JP2007255433A - Flow regulator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow regulator of extremely simple structure facilitating miniaturization and integration, having high durability, performing stable and sure open and close operation without damaging a valve even if viscosity of liquid is high under high pressure or pressure difference between a valve inlet and a valve outlet is large, and being capable opening and closing a channel and regulating flow. <P>SOLUTION: Since flow rate of non-magnetic fluid flowing in the channels A, B when a minute ball 2 moves to a first position is smaller than flow rate of the non-magnetic fluid flowing in the channels A, B when the minute ball 2 moves to a second position, the flow regulator of extremely simple structure facilitating miniaturization and integration, having high durability, performing stable and sure open and close operation without damaging a valve even if viscosity of liquid is high under high pressure or pressure difference between an inlet and an outlet of the minute ball 2 is large, and being capable of opening and closing the channel and regulating flow. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a flow regulator that cuts off the flow of a fluid, such as a small amount of liquid or gas, or adjusts the flow rate. For example, a flow rate that can reliably adjust a fluid such as a minute amount or high-viscosity oil with high viscosity. The present invention relates to a regulator, and also relates to a flow regulator having a function of selecting a particulate transport path or a function of filtering particulates by switching a flow path through which a fluid containing various particulates not containing a ferromagnetic material flows. It is.

In recent years, there has been a growing need to control a small amount of fluid. Especially in the chemical and biotechnology fields, a minute amount of liquid produced using a microfabrication technology to enable analysis by flowing a small amount of liquid inside a microchannel. Attempts have been made to study channels and microvalves. Here, several methods have been proposed in the past in order to control the flow rate that blocks the minute channel and passes through the channel. As an example,
(1) A silicon rubber diaphragm is pressed against a flat surface using an electrostatic force to shut off the liquid (for example, see Patent Document 1),
(2) A membrane that is deformed by the expansion of air or gas to block a microchannel in the microchip (see, for example, Patent Document 2),
(3) Various actuators such as those using a slide gate capable of blocking a fluid flowing through the micro flow path by inserting a member to be a gate into the micro flow path (see, for example, Non-Patent Document 3) There has been proposed a microvalve that is installed on a microchip in combination.
JP 2004-176802 A JP 2004-358635 A Albert P.M. “Low-Leakage Micro Gate Valve”, Transducers '03, Berkley USA, Jun. 11, 2003, pp, 143-146, by Pisano et al.

  In the conventional valve manufactured using the microfabrication technology as described above, the operation mode using static electricity described in Patent Document 1 is a system in which the valve is operated by electrostatic force. As a result, there is a problem in that a sufficient cross section of the flow path is not ensured, the pressure resistance when the fluid is conveyed increases, and it is necessary to ensure durability in the support portion that elastically supports the valve portion. . Further, in the techniques of Patent Document 2 and Non-Patent Document 1, a cross section of the flow path can be secured with a valve valve that operates in a direction perpendicular to the fluid traveling direction. In the technique of Document 2, there is a disadvantage that a membrane that adjusts the flow rate by elastic deformation using pneumatic pressure or the like may be adsorbed to the flow path or the valve may be damaged. When the valve is operated when a high pressure difference suddenly occurs when the flow path is closed by the slide gate, there is a disadvantage that an extra force exceeding the frictional force at the contact position of the valve is required. .

  For these reasons, it can be said that these valves are unsuitable for applications in which the valves are opened and closed in a flow path into which a fluid such as a high-pressure oil having a high viscosity used as a fuel or a lubricant flows. Furthermore, when a structure having a shut-off valve as described above is made smaller than before and embedded in a substrate or in a small area, the structure is complicated and the structure is complicated. There are many disadvantages, including manufacturing, production costs, and efficiency, in promoting structural design and system miniaturization.

  Therefore, the present invention solves the above-mentioned problems due to the conventional disadvantages, and has an extremely simple structure, can be easily miniaturized and integrated, has high durability, and is capable of being operated at high pressure. Provided is a flow regulator capable of opening and closing a flow path and adjusting the flow rate of the fluid without causing damage to the valve even if the pressure difference between the fluid with high viscosity or the valve inlet / outlet is large. For the purpose.

The flow regulator of the present invention is
A magnetic valve member capable of moving between a first position and a second position in the flow path of the non-magnetic fluid;
Magnetic force generating means for generating a magnetic force so as to move the valve member from at least the first position to the second position;
When the valve member moves to the first position, the flow rate of the nonmagnetic fluid that flows in the flow path is such that the nonmagnetic fluid that flows in the flow path when the valve member moves to the second position. It is characterized by less than the flow rate.

  According to the flow regulator of the present invention, the magnetic valve member that is movable between the first position and the second position in the flow path of the non-magnetic fluid, and the valve member, Magnetic force generating means for generating a magnetic force so as to move at least from the first position to the second position, and flows in the flow path when the valve member moves to the first position. Since the flow rate of the non-magnetic fluid is less than the flow rate of the non-magnetic fluid flowing in the flow path when the valve member is moved to the second position, the structure is extremely simple and can be easily miniaturized and integrated. It is possible to operate the valve member stably and reliably without damaging the valve member even if the pressure difference between the inlet and the outlet of the high-pressure and high-viscosity fluid is large. It is possible to provide a flow rate regulator that can perform opening and closing and flow rate regulation.

  In particular, a single or multiple microspheres that function as a valve member that opens and closes a flow path or adjusts the flow rate by being connected to the flow path of a micro cross section that introduces a gas or liquid that is a non-magnetic fluid. A housing formed with a housing portion, a microsphere containing a ferromagnetic material that moves within the housing portion by application of an external magnetic field, and a magnetic force generating means capable of operating the microsphere in the same or individually using an external magnetic field. In addition, it is preferable to include peripheral portions such as a fluid inlet and outlet, a cover member of the flow path, and various pressure and temperature sensors attached to the flow path.

  Further, in the case where the housing for the flow path and the valve member is manufactured using the semiconductor microfabrication technology in the housing used for the flow regulator according to the present invention, glass, a silicon substrate, and PDMS (poly-dimethylsiloxane) material are used for the housing. As a material, after making a minute groove on the surface and making a container with a cross section larger than the minute groove, single or multiple microspheres that cannot pass through the flow path are placed in the container. In addition, it is possible to easily manufacture the structure by attaching the lid member and the housing, and finally attaching the magnetic force generating means, and it is possible to realize miniaturization, multiple stages, high pressure resistance structure at a very low cost, Since various materials can be used for designing, a wide range of materials with excellent chemical resistance can be designed.

  Further, the flow rate regulator according to the present invention has a simple configuration using, for example, microspheres, and has an elastic support portion, so that it has high durability reliability and can be opened and closed simply by moving the microspheres by magnetic force. The frictional force between the flow path and the microsphere is reduced by the blocking mechanism by the movement of the microsphere, so that the flow path adjustment and flow rate adjustment stable to lubrication can be performed even when the pressure difference is large. Is possible. The valve member is not limited to a microsphere, and may be a microcylinder (these are collectively referred to as a microbody).

Furthermore, the present invention has the following advantages.
(1) Since the frictional force generated when the microscopic body that is the valve member moves can be reduced, fluid transportation with high viscosity and high pressure is possible.
(2) Since it has a simple structure without an elastic support portion, it can be easily miniaturized and integrated, and the production cost is low.
(3) When moving microscopic objects in a direction perpendicular to the flow path, the area occupied by the microscopic objects in the plane along the flow path can be reduced. This is an advantageous structure.
(4) The magnetic force generation means can be structured to be completely separated from the housing and the lid member and can be mounted and replaced. It is also possible to move the micro objects that open and close the flow path individually or simultaneously in the accommodating portion.
(5) By integrating the microscopic bodies in series, the flow rate ratio at the time of opening and closing is improved and the flow rate can be adjusted, and various additions can be made depending on the layout design of the microscopic bodies, such as application as a micropump and filtration device. Possible function.
(6) Since the structure is simple, it is possible to design a wide range of materials such as providing high chemical resistance.

  The magnetic force generating means moves the valve member from the first position to the second position, or moves the valve member from the second position to the first position. It is preferable to selectively generate a magnetic force because a reliable operation can be realized.

  A plurality of the valve members are provided, and it is preferable that the magnetic force generating means can control the flow rate finely by generating a magnetic force so that any of the valve members moves.

  It is preferable that a housing provided with a housing portion for the valve member and a groove communicating with the housing portion and a lid member for shielding the housing portion and the groove are provided.

  It is preferable that at least a part of the accommodating portion is formed on the lid member.

  The lid member is preferably a plate material.

  After forming an etching mask and a resist on the material of the housing in this order, the groove removes a part of the resist by exposure and development, and further removes the resist and the etching mask by an etching process. It is preferable that it is formed.

  After forming the film material, the etching mask, and the resist in this order on the material of the housing, the groove removes a part of the resist by exposure and development, and further performs an etching process to remove the resist, the etching mask, and the resist. Preferably, it is formed by removing a part of the film material.

  The groove is preferably formed by forming a resist on the material of the housing and then removing a part of the resist by exposure and development.

  The groove is preferably formed using a mold.

  Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a side cross-sectional view of a flow rate regulator according to the present embodiment. FIG. 2 is a view of the configuration of FIG. 1 taken along the line II-II and viewed in the direction of the arrow.

  In FIG. 1, a block-shaped housing 1 is a bag-hole-shaped accommodation portion 1 b that opens at the center of a flat upper surface 1 a, and extends from the left and right ends toward the center on the upper surface 1 a and communicates with the accommodation portion 1 b. It has a U-shaped or concave channel groove 1c. As a material of the housing 1, a glass substrate, a silicon substrate, PDMS (poly-dimethylsiloxane), or the like can be used. When the flow path groove 1c is formed on a glass substrate, a film using a photo-curing resin or thermosetting resin, resists, polyimide, or the like is formed on the glass substrate, and after exposure, development, etching, and the like, Create a flow path. In addition, the substrate body may be manufactured using various processing techniques for etching the flow path using wet etching of the substrate body, dry etching by RIE, or the like.

  The accommodating portion 1b may have a shape that restricts the displacement of the microsphere 2 in the in-plane direction or the vertical direction with respect to the upper surface 1a, or is configured to move the microsphere 2 in an arbitrary direction such as the in-plane direction or the vertical direction. It is good. Further, by arranging a plurality of microspheres (for example, made of a porous material) 2 inside the accommodating portion 1b, it can be used for fine particle filtering and mechanical destruction. A method for forming the accommodating portion 1b or the channel groove 1c will be described later.

  The housing portion 1b of the housing 1 has, for example, a cylindrical shape having an inner diameter D1, and a microsphere 2 having an outer diameter D2 (<D1) moves in a direction intersecting the extending direction of the flow channel groove 1c. It arrange | positions possible (refer Fig.2 (a)). The microsphere 2 that is a valve member is selected so as to have a diameter that cannot pass through the flow channel 1c and to contain a ferromagnetic material. This is because the microsphere 2 is displaced by applying an external magnetic field. Therefore, the microsphere 2 may be an iron ball containing a ferromagnetic material, or may be subjected to various plating, vapor deposition, surface treatment or the like in order to protect the surface. As shown in FIG. 2 (b) showing another example, the housing portion 1b of the housing 1 has an appropriate shape having a groove width D3 and a depth D4 (see FIG. 1 (a)). The microspheres 2 (<D3, <D4) may be moved in the in-plane direction of the housing 1 (the paper surface direction in FIG. 2B). In this case, the electromagnets 4 and 5 are attached to the side surfaces of the housing 1 corresponding to the microspheres 2.

  In FIG. 1, a plate-shaped lid member 3 is attached so as to be in close contact with the upper surface 1 a of the block-shaped housing 1. By covering the upper part of the flow channel groove 1c with the lid member 3, the inlet side flow channel A and the outlet side flow channel B of the nonmagnetic fluid are formed, and the storage portion 1b is also shielded at the same time. Communicates with the outside only through the flow paths A and B.

  The lid member 3 has a function of bonding the housing 1 to the housing 1 using an adhesive, hydrofluoric acid, anodic bonding, mechanical fixation, etc., and isolating the channel groove 1c from the outside air. If it is not necessary to flow a high-pressure fluid, there is no need to install it. Further, if necessary, the lid member 3 can be provided with a flow path and an accommodating portion by performing the same process as the housing 1.

  In FIG. 1, when the microsphere 2 moves in the vertical direction, an electromagnet 4 is attached to the upper surface of the lid member 3 so as to face the housing portion 1 b, and the housing portion 1 b is disposed on the lower surface of the housing 1. The electromagnet 5 is attached so as to oppose to. In FIG. 2B, when the microsphere 2 moves in the in-plane direction, the electromagnets 4 and 5 can be attached to the upper surface of the lid portion 3 and the lower surface or side surface of the housing 1. The electromagnets 4 and 5 constitute the magnetic force generating means, but can be manufactured using a coil, a permanent magnet, or the like. In addition, a sensor (not shown), a channel inlet / outlet port, and the like are attached.

  The operation of this embodiment will be described. 1 and 2, the inlet-side flow path A is connected to a nonmagnetic fluid reservoir (not shown), and the outlet-side flow path B is connected to a location (not shown) to which the nonmagnetic fluid is to be supplied. Shall. Here, when power is supplied to the electromagnet 5 from an external power source (not shown) and power is not supplied to the electromagnet 4, magnetism is generated only from the electromagnet 5, and as shown in FIG. 1 (a). The microsphere 2 is attracted toward the electromagnet 5 (downward in FIG. 1) by the magnetic force in the accommodating portion 1b, and contacts the bottom surface of the accommodating portion 1b. Such a position becomes the second position. At this time, the inlet-side channel A and the outlet-side channel B are not blocked by the microspheres 2, and the nonmagnetic fluid flows from the inlet-side channel A to the outlet-side channel B at a relatively large flow rate. It becomes.

  Here, when the power supply from the external power source to the electromagnet 5 is interrupted and the power is supplied to the electromagnet 4, magnetism is generated only from the electromagnet 4, thereby causing the microsphere 2 as shown in FIG. Is attracted toward the electromagnet 4 (upward in FIG. 1) by the magnetic force in the accommodating portion 1b. Such a position becomes the first position. At this time, the microsphere 2 comes to be positioned between the inlet-side channel A and the outlet-side channel B, but there is a minute gap between the microsphere 2 and the accommodating portion 1b. Therefore, the flow rate of the nonmagnetic fluid passing through the outlet side flow path B is smaller than that in the state shown in FIG.

  Thus, since the microsphere 2 in the accommodating part 1b can open / close or control the flow rate of the flow paths A and B by applying an external magnetic field, the electromagnets 4 and 5 are arranged in the housing 1 according to the movement form of the microsphere 2. And can be fixed at any position on the surface of the lid member 3. When integrating the accommodating portions 1b, one or a plurality of magnetic force generating means may be used to simultaneously move the plurality of microspheres 2 accommodated inside each accommodating portion 1b, or, for example, the magnetic force generating means may be used. It is good also as a form which moves the microsphere 2 separately by putting several by the number of the accommodating parts 1b.

  As described above, the flow rate regulator according to the present embodiment has an extremely simple structure that can be easily manufactured, so that it is possible to achieve miniaturization, multiple multi-stages, and a high pressure resistance structure at an extremely low cost. Since it can be designed with materials, it has excellent chemical resistance. In addition, it is possible to design a wide range of materials, and since it has a simple shape using microspheres 2 and does not have an elastic support portion, it has high durability and reliability, and can be opened and closed simply by moving the microspheres 2 by an external magnetic field. In addition, since the frictional force between the flow paths A and B and the microspheres 2 is reduced by the blocking mechanism due to the movement of the microspheres 2, the opening and closing of the flow paths A and B and the flow rates are stable even when the pressure difference is large. Adjustment can be performed smoothly.

  The electromagnet 5 is not an essential component and may be replaced with a permanent magnet. In this case, for example, by cutting off the power supply to the electromagnet 4, the microsphere 2 can be moved downward in the housing portion 1 b using magnetic force and its own weight.

  FIG. 3A is a side sectional view similar to FIG. 1 showing the flow rate regulator according to the second embodiment, but the description of the same configuration is omitted. The housing 1 includes four receiving portions 1b in the form of bag holes opened at the center of the flat upper surface 1a, a groove 3a to be placed if necessary, and four upper portions extending from the left and right ends toward the center on the upper surface 1a. It has a channel groove 1c having a U-shaped cross section, a concave shape, or a circular shape that communicates with the accommodating portion 1b in series. In each accommodating part 1b, the microsphere 2 which is a ferromagnetic material is arrange | positioned similarly to the example shown to FIG.

  In FIG. 3A, a plate-like lid member 3 is attached so as to be in close contact with the upper surface 1a of the block-like housing 1. By covering the upper part of the flow channel groove 1c with the lid member 3, the non-magnetic fluid flow channels A, B, C, D, and E are formed, and the four accommodating portions 1b are simultaneously shielded. The two storage portions 1b communicate with only the adjacent storage portions 1b and 1b through the flow paths B, C, and E, and the two storage portions 1b at both ends communicate with the outside through the flow paths A and E. The passages B and D communicate with the adjacent accommodating portion 1b.

  In FIG. 3A, the electromagnet 4 is attached to the upper surface of the lid member 3 so as to oppose each housing portion 1b, and the lower surface of the lid member 3 constitutes a part of the housing portion 1b. If necessary, a groove 3a is formed. Furthermore, an electromagnet 5 is attached to the lower surface of the housing 1 so as to face each housing portion 1b. Although the electromagnets 4 and 5 constitute a magnetic force generation means, in the present embodiment, the electromagnets 4 and 5 can independently generate a magnetic force. Note that, as in the modification shown in FIG. 3B, the microspheres 2 are formed in the housing 1 by extending the housing portions 1 b of the housing 1 in the in-plane direction perpendicular to the flow paths A to E from the depth direction. It is good also as a form which moves along 1 accommodating part 1b. In this case, the electromagnets 4 and 5 are respectively attached to the side surfaces of the housing 1 so as to correspond to the microspheres 2.

  The operation of this embodiment will be described. In FIG. 3 (a), the inlet-side flow path A is connected to a nonmagnetic fluid reservoir (not shown), and the outlet-side flow path E is connected to a location (not shown) to which the nonmagnetic fluid is to be supplied. It shall be. Here, when power is supplied to all the electromagnets 5 from an external power source (not shown) and no power is supplied to all the electromagnets 4, magnetism is generated only from all the electromagnets 5, and each microsphere 2 is It is attracted toward the electromagnet 5 (for example, downward in FIG. 3A) by the magnetic force in the housing portion 1b, and comes into contact with the bottom surface of the housing portion 1b (becomes the second position). At this time, the flow paths A to E are not blocked by any of the microspheres 2, and the nonmagnetic fluid flows from the inlet side flow path A to the outlet side flow path E at a relatively large flow rate.

  Here, when power supply to all the electromagnets 5 is cut off from an external power source and power is supplied to all the electromagnets 4, magnetism is generated only from all the electromagnets 4. The magnet 1 is attracted toward the electromagnet 4 (for example, upward in FIG. 3A) by the magnetic force, and comes into contact with the lower surface of the lid member 3 (becomes the first position). At this time, since all the microspheres 2 are positioned between the inlet-side channel A and the outlet-side channel E, the channel resistance increases, and the inlet-side channel A of the non-magnetic fluid exits from the outlet-side channel A. The flow to the path E is suppressed.

  On the other hand, for example, as shown in FIG. 3A, when power is supplied only to the second electromagnet 4 from the left and the first, third, and fourth electromagnets 5 from the left, the second microsphere from the left Only 2 is in the first position, and the other three microspheres 2 are in the second position. That is, since only one microsphere 2 blocks the flow paths A to E, the flow rate is adjusted so that a nonmagnetic fluid having a flow rate corresponding to the flow path resistance flows through the flow path. Obviously, if power is supplied only to an arbitrary number and position of the electromagnets 4 and 5, the number and positions of the microspheres 2 that block the flow paths A to E change. The flow rate of the non-magnetic fluid passing through the fluid changes. If the number of the accommodating portions 1b and the microspheres 2 is increased, fine flow rate adjustment can be made accordingly. By adopting such a multi-stage arrangement structure, the flow rate ratio at the time of opening and closing can be easily increased.

  Fig.4 (a) is sectional drawing similar to Fig.3 (a) of the flow regulator concerning the modification of 2nd Embodiment. In the modification shown in FIG. 4A, each accommodating portion 1b extends at an angle rather than at a right angle with respect to the longitudinal direction of the flow channel 1c and the upper surface 1a. Other configurations are the same as those in the second embodiment, and thus the description thereof is omitted. According to this modification, it is possible to provide a pump function that increases the feed flow rate by arranging a plurality of the accommodating portions 1b with an inclination. Note that, as in the modification shown in FIG. 4B, the microspheres 2 are formed by lengthening the accommodating portions 1b of the housing 1 in the in-plane direction inclined with respect to the flow paths A to E from the depth direction. It is good also as a form which moves along the accommodating part 1b of the housing 1. FIG. In this case, the electromagnets 4 and 5 are respectively attached to the side surfaces of the housing 1 so as to correspond to the microspheres 2.

  FIG. 5 is an exploded perspective view of the flow regulator according to the third embodiment, in which the housing 1 and the lid member 3 are separated. In the present embodiment, with respect to the embodiment of FIGS. 1 and 2, the housing portion 1b formed in the housing 1 extends perpendicularly to the upper surface 1a of the housing 1 and in the longitudinal direction of the flow channel groove 1c. Thus, the electromagnets 4 and 5 are bonded to both side surfaces of the housing 1 so as to face the accommodating portion 1b. The electromagnets 4 and 5 may be attached to the lower surface of the housing 1 or the upper surface of the lid member 3. The accommodating part 1b has a microsphere 2 disposed therein so as to roll freely. The flow channel 1c is connected closer to the electromagnet 4 with respect to the accommodating portion 1b. In addition, providing the accommodating part 1b in multiple numbers is arbitrary, and you may incline the accommodating part 1b in arbitrary directions.

  The operation of this embodiment will be described. In FIG. 5, the inlet-side flow path A is connected to a nonmagnetic fluid reservoir (not shown), and the outlet-side flow path B is connected to a location (not shown) to which the nonmagnetic fluid is to be supplied. To do. Here, when power is supplied to the electromagnet 5 from an external power source (not shown) and power is not supplied to the electromagnet 4, magnetism is generated only from the electromagnet 5, and the microsphere 2 is generated by the magnetic force in the housing portion 1b. It attracts | sucks toward the electromagnet 5 (right side in FIG. 5), and contacts the right side surface of the accommodating part 1b (it becomes a 2nd position). At this time, the channels A and B are not blocked by the microspheres 2, and the nonmagnetic fluid flows from the inlet side channel A to the outlet side channel B at a relatively large flow rate.

  On the other hand, when the power supply from the external power source to the electromagnet 5 is cut off and the electric power is supplied to the electromagnet 4, magnetism is generated only from the electromagnet 4, whereby the microsphere 2 is electromagnet 4 ( It is sucked toward the left in FIG. 5 and comes into contact with the left side surface of the accommodating portion 1b (becomes the first position). At this time, since the microspheres 2 are positioned between the inlet-side flow path A and the outlet-side flow path B, the flow resistance increases, and the non-magnetic fluid inlet-side flow path A to the outlet-side flow path B. The flow to is suppressed.

  FIG. 6A is a side sectional view similar to FIG. 1 of the flow rate regulator according to the fourth embodiment, and FIG. 6B is a VIB-VIB line showing the configuration of FIG. It is the figure which cut | disconnected and looked at the arrow direction. FIG. 6C is a top view showing the modified example of the fourth embodiment with the lid member 3 removed. In the present embodiment, a groove 3a constituting a part of the accommodating portion 1b is formed on the lower surface of the lid member 3 as compared with the embodiment of FIGS. Further, the cross section of the flow channel groove 1c formed on the upper surface of the housing 1 has a semicircular shape, and the cross section of the flow channel groove 3b formed on the lower surface of the lid member 3 opposite thereto has a semicircular shape. Accordingly, when the lid member 3 is bonded to the housing 1, the cross sections of the flow paths A and B formed by the flow groove 1c and the flow groove 3b are circular. The other configuration is the same as that of the embodiment of FIGS. In addition, as shown in FIG. 6C, the microsphere 2 becomes the housing portion 1 b of the housing 1 by making the housing portion 1 b of the housing 1 longer in the in-plane direction perpendicular to the flow paths A and B than the depth direction. It is good also as a form which moves along. In this case, the electromagnets 4 and 5 are attached to the side surfaces of the housing 1 corresponding to the microspheres 2.

  The operation of this embodiment will be described. In FIG. 6, the inlet-side flow path A is connected to a nonmagnetic fluid reservoir (not shown), and the outlet-side flow path B is connected to a location (not shown) to which the nonmagnetic fluid is to be supplied. To do. Here, when power is supplied to the electromagnet 5 from an external power source (not shown) and power is not supplied to the electromagnet 4, magnetism is generated only from the electromagnet 5, and the microsphere 2 is generated by the magnetic force in the housing portion 1b. It attracts | sucks toward the electromagnet 5 (downward in FIG. 6), and contacts the bottom face of the accommodating part 1b (it becomes a 2nd position). At this time, the channels A and B are not blocked by the microspheres 2, and the nonmagnetic fluid flows from the inlet side channel A to the outlet side channel B at a relatively large flow rate.

  On the other hand, when the power supply from the external power source to the electromagnet 5 is cut off and the electric power is supplied to the electromagnet 4, magnetism is generated only from the electromagnet 4, whereby the microsphere 2 is electromagnet 4 ( 6 (upward in FIG. 6), and comes into contact with the bottom surface of the groove 3a of the lid member 3 (becomes the first position). At this time, as shown in FIG. 6B, if the center line of the outlet side flow path B passes through the center of the microsphere 2, the microsphere 2 moved to the first position becomes the outlet side flow path B. The opening is just closed. Thereby, since it is suppressed that a nonmagnetic fluid flows out to the exit side flow path B, a flow regulator can be functioned also as a microvalve which can be completely closed.

  FIG. 7A is a side sectional view of the flow rate regulator according to the fifth embodiment, and FIG. 7B is a cross-sectional view taken along line VIIB-VIIB in FIG. 7A. The lid member 3 is removed and shown in FIG. FIG. 7C is a top view showing the modified example of the fifth embodiment with the lid member 3 removed. In the present embodiment, a plurality of microspheres 2 are arranged in a single housing portion 1b formed in the housing 1 as compared with the embodiment of FIGS. (In FIG. 7, as an example, three microspheres 2 (two in total) in two rows in a single accommodating portion 1b are arranged with little gap). Further, facing each microsphere 2, electromagnets 4 and 5 capable of operating each microsphere 2 simultaneously or independently are attached to the lower surface of the housing 1 and the upper surface of the lid member 3, respectively. Since other configurations are the same as those in the above-described embodiment, the description thereof is omitted. 7C, the housing portion 1b of the housing 1 is elongated in the in-plane direction perpendicular to the flow paths A and B from the depth direction, so that the plurality of microspheres 2 are accommodated in the housing 1. It is good also as a form which moves independently along the part 1b. In this case, the electromagnets 4 and 5 are respectively attached to the side surfaces of the housing 1 so as to correspond to the microspheres 2.

  The operation of this embodiment will be described. 7 (a) and 7 (b), when the microsphere 2 moves in the vertical direction, the inlet-side channel A is connected to a non-magnetic fluid reservoir (not shown), and the outlet-side channel B is non-magnetic. It is assumed that it is connected to a location (not shown) to which a fluid is to be supplied. Here, when power is supplied to all the electromagnets 5 from an external power source (not shown) and no power is supplied to all the electromagnets 4, magnetism is generated only from all the electromagnets 5, and each microsphere 2 is It is attracted toward the electromagnet 5 (downward in FIG. 7A) by the magnetic force in the housing portion 1b, and comes into contact with the bottom surface of the housing portion 1b (becomes the second position). At this time, the flow paths A and B are not blocked by any of the microspheres 2, and the nonmagnetic fluid flows from the inlet side flow path A to the outlet side flow path E at a relatively large flow rate.

  Here, when power supply to all the electromagnets 5 is cut off from an external power source and power is supplied to all the electromagnets 4, magnetism is generated only from all the electromagnets 4. The magnet 1 is attracted toward the electromagnet 4 (upward in FIG. 7A) by a magnetic force and comes into contact with the lower surface of the lid member 3 (becomes the first position). At this time, since all the microspheres 2 are positioned between the inlet-side channel A and the outlet-side channel B, the channel resistance increases, and the non-fluidic fluid flows from the inlet-side channel A to the outlet-side channel. The flow to the path B is suppressed.

  On the other hand, by adjusting the supply state of electric power to each of the electromagnets 4 and 5, the microspheres 2 that come into contact with the lower surface of the lid member 3 can be arranged in an arbitrary pattern in the accommodating portion 1b. For example, in FIG. 7B, the microsphere 2 in the first position is indicated by hatching, and the microsphere 2 in the second position is indicated by white, so that the microsphere that contacts the lower surface of the lid member 3 is shown. The balls 2 can be arranged in a staggered pattern. That is, since the number and position of the microspheres 2 that block between the flow paths A and B can be arbitrarily changed, the flow rate of the nonmagnetic fluid that passes through the flow rate regulator changes accordingly. If the number of microspheres 2 in the accommodating portion 1b is increased, fine flow rate adjustment can be made accordingly. Thus, by opening and closing the outlet side flow path B using the plurality of microspheres 2, the microsphere 2 functions as a mechanical destruction device or a filtration device for fine particles conveyed along the flow of the nonmagnetic fluid. It is possible. In addition, if the microsphere 2 is moved to the 1st position or the 2nd position one by one, the structure which performs a flow rate change gradually is also attained. In FIG. 7C, when the microsphere 2 moves in the in-plane direction, the electromagnets 4 and 5 may be attached to the upper surface of the housing 1 or the lower surface of the lid portion 3.

  FIG. 8 is a top view of the flow rate regulator according to the sixth embodiment, with the lid member removed. In the present embodiment, a plurality of (for example, five) accommodating portions 1b are formed in the housing 1 with respect to the embodiments of FIGS. 1 and 2, and the inlet-side channel A has one inlet. In total, five branches are formed so as to branch into and communicate with the five accommodating portions 1 b and further to have the outlet side flow paths B to F extending from the respective accommodating portions 1 b to the outside of the housing 1. Microspheres 2 are arranged in each accommodating portion 1b. Further, electromagnets (not shown) are respectively attached to the lower surface of the housing 1 and the upper surface of the lid member 3 so as to face each microsphere 2. Since other configurations are the same as those in the above-described embodiment, the description thereof is omitted. In addition, each microsphere 2 may take the form which moves to the surface direction of the housing 1 similarly to FIG.6 (c) and FIG.7 (c).

  The operation of this embodiment will be described. In FIG. 8, when the microsphere 2 moves in the vertical direction, the inlet-side flow path A is connected to a nonmagnetic fluid reservoir (not shown), and the outlet-side flow paths B to F should supply the nonmagnetic fluid. It is assumed that it is connected to a location (not shown). According to this Embodiment, the microsphere 2 which contacts the lower surface of a cover member can be arbitrarily set by adjusting the supply state of the electric power to each electromagnet. For example, in FIG. 8, the microspheres 2 at the first position are indicated by hatching, and the microspheres 2 at the second position are indicated by white lines. 2 is blocked, and the outlet side channels C and E are open. Thereby, a nonmagnetic fluid can be supplied only to a required location. In this way, by selecting the non-magnetic fluid that has entered from one inlet-side flow path A to the outlet-side flow paths B to F, the flow rate regulator can be used to carry fine particles or the like that are carried on the fluid flow. It can function as a microvalve that performs sorting. When the microsphere 2 moves in the in-plane direction, the electromagnets 4 and 5 may be attached to the upper surface of the housing 1 or the lower surface of the lid portion 3.

Next, a method for forming the fine channel groove 1c in the housing 1 (or the lid member 3) will be described. Examples of such a forming method include the following three methods. Hereinafter, the material of the housing or the lid member is referred to as a substrate S.
(1) Etching channel processing method:
This is a method of processing the fine groove Sg for the flow path on the substrate S using wet etching or dry etching. FIG. 9 shows a process flow of the etching channel processing method. First, as an etching mask layer EM for protecting the portions other than the etched portion, chromium or the like is formed on the upper surface of the substrate S by vacuum deposition, spuck ring, or the like (see FIG. 9A). Next, the resist RS is coated on the upper surface of the etching mask layer EM with a uniform thickness by spin coating (see FIG. 9B). Then, after performing RS patterning (pattern transfer) of the resist in the shape of the fine channel groove 1c by photolithography and other exposure techniques (see FIG. 9C), the etching mask layer EM is etched (see FIG. 9). 9 (d)), the substrate S is etched (see FIG. 9 (e)), and finally the unnecessary etching mask layer EM and the resist RS are removed to form a fine groove Sg in the substrate S. I do. The accommodating portion can be formed in the same manner.

Examples of the material structure used for the etching channel processing method are shown below.
(Example 1) Substrate: quartz or glass / etching mask: Cr or the like / resist: photoresist / mask etching solution: Cr etchant / substrate etching: hydrofluoric acid solution (wet etching)
(Example 2) Substrate: silicon / etching mask: SiO ₂ + Cr, etc./resist: photoresist / mask etching solution: Cr etchant (diammonium cerium nitrate + perchloric acid), SiO ₂ etchant (hydrofluoric acid buffer solution) / Substrate etching: Wet etching using KOH or TMAH, or dry etching using SF ₆ , plasma etching, RIE etching)

(2) Channel processing method using membrane material:
This is a method of processing a fine groove for a channel in a film material formed on a substrate. 10 and 11 show the process flow of the flow path processing method using a membrane material. In this method, a fine groove can be formed by exposing a photosensitive film material, i) when using a photosensitive material, and ii) when using a non-photosensitive material that processes the film material on the substrate by etching. and so on.

i) When a photosensitive material is used, a photoresist PR is applied on the substrate S (see FIG. 10A), patterned by photolithography or other exposure technique (see FIG. 10B), and further developed. As a result, a part of the photoresist PR can be removed to form a fine groove Sg (see FIG. 10C).

ii) When a non-photosensitive material is used, a manufacturing method similar to the etching channel processing method described with reference to FIG. 9 is used. More specifically, the film material PR, the etching mask EM, and the resist RS are formed on the upper surface of the substrate S in this order (see FIG. 11A). Next, after performing RS patterning (pattern transfer) of the resist to the shape of the fine groove Sg by photolithography or other exposure technique (see FIG. 11B), the etching mask layer EM is etched (FIG. 11). (See (c)), the film material PR is etched (see FIG. 11D), and finally, the unnecessary etching mask layer EM and the resist RS are removed, and the fine groove Sg is formed in the film material PR. Form. The accommodating portion can be formed in the same manner.

  Examples of the material configuration used in the flow path processing method using a membrane material are shown below. Note that glass or silicon can be used as the substrate, but various materials can be used as long as the material is not specified and the material is not specified. In particular, when silicon is used as the film material, an SOI substrate can be used.

(Example 1 using photosensitive material) Film material: photo-curing resin, thick film resist or photosensitive polyimide (Example 2 using non-photosensitive material) Film material: SiO ₂ glass, etc./resist: photoresist / etching mask : Cr, etc./film etching: hydrofluoric acid solution (wet etching)
(Example 3 using non-photosensitive material) Film material: Polyimide etc./Resist: Photoresist / Etching mask: Cr, SiO ₂ etc./Etching of film: Wet etching using KOH or TMAH)
(Example 4 using non-photosensitive material) Film material: Resist etc./Resist: Photoresist / Etching mask: SiO ₂ etc./Etching film: Dry etching using O ₂ gas (Example using non-photosensitive material) 5) Film material: silicon etc./resist: photoresist / etching mask: Cr, SiO ₂ etc./film etching: wet etching using KOH or TMAH or dry etching using SF ₆

Note that the SiO ₂ etchant is a hydrofluoric acid buffer solution, and the etching of the silicon substrate is preferably wet etching using KOH or TMAH or dry etching using SF ₆ . In the flow path processing method using the film material, the depth of the flow path may be processed to be shallower than the film thickness of the film material.

(3) Channel processing method by molding using a mold:
This uses a mold prepared for transferring a fine groove pattern for a flow path, and forms a fine groove for the flow path by transferring a shape that is opposite to the surface shape of the mold. Although it is a technique, it is suitable for mass production. A molding method in which PDMS (polydimethylsiloxane) or silicon rubber or the like is molded on a mold and a molding method in which the plastic is pressed against the mold while being pressed may be used.

  FIG. 12 is a diagram showing a process flow for forming fine grooves from a mold to PDMS. In FIG. 12A, a mold M having convex portions corresponding to fine grooves is manufactured. Subsequently, as shown in FIG. 12B, the fine groove Sg is transferred and formed on the PDMS by the convex portion of the mold M. Further, as shown in FIG. 12C, by releasing the PDMS from the mold M, a housing or the like having a fine groove Sg can be formed.

  FIG. 13 is a diagram showing a process flow for forming fine grooves in a resin from a mold. In FIG. 13A, a mold M having convex portions corresponding to fine grooves is manufactured. Subsequently, as shown in FIG. 13B, the fine groove Sg is transferred and formed by covering the convex portion of the mold M with the molten resin PL. Further, after the resin PL is solidified, as shown in FIG. 13C, the resin PL is released from the mold M, so that a housing or the like having the fine groove Sg can be formed.

  In addition, adhesive, photo-curing resin, and thermosetting resin can be basically used for bonding the housing and the lid member, but in order to improve pressure resistance, direct bonding of quartz or silicon, glass and Various bonding methods such as anodic bonding of silicon, fluoric acid bonding using hydrofluoric acid between glass, and mechanical fixing method may be used.

  As described above, according to the present embodiment, the flow path can be opened and closed or the flow rate can be adjusted by the movement of the microspheres using an external magnetic field. Since an excellent valve can be realized, it can also be used for transporting high-viscosity oil and transporting fluid using a high-pressure flow. In addition, since it is a simple structure, it is extremely excellent in miniaturization and integration, and in particular it can improve the opening and closing function as a valve by arranging it in series, and it can adjust the flow rate function by operating individually, It can function as a micropump. Furthermore, by controlling the external magnetic field and opening and closing the flow path by combining multiple channels, it is possible to transport various fine particles other than magnetic substances that have flowed into the fluid, for example, even if cells pass through biological materials such as cells and DNA. It is also possible to select an efficient transport route without being destroyed. In addition, it can also be used as a mechanical switch for optical switches, microparticles, cells, etc., and as a filter for minute objects. As described above, it is possible to realize multifunctional applications and reduce production costs by integrating and arranging microspheres.

  The present invention has been described above with reference to the embodiments. However, the present invention should not be construed as being limited to the above-described embodiments, and can be modified or improved as appropriate.

It is side surface sectional drawing of the flow volume regulator concerning this Embodiment. 2A is a view of the configuration of FIG. 1 taken along line II-II and viewed in the direction of the arrow, and FIG. 2B is a view of a flow regulator according to another example. FIG. Fig.3 (a) is side sectional drawing similar to FIG. 1 which shows the flow volume regulator concerning 2nd Embodiment, FIG.3 (b) is a cover member in the modification of 2nd Embodiment. It is a top view shown in the state where 3 was removed. FIG. 4A is a cross-sectional view similar to FIG. 3 of the flow rate regulator according to the modified example of the second embodiment, and FIG. 4B is a further modified example in which the lid member 3 is removed. It is a top view shown in the state. It is a disassembled perspective view of the flow regulator concerning 3rd Embodiment. FIG. 6A is a side sectional view similar to FIG. 1 of the flow rate regulator according to the fourth embodiment, and FIG. 6B is a VIB-VIB line showing the configuration of FIG. It is the figure which cut | disconnected and looked at the arrow direction. FIG. 6C is a top view showing the modified example of the fourth embodiment with the lid member 3 removed. FIG. 7A is a side sectional view of the flow rate regulator according to the fourth embodiment. FIG. 7B is a cross-sectional view taken along line VIIB-VIIB in FIG. 7A. FIG. FIG. 7C is a top view showing the modified example of the fifth embodiment with the lid member 3 removed. It is a top view of the flow regulator concerning a 5th embodiment. It is a figure which shows the process flow of an etching flow-path processing method. It is a figure which shows the process flow of the flow-path processing method using the photosensitive film | membrane material. It is a figure which shows the process flow of the flow-path processing method using a non-photosensitive film | membrane material. It is a figure which shows the process flow which forms a fine groove | channel from a metal mold | die to PDMS. It is a figure which shows the process flow which forms a fine groove | channel in resin from a metal mold | die.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Housing 1a Upper surface 1b Accommodating part 1c Channel groove 2 Microsphere 3 Lid member 3a Groove 3b Channel groove 4, 5 Electromagnets A, B, C, D, E, F Channel

Claims (10)

A magnetic valve member capable of moving between a first position and a second position in the flow path of the non-magnetic fluid;
Magnetic force generating means for generating a magnetic force so as to move the valve member from at least the first position to the second position;
When the valve member moves to the first position, the flow rate of the nonmagnetic fluid that flows in the flow path is such that the nonmagnetic fluid that flows in the flow path when the valve member moves to the second position. The flow rate regulator characterized by being less than the flow rate.   The magnetic force generating means moves the valve member from the first position to the second position, or moves the valve member from the second position to the first position. The flow rate regulator according to claim 1, wherein a magnetic force is selectively generated.   3. The flow rate regulator according to claim 1, wherein a plurality of the valve members are provided, and the magnetic force generation unit generates a magnetic force so that any of the valve members moves.   The housing | casing provided with the groove | channel which communicates with the accommodating part of the said valve member and the said accommodating part, and the cover member which shields the said accommodating part and the said groove | channel is provided. The flow regulator described in 1.   The flow rate regulator according to claim 4, wherein at least a part of the housing portion is formed on the lid member.   The flow rate regulator according to claim 4, wherein the lid member is a plate material.   After forming an etching mask and a resist on the material of the housing in this order, the groove removes a part of the resist by exposure and development, and further removes the resist and the etching mask by an etching process. It is formed by this, The flow regulator in any one of Claims 4-6 characterized by the above-mentioned.   After forming the film material, the etching mask, and the resist in this order on the material of the housing, the groove removes a part of the resist by exposure and development, and further performs an etching process to remove the resist, the etching mask, and the resist. The flow rate regulator according to claim 4, wherein the flow rate regulator is formed by removing a part of the membrane material.   The flow rate according to claim 4, wherein the groove is formed by removing a part of the resist by exposure and development after forming a resist on the material of the housing. Adjuster. The flow rate regulator according to claim 4, wherein the groove is formed using a mold.

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