JP2009198939A - Electrooptical device, inspection method of electrooptical device and inspection apparatus of electrooptical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrooptical device which can be disposed in a proper inspection position with a simple method in display inspection, to provide an inspection method of the electrooptical device and to provide an inspection apparatus of the electrooptical device. <P>SOLUTION: A liquid crystal device 100 as the electrooptical device is provided with a plurality of pixels G disposed on an element substrate 91, input terminals 3 and 6 in which electric signals for driving the pixels G are inputted, a terminal part 31 wherein the input terminals 3 and 6 are arranged in one direction on the surface of the element substrate 91, a plurality of position detecting terminals T1, T2, T3 and T4 arranged in one direction in the terminal part 31 together with the input terminals 3 and 6 and wiring systems having different electric resistance values between a pair of position detecting terminals T1 and T3 and an another pair of position detecting terminals T2 and T4. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an electro-optical device, an electro-optical device inspection method, and an electro-optical device inspection device.

In recent years, electro-optical devices such as liquid crystal devices have increased the number of pixels for the purpose of improving image quality. Each pixel is provided with a TFT (Thin Film Transistor) element using, for example, LTPS (Low-Temperature Poly-Silicon) as a switching element. As the number of pixels increases, the interval between input terminals electrically connected to the switching elements is gradually reduced. In such a display inspection of the electro-optical device, there is a problem that a short circuit occurs between adjacent input terminals due to a positional shift at the time of contact between the plurality of input terminals and the inspection probe of the inspection device. This short circuit may cause destruction of the switching element.
Therefore, as an example of preventing the positional deviation, a state detection mechanism of a liquid crystal product is disclosed in which the positional relationship between the inspection probe and the electrode is imaged using an imaging unit, and the positional deviation or the like is corrected. Patent Document 1).

JP 2000-258744 A (pages 4 to 5, FIGS. 2 to 4)

  However, in the conventional example of Patent Document 1, the positional relationship between the inspection probe and the electrode based on an image captured by the camera as an imaging unit that images the position of the inspection probe and the electrode and the image captured by the camera. There is a problem that an image processing circuit to be detected is required, and the inspection method or the inspection apparatus becomes complicated.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented by the following forms or application examples.

  Application Example 1 An electro-optical device according to this application example includes a plurality of pixels arranged on a substrate, an input terminal to which an electric signal for driving the pixel is input, and the input terminal is a surface of the substrate Between the terminal portions arranged in one direction, at least two pairs of position detection terminals arranged in the one direction together with the input terminals in the terminal portion, and between the at least two pairs of position detection terminals And a wiring system having different resistance values.

  According to this, since the terminal portion is provided with a position detection terminal in addition to the input terminal, the position of the terminal portion is specified using the position detection terminal, and then the electrical input is performed using the input terminal. Inspection can be performed. Specifically, since the wiring system connecting at least two pairs of position detection terminals has different electric resistance values, when a pair of position detection probes are brought into contact with each other and the position detection probes are electrically connected. If the electrical resistance value is detected, the relative position between the position detection terminal and the position detection probe is specified, so it is instantaneously determined whether or not the terminal portion, that is, the electro-optical device is in a position suitable for inspection. Can be determined. Therefore, it is possible to provide an electro-optical device that can perform electrical inspection by specifying the position of the terminal portion by a simple method.

Application Example 2 In the electro-optical device according to the application example described above, the wiring system may include independent wirings that electrically connect the at least two pairs of position detection terminals.
According to this, when the position where the position detection probe contacts between adjacent position detection terminals in at least two pairs of position detection terminals is set as an appropriate inspection position, the presence or absence of conduction between the position detection probes, Based on the electrical resistance value when conducting, it is possible to determine whether or not the position of the terminal portion is appropriate, and when conducting, the relative displacement direction can be determined.

Application Example 3 In the electro-optical device according to the application example described above, the wiring system may include wiring patterned on the same conductive layer that connects the at least two pairs of position detection terminals.
According to this, compared with the case where it comprises with independent wiring, it can be set as the electro-optical apparatus which can judge whether the position of a terminal part is appropriate with a simple wiring system.

Application Example 4 In the electro-optical device according to the application example, the end of the position detection terminal has a plurality of branch terminals formed in a comb shape and arranged in the one direction, and the plurality of branch terminals are The electrical resistance value between the branch terminals may be formed to change stepwise.
According to this, since the electrical resistance value changes stepwise by detecting the electrical resistance value between the branch terminals by the position detection probe, the input terminal is arranged between the position detection terminal and the position detection probe. In one direction, it can be seen in which direction the contact is made. That is, the position of the terminal portion can be specified more accurately by a simple method.

  Application Example 5 In the inspection method of the electro-optical device according to this application example, a plurality of pixels arranged on a substrate, an input terminal to which an electric signal for driving the pixel is input, and the input terminal Terminal portions arranged in one direction on the surface of the substrate, at least two pairs of position detection terminals arranged in the one direction together with the input terminals on the terminal portions, and the at least two pairs of position detection terminals An inspection method for an electro-optical device including a wiring system having different electrical resistance values between the pair of position detection probes provided corresponding to the at least two pairs of position detection terminals, and the input A position detecting step using an inspection probe provided corresponding to a terminal, contacting the pair of position detecting probes with the terminal portion, and detecting the presence or absence of conduction between the position detecting probes; and the position A position correction step for correcting the relative position of the inspection probe with respect to the input terminal when it is detected that continuity between the outgoing probes is present; and And a display inspection step of inspecting the display state by driving the plurality of pixels by bringing the inspection probe into contact with the terminal portion.

  According to this method, in the position detection step, it is possible to determine whether or not the terminal portion is at an appropriate inspection position by detecting the presence or absence of conduction between the position detection probes. Since the electrical resistance value between at least two pairs of position detection terminals is different, the relative positional relationship between the input terminal and the inspection probe can be determined by detecting the electrical resistance value when the position detection probe is conducted. Can be identified. Therefore, the position of the electro-optical device can be corrected so that the terminal portion is in an appropriate position in the position correction step, and a short circuit due to the inspection probe between adjacent input terminals can be prevented. That is, it is possible to provide an inspection method for an electro-optical device that can perform an appropriate display inspection by properly bringing an inspection probe into contact with an input terminal by a simple method.

Application Example 6 In the inspection method for the electro-optical device according to the application example described above, the relative position of the inspection probe with respect to the input terminal is determined based on the electrical resistance value when the electrical connection between the position detection probes is detected. It is preferable to provide a position specifying step for specifying.
According to this method, in the position specifying step, the relative displacement direction with respect to the appropriate inspection position of the terminal portion is instantaneously determined by detecting the electrical resistance value between the position detecting terminals which are not adjacent by the position detecting probe. can do.

Application Example 7 In the inspection method of the electro-optical device according to the application example, an end of the position detection terminal has a plurality of branch terminals formed in a comb shape and arranged in the one direction. The branch terminal is formed such that the electrical resistance value between the branch terminals changes in a stepwise manner, and the position specifying step is performed by the electrical resistance value between the branch terminals based on the electrical resistance value between the branch terminals. The relative position may be specified.
According to this method, it is possible to specify the shift amount in addition to the position shift direction of the terminal portion based on the electrical resistance value between the branch terminals detected using the position detection probe. Therefore, it is possible to perform an appropriate display inspection by bringing the inspection probe into contact with the input terminal with higher accuracy.

  Application Example 8 An inspection apparatus for an electro-optical device according to this application example includes a plurality of pixels arranged on a substrate, an input terminal to which an electric signal for driving the pixel is input, and the input terminal includes the input terminal Terminal portions arranged in one direction on the surface of the substrate, at least two pairs of position detection terminals arranged in the one direction together with the input terminals on the terminal portions, and the at least two pairs of position detection terminals An electro-optical device inspection apparatus comprising: a wiring system having different electrical resistance values between the pair of position detection probes provided corresponding to the at least two pairs of position detection terminals; and the input An inspection probe provided corresponding to the terminal, a position detection unit for detecting the presence or absence of conduction between the position detection probes when the pair of position detection probes are brought into contact with the terminal unit, and the position Inspection A position correction mechanism that corrects a relative position of the inspection probe with respect to the input terminal when the continuity is detected in the part, and when the continuity is detected in the position detection unit, A display drive unit for bringing the inspection probe into contact with the terminal unit and sending a drive signal for driving the plurality of pixels to the inspection probe to display the plurality of pixels. To do.

  According to this configuration, the relative position of the terminal portion is specified using at least two pairs of position detection terminals and a pair of position detection probes provided in the electro-optical device, and the position correction mechanism performs electro-optics. By correcting the position of the apparatus, the relative position between the input terminal and the inspection probe can be optimized to a state suitable for inspection. Therefore, it is possible to prevent a short circuit caused by the inspection probe between adjacent input terminals. That is, it is possible to provide an inspection apparatus for an electro-optical device that can perform a proper display inspection with a simple configuration.

Application Example 9 In the inspection apparatus for an electro-optical device according to the application example described above, the inspection probe relative to the input terminal is determined based on the electrical resistance value when the position detection unit detects that the conduction is present. It is preferable that a position specifying unit for specifying a position is provided, and the position correction mechanism corrects a relative position of the inspection probe with respect to the input terminal based on a specification result of the position specifying unit.
According to this configuration, the position specifying unit can specify the shift direction with respect to the position suitable for the inspection of the terminal unit, and can bring the inspection probe into contact with the input terminal at the correct position.

Application Example 10 In the inspection apparatus for an electro-optical device according to the application example described above, an end of the position detection terminal includes a plurality of branch terminals formed in a comb shape and arranged in the one direction. The branch terminal is formed such that the electric resistance value between the branch terminals changes in a stepwise manner, and the position specifying unit determines whether the inspection probe with respect to the input terminal is in accordance with the electric resistance value between the branch terminals. More preferably, the relative position is specified.
According to this configuration, since the position specifying unit can specify not only the shift direction with respect to the position suitable for the inspection of the terminal unit but also the shift amount, the inspection probe can be brought into contact with the input terminal with high accuracy.

<Electro-optical device>
Hereinafter, an active matrix driving type liquid crystal device will be described as an example of the electro-optical device of this embodiment, and will be described with reference to FIGS.
1 is a plan view schematically showing a schematic configuration of the liquid crystal device, FIG. 2 is an equivalent circuit diagram schematically showing an electrical configuration of the liquid crystal device, and FIG. 3 is a schematic enlarged view showing a terminal portion of the liquid crystal device. .

  As shown in FIG. 1, the liquid crystal device 100 includes an element substrate 91, a color filter substrate 92 that is disposed so as to face the element substrate 91 and bonded together with the sealing material 5, and a liquid crystal sealed inside the sealing material 5. Layer 4.

  The liquid crystal device 100 has a plurality of pixels G corresponding to filter elements of red (R), green (G), and blue (B) in the effective display area V. The plurality of pixels G are arranged in a matrix so that the same color pixels G are arranged in the vertical direction (Y-axis direction) of the liquid crystal device 100.

  The element substrate 91 is provided with a TFT (Thin Film Transistor) element 30 (see FIG. 2) as a switching element corresponding to each pixel G.

  A scanning line 3 and a signal line 6 as input terminals electrically connected to the TFT element 30 are connected to the terminal portion 31 of the element substrate 91 that protrudes downward in the drawing due to the bonding with the color filter substrate 92. 31 are arranged along one side.

  In this case, the scanning lines 3 and the signal lines 6 are arranged at equal intervals, and may be referred to as input terminals 3 and 6 for explanation.

  The terminal portion 31 is provided with a plurality (four) of position detection terminals T1, T2, T3, and T4 arranged at equal intervals in the same manner as the plurality of input terminals 3 and 6. Two position detection terminals T1 and T2 and two position detection terminals T3 and T4 are arranged on both sides of the terminal portion with the plurality of input terminals 3 and 6 interposed therebetween. In these terminals, the intervals between adjacent terminals are all the same.

  In the terminal section 31, the arrangement interval of the scanning lines 3 and the arrangement interval of the signal lines 6 may be different. In this case, the plurality of position detection terminals T1, T2, T3, and T4 are narrow. Basically, it is arranged with an interval substantially equal to the arrangement interval of the other.

  Although not shown in FIG. 1, the liquid crystal device 100 includes a wiring system that electrically connects the position detection terminals T1, T2, T3, and T4. The wiring system has at least a wiring connecting a pair of position detection terminals T1 and T3 that are not adjacent to each other and a wiring connecting another pair of position detection terminals T2 and T4 that are also not adjacent to each other. Yes. These wirings have different electrical resistance values. Details will be described later.

  Next, the electrical configuration of the liquid crystal device 100 will be described with reference to FIG. FIG. 2 is an equivalent circuit diagram schematically showing the electrical configuration of the liquid crystal device.

  As shown in FIG. 2, on the element substrate 91, a plurality of signal lines 6 corresponding to address numbers S1, S2,..., Sn-1, Sn extend in the Y direction and spaced in the X direction. Is formed. A plurality of scanning lines 3 corresponding to the address numbers G1, G2,..., Gm−1, Gm extend in the X direction and are formed at intervals in the Y direction. Each pixel G is provided in a region partitioned by a plurality of signal lines 6 and a plurality of scanning lines 3 in a matrix. The pixel G is provided with a TFT element 30 having source, gate, and drain electrodes, and a pixel capacitor 9 and a pixel electrode 10 electrically connected to the drain of the TFT element 30. The source side of the TFT element 30 is electrically connected to the signal line 6 through a contact hole or the like. The gate side of the TFT element 30 is electrically connected to the scanning line 3 through a contact hole or the like. The drain side of the TFT element 30 is electrically connected to the pixel electrode 10.

  The pixel electrode 10 faces the common electrode COM provided on the color filter substrate 92 with the liquid crystal layer 4 interposed therebetween.

  Each signal line 6 and each scanning line 3 are electrically connected to a driver IC (not shown), and a source circuit provided in the driver IC is responsible for driving each signal line 6 and provided in the driver IC. The obtained gate circuit is responsible for driving each scanning line 3.

  The scanning lines 3 are selected one by one in the order of G1, G2,..., Gm−1, Gm by the gate circuit in the driver IC. The selected scanning line 3 is supplied with a gate signal of a selection voltage, while the other non-selected scanning lines 3 are supplied with a gate signal of a non-selection voltage. A source circuit in the driver IC supplies a source signal corresponding to the display content to the pixel electrode 10 located on the selected scanning line 3 via the corresponding signal line 6 and the TFT element 30. In this way, a drive signal for driving the liquid crystal layer 4 is applied between the pixel electrode 10 and the common electrode COM, and each pixel G is displayed.

  As shown in FIG. 3, the terminal portion 31 has scanning lines 3 and signal lines 6 as input terminals, and position detection terminals T1, T2, T3, and T4 that are not electrically connected to these terminals. Are arranged in the X direction which is one direction. The order of arrangement is the order of the position detection terminals T1 and T2, the scanning lines 3 and signal lines 6 as input terminals, and the position detection terminals T3 and T4.

  The terminals are arranged at equal intervals, and the arrangement pitch is P1. Hereinafter, this is referred to as a terminal pitch P1.

  As described with reference to the equivalent circuit diagram of FIG. 2, since the drive signal is applied to each of the scanning line 3 and the signal line 6, it is desired to avoid the drive signal becoming dull due to an electrical resistance component. Therefore, patterning is required so that the electric resistance value is as low as possible. In FIG. 3, the terminal pitch of the input terminals 3 and 6 and the terminal pitch of the position detection terminals T1 and T2 (position detection terminals T3 and T4) are equal to P1, but in reality, the input terminals The width in the X direction of the conductor portions 3 and 6 is wider than the width in the X direction of the position detection terminals T1, T2, T3, and T4. In other words, the gap between the input terminals 3 and 6 is narrower than the gap between the position detection terminals T1 and T2 (position detection terminals T3 and T4). Therefore, when the inspection probe is brought into contact with the input terminals 3 and 6 in the display inspection described later, it is necessary to accurately align the relative positions of the input terminals 3 and 6 and the inspection probe in the X direction. When the inspection probe contacts the adjacent input terminals 3 and 6, a short circuit occurs between the input terminals 3 and 6, and a correct display cannot be performed, and the TFT element 30 as a switching element is damaged.

  In the present embodiment, the gap between the position detection terminals T1 and T2 (position detection terminals T3 and T4) is such that the position detection terminals T1 and T2 are in contact (position) with a position detection probe (described later). It is set to such an extent that no short circuit occurs between (position detection terminals T3, T4). In other words, the width of the conductor portion of the position detection terminals T1, T2, T3, and T4 is such that no short circuit occurs.

  A wiring system of the liquid crystal device 100 will be described with reference to FIG. FIG. 4A is a circuit diagram showing a wiring system of the present embodiment, and FIG. 4B is a circuit diagram showing a wiring system of a modification.

As shown in FIG. 4A, the wiring system L in this embodiment includes independent wirings L13 and L24.
The pair of position detection terminals T1 and T3 are connected by a wiring L13. Similarly, another pair of position detection terminals T2 and T4 are connected by a wiring L24.
Here, the wirings L13 and L24 are formed to have different electric resistance values by adjusting the wiring width, wiring length, wiring thickness, or the like. For this reason, the electrical resistance value between the position detection terminals T1 and T3 is different from the electrical resistance value between the position detection terminals T2 and T4. For example, when the former electric resistance value is R10 and the latter electric resistance value is R20, the relationship is R10> R20 or R10 <R20. Considering detection of the position detection terminals T1, T2, T3, and T4, it is desirable that the difference between R10 and R20 is as large as possible, for example, several times.

Such a wiring system L is not necessarily composed of independent wirings L13 and L24. For example, as shown in FIG. 4B, wirings L1, L2, L3 patterned on the same conductive layer are used. It may consist of L4 and L5.
The pair of position detection terminals T1, T3 are connected by wirings L1, L5, L3. The position detection terminals T2, T4 are connected by wirings L2, L5, L4.
Here, in the wirings L1, L2, L3, L4, and L5, by adjusting the wiring width and wiring length, the electric resistance value R10 between the pair of position detection terminals T1 and T3 and the other pair of positions are adjusted. It is possible to make the electrical resistance value R20 between the detection terminals T2 and T4 different.

  As shown in FIG. 4B, the wiring system L is formed by patterning the same conductive layer, so that it is not necessary to provide an insulating portion at an intersecting position as compared to the independent wirings L13 and L24. Easy to form.

  According to the liquid crystal device 100 of the present embodiment, the terminal portion 31 is provided with the position detection terminals T1, T2, T3, and T4 arranged in the X direction at intervals substantially equal to the arrangement intervals of the input terminals 3 and 6. By electrically detecting this, the liquid crystal device 100 can be arranged at an appropriate inspection position in the display inspection described later.

<Electro-optical device inspection device>
Hereinafter, the inspection apparatus for the liquid crystal device 100 according to the present embodiment will be described with reference to FIG. FIG. 5 is a schematic configuration diagram showing the configuration of the inspection apparatus for the liquid crystal device.

  As shown in FIG. 5, the inspection device 200 of the liquid crystal device 100 includes an inspection probe 20, a pair of position detection probes 22, a control unit 50, and a position correction mechanism 60.

  The control unit 50 includes a position detection unit 51, a position specification unit 52, a position correction mechanism control unit 53, and a display drive unit 54.

  The relative positional relationship in the X direction between the inspection probe 20 and the pair of position detection probes 22 is the relative positional relationship between the input terminals 3 and 6 and the pair of position detection terminals T1 and T3 in the liquid crystal device 100. The same.

  The inspection probe 20 and the pair of position detection probes 22 are configured to be able to contact (contact) the terminal portion 31 independently.

  Each inspection probe 20 is electrically connected to the display driving unit 54. Each position detection probe 22 is electrically connected to the position detection unit 51. In addition, the position specifying unit 52 is also electrically connected via the position detection unit 51.

  The position detection unit 51 brings the pair of position detection probes 22 into contact with the terminal unit 31 of the liquid crystal device 100. Then, the presence or absence of conduction between the pair of position detection probes 22 is detected.

  When the electrical connection between the pair of position detection probes 22 is detected as being present, the position specifying unit 52 measures the electrical resistance value R.

  The position correction mechanism control unit 53 drives the position correction mechanism 60 to move the liquid crystal device 100 in the X direction based on the measurement result of the electrical resistance value R obtained by the position specifying unit 52.

  The display driving unit 54 brings the inspection probe 20 into contact with the terminal unit 31 of the liquid crystal device 100. Then, a display drive signal is output from the inspection probe 20 to the signal line 6 or the scanning line 3 which is an input terminal, and the pixel G of the liquid crystal device 100 is driven to display.

  The operation of the inspection apparatus 200 will be described in the inspection method of the liquid crystal device 100.

<Electro-optical device inspection method>
An inspection method of the liquid crystal device 100 as the electro-optical device will be described with reference to FIGS. FIG. 6 is a flowchart showing a method for inspecting a liquid crystal device, and FIGS. 7A to 7D are schematic plan views showing a method for inspecting a liquid crystal device. Specifically, FIGS. 7A to 7D show the positional relationship of the position detection probe 22 with respect to the position detection terminals T1, T2, T3, and T4, and the inspection probe with respect to the signal line 6 or the scanning line 3 that is the input terminal. The positional relationship of 20 is shown.

  As shown in FIG. 6, the inspection method of the liquid crystal device 100 includes a position detection step (step S <b> 1) in which a pair of position detection probes 22 are brought into contact with the terminal portion 31, and a position detection probe 22 between which the contact is made. A determination (detection) step (step S2) for determining (detecting) the presence or absence of conduction. Further, when it is determined (detected) that electrical continuity exists between the position detection probes 22, the position specifying step (step S3) for measuring the electrical resistance value R and the measurement result of the electrical resistance value R are used. And a position correction step (step S4) for driving the position correction mechanism 60 and correcting the relative position of the liquid crystal device 100 with respect to the position detection probe 22. Further, in the determination step (step S2), when it is determined that there is no conduction between the position detection probes 22, the inspection probe 20 is brought into contact with the terminal portion 31 to drive the plurality of pixels G to inspect the display state. Display inspection process (step S5). When the position correction process (step S4) is performed, the process returns to the position detection process (step S1) again.

  In the position detection step (step S <b> 1), as illustrated in FIG. 7A, the position detection unit 51 brings the pair of position detection probes 22 into contact with the terminal unit 31. When the liquid crystal device 100 is at the reference inspection position in the inspection device 200, the tip portions (contact portions) of the pair of position detection probes 22 are located between the position detection terminal T1 and the position detection terminal T2, and the position. Contact is made between the detection terminal T3 and the position detection terminal T4. Therefore, in the determination step (step S2), since it is determined that the continuity is “none”, the process proceeds to the display inspection step (step S5) to perform the display inspection. In the display inspection step (step S5), as shown in FIG. 7B, the relative position of the inspection probe 20 with respect to the input terminals 3 and 6 matches. Therefore, even if the inspection probe 20 is brought into contact with the terminal portion 31, there is no short circuit between the input terminals. Therefore, the drive signals are correctly input to the input terminals 3 and 6, and an appropriate display inspection can be performed.

  For example, as shown in FIG. 7C, when the relative position of the pair of position detection probes 22 is shifted with respect to the position detection terminals T1 to T4, the position detection probes 22 are connected to the terminals in step S1. When contact is made with the part 31, the contact is made with the pair of position detection terminals T1, T3, and in step S2, the continuity is determined to be “present”. At this time, the relative positional relationship of the inspection probe 20 with respect to the input terminals 3 and 6 is shifted in the X direction as shown in FIG. Therefore, when the display inspection (step S5) is performed as it is, the tip portion of the inspection probe 20 contacts over the adjacent input terminals 3 and 6, so that a short circuit occurs, and in the worst case, the TFT element 30 is electrically connected. May be destroyed.

  Therefore, in the determination step (step S2), when it is determined that the electrical connection between the position detection probes 22 is “present”, the process proceeds to the position specifying step (step S3). In the position specifying step (step S3), the electrical resistance value between the position detection probes 22 is measured. As shown in FIG. 7C, the measurement result includes an electrical resistance value R10 between the pair of position detection terminals T1 and T3, though including the contact resistance. Accordingly, it is found that the liquid crystal device 100 is relatively displaced with respect to the reference inspection position, and in which direction the X direction is displaced. In the state shown in FIG. 7C, it can be seen that the liquid crystal device 100 is shifted to the right in the X direction.

  Similarly, when the measurement result of the electrical resistance value between the position detection probes 22 is substantially R20, the pair of position detection probes 22 are in contact with the other pair of position detection terminals T2 and T4. This indicates that the liquid crystal device 100 is shifted to the left in the X direction. That is, the relative position of the liquid crystal device 100 is specified.

  In the subsequent position correction process (step S4), based on the measurement result in the position specifying process as described above, that is, the relative position specifying result of the liquid crystal device 100, the position correction mechanism control unit 53 The position correction mechanism 60 is driven, and the liquid crystal device 100 is relatively moved in the X direction. The amount of movement at that time may be moved to the left or right at least about half of the terminal pitch P1.

  As described above, even if the position detection step (step S1) and the determination step (step S2) are performed again, the result that the continuity is almost “no” can be derived, and the display inspection step can be smoothly performed.

  According to the inspection method using the inspection device 200 of the liquid crystal device 100 of the present embodiment, the inspection probe 20 is correctly brought into contact with the input terminals 3 and 6, and the inspection between the input terminals 3 and 6 in the display inspection process. A short circuit caused by the probe 20 can be reliably prevented, and an appropriate display inspection can be performed. Therefore, electrical damage to the TFT element 30 due to a short circuit by the inspection probe 20 can be prevented.

  Various modifications other than the above embodiment are conceivable. Hereinafter, modified examples will be described.

  (Modification 1) In the liquid crystal device 100 of the above embodiment, the shape and arrangement of the position detection terminals T1, T2, T3, T4 are not limited to this. FIGS. 8A and 8B are schematic plan views showing a position detection terminal according to a modification.

As shown in FIG. 8 (a), the terminal of the position detection terminal T1 of the modified example has a plurality of branch terminals t11, t12, t13, and t14 formed in a comb shape and arranged in one direction, the X direction. Have. Branch terminals t11, t12, t13, and t14 are branched at an equal terminal pitch P2. Further, although the width in the X direction is substantially the same, the length in the Y direction is different. Specifically, from the right side, the length of the branch terminal t11 is D1, the length of the branch terminal t12 is D2, the length of the branch terminal t13 is D3, and the length of the branch terminal t14 is D4. The magnitude relationship is D1>D2>D3> D4 stepwise along the X direction. The ends of the other position detection terminals T2, T3, T4 are formed in the same manner.
In such an inspection method of the liquid crystal device 100, for example, as shown in FIG. 8B, when the pair of position detection probes 22 and the terminal portion 31 are brought into contact with each other in the position detection step, the pair of position detection probes. The probe 22 contacts the pair of position detection terminals T2 and T4, and conduction is obtained through the branch terminal t14 and the branch terminal t24. Therefore, an electrical resistance value corresponding to the length D4 of the branch terminals t14 and t24 is detected. Therefore, the relative position of the liquid crystal device 100 with respect to the original inspection position can be specified with the accuracy conceived of the terminal pitch P2 narrower than the terminal pitch P1. That is, the display inspection can be performed by positioning the input terminals 3 and 6 and the inspection probe 20 with higher accuracy.
In this modification, an example in which the lengths of the branch terminals t11 to t14 are made different is shown, but an example in which the width or the thickness is made different may be used.

  (Modification 2) The wiring system L in the liquid crystal device 100 of the above embodiment is not limited to this. FIGS. 9A and 9B are circuit diagrams showing other wiring systems. Specifically, FIG. 9A is a circuit diagram of a wiring system composed of independent wirings, and FIG. 9B is a circuit diagram of a wiring system composed of wirings obtained by patterning the same conductive layer.

As shown in FIG. 9A, the wiring system L includes independent wirings L10, L11, L12, L20, L21, and L22. Accordingly, the position detection terminals T1, T2, T3, and T4 are each divided into three. In other words, the wiring system L constitutes six pairs of position detection terminals.
Then, the wirings L10, L11, L12, L20, L21, and L22 may be formed to have different electric resistance values by adjusting the wiring width, wiring length, or thickness, respectively. In this way, the accuracy of position detection can inevitably be improved.

As shown in FIG. 9B, the wiring system L includes wirings L15, L16, L17, L25, L26, L27, L50, L35, L36, L37, L45, L46, and L47 patterned on the same conductive layer. Become.
The pair of position detection terminals T1 and T3 are each divided into three, and the electric resistance value when they are connected by the wirings L15, L50, and L35, or the wirings L16, L50, and L36, or the wirings L17, L50, and L37. Detected.
Similarly, the other pair of position detection terminals T2 and T4 are each divided into three, and are connected when connected by wirings L25, L50, L45, wirings L26, L50, L46, or wirings L27, L50, L47. A resistance value is detected.
Therefore, the wirings L15, L16, L17, L25, L26, L27, L50, L35, L36, L37, L45, L46, and L47 may be formed so that the electrical resistance values depending on the combination of these wirings are different. According to this, the accuracy of position detection in FIG.

(Modification 3) In the liquid crystal device 100 of the above embodiment, the number and arrangement of the position detection terminals are not limited to this. FIG. 10A is a schematic diagram showing the arrangement of the position detection terminals in the terminal portion of the modification, and FIG. 10B is a circuit diagram showing the wiring system. For example, as shown in FIG. 10A, three position detection terminals T1, T2, and T3 may be arranged at one end (in the X direction) of the terminal portion 31. In this case, the width of the conductor portion of the position detection terminal T1 is set wider (about twice) than the other position detection terminals T2 and T3. The gaps between the position detection terminals T1, T2 and T3 are the same, and the terminal pitch between the position detection terminals T2 and T3 and the terminal pitch between the input terminals 3 and 6 is P1.
As shown in FIG. 5B, the pair of position detection terminals T1, T2 are connected by wirings L6, L7, L8, and the other pair of position detection terminals T1, T3 are connected by wirings L6, L9. . Then, the wirings L6, L7, L8, and L9 are formed so that the electrical resistance value between the position detection terminals T1 and T2 and the electrical resistance value between the position detection terminals T1 and T3 are different. In other words, the position detection terminals T1, T2 and the position detection terminals T1, T3 share the position detection terminal T1 among the plurality of position detection terminals T1, T2, T3.
In this way, when the pair of position detection probes 22 come into contact with the terminal portion 31 and continuity cannot be obtained, the inspection probes for the input terminals 3 and 6 as shown in FIG. The relative positions of 20 will coincide in the X direction. Therefore, the same operation and effect as the above-described embodiment can be obtained, and an appropriate display inspection can be performed in the display inspection process.
Further, since it is not necessary to arrange the two pairs of position detection terminals T1, T2, T3 across the input terminals 3 and 6 in the terminal portion 31, the wiring system L is configured without affecting other wirings. Can do.

  (Modification 4) The equivalent circuit in the liquid crystal device 100 of the above embodiment is not limited to this. A circuit configuration in which a plurality of TFT elements 30 are provided may be used so as not to be easily damaged electrically.

  (Modification 5) The arrangement of the plurality of pixels G in the liquid crystal device 100 of the above embodiment is not limited to this. For example, a multi-color configuration in which other colors are added to R, G, B, and three colors may be used.

  (Modification 6) The electro-optical device in the above embodiment is not limited to the active matrix type liquid crystal device 100. For example, the present invention can also be applied to a passive matrix liquid crystal device and an organic EL device including a passive matrix or active matrix organic EL (electroluminescence) element.

The top view which shows typically schematic structure of a liquid crystal device. FIG. 3 is an equivalent circuit diagram schematically illustrating an electrical configuration of the liquid crystal device. The schematic enlarged view which shows the terminal part of a liquid crystal device. (A) is a circuit diagram which shows the wiring system of embodiment, (b) is a circuit diagram which shows the wiring system of a modification. The schematic block diagram which shows the structure of the test | inspection apparatus of a liquid crystal device. 6 is a flowchart illustrating a method for inspecting a liquid crystal device. (A)-(d) is a schematic plan view which shows the test | inspection method of a liquid crystal device. (A) And (b) is a schematic plan view which shows the terminal for position detection of a modification. (A) And (b) is a circuit diagram which shows another wiring system. (A) is the schematic which shows arrangement | positioning of the terminal for position detection in the terminal part of a modification, (b) is a circuit diagram which shows a wiring system.

Explanation of symbols

  3, 6 ... Input terminal, 20 ... Inspection probe, 22 ... Position detection probe, 31 ... Terminal section, 51 ... Position detection section, 52 ... Position specifying section, 54 ... Display drive section, 60 ... Position correction mechanism, 91 ... element substrate as substrate, 100 ... liquid crystal device as electro-optical device, 200 ... inspection device, G ... pixel, L ... wiring system, L1, L2, L3, L4, L5 ... wiring obtained by patterning the same conductive layer, L13, L24 ... independent wirings, t11, t12, t13, t14, t24 ... branch terminals.

Claims (10)

A plurality of pixels arranged on a substrate;
An input terminal to which an electric signal for driving the pixel is input;
A terminal portion in which the input terminals are arranged in one direction on the surface of the substrate;
At least two pairs of position detection terminals arranged in the one direction together with the input terminal in the terminal portion;
An electro-optical device comprising: a wiring system having different electrical resistance values between the at least two pairs of position detection terminals. The electro-optical device according to claim 1,
The electro-optical device, wherein the wiring system includes independent wirings connecting the at least two pairs of position detection terminals. The electro-optical device according to claim 1,
The electro-optical device, wherein the wiring system includes wiring patterned on the same conductive layer connecting the at least two pairs of position detection terminals. The electro-optical device according to any one of claims 1 to 3,
The terminal of the position detection terminal has a plurality of branch terminals formed in a comb shape and arranged in the one direction,
The electro-optical device, wherein the plurality of branch terminals are formed such that the electric resistance value between the branch terminals changes stepwise. A plurality of pixels arranged on a substrate;
An input terminal to which an electric signal for driving the pixel is input;
A terminal portion in which the input terminals are arranged in one direction on the surface of the substrate;
At least two pairs of position detection terminals arranged in the one direction together with the input terminal in the terminal portion;
An inspection method for an electro-optical device comprising: a wiring system having different electrical resistance values between the at least two pairs of position detection terminals,
A pair of position detection probes provided corresponding to the at least two pairs of position detection terminals;
Using an inspection probe provided corresponding to the input terminal,
A position detecting step of bringing the pair of position detecting probes into contact with the terminal portion and detecting the presence or absence of conduction between the position detecting probes;
A position correction step of correcting a relative position of the inspection probe with respect to the input terminal when it is detected that conduction between the position detection probes is present;
A display inspection step of inspecting a display state by driving the plurality of pixels by bringing the inspection probe into contact with the terminal portion when it is detected that there is no conduction between the position detection probes. An inspection method for an electro-optical device. An inspection method for an electro-optical device according to claim 5,
An electro-optical device comprising: a position specifying step of specifying a relative position of the inspection probe with respect to the input terminal based on an electrical resistance value when it is detected that conduction between the position detection probes is present. Inspection method. An inspection method for an electro-optical device according to claim 6,
The terminal of the position detection terminal has a plurality of branch terminals formed in a comb shape and arranged in the one direction,
The plurality of branch terminals are formed such that the electrical resistance value between the branch terminals changes stepwise.
The electro-optical device inspection method, wherein the position specifying step specifies a relative position of the inspection probe with respect to the input terminal based on the electric resistance value between the branch terminals. A plurality of pixels arranged on a substrate;
An input terminal to which an electric signal for driving the pixel is input;
A terminal portion in which the input terminals are arranged in one direction on the surface of the substrate;
At least two pairs of position detection terminals arranged in the one direction together with the input terminal in the terminal portion;
An inspection apparatus for an electro-optical device, comprising: a wiring system having different electrical resistance values between the at least two pairs of position detection terminals;
A pair of position detection probes provided corresponding to the at least two pairs of position detection terminals;
An inspection probe provided corresponding to the input terminal;
A position detection unit that detects the presence or absence of conduction between the position detection probes when the pair of position detection probes are brought into contact with the terminal unit;
A position correction mechanism that corrects a relative position of the inspection probe with respect to the input terminal when the position detection unit detects that the continuity is present;
When the position detection unit detects that the continuity is absent, the inspection probe is brought into contact with the terminal unit, and a plurality of the driving signals for driving the plurality of pixels are sent to the inspection probe. An inspection apparatus for an electro-optical device, comprising: a display driving unit that displays pixels. The electro-optical device inspection apparatus according to claim 8,
A position specifying unit that specifies a relative position of the inspection probe with respect to the input terminal according to the electrical resistance value when the conduction is detected in the position detection unit,
The electro-optical device inspection apparatus, wherein the position correction mechanism corrects a relative position of the inspection probe with respect to the input terminal based on a specification result of the position specifying unit. An inspection apparatus for an electro-optical device according to claim 9,
The terminal of the position detection terminal has a plurality of branch terminals formed in a comb shape and arranged in the one direction,
The plurality of branch terminals are formed such that the electrical resistance value between the branch terminals changes stepwise.
The inspection device for an electro-optical device, wherein the position specifying unit specifies a relative position of the inspection probe with respect to the input terminal based on the electric resistance value between the branch terminals.

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