JP2009147144A5 - - Google Patents

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Publication number
JP2009147144A5
JP2009147144A5 JP2007323421A JP2007323421A JP2009147144A5 JP 2009147144 A5 JP2009147144 A5 JP 2009147144A5 JP 2007323421 A JP2007323421 A JP 2007323421A JP 2007323421 A JP2007323421 A JP 2007323421A JP 2009147144 A5 JP2009147144 A5 JP 2009147144A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2007323421A
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Japanese (ja)
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JP2009147144A (ja
JP4926025B2 (ja
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Priority to JP2007323421A priority Critical patent/JP4926025B2/ja
Priority claimed from JP2007323421A external-priority patent/JP4926025B2/ja
Publication of JP2009147144A publication Critical patent/JP2009147144A/ja
Publication of JP2009147144A5 publication Critical patent/JP2009147144A5/ja
Application granted granted Critical
Publication of JP4926025B2 publication Critical patent/JP4926025B2/ja
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JP2007323421A 2007-12-14 2007-12-14 ウェーハ搬送装置およびウェーハ搬送方法 Active JP4926025B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007323421A JP4926025B2 (ja) 2007-12-14 2007-12-14 ウェーハ搬送装置およびウェーハ搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007323421A JP4926025B2 (ja) 2007-12-14 2007-12-14 ウェーハ搬送装置およびウェーハ搬送方法

Publications (3)

Publication Number Publication Date
JP2009147144A JP2009147144A (ja) 2009-07-02
JP2009147144A5 true JP2009147144A5 (ko) 2010-11-04
JP4926025B2 JP4926025B2 (ja) 2012-05-09

Family

ID=40917412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007323421A Active JP4926025B2 (ja) 2007-12-14 2007-12-14 ウェーハ搬送装置およびウェーハ搬送方法

Country Status (1)

Country Link
JP (1) JP4926025B2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7358096B2 (ja) * 2019-07-11 2023-10-10 株式会社ディスコ ウエーハ搬送機構および研削装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1050793A (ja) * 1996-07-31 1998-02-20 Nec Kansai Ltd ウェーハ搬送装置
JPH11163081A (ja) * 1997-11-28 1999-06-18 Dainippon Screen Mfg Co Ltd カセット載置ステージ
JP4523513B2 (ja) * 2005-08-05 2010-08-11 東京エレクトロン株式会社 基板受け渡し装置、基板受け渡し方法及び記憶媒体
JP2007188987A (ja) * 2006-01-12 2007-07-26 Nikon Corp 物体搬送装置、露光装置、計測システム、物体処理システム、及び計測方法

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