JP2009206523A5 - - Google Patents

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Publication number
JP2009206523A5
JP2009206523A5 JP2009137958A JP2009137958A JP2009206523A5 JP 2009206523 A5 JP2009206523 A5 JP 2009206523A5 JP 2009137958 A JP2009137958 A JP 2009137958A JP 2009137958 A JP2009137958 A JP 2009137958A JP 2009206523 A5 JP2009206523 A5 JP 2009206523A5
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JP
Japan
Prior art keywords
electrode
processing gas
dielectric
hole
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009137958A
Other languages
English (en)
Japanese (ja)
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JP2009206523A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009137958A priority Critical patent/JP2009206523A/ja
Priority claimed from JP2009137958A external-priority patent/JP2009206523A/ja
Publication of JP2009206523A publication Critical patent/JP2009206523A/ja
Publication of JP2009206523A5 publication Critical patent/JP2009206523A5/ja
Withdrawn legal-status Critical Current

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JP2009137958A 2009-06-09 2009-06-09 プラズマ処理装置 Withdrawn JP2009206523A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009137958A JP2009206523A (ja) 2009-06-09 2009-06-09 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009137958A JP2009206523A (ja) 2009-06-09 2009-06-09 プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006342297A Division JP2008153147A (ja) 2006-12-20 2006-12-20 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2009206523A JP2009206523A (ja) 2009-09-10
JP2009206523A5 true JP2009206523A5 (de) 2010-02-12

Family

ID=41148418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009137958A Withdrawn JP2009206523A (ja) 2009-06-09 2009-06-09 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP2009206523A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6985758B2 (ja) * 2016-02-26 2021-12-22 国立大学法人大阪大学 プラズマ処理装置

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