JP2009178632A - Minute flow passage having microvalve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a minute flow passage having a microvalve which has a simple constitution, is easily manufactured and functions in the same manner as the conventional microvalve works. <P>SOLUTION: Microvalves 10, 11 are arranged respectively in the predetermined positions of a flow passage 6 of the first reactive fluid A and a flow passage 7 of the second reactive fluid B, the flow passages being arranged in a microchannel 3 of the minute flow passage 1a. The microvalve 10 or 11 has a retention area 12 or 14 of particulate magnetic bodies and a magnet mechanism 13 or 15 installed according to the retention area in such a position that the influence of a magnetic field of the magnet mechanism is exerted on the retention area 12 or 14. As a result, when the influence of the magnetic field of the magnet mechanism 13 or 15 is exerted, the agglomerated particulate magnetic bodies stick fast to the retention area 12 or 14 to clog the flow passage. When the influence of the magnetic filed is not exerted, the agglomerated particulate magnetic bodies move into the retention area 12 or 14 or disperse in the reactive fluid A or B to open the flow passage 6 or 7. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technique of a fine flow path having a microvalve, and is particularly effective when applied to a microvalve using a magnetic material.

  In recent years, microsynthesis, microanalysis, microculture, microelectrophoresis, etc. have been performed in the fields of chemistry, biochemistry, etc. using micro capillaries and microchannels. A channel and its peripheral technology have been proposed in various fields.

  In the fine flow path, a small amount of reaction fluid sample is introduced into the fine flow path formed on the surface of the substrate made of quartz, silica, glass, metal oxide, plastics, etc. for synthesis, separation, analysis, etc. The operation is performed. The sample channel generally has a width of about 100 μm to 3 mm, and the amount of sample as a reaction fluid introduced into the channel is very small, so that mixing, extraction, etc. occur quickly, reducing process time. The Further, the ratio of the surface area (or interfacial area) of the flow path to the volume of the reaction sample is extremely large, so that the efficiency of the reaction is increased and the controllability is improved, so that the yield and purity of the product can be increased.

  When such a fine flow path is used, for example, when the scale is expanded from the experimental stage to the actual manufacturing stage, various changes accompanying the scale-up are not required, and the parallel arrangement of the fine flow paths set under the same conditions is required. There is an advantage that the scale of production can be increased only by increasing the number of installed units.

  Depending on the purpose of use, a microchannel is formed in a microchannel by combining a reservoir cell, a mixing cell, a reaction cell, a separation cell, a recovery cell, etc., and the microchannel is formed as a single channel or a plurality of channels. ing. In addition, these flow paths may be branched in the middle or coupled to each other.

  Such end portions, branching portions, junction points, and the like of such microchannels are provided with so-called microvalves for opening and closing the flow path of the reaction fluid sample at those portions according to the target reaction form. . Since microvalves are installed in fine microchannels, their structures, materials, etc. are being developed specifically for their intended use.

  The microvalve uses a so-called active diaphragm that opens and closes the fluid opening by being deformed by a drive element, and a so-called passive beam structure that can open and close the fluid opening mainly by the flow of fluid (cantilever / both-end support). There are things. Further, as a drive element system, a system using electromagnetic force, piezoelectric action, electrostatic force, and thermal drive is known.

  However, these conventional microvalves are all based on a structure in which a valve body is incorporated in a microchannel to open and close the valve seat. For this reason, the manufacture and processing of a valve structure for incorporation into a fine microchannel is complicated, and the manufacturing cost increases because special equipment and advanced technology are required.

  Here, Patent Document 1 proposes a liquid transport method and a microreactor using a magnetic fluid as a piston for controlling movement of a transported fluid (a reaction fluid sample such as blood) in a microchannel. (Patent Document 1). In the proposal of Patent Document 1, as shown in FIG. 1 in particular, a magnetic fluid and a liquid to be transported are introduced into a liquid feeding path, and a magnetic field is relatively moved using an electromagnet or a permanent magnet attached to the liquid feeding path. Thus, the magnetic fluid is moved in the liquid feeding path, whereby the liquid to be transported is moved in the liquid feeding path by following the movement of the magnetic fluid.

In addition, as a technique using a magnetic action for operations such as chemical reaction, mixing, extraction, and handling of a reaction fluid in a microreactor, Patent Document 2 proposes that a liquid passage is formed by a magnetic barrier made of a band-shaped ferromagnetic material. ing.
JP 2003-14772 A JP 2004-82118 A

  However, in the proposal described in Patent Document 1, the liquid to be transported (reaction fluid sample) in the liquid feeding path (microchannel) is controlled by the movement of the magnetic fluid by an external magnetic field. It is used as a piston that controls movement in only one direction. That is, a specific structure and operation for opening and closing the flow of the reaction fluid by opening and closing the magnetic fluid as a valve at a predetermined flow path position of the microchannel is not disclosed.

  Further, even the proposal described in Patent Document 2 does not disclose a technique related to a microvalve for opening and closing a flow path in a fine flow path.

  An object of the present invention is to provide a microchannel having a microvalve that is simple in structure and easy to manufacture and that can function to the same extent as a conventional microvalve.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  That is, a microchannel having a microvalve for opening / closing a microfluidic channel of a reaction fluid at a predetermined position of the microchannel, and the microvalve for opening / closing the microfluidic channel is a microparticle formed at a predetermined position of the microchannel And a magnet mechanism provided at a position capable of exerting an action of a magnetic field corresponding to the staying region.

  Among the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

  In other words, the micro-valve for opening and closing the micro-channel, which the micro-channel has, is provided at the retention area of the fine particle magnetic material formed at a predetermined position of the micro-channel and at the position where the magnetic field action can be applied corresponding to the retention area Magnet mechanism.

  As a result, the particulate magnetic material is placed under the control of the magnetic field, and when the magnetic field is applied, the aggregated particulate magnetic material is manifested as a valve body and is in close contact with the staying region functioning as a valve seat to close the flow path. . In addition, when the magnetic field is not applied, the agglomerated particulate magnetic material moves within the stay region as the valve seat or is dispersed in the reaction fluid to open the flow path.

  In other words, by controlling the position or density of the particulate magnetic material by the action of a magnetic field, it functions as a channel opening / closing mechanism as in the conventional microvalve. Further, the movable part of the valve structure such as the valve body used in the microvalve is not required, and the configuration of the microvalve is simple and easy to manufacture.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof is omitted as much as possible.

  FIG. 1 is a schematic plan view showing a flow path open state of an example of a micro flow path having a micro valve of the present invention, and FIG. 2 is a flow path closed state when a permanent magnet is used for the magnet mechanism of the micro flow path of FIG. FIG. 3 is a schematic plan view showing a closed state of the flow path when an electromagnetic magnet is used in the magnet mechanism of the fine flow path of FIG.

  As shown in FIG. 1, the microchannel 1 a is formed on the upper surface of the substrate 2 by forming a fine glass powder paste in a predetermined pattern by printing and then firing the microchannel 3.

  The microchannel 3 includes an introduction portion 4 for a first reaction fluid A (hereinafter simply referred to as “reaction fluid A”) and an introduction portion for a second reaction fluid B (hereinafter simply referred to as “reaction fluid B”). 5, a flow path 6 of the reaction fluid A, a flow path 7 of the reaction fluid B, a flow path 8 of both the reaction fluid A and the reaction fluid B, and a discharge part of the reaction product by the reaction fluid A and the reaction fluid B 9 and.

  Note that the reaction fluid A and the reaction fluid B are actually distinguished by having different color tones, etc., but are distinguished by the type of line due to restrictions in the drawing. In addition, the reaction fluid A and the reaction fluid B are actually spread over the entire stay region (the same applies hereinafter).

  A micro valve 10 for opening and closing a fine channel is provided at a predetermined position of the channel 6 of the reaction fluid A, that is, in the illustrated example, in a central region of a portion extending linearly from the introduction portion 4. A similar micro valve 11 is provided at a predetermined position of the flow path 7 of the reaction fluid B. It should be noted that the flow of the reaction fluid A and the reaction fluid B can be controlled even if the positions of the microvalves 10 and 11 in the flow paths 6 and 7 are other than the central region of the portion extending from the introduction portion 4 described above. If it is a position, it may be another position.

  The microvalve 10 includes a staying region 12 for a particulate magnetic material (not shown) and a magnet mechanism 13. The staying region 12 is formed in the central region of the portion extending from the introduction portion 4, which is a predetermined position of the flow path 6 described above. The magnet mechanism 13 is placed at an arbitrary position corresponding to the staying area 12 and capable of exerting a magnetic field action other than the outlet 12a of the staying area 12, in the illustrated example, at the center of the edge of the staying area 12. 12 is provided so as to be movable (attached).

  The microvalve 11 also includes a stay region 14 and a magnet mechanism 15 having the same configuration as the microvalve 10.

  In order to obtain two target reaction products by flowing two kinds of reaction fluids A and B using the microchannel 1 a shown in FIG. 1, the reaction fluid A is supplied from the introduction portion 4 of the reaction fluid A in the microchannel 3. The reaction fluid B is introduced at a predetermined flow rate from the introduction portion 5 of the reaction fluid B. The reaction fluid A introduced into the introduction section 4 flows through the flow path 6, and the reaction fluid B introduced into the introduction section 5 flows through the flow path 7. Next, the reaction fluid A and the reaction fluid B pass through the flow path 8 in parallel or alternately, and the target reaction product is taken out from the discharge unit 9.

  The flow of the reaction fluid A and the reaction fluid B to the flow path 8 is controlled by the action of the magnet mechanisms 13 and 15 on the particulate magnetic material. If it is desired to control only one flow of the reaction fluid A or the reaction fluid B, the magnet mechanisms 13 and 15 are provided only on the side of the staying regions 12 and 14 where the flow is desired to be controlled. It does not have to be provided. In this case, the particulate magnetic material may be included only in the reaction fluid to be controlled.

  As the magnet mechanisms 13 and 15, permanent magnets or electromagnetic magnets may be used.

  In the case where permanent magnets are used as the magnet mechanisms 13 and 15, if the fine particle magnetic material is aggregated in advance at the positions where the magnet mechanisms 13 and 15 of the staying regions 12 and 14 are respectively provided, FIG. As shown, the reaction fluid A and the reaction fluid B pass through the residence regions 12 and 14 and flow into the flow path 8 (flow path open state).

  For example, in order to stop the flow of the reaction fluid A to the flow path 8 after the reaction fluid A and the reaction fluid B having the predetermined flow rates are introduced and the desired predetermined amount of reaction product is obtained, FIG. As shown, the magnet mechanism 13 is moved to the outlet 12 a of the stay region 12. Along with this, the agglomerated particulate magnetic material also moves to the outlet 12a of the staying region 12 and closes the flow path 6 (flow path closed state). As a result, the reaction fluid A does not flow to the portion downstream of the outlet 12 a of the stay region 12 of the flow path 6 and the flow path 8.

  Similarly, in order to stop the flow of the reaction fluid B to the flow path 8, the flow path 7 is closed by moving the magnet mechanism 15 to the outlet 14 a of the stay region 14.

  The fine particle magnetic material may be aggregated in advance only in the stay region 12 or the stay region 14. When a relatively large particle-like magnetic material is used, the magnet mechanisms 13 and 15 are removed, and the reaction fluid A or the reaction fluid B removes the particle-like magnetic material from the outlets 12 and 14. The flow paths 6 and 7 can also be closed by flowing in 12a and 14a, respectively.

  When electromagnetic magnets are used as the magnet mechanisms 13 and 15, as shown in FIG. 3, the magnet mechanisms 13 and 15 are previously placed on the outlets 12a and 14a of the stay regions 12 and 14, respectively. While the reaction fluid A and the reaction fluid B flow into the flow path 8, the magnet mechanisms 13 and 15 are in a non-excited (demagnetized) state, and the reaction fluid A and the reaction fluid B include a state in which fine magnetic particles are dispersed. And flows through the retention regions 12 and 14 and flows into the flow path 8 (flow path open state).

  For example, in order to stop the flow of the reaction fluid A to the flow path 8 after the reaction fluid A and the reaction fluid B having a predetermined flow rate are introduced to obtain a desired amount of reaction product, the reaction product The magnet mechanism 13 is excited at a timing corresponding to that obtained and magnetized (magnetized) by applying a magnetic field to the staying region 12. Due to the magnetization, the particulate magnetic material dispersed in the reaction fluid A is adsorbed to the staying region 12 of the flow path 6, and the particulate magnetic material is aggregated at the outlet 12 a of the staying region 12, thereby closing the flow path 6. (Channel closed state). As a result, the reaction fluid A does not flow to the downstream portion and the flow path 8 from the outlet 12 a of the retention region 12 of the flow path 6.

  Similarly, in order to stop the flow of the reaction fluid B to the flow path 8, the magnet mechanism 15 is excited at a timing corresponding to the fact that the reaction product is obtained, and the particulate magnetic material is formed at the outlet 14 a of the residence region 14. The channels 7 are closed by agglomerating the particles.

  That is, in the fine channel 1a, the particulate magnetic material that has been aggregated by magnetization at the positions where the magnet mechanisms 13 and 15 of the staying regions 12 and 14 are provided in advance or dispersed in the reaction fluid A and the reaction fluid B is used. Aggregated by the control of the magnetic fields of the magnet mechanisms 13 and 15 to open and close the flow paths 6 and 7.

  That is, when the magnetic field of the magnet mechanisms 13 and 15 is applied, the aggregates of the fine-particle magnetic material are manifested as valve bodies and are in close contact with the stay regions 12 and 14 functioning as valve seats to close the flow paths 6 and 7. . In addition, when the magnetic field of the magnet mechanisms 13 and 15 is not acting, the aggregates of the fine magnetic particles move within the stay regions 12 and 14 as valve seats or are dispersed in the reaction fluid A and the reaction fluid B, And the flow paths 6 and 7 are opened.

  As a result, the microvalves 10 and 11 of the fine flow path 1a simply move the particulate magnetic material aggregated by magnetization to a position where the magnet mechanisms 13 and 15 of the staying regions 12 and 14 are provided in advance. The function corresponding to the microvalve can be obtained, and it is possible to solve the difficulty in manufacturing the valve body and the increase in cost due to the structural problems of the microvalve.

  In addition, simply by agglomerating the fine magnetic particles dispersed in the reaction fluid A and the reaction fluid B by the magnetic field action of the magnet mechanisms 13 and 15, a function corresponding to the conventional microvalve can be obtained in the same manner. Can solve the structural problems.

  The groove width of the microchannel 3 is about 100 μm to 3 mm, and the depth of the groove is about 100 μm to 1 mm, and can be obtained by micromachining, laser processing, photoetching, vapor deposition, etc. as in the case of a normal fine channel. .

  As the fine particle magnetic material, any metal, alloy and compound thereof which are stably dispersed in the reaction fluid and are adsorbed and aggregated in the residence region in the magnetized state can be used. Since it can be used without restriction, it is preferable to use metal-encapsulated nanocarbon.

  Examples of the metal-encapsulated nanocarbon include fullerene encapsulating metal and carbon nanotube encapsulating metal.

  Fullerenes are also called carbon fullerenes, and are substances in which 60 to 82 carbon atoms are formed and the carbon layer forms a spherical cage shape. A carbon nanotube is a substance in which a carbon layer forms a cylindrical cage shape.

  Metal-encapsulated nanocarbon is a substance in which metal atoms are incorporated into a multi-layer fullerene or multi-wall carbon nanotube in which these fullerenes or carbon nanotubes are formed in multi-layers.

  When a multi-layer fullerene or multi-walled carbon nanotube contains a magnetic metal such as iron or manganese, it becomes nanocarbon that reacts with a magnet.

  Of the metal-encapsulated nanocarbon, fullerene has a spherical shape with a diameter of about 50 nm to 500 nm, and the carbon nanotube has a cylindrical shape with a diameter of about 1 nm to 10 nm and a length of about 50 nm to 1 μm. For this reason, even a narrow liquid supply path of about 10 μm can pass sufficiently. Carbon nanotubes having a length exceeding 1 μm may be used, but it is preferably 1/10 or less of the liquid feeding path.

  The metal-encapsulated nanocarbon is stable against acids and alkalis because the outer periphery of the metal is covered with stable carbon atoms, and remains magnetic even after reacting the reaction fluid in a fine channel. For this reason, the metal inclusion | inner_cover nanocarbon mixed beforehand in the reaction product can be removed by magnetism.

  The metal-encapsulated nanocarbon can be obtained, for example, by “Production method of metal-encapsulated carbon nanocapsules” described in JP-A-2006-335592.

  4 is a schematic plan view showing a channel open state of another example of a microchannel having a microvalve of the present invention, and FIG. 5 is a schematic plan view showing a channel blockage state of the microchannel of FIG. As shown in FIG. 4, in addition to the microvalves 10 and 11, the microchannel 1b includes a microvalve 16 in a central region that is a predetermined position of the channels 8 of the reaction fluid A and the reaction fluid B. . The microvalve 16 includes a stay region 17 and a magnet mechanism 18 having the same configuration as the microvalves 10 and 11.

  In the fine flow path 1b, when a permanent magnet is used as the magnet mechanism 18, the particulate magnetic material is aggregated in advance at the position where the magnet mechanism 18 of the staying region 17 is provided, as shown in FIG. When the magnet mechanism 18 is moved to the outlet 17a of the staying region 17, the agglomerated particulate magnetic material also moves to the outlet 17a of the staying region 17 and closes the flow path 8 (flow path closed state). In this case, when a relatively large particle magnetic material is used, the flow path 8 can be closed only by removing the magnet mechanism 18 as in the case of the fine flow path 1a.

  When an electromagnetic magnet is used as the magnet mechanism 18, for example, as shown in FIG. 5, the magnet mechanism 18 is previously placed on the outlet 17 a of the staying area 17. When the magnet mechanism 18 is excited in the same manner as the magnet mechanisms 13 and 15 described above, the stay region 12 formed corresponding to this portion is magnetized (magnetized). Due to the magnetization, the particulate magnetic material dispersed in the reaction fluid A and the reaction fluid B passing through the flow path 8 alone or in parallel is adsorbed to the staying region 17 and fine particles are formed on the surface of the adsorbed portion. The magnetic substances aggregate to close the flow path 8 (flow path closed state).

  Thus, in the fine flow path 1b, the flow path 8 is closed, so that the reaction fluid A and the reaction fluid B are blocked by the particulate magnetic material and do not flow into the discharge section 9, but are collected by the discharge section 9. Therefore, the reaction fluid A and the reaction fluid B are not mixed into the target reaction product and the purity is not lowered.

  That is, in the fine channel 1b, when the metal-encapsulated nanocarbon described above is used as the fine particle magnetic material and mixed with the reaction fluid A and the reaction fluid B, the fine particle magnetic material is inactive with respect to acid and alkali. After the reaction fluid A and the reaction fluid B are reacted, they remain magnetic.

  For this reason, the particulate magnetic material previously mixed in the reaction product can be removed by magnetism. Similarly, the particulate magnetic material can be removed from the unused reaction fluid by magnetism. Needless to say, when the reaction product may contain a fine magnetic particle, the fine magnetic material may be used without separation.

  FIG. 6 is a schematic plan view showing still another example of the fine channel having the microvalve of the present invention. The fine channel 1 c further includes an introduction part 19 for the third reaction fluid C and a channel 20, and the channel 20 also includes a microvalve 21 as in the channels 6 and 7. The microvalve 21 also includes a stay region 22 and a magnet mechanism 23 having the same configuration as the microvalve 10 and the like.

  Thus, since the three types of reaction fluids A to C can be flowed in the fine channel 1c, for example, the flow of one type of reaction fluid A is stopped and the other reaction fluids B and C are allowed to flow. Thus, a more complicated reaction can be performed efficiently. Further, the number of flow channels may be further increased to control the flow of a larger number of reaction fluids, or the flow of reaction fluids after mixing may be increased to enable similar control.

  Hereinafter, the present invention will be further described by way of examples. In addition, this invention is not limited by these Examples.

Example 1
In order to actually confirm the action of the microvalve in the microchannel of the present invention described in the above embodiment, the microvalves 10 and 11 have the microvalves 10 and 11 as in the microchannel 1a shown in FIGS. A channel 3 was formed on the substrate 2. Then, as shown in FIG. 1, magnet mechanisms 13 and 15 were provided corresponding to the staying regions 12 and 14, respectively, and two types of reaction fluid A and reaction fluid B were introduced to observe the reaction state and the like.

  As the substrate 2, a transparent glass plate was used. The channels 6 to 8 having a groove width of 400 μm and a depth of 100 μm were formed in a predetermined pattern by printing a fluid fine glass powder paste and fired.

  As the magnet mechanisms 13 and 15, permanent magnets were used. As the particulate magnetic material, metal-encapsulated nanocarbon was used, and fullerene and carbon nanotubes were used in combination.

  Blue ink was used as the reaction fluid A, and red ink was used as the reaction fluid B. In order to confirm the operation state of the target valve mechanism, the blue ink is introduced into the introduction portion 4 and the red ink is introduced into the introduction portion 5 to repeatedly close and open the flow paths 6 and 7, respectively. The inflow state to the flow path 8 was confirmed, and recovered at the discharge part 9.

  In addition to the outlets 12a and 14a of the staying areas 12 and 14, the magnet mechanisms 13 and 15 are mounted and provided, and when the metal-encapsulated nanocarbon is aggregated at this position, the outlets 12a and 14a of the staying areas 12 and 14 are opened. In this state, both the blue ink and the red ink flowed into the flow path 8. The actual state at this time is shown in the photographs of FIGS. In FIGS. 7 and 8 and FIGS. 9 to 11 described later, the magnet mechanism is provided only in the staying region formed in the flow path of the blue ink as the reaction fluid A.

  As shown in FIG. 2, when the magnet mechanism 13 is moved to the outlet 12a of the staying region 12, the aggregated metal-encapsulated nanocarbon also moves to the outlet 12a of the staying region 12, and the blue ink in which the flow path 6 is blocked is The flow did not flow in the flow path 6 and the flow path 8 downstream from the outlet 12a of the staying region 12. On the other hand, only the red ink flowed into the flow path 8 while the flow path 7 was left open. The actual state at this time is shown in the photographs of FIGS.

  On the contrary, when the outlet 17a of the staying area 17 is closed by the magnet mechanism 15 and the outlet 12a of the staying area 12 is opened, only the blue ink flows into the flow path 8.

  Further, as the fine-particle magnetic material, iron powder was used instead of the metal-encapsulated nanocarbon, and the metal-encapsulated nanocarbon was used even when the magnet mechanisms 13 and 15 were removed when the flow paths 6 and 7 were closed. As in the case, the opening / closing control of the flow paths 6 and 7 could be performed. The actual state of the flow path blockage at this time is shown in the photograph of FIG.

  From the above, by arbitrarily agglomerating a fine particle magnetic material such as metal-encapsulated nanocarbon by the magnet mechanisms 13 and 15 and alternately closing the outlets 12a and 17a of the staying regions 12 and 17, an arbitrary flow to the flow path 8 can be obtained. It was confirmed that it is effective as a valve mechanism (microvalve) for controlling the inflow of only the reaction fluid.

  Further, as shown in FIGS. 7 and 8, the reaction fluid A and the reaction fluid B, and the flow of the reaction product are obtained by setting the reaction fluid A and the reaction fluid B in different colors in advance. It was clearly visible from the surface side.

  As mentioned above, the invention made by the present inventor has been specifically described based on the embodiments and examples. However, the present invention is not limited to the above-described embodiments and examples, and does not depart from the gist of the invention. Needless to say, various changes can be made.

  For example, the introduction units 4 and 5 and the discharge unit 9 may be provided with a micropump, a microfilter, or the like as necessary. Further, the fine flow path may be provided not only in the horizontal direction but also in the vertical direction.

  The present invention can be effectively used in the field of microchannels having microvalves.

It is a schematic plan view which shows the flow-path open state of an example of the fine flow path which has the microvalve of this invention. It is a schematic plan view which shows the flow-path obstruction | occlusion state at the time of using a permanent magnet for the magnet mechanism of the fine flow path of FIG. It is a schematic plan view which shows the flow-path obstruction | occlusion state at the time of using an electromagnetic magnet for the magnet mechanism of the fine flow path of FIG. It is a schematic plan view which shows the channel open state of another example of the microchannel which has the microvalve of this invention. It is a schematic plan view which shows the flow-path obstruction | occlusion state of the fine flow path of FIG. It is a schematic plan view which shows another example of the microchannel which has the microvalve of this invention. It is a photograph which shows the channel open state at the time of using the metal inclusion carbon of the microchannel which has the microvalve of this invention. It is a principal part enlarged photograph of the flow path intersection part vicinity of FIG. It is a photograph which shows the channel | channel obstruction | occlusion state at the time of using the metal inclusion carbon of the microchannel which has the microvalve of this invention. FIG. 10 is an enlarged photograph of a main part in the vicinity of a flow path intersection in FIG. It is a photograph which shows the flow-path obstruction | occlusion state at the time of using the iron powder of the fine flow path which has the microvalve of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1a Fine flow path 1b Fine flow path 1c Fine flow path 2 Substrate 3 Micro channel 4 First reaction fluid introduction part 5 Second reaction fluid introduction part 6 First reaction fluid flow path 7 Second reaction fluid The flow path 8 of both the first reaction fluid and the second reaction fluid 9 The discharge part 10 of the reaction product 10 The microvalve 11 The microvalve 12 The residence area 12a of the particulate magnetic material The exit 13 of the residence area Magnet mechanism 14 The particulate Residual area 14a of magnet-like magnetic body 15 Magnet mechanism 16 Microvalve 17 Retentive area 17a of fine-particle-shaped magnetic substance 18 Outlet 18 of magnetized area Magnet mechanism 19 Third reaction fluid inlet 20 Third reaction fluid flow Path 21 Microvalve 22 Particulate region 23 of magnetic particulate material Magnet mechanism A First reaction fluid B Second reaction fluid C Third reaction fluid

Claims (5)

  A microchannel having a microvalve for opening and closing the microfluidic channel of the reaction fluid at a predetermined position of the microchannel, wherein the microvalve for opening and closing the microfluidic channel is formed of a particulate magnetic formed at a predetermined position of the microchannel A fine flow path having a microvalve, comprising: a body staying region; and a magnet mechanism provided at a position capable of exerting a magnetic field action corresponding to the staying region. In the fine flow path having the microvalve according to claim 1,
The magnet mechanism has a flow path by movement of the particulate magnetic body aggregated by a permanent magnet, or aggregation of the particulate magnetic body by magnetization of an electromagnetic magnet and dispersion of the particulate magnetic body by demagnetization of the electromagnetic magnet. A microchannel having a microvalve characterized by opening and closing. In the fine flow path having the microvalve according to claim 1 or 2,
A fine channel having a microvalve, wherein the particulate magnetic material is at least one of fullerene encapsulating metal and carbon nanotube encapsulating metal. In the fine flow path which has the microvalve of any one of Claims 1-3,
A fine flow path having a microvalve, wherein the particulate magnetic material is dispersed and contained in at least one kind of the reaction fluid. In the fine flow path which has the microvalve of any one of Claims 1-4,
A fine flow path having a microvalve, wherein the particulate magnetic material mixed in the reaction fluid is separated from a reaction product obtained after the reaction of the reaction fluid using magnetism.