JP2009181093A - Liquid body ejecting apparatus and liquid body ejecting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that when different drawing patterns are drawn, sometimes both drawing patterns are not drawn only by change of an arrangement direction by rotation of a nozzle group and in this case, work to take a substrate out of an apparatus and to reset the substrate to the apparatus after 90° rotation, for example, is necessary and productivity falls. <P>SOLUTION: A first drawing pattern is formed by relative movement of the substrate in a Y axis direction along a guide rail 101 and a second drawing pattern is formed by relative movement of the substrate in a X axis direction along a guide rail 110. Accordingly when a liquid body is ejected from a nozzle to the substrate, the liquid body is ejected by changing a relative movement direction of the substrate corresponding to the drawing pattern. Consequently the liquid body is ejected to the substrate without rotating the substrate while relatively moving the nozzle in a favorable direction according to the drawing pattern. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a liquid material discharge apparatus and a liquid material discharge method for discharging a liquid material.

  Conventionally, a liquid material such as functional liquid or ink is ejected from a glass, ceramic, resin, or silicon substrate as an object, and a predetermined pattern (also referred to as a “drawing pattern”) is formed on the object (“drawing” There is a liquid material ejecting apparatus that is also referred to as "." Such an apparatus is a discharge mechanism that discharges a liquid material by applying pressure to the liquid material in a pressure chamber provided in the middle of a flow path through which the liquid material flows using the electrostrictive property or thermal energy of the piezoelectric element. And a carriage in which a circuit board for controlling the discharge mechanism is incorporated. The liquid material to which pressure is applied is discharged from a nozzle provided in the carriage and positioned at the end of the flow path. In the nozzle, a plurality of nozzles having an arrangement direction that is generally a substantially straight line and a predetermined nozzle interval (pitch) are formed as one nozzle group.

  By the way, when drawing a color filter using such a liquid material discharge device, a discharge target region where each color liquid material of R (red), G (green), and B (blue) is discharged on one substrate, that is, There are cases where the drawing pattern of the drawing area of each color pixel is different. For example, when drawing a plurality of color filters for different screen sizes on one substrate, when the shape of each color pixel of R, G, B is a rectangular shape having a longitudinal direction, the longitudinal directions are orthogonal to each other. Different drawing patterns occur between filters. Then, the pixel pitch between the color pixels in the direction orthogonal to the longitudinal direction with respect to the longitudinal direction is short with respect to the pixel pitch between the adjacent color pixels. At this time, when each color liquid material is drawn by ejecting each color liquid material to a plurality of color filters from nozzles formed in advance so as to exhibit a predetermined arrangement direction on the carriage, the arrangement direction of the nozzles is the longitudinal direction of each color pixel. Each color pixel can be drawn if it is substantially parallel to the direction. However, if the nozzle arrangement direction is substantially perpendicular to the longitudinal direction, the color pixel that cannot be drawn out of each color pixel is caused by the pixel pitch being shortened. May occur.

  In such a case, the nozzle arrangement direction needs to be optimized according to each drawing pattern. For example, Patent Document 1 discloses a nozzle arrangement direction at an angle suitable for the pixel pitch of each color pixel. A technique for drawing by rotating (nozzle group) is disclosed.

JP 2002-273868 A

  If the technique disclosed in Patent Document 1 is used, each pixel can be drawn by rotating the arrangement direction of the nozzle group to match each pixel pitch. However, for example, in the color filter that draws a plurality of color filters for different screen sizes on a single substrate as described above, the drawing patterns of the R, G, and B color pixels have rectangular shapes whose longitudinal directions are orthogonal to each other. In this case, the pixel pitch changes greatly between different screen sizes. For this reason, a change in the arrangement direction due to the rotation of the nozzle group may not be applicable to both drawing patterns whose longitudinal directions are orthogonal to each other. In such a case, for example, it is necessary to take out the substrate from the apparatus, rotate it 90 degrees, and set it again in the apparatus, so that productivity is lowered.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A liquid material discharge apparatus that discharges a liquid material to a substrate from a plurality of nozzles to form a first drawing pattern and a second drawing pattern on the substrate. Moving means for moving the substrate relative to the plurality of nozzles in a moving axis direction and a second moving axis direction, the moving means relatively moving the substrate in the first moving axis direction; Forming the first drawing pattern, and moving the substrate relative to the second movement axis to form the second drawing pattern.

  According to this configuration, the first drawing pattern is formed by moving the substrate relative to the nozzle in the first movement axis direction, and the second drawing pattern is formed in the second movement axis direction. Is moved relative to the nozzle. Therefore, the liquid material can be discharged onto the substrate while changing the relative movement direction of the substrate with respect to the nozzles according to the drawing pattern. As a result, the liquid material is discharged while moving the substrate relative to the nozzle in a preferred direction according to the drawing pattern (for example, the shape of each pixel of the color filter) without rotating the substrate. Can be drawn.

  Application Example 2 In the liquid discharge apparatus, a nozzle head formed as a nozzle group in which the plurality of nozzles exhibit one arrangement direction, and an arrangement direction of the nozzle group by rotating the nozzle head Switching means for switching to the first arrangement direction or the second arrangement direction, and the switching means moves the nozzle group in the first arrangement direction when forming the first drawing pattern. When switching and forming the second drawing pattern, the nozzle group is switched in the second arrangement direction.

  According to this configuration, the nozzle group having two arrangement directions is formed by switching the arrangement direction of the nozzle groups by the rotation of the nozzle head, so that the nozzle group having two different arrangement directions is formed by one nozzle group. I can do it. Then, when forming the first drawing pattern, the liquid material is ejected from the nozzle group switched in the first arrangement direction, and when forming the second drawing pattern, the nozzle changed in the second arrangement direction. The liquid material is discharged from the group. Accordingly, the liquid material can be discharged to the substrate from the nozzle groups having different arrangement directions for the first drawing pattern and the second drawing pattern. As a result, it is possible to discharge the liquid material from the nozzle group having a preferable arrangement direction according to the drawing pattern (for example, the shape of each pixel of the color filter) without rotating the substrate.

  Application Example 3 In the liquid material discharge apparatus, the liquid material discharge device includes a first nozzle head and a second nozzle head in which the arrangement direction of the nozzle groups is the same. When the arrangement direction is switched, the position of the rotation center for rotating the first nozzle head and the position of the rotation center of the second nozzle head are different from each other.

  According to this configuration, the position of each nozzle group after rotation differs between the nozzle heads. Therefore, when the nozzle group is viewed from the direction orthogonal to the direction of arrangement of the nozzles after rotation, the width of the region where the nozzles are present is increased, and the pitch between the nozzles is reduced. As a result, if the substrate is relatively moved in a direction orthogonal to the direction of arrangement of the nozzle group after rotation and the liquid material is discharged from the nozzle to the substrate, the area of the drawing region that can be drawn by one movement is increased, A higher definition drawing pattern can be formed.

  Application Example 4 In the liquid material discharge apparatus, the first arrangement direction and the second arrangement direction of the nozzle group are substantially orthogonal to each other.

  According to this configuration, since the arrangement direction of the nozzle groups is substantially orthogonal, the probability that there is a nozzle group having a preferred arrangement direction corresponding to the drawing pattern is increased.

  Application Example 5 In the liquid material discharge apparatus, the first movement axis direction and the second movement axis direction are substantially orthogonal to each other.

  According to this configuration, since the substrate is moved relative to the nozzles in completely different directions that do not have vector components in the same direction, the liquid material is ejected from the nozzle group having a preferred arrangement direction for each drawing pattern. The probability that it can be increased.

  Application Example 6 A liquid material discharge method for discharging a liquid material from a plurality of nozzles to a substrate to form a first drawing pattern and a second drawing pattern, the first moving axis direction being A moving step of moving the substrate relative to the plurality of nozzles in a second moving axis direction, wherein the moving step moves the substrate relative to the first moving axis direction to move the first And the second drawing pattern is formed by relatively moving the substrate in the direction of the second movement axis.

  According to this method, the first drawing pattern is formed by moving the substrate relative to the nozzle in the first movement axis direction, and the second drawing pattern is formed in the second movement axis direction. Is moved relative to the nozzle. Therefore, when the liquid material is discharged from the nozzle to the substrate, the liquid material can be discharged by changing the relative movement direction of the substrate according to the drawing pattern. As a result, the liquid material can be discharged onto the substrate while the nozzle is relatively moved in a preferred direction according to the drawing pattern (for example, the shape of each pixel of the color filter) without rotating the substrate.

  Application Example 7 In the liquid material discharge method, when the plurality of nozzles have a nozzle head formed as a nozzle group exhibiting one arrangement direction, the nozzle group is rotated to rotate the nozzle group. A switching step of switching the arrangement direction to the first arrangement direction or the second arrangement direction, and the switching step moves the nozzle group to the first arrangement direction when forming the first drawing pattern. When switching and forming the second drawing pattern, the nozzle group is switched in the second arrangement direction.

  According to this method, since the nozzle group having two arrangement directions is formed by switching the arrangement direction of the nozzle groups by the rotation of the nozzle head, the nozzle group having two different arrangement directions is formed by one nozzle group. I can do it. Then, when forming the first drawing pattern, the liquid material is ejected from the nozzle group switched in the first arrangement direction, and when forming the second drawing pattern, the nozzle changed in the second arrangement direction. The liquid material is discharged from the group. Accordingly, the liquid material can be discharged to the substrate from the nozzle groups having different arrangement directions for the first drawing pattern and the second drawing pattern. As a result, it is possible to discharge the liquid material from the nozzle group having a preferable arrangement direction according to the drawing pattern (for example, the shape of each pixel of the color filter) without rotating the substrate.

  Hereinafter, an embodiment embodying the present invention will be described. FIG. 1 is a perspective view showing a schematic configuration of a liquid material discharge device 100 of the present embodiment. The liquid material ejection apparatus 100 according to the present embodiment applies red (R), green (G), and blue (B) color liquid materials to each color pixel as an ejection area provided on a substrate P as an ejection object. This is a device for drawing a color filter by discharging.

  As shown in FIG. 1, the liquid material discharge device 100 includes a pair of guide rails 101 provided linearly, an air slider provided inside the guide rail 101, and a linear motor (not shown). A moving table 103 that moves in the axial direction (this is the Y-axis direction in this embodiment) is provided. A stage 105 for placing the substrate P is provided on the movable table 103. The stage 105 is configured to be able to suck and fix the substrate P.

  Further, the stage 105 is different from the guide rail 101 by a pair of guide rails 110 linearly provided on the movable table 103, an air slider and a linear motor (not shown) provided inside the guide rail 110. It is configured to be movable in two linear axis directions (this is the X-axis direction in the present embodiment).

  A pair of guide rails 102 are provided at a predetermined distance on the opposite side of the stage 105 from the moving table 103 (this is also referred to as an upward direction in the present embodiment, and vice versa). In this embodiment, the guide rail 102 is provided so as to exhibit the same linear axis direction as the guide rail 110, that is, the X-axis direction.

  Now, the liquid material discharge device 100 includes a carriage 200 that moves along the pair of guide rails 102. That is, the carriage 200 is provided with a carriage moving table 112 integrally or separately from both sides of the carriage 200, and an X-axis is provided by an air slider and a linear motor (both not shown) provided inside the guide rail 102. It is configured to be movable along the direction.

  The carriage 200 is formed with a plurality of nozzles that are perforated so as to exhibit a predetermined arrangement direction on the lower side of the carriage 200 and discharge a liquid material of each color, and a discharge mechanism that discharges the liquid material for each nozzle. Is provided. Then, each color liquid material supplied to the carriage 200 from a liquid material supply mechanism (not shown) is supplied to each nozzle head 20 via a flow path (not shown), and is dropped from each nozzle by an ejection mechanism formed for each nozzle. Discharge as

  Further, the carriage 200 is provided with a head rotating mechanism 220 for switching the arrangement direction of the nozzles formed on the nozzle head 20, and rotates the nozzle head 20 around the rotation axis by the operation of a rotation motor (not shown). Thus, the arrangement direction of the nozzles can be changed. In the present embodiment, it is assumed that the rotation axis coincides with the center of the nozzle head 20.

  Here, the nozzle formed in the nozzle head 20 in this embodiment is demonstrated using FIG. FIG. 2 is a schematic diagram showing the arrangement of the nozzles drilled in each nozzle head 20, and shows a state viewed from the lower side of the carriage 200 as indicated by a white arrow in FIG. . Here, the vertical direction of the drawing is shown as the X-axis direction.

  In the present embodiment, as shown in the figure, the nozzle head 20 includes nozzle groups 20R, 20G, and 20B that discharge color liquid materials corresponding to R, G, and B. Each nozzle group 20R, 20G, and 20B has a nozzle row in which nine nozzles 21 to 29 are arranged in a substantially straight line, and the arrangement direction thereof coincides with the X-axis direction.

  Each nozzle formed is provided with a discharge mechanism for each nozzle in the nozzle head 20 as described above, and pressure is generated on each color liquid in the nozzle head 20 so that a predetermined amount of each color liquid is generated. Is discharged from the nozzle. Of course, the discharge mechanism has the same structure for all nozzles.

  In the present embodiment, the discharge mechanism has the structure shown in the blow-out portion in FIG. 2, and uses the piezoelectric element 2 as a driving body (actuator). That is, when a predetermined voltage waveform is applied between the electrodes COM and GND at both ends of the piezoelectric element 2, the piezoelectric element 2 contracts or expands due to electrostriction, and deforms the diaphragm 3 in the direction of the arrow, thereby forming a liquid state. Each color liquid existing in the pressurizing chamber 4 formed in the body flow path is pressurized. As a result, the pressurized liquid materials are discharged as droplets 9 from the nozzles 29 (21 to 28) formed in the bottom surface member 8 of the nozzle head 20. The discharge mechanism can employ, for example, a so-called thermal method using a heating element as a driver.

  By the way, in this embodiment, in order to simplify the explanation, it is assumed that each nozzle group has nine nozzles, but in reality, several tens to several hundreds of nozzles are formed at a predetermined pitch. ing. In addition, each nozzle group may have a plurality of nozzle rows such as two rows. For example, in the case of two rows, the nozzle drilling positions are in a staggered arrangement with a half-pitch shift between the nozzle rows. In some cases. In addition, a plurality of nozzle groups may be formed for each color liquid. In the present embodiment, the nozzle pitch in each nozzle group is assumed to be the same pitch. Of course, it is not always necessary to use the same pitch.

  Now, returning to FIG. 1, the liquid material discharge device 100 includes the control device 10, and the movement of the moving table 103 in the Y axis direction and the movement of the stage 105 in the X axis direction, that is, the movement of the substrate P in the Y axis direction and the X axis. Direction movement control, movement in the X-axis direction of the carriage moving table 112 provided in the carriage 200, that is, movement control in the X-axis direction of the carriage 200, and drive control of the discharge mechanism formed in the nozzle head 20, that is, the liquid material. The ejection control and the rotation control of the nozzle head 20, that is, the switching control of the nozzle arrangement direction are performed using the drawing pattern data to be drawn on the substrate P. In the present embodiment, the drawing pattern data is coordinate data in which each color pixel of the color filter is defined as a coordinate position on the substrate P.

  Next, the control device 10 will be described with reference to the block diagram shown in FIG. As shown in FIG. 3, the control device 10 includes a CPU 11 and a memory 12 connected to each other via a bus line, a substrate movement signal generation circuit 13, a carriage movement signal generation circuit 14, a head rotation signal generation circuit 15, a piezoelectric element. And a drive signal generation circuit 16. The output signals of the substrate movement signal generation circuit 13, the carriage movement signal generation circuit 14, the head rotation signal generation circuit 15, and the piezoelectric element drive signal generation circuit 16 are used for driving the movable table 103 via an interface (not shown) as necessary. A predetermined voltage signal is output to the linear motor, the linear motor for driving the stage 105, the linear motor for driving the carriage moving table 112, the rotary motor of the head rotating mechanism 220, and the piezoelectric element of each nozzle. .

  The CPU 11 uses the drawing pattern data that is input to the control device 10 and stored in the memory 12 via an interface (not shown) or the like, and discharges each color liquid material to form a predetermined drawing pattern on the substrate P. A start position calculation, a main scanning control calculation, a sub-scanning control calculation, a head rotation control calculation, and a nozzle discharge control calculation are performed.

  Here, the main scanning means a movement during the relative movement of the substrate P and the nozzle, and the discharge of each color liquid material from the nozzle, and the Y-axis direction of the substrate P according to the drawing pattern. Movement in the main scanning direction, or movement of the substrate P in the X-axis direction in the main scanning direction. Further, the sub-scan is a movement between the end of one main scan and the next main scan in a state where the substrate P and the nozzle move relative to each other without discharging each color liquid material from the nozzle. That is, depending on the drawing pattern, the movement of the substrate P in the Y-axis direction is the sub-scanning direction, or the movement of the substrate P in the X-axis direction is the sub-scanning direction.

  The CPU 11 controls the substrate movement signal generation circuit 13 and the carriage movement signal generation circuit 14 based on the main scanning and sub-scanning control data calculated in this way, and generates and outputs a driving signal for each linear motor. . Further, based on the calculated head rotation control data, the head rotation signal generation circuit 15 is controlled to generate and output a drive signal for the rotation motor of the head rotation mechanism 220. Further, the piezoelectric element drive signal generation circuit 16 is controlled based on the calculated control data for discharging each color liquid material from the nozzle during the main scan, and the drive signal for the piezoelectric element is output.

  Thus, the liquid material discharge apparatus 100 according to the present embodiment moves the nozzle groups 20R, 20G, and 20B relative to the substrate P by moving the moving table 103, moving the stage 105, and moving the carriage moving table 112. At the same time, the nozzle arrangement direction is switched under the control of the head rotating mechanism 220. Further, on (discharging) / off (no discharging) control of the discharge of each color liquid material is performed by controlling the discharge mechanism formed for each nozzle. As a result, a desired pattern is drawn on the substrate P by discharging each color liquid material to a position along the main scanning locus of the nozzles 21 to 29. In each nozzle group, several nozzles at the end may not be used in view of the peculiarities of the characteristics.

  Next, in the case where different drawing patterns are formed on the substrate P, the drawing process performed by the liquid material discharge apparatus 100 of the present embodiment will be described. Before that, the outline of this process will be described with reference to FIGS. Will be described. 4 and 5 show a state in which the substrate P is viewed from above, and an explanation for explaining the relationship between the discharge area of each color liquid material provided on the substrate P and the nozzle head 20. FIG. The nozzle head 20 is shown in a transparent state. In addition, the discharge areas of the liquid materials and the sizes of the nozzle heads 20 are exaggerated for the sake of explanation.

  FIG. 4 shows a state in which one large screen size color filter 70 and two small screen size color filters 50 are drawn on the substrate P. The color filter 70 has a drawing pattern in which rectangular discharge regions (color pixels) having a longitudinal direction in the X-axis direction are formed in a matrix. This discharge area is partitioned in order along the Y-axis direction into areas in which the color liquids of R, G, and B are repeatedly discharged, that is, areas 70R, 70G, and 70B by resin banks or the like. A stripe arrangement is formed. On the other hand, the color filter 50 has a drawing pattern in which rectangular discharge regions having a longitudinal direction in the Y-axis direction are formed in a matrix. This discharge area is partitioned in order along the X-axis direction into areas in which the color liquids of R, G, and B are repeatedly discharged, that is, areas 50R, 50G, and 50B by a resin bank or the like. A stripe arrangement is formed.

  In the present embodiment, it is assumed that the Y-axis direction and the X-axis direction are orthogonal to each other. Therefore, the color filter 50 and the color filter 70 have a drawing pattern composed of ejection target areas partitioned into rectangular shapes so that the longitudinal directions are orthogonal to each other, that is, a drawing pattern having different longitudinal directions. Thus, in the drawing pattern formed on the substrate P, when simultaneously drawing a color filter for a large screen size and a color filter for a small screen size, in order to use the region of the substrate P without waste, such In many cases, the longitudinal directions are orthogonal to each other, for example.

  Consider the case where the color filter 50 and the color filter 70 are drawn on such a substrate P, for example, using the carriage 200 and having the Y-axis direction as the main scanning direction, as indicated by the white arrow in the figure. A case is assumed where the R liquid material is discharged from the nozzles 21 to 29 of the nozzle group 20R provided in the nozzle head 20 to the region 50R and the region 70R where the R liquid material is to be discharged. Although illustration and description are omitted, the following description is the same for the nozzle group 20G and the nozzle group 20B.

  In this case, as shown in the figure, in the color filter 70, the nozzles other than the nozzles 23 out of the nozzles 21 to 29 in one main scan are in the R liquid material with respect to all the regions 70R overlapping in the nozzle scanning trajectory. Can be discharged. On the other hand, in the color filter 50, the region width of the region 50R is narrowed due to the short region interval (that is, the color pixel pitch) in the nozzle arrangement direction of the region 50R, region 50G, and region 50B. Therefore, among the nozzles 21 to 29, the nozzle 21 and the nozzle 28 can discharge the R liquid material to the region 50R, but the nozzle 23 and the nozzle 26 are difficult to discharge the R liquid material to the region 50R. Therefore, for the color filter 50, it is necessary to move the nozzle head 20 in the X-axis direction, that is, perform sub-scanning to move the nozzle position to a position overlapping the area 50R in a planar manner, and repeat main scanning each time. For this reason, the number of main scans increases and the time until the drawing is completed becomes longer.

  In the color filter 50, when the nozzle head 20 is rotated to change the arrangement direction of the nozzles, the nozzle pitch can be reduced so that the nozzle 26 can discharge the R liquid material to the region 50R. However, on the contrary, the nozzle 28 cannot discharge the R liquid material to the region 50R. In such a case, for example, it is necessary to take out the substrate P from the apparatus, rotate it 90 degrees, and set it again in the apparatus, which decreases productivity.

  Therefore, in such a case, for the color filter 50, the nozzle head 20 is rotated 90 degrees to switch the nozzle arrangement direction, and further, the main scanning direction is drawn as the X-axis direction. This is shown in FIG. As shown in the figure, the nozzle arrangement direction of each nozzle group is set to the Y-axis direction by rotating the nozzle head 20 90 degrees clockwise to the state of the nozzle head 20k. If the nozzle head 20k is moved relative to the substrate P with the X-axis direction as the main scanning direction as indicated by the white arrow in the figure, for example, in one main scanning, the nozzles 21 of the nozzle group 20R. Through 29, it is possible to discharge the R liquid material to almost all of the overlapping region 50R in the main scanning trajectory of the nozzle. Accordingly, the color filter 50 has an area that can be drawn by one main scan, so that an increase in the number of main scans is suppressed, and there is an effect that it does not take a long time to complete drawing.

  Now, the drawing process performed by the liquid material discharge device 100 of the present embodiment will be described with reference to the process flowchart shown in FIG. This procedure is defined in the program software (see FIG. 3) stored in the memory 12, and the CPU 11 reads and executes the program software.

  First, in step S101, drawing pattern data is read. Drawing pattern data is input to the memory 12 of the control device for each substrate P attracted and fixed to the stage 105 shown in FIG. 1, and the CPU 11 reads the input drawing pattern data. In the present embodiment, it is assumed that the drawing pattern data is drawing pattern data when two color filters 50 and one color filter 70 shown in FIG. 4 are drawn.

  Next, in step S102, an acquisition process of a drawing pattern A that is a target to which each color liquid material is discharged is performed. In the present embodiment, a drawing pattern formed by each color pixel of the color filter 70 is a drawing pattern A, and a drawing pattern formed by each color pixel of the color filter 50 is a drawing pattern B. In the present embodiment, it is assumed that the substrate P is previously attracted to the stage 105 so that the longitudinal direction of the drawing pattern of the color filter 70 is the X-axis direction. Therefore, the CPU 11 reads the coordinate data of each color pixel, calculates using the read coordinate data, and obtains a drawing pattern A whose longitudinal direction is the X-axis direction.

  Next, in step S103, setting of the first nozzle arrangement direction and carriage arrangement processing are performed. The CPU 11 drives the rotation motor of the head rotation mechanism 220 to rotate the nozzle head 20 to draw the R, G, B color patterns on the color filter 70, and sets the nozzle arrangement direction in the X-axis direction. Then, the linear motor is driven to move the carriage moving table 112 of the carriage 200 along the guide rail 102, and the carriage 200 is arranged at the calculated drawing start position.

  Next, in step S104, the substrate is subjected to main scanning (Y-axis direction) and sub-scanning (X-axis direction) to draw the drawing pattern A. The state of the processing here will be described with reference to FIG. FIG. 7 is a schematic view of the state in which the color filter 70 is drawn by the nozzle head 20 provided in the carriage 200 as viewed from above the substrate P. One of the pair of guide rails 102 (the right side in the drawing) is omitted so as not to make the drawing complicated.

  As shown in the drawing, the substrate P is main-scanned in the Y-axis direction along a pair of guide rails 101 (not shown), and a discharge mechanism formed at each nozzle of the nozzle head 20 provided in the carriage 200 during the main scan. The piezoelectric element is driven, and each color liquid material is discharged from each nozzle to the regions 70R, 70G, and 70B (only a part is shown in the figure). Further, the substrate P is sub-scanned in the X-axis direction along a pair of guide rails 110 (not shown), and each time the substrate P is sub-scanned, the main scan of the substrate P is repeatedly performed, and all the regions 70R, Each color liquid material is discharged to 70G and 70B. In this way, the drawing pattern A that is the drawing pattern of the color filter 70 is drawn.

  Returning to FIG. 6, next, a drawing pattern B acquisition process is performed in step S105. The CPU 11 reads the coordinate data of each color pixel, calculates using the read coordinate data, and obtains a drawing pattern B whose longitudinal direction is the Y-axis direction.

  Next, in step S106, setting of the second nozzle arrangement direction and carriage arrangement processing are performed. The CPU 11 drives the rotation motor of the head rotation mechanism 220 to rotate the nozzle head 20 to draw the R, G, B color patterns on the color filter 50, and sets the nozzle arrangement direction in the Y-axis direction. Then, the linear motor is driven to move the carriage moving table 112 of the carriage 200 along the guide rail 102, and the carriage 200 is arranged at the calculated drawing start position.

  Next, in step S107, the substrate is subjected to main scanning (X-axis direction) and sub-scanning (Y-axis direction) to draw a drawing pattern B. The state of the processing here will be described with reference to FIG. FIG. 8 is a schematic view of the state in which the color filter 50 is drawn by the nozzle 200 provided on the carriage 200 and rotated 90 degrees clockwise (or counterclockwise) as viewed from above the substrate P. One of the pair of guide rails 102 (the right side in the drawing) is omitted so as not to make the drawing complicated.

  As shown in the figure, the substrate P is main-scanned in the X-axis direction along a pair of guide rails 110 (not shown), and during this main scan, the piezoelectric elements in the ejection mechanism formed on each nozzle of the nozzle head 20k are driven. Thus, each color liquid material is discharged from each nozzle to the regions 50R, 50G, and 50B (only a part is shown in the figure). Further, the substrate P is sub-scanned in the Y-axis direction along a pair of guide rails 101 (not shown), and each time the substrate P is sub-scanned, the main scan of the substrate P is repeatedly performed, and all the regions 50R, 50R, Each color liquid is discharged to 50G and 50B. Thus, the drawing pattern B that is the drawing pattern of the color filter 50 is drawn for the two color filters 50.

  As described above, according to the liquid material discharge apparatus 100 of the present embodiment, the carriage 200 in which the nozzle head 20 is rotated to switch the nozzle arrangement direction by performing the processing from step S101 to step S107 is used as a guide rail. The substrate P is moved along the guide rail and placed at a predetermined position, and the main scanning and the sub scanning of the substrate P are performed along the guide rail. As a result, the color filter 70 and the color filter 50 having drawing patterns with different longitudinal directions can be drawn. Therefore, it is not necessary to take out the substrate P from the apparatus, rotate it 90 degrees, and set it again in the apparatus, thereby suppressing a decrease in productivity.

  As mentioned above, although this invention was demonstrated using one embodiment, this invention is not limited to such embodiment at all, and can be implemented with various forms within the range which does not deviate from the meaning of this invention. Of course. Hereinafter, a modification will be described.

(First modification)
In the above embodiment, the carriage 200 is provided with one nozzle head 20, and the nozzle head 20 is rotated to switch the nozzle arrangement direction. However, the present invention is not limited thereto, and a plurality of nozzle heads may be provided. An example of this modification will be described with reference to FIG.

  FIG. 9 is a schematic view of the carriage 200A provided with two nozzle heads 20m and 20n, both having the nozzle arrangement direction in the X-axis direction, juxtaposed in the X-axis direction, as viewed from above. . FIG. 9A shows a state before the nozzle heads 20m and 20n are rotated, and FIG. 9B shows a state after the nozzle heads 20m and 20n are rotated.

  As shown in FIG. 9A, when viewed from the Y-axis direction, the carriage 200A is arranged such that the nozzle head 20m and the nozzle head 20n are shifted in the X-axis direction so that the nozzles do not overlap each other. Therefore, as apparent from the description of FIG. 4 in the above embodiment, when the two nozzle heads 20m and 20n juxtaposed by moving the substrate P in the Y-axis direction move relatively in the Y-axis direction, the nozzle head 20m Since the liquid material is ejected from the nozzles provided in the nozzle head 20n to the ejection area, the width of the color filter drawing area in the Y-axis direction is increased. As a result, the area of the discharge target area from which the liquid material is discharged from the nozzle is increased by the main scanning in the Y-axis direction at one time. The number of scans until the liquid material is discharged can be reduced.

  Here, in this modification, if the nozzle head is rotated with the center of the nozzle head as the rotation axis, that is, the same position with respect to the nozzle group as the rotation axis, the nozzle head 20m and the nozzle head 20n are separated from the X-axis direction. It will maintain the overlapping state when viewed. Then, when the color filter 50 is drawn by performing the main scan in the X-axis direction using the nozzle head 20m and the nozzle head 20n, the region ranges where the nozzle groups for discharging the respective color liquid materials exist in the Y-axis direction substantially overlap. Presents a state of endurance. For this reason, the area of the discharge target area where each color liquid material is discharged from the nozzles by the main scanning in the X-axis direction per time is one nozzle head, despite having two nozzle heads. It becomes the same area as the area to draw. As a result, it is not possible to reduce the number of scans until each color liquid material is discharged to all the discharge target areas with respect to the color filter 50.

  Therefore, in this modification, the rotation axis of each nozzle head is set to a different position with respect to the nozzle group. That is, as shown in FIG. 9A, the position of the rotation axis of the head rotation mechanism 220m that rotates the nozzle head 20m and the position of the rotation axis of the head rotation mechanism 220n that rotates the nozzle head 20n are respectively set to the nozzle. Different positions for the group. Incidentally, the rotation axis of the head rotation mechanism 220m is the center position of the nozzle 28 forming the nozzle group 20R, and the rotation axis of the head rotation mechanism 220n is the center position of the nozzle 22 forming the nozzle group 20B.

  Then, the head rotation mechanisms 220m and 220n are operated to rotate the nozzle heads 20m and 20n by 90 degrees in the clockwise direction. The state after rotation is shown in FIG. As shown in the drawing, when viewed from the X-axis direction, the carriage 200A is arranged such that the nozzle head 20mk and the nozzle head 20nk after rotation are shifted in the Y-axis direction so that the nozzles do not overlap each other. Therefore, as apparent from the description of FIG. 5 in the above embodiment, when the two nozzle heads 20mk and 20nk juxtaposed by moving the substrate P in the X-axis direction move relatively in the X-axis direction, the nozzle head 20mk Since each color liquid material is ejected from the nozzles provided in the nozzle head 20nk to the ejection area, the drawing area width of the color filter in the X-axis direction is widened. As a result, the area of the discharge target area where each color liquid material is discharged from the nozzles is increased by the main scanning in the X-axis direction at one time. Thus, the number of scans until each color liquid is discharged can be reduced.

  In this modification, the two nozzle heads 20m and 20n are rotated in the same direction (clockwise). However, the nozzle heads 20m and 20n may be rotated in different directions. In this case, as shown in FIG. 9B, the position of the rotation axis of each head rotation mechanism 220m, 220n is changed so that each nozzle group is shifted in the Y-axis direction after rotation. Good.

  Alternatively, as another example of the present modification, one of the rotation axes of the nozzle heads is set to the center position of the nozzle, and the other is set to an intermediate position between two adjacent nozzles. By doing so, the nozzle pitches are shifted from each other between the nozzle heads, so that the nozzle pitch formed on the carriage is equivalently reduced when viewed from the X-axis direction. As a result, a higher-definition drawing pattern can be formed by relatively moving the substrate in a direction orthogonal to the direction of arrangement of the rotated nozzle group and discharging the liquid material from the nozzles to the discharge target region.

  This will be described with reference to FIG. FIG. 10 is a schematic view of a carriage 200A provided with two nozzle heads 20m and 20n both having the nozzle arrangement direction in the X-axis direction and juxtaposed in the X-axis direction, as viewed from above. . FIG. 10 (a) shows the same state as FIG. 9 (a), showing the state before rotation of the nozzle head, and FIG. 10 (b) showing the state after rotation of the nozzle head. .

  As shown in FIG. 10A, the rotation axis of the head rotation mechanism 220m that rotates the nozzle head 20m is set to the center position of the nozzle located substantially at the center of the nozzle head 20m, and the head rotation mechanism that rotates the nozzle head 20n. The rotation axis of 220n is an intermediate position between two adjacent nozzles at a substantially central position of the nozzle head 20n. Incidentally, the position of the rotation axis of the head rotation mechanism 220m is the center of the nozzle 25 forming the nozzle group 20G, and the position of the rotation axis of the head rotation mechanism 220n is an intermediate position between the nozzle 24 and the nozzle 25 forming the nozzle group 20G. is there.

  Then, the head rotating mechanisms 220m and 220n are operated to rotate the nozzle heads 20m and 20n by 90 degrees clockwise (or counterclockwise). The state after rotation is shown in FIG. As shown in the figure, when viewed from the X-axis direction, the carriage 200A is arranged such that the nozzle head 20mk and the nozzle head 20nk after rotation are displaced from each other by a half pitch in the Y-axis direction. Therefore, as apparent from the description of FIG. 5 in the above embodiment, when the two nozzle heads 20mk and 20nk juxtaposed by moving the substrate P in the X-axis direction move relatively in the X-axis direction, the nozzle head 20mk Since the liquid material is ejected from the nozzles provided in the nozzle head 20nk to the ejection area, the nozzle pitch is equivalently reduced when the color filter is drawn in the X-axis direction. As a result, the color filter 50 can be drawn even with a higher definition drawing pattern.

(Second modification)
In the above embodiment, the nozzle head 20 provided in the carriage 200 is rotated to switch the nozzle arrangement direction and the color filters having different drawing patterns are drawn. However, the present invention is not limited to this. For example, the main scanning direction of the substrate may be drawn in the X-axis direction and the Y-axis direction, respectively, according to the drawing pattern without switching the nozzle arrangement direction. In this way, it is not necessary to provide a head rotating mechanism in the carriage, and the carriage can be simplified and lightened.

  This modification will be described with reference to FIG. FIG. 11 is a schematic view showing a state in which the carriage 200C including the nozzle head 20C is viewed from above. One of the pair of guide rails 102 (the right side of the drawing) on which the carriage moving base 112 moves is omitted so as not to make the drawing complicated.

  In this modification, as shown in the drawing, the arrangement direction of the nozzle groups formed on the nozzle head 20C provided in the carriage 200C is inclined by θ degrees counterclockwise with respect to the Y-axis direction. By doing so, both the projection area in the X-axis direction and the projection area in the Y-axis direction of each nozzle group are formed. Also in this modification, the X-axis direction and the Y-axis direction are orthogonal to each other. By doing so, the nozzle and the substrate move relative to each other in completely different directions that do not have vector components in the same direction. Therefore, for each drawing pattern, a projection area in the X-axis direction and a projection area in the Y-axis direction. There is a high probability that either of the regions will be the preferred nozzle arrangement direction.

  For the color filter 70, as indicated by the white arrow, the substrate P is scanned with the Y-axis direction as the main scanning direction, so that each nozzle group is projected in the Y-axis direction in one main scanning. The drawing area width corresponding to the area can be drawn. Therefore, it is possible to draw all the color pixels of the color filter 70 by repeating the main scanning in the Y-axis direction while sub-scanning the substrate P in the X-axis direction.

  On the other hand, for the color filter 50, as shown by the white arrow, the substrate P is scanned with the X-axis direction as the main scanning direction, so that each nozzle group is projected in the X-axis direction in one main scanning. The drawing area width corresponding to the area can be drawn. Therefore, it is possible to draw all the color pixels of the color filter 50 by repeating the main scanning in the X-axis direction while sub-scanning the substrate P in the Y-axis direction.

  In this modification, the arrangement direction of the nozzle groups formed on the nozzle head 20C is inclined counterclockwise by an angle θ degrees with respect to the Y-axis direction. Of course, the ratio of the projection area in the X-axis direction and the projection area in the Y-axis direction of the nozzle group varies depending on the size of the angle θ, and therefore the value of the angle θ is the color filters 50 and 70 to be drawn on the substrate P. It is preferable to set according to the shape and size of the drawing pattern.

(Third Modification)
In the above embodiment, the X-axis direction and the Y-axis direction are orthogonal to each other, that is, the main scanning direction and the sub-scanning direction are orthogonal to each other. It may not be orthogonal. Usually, since the shape of the discharged region is often a rectangular shape in which each side is perpendicular to each other, the X-axis direction and the Y-axis direction are orthogonal to each other in the above embodiment. However, if the discharge area is not rectangular, changing the X-axis direction or the Y-axis direction according to the shape of the discharge area can increase the discharge area that can be drawn by one main scan. Because there is a possibility.

  An example of this modification will be described with reference to FIG. FIG. 12 is a schematic diagram showing the carriage 200 as viewed from above. As shown in the figure, the color filter 50 and the color filter 70 each have a parallelogram shape, the shapes of the regions 50R, 50G, and 50B from which the color liquid materials are discharged, and the regions 70R, 70G, and 70B. The case where the shape is also a parallelogram is shown. The regions 50R, 50G, and 50B are arranged along the hypotenuse of the parallelogram, and the regions 70R, 70G, and 70B are arranged in the Y-axis direction along the bottom of the parallelogram.

  In this modification, in such a case, the direction of the guide rail 110, that is, the X-axis direction is set to a direction inclined S degrees clockwise with respect to the Y-axis direction. That is, the axial direction (X-axis direction) in which the stage 105 (see FIG. 1) moves is parallel to the hypotenuse of the parallelogram that is the shape of the color filter 50. At the same time, in this modification, the guide rail 102 is also inclined in the same direction as the guide rail 110. In addition, about the guide rail 110 and the guide rail 102, illustration is abbreviate | omitted about a pair of one side.

  With this configuration, with respect to the color filter 50, the substrate P moves along the guide rail 110, so that the rotated nozzle head 20k provided in the carriage 200 is arranged in the regions 50R, 50G, and 50B. Main scanning can be performed in the direction. Further, the color filter 70 can be main-scanned in the arrangement direction of the regions 70R, 70G, and 70B by the nozzle head 20 provided in the carriage 200 by the movement of the substrate P in the Y-axis direction. Therefore, it can be expected that the discharge target area where each color liquid material can be discharged from the nozzle by one main scanning is increased. As a result, it does not take a long time to complete drawing of all drawing patterns.

  In this modification, the direction of the guide rail 102 is the same as the direction of the guide rail 110, but this is not necessarily required. For example, the direction of the guide rail 102 may be set to a direction orthogonal to the Y-axis direction. In this case, the moving distance of the carriage 200 is minimized, and there is a possibility that the length of the guide rail 102 can be minimized.

(Other variations)
In the above-described embodiment, the substrate P is adsorbed on the stage 105 in advance so that the longitudinal direction of the area to be ejected is the X-axis direction for the color filter 70 for a large screen. Therefore, in the processing flowchart shown in FIG. 6, the nozzle arrangement direction used in each main scanning direction is selected according to the longitudinal direction of the discharge target region, and the nozzle arrangement direction is orthogonal to the X-axis direction and the X-axis direction. Although it has been described as rotating in the direction, that is, the Y-axis direction, it is of course not limited to this. For example, the shape of the discharge area of each of the color filters 50 and 70 formed on the substrate P is calculated from the drawing pattern data, and the respective inclinations are set so that the nozzle pitch becomes a preferable value according to the shape, for example. It is good to do. Then, the head rotation mechanism 220 may be operated to switch between the nozzle arrangement directions. In this way, it is possible to discharge the liquid material from the nozzles having a preferable arrangement direction corresponding to the shape of the discharge target area of each of the color filters 50 and 70 regardless of the suction direction of the substrate P to the stage 105.

  In the above embodiment, the substrate P is main-scanned in the X-axis direction. However, the present invention is not limited to this, and the carriage 200 may be main-scanned in the X-axis direction. The point is that the nozzle and the substrate can be moved relative to each other in the main scanning movement.

  Further, in the above-described embodiment, the movement of the moving table 103, the movement of the stage 105, and the movement of the carriage moving table 112 are moved by an air slider and a linear motor provided inside the guide rails 101, 102, 110. However, the present invention is not limited to this, and it is of course possible to use a moving means composed of a motor and a conveyor belt, or a moving means composed of a ball screw and a motor. In short, any configuration can be used as long as the moving table 103, the stage 105, and the carriage moving table 112 can move.

  In the above embodiment, the shape of each color pixel provided in the color filter 50 or the color filter 70 has been described as a stripe arrangement in which the same color continues in the longitudinal direction. However, the present invention is not limited to this, and a delta arrangement or a mosaic arrangement is used. There may be. Although the number of colors of the color filter has been described as three colors of R, G, and B, the number of colors is not limited to this, and the number of colors may be increased or decreased, for example, four colors or two colors.

  In the above embodiment, the size of each color pixel of the color filter 50 and the size of each color pixel of the color filter 70 is not particularly mentioned, but the color filter 50 and the color filter 70 may have the same shape. These may be different in size and shape. In short, any color pixel having a longitudinal direction may be used as long as it matches the description of FIGS. 4 and 5 described above.

  In the above-described embodiment, the liquid material ejecting apparatus has been described as the liquid material ejecting apparatus 100 that ejects each color liquid material onto the substrate to form a color filter. However, the present invention is not limited to this. For example, in addition to a glass substrate, a silicon substrate, a ceramic substrate, or a resin substrate includes a manufacturing apparatus that discharges a functional liquid containing a metal material to form a metal wiring pattern, and a luminescent material made of an organic material as a solute. The present invention can also be implemented as an organic EL element manufacturing apparatus that forms a light emitting element by discharging a functional liquid onto a discharge target region provided on a substrate. The point is that it can be implemented in the same way as long as it is a device that records a pattern such as an image or a figure or a character on an object to be ejected such as a substrate by ejecting a functional liquid using a method capable of ejecting a liquid. It is.

1 is a schematic configuration diagram of a liquid material discharge device according to an embodiment of the present invention. The schematic diagram which shows the arrangement | sequence state of the nozzle pierced by the nozzle head. The block diagram for demonstrating the function of a control apparatus. Explanatory drawing explaining the method of this embodiment which draws a color filter on a board | substrate. Explanatory drawing explaining the method of this embodiment which draws a color filter on a board | substrate. The flowchart which shows the processing step which the liquid discharge apparatus of this embodiment performs. The schematic diagram which showed the state which draws a color filter with a nozzle head. The schematic diagram which showed the state which draws a color filter with a nozzle head. In a 1st modification, it is explanatory drawing explaining a mode that the arrangement direction of a nozzle in the case of two nozzle heads is demonstrated, (a) shows before rotation, (b) shows after rotation. It is explanatory drawing explaining a mode that the arrangement direction of the nozzle in the case of two nozzle heads is switched with another example of a 1st modification, (a) shows before rotation, (b) shows after rotation. The schematic diagram which showed the state which draws a color filter in the 2nd modification. The schematic diagram which showed the case where the main scanning directions were not mutually orthogonal in the 3rd modification.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Control apparatus, 11 ... CPU, 12 ... Memory, 13 ... Board | substrate movement signal generation circuit, 14 ... Carriage movement signal generation circuit, 15 ... Head rotation signal generation circuit, 16 ... Piezoelectric element drive signal generation circuit, 20, 20k, 20m, 20mk ... Nozzle head, 20n, 20nk ... Nozzle head, 20C ... Nozzle head, 20R, 20G, 20B ... Nozzle group, 21-29 ... Nozzle, 50 ... Color filter, 50R, 50G, 50B ... Area, 70 ... Color Filter, 70R, 70G, 70B ... area, 100 ... liquid material discharge device, 101, 102 ... guide rail, 103 ... moving table, 105 ... stage, 110 ... guide rail, 112 ... carriage moving table, 200, 200A, 200C ... Carriage, 220, 220m, 220n... Head rotation mechanism.

Claims (7)

A liquid discharge apparatus for discharging a liquid from a plurality of nozzles to a substrate to form a first drawing pattern and a second drawing pattern on the substrate,
Moving means for moving the substrate relative to the plurality of nozzles in a first movement axis direction and a second movement axis direction;
The moving means relatively moves the substrate in the first movement axis direction to form the first drawing pattern, and moves the substrate in the second movement axis direction to move the second drawing. A liquid discharging apparatus, characterized in that a pattern is formed. The liquid material ejection device according to claim 1,
A nozzle head formed as a nozzle group in which the plurality of nozzles exhibit one arrangement direction;
Switching means for switching the arrangement direction of the nozzle group to the first arrangement direction or the second arrangement direction by rotating the nozzle head;
With
The switching means switches the nozzle group in the first arrangement direction when forming the first drawing pattern, and moves the nozzle group to the second arrangement pattern when forming the second drawing pattern. A liquid material ejecting apparatus, wherein the liquid material is switched in the arrangement direction. The liquid material discharge device according to claim 2,
A first nozzle head and a second nozzle head having the same arrangement direction of the nozzle groups;
When the switching direction of the nozzle group is switched by the switching unit, the position of the rotation center for rotating the first nozzle head and the position of the rotation center for rotating the second nozzle head are different from each other. A liquid material discharge device. The liquid material discharge device according to claim 2 or 3,
The liquid material discharge apparatus, wherein the first arrangement direction and the second arrangement direction of the nozzle group are substantially orthogonal to each other. The liquid material discharge device according to any one of claims 1 to 4,
The liquid material ejection device, wherein the first movement axis direction and the second movement axis direction are substantially orthogonal to each other. A liquid discharge method for discharging a liquid from a plurality of nozzles to a substrate to form a first drawing pattern and a second drawing pattern,
A moving step of moving the substrate relative to the plurality of nozzles in a first moving axis direction and a second moving axis direction;
In the moving step, the first drawing pattern is formed by relatively moving the substrate in the first moving axis direction, and the second drawing is performed by relatively moving the substrate in the second moving axis direction. A liquid discharge method comprising forming a pattern. The liquid discharge method according to claim 6,
When the plurality of nozzles have a nozzle head formed as a nozzle group exhibiting one arrangement direction, the arrangement direction of the nozzle group is changed to the first arrangement direction or the second arrangement by rotating the nozzle head. With a switching process to switch to the direction,
In the switching step, when forming the first drawing pattern, the nozzle group is switched in the first arrangement direction, and when forming the second drawing pattern, the nozzle group is changed to the second drawing pattern. A liquid discharge method characterized by switching in the arrangement direction.

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