JP2009195563A - Decontamination method and system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a decontamination method and its system for improving decontamination effects of a decontamination subject in a decontamination room. <P>SOLUTION: An air blowing apparatus 15 is controlled by a control device 30, and the wind speed of the indoor air flowing in an isolator 2 is kept at a predetermined first wind speed α for a predetermined period of time until a condensed film is formed, and then the wind speed is changed and kept at a second wind speed β lower than the first wind speed α for a predetermined period of time. Hydrogen peroxide gas is supplied at this time with a first supplying amount for a first wind speed retention time Tx1 having the first wind speed α, and the second supply amount of hydrogen peroxide gas is less than the first supply amount for the second wind speed retention time Tx2 having the second wind speed β. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention provides a decontamination method for supplying a decontamination gas to a decontamination chamber, condensing the decontamination gas on the surface of the decontamination target in the decontamination chamber, and decontaminating the decontamination target, and The present invention relates to a decontamination system for decontaminating the decontamination object.

  Conventionally, decontamination chambers such as isolators, chambers, and clean rooms (sterile chambers) constituting decontaminated spaces are well known in pharmaceutical manufacturing plants and the like. Then, a decontamination gas such as hydrogen peroxide gas is supplied to the decontamination chamber, and the decontamination gas is condensed on the surface of the decontamination target placed in the decontamination chamber. It has also been proposed to decontaminate (see Patent Document 1). Here, decontamination includes chemical T-phase decontamination, sterilization, sterilization, sterilization, and the like.

  By the way, in order to reliably decontaminate the decontamination object, the surface of the decontamination object is always in contact with the decontamination gas, and a condensation film of the decontamination gas is formed on the surface. There is a need. On the other hand, even if the condensation film is formed on the surface of the object to be decontaminated, it is known that the condensed film is simultaneously evaporated and decomposed. For this reason, even if a condensation film is formed on the surface of the object to be decontaminated, it has been confirmed that the decontamination effect declines after a predetermined time. For this reason, conventionally, the decontamination chamber is made to flow the room air containing the decontamination gas at a constant wind speed so as to supply the decontamination gas component lost from the surface of the decontamination object. It was preventing the decline.

JP 2007-54447 A

  However, in the conventional decontamination method for maintaining the decontamination effect by flowing the room air at a constant wind speed, the external shape of the decontamination target contained in the decontamination chamber is a complicated shape. In addition, there is a case where a desired decontamination cannot be performed due to insufficient formation of a condensed film of the decontamination gas in the details of the outer shape.

  Then, this invention aims at providing the decontamination method and decontamination system which can solve the said subject.

  In view of the above problems, the present inventors have invented the following configuration. The present invention supplies a decontamination gas to the decontamination chamber, and causes a room air containing the decontamination gas to flow in the decontamination chamber by a blower provided in the decontamination chamber. In the decontamination method of decontaminating the decontamination object by condensing the decontamination gas and condensing the decontamination gas on the surface of the decontamination object in the decontamination chamber, controlling the blower Thus, after maintaining the wind speed of the indoor air flowing in the decontamination chamber for a predetermined time at a predetermined first wind speed, the air speed is maintained for a predetermined time at a second wind speed slower than the first wind speed, or the blower is stopped. In this decontamination method, an indoor air deceleration step is performed in which the air velocity of the room air is set to 0 for a predetermined time.

To restate, the main part of the present invention is to execute the indoor air deceleration step, and the indoor air deceleration step is performed after maintaining the wind speed of the indoor air at the first wind speed for a predetermined time, The wind speed is maintained for a predetermined time, or the wind speed of the room air is set to 0 for a predetermined time.
In such a configuration, the present inventor condenses the decontamination gas on the detailed surface of the decontamination object when the wind speed of the indoor air is changed from the first wind speed to the second wind speed or from the first wind speed to zero wind speed. Found to be promoted. Here, the present inventor considered the reason why the condensation of the decontamination gas is promoted as follows. Conventionally, indoor air containing decontamination gas is caused to flow at a constant wind speed for the reasons described above. In such a measure, while the decontamination gas is supplied to the surface of the object to be decontaminated, It was thought that the decontamination gas was removed from the surface of the decontamination object, preventing the formation of a condensed film. That is, when the influence of removal of the decontamination gas is large with respect to the supply of the decontamination gas to the object to be decontaminated, the condensation film is not sufficiently formed, the decontamination effect is reduced, and the decontamination is not performed. I thought it would be stable. Therefore, in the present invention, when the room air containing the decontamination gas is changed from the first wind speed to the second wind speed, or from the first wind speed to the wind speed 0, the decontamination gas quickly enters the room due to the first wind speed. The decontamination gas easily enters and stays on the surface of the complicated shape of the object to be decontaminated by the second wind speed or zero wind speed, and the condensed film is stably formed on the surface of the detail. Become.

  The indoor air deceleration process may be repeated a plurality of times.

  Such a configuration further stabilizes the formation of the condensed film in the details of the complicated shape of the object to be decontaminated.

  In the decontamination method, in the indoor air deceleration step, the decontamination gas is supplied into the decontamination chamber by a first supply amount during a time period maintained at the first wind speed, and is slower than the first wind speed. When the second wind speed is maintained or when the indoor air speed is zero, the decontamination gas is supplied by a second supply amount smaller than the first supply amount, or the decontamination gas is supplied into the decontamination chamber. A configuration without supply is desirable.

  By adopting such a configuration, it is possible to reduce the decontamination gas consumption as a whole as compared with the conventional one while maintaining the decontamination effect, and it is possible to suppress the cost for decontamination.

  In addition, a decontamination chamber to which decontamination gas is supplied, a blower provided in the decontamination chamber for flowing room air containing the decontamination gas in the decontamination chamber, and controlling the blower to perform the decontamination. A blower control means for changing the wind speed of the indoor air flowing in the dyeing chamber, and the blower control means controls the blower to flow the indoor air containing the decontamination gas in the decontamination chamber. In the decontamination system for decontaminating the decontamination object by condensing the decontamination gas in the decontamination chamber and condensing the decontamination gas on the surface of the decontamination object in the decontamination chamber, The device control means controls the blower to maintain the wind speed of the room air flowing in the decontamination chamber at a predetermined first wind speed for a predetermined time, and then at a second wind speed slower than the first wind speed. Maintain for a predetermined time or stop the blower to Decontamination system characterized by the velocity of the inner air and a room air deceleration control content for a predetermined time only 0 can be proposed.

  Such a decontamination system can infiltrate and retain the decontamination gas particularly on the surface of the details of the object to be decontaminated, and the decontamination gas can be sufficiently supplied to stably form a condensed film even in the details. be able to.

  Further, in the decontamination system, it is desirable that the blower control means has a control content that repeats the indoor air deceleration control content a plurality of times.

  By setting it as this structure, formation of a condensation film | membrane is further stabilized in the detail of the complicated shape of a decontamination target object.

  A decontamination gas supply device that supplies the decontamination gas to the decontamination chamber; and a decontamination gas supply device control unit that controls the decontamination gas supply device to change the supply amount of the decontamination gas. The decontamination gas supply device control means controls the decontamination gas supply device during the time when the air blower control means maintains the wind speed of the room air at the first wind speed. Gas is supplied into the decontamination chamber by the first supply amount, and the time during which the air blower control means maintains the wind speed of the room air at a second wind speed slower than the first wind speed or the wind speed of the room air is set to 0. The decontamination gas supply device control means controls the decontamination gas supply device so as to supply the decontamination gas by a second supply amount smaller than the first supply amount or supply the decontamination gas to the decontamination chamber. It is good also as a structure which is not supplied to.

  By adopting such a configuration, it is possible to reduce the decontamination gas consumption as a whole as compared with the conventional case, and it is possible to suppress the cost for decontamination.

  In the present invention, since the room air containing the decontamination gas enters and stays in the details of the decontamination object, the formation of the condensed film is promoted even in the details, and the decontamination effect is reliably improved.

Examples of the decontamination method and decontamination system according to the present invention will be described with reference to FIGS.
As shown in FIG. 1, the decontamination system 1 includes an isolator 2 as a decontamination chamber. Here, the internal space of the isolator 2 is airtightly blocked from the outdoor. Then, a hydrogen peroxide gas, which is a decontamination gas, is supplied into the isolator 2, and further a decontamination object such as a syringe (syringe) before being injected with a chemical solution, which is placed in the work space 20 in the isolator 2. The hydrogen peroxide gas is condensed on the surface of X, and the condensed state is maintained for a predetermined time to decontaminate the surface and the like.

A specific configuration of the isolator 2 will be described.
As shown in FIG. 1, a vertical partition plate 3 for partitioning a room is provided in the isolator 2. And the clearance gap formed between this partition plate 3 and the inner wall of the isolator 2 becomes the surrounding circuit 20A through which room air can pass. In addition, an opening 3A is provided at the lower end of the partition plate 3 to communicate the work space 20 disposed in the center of the isolator 2 with the peripheral circuit 20A.

  In addition, a HEPA filter 4 for cleaning the indoor air of the isolator 2 is disposed horizontally in the upper portion of the isolator 2. Further, a rectifying plate 5 that regulates the airflow of room air is disposed directly below the HEPA filter 4.

  Further, in the isolator 2 and above the HEPA filter 4, three air blowers 15 that blow indoor air of the isolator 2 in one direction are installed side by side. In the present embodiment, the air blowing port 15a of each air blower 15 is installed so as to be directed downward and blow indoor air downward.

  In this configuration, the room air blown by the blower 15 passes through the HEPA filter 4, further passes through the current plate 5, and reaches the work space 20. Further, the room air enters the peripheral circuit 20A from the opening 3A of the partition plate 3, and ascends the peripheral circuit 20A. The room air reaches the installation space of the blower 15, is again blown downward by the blower 15, and circulates in the isolator 2. That is, the air blower 15 causes the indoor air in the isolator 2 to flow to form a one-way flow in the circulation system.

  Further, the decontamination system 1 includes a hydrogen peroxide gas generation and supply device 6. The hydrogen peroxide gas generation and supply device 6 includes a hydrogen peroxide solution tank 7 containing hydrogen peroxide solution, an evaporator 9 for evaporating the hydrogen peroxide solution, and a hydrogen peroxide solution in the hydrogen peroxide solution tank 7. And a hydrogen peroxide water supply pump 8 for supplying the water to the evaporator 9. Further, a hydrogen peroxide gas supply pipe 10 for guiding the hydrogen peroxide gas generated in the evaporator 9 to the vicinity of the air blowing port 15a of the air blowing device 15 is provided. The hydrogen peroxide gas generation and supply device 6 is preferably a known product. By the way, the hydrogen peroxide gas generation and supply device 6 constitutes the decontamination gas supply device of the present invention.

  In addition, an air supply circuit 21 including an air supply circuit HEPA filter 22 and an air supply device 23 is connected to the isolator 2. More specifically, the air supply circuit 21 is arranged with an air supply device 23 and an air supply circuit HEPA filter 22 in order from the outdoor side, with one end opened to the outside and the other end in the isolator 2. Communicate. When the air supply device 23 is driven, the outside air is supplied into the isolator 2 through the HEPA filter 22 for the air supply circuit.

  In addition, an exhaust circuit 24 including a catalyst 25, an adjustment valve 26, an exhaust circuit HEPA filter 27, and an exhaust device 28 is connected to the isolator 2. More specifically, the exhaust circuit 24 is arranged in order from the isolator 2 side with the catalyst 25, the adjustment valve 26, the exhaust circuit HEPA filter 27, and the exhaust device 28, and one end communicates with the isolator 2. The other end is open to the outdoors. When the exhaust device 28 is driven, the indoor air in the isolator 2 is decomposed by the catalyst 25, further cleaned by the exhaust circuit HEPA filter 27, and discharged outside the room. The adjustment valve 26 is used to adjust the exhaust amount of gas.

  The isolator 2 includes a condensation sensor 13. The condensation sensor 13 is configured such that the sensor unit 13a is disposed in the work space 20, and the hydrogen peroxide gas supplied to the work space 20 is condensed in the work space 20 or on the surface of the decontamination target X. Detect. As this condensation sensor 13, a well-known product is used suitably, For example, the structure described in PCT / JP / 03/05646 gazette is used. The condensation sensor 13 may be installed at an arbitrary position in the work space 20, but is preferably arranged at a so-called cold spot in the work space 20.

  The isolator 2 also measures a temperature sensor 12 that measures the room temperature of the work space 20, a humidity sensor 17 that measures humidity, a gas concentration meter 18 that measures the hydrogen peroxide gas concentration, and a wind speed of room air in the work space 20. An anemometer 19 is provided. As the temperature sensor 12, the humidity sensor 17, the gas concentration meter 18, and the anemometer 19, known products are preferably used.

  Further, as shown in FIG. 2, the decontamination system 1 includes a control device 30. The control device 30 includes a central control device CPU 40, a storage device ROM 41 and a storage device RAM 42 connected to the central control device CPU 40, respectively. Here, the central control unit CPU 40 executes a predetermined program. The storage device ROM 41 stores an operation program and data used for arithmetic processing. The storage device RAM 42 can read and write data at any time.

  Further, the control device 30 includes a hydrogen peroxide gas generation and supply device 6, a blower 15, a temperature sensor 12, a condensation sensor 13, a humidity sensor 17, a gas concentration meter 18, an anemometer 19, an air supply device 23, and an exhaust. Each device 28 is connected. Here, a blowing control command signal is output from the control device 30 to the blowing device 15, the air supply device 23, and the exhaust device 28. In response to the command signal, the fans inside the devices 15, 23, and 28 are driven at various rotational speeds (for example, times per minute [rpm]). Measurement data is transmitted from the temperature sensor 12, the condensation sensor 13, the humidity sensor 17, the gas concentration meter 18, and the anemometer 19 to the control device 30 as needed, and the measurement value is displayed on a measurement value display unit (not shown). Is done. In addition, the said control apparatus 30 provided with the program which controls the air blower 15 comprises the air blower control means which concerns on this invention. Further, the control device 30 having a program for controlling the hydrogen peroxide gas generation and supply device 6 constitutes a decontamination gas supply device control means according to the present invention.

Next, an outline of the decontamination method having the above configuration will be described.
First, the control device 30 controls the air supply device 23 to introduce an appropriate amount of air into the isolator 2, and outputs a control command signal to the blower device 15 to cause the indoor air in the isolator 2 to flow, thereby isolating the isolator. A unidirectional flow is formed in 2. Further, a gas supply control command signal is output to the hydrogen peroxide gas generation and supply device 6 to generate hydrogen peroxide gas, and a predetermined amount of hydrogen peroxide gas is introduced into the isolator 2 through the hydrogen peroxide gas supply pipe 18. Is supplied for a predetermined time. Then, the indoor air containing hydrogen peroxide gas circulates in the isolator 2, and the hydrogen peroxide gas reaches the isolator 2. Further, the control device 30 receives the measurement data of the temperature sensor 12, the condensation sensor 13, the humidity sensor 17, and the gas concentration meter 18, and displays the measurement values as needed. When the supply state of the hydrogen peroxide gas is maintained for a predetermined time in this way, the hydrogen peroxide gas is saturated in the isolator 2, and the hydrogen peroxide gas begins to condense on the surface of the decontamination target X, and the removal is performed. A condensed film is formed on the surface of the dyed object X. Further, this condensed film formation state is maintained for a predetermined time (condensed film formation maintaining step).

  When the condensation film maintenance time, which is a predetermined time for maintaining the formation of the condensation film, has elapsed, the control device 30 stops the supply of the hydrogen peroxide gas and controls the exhaust device 28 to perform the oxidation. Indoor air containing hydrogen gas is cleaned and exhausted out of the isolator 2 (aeration process). And decontamination of the decontamination target object X is completed.

Next, the main part of the present invention will be described. Specifically, the condensed film formation maintaining step will be described in detail.
In the condensed film formation maintaining step, the air blower 15 is controlled by the control device 30 to maintain the wind speed of the indoor air flowing in the isolator 2 at a predetermined first wind speed α for a predetermined time. Then, the room air is changed to a second wind speed β that is slower than the first wind speed α, and is maintained at the second wind speed β for a predetermined time. More specifically, as shown in FIG. 3, the indoor wind speed is set to the first wind speed α for a predetermined first wind speed maintaining time Tx1 until a condensation film is formed on the decontamination target X. Then, when the condensed film is formed and the first wind speed maintenance time Tx1 ends, the blower 15 is controlled to change the indoor wind speed to the second wind speed β, and the state of the second wind speed β is changed to a predetermined second wind speed. Only the maintenance time Tx2 is maintained.

  As described above, the decontamination system 1 of the present invention executes the contents of the indoor air deceleration control in which the control device 30 maintains the room air at the first wind speed α for a predetermined time and then maintains the room air at the second wind speed β for a predetermined time. It is a thing. The decontamination system 1 can execute an indoor air deceleration process in which the second wind speed β is maintained for a predetermined time after the first wind speed α is maintained for a predetermined time.

  With this configuration, the hydrogen peroxide gas easily enters and stays on the surface of the complicated shape of the decontamination target X. For this reason, the supply of hydrogen peroxide gas is sufficient, and the condensed film is stably formed in the details, and further, the condensed film is stably maintained or grown. Here, the first wind speed maintenance time Tx1 is a time for the purpose of forming a condensed film by spreading the hydrogen peroxide gas in the isolator 2 in a short time, and the second wind speed maintenance time Tx2 is formed. This is a time for the purpose of maintaining or growing the condensed film formed on the detailed surface of the decontamination object X or the like.

  The first wind speed maintenance time Tx1 when the wind speed of the indoor air is the first wind speed α is controlled by the hydrogen peroxide gas generation and supply device 6 so that the hydrogen peroxide gas is supplied into the isolator 2 by a predetermined first supply amount. In the second wind speed maintenance time Tx2, a second supply amount of hydrogen peroxide gas smaller than the first supply amount is supplied into the isolator 2. Instead of such a configuration, the supply of hydrogen peroxide gas may be stopped during the second wind speed maintenance time Tx2.

  By adopting such a configuration, the supply amount of hydrogen peroxide gas can be reduced, so that the consumption of hydrogen peroxide gas can be suppressed without reducing the decontamination effect as a whole, and the cost for decontamination can be reduced. Is possible.

  The first wind speed α is appropriately changed depending on the measurement environment (the width of the work space 20, the appearance shape of the decontamination target X, room temperature, humidity, hydrogen peroxide gas concentration, etc.), but is 0.2 (m / It is desirable to set in the range of s) to 0.3 (m / s). Furthermore, it is desirable that the second wind speed β is decelerated to at least less than 0.2 (m / s). The second wind speed maintenance time Tx2 is preferably 12 minutes or longer if the so-called D value is 6D for bacteria having a so-called D value of 2 minutes. In addition, as for setting of this 2nd wind speed maintenance time Tx2, it is desirable to confirm about the decontamination effect beforehand using BI (biological indicator). The end timing of the first wind speed maintenance time Tx1 is preferably set to the timing at which the condensation film starts to be formed on the surface of the decontamination object X. The time until the formation is started may be calculated, and the end timing of the first wind speed maintenance time Tx1 may be programmed in the control device 30 in advance, or the condensation sensor 13 and the blower device 15 are linked, When the condensation sensor 13 detects condensation, the blower 15 may change the wind speed from the first wind speed α to the second wind speed β. Even if the end timing of the first wind speed maintenance time Tx1 is programmed in advance, it is preferably used in an auxiliary manner so that the condensation sensor 13 can reliably confirm the condensation.

Moreover, the following structure is proposed as a modification.
In the condensed film maintaining step according to the present invention, after maintaining the wind speed of the indoor air flowing in the isolator 2 at a predetermined first wind speed α for a predetermined time, the wind speed is set to 0 and this state is maintained for a predetermined time. More specifically, as shown in FIG. 4, the air blower 15 is stopped after a predetermined first wind speed maintenance time Ty1 has elapsed at the first wind speed α until a condensed film is formed on the decontamination target X. Then, the wind speed of the indoor air (including hydrogen peroxide gas) in the work space 20 is set to 0, and is maintained for a predetermined wind speed 0 maintenance time Ty2.

  As described above, even in the indoor air deceleration process in which the wind speed of the room air is changed from the first wind speed α to 0, the hydrogen peroxide gas easily enters and stays on the surface of the complicated shape of the decontamination target X. As a result, the hydrogen peroxide gas is sufficiently supplied, and the condensed film is stably formed in the details, and further maintained or grown. In such a configuration, the control device 30 is provided with the indoor air deceleration control content in which the wind speed of the room air is set to 0 from the first wind speed α.

  Also in this modification, the first wind speed maintenance time Ty1 supplies the hydrogen peroxide gas into the isolator 2 by a predetermined first supply amount, and the wind speed 0 maintenance time Ty2 is equal to the second supply amount. A configuration in which the hydrogen peroxide gas is supplied into the isolator 2 or the supply of the hydrogen peroxide gas is stopped is desirable.

  Further, the indoor air deceleration process described so far may be executed a plurality of times. By adopting such a configuration, the second wind speed maintenance time Tx2 (or the wind speed 0 maintenance time Ty2) comes multiple times, the maintenance or growth of the condensed film is stabilized, and the decontamination effect is improved. .

  Note that the embodiments described so far can be modified as appropriate. The configuration in which each device is controlled by the control device 30 may be realized by another configuration. For example, an operator may operate each device to control the decontamination environment. Further, the condensation of the hydrogen peroxide gas may be intentionally formed by intentionally changing the room temperature or the room humidity in the isolator 2. In addition, the optimum amount of condensation may be maintained by adjusting the room temperature or the room humidity.

1 is a schematic longitudinal sectional view of a decontamination system 1. FIG. 3 is a block circuit diagram of a control device 30. FIG. It is a timing chart figure of the decontamination method concerning this invention. It is a timing chart figure of the decontamination method concerning a modification.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Decontamination system 2 Isolator 6 Hydrogen peroxide gas generation supply device 15 Blower device 30 Control device X Decontamination target object α First wind speed β Second wind speed

Claims (6)

The decontamination gas is supplied to the decontamination chamber, and the room air containing the decontamination gas is caused to flow in the decontamination chamber by a blower provided in the decontamination chamber, so that the decontamination gas is supplied into the decontamination chamber. In the decontamination method of decontaminating the decontamination object by condensing the decontamination gas on the surface of the decontamination object in the decontamination chamber,
By controlling the blower,
After maintaining the wind speed of the indoor air flowing in the decontamination chamber for a predetermined time at a predetermined first wind speed, the air speed is maintained for a predetermined time at a second wind speed slower than the first wind speed, or the blower is stopped. The wind speed of the indoor air is set to 0 for a predetermined time,
A decontamination method comprising performing an indoor air deceleration process.   The decontamination method according to claim 1, wherein the indoor air deceleration step is repeated a plurality of times. In the indoor air deceleration process,
In the time maintained at the first wind speed, the decontamination gas is supplied into the decontamination chamber by a first supply amount,
The decontamination gas is supplied by a second supply amount less than the first supply amount or the decontamination gas during a time period when the second wind speed is slower than the first wind speed or a time period when the wind speed of the room air is zero. The decontamination method according to claim 1, wherein the decontamination chamber is not supplied into the decontamination chamber. A decontamination chamber to which decontamination gas is supplied;
An air blower that is provided in the decontamination chamber and flows indoor air containing a decontamination gas in the decontamination chamber;
A blower control means for controlling the blower to change the wind speed of the indoor air flowing in the decontamination chamber,
The blower control means controls the blower to flow indoor air containing the decontamination gas in the decontamination chamber and distribute the decontamination gas in the decontamination chamber,
In the decontamination system for decontaminating the decontamination object by condensing the decontamination gas on the surface of the decontamination object in the decontamination chamber,
The blower control means is
The air blower is controlled to maintain the wind speed of the room air flowing in the decontamination chamber for a predetermined time at a predetermined first wind speed and then for a predetermined time at a second wind speed slower than the first wind speed. Or the decontamination system characterized by having the indoor air deceleration control content which stops the said air blower and makes the wind speed of the said indoor air 0 only for predetermined time. The blower control means is
The decontamination system according to claim 4, further comprising a control content that repeats the indoor air deceleration control content a plurality of times. A decontamination gas supply device for supplying the decontamination gas to the decontamination chamber;
A decontamination gas supply device control means for controlling the decontamination gas supply device to change the supply amount of the decontamination gas;
The decontamination gas supply device control means controls the decontamination gas supply device so that the decontamination gas is supplied to the first supply amount during the time when the blower control means maintains the wind speed of the room air at the first wind speed. Only fed into the decontamination chamber,
The decontamination gas supply device control means performs the decontamination gas during the time when the air blower control means maintains the wind speed of the room air at the second wind speed slower than the first wind speed or when the air speed of the room air is zero. 5. The supply device is controlled to supply the decontamination gas by a second supply amount smaller than the first supply amount, or the decontamination gas is not supplied into the decontamination chamber. The decontamination system according to claim 5.

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