave portion is formed in the metal plate 31. It can be opened sequentially at a predetermined pitch.

  When the recess forming process is completed in this way, the metal plate 31 is removed from the press machine and conveyed to a polishing apparatus (not shown) that performs the next penetration process. In this penetrating step, the non-penetrating portion at the bottom of the concave portion remaining in the concave portion forming step is polished and removed, so that the hole is penetrated to form the nozzle opening 18 as shown in FIG. The thickness is polished to a predetermined thickness. In this way, the nozzle plate 13 having the nozzle openings 18 is produced.

  In this penetration step, conventionally, it was necessary to polish the surface (surface 31a) where the recess was formed in order to remove the raised portion, that is, it was necessary to polish both surfaces. According to this, since the raised portion cannot be formed, only one surface (the back surface 31b) needs to be polished. Therefore, the number of steps can be reduced, and work efficiency can be increased.

Next, a second embodiment shown in FIG. 4 will be described.
The second embodiment is different from the previous embodiment in that the recess forming step is performed in two stages. That is, after the formation of the concave portion (first concave portion forming step) performed in the first embodiment, a second concave portion forming step is performed in which a thinner punch is driven to increase the depth of the concave portion.

  The press die used in this embodiment has the same configuration for performing the first recess forming step as that of the above embodiment, and is added with the configuration for the second recess forming step. Specifically, the punch in the embodiment is a first punch (hereinafter referred to as a first punch) 36, and a second punch that is narrower than the first punch 36 on the downstream side spaced apart from the first punch 36 by a predetermined pitch. 50 (hereinafter referred to as a second punch). The second punch 50 has a cylindrical shape having a slightly smaller diameter than the distal end of the insertion protrusion 40 of the first punch 36, and is attached downward with the base end fixed to the punch holder 33, and the intermediate portion is a pressing plate 35. It penetrates the inside of the penetration guide hole 51 established in. Note that the lower end (tip) of the second punch 50 is positioned below the lower end (tip) of the first punch 36 and is long enough to be inserted to the same height as the lower surface of the metal plate 31 at the bottom dead center. Is set. The die 32 positioned below the second punch 50 is provided with an opening 53 that can accommodate a bulging portion 52 described later.

Since the first recessed portion forming step performed by this press die is the same as that in the above embodiment, the description thereof will be omitted, and the second recessed portion forming step in which the recessed portion formed in the first recessed portion forming step is processed again will be described.
In the second recessed portion forming step, when the punch 36 is raised after the recessed portion is formed in the first recessed portion forming step, the feeder is operated to move the metal plate 31 to the downstream side by one pitch, thereby the first recessed portion forming step. The recessed portion formed in step S2 is positioned below the second punch 50 and stops. When the punch holder 33 is lowered in this state, the first punch 36 and the second punch 50 are lowered after the pressing plate 35 comes into contact with the surface 31 a of the metal plate 31. When the first punch 36 is lowered, a recess is formed in a new part of the metal plate 31 as described above. On the other hand, when the second punch 50 is lowered, the tip of the second punch 50 is pushed into the bottom of the previously formed recess to the same depth as the back surface (lower surface) 31 b of the metal plate 31, thereby the same as the second punch 50. A recess having a size is formed, and a bulging portion 52 is formed on the back surface of the metal plate 31.

  In this way, when the second punch 50 is lowered to the bottom dead center to form a narrower concave portion at the bottom of the truncated cone-shaped concave portion, thereafter, the second punch 50 starts to rise. When the punch holder 33 rises with the rise of the ram, the pressing plate 35 starts to rise slightly later than the punch holder 33 due to the restoring force of the elastic material 34, and is separated from the surface 31 a of the metal plate 31. It rises to the dead point.

  Then, the metal plate 31 is moved by a predetermined pitch by the feeder to form the next recess. When this movement is finished, the above-described operation is repeated again to open the next concave portion in the metal plate 31 at a predetermined pitch. When these operations are repeated, the concave portion is formed in the metal plate 31 at the predetermined pitch. Can be opened sequentially.

  When the recess forming process is completed in this manner, the metal plate 31 is removed from the press mold and conveyed to a polishing apparatus (not shown) that performs the next penetration process. In this penetrating step, the bulging portion 52 of the concave portion remaining in the concave portion forming step is polished and removed, so that the hole is penetrated into the nozzle opening 18 and the thickness of the metal plate 31 is set to a predetermined thickness. Grind. In this way, the nozzle plate 13 in which the nozzle openings 18 are opened is manufactured.

  In this penetrating process, even in this embodiment, there is no raised portion at the opening edge of the recess, so that only one surface (back surface) 31b on which the bulging portion 52 is formed needs to be polished. Therefore, the number of steps can be reduced, and work efficiency can be increased.

  In each of the embodiments described above, the larger concave portion has a truncated cone shape. However, the present invention is not limited to this, and straight holes having the same thickness may be used.

FIG. 3 is a cross-sectional view of a main part for explaining the configuration of a recording head. It is a top view of a nozzle plate. (A) is principal part sectional drawing explaining the press metal mold | die used in 1st Embodiment of this invention, (b) is an expanded sectional view cut | disconnected by the nozzle opening of the nozzle plate. It is principal part sectional drawing explaining the press metal mold | die used in 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Recording head, 13 ... Nozzle plate, 18 ... Nozzle opening, 31 ... Metal plate, 32 ... Die, 33 ... Punch holder, 34 ... Elastic material, 35 ... Pressing board, 36 ... Punch (1st punch), 40 ... Insertion protrusion, 41 ... Pressing surface, 42 ... Protrusion prevention portion, 43 ... Penetration guide hole, 50 ... Second punch, 51 ... Penetration guide hole, 52 ... bulging portion, 53 ... opening portion

Claims (8)

A recess forming step for forming a recess in the metal plate by driving a punch halfway in the plate thickness direction of the metal plate from one surface of the metal plate toward the other surface;
A step of grinding the other surface of the metal plate in which the concave portion is formed to remove the non-penetrating portion at the bottom of the concave portion to form a through hole,
The punch extends in a direction perpendicular to the axial direction of the columnar portion at the base end of the insertion projection formed at the tip of the columnar portion fixed to the punch holder and driven into the metal plate. A raised prevention part having a pressing surface,
A method of manufacturing a nozzle plate, wherein the punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion contacts the surface of the metal plate.   2. The method of manufacturing a nozzle plate according to claim 1, wherein the punch is driven in a plate thickness direction of the metal plate until the pressing surface of the bulge preventing portion presses the surface of the metal plate.   The metal plate is placed on a flat die, and the punch is driven from one surface of the metal plate toward the other surface in a state where the other surface of the metal plate is in contact with the surface of the die. Item 3. A method for producing a nozzle plate according to Item 2. The insertion protrusion of the punch is reduced in diameter toward the tip, and the tip is configured as a plane,
4. The nozzle plate according to claim 3, wherein the punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion is pressed against the surface of the metal plate to press the edge of the opening of the recess. Manufacturing method. A first recess forming step of forming a recess in the metal plate by driving the first punch halfway in the plate thickness direction of the metal plate from one surface of the metal plate toward the other surface;
The second punch, which is thinner than the first punch, is driven from one of the metal plates on which the recess is formed into a non-penetrating portion at the bottom of the recess to increase the depth of the recess and bulge to the other surface. A second recess forming step for forming the portion;
A method of manufacturing a nozzle plate, comprising: a step of grinding the other surface of the metal plate in which the concave portion is formed to remove the bulging portion and using the concave portion as a through hole,
The first punch is formed at the tip of a columnar portion fixed to the punch holder and is driven into the metal plate, and in the direction perpendicular to the axial direction of the columnar portion at the base end of the insertion projection. A raised prevention part having a pressing surface that extends,
A method for manufacturing a nozzle plate, characterized in that the first punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion contacts the surface of the metal plate. The insertion protrusion of the first punch is reduced in diameter toward the tip, and the tip is constituted by a plane.
6. The nozzle according to claim 5, wherein the first punch is driven in the thickness direction of the metal plate until the pressing surface of the bulge prevention portion contacts the surface of the metal plate to press the edge of the opening of the recess. Plate manufacturing method.   The method for manufacturing a nozzle plate according to any one of claims 1 to 6, wherein the metal plate is made of an invar type alloy.   A liquid ejecting head comprising: a nozzle plate manufactured according to claim 1; and a droplet ejected from an opening.

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