JP2009206425A - Method of manufacturing multilayer substrate - Google Patents

Method of manufacturing multilayer substrate Download PDF

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JP2009206425A
JP2009206425A JP2008049795A JP2008049795A JP2009206425A JP 2009206425 A JP2009206425 A JP 2009206425A JP 2008049795 A JP2008049795 A JP 2008049795A JP 2008049795 A JP2008049795 A JP 2008049795A JP 2009206425 A JP2009206425 A JP 2009206425A
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copper foil
multilayer substrate
prepreg
laminated
support sheet
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Takanori Nishida
貴紀 西田
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Lincstech Circuit Co Ltd
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Hitachi AIC Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method which suppresses dent caused by contamination during a process for the adhesion of a laminated multilayer substrate by of lamination press and prevents the breakage of a multilayer substrate caused by improper handling, in a method of manufacturing a multilayer substrate in which copper foil is laminated on each of both sides of an inner layer core through a prepreg by overlaying a plurality of pairs of a prepreg and copper foil and lamination-pressing the pairs. <P>SOLUTION: In a method of manufacturing a multilayer substrate in which a pair of a prepreg and copper foil is formed by overlaying the prepreg and the copper foil on each side of an inner layer, and a plurality of the pairs are lamination-pressed together, a method of manufacturing a multilayer substrate in which, instead of overlaying the lower copper foil, adhered, laminated bodies having copper foil up and a support sheet plate down which is wholly or partially adhered to the copper foil are overlaid, and after lamination press, the support sheet plate is separated, is provided. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、積層プレスによる多層基板の製造方法に関するものである。   The present invention relates to a method for producing a multilayer substrate by a laminating press.

従来、多層基板の製造においては、多層基板の積層接着工程は、内層コアの両面にプリプレグを介して両面に銅箔を積層したものを一組とし、その間にステンレス製の鏡面板をはさんで複数組を重ね、上下の積層プレス熱板により一定時間加熱加圧することで積層プレスするのが一般的である。
ところで、上記鏡面板は繰り返し使用するため、裏面より表面に異物が付着しやすく、そのため、積層プレスしたときに、鏡面板の表面と接触する側の銅箔面に、つまり内層コアの下側の銅箔面に打痕が発生しやすい。
そのための対策として、特許文献1には、銅箔/鏡面板/銅箔の重ね部分の代わりに、金属シート板の両面に接着剤を介して銅箔を貼り合わせた積層体を設けることが記載されている。
特開2001−88244号公報
Conventionally, in the production of multi-layer substrates, the multi-layer substrate lamination and bonding process consists of a set of copper foils laminated on both sides of the inner layer core via prepreg, with a stainless steel mirror plate in between. In general, a plurality of sets are stacked and laminated and pressed by heating and pressing for a certain period of time with upper and lower laminated press hot plates.
By the way, since the mirror plate is repeatedly used, foreign matters are more likely to adhere to the surface from the back surface. Therefore, when laminating and pressing, the copper foil surface on the side in contact with the surface of the mirror plate, that is, the lower side of the inner layer core is used. Scratches are likely to occur on the copper foil surface.
As a countermeasure for this, Patent Document 1 describes that a laminated body in which copper foil is bonded to both surfaces of a metal sheet plate via an adhesive is provided instead of the overlapping portion of copper foil / mirror plate / copper foil. Has been.
JP 2001-88244 A

しかしながら、特許文献1では、金属シート板の両面に銅箔を貼り合わせた積層体を用いるため、積層プレス後に行う、貼り合わせた銅箔と金属シート板間の分離が簡単ではない。つまり、特許文献1では、金属シート板の両面に銅箔を貼り合わせた積層体を用いるため、積層プレス後は、積層した複数の組全体が一体化されている。このため、組ごとに分離しようとすると、多層基板を一枚ずつ剥がす作業となり、一枚ずつ多層基板をめくり上げる状態となるので、多層基板に折り曲げようとする力が作用する。このため、多層基板が、ダメージを受けやすく、特に多層基板が薄板基板である場合は折れやすく、問題となる。   However, in patent document 1, since the laminated body which bonded copper foil on both surfaces of the metal sheet plate is used, the separation between the bonded copper foil and the metal sheet plate performed after the lamination press is not easy. That is, in patent document 1, since the laminated body which bonded the copper foil on both surfaces of the metal sheet board is used, after the lamination press, the several laminated | stacked whole group is integrated. For this reason, if it is going to separate for every group, it will be the work which peels off a multilayer substrate one by one, and will be in the state which flips up a multilayer substrate one by one, and the force which is going to bend acts on a multilayer substrate. For this reason, the multi-layer substrate is easily damaged, and particularly when the multi-layer substrate is a thin plate substrate, the multi-layer substrate is easily broken and becomes a problem.

本発明は、上記の問題を解決するものであり、積層プレスによる多層基板の積層接着工程中に発生する異物の付着による打痕を抑制し、かつ、取扱による多層基板の折れを防止する製造方法を提供する点である。
The present invention solves the above-described problem, and suppresses dents due to the adhesion of foreign matters generated during the multi-layer bonding process of the multi-layer substrate by a multi-layer press, and prevents the multi-layer substrate from being broken by handling. It is a point to provide.

本発明は、以下に関するものである。
(1)内層コアの両面のそれぞれにプリプレグと銅箔とをその順に重ねた構成を1組として、その複数組を重ねて積層プレスする多層基板の製造方法において、前記各々の組の、下側の銅箔の代わりに、銅箔を上側とし、この銅箔と全面または一部接着した支持シート板を下側とした接着積層体を重ね、積層プレス後、前記支持シート板を分離する多層基板の製造方法を提供するものである。
(2)上記(1)において、組と組の間に鏡面板を設ける多層基板の製造方法を提供するものである。
The present invention relates to the following.
(1) In the manufacturing method of a multilayer substrate in which a plurality of sets are stacked and pressed together, with a configuration in which a prepreg and a copper foil are stacked in that order on each of both surfaces of the inner layer core, the lower side of each set Instead of the copper foil, a multilayer substrate in which the copper foil is the upper side, and the adhesive laminate is laminated with the copper sheet and the support sheet plate bonded to the entire surface or a part of the lower side, and the support sheet plate is separated after the lamination press The manufacturing method of this is provided.
(2) In the above (1), a method for manufacturing a multilayer board in which a mirror plate is provided between the sets is provided.

本発明によれば、異物の付着原因をなくし、積層体の分離が容易な構造にしたことにより、積層プレスによる多層基板の積層接着工程において発生する異物の付着による打痕を抑制し、かつ、取扱による多層基板の折れを防止する製造方法を提供することができる。
According to the present invention, the cause of adhesion of foreign matters is eliminated, and the laminated body is easily separated, thereby suppressing dents due to the adhesion of foreign matters that occur in the multilayer bonding process of the multilayer substrate by the lamination press, and The manufacturing method which prevents the breakage of the multilayer substrate due to handling can be provided.

本発明の内層コアは、一般的に配線基板の一般的な内層として用いられるものが使用できる。例えば、補強基材に樹脂組成物を含浸した樹脂含浸基材の必要枚数の上面及び又は下面に、銅、アルミニウム、真鍮、ニッケル、鉄等の単体、合金又は複合箔からなる金属箔を積層一体化し、金属箔をエッチング等により回路形成したものである。   As the inner layer core of the present invention, those generally used as a general inner layer of a wiring board can be used. For example, a metal foil made of a simple substance such as copper, aluminum, brass, nickel, iron, etc., an alloy or a composite foil is laminated and integrated on the upper surface and / or the lower surface of the required number of resin-impregnated substrates obtained by impregnating a resin composition with a reinforcing substrate. Then, a circuit is formed by etching or the like of the metal foil.

本発明に述べるプリプレグは、補強基材に樹脂組成物を含浸させ、半硬化のBステージ状態にした接着シートであり、一般的な配線基板に用いるプリプレグが使用できる。
上記の樹脂組成物としては、プリント配線板の絶縁材料として用いられる公知慣例の樹脂組成物を用いることができる。通常、耐熱性、耐薬品性の良好な熱硬化性樹脂がベースとして用いられ、フェノ−ル樹脂、エポキシ樹脂、ポリイミド樹脂、不飽和ポリエステル樹脂、ポリフェニレンオキサイド樹脂、フッ素樹脂等の樹脂の1種類または2種類以上を混合して用い、必要に応じてタルク、クレー、シリカ、アルミナ、炭酸カルシウム、水酸化アルミニウム、三酸化アンチモン、五酸化アンチモン等の無機質粉末充填剤、ガラス繊維、アスベスト繊維、パルプ繊維、合成繊維、セラミック繊維等の繊維質充填剤を添加したものである。
また、樹脂組成物には、誘電特性、耐衝撃性、フィルム加工性などを考慮して、熱可塑性樹脂がブレンドされてあっても良い。さらに必要に応じて有機溶媒、難燃剤、硬化剤、硬化促進剤、熱可塑性粒子、着色剤、紫外線不透過剤、酸化防止剤、還元剤などの各種添加剤や充填剤を加えて調合する。
上記の補強基材としては、ガラス、アスベスト等の無機質繊維、ポリエステル、ポリアミド、ポリアクリル、ポリビニルアルコール、ポリイミド、フッ素樹脂等の有機質繊維、木綿等の天然繊維の織布、不織布、紙、マット等を用いるものである。
通常、補強基材に対する樹脂組成物の付着量が、乾燥後のプリプレグの樹脂含有率で20〜90重量%となるように補強基材に含浸又は塗工した後、通常100〜200℃の温度で1〜30分加熱乾燥し、半硬化状態(Bステージ状態)のプリプレグを得る。このプリプレグを通常1〜20枚重ね、その両面に金属箔を配置した構成で加熱加圧する。成形条件としては通常の積層板の手法が適用でき、例えば多段プレス、多段真空プレス、連続成形、オートクレーブ成形機等を使用し、通常、温度100〜250℃、圧力2〜100kg/cm、加熱時間0.1〜5時間の範囲で成形したり、真空ラミネート装置などを用いてラミネート条件50〜150℃、0.1〜5MPaの条件で減圧下又は大気圧の条件で行ったりする。絶縁層となるプリプレグ層の厚みは用途によって異なるが、通常0.01〜5.0mmの厚みのものが使用できる。
The prepreg described in the present invention is an adhesive sheet in which a reinforcing base material is impregnated with a resin composition to form a semi-cured B-stage, and a prepreg used for a general wiring board can be used.
As said resin composition, the well-known and usual resin composition used as an insulating material of a printed wiring board can be used. Usually, a thermosetting resin having good heat resistance and chemical resistance is used as a base, and one kind of resin such as phenol resin, epoxy resin, polyimide resin, unsaturated polyester resin, polyphenylene oxide resin, fluorine resin or the like Two or more types are used in combination, and as required, inorganic powder fillers such as talc, clay, silica, alumina, calcium carbonate, aluminum hydroxide, antimony trioxide, antimony pentoxide, glass fiber, asbestos fiber, pulp fiber Further, a fiber filler such as synthetic fiber or ceramic fiber is added.
In addition, the resin composition may be blended with a thermoplastic resin in consideration of dielectric properties, impact resistance, film processability, and the like. Further, various additives and fillers such as an organic solvent, a flame retardant, a curing agent, a curing accelerator, thermoplastic particles, a colorant, an ultraviolet light impermeant, an antioxidant and a reducing agent are added as necessary.
Examples of the reinforcing substrate include inorganic fibers such as glass and asbestos, polyester, polyamide, polyacryl, polyvinyl alcohol, polyimide, organic fibers such as fluorine resin, natural fibers such as cotton, nonwoven fabric, paper, mats, etc. Is used.
Usually, after impregnating or coating the reinforcing base so that the amount of the resin composition attached to the reinforcing base is 20 to 90% by weight in terms of the resin content of the prepreg after drying, the temperature is usually 100 to 200 ° C. And dried for 1 to 30 minutes to obtain a prepreg in a semi-cured state (B stage state). Usually, 1 to 20 sheets of this prepreg are stacked and heated and pressed in a configuration in which metal foils are arranged on both surfaces. As a molding condition, a method of a normal laminated plate can be applied. For example, a multi-stage press, a multi-stage vacuum press, continuous molding, an autoclave molding machine or the like is used, and a temperature is typically 100 to 250 ° C., a pressure is 2 to 100 kg / cm 2 , and heating is performed. The molding may be performed in the range of 0.1 to 5 hours, or may be performed under reduced pressure or atmospheric pressure under a lamination condition of 50 to 150 ° C. and 0.1 to 5 MPa using a vacuum laminating apparatus or the like. Although the thickness of the prepreg layer used as an insulating layer changes with uses, the thickness of 0.01-5.0 mm can be used normally.

本発明の銅箔は、一般的な配線基板に用いる金属の箔が使用できる。本発明に用いる金属箔の表面粗さは、JISB0601に示す10点平均粗さ(Rz)が、両面とも2.0μm以下であることが電気特性上好ましい。金属箔には銅箔、ニッケル箔、アルミ箔などを用いることができるが、通常は銅箔を使用する。銅箔の製造条件は、例えば、硫酸銅浴を用いるめっき銅箔の場合、硫酸50〜100g/L、銅30〜100g/L、液温20℃〜80℃、電流密度0.5〜100A/dmの条件が一般的に用いられる。ピロリン酸銅浴を用いるめっき銅箔の場合、ピロリン酸カリウム100〜700g/L、銅10〜50g/L、液温30℃〜60℃、pH8〜12、電流密度1〜10A/dmの条件が一般的によく用いられる。何れのめっき浴を用いる場合でも、銅の物性や平滑性を考慮して各種添加剤をいれる場合もある。 The copper foil of this invention can use the metal foil used for a general wiring board. As for the surface roughness of the metal foil used in the present invention, the 10-point average roughness (Rz) shown in JISB0601 is preferably 2.0 μm or less on both surfaces in terms of electrical characteristics. Although copper foil, nickel foil, aluminum foil, etc. can be used for metal foil, copper foil is usually used. The production conditions of the copper foil are, for example, in the case of a plated copper foil using a copper sulfate bath, sulfuric acid 50-100 g / L, copper 30-100 g / L, liquid temperature 20 ° C.-80 ° C., current density 0.5-100 A / The condition of dm 2 is generally used. In the case of plated copper foil using a copper pyrophosphate bath, conditions of potassium pyrophosphate 100-700 g / L, copper 10-50 g / L, liquid temperature 30 ° C.-60 ° C., pH 8-12, current density 1-10 A / dm 2 Is commonly used. Whichever plating bath is used, various additives may be added in consideration of the physical properties and smoothness of copper.

本発明に述べる積層プレスは、内層コアの両面のそれぞれにプリプレグと銅箔とをその順に重ねた構成を1組として、加圧加熱することによりプリプレグ中の樹脂を硬化させて配線基板を製作する一般的な工程をさす。加圧加熱条件は150〜220℃、1〜10MPa程度で行う。   In the lamination press described in the present invention, a wiring board is manufactured by curing a resin in a prepreg by pressurizing and heating, with a structure in which a prepreg and a copper foil are stacked in that order on both surfaces of an inner core. Refers to the general process. The pressurizing and heating conditions are 150 to 220 ° C. and about 1 to 10 MPa.

本発明に述べる接着積層体は、銅箔の片面に、全面または一部接着した支持シート板を有するものである。銅箔とこれと接着した支持シート板との間に異物等を混入させないようにし、また、銅箔と支持シート板が容易に端部からはがれやすく、銅箔面に残さないものとする。
接着積層体の銅箔は、上記の銅箔と同様な一般的なものが使用できる。
支持シート板は、銅箔の片面に、全面または一部分接着したシート板で、銅箔の補強のほか、また、曲げ強度は低いほうが好ましい。具体的には、アルミニウム、すず、亜鉛、銅などの金属シート板で、厚さが、10μmから80μm、好ましくは20μmから50μmから目的に応じて選択される。鏡面板を設けないで積層する場合、厚い方が好ましい。 銅箔と支持シート板を接着する接着材は、積層後に接着剤の界面から接着剤を銅箔側に残さずに容易に剥がれることが好ましく、接着材を全面あるいは縁辺部にまたはスポット状に設ける、材質としてはたとえばエポキシ系、ポリエステル系、ポリイミド系等の接着剤を使用する。
The bonded laminate described in the present invention has a support sheet plate that is bonded entirely or partially on one side of a copper foil. It is assumed that foreign matter or the like is not mixed between the copper foil and the support sheet plate adhered thereto, and that the copper foil and the support sheet plate are easily peeled off from the end portions and are not left on the copper foil surface.
As the copper foil of the adhesive laminate, a general one similar to the above copper foil can be used.
The support sheet plate is a sheet plate that is bonded entirely or partially on one side of the copper foil. In addition to reinforcing the copper foil, the bending strength is preferably low. Specifically, it is a metal sheet plate of aluminum, tin, zinc, copper or the like, and the thickness is selected from 10 μm to 80 μm, preferably from 20 μm to 50 μm, depending on the purpose. When laminating without providing a mirror plate, the thicker one is preferable. The adhesive for bonding the copper foil and the support sheet plate is preferably easily peeled off from the interface of the adhesive after lamination without leaving the adhesive on the copper foil side, and the adhesive is provided on the entire surface, the edge, or in a spot shape. As the material, for example, an epoxy type, polyester type, polyimide type adhesive or the like is used.

本発明に述べる鏡面板は、一般的に使用している厚さ1mmから3mm程度のステンレス板で、表面を鏡面にしたものを使用する。鏡面板は何度も使用し、表面が荒れてきた場合には研磨して用いる。
The mirror plate described in the present invention is a generally used stainless steel plate having a thickness of about 1 mm to 3 mm and having a mirror surface. The mirror plate is used many times, and if the surface becomes rough, it is polished.

以下、本発明を図面に示す実施の形態に基づいて説明する。
図1は、本発明の積層プレスにおける多層基板の製造方法を示している。図1(a)は、1組のプレス積層体を示していて、図1(b)は、複数のプレス積層体のプレス状態を示している。
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
FIG. 1 shows a method for producing a multilayer substrate in the lamination press of the present invention. Fig.1 (a) has shown 1 set of press laminated bodies, and FIG.1 (b) has shown the press state of the several press laminated body.

図1(a)は、内層コア1の両面にプリプレグ2を介して上面側は銅箔3を積層し、下面側は銅箔3を上側とし、この銅箔3に全面または一部分接着した支持シート板4を接着積層体5とした1組のプレス積層体を示している。   FIG. 1A shows a support sheet in which a copper foil 3 is laminated on both sides of an inner core 1 via a prepreg 2 and a copper foil 3 is laminated on the lower surface side, and the copper foil 3 is adhered to the entire surface or a part thereof. A set of press laminates in which the plate 4 is an adhesive laminate 5 is shown.

図1(b)は、 図1(a)で示した1組のプレス積層体6を複数組積み重ね、上下の両端をプレス熱板7ではさむ様子を示していて、このあと積層プレスを行う。プレス熱板7の内側にはクッション材8、その内側には鏡面板9を設ける。   FIG. 1B shows a state in which a plurality of sets of the press laminates 6 shown in FIG. 1A are stacked and the upper and lower ends are sandwiched between the press hot plates 7, and then the lamination press is performed. A cushioning material 8 is provided on the inside of the press hot plate 7 and a mirror plate 9 is provided on the inside thereof.

次に、積層プレス終了後、積み重ねた個々の組を別々にし、図1(c)に示すように、(1組のプレス積層体6を図1(a)とは上下反転して示している。)1組のプレス積層体6の銅箔3側を吸引しながら固定板10に固定し、支持シート板4を端部から上側に変形させながら分離する。   Next, after the lamination press is finished, the stacked individual groups are separated, and as shown in FIG. 1 (c), (one set of pressed laminates 6 is shown upside down from FIG. 1 (a). .) The copper foil 3 side of a set of press laminates 6 is fixed to the fixing plate 10 while being sucked, and the support sheet plate 4 is separated from the end portion while being deformed upward.

図1のように、内層コア1の両面のそれぞれにプリプレグと銅箔とをその順に重ねた構成を1組として、その複数組を重ねて積層プレスする多層基板の製造方法において、各々の組の、下側の銅箔3の代わりに、銅箔3を上側としこの銅箔3と全面または一部接着した支持シート板4を下側とした積層体5を重ねて積層プレスした場合、繰り返し使用するためその表面に異物が付着しやすい鏡面板がなく、下側の銅箔3と支持シート板4とは接着材により密閉しているので、その間に異物が付着することはなく、そのため、積層プレスしたときに、下側の銅箔3に打痕は発生しない。また、貼り合わせた下側の銅箔3と支持シート板4間の分離は、支持シート板4の片面しか銅箔3がなく、支持シート板4のほうを折り曲げながら分離できるので、内層コア1が折れてしまう心配がない。
As shown in FIG. 1, in a method for manufacturing a multilayer board in which a plurality of sets are stacked and pressed, each set of a prepreg and a copper foil stacked on each side of the inner layer core 1 in that order. When the laminated body 5 with the copper foil 3 as the upper side and the support sheet plate 4 bonded to the entire surface or a part of the copper foil 3 as the lower side is laminated and pressed instead of the lower copper foil 3, repeated use Therefore, there is no mirror surface plate on which the foreign matter is likely to adhere, and the lower copper foil 3 and the support sheet plate 4 are sealed with an adhesive, so that no foreign matter adheres between them. When pressed, no dent is generated in the lower copper foil 3. Further, the separation between the bonded lower copper foil 3 and the support sheet plate 4 has only the copper foil 3 on one side of the support sheet plate 4 and can be separated while folding the support sheet plate 4. There is no worry that will break.

図2は、本発明の積層プレスにおける別の多層基板の製造方法を示している。図1(a)のプレス積層体6を1組としてその複数組を重ね、上下の両側をプレス熱板7ではさみ、組と組の間に鏡面板9を設けて積層プレスを行う。 FIG. 2 shows another method for manufacturing a multilayer substrate in the lamination press according to the present invention. The press laminated body 6 of FIG. 1A is made into one set, a plurality of sets are stacked, the upper and lower sides are sandwiched between press hot plates 7, and a mirror plate 9 is provided between the sets to perform the lamination press.

図2のように、内層コア1の両面のそれぞれにプリプレグと銅箔とをその順に重ねた構成を1組として、その複数組を重ねて積層プレスする多層基板の製造方法において、各々の組の、下側の銅箔3の代わりに、銅箔3を上側とし、この銅箔と全面または一部接着した支持シート板4を下側とした接着積層体5を重ね、組と組との間に鏡面板を設けて積層プレスした場合、異物が付着しやすい鏡面板9の上面と接しているのは支持シート板4であるため、多層基板本体の支持シート板4側の銅箔3表面には異物機縁の打痕は発生しないばかりではなく、組ごとに鏡面板9を設けているので、両面の銅箔3が均一にその内部にはさまれた内層コア1と積層されるとともに、複数組を重ねて積層プレスしても同様に各組の両面の銅箔3が均一にその内部にはさまれた内層コア1と積層される。
As shown in FIG. 2, in the method of manufacturing a multilayer board in which the prepreg and the copper foil are stacked in that order on each of both surfaces of the inner layer core 1 as a set, and the plurality of sets are stacked and pressed, In place of the lower copper foil 3, the adhesive laminate 5 with the copper foil 3 as the upper side and the support sheet plate 4 bonded to the entire surface or a part of the copper foil as the lower side is stacked, When the mirror plate is provided and laminated and pressed, it is the support sheet plate 4 that is in contact with the upper surface of the mirror plate 9 to which foreign substances are likely to adhere, so that the surface of the copper foil 3 on the support sheet plate 4 side of the multilayer substrate body In addition to the occurrence of dents on the edge of the foreign machine, the mirror plate 9 is provided for each group, so that the copper foils 3 on both sides are laminated with the inner core 1 sandwiched uniformly inside thereof, Even if the sets are stacked and stacked and pressed, the copper foils 3 on both sides of each set are similarly uniformly distributed. It is layered on the inner core layer 1 sandwiched therein.

以下、本発明を実施例に基づいて説明する。
まず、両面に銅箔を有する銅張積層板(日立化成工業(株)製、MCL−E−67、板厚0.2mm銅箔厚12μm)を使用し、銅箔をエッチングにより回路形成し、縦500mm横500mmの内層コアを作製した。内層コアの両面に厚さ40μmのプリプレグ(日立化成工業(株)製、GEA−67N)を介して、上面には厚さ5μmの銅箔、下面側には、厚さ5μmの銅箔と支持シート板として厚さ50μmのアルミニウム板を、弱接着タイプの2液型エポキシ系接着剤で貼り合わせた接着積層体を重ねたものを1組として、10組重ね、上下両側に厚さ2mm鏡面板と厚さ200μmのクッション材を設けて、圧力3MPa、温度180℃でプレスした。
このときの銅箔表面の平均打痕不良数は、上面側で0.8箇所/パネル、下面側で0.1箇所/パネルであった。
Hereinafter, the present invention will be described based on examples.
First, a copper clad laminate having a copper foil on both sides (manufactured by Hitachi Chemical Co., Ltd., MCL-E-67, thickness 0.2 mm, copper foil thickness 12 μm) is used to form a circuit by etching the copper foil, An inner layer core having a length of 500 mm and a width of 500 mm was produced. Via a prepreg with a thickness of 40 μm on both sides of the inner core (manufactured by Hitachi Chemical Co., Ltd., GEA-67N), a copper foil with a thickness of 5 μm is supported on the upper surface and a copper foil with a thickness of 5 μm is supported on the lower surface side. As a sheet plate, a set of 50 μm thick aluminum plates bonded with a weak adhesive type two-component epoxy adhesive, and a set of 10 layers, 2 mm thick mirror plates on both upper and lower sides A cushioning material having a thickness of 200 μm was provided and pressed at a pressure of 3 MPa and a temperature of 180 ° C.
At this time, the average number of dent defects on the surface of the copper foil was 0.8 places / panel on the upper surface side and 0.1 places / panel on the lower surface side.

次に、実施例1と同様に重ねたものを1組として、間に厚さ2mmの鏡面板を設け、あとは実施例1と同様にプレスした。 このときの銅箔表面の平均打痕不良数は、上面側で0.7箇所/パネル、下面側で0.1箇所/パネルであった。   Next, in the same manner as in Example 1, a pair of stacked sheets was provided with a mirror plate having a thickness of 2 mm, and the rest was pressed in the same manner as in Example 1. At this time, the average number of dent defects on the surface of the copper foil was 0.7 on the upper surface side / panel and 0.1 on the lower surface side / panel.

(従来例1)
実施例1と同じ内層コアを用意し、その両面に厚さ40μmのプリプレグを介して、上下面には厚さ5μmの銅箔、1組として、間に厚さ2mm鏡面板を設け、あとは実施例1と同様にプレスした。 このときの銅箔表面の平均打痕不良数は、上面側で0.8箇所/パネル、下面側で10.2箇所/パネルであった。
(Conventional example 1)
Prepare the same inner layer core as in Example 1, with 40 μm thick prepreg on both sides, 5 μm thick copper foil on the top and bottom, 1 pair, 2 mm thick mirror plate between, Pressing was performed in the same manner as in Example 1. At this time, the average number of dent defects on the surface of the copper foil was 0.8 places / panel on the upper surface side and 10.2 places / panel on the lower surface side.

本発明の積層プレスにおける多層基板の製造方法を示している。The manufacturing method of the multilayer substrate in the lamination press of the present invention is shown. 本発明の積層プレスにおける別の多層基板の製造方法を示している。The manufacturing method of another multilayer substrate in the lamination press of the present invention is shown.

符号の説明Explanation of symbols

1…内層コア、2…プリプレグ、3…銅箔、4…支持シート板、5…接着積層体、6…プレス積層体、7…プレス熱板、8…クッション材、9…鏡面板、10…固定板。   DESCRIPTION OF SYMBOLS 1 ... Inner layer core, 2 ... Prepreg, 3 ... Copper foil, 4 ... Support sheet board, 5 ... Adhesive laminated body, 6 ... Press laminated body, 7 ... Press hot plate, 8 ... Cushion material, 9 ... Mirror surface board, 10 ... Fixed plate.

Claims (2)

内層コアの両面のそれぞれにプリプレグと銅箔とをその順に重ねた構成を1組として、その複数組を重ねて積層プレスする多層基板の製造方法において、前記各々の組の、下側の銅箔の代わりに、銅箔を上側とし、この銅箔と全面または一部接着した支持シート板を下側とした接着積層体を重ね、積層プレス後、前記支持シート板を分離する多層基板の製造方法。   In the method of manufacturing a multilayer board, in which a prepreg and a copper foil are laminated on each of both surfaces of the inner layer core in that order as one set, and the plurality of sets are stacked and pressed, the lower copper foil of each set A method for producing a multilayer substrate in which a copper foil is placed on the upper side, an adhesive laminate is laminated on the lower side of the copper foil and a support sheet plate that is entirely or partially bonded, and the support sheet plate is separated after laminating press . 請求項1において、組と組の間に鏡面板を設ける多層基板の製造方法。   2. The method for manufacturing a multilayer substrate according to claim 1, wherein a mirror plate is provided between the set.
JP2008049795A 2008-02-29 2008-02-29 Method of manufacturing multilayer substrate Pending JP2009206425A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109451683A (en) * 2018-12-11 2019-03-08 深圳市景旺电子股份有限公司 A kind of asymmetric multi-layer board pressing back plate that solves sticks up undesirable method and compression method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109451683A (en) * 2018-12-11 2019-03-08 深圳市景旺电子股份有限公司 A kind of asymmetric multi-layer board pressing back plate that solves sticks up undesirable method and compression method
CN109451683B (en) * 2018-12-11 2020-09-04 深圳市景旺电子股份有限公司 Method for solving poor warping of asymmetric multilayer board after lamination and lamination method

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