JP2009147390A - Transport device in lamination apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transport device which has a release sheet function and reasonably conveys an object to be worked without damaging a lamination function in a lamination apparatus. <P>SOLUTION: The transport device includes an upper chamber 10 in which the inside is partitioned by a diaphragm 9 and a lower chamber 12, and conveys the object (A) to be worked in the lamination apparatus L with or without a heating device 11 in the lower chamber 12, wherein a belt 14 for conveyance is arranged below the object (A) so that the belt 14 passes only over two facing sides in the conveyance direction among four sides of the chamber. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a transport device for transporting a workpiece in a laminating apparatus for manufacturing solar cell panels and the like.

  As a laminating apparatus for manufacturing a solar cell panel, it is disclosed in publications such as Patent Document 1 and Patent Document 2, but a conventional general laminating apparatus has an upper chamber having a diaphragm that is expandable downward. And a lower chamber provided with a heat generating plate. A heat generating plate provided in the lower chamber has a lowermost layer made of a glass plate, and a sheet-like filler, a solar cell, and a sheet-like filler. By laminating sequentially, placing the workpiece with the sheet-like back material on top, depressurizing the upper and lower chambers, heating the workpiece, and introducing the atmosphere into the upper chamber The workpiece is laminated by pressing between the upper surface of the heat generating plate and the diaphragm.

  In the above, the upper chamber and the lower chamber are decompressed, that is, evacuated, so that bubbles do not remain in the workpiece, and the reason is that the solar cells are exposed to sunlight with bubbles remaining. This is because when the temperature rises, the bubbles expand and the deterioration is accelerated.

  The workpiece is heated by the heating plate, but the temperature of the heating plate is controlled to the set temperature, and after a certain amount of time has elapsed, the workpiece becomes substantially the same as the temperature of the heating plate, so the set temperature is filled. By keeping the melting point higher than the melting point of the material, the filler is melted. By introducing the atmosphere only to the upper chamber, the diaphragm expands and presses the work piece against the heating plate to join them together. Therefore, after this joining, the lower chamber is returned to atmospheric pressure, the lid is opened, and the workpiece is carried out.

  On the other hand, EVA (ethylene vinyl acetate) or the like is used as the filler. When this EVA resin is used, the EVA resin melts at about 80 to 100 ° C. Therefore, in the laminating apparatus, the resin is melted at a temperature equal to or higher than the above temperature, and the pressure bonding is performed. The resin alone is not stable and must be cross-linked. The conditions for crosslinking vary depending on the characteristics of the resin. In the case of EVA resin, it is moderately crosslinked by holding it at a temperature of about 150 ° C. for about several minutes to 20 minutes, but it takes a relatively long time. This step may be performed not in the laminating apparatus but in a separate oven apparatus or conveyor furnace.

  The size of the filler is usually about several millimeters larger than the lowermost glass layer of the workpiece, but this is to ensure sealing at the end face. Then, the portion of the filler that protrudes from the glass adheres to the heat generating plate, and in this state, when the next workpiece is carried into the laminating apparatus, the filler adheres to the lower surface of the glass, and the removal is not possible. It becomes difficult. As a means for preventing this, there is a method in which two sheets having good peelability (hereinafter referred to as release sheets) are prepared, and the workpiece is put in a laminating apparatus with the workpiece sandwiched between them.

  As a release sheet, a glass cloth sheet impregnated with a fluororesin is useful, and even if EVA resin adheres to it, it can be easily removed. In reality, the protruding filler remains on the heat generating plate and the diaphragm in the chamber. In addition, when a release sheet is used and the work piece is sandwiched and conveyed, it is necessary to cover the release sheet, peel it off, or remove the adhering filler. Has to be done manually, resulting in high costs.

JP-A-9-14743 Utility Model Registration Gazette No. 3037201

  In view of the conventional technology as described above, the present invention provides a conveying apparatus that has a release sheet function and rationally conveys a workpiece without impairing the laminating function. It is what.

  The structure of the present invention made for the purpose of solving the above-mentioned problems is to convey a workpiece in a laminating apparatus which has an upper chamber and a lower chamber partitioned by a diaphragm and which is not provided with a heating device in the lower chamber. A conveying device, characterized in that a conveying belt is arranged on the lower side of a workpiece so that the belt passes across only two opposite sides of the four sides of the chamber in the conveying direction. To do.

  That is, the present invention uses a belt as a conveying means in a laminating apparatus having an upper chamber formed by partitioning a diaphragm attached to a lid of a vacuum vessel and a lower chamber formed in the vacuum vessel itself, and the belt is Of the four sides of the chamber, it passes over only two sides facing each other in the transport direction. When the lid of the vacuum container is closed in this way, the part of the belt chamber that extends over the two sides is sandwiched by the lid, but the other two sides are not sandwiched by the lid. When the lower chamber of the vacuum vessel is evacuated, the gas (air) in the workpiece on the belt can be degassed. The portion sandwiched between the belt lids will straddle the upper and lower chamber sealing materials, but by making the sealing material flexible and compressible and the belt thickness moderate, vacuum leakage from this part It can be prevented to the extent that there is no problem in processing. Incidentally, the compression amount of the sealing material is about several mm, the thickness of the belt is about 0.1 to 0.5 mm, and the material of the belt is preferably the same as that of the above-described release sheet.

  It is preferable to use a belt that is connected in an annular manner so that it can be separated at one or more locations. This is because the filler often protrudes and adheres to the belt during processing of the workpiece, and the adhering filler is removed after processing. However, if this removal operation is repeated, the belt is damaged and replaced. In order to cope with the need to do this, it is possible to replace only the damaged part of the belt, which is economical.

  The workpiece is usually evacuated, heated, and pressure bonded in a laminating apparatus equipped with a heating device. During this processing, as described above, the filler protrudes and adheres to the belt. However, since the protruding filler is soft and adhesive when hot, the workpiece is not easily peeled off from the belt, and when cooled to some extent, it solidifies and the workpiece is easily peeled off from the belt. Therefore, in the present invention, a section in which the workpiece can be allowed to cool is provided on the carry-out side of the belt.

  A sealing material is attached to the surface of the laminating apparatus in contact with the vacuum container and its lid in order to eliminate vacuum leakage. The upper surface of the heating device is slightly higher than the sealing material so that the conveying belt slides on the upper surface of the heating device. This is to prevent the seal material from being worn by driving the belt. However, in this case, if the lid is closed while tension is applied to the belt, the upper surface of the heating device is high, so that the belt is further stretched, and the belt is excessively tensioned and damaged. Therefore, in the present invention, a plurality of rollers are provided, and one or more of them are moved by an actuator, and the lid is closed in a state where the belt tension is loosened, so that the belt is not damaged.

  In the present invention, in addition to the release sheet function of the lower surface of the workpiece by the conveyor belt, a covering belt similar to the conveyor belt is covered on the workpiece, A release sheet function was added. This is due to an error in the position when the workpieces are stacked before laminating, the displacement of the stacked positions when the workpieces are put into the laminating device, and the size error of the workpieces. When pressurized, the filler may protrude from the back surface, and the protruding filler may adhere to the diaphragm and hinder the expansion of the diaphragm. It is possible to prevent the filler protruding from the back material from adhering to the covering belt and adhering to the diaphragm. Incidentally, the diaphragm is usually made of a heat-resistant rubber sheet and needs to be stretched when pressurized, but if the filler adheres, it will hinder the growth of the adhered part, so the neighboring part will stretch. If it is repeatedly used as it is, it will tear from this part, and if air is introduced into the upper chamber during pressurization, air will flow into the lower chamber. As the degree of vacuum worsens, a sufficient pressure difference cannot be maintained between the upper chamber and the lower chamber, the pressurization becomes insufficient, and the workpiece becomes a defective product.

  In the present invention, the belt can be made to last longer by removing the filler adhering to the belt by applying a brush to the conveying belt or the conveying belt and the covering belt.

  In the above-described present invention, the non-hole conveying belt of the conveying device has a release function, but instead, a plurality of holes communicating with the chamber as conveying means are provided below the workpiece. A belt may be passed through and the four sides of the chamber may be covered with the belt, and the covering belt may be the same as the conveying belt.

  In order to realize the above-described release function on the upper side of the work piece, rolls for winding the belt are provided on the loading side and the unloading side of the laminating apparatus, respectively, and the belt is fed from one roll and wound by the other roll. You may make it take.

  Further, the belt may be formed in an annular shape so as to pass between the upper chamber and the lower chamber of the laminating apparatus.

  The portion where the separation and connection of the conveyor belt described above can be made thicker than the other portions of the belt, so if this portion is sandwiched between the lids of the laminating apparatus, depending on the sealing material, the lower chamber When evacuated, vacuum leakage may occur. In order to prevent this, a detecting means for detecting the belt connecting portion and a detecting means for detecting the belt moving amount are provided, and after the belt connecting portion is detected, the lid does not sandwich this portion. When the amount is moved, the belt may be stopped so that the workpiece can be conveyed to a position where the connection portion is not sandwiched between the lids.

  In the above case, a belt conveyance start switch is provided, and the operator of the apparatus stops the belt conveyance by checking the connection between the workpiece and the belt for conveyance visually and turning the switch off. In this case, the belt can be stopped at a position where the connecting portion is not sandwiched by the lid.

  The present invention is as described above, and is a conveying device that conveys a workpiece in a laminating apparatus that has an upper chamber and a lower chamber partitioned by a diaphragm and is not provided with a heating device in the lower chamber. A conveyor belt is arranged below the workpiece so that the belt passes across only two opposite sides of the four sides of the chamber in the conveyance direction, or the conveyor belt Using a belt with holes communicating with the chamber on both sides, the belt extends over the four sides of the chamber in the same manner as described above, or the belt for covering is covered with the belt for transportation. It is configured so that the workpiece is covered and conveyed while being sandwiched between two belts for conveyance and coating, and the belt is provided with a release function so that the conventional device can be mounted. Able to dispel the problems, when applied to a laminating apparatus for a solar cell, it is possible to obtain very good solar panel quality.

  That is, for the solar cell in which the lowermost layer is a glass plate, a sheet-like filler, a solar battery cell, and a sheet-like filler are sequentially laminated thereon, and a back surface material is disposed on the uppermost part. In a laminating machine, when a belt is placed under, above and below the work piece, and the work piece is heated and pressed to carry out the laminating process, even if the filling material protrudes due to heating, the overflowing filling material is conveyed. Or, it adheres to the conveyor belt and the coating belt and does not adhere to the heat generating plate, and the conventional removal work of the filler from the heat generating plate becomes easier. The quality of the obtained solar cell panel is extremely good.

Sectional drawing which shows the structure of a to-be-processed object. Sectional drawing of the lamination apparatus in the state where the lid | cover is open. FIG. 3 is a cross-sectional view showing a state in which the lid is closed from the state of FIG. The top view of the belt for conveyance in this invention. The top view of another example of the belt for conveyance. The top view of the junction part of a conveyance belt. The side view of the junction part of FIG. The figure which shows the conveyance state of an example of this invention conveying apparatus. The figure which shows the state which process complete | finished from the state of FIG. 8, and opened the lid | cover. The figure which shows the state which lifted the covering belt a little from the state of FIG. The figure which shows the state which is conveying the workpiece from the state of FIG. The figure which shows the state which raised the belt for covering to the still higher position from the state of FIG. The figure which shows the state which has rewound the belt for coating | cover from the state of FIG. The figure which shows the state which lowered | hung the covering belt to the original position from the state of FIG. The figure which shows the state which closed the lid | cover from the state of FIG. The figure which shows the example which made the belt for coating | cover cyclic | annular. The figure which shows the other example of FIG.

  Next, an embodiment of the present invention will be described with reference to an example in which a laminating apparatus for solar cells is used as a laminating apparatus. 1 is a cross-sectional view showing the structure of the workpiece, FIG. 2 is a cross-sectional view of the laminating apparatus in a state where the lid is open, and FIG. 3 is a state where the lid is closed and the lower chamber is evacuated from the state of FIG. FIG. 4 is a plan view of a conveying belt according to the present invention, FIG. 5 is a plan view of another example of FIG. 4, and FIG. FIG. 7 is a side view of FIG. 6, FIG. 8 is a diagram showing a conveyance state of an example of the conveyance device of the present invention, and FIG. 9 is a state where the processing is completed from the state of FIG. FIG. 10 is a view showing a state where the covering belt is slightly lifted from the state shown in FIG. 9, FIG. 11 is a view showing a state where a workpiece is being conveyed from the state shown in FIG. Is a diagram showing a state where the covering belt is raised to a higher position from the state of FIG. 11, and FIG. 13 is a state of FIG. FIG. 14 is a view showing a state where the covering belt is rewound, FIG. 14 is a view showing a state where the covering belt is lowered to the original position from the state of FIG. 13, and FIG. 15 is a state where the lid is closed from the state of FIG. FIG. 16 is a view showing an example in which the covering belt is formed in an annular shape, and FIG. 17 is a view showing another example of FIG.

  In FIG. 1, A is a workpiece to be laminated, and a sheet-like filler 2, solar cells 3, and sheet-like filler 5 are sequentially laminated on the lowermost glass plate 1. The back material 6 is arranged on the back. Reference numeral 4 denotes a ribbon-like electrode for connecting the solar cells 3.

  2 and 3, 7 is a vacuum vessel, 8 is a lid thereof, 9 is a diaphragm attached to the lid 8, 10 is an upper chamber formed by the lid 8 and the diaphragm 9, 11 is a heating plate attached to the vacuum vessel 7, Reference numeral 12 denotes a lower chamber formed by the vacuum vessel 7 and the diaphragm 9, and the vacuum vessel 7 and the lid 8 are sealed with a sealing material 13. 7a is a pipe connection port of the vacuum vessel 7, 8a is a pipe connection port of the lid 8, and both connection ports 7a and 8a are for both vacuuming and air introduction operations. The normal laminating apparatus is configured as described above, and the workpiece A is placed on the heating plate 11, and the lid 8 is applied to the vacuum container 7 as shown in FIG. And the vacuum vessel 7 is evacuated to press the diaphragm 9 against the heat generating plate 11 from the upper surface of the workpiece A, so that the heating of the heat generating plate 11 causes the fillers 2 and 5 to be melted and covered. After the workpiece A is defoamed and formed into a laminate, the lid 8 is removed and the laminate is taken out. In the present invention, since the workpiece A is conveyed, the heating plate 11 and the workpiece A are removed. The lower belt 14 for conveyance is arranged between the two and the workpiece A after being laminated is conveyed by the lower belt 14.

  As shown in FIG. 4, when the lower belt 14 passes through two opposite sides of the four sides of the chamber 12 and closes the lid 8 of the vacuum vessel 7, A portion of the belt 14 that extends over two sides of the chamber is sandwiched between the lids 8, and other portions are not sandwiched between the lids 8, so that gas can pass therethrough. Therefore, when the lower chamber 12 is evacuated, the gas (air) in the workpiece A can be degassed. Further, the portion sandwiched between the lids 8 extends over the sealing material 13, but by making the flexibility and compression amount of the sealing material 13 and the thickness of the belt appropriate, the vacuum leakage from this portion is processed. Can be prevented to the extent that there is no problem. As described above, the compression amount of the sealing material 13 is about several mm, and the thickness of the belt 14 is about 0.1 to 0.5 mm.

  Further, as described above, a glass cloth sheet impregnated with a fluororesin having a release function is useful as the material of the belt 14. The reason for this is that when the fillers 2 and 5 are heated and melted by the heating plate 11 during laminating, they protrude and adhere to the heating plate 11, causing the above-described problems. Since the filler 2 adheres to the lower belt 14, the conventional problem is eliminated.

  15 is an upper belt for covering the workpiece A, which is the same belt as the lower belt 14 and has a release function, and the fillers 2 and 5 that melt and protrude during the laminating process are diaphragms. This is for preventing the occurrence of defects due to adhesion to the substrate 9.

  In FIG. 4, 16 is a frame of the laminating apparatus L, 17 is a lower belt roller, 18 is a spherical bearing, 19 is a lower belt bracket, 20 is a lower belt linear guide, and 21 is a lower belt cylinder. , 22 is a carry-in conveyor, 23 is a section for cooling the workpiece A ′ after processing in the lower belt 14, and 24 is a gas flow path in the lower chamber 12.

  FIG. 5 is a plan view showing an example using a perforated belt 25 in which holes 26 are arranged on both sides in place of the lower belt 14. By using this perforated belt 25, the four sides of the chamber 12 are Even if covered, the hole 26 becomes a gas flow path, so that deaeration can be performed during the lamination process.

  6 is a plan view of the joint portion of the lower belt 14, FIG. 7 is a front view of FIG. 6, 27 is a belt connecting member having a hinge shape, and 28 is a pin passing through the connecting member 27. 28 allows the lower belt 14 to be separated and connected.

  FIGS. 8-15 illustrate the implementation state which conveys the to-be-processed object A by this invention conveying apparatus, and the upper side belt 15 is also used in these figures. The lower belt 14 is connected at a plurality of locations to form an annular shape, and is driven by attaching an actuator such as an electric motor to the drive roller 29, and the work A to be conveyed is the lower belt. A connection detector 30 for detecting the connection portion of the belt 14 is provided so as not to get on the joint portion of the belt 14, the joint of the belt 14 is detected by the detector 30, and the roller is detected by the rotation amount detector 31. By measuring the amount of rotation 29 and driving and stopping the belt 14 until the amount of movement of the lower belt 14 reaches a predetermined length, the workpiece A can be carried to a predetermined position in the laminating apparatus. it can. The connection detector 30 of the belt 14 is exemplified by a thickness measurement sensor or a color discrimination sensor, while the rotation amount detector of the roller 29 is exemplified by a pulse generator.

  On the other hand, the upper belt 15 is provided with rollers for winding the belt on the carry-in side and the carry-out side, respectively, and is fed out from one side and wound up on the other side. In FIG. 8, 32 is an upper belt roll on the carry-in side, and 33 is an upper belt roll on the carry-out side. An electric motor is attached to each of these rolls, the torque is controlled on the feeding side, and the speed is controlled on the winding side Thus, the upper belt 15 can be conveyed. The tension of the belt 15 can be controlled by controlling the torque.

  34 is an upper belt cylinder, 35 is also an upper belt cylinder, 36 is an upper belt bracket, 37 is an upper belt roller, 38 is an upper belt brush, and 39 is a lower belt brush. 37 can be moved up and down by the upper belt cylinders 34 and 35 via the upper belt bracket 36, and the height of the upper belt 15 can be changed by these. Further, in FIG. 8, there is an unprocessed workpiece A in the carry-in conveyor 22, and the workpiece A is processed in the laminating apparatus, and the lower belt 14 on the carry-out side is being cooled. In this state, the lower belt 14 is applied with the lower belt brush 39, and the upper belt 14 is applied with the upper belt brush 38. The fillers 2 and 5 adhering to the belt are removed. In the figure, reference numeral 40 denotes a carry-out conveyor.

  FIG. 9 shows a state where the laminating process is completed and the lid 8 of the vacuum vessel 7 is opened from the state of FIG. 8, and FIG. 10 shows a state where the upper belt 15 is slightly lifted from the state of FIG. Show. At this point, the upper belt 15 should not be raised high. The reason for this is that when the upper belt 15 is raised higher, if the filler 5 protruding from the back surface material 6 adheres to the upper belt 15, the filler 5 extends into a string and becomes longer, and the upper belt brush This is because it becomes difficult to remove the filler 5 by 38.

  FIG. 11 shows a state in which the workpieces A and A ′ are conveyed from the state of FIG. 10, and the fillers 2 and 5 attached to the lower belt 14 and the upper belt 15 are the brushes 39 and 38. Is removed.

  12 shows a state where the upper belt 15 is raised to a higher position from the state of FIG. 11, and FIG. 13 shows a state where the belt 15 is rewound from the state of FIG.

  FIG. 14 shows a state in which the upper belt 15 is lowered to the original position from the state of FIG. 13, that is, a state in which the belt 15 is put on the workpiece A. FIG. 8 shows a closed state.

  In the present invention, the upper belt 15 described with reference to FIGS. 8 to 15 can be replaced with an annular belt. That is, FIG. 16 shows an example in which the upper belt is formed in an annular shape. In FIG. 16, reference numeral 41 denotes an electric motor for vertical movement, 42 is a coupling, 43 is a gear box, 44 is a bearing unit, 45 is a screw, and 46 is the screw. 45, an upper belt driving roller 47, an annular or endless upper belt 49, and an upper and lower 49 mounted with the nut 46, the driving roller 47, the upper belt cylinder 50, and the upper belt bracket 51. A moving bracket, 52 is a connecting shaft, 53 is a gear box, and the upper belt roller 37 is vertically movable by the cylinder 50 and the bracket 51 via a vertically moving bracket 49, whereby the upper belt. The tension of 48 can be loosened. The vertical movement bracket 49 can be moved up and down by a screw 45 through a nut 46, and this is driven by a vertical movement motor 41 through a gear box 43. Further, the upper belt 48 is driven by the driving roller 47 and conveyed. The drive roller 47 can be driven by an electric motor or the like.

  FIG. 17 shows an example in which the upper belt 48 is formed in an annular shape as in FIG. 16. The difference from the example of FIG. 16 is that a fixed bracket 54 is used instead of the vertical movement bracket 49, and a driving roller is attached to this bracket 54. 47, the upper belt cylinder 50, and the upper belt bracket 51 are attached, and the bracket 51 is attached to the lid 8 of the laminating apparatus L via the connecting beam 55. The tension of the upper belt 48 is loosened in the same manner as in the above example. However, the vertical movement of the belt 48 is performed by opening and closing the lid 8 because the related parts of the belt 48 are integrated with the lid 8. is there.

  In addition, in the said example, although the conveying apparatus in the laminating apparatus for solar cells was described, this invention conveying apparatus is not restricted to the laminating apparatus for solar cells, It is also possible to apply to another laminating apparatus. In the present invention, it is also possible to apply the present invention using only the upper belt 15 without providing the lower belt 14. In this case, the workpiece is placed on the sheet-like release sheet and carried onto the heat generating plate 11.

A Workpiece A ′ Processed Workpiece 1 Glass Plate 2, 5 Sheet Filler 3 Solar Cell 4 Electrode 6 Back Material L Laminating Device 7 Vacuum Container 8 Lid 9 Diaphragm 10 Upper Chamber 11 Heating Plate 12 Lower Chamber 13 Sealing material 14 Lower belt (Conveyor belt)
15 Upper belt (belt for covering)
22 Carry-in conveyor 23 Cooling section 25 of work piece Perforated belt (lower belt)
26 Hole 27 Lower belt connection member 28 Pin 29 Lower belt drive roller 30 Connection detector 31 Drive roller rotation amount detector 38 Lower belt brush 39 Upper belt brush 40 Unloading conveyor 48 Annular Upper belt

Claims (10)

  A transport device for transporting a workpiece in a laminating apparatus having an upper chamber and a lower chamber, the interior of which is partitioned by a diaphragm, and having or not having a heating device in the lower chamber, A conveying device in a laminating apparatus, wherein the conveying belt is arranged so as to pass over only two opposite sides in the conveying direction among the four sides of the chamber.   A transport device for transporting a workpiece in a laminating apparatus having an upper chamber and a lower chamber, the interior of which is partitioned by a diaphragm, and having or not having a heating device in the lower chamber, The belt for transporting passes through only two opposite sides in the transport direction among the four sides of the chamber, and for covering the belt facing the transport belt on the upper side of the workpiece. A conveying device in a laminating apparatus, characterized in that a belt is arranged.   A transport device for transporting a workpiece in a laminating apparatus having an upper chamber and a lower chamber, the interior of which is partitioned by a diaphragm, and having or not having a heating device in the lower chamber, A conveying apparatus in a laminating apparatus, wherein a conveying belt having a plurality of holes communicating with the chamber is arranged so that the belt covers four sides of the chamber.   A transport device for transporting a workpiece in a laminating apparatus having an upper chamber and a lower chamber, the interior of which is partitioned by a diaphragm, and having or not having a heating device in the lower chamber, A belt for conveyance having a plurality of holes communicating with the chamber is arranged so that the belt covers the four sides of the chamber, and is sized to cover the four sides of the chamber and a plurality of holes communicating with the chamber A conveying device in a laminating apparatus, characterized in that a coating belt having a surface is disposed on an upper side of a workpiece.   The conveying apparatus in any one of Claims 1-4 which used the belt connected to the belt for conveyance so that separation | separation was possible in one or more places.   6. The conveying apparatus according to claim 1, further comprising: a detecting unit that detects a part of the conveying belt that can be separated and connected; and a unit that detects a moving amount of the belt.   The conveying apparatus in any one of Claims 1-6 which provided the area which cools the to-be-processed object heat-processed in the laminating apparatus in the carrying-out side of the belt for conveyance.   The conveying apparatus according to claim 1, wherein a conveying belt is wound around a plurality of rollers, and one or more of the rollers are driven by an actuator to control the tension of the belt.   The conveying device according to claim 1, wherein a brush is applied to the conveying belt or the conveying belt and the covering belt to remove foreign matters adhering to the belt when conveying the workpiece. . A conveying device for conveying a workpiece in a laminating apparatus having an upper chamber and a lower chamber that are partitioned by a diaphragm and having a heating device in the lower chamber, and covering the upper side of the workpiece A conveying device in a laminating apparatus, characterized in that a belt for traveling is arranged to be able to run.

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