JP2009195953A - Ultrasonic soldering device - Google Patents

Ultrasonic soldering device Download PDF

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JP2009195953A
JP2009195953A JP2008040379A JP2008040379A JP2009195953A JP 2009195953 A JP2009195953 A JP 2009195953A JP 2008040379 A JP2008040379 A JP 2008040379A JP 2008040379 A JP2008040379 A JP 2008040379A JP 2009195953 A JP2009195953 A JP 2009195953A
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tip
infrared light
iron
solder
ultrasonic
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JP4665003B2 (en
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Katsuya Nakamoto
勝也 中本
Katsumi Ioku
克巳 井奥
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Mitsubishi Electric Engineering Co Ltd
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Mitsubishi Electric Engineering Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic soldering device which has an ultrasonic soldering iron as a heating means having a good heat efficiency capable of drastically reducing the labor of maintenance-cleaning, and does not take away heat of a melted solder from an iron tip. <P>SOLUTION: In the ultrasonic soldering device (100), the iron tip (11) making ultrasonic oscillation is brought into contact with the solder (31) melted by heating, and soldering to a substrate (30) to be soldered is performed by raising wettability by giving ultrasonic oscillation to the melted solder. The device is provided with an infrared heater (20) which emits infrared light (28), collects the emitted infrared light, and irradiates the collected light on the iron tip. The solder is melted by heating by the iron tip heated by infrared light irradiation. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明は、超音波半田コテを用いた超音波半田付装置に関し、特に半田を加熱溶融するための加熱手段の改良に関するものである。   The present invention relates to an ultrasonic soldering apparatus using an ultrasonic soldering iron, and more particularly to improvement of a heating means for heating and melting solder.

加熱手段によって加熱溶融させた半田に、超音波振動子によって超音波振動させたコテ先を接触させることにより、溶融半田に超音波振動を付与して濡れ性を高めて被半田付基板に半田付けを行う超音波半田コテを用いた超音波半田付装置は実用されている。
例えば、インジウムハンダ被覆銅箔リボン導線を用いた接続方法によれば、ガラス基板上の導体電極とリボン導線とを、損傷なしに低コストで確実・強固に接続するために、超音波半田コテを加熱しながらインジウム半田を溶融させながら半田接続を行う(例えば、特許文献1参照)。
Solder that is heated and melted by heating means is contacted with a tip that has been ultrasonically vibrated by an ultrasonic vibrator, thereby applying ultrasonic vibration to the molten solder to improve wettability and soldering to the substrate to be soldered An ultrasonic soldering apparatus using an ultrasonic soldering iron for carrying out the above is in practical use.
For example, according to a connection method using an indium solder-coated copper foil ribbon conductor, an ultrasonic soldering iron is used to securely and firmly connect the conductor electrode on the glass substrate and the ribbon conductor at low cost without damage. Solder connection is performed while indium solder is melted while heating (see, for example, Patent Document 1).

但し、半田コテの加熱手段については開示されていないが、一般市場で提供されている
超音波半田コテの加熱手段は、超音波半田コテのコテ先の外周に間隙をおいてヒータコイルが巻回され、このヒータコイルに通電することによってコテ先を加熱するようになっている。
また、半田である線状ろう材の供給用ホルダに設けた加熱装置、または基板を加熱する予熱プレートによって半田を溶融するようにした超音波半田の技術が開示されている(例えば、特許文献2参照)。
また、ハロゲンランプを用いてハンダを溶融するようにした非接触ハンダ付け装置が開示されている(例えば、特許文献3参照)。
However, although the soldering iron heating means is not disclosed, the ultrasonic soldering iron heating means provided in the general market has a heater coil wound around the outer periphery of the tip of the ultrasonic soldering iron. The tip of the iron is heated by energizing the heater coil.
Also disclosed is a technique of ultrasonic soldering in which solder is melted by a heating device provided in a holder for supplying linear brazing filler metal or a preheating plate for heating a substrate (for example, Patent Document 2). reference).
Further, a non-contact soldering apparatus is disclosed in which solder is melted using a halogen lamp (see, for example, Patent Document 3).

特開2007−207861号公報JP 2007-207861 A 特許第3205423号公報Japanese Patent No. 3205423 特開平06−254673号公報Japanese Patent Laid-Open No. 06-254673

しかし、特許文献1による接続方法において、ヒータコイルが使用されると、半田カスが間隙に侵入して超音波振動を阻害し、これに対処するための保守・清掃に手間がかかるとともに、間隙を広げると熱伝達効率が悪化するという問題がある。
また、特許文献2による半田付方法においては、超音波半田コテ自身が加熱処理されていないので、コテ先により溶融半田の熱を奪って良質な半田付けが行えなくなるという問題がある。
また、特許文献3による半田付け装置は、超音波半田ではないので半田コテを必要としないが、もしも超音波半田コテにおいて、半田を赤外線加熱するようにした場合には、加
熱されていないコテ先によって溶融半田の熱を奪って良質な半田付けが行えなくなるという問題がある。
However, in the connection method according to Patent Document 1, when a heater coil is used, the solder residue penetrates into the gap and obstructs the ultrasonic vibration, and it takes time for maintenance and cleaning to cope with this. If spread, there is a problem that the heat transfer efficiency deteriorates.
Further, in the soldering method according to Patent Document 2, since the ultrasonic soldering iron itself is not heat-treated, there is a problem that high-quality soldering cannot be performed by removing the heat of the molten solder with the iron tip.
The soldering apparatus according to Patent Document 3 does not require a soldering iron because it is not ultrasonic soldering. However, if the solder is heated by infrared rays in the ultrasonic soldering iron, the iron tip that is not heated is used. As a result, the heat of the molten solder is deprived and high-quality soldering cannot be performed.

この発明は、熱効率が良く保守・清掃の手間を大幅に削減することができる超音波半田コテの加熱手段を有し、コテ先から溶融半田の熱を奪うことのない超音波半田付装置を提供することである。   The present invention provides an ultrasonic soldering apparatus that has a heating means for an ultrasonic soldering iron that has high thermal efficiency and can greatly reduce maintenance and cleaning, and that does not take the heat of molten solder from the tip of the iron. It is to be.

この発明に係る超音波半田付装置は、加熱することにより溶融した半田に超音波振動するコテ先を接触して、上記溶融した半田に超音波振動を付与して濡れ性を高めて被半田付基板に半田付けを行う超音波半田付装置において、赤外光を発光するとともに発光した赤外光を集光して上記コテ先に照射する赤外線ヒータを備え、赤外光が照射されて加熱された上記コテ先により上記半田を加熱して溶融する。   The ultrasonic soldering apparatus according to the present invention is such that a soldering tip that is ultrasonically vibrated is brought into contact with the solder melted by heating, and ultrasonic wave vibration is imparted to the melted solder so as to improve wettability. An ultrasonic soldering apparatus for soldering to a substrate includes an infrared heater that emits infrared light, collects the emitted infrared light and irradiates the tip of the iron, and is irradiated with infrared light and heated. The solder is heated and melted with the iron tip.

この発明に係る超音波半田付装置の効果は、赤外光を発光するハロゲンランプおよび発光された赤外光をコテ先に集光して照射する集光ミラーを備え、超音波振動する半田付け用のコテ先を赤外光により加熱するので、コテ先を外周から電熱ヒータコイルにより加熱するものに比べて、半田カスによる目詰まりによって超音波振動が阻害されることが無くなったり、目詰まりを防止するための清掃管理の手間が省けたりするとともに、熱効率が高く、急速加熱が行なえることである。   The effect of the ultrasonic soldering apparatus according to the present invention is that the soldering which ultrasonically vibrates includes a halogen lamp that emits infrared light and a condensing mirror that collects and radiates the emitted infrared light on the tip of the iron. Since the iron tip for heating is heated by infrared light, the ultrasonic vibration is not hindered by clogging due to solder clogging or clogging compared to the case where the iron tip is heated from the outer periphery by an electric heater coil. In addition to saving the trouble of cleaning management to prevent it, heat efficiency is high and rapid heating can be performed.

実施の形態1.
図1は、この発明の実施の形態1に係る超音波半田付装置の全体構成図である。図2は、この発明の実施の形態1に係る超音波半田付装置の超音波半田コテの詳細図である。
この発明の実施の形態1に係る超音波半田付装置100は、図1に示すように、超音波半田コテ10と赤外線ヒータ20とを一体化した集合体50と、集合体50を昇降移動および前後移動するアクチュエータ40と、を備える。
そして、超音波半田付装置100は、例えばガラス板である被半田付基板30に半田31を用いてリード32を半田付けする工程において使用される。
Embodiment 1 FIG.
1 is an overall configuration diagram of an ultrasonic soldering apparatus according to Embodiment 1 of the present invention. FIG. 2 is a detailed view of the ultrasonic soldering iron of the ultrasonic soldering apparatus according to Embodiment 1 of the present invention.
As shown in FIG. 1, the ultrasonic soldering apparatus 100 according to the first embodiment of the present invention includes an assembly 50 in which the ultrasonic soldering iron 10 and the infrared heater 20 are integrated, and the assembly 50 is moved up and down. And an actuator 40 that moves back and forth.
The ultrasonic soldering apparatus 100 is used in a process of soldering the leads 32 using the solder 31 to the substrate to be soldered 30 which is a glass plate, for example.

超音波半田コテ10は、例えばステンレスの丸棒材であるコテ先11Aと、コテ先11Aの大径部12をケース13に固定する固定板14と、大径部12の一端に固定される超音波振動子15と、超音波振動子15にリード線16を介して接続される超音波コントローラ17と、を備える。
なお、丸棒材のコテ先11Aの中心軸5は、被半田付基板30の半田面31aに当接するコテ先11Aの端面19に対して傾斜角θ度だけ傾いている。また、コテ先11Aの円筒状の腹面のうち少なくとも赤外光28が照射される照射面27Aは、例えばセラミックス系の耐熱性黒色塗料が塗装されており、赤外光28を効率的に吸収する。
The ultrasonic soldering iron 10 is, for example, a tip 11A, which is a round rod material of stainless steel, a fixing plate 14 for fixing the large diameter portion 12 of the tip 11A to the case 13, and a super fixed to one end of the large diameter portion 12. An ultrasonic transducer 15 and an ultrasonic controller 17 connected to the ultrasonic transducer 15 via a lead wire 16 are provided.
The center axis 5 of the tip 11A of the round bar is inclined by an inclination angle θ degree with respect to the end surface 19 of the tip 11A that contacts the solder surface 31a of the substrate 30 to be soldered. Further, at least an irradiation surface 27A on which the infrared light 28 is irradiated among the cylindrical abdominal surface of the tip 11A is coated with, for example, a ceramic heat-resistant black paint and efficiently absorbs the infrared light 28. .

赤外線ヒータ20は、近赤外領域の赤外光28を発光するハロゲンランプ21と、集光ミラー22と、ハロゲンランプ21にリード線23を介して接続されるランプコントローラ24と、を備える。ハロゲンランプ21から発光される赤外光28は、集光ミラー22によりコテ先11Aの照射面27Aでビーム径dになるように集光されて照射面27Aに照射される。このとき、赤外光28が照射されるコテ先11Aの側面は円筒面であり、赤外光28が照射される領域のコテ先11Aの中心軸5方向の長さをdとし、以下ビーム径dと称す。なお、ビーム径dとコテ先11Aの外径Dとの関係は式(1)の範囲に設定するのが好ましい。   The infrared heater 20 includes a halogen lamp 21 that emits infrared light 28 in the near-infrared region, a condenser mirror 22, and a lamp controller 24 connected to the halogen lamp 21 via a lead wire 23. The infrared light 28 emitted from the halogen lamp 21 is condensed by the condenser mirror 22 so as to have a beam diameter d on the irradiation surface 27A of the tip 11A, and is irradiated on the irradiation surface 27A. At this time, the side surface of the tip 11A irradiated with the infrared light 28 is a cylindrical surface, and the length of the region irradiated with the infrared light 28 in the direction of the central axis 5 of the tip 11A is d. d. The relationship between the beam diameter d and the outer diameter D of the tip 11A is preferably set in the range of the formula (1).

D/3≦d≦D (1)     D / 3 ≦ d ≦ D (1)

赤外線ヒータ20および超音波半田コテ10は、ケース13を外周から挟持する第1保持部材18と、一端側で第1保持部材18を保持するとともに他端側で赤外線ヒータ20が固定される第2保持部材25と、により一体化されている。   The infrared heater 20 and the ultrasonic soldering iron 10 include a first holding member 18 that holds the case 13 from the outer periphery, and a second holding the first holding member 18 on one end side and the infrared heater 20 being fixed on the other end side. The holding member 25 is integrated.

アクチュエータ40は、サーボモータ41と、サーボモータ41にカップリング42およびボールネジ43を介して被半田付基板30に平行して移動する移動体44と、移動体44に固定された上下駆動用のエアシリンダ45と、エアシリンダ45のピストンにより上下動作を行う昇降台46と、昇降台46上に固定された昇降駆動用のエアシリンダ47と、エアシリンダ47のピストンによって昇降動作を行う昇降台49aと、一端が第2保持部材25に固定されるとともに他端にストッパ49bが固定された支持軸26と、昇降台49aとストッパ49b間に圧縮介挿されたバネ48と、を備える。
そして、支持軸26は、アクチュエータ40により水平方向および上下方向に駆動され、支持軸26に固定された集合体50も水平方向および上下方向に一体として駆動される。
The actuator 40 includes a servo motor 41, a moving body 44 that moves to the servo motor 41 in parallel with the soldered substrate 30 via a coupling 42 and a ball screw 43, and an up-and-down driving air fixed to the moving body 44. A cylinder 45, a lift 46 that moves up and down by a piston of the air cylinder 45, an air cylinder 47 that moves up and down fixed on the lift 46, and a lift 49 a that moves up and down by a piston of the air cylinder 47 A support shaft 26 having one end fixed to the second holding member 25 and a stopper 49b fixed to the other end, and a spring 48 that is compression-inserted between the lifting platform 49a and the stopper 49b.
The support shaft 26 is driven in the horizontal direction and the vertical direction by the actuator 40, and the assembly 50 fixed to the support shaft 26 is also driven integrally in the horizontal direction and the vertical direction.

次に、この発明の実施の形態1に係る超音波半田付装置の動作を説明する。
超音波コントローラ17は、超音波振動子15に高周波電流を流すことにより、超音波振動子15に固定されたコテ先11Aに例えば周波数40kHzの超音波振動を付与し、超音波振動するコテ先11Aは、溶融された半田31の濡れ性を向上する。
赤外線ヒータ20は、コテ先11Aの照射面27Aに集光された赤外光28を照射してコテ先11Aを加熱する。
アクチュエータ40は、超音波半田コテ10と赤外線ヒータ20との集合体50をコテ先11Aの端面19が半田面31aに当接するまで下降し、次に、コテ先11Aの端面19が半田面31aに当接しながら図1に示す被半田付基板30の左手側から右手側に水平移動させながら半田付け作業を行う。但し、図1に示す超音波半田コテ10の右側には図示しない温風ヒータが設けられていて、半田付け部位を予熱するようになっている。
Next, the operation of the ultrasonic soldering apparatus according to Embodiment 1 of the present invention will be described.
The ultrasonic controller 17 applies ultrasonic vibration with a frequency of, for example, 40 kHz to the tip 11A fixed to the ultrasonic transducer 15 by flowing a high-frequency current through the ultrasonic transducer 15, and the tip 11A that ultrasonically vibrates. Improves the wettability of the melted solder 31.
The infrared heater 20 irradiates the infrared light 28 condensed on the irradiation surface 27A of the tip 11A to heat the tip 11A.
The actuator 40 descends the assembly 50 of the ultrasonic soldering iron 10 and the infrared heater 20 until the end surface 19 of the iron tip 11A contacts the solder surface 31a, and then the end surface 19 of the iron tip 11A contacts the solder surface 31a. Soldering is performed while horizontally moving from the left hand side to the right hand side of the soldered substrate 30 shown in FIG. However, a hot air heater (not shown) is provided on the right side of the ultrasonic soldering iron 10 shown in FIG. 1 so as to preheat the soldering portion.

ここで、赤外光28が照射されるコテ先11Aの照射面27Aは、コテ先11Aの端面19に近い方が望ましいが、集光ミラー22の外径が大きいので赤外光28の光軸3は、被半田付基板30の半田面31aに対して上から覗き込むように斜めにする必要がある。
そして、赤外光28の光軸3を半田面31aに対して傾斜させた場合、コテ先11Aの中心軸5に平行な照射面27Aの中心線が半田面31aに対して垂直になっていると照射面27Aに照射された赤外光28の一部は照射面27Aで反射されて半田面31aを照射してしまうという問題がある。
そこで、この発明の実施の形態1に係る超音波半田付装置100では、コテ先11Aの中心軸5に平行な照射面27Aの中心線が赤外光28の光軸3に対して直交するように、コテ先11Aの中心軸5を半田面31aに対して直交させずに傾けている。赤外光28の光軸3を半田面31aに対して(180−θ)度傾けたとき、コテ先11Aの中心軸5を半田面31aに対して傾斜角θ度傾けることにより、赤外光28の光軸3が照射面27Aの中心線と直交する。
このように、赤外光28の光軸3が照射面27Aの中心線に直交すると、照射面27Aの中心線上で反射された赤外光28は集光ミラー22に向かうので、集光ミラー22で再度反射されて照射面27Aに照射される。
Here, the irradiation surface 27A of the tip 11A irradiated with the infrared light 28 is preferably closer to the end surface 19 of the tip 11A. However, since the outer diameter of the condensing mirror 22 is large, the optical axis of the infrared light 28 is increased. 3 is required to be inclined so as to look into the solder surface 31a of the substrate 30 to be soldered from above.
When the optical axis 3 of the infrared light 28 is inclined with respect to the solder surface 31a, the center line of the irradiation surface 27A parallel to the central axis 5 of the tip 11A is perpendicular to the solder surface 31a. There is a problem that a part of the infrared light 28 irradiated to the irradiation surface 27A is reflected by the irradiation surface 27A and irradiates the solder surface 31a.
Therefore, in the ultrasonic soldering apparatus 100 according to Embodiment 1 of the present invention, the center line of the irradiation surface 27A parallel to the center axis 5 of the tip 11A is orthogonal to the optical axis 3 of the infrared light 28. Further, the central axis 5 of the tip 11A is inclined without being orthogonal to the solder surface 31a. When the optical axis 3 of the infrared light 28 is tilted by (180-θ) degrees with respect to the solder surface 31a, the center axis 5 of the tip 11A is tilted with respect to the solder surface 31a by an inclination angle θ degrees, whereby infrared light 28 optical axes 3 are orthogonal to the center line of the irradiation surface 27A.
As described above, when the optical axis 3 of the infrared light 28 is orthogonal to the center line of the irradiation surface 27A, the infrared light 28 reflected on the center line of the irradiation surface 27A is directed to the condensing mirror 22, and thus the condensing mirror 22. Then, it is reflected again and irradiated onto the irradiation surface 27A.

但し、コテ先11Aの外側面は円筒面であるので反射した赤外光28は多方向に散乱するが、被半田付基板30の表面には散乱光が照射されないように照射面27Aの位置を端面19から離れるように設定している。
また、ビーム径dはコテ先11Aの外径Dよりも小さな寸法として、散乱方向が広角度にならないように配慮されている。
なお、コテ先11Aが安定した超音波振動するためには、単純な円柱形状であって、半田面31aに対して直交しているのが望ましいが、この発明の実施の形態1に係る超音波半田付装置では円柱形状のコテ先11Aの中心軸5を半田面31aに対して傾斜角θ度だけ傾けることにより反射光が半田面31aを照射しないようにしたものである。
However, since the outer surface of the tip 11A is a cylindrical surface, the reflected infrared light 28 is scattered in multiple directions, but the position of the irradiation surface 27A is set so that the surface of the soldered substrate 30 is not irradiated with scattered light. The distance from the end face 19 is set.
The beam diameter d is set to be smaller than the outer diameter D of the tip 11A so that the scattering direction does not become a wide angle.
In addition, in order for the tip 11A to vibrate with stable ultrasonic waves, it is desirable that the tip 11A has a simple cylindrical shape and is orthogonal to the solder surface 31a. However, the ultrasonic wave according to the first embodiment of the present invention is preferred. In the soldering apparatus, the central axis 5 of the cylindrical tip 11A is inclined by an inclination angle θ degrees with respect to the solder surface 31a so that the reflected light does not irradiate the solder surface 31a.

この発明の実施の形態1に係る超音波半田付装置100は、赤外光28を発光するハロゲンランプ21および発光された赤外光28をコテ先11Aに集光して照射する集光ミラー22を備え、超音波振動する半田付け用のコテ先11Aを赤外光28により加熱するので、コテ先11Aを外周から電熱ヒータコイルにより加熱するものに比べて、半田カスによる目詰まりによって超音波振動が阻害されることが無くなったり、目詰まりを防止するための清掃管理の手間が省けたりするとともに、熱効率が高く、急速加熱が行なえる。   The ultrasonic soldering apparatus 100 according to the first embodiment of the present invention includes a halogen lamp 21 that emits infrared light 28 and a condensing mirror 22 that collects and radiates the emitted infrared light 28 onto the tip 11A. The soldering iron tip 11A that is ultrasonically vibrated is heated by the infrared light 28, so that the ultrasonic vibration is caused by clogging with the solder residue compared to the case where the iron tip 11A is heated from the outer periphery by the electric heater coil. Is not obstructed, and the labor of cleaning management for preventing clogging can be saved, and the heat efficiency is high and rapid heating can be performed.

また、赤外線ヒータ20によって半田31自体を直接加熱するものに比べ、超音波振動を付与するためのコテ先11Aが半田31から熱を奪うことがなく、加熱されたコテ先11Aの熱容量によって安定した温度による半田31の加熱が行えるととともに、コテ先11Aの形状を変更することによって必要とされる最低限度の領域の半田31を加熱することができる。   In addition, compared to the case where the solder 31 itself is directly heated by the infrared heater 20, the tip 11A for applying ultrasonic vibration does not take heat from the solder 31, and is stabilized by the heat capacity of the heated tip 11A. The solder 31 can be heated by the temperature, and the solder 31 in the minimum required area can be heated by changing the shape of the tip 11A.

また、コテ先11Aの照射面27Aに照射される赤外光28の照射面27Aでのビーム径dがコテ先11Aの外径D以下且つコテ先11Aの外径Dの1/3以上になるように赤外光28が集光されるので、コテ先11Aの全体を均一に加熱することができるとともにコテ先11Aの外径幅を超える領域に対する無駄な投光を防止することができる。   Further, the beam diameter d on the irradiation surface 27A of the infrared light 28 irradiated to the irradiation surface 27A of the iron tip 11A is equal to or smaller than the outer diameter D of the iron tip 11A and one third or more of the outer diameter D of the iron tip 11A. Thus, since the infrared light 28 is condensed, the entire tip 11A can be heated uniformly, and unnecessary light projection to a region exceeding the outer diameter width of the tip 11A can be prevented.

また、半田面31aに対して傾いている赤外光28の光軸3に対して直交するようにコテ先11Aの中心軸5を半田面31aに対して傾けているので、コテ先11Aの端面19に近い箇所に赤外光28を照射してもコテ先11Aの照射面27Aで散乱した赤外光28が半田面31aには向かわずに被半田付基板30を必要以上に加熱することが防げる。
また、赤外光28が照射されるコテ先11Aの照射面27Aがコテ先11Aの端面19から離れているように赤外光28をコテ先11Aに照射するので、コテ先11Aの端面19に近い箇所に赤外光28を照射してもコテ先11Aの照射面27Aで散乱した赤外光28が半田面31aには向かわずに被半田付基板30を必要以上に加熱することが防げる。
Further, since the central axis 5 of the tip 11A is inclined with respect to the solder surface 31a so as to be orthogonal to the optical axis 3 of the infrared light 28 inclined with respect to the solder surface 31a, the end surface of the tip 11A Even when the infrared light 28 is irradiated to a portion close to 19, the infrared light 28 scattered on the irradiation surface 27A of the tip 11A does not go to the solder surface 31a, and the soldered substrate 30 may be heated more than necessary. I can prevent it.
Further, since the infrared light 28 is irradiated onto the tip 11A so that the irradiation surface 27A of the tip 11A irradiated with the infrared light 28 is separated from the end surface 19 of the tip 11A, the end surface 19 of the tip 11A is irradiated with the infrared light 28A. Even if the infrared light 28 is irradiated to a nearby location, the infrared light 28 scattered on the irradiation surface 27A of the tip 11A does not go to the solder surface 31a, and the soldered substrate 30 can be prevented from being heated more than necessary.

また、超音波半田コテ10のコテ先11Aは耐熱性の黒色塗料によって塗装されているので、赤外光28の吸収を高め、加熱効率が向上する。   Also, since the tip 11A of the ultrasonic soldering iron 10 is coated with a heat-resistant black paint, the absorption of the infrared light 28 is increased, and the heating efficiency is improved.

また、超音波半田コテ10および赤外線ヒータ20が第1保持部材18および第2保持部材25により集合体50として一体化され、一体化された集合体50がアクチュエータ40により昇降および水平移動されるので、超音波半田コテ10と赤外線ヒータ20との間の相互の寸法関係を維持したままで昇降および水平移動されながら常に安定した加熱が行われる。   Further, the ultrasonic soldering iron 10 and the infrared heater 20 are integrated as an assembly 50 by the first holding member 18 and the second holding member 25, and the integrated assembly 50 is moved up and down and horizontally moved by the actuator 40. In addition, stable heating is always performed while moving up and down and horizontally moving while maintaining the mutual dimensional relationship between the ultrasonic soldering iron 10 and the infrared heater 20.

実施の形態2.
図3は、この発明の実施の形態2に係る超音波半田付装置の部分構成図である。図4は、この発明の実施の形態2に係る超音波半田付装置のコテ先の正面図である。
この発明の実施の形態2に係る超音波半田付装置は、この発明の実施の形態1に係る超音波半田付装置100とコテ先11Bが異なり、それ以外は同様であるので、同様な部分に同じ符号を付記し説明は省略する。
この発明の実施の形態2に係るコテ先11Bは、この発明の実施の形態1に係るコテ先11Aの赤外線ヒータ20に対面する腹面に溝状の照射平面部27Bが設けられたことが異なっており、それ以外は同様であるので、同様な部分に同じ符号を付記し説明は省略する。
コテ先11Bの照射平面部27Bは、コテ先11Bが水平移動する方向に対して直交するコテ先11Bの腹面に設けられ、赤外光28の光軸3に対して直交する平面を有し、平面のコテ先11Bの中心軸5方向の幅は集光された赤外光28の平面でのビーム径dより大きい。
Embodiment 2. FIG.
FIG. 3 is a partial configuration diagram of an ultrasonic soldering apparatus according to Embodiment 2 of the present invention. FIG. 4 is a front view of a soldering tip of an ultrasonic soldering apparatus according to Embodiment 2 of the present invention.
The ultrasonic soldering apparatus according to Embodiment 2 of the present invention is different from the ultrasonic soldering apparatus 100 according to Embodiment 1 of the present invention in that the tip 11B is the same. The same reference numerals are given and description thereof is omitted.
The iron tip 11B according to the second embodiment of the present invention is different in that a groove-shaped irradiation flat portion 27B is provided on the abdominal surface facing the infrared heater 20 of the iron tip 11A according to the first embodiment of the present invention. Since the rest is the same, the same reference numerals are given to the same parts, and the description is omitted.
The irradiation flat part 27B of the iron tip 11B is provided on the abdominal surface of the iron tip 11B orthogonal to the direction in which the iron tip 11B moves horizontally, and has a plane orthogonal to the optical axis 3 of the infrared light 28, The width of the flat iron tip 11B in the direction of the central axis 5 is larger than the beam diameter d on the plane of the condensed infrared light 28.

赤外線ヒータ20から照射平面部27Bに照射された赤外光28は、照射平面部27Bの平面で反射されるが、平面が赤外光28の光軸3に直交しているので、平面で反射した赤外光28は集光ミラー22に向かう。そして、コテ先11Aの照射面27Aのように円筒側面ではないので、反射した赤外光28の全てが集光ミラー22に向かい、他の方向への散乱光を発生しない。   The infrared light 28 irradiated to the irradiation plane portion 27B from the infrared heater 20 is reflected by the plane of the irradiation plane portion 27B, but the plane is orthogonal to the optical axis 3 of the infrared light 28, and is reflected by the plane. The infrared light 28 is directed to the condenser mirror 22. And since it is not a cylindrical side surface like the irradiation surface 27A of the tip 11A, all of the reflected infrared light 28 goes to the condensing mirror 22 and does not generate scattered light in other directions.

この発明の実施の形態2に係る超音波半田付装置は、この発明の実施の形態1に係る超音波半田付装置100と同様に、赤外光28を発光するハロゲンランプ21および発光された赤外光28をコテ先11Bに集光して照射する集光ミラー22を備え、コテ先11Bを赤外光28により加熱するので、高効率で省電力、急速加熱が行なえるとともに燃焼による生成物もないクリーンな加熱が行える。   Similar to the ultrasonic soldering apparatus 100 according to the first embodiment of the present invention, the ultrasonic soldering apparatus according to the second embodiment of the present invention and the halogen lamp 21 that emits the infrared light 28 and the emitted red light. A condensing mirror 22 for condensing and irradiating the external light 28 onto the iron tip 11B is provided, and the iron tip 11B is heated by the infrared light 28, so that high efficiency, power saving, rapid heating and combustion products Clean heating is possible.

また、この発明の実施の形態2に係る超音波半田付装置は、半田面31aに対して傾いている赤外光28の光軸3に対して直交する面を有する照射平面部27Bに赤外光28を照射するので、コテ先11Bの端面19に近い箇所に赤外光28を照射してもコテ先11Bの照射平面部27B反射した赤外光28が全て集光ミラー22に向かい被半田付基板30を必要以上に加熱することが防げる。   In addition, the ultrasonic soldering apparatus according to Embodiment 2 of the present invention applies infrared light to the irradiation plane portion 27B having a surface orthogonal to the optical axis 3 of the infrared light 28 inclined with respect to the solder surface 31a. Since the light 28 is irradiated, even if the infrared light 28 is irradiated to a portion close to the end surface 19 of the tip 11B, all the infrared light 28 reflected by the irradiation plane portion 27B of the tip 11B is directed to the condenser mirror 22 and is soldered. It is possible to prevent the attached substrate 30 from being heated more than necessary.

実施の形態3.
図5は、この発明の実施の形態3に係る超音波半田付装置の部分構成図である。図6は、この発明の実施の形態3に係る超音波半田付装置のコテ先の正面図である。
この発明の実施の形態3に係る超音波半田付装置は、この発明の実施の形態1に係る超音波半田付装置100と超音波半田コテが異なり、それ以外は同様であるので、同様な部分に同じ符号を付記し説明は省略する。
この発明の実施の形態1に係る超音波半田コテ10ではコテ先11Aの中心軸5が半田面31aに対してコテ先11Aが水平移動される方向に傾斜角θ度傾斜しているが、この発明の実施の形態3に係る超音波半田コテではコテ先11Cの中心軸5が半田面31aに直交している。
この発明の実施の形態3に係るコテ先11Cは、赤外光28が照射されるコテ先11Cの水平移動される方向に直交する腹面に溝状の照射平面部27Cが設けられ、端面19がコテ先11Cの中心軸5に対して直交することがこの発明の実施の形態1に係るコテ先11Aと異なっており、それ以外は同様であるので、同様な部分に同じ符号を付記し説明は省略する。
コテ先11Cの照射平面部27Cは、コテ先11Cが水平移動される方向に直交し且つ赤外線ヒータ20に対面する腹面に設けられ、赤外光28の光軸3に対して直交する平面を有し、平面のコテ先11Cの中心軸5方向の幅は集光された赤外光28の平面でのビーム径dより大きい。
Embodiment 3 FIG.
FIG. 5 is a partial configuration diagram of an ultrasonic soldering apparatus according to Embodiment 3 of the present invention. FIG. 6 is a front view of a soldering tip of an ultrasonic soldering apparatus according to Embodiment 3 of the present invention.
The ultrasonic soldering apparatus according to the third embodiment of the present invention is different from the ultrasonic soldering apparatus 100 according to the first embodiment of the present invention in that the ultrasonic soldering iron is different and the other parts are the same. Are denoted by the same reference numerals and description thereof is omitted.
In the ultrasonic soldering iron 10 according to the first embodiment of the present invention, the central axis 5 of the iron tip 11A is inclined with respect to the solder surface 31a in the direction in which the iron tip 11A is horizontally moved. In the ultrasonic soldering iron according to the third embodiment of the invention, the center axis 5 of the tip 11C is orthogonal to the solder surface 31a.
The iron tip 11C according to Embodiment 3 of the present invention is provided with a groove-shaped irradiation flat portion 27C on the abdominal surface orthogonal to the horizontal movement direction of the iron tip 11C irradiated with the infrared light 28, and the end face 19 is The point 11C perpendicular to the center axis 5 is different from the point 11A according to the first embodiment of the present invention, and the other points are the same. Omitted.
The irradiation flat portion 27C of the tip 11C is provided on the abdominal surface orthogonal to the direction in which the tip 11C is horizontally moved and faces the infrared heater 20, and has a plane orthogonal to the optical axis 3 of the infrared light 28. However, the width of the flat iron tip 11C in the direction of the central axis 5 is larger than the beam diameter d on the plane of the condensed infrared light 28.

赤外線ヒータ20から照射平面部27Cに照射された赤外光28は、照射平面部27Cの平面で反射されるが、平面が赤外光28の光軸3に直交しているので、平面で反射した赤外光28は集光ミラー22に向かう。そして、コテ先11Aの照射面27Aのように円筒側面ではないので、反射した赤外光28の全てが集光ミラー22に向かい、他の方向への散乱光を発生しない。   The infrared light 28 irradiated to the irradiation flat portion 27C from the infrared heater 20 is reflected by the plane of the irradiation flat portion 27C, but the plane is orthogonal to the optical axis 3 of the infrared light 28, and is reflected by the plane. The infrared light 28 is directed to the condenser mirror 22. And since it is not a cylindrical side surface like the irradiation surface 27A of the tip 11A, all of the reflected infrared light 28 goes to the condensing mirror 22 and does not generate scattered light in other directions.

この発明の実施の形態3に係る超音波半田付装置は、この発明の実施の形態1に係る超音波半田付装置100と同様に、赤外光28を発光するハロゲンランプ21および発光された赤外光28をコテ先11Cに集光して照射する集光ミラー22を備え、コテ先11Cを赤外光28により加熱するので、高効率で省電力、急速加熱が行なえるとともに燃焼による生成物もないクリーンな加熱が行える。   The ultrasonic soldering apparatus according to the third embodiment of the present invention is similar to the ultrasonic soldering apparatus 100 according to the first embodiment of the present invention. The halogen lamp 21 emits infrared light 28 and the emitted red light. A condensing mirror 22 that condenses and radiates external light 28 onto the iron tip 11C is provided, and the iron tip 11C is heated by the infrared light 28, so that high efficiency, power saving and rapid heating can be achieved, and a product by combustion Clean heating is possible.

また、この発明の実施の形態3に係る超音波半田付装置は、この発明の実施の形態2に係る超音波半田付装置と同様に、半田面31aに対して傾いている赤外光28の光軸3に対して直交する面を有する照射平面部27Cに赤外光28を照射するので、コテ先11Cの端面19に近い箇所に赤外光28を照射してもコテ先11Cの照射平面部27Cで反射した赤外光28が全て集光ミラー22に向かい被半田付基板30を必要以上に加熱することが防げる。   Further, the ultrasonic soldering apparatus according to the third embodiment of the present invention is similar to the ultrasonic soldering apparatus according to the second embodiment of the present invention in that the infrared light 28 tilted with respect to the solder surface 31a. Irradiation plane portion 27C having a surface orthogonal to optical axis 3 is irradiated with infrared light 28. Therefore, even if infrared light 28 is irradiated at a position near end surface 19 of tip 11C, the irradiation plane of tip 11C is irradiated. It is possible to prevent all of the infrared light 28 reflected by the portion 27 </ b> C from moving toward the condenser mirror 22 and heating the soldered substrate 30 more than necessary.

また、この発明の実施の形態3に係る超音波半田付装置は、コテ先11Cが単純な円柱形状であり、且つ中心軸5が半田面31aに直交しているので、コテ先11Cが安定した超音波振動する。   Further, in the ultrasonic soldering apparatus according to Embodiment 3 of the present invention, since the tip 11C has a simple cylindrical shape and the central axis 5 is orthogonal to the solder surface 31a, the tip 11C is stable. Vibrates ultrasonically.

実施の形態4.
図7は、この発明の実施の形態4に係る超音波半田付装置の部分構成図である。図8は、この発明の実施の形態4に係る超音波半田付装置のコテ先の側面図である。
この発明の実施の形態2に係る超音波半田付装置では、赤外線ヒータ20がコテ先11Bが水平移動する方向に直交するコテ先11Bの腹面に設けられた照射平面部27Bに赤外光28を照射しているが、この発明の実施の形態4に係る超音波半田付装置では、赤外線ヒータ20がコテ先11Dが水平移動する方向に平行なコテ先11Dの腹面に設けられた照射平面部27Dに赤外光28を照射していることがこの発明の実施の形態2に係る超音波半田付装置と異なっている。
この発明の実施の形態4に係るコテ先11Dは、コテ先11Dが水平移動される方向に平行な両方の腹面に赤外光28の光軸3に対して直交する平面を有する照射平面部27Dがコテ先11Dの中心軸5を中心に点対称の位置に2つ設けられる。
コテ先11Dの照射平面部27Dは、赤外光28の光軸3に対して直交する平面を有しており、この平面に向けて赤外線ヒータ20を向けると、赤外光28が反射して集光ミラー22に戻る。
Embodiment 4 FIG.
FIG. 7 is a partial configuration diagram of an ultrasonic soldering apparatus according to Embodiment 4 of the present invention. FIG. 8 is a side view of a soldering tip of an ultrasonic soldering apparatus according to Embodiment 4 of the present invention.
In the ultrasonic soldering apparatus according to the second embodiment of the present invention, the infrared heater 20 applies infrared light 28 to the irradiation plane portion 27B provided on the abdominal surface of the tip 11B perpendicular to the direction in which the tip 11B moves horizontally. In the ultrasonic soldering apparatus according to Embodiment 4 of the present invention, the irradiation plane portion 27D provided on the abdominal surface of the iron tip 11D parallel to the direction in which the iron tip 11D moves horizontally in the ultrasonic soldering apparatus according to the fourth embodiment of the present invention. This is different from the ultrasonic soldering apparatus according to the second embodiment of the present invention in that the infrared light 28 is irradiated.
The iron tip 11D according to Embodiment 4 of the present invention is an irradiation flat surface portion 27D having planes perpendicular to the optical axis 3 of the infrared light 28 on both abdominal surfaces parallel to the direction in which the iron tip 11D is horizontally moved. Are provided at two points symmetrical about the central axis 5 of the tip 11D.
The irradiation flat portion 27D of the tip 11D has a plane orthogonal to the optical axis 3 of the infrared light 28. When the infrared heater 20 is directed toward this plane, the infrared light 28 is reflected. Return to the condenser mirror 22.

この発明の実施の形態4に係る超音波半田付装置は、この発明の実施の形態1に係る超音波半田付装置100と同様に、赤外光28を発光するハロゲンランプ21および発光された赤外光28をコテ先11Dに集光して照射する集光ミラー22を備え、コテ先11Dを赤外光28により加熱するので、高効率で省電力、急速加熱が行なえるとともに燃焼による生成物もないクリーンな加熱が行える。   The ultrasonic soldering apparatus according to the fourth embodiment of the present invention is similar to the ultrasonic soldering apparatus 100 according to the first embodiment of the present invention. The halogen lamp 21 emits infrared light 28 and the emitted red light. A condensing mirror 22 that condenses and radiates external light 28 onto the iron tip 11D is provided, and the iron tip 11D is heated by the infrared light 28, so that high efficiency, power saving and rapid heating can be achieved, and products from combustion Clean heating is possible.

また、この発明の実施の形態4に係る超音波半田付装置は、この発明の実施の形態2に係る超音波半田付装置と同様に、半田面31aに対して傾いている赤外光28の光軸3に対して直交する面を有する照射平面部27Dに赤外光28を照射するので、コテ先11Dの端面19に近い箇所に赤外光28を照射してもコテ先11Dの照射平面部27Dで反射した赤外光28が全て集光ミラー22に向かい被半田付基板30を必要以上に加熱することが防げる。   Further, the ultrasonic soldering apparatus according to the fourth embodiment of the present invention is similar to the ultrasonic soldering apparatus according to the second embodiment of the present invention in that the infrared light 28 tilted with respect to the solder surface 31a. Irradiation plane portion 27D having a surface orthogonal to optical axis 3 is irradiated with infrared light 28, so that irradiation plane of tip 11D is irradiated even if infrared light 28 is irradiated at a position near end surface 19 of tip 11D. It is possible to prevent all of the infrared light 28 reflected by the portion 27 </ b> D from moving toward the condenser mirror 22 and heating the soldered substrate 30 more than necessary.

また、コテ先11Dの先端に中心軸5を中心に点対称に2つの照射平面部27Dを設けたので、コテ先11Dをより安定して超音波振動することができる。
なお、上述の実施の形態4に係る超音波半田付装置では、コテ先11Dの中心軸5をコテ先11Dが水平移動される方向に半田面31aに対して傾けているが直交しても良い。
Further, since the two irradiation flat portions 27D are provided point-symmetrically around the central axis 5 at the tip of the tip 11D, the tip 11D can be more stably ultrasonically vibrated.
In the ultrasonic soldering apparatus according to Embodiment 4 described above, the central axis 5 of the tip 11D is inclined with respect to the solder surface 31a in the direction in which the tip 11D is horizontally moved, but may be orthogonal. .

この発明の実施の形態1に係る超音波半田付装置の全体構成図である。1 is an overall configuration diagram of an ultrasonic soldering apparatus according to Embodiment 1 of the present invention. この発明の実施の形態1に係る超音波半田付装置の超音波半田コテの詳細図である。It is detail drawing of the ultrasonic soldering iron of the ultrasonic soldering apparatus which concerns on Embodiment 1 of this invention. この発明の実施の形態2に係る超音波半田付装置の部分構成図である。It is a partial block diagram of the ultrasonic soldering apparatus which concerns on Embodiment 2 of this invention. この発明の実施の形態2に係る超音波半田付装置のコテ先の正面図である。It is a front view of the iron tip of the ultrasonic soldering apparatus which concerns on Embodiment 2 of this invention. この発明の実施の形態3に係る超音波半田付装置の部分構成図である。It is a partial block diagram of the ultrasonic soldering apparatus which concerns on Embodiment 3 of this invention. この発明の実施の形態3に係る超音波半田付装置のコテ先の正面図である。It is a front view of the tip of the soldering apparatus for ultrasonic soldering according to Embodiment 3 of the present invention. この発明の実施の形態4に係る超音波半田付装置の部分構成図である。It is a partial block diagram of the ultrasonic soldering apparatus which concerns on Embodiment 4 of this invention. この発明の実施の形態4に係る超音波半田付装置のコテ先の正面図である。It is a front view of the iron tip of the ultrasonic soldering apparatus which concerns on Embodiment 4 of this invention.

符号の説明Explanation of symbols

3 光軸、5 中心軸、10 超音波半田コテ、11A、11B、11C、11D コテ先、12 大径部、13 ケース、14 固定板、15 超音波振動子、16 リード線、17 超音波コントローラ、18 第1保持部材、19 端面、20 赤外線ヒータ、21 ハロゲンランプ、22 集光ミラー、23 リード線、24 ランプコントローラ、25 第2保持部材、26 支持軸、27A 照射面、27B、27C、27D 照射平面部、28 赤外光、30 被半田付基板、31 半田、31a 半田面、32 リード、40 アクチュエータ、41 サーボモータ、42 カップリング、43 ボールネジ、44 移動体、45 エアシリンダ、46 昇降台、47 エアシリンダ、48 バネ、49a 昇降台、49b ストッパ、50 集合体、100 超音波半田付装置。   3 Optical axis, 5 Center axis, 10 Ultrasonic soldering iron, 11A, 11B, 11C, 11D Iron tip, 12 Large diameter part, 13 Case, 14 Fixing plate, 15 Ultrasonic vibrator, 16 Lead wire, 17 Ultrasonic controller , 18 First holding member, 19 End face, 20 Infrared heater, 21 Halogen lamp, 22 Condensing mirror, 23 Lead wire, 24 Lamp controller, 25 Second holding member, 26 Support shaft, 27A Irradiation surface, 27B, 27C, 27D Irradiation plane, 28 Infrared light, 30 Soldered substrate, 31 Solder, 31a Solder surface, 32 Lead, 40 Actuator, 41 Servo motor, 42 Coupling, 43 Ball screw, 44 Moving body, 45 Air cylinder, 46 Lifting platform 47 air cylinder, 48 spring, 49a lifting platform, 49b stopper, 50 assembly, 100 Ultrasonic soldering equipment.

Claims (9)

加熱することにより溶融した半田に超音波振動するコテ先を接触して、上記溶融した半田に超音波振動を付与して濡れ性を高めて被半田付基板に半田付けを行う超音波半田付装置において、
赤外光を発光するとともに発光した赤外光を集光して上記コテ先に照射する赤外線ヒータを備え、
赤外光が照射されて加熱された上記コテ先により上記半田を加熱して溶融することを特徴とする超音波半田付装置。
An ultrasonic soldering apparatus that contacts a soldered tip with ultrasonic soldering to the solder melted by heating, and applies ultrasonic vibration to the melted solder to improve wettability and solder the substrate to be soldered. In
An infrared heater that emits infrared light and collects the emitted infrared light to irradiate the tip of the iron;
An ultrasonic soldering apparatus, wherein the solder is heated and melted by the iron tip irradiated with infrared light and heated.
上記赤外線ヒータは、近赤外線領域の赤外光を発光するハロゲンランプと、発光された赤外光を集光する集光ミラーと、を備えることを特徴とする請求項1に記載の超音波半田付装置。   2. The ultrasonic solder according to claim 1, wherein the infrared heater includes a halogen lamp that emits infrared light in a near infrared region, and a condenser mirror that collects the emitted infrared light. Attached equipment. 上記コテ先の照射面での上記赤外光のビーム径は、上記コテ先の外径以下且つ上記コテ先の外径の1/3以上であることを特徴とする請求項1に記載の超音波半田付装置。   2. The super beam according to claim 1, wherein a beam diameter of the infrared light on an irradiation surface of the tip is not more than an outer diameter of the tip and not less than 1/3 of an outer diameter of the tip. Sonic soldering equipment. 上記コテ先は、中心軸が被半田付基板の半田面に対して上記コテ先の平行移動方向に所定の傾斜角だけ傾斜し、
上記赤外光の光軸は、上記中心軸に対して直交するとともに上記コテ先の側面と上記コテ先の端面から所定の距離だけ離れた位置で交わり、
上記側面で反射した上記赤外光は上記被半田付基板の表面に到来しないことを特徴とする請求項3に記載の超音波半田付装置。
The iron tip is inclined at a predetermined inclination angle in the parallel movement direction of the iron tip with respect to the solder surface of the substrate to be soldered,
The optical axis of the infrared light intersects at a predetermined distance from the side surface of the iron tip and the end surface of the iron tip while being orthogonal to the central axis,
4. The ultrasonic soldering apparatus according to claim 3, wherein the infrared light reflected by the side surface does not reach the surface of the substrate to be soldered.
上記コテ先は、上記赤外光の光軸に対して直交する照射平面部が設けられ、
上記赤外線ヒータは、上記照射平面部に向けて上記赤外光を照射することを特徴とする請求項4に記載の超音波半田付装置。
The tip of the iron is provided with an irradiation plane portion orthogonal to the optical axis of the infrared light,
The ultrasonic soldering apparatus according to claim 4, wherein the infrared heater irradiates the infrared light toward the irradiation plane portion.
上記コテ先は、中心軸が被半田付基板の半田面に対して上記コテ先の平行移動方向に傾斜または直交するとともに赤外光の光軸に対して直交する照射平面部が設けられ、
上記赤外線ヒータは、上記照射平面部に向けて上記赤外光を照射することを特徴とする請求項3に記載の超音波半田付装置。
The soldering tip is provided with an irradiation plane portion whose central axis is inclined or orthogonal to the soldering surface of the substrate to be soldered in the parallel movement direction of the soldering tip and orthogonal to the optical axis of the infrared light,
The ultrasonic soldering apparatus according to claim 3, wherein the infrared heater irradiates the infrared light toward the irradiation plane portion.
上記コテ先は、中心軸が被半田付基板の半田面に対して上記コテ先の平行移動方向に傾斜または直交するとともに上記コテ先の平行移動方向の両腹面の少なくとも一方に赤外光の光軸に対して直交する照射平面部が設けられ、
上記赤外線ヒータは、上記照射平面部に向けて上記赤外光を照射することを特徴とする請求項3に記載の超音波半田付装置。
The iron tip is inclined or perpendicular to the solder tip parallel movement direction with respect to the solder surface of the substrate to be soldered, and infrared light is applied to at least one of the two antinode surfaces of the tip tip translation direction. An irradiation plane part orthogonal to the axis is provided,
The ultrasonic soldering apparatus according to claim 3, wherein the infrared heater irradiates the infrared light toward the irradiation plane portion.
上記コテ先は、耐熱性の黒色塗料によって塗装されていることを特徴とする請求項1に記載の超音波半田付装置。   The ultrasonic soldering apparatus according to claim 1, wherein the iron tip is coated with a heat-resistant black paint. 上記超音波半田コテと上記赤外線ヒータとが保持部材により一体化された集合体と、
上記集合体を昇降および水平移動するアクチュエータと、
を備えることを特徴とする請求項1に記載の超音波半田付装置。
An assembly in which the ultrasonic soldering iron and the infrared heater are integrated by a holding member;
An actuator for moving the assembly up and down and horizontally;
The ultrasonic soldering apparatus according to claim 1, further comprising:
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