JP2009131117A - Apparatus for driving vibrating-wave actuator, and its controlling method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To keep the efficiency of an apparatus for driving a vibrating-wave actuator in an optimal condition including efficiency in a driving circuit, in the apparatus which has a moving body to be actuated by a vibration generated in a vibrating body by applying AC voltage to an electro-mechanical energy converter and the vibrator equipped therewith. <P>SOLUTION: A difference in internal loss of the vibrating body depending on individual difference of the vibrating-wave actuator, an environmental difference, and a load variation is detected by the variation of amplitude in the vibration of the vibrating body 15. Further, a frequency in the AC voltage is controlled to make a phase difference between the AC voltage and the vibration in the vibrating body follow the target of the phase difference preliminarily set up according to the internal loss. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an actuator driving apparatus using ultrasonic vibration and a control method thereof.

  As a method for efficiently driving the vibration wave actuator, a method of controlling the frequency of the AC applied voltage so that the phase difference between the AC applied voltage and the vibration of the vibrating body becomes a predetermined value is common.

  By controlling the frequency of the AC applied voltage so that this phase difference becomes the phase difference at the resonance frequency of the vibrating body, the vibrating body can be vibrated in the vicinity of the maximum amplitude.

  In Japanese Patent Laid-Open No. 03-239168, the driving frequency is controlled so as to optimize the efficiency of the vibration wave actuator, and it is said that the efficiency is good when the vibration frequency of the vibrating body is controlled to the anti-resonance frequency.

  In Japanese Patent Laid-Open No. 11-215859, a phase difference target value corresponding to the temperature is set in advance, and the phase difference target value is switched according to the temperature. The phase difference between the AC voltage and the vibration of the vibrating body is the phase difference target value. The drive frequency is controlled so as to follow.

  In Japanese Patent No. 2689435, the phase difference target value is increased or decreased so that the speed of the moving body is controlled to a predetermined speed target value, and the phase difference between the AC voltage and the vibration of the vibrating body follows the phase difference target value. The driving frequency is controlled.

Japanese Patent Application Laid-Open No. 01-50771 has an optimum phase detecting means for detecting a phase difference that gives optimum efficiency under a predetermined load, and performs an operation for measuring the optimum phase difference in advance before a predetermined operation. The phase difference is obtained, and the driving frequency is controlled so that the phase difference between the current or the mechanical arm current and the voltage becomes an optimum phase difference during a predetermined operation.
Japanese Patent Laid-Open No. 03-239168 Japanese Patent Laid-Open No. 11-215859 Japanese Patent No. 2689435 Japanese Unexamined Patent Publication No. 01-50771

  In order to reduce the power consumption of the vibration wave actuator drive device, it is necessary to take measures to increase not only the drive efficiency of the vibration wave actuator but also the overall drive device including the drive circuit. On the other hand, if an appropriate phase difference target value is set, it is possible to control the drive frequency so that the phase difference between the AC voltage applied to the electromechanical energy converter and the vibration of the vibrator becomes maximum efficiency under certain conditions. is there. However, the vibration wave actuator has a characteristic that the internal loss of the vibration body changes depending on the amplitude of the AC voltage applied to the electromechanical energy conversion unit, the individual difference of the vibration wave actuator, the environment, the load fluctuation, and the like. Therefore, since the power factor of the drive circuit changes according to the change in the internal loss of the vibrating body, the phase difference for maximum efficiency changes. In order to always achieve the maximum efficiency with respect to such a characteristic change, it is necessary to change the phase difference target value according to the change. On the other hand, in Japanese Patent Application Laid-Open No. 11-215859, an optimum phase difference target value for a temperature change is prepared by measuring an optimum phase difference target value for a temperature change in advance and preparing a lookup table or the like. It is set. However, this method requires a separate temperature sensor, and in order to cope with individual differences, it is necessary to prepare a different look-up table for each vibration wave actuator, and individual adjustments are necessary in the manufacturing process. In JP-A-01-50771, an optimum phase difference target value is always set by performing a sequence for obtaining an optimum phase difference before operation. However, since a preparatory operation is required immediately before start-up or after power-on, there are problems that the start-up time becomes long and an extra power load is required for the preparatory operation.

  A first means for solving the above-described problems includes an oscillation unit that generates a signal having a desired frequency, and the electro-mechanical energy conversion unit that amplifies the signal having the desired frequency and directly or via an impedance matching element. An amplifying unit that outputs an alternating voltage applied to the vibration member, a vibration detecting unit that outputs a vibration detection signal corresponding to the vibration of the vibrating member, and a vibration amplitude detection signal that is a value corresponding to the vibration amplitude of the vibrating member. A vibration amplitude detection unit; a phase difference detection unit that detects a value corresponding to a phase difference between the vibration detection signal and the AC voltage; and outputs a phase difference signal; and the phase difference signal and the vibration amplitude detection signal A first deviation calculation unit that obtains a deviation of a phase difference target value obtained by a predetermined lookup table or function as an input and outputs a first deviation signal, and an output of the first deviation signal is almost Previous to be 0 And having a frequency setting unit that sets a frequency of the oscillator.

  A second means for solving the above-described problem has the look-up table or function having a two-dimensional characteristic in which the vibration amplitude detection signal is input and a value corresponding to the state of the amplifying unit is input. It is characterized by that.

  A third means for solving the above-described problem includes a speed detection unit that detects the speed of the moving body and outputs a speed signal, obtains a deviation between the speed signal and a speed target value, and outputs a second deviation signal. A second deviation calculating unit for outputting and a state setting unit for setting the state of the amplifying unit so that the output of the second deviation signal becomes substantially zero.

  A fourth means for solving the above problems includes an oscillation unit that generates a signal of a desired frequency, and the electromechanical energy conversion unit that amplifies the signal of the desired frequency and directly or via an impedance matching element. An amplifying unit that outputs an AC voltage applied to the amplifying unit; a power control unit that supplies power to the amplifying unit; a vibration detecting unit that outputs a vibration detection signal corresponding to the vibration of the vibrating body; and a vibration amplitude of the vibrating body A vibration amplitude detection unit that outputs a vibration amplitude detection signal having a value corresponding to the phase difference detection, and a phase difference detection that detects a value corresponding to the phase difference between the vibration detection signal and the AC voltage and outputs a phase difference signal A first deviation for obtaining a deviation of a phase difference target value obtained by a predetermined lookup table or function having the phase difference signal and the vibration amplitude detection signal as inputs, and outputting a first deviation signal The arithmetic unit and the first The output of the deviation signal and having a frequency setting unit that sets a frequency of the oscillating unit to be substantially 0.

  A fifth means for solving the above-described problem is that the look-up table or function having a two-dimensional characteristic having the vibration amplitude detection signal as an input and a value corresponding to the state of the power control unit as an input. It is characterized by having.

  A sixth means for solving the above problems includes a speed detector that detects a speed of the moving body and outputs a speed signal, obtains a deviation between the speed signal and a speed target value, and outputs a second deviation signal. A second deviation calculation unit for outputting, and a state setting unit for setting the state of the power control unit so that the output of the second deviation signal is substantially zero.

  A seventh means for solving the above-described problems includes an oscillation unit that generates a signal having a desired frequency, and the electro-mechanical energy conversion unit that amplifies the signal having the desired frequency and directly or via an impedance matching element. An amplifying unit that outputs an alternating voltage applied to the vibration member, a vibration detecting unit that outputs a vibration detection signal corresponding to the vibration of the vibrating member, and a vibration amplitude detection signal that is a value corresponding to the vibration amplitude of the vibrating member. A vibration amplitude detection unit; a phase difference detection unit that detects a value corresponding to a phase difference between the vibration detection signal and the AC voltage; and outputs a phase difference signal; and the phase difference signal and the vibration amplitude detection signal A first deviation calculating unit for obtaining a deviation of a target value of phase difference obtained by a predetermined lookup table or function as an input and outputting a first deviation signal; and detecting a speed of the moving body Output speed signal A speed detector, a second deviation calculator for obtaining a deviation between the speed signal and the speed target value and outputting a second deviation signal; and inputting the first deviation signal and the second deviation signal A selection means for selecting and outputting a third deviation signal, and a frequency setting section for setting the frequency of the oscillation section so that the output of the third deviation signal is substantially zero. Features.

  An eighth means for solving the above-described problems includes an oscillation unit that generates a signal having a desired frequency, and the electro-mechanical energy conversion unit that amplifies the signal having the desired frequency and directly or via an impedance matching element. An amplifying unit that outputs an AC voltage applied to the amplifying unit; a power control unit that supplies power to the amplifying unit; a vibration detecting unit that outputs a vibration detection signal corresponding to the vibration of the vibrating body; and a vibration amplitude of the vibrating body A vibration amplitude detection unit that outputs a vibration amplitude detection signal having a value corresponding to the phase difference detection, and a phase difference detection that detects a value corresponding to the phase difference between the vibration detection signal and the AC voltage and outputs a phase difference signal A first deviation for obtaining a deviation of a phase difference target value obtained by a predetermined lookup table or function having the phase difference signal and the vibration amplitude detection signal as inputs, and outputting a first deviation signal A calculation unit; A speed detector for detecting a speed of the moving object and outputting a speed signal; a second deviation calculator for obtaining a deviation between the speed signal and a speed target value; and outputting a second deviation signal; and the first deviation Comparing means for comparing the magnitude of the signal and the second deviation signal and outputting a comparison signal; and selecting either the first deviation signal or the second deviation signal according to the comparison signal It has a selection means for outputting a third deviation signal, and a frequency setting section for setting the frequency of the oscillation section so that the output of the third deviation signal is substantially zero.

  A ninth means for solving the above problems includes a phase difference detection step for detecting a phase difference between the AC voltage and the vibration of the vibrating body, an amplitude detection step for detecting the vibration amplitude, and the vibration. A phase difference target value setting step for obtaining a phase difference target value by inputting the amplitude into a predetermined look-up table or function, and calculating a first difference by calculating a difference between the phase difference and the phase difference target value. A phase difference deviation calculating step and a frequency setting step for setting the frequency command so that the phase difference deviation is substantially zero are provided.

  A tenth means for solving the above-described problem has a function changing step of changing the lookup table or function according to a value corresponding to the state of the amplifying unit.

  An eleventh means for solving the above problems includes a speed detecting step for detecting the speed of the moving body, and a speed deviation calculating step for calculating a second deviation by calculating a deviation between the speed of the moving body and a speed target value. And a state setting step for setting the state of the amplifying unit so that the second deviation is substantially zero.

  A twelfth means for solving the above problems includes a phase difference detection step for detecting a phase difference between the AC voltage and the vibration of the vibrating body, an amplitude detection step for detecting the vibration amplitude, and the vibration. A phase difference target value setting step for obtaining a phase difference target value by inputting the amplitude into a predetermined look-up table or function, and calculating a first difference by calculating a difference between the phase difference and the phase difference target value. A phase difference deviation calculating step, a first frequency setting step for setting the frequency command so that the phase difference deviation is substantially zero, a power detection step for detecting input power or output power of the power control unit, and the input And a power control step of controlling the power or the output power to a predetermined power or controlling it within a predetermined limit power.

  A thirteenth means for solving the above-described problem has a function changing step of changing the look-up table or function according to a value corresponding to the state of the power control unit.

  A fourteenth means for solving the above problems includes a speed detecting step for detecting the speed of the moving body, and a speed deviation calculating step for calculating a second deviation by calculating a deviation between the speed of the moving body and a speed target value. And a state setting step for setting the state of the power control unit so that the second deviation is substantially zero.

  A fifteenth means for solving the above problems includes a speed detecting step for detecting the speed of the moving body, and a speed deviation calculating step for calculating a second deviation by calculating a deviation between the speed of the moving body and a speed target value. And a selection determination step for determining which one to select by inputting the first deviation and the second deviation, and one of the first deviation and the second deviation according to the result of the selection determination step. It has a deviation selection step for selecting and setting a third deviation, and a second frequency setting step for setting the frequency command so that the third deviation becomes substantially zero.

  According to the first invention, the AC voltage applied to the electromechanical energy conversion unit according to the value of the vibration amplitude that changes according to the internal loss of the vibrating body, which varies depending on the environment, individual differences, load conditions, etc., and the vibrating body By setting the target value of the phase difference of vibration, the efficiency including the drive circuit can always be kept high.

  According to the second invention, the efficiency including the drive circuit can always be kept high even when the condition of the drive circuit is changed by correcting the target value of the phase difference by the value according to the state of the amplifying unit.

  According to the third aspect of the invention, the speed control can be performed while the efficiency is always kept high by controlling the state of the amplifying unit while the efficiency including the drive circuit is always kept high by the drive frequency control.

  According to the fourth aspect of the invention, by controlling the power including the circuit, the speed of the vibration wave actuator can be kept at the highest level within the allowable power.

  According to the fifth invention, even when the allowable power is changed by correcting the target value of the phase difference by the value according to the state of the power control unit, the speed of the vibration wave actuator is set to the highest state within the allowable power. I can keep it.

  According to the sixth aspect of the present invention, the speed control can be performed while the efficiency is always kept high by controlling the state of the power control unit while always keeping the efficiency including the drive circuit high by the drive frequency control.

  According to the seventh aspect, the frequency of the oscillating unit is controlled by the result selected according to the comparison result of the magnitudes of the first deviation signal indicating the phase difference deviation and the second deviation signal indicating the speed deviation. During acceleration / deceleration, the efficiency or maximum speed can be maintained at the highest level while performing speed control.

  Next, details of the present invention will be described in accordance with the description of the embodiments.

  FIG. 1 is a block diagram showing the configuration of the first embodiment. Reference numeral 1 denotes a piezoelectric body constituting a vibrating body of a vibration wave actuator described later, and 1-a, 1-b, and 1-d constitute this piezoelectric body. A plurality of electrodes are shown. Reference numeral 2 denotes an oscillating unit that generates a two-phase AC voltage having a phase difference of 90 °, 3 denotes an amplifying unit that multiplies the AC voltage at a predetermined amplification factor, and 4 and 5 denote piezoelectric bodies that constitute a vibration wave actuator described later. Inductor element 6 for impedance matching, 6 is a phase difference for detecting a phase difference between an AC voltage applied to electrode 1-a and an AC signal corresponding to the vibration of the vibrating body output from electrode 1-d. A detection unit, 7 is a vibration amplitude detection unit that outputs a vibration amplitude signal corresponding to the vibration amplitude of the vibrating body output from the electrode 1-d, and 8 is a predetermined phase difference target value corresponding to the vibration amplitude signal. A phase difference target value setting unit 9 which is obtained from the look-up table and outputs it, and 9 is a phase difference deviation calculation which calculates a deviation between the phase difference target value and the phase difference output from the phase difference detection unit 6 and outputs a phase difference deviation value. Part 10 has a phase difference deviation value of almost 0. A frequency setting unit for setting an output frequency of the oscillator 2 so that. 2 and 3 show the configuration of the vibration type actuator. In FIG. 2, reference numeral 11 denotes an elastic body composed of one or more elastic members, 12 denotes a rotor pressed against the elastic body 11 by a pressing means (not shown), and 13 is bonded to the elastic body 11. 14 is a rotating shaft connected to the center of the rotor, 1 is a piezoelectric body bonded to the elastic body 11, and constitutes a vibrating body 15 composed of the elastic body 11 and the piezoelectric body 1. Yes. The piezoelectric body 1 has the shape shown in FIG. 3 and the surface is divided into a plurality of electrodes. This electrode is composed of two drive electrode groups (electrode 1-a, electrode 1-b), sensor electrode (electrode 1-c, electrode 1-d), and empty electrode (electrode 1-e). The electrode 1-a is called the A phase, the electrode 1-b is called the B phase, and these are the driving piezoelectric element electrode 1-c and the electrode 1-d are called the S2 phase. These are the vibration detecting piezoelectric elements. . The empty electrode 1-e and the elastic body 11 are normally connected to the ground potential. The S1 phase 1-c is arranged in the same positional phase relationship as the A phase 1-a, and is arranged so as to detect a standing vibration that is vibrated by applying an AC voltage to the A phase 1-a. Since the S2 phase 1-d is arranged at a position intermediate between the A phase 1-a and the B phase 1-b, the vibration of the combined wave of the A phase 1-a and the B phase 1-b is detected. Are arranged to be. The vibration wave actuator shown in FIG. 2 generates a progressive vibration wave in the elastic body 11 by applying an AC voltage having a time phase difference of 90 degrees to the A phase 1-a and the B phase 1-b. The vibration force is transmitted to the rotor 12 that is in pressure contact with the elastic body 11 via the friction material 13 via the friction force to rotate the rotating shaft 14. In such a vibration wave actuator, the rotor 12 and the elastic body 11 are relatively rotated by applying two AC voltages. FIG. 4 is a diagram showing the relationship between the driving frequency and rotational speed of the vibration wave actuator, the phase difference between the AC applied voltage and the vibration of the vibrating body 15. The rotation speed is indicated by a solid line, and the phase difference is indicated by a one-dot chain line and a chain line. The two phase differences are shown because the S2 phase 1-d arranged between the A phase 1-a and the B phase 1-b is used for vibration detection. Since the output signal of the S2-phase 1-d has a phase difference shifted by about 90 ° depending on the rotation direction, it is indicated by a one-dot chain line (forward rotation) and a chain line (reverse rotation). When the drive frequency is swept from a frequency higher than the resonance frequency Fr of the vibrating body 15, the rotational speed of the vibration wave actuator increases as it approaches the resonance frequency of the vibrating body 15. Further, it has a characteristic of rapidly stopping when the resonance frequency Fr is exceeded. The phase difference increases and saturates even when the resonance frequency is exceeded.

  The operation of FIG. 1 will be described below. 1 is basically a phase difference target in which the phase difference between the AC voltage applied to the A phase 1-a and the output signal from the S2 phase 1-d is determined. The output frequency of the oscillation unit 2 is controlled so as to follow the value. Since the vibration of the vibrating body 15 is detected using the S2 phase 1-d as described above, a phase difference target value that differs by 90 ° is set depending on the rotation direction, and the same load condition is maintained even if the rotation direction changes. If so, it rotates in the opposite direction at approximately the same rotational speed. For example, if speed control is to be performed in the vicinity of the resonance frequency Fr, the phase difference target value may be set to 45 ° or 135 ° depending on the rotation direction. When the phase difference output from the phase difference detection unit 6 is larger than the phase difference target value, the phase difference deviation value output from the phase difference deviation calculation unit 9 is a positive value. In response to this, the frequency setting unit 10 increases the frequency of the output signal of the oscillating unit 2 and approaches the phase difference deviation value to zero. In the opposite case, the frequency of the output signal of the oscillating unit 2 is lowered to bring the phase difference deviation value closer to zero. When the absolute value of the phase difference deviation value is large, the frequency change of the output signal of the oscillation unit 2 is fast, and when the absolute value of the phase difference deviation value is small, the frequency change of the output signal of the oscillation unit 2 is slow and the phase difference The phase difference output from the detector 6 approaches the phase difference target value smoothly. FIG. 5 is a diagram showing the driving frequency and rotational speed of the vibration wave actuator and the efficiency of the amplifying unit 3. A solid line indicates the rotation speed, and a chain line indicates the efficiency of the amplifying unit 3. From this figure, it can be seen that the efficiency of the amplifying unit 3 shows the maximum efficiency at a frequency higher than the resonance frequency of the vibrating body 15. This is because the frequency that gives the maximum power factor of the amplifying unit 3 is determined by the change in the admittance characteristics of the vibrating body 15 with the vibration frequency and the influence of electrical resonance by the inductor 4 and the inductor 5 that are impedance matching elements. Therefore, the output frequency of the oscillating unit 2 is simply set to the resonance frequency of the vibrating body 15 in response to the high demand of increasing the rotational speed of the vibration wave actuator as much as possible while suppressing the power consumption of the vibration wave actuator driving device. It turns out that a request cannot be realized only by setting. In other words, it is because keeping power consumption low and increasing the rotation speed are conflicting propositions and cannot be compatible. For this reason, various measures can be considered by weighting the conflicting propositions. Consider, for example, a method of setting the output frequency of the oscillation unit 2 so that the efficiency is the highest. When the load condition of the vibration wave actuator does not change, the vibration amplitude of the vibrating body 15 changes in proportion to the square root of the power consumption of the vibration wave actuator. Considering the ratio of the square root to the vibration amplitude of the vibrating body 15 (hereinafter referred to as the efficiency index), the power consumption A is obtained by adding the power consumption of the amplifier 3 and the vibration wave actuator. The efficiency index may be a ratio of the power consumption A to the square of the vibration amplitude of the vibrating body 15. FIG. 6 is a diagram showing the relationship between frequency, vibration amplitude, and efficiency index under a certain load condition. The solid line indicates the vibration amplitude and shows the same characteristics as the rotational speed in FIG. The chain line indicates the efficiency index, which is maximum at a frequency higher than the resonance frequency Fr. Next, consider a case where the equivalent internal loss of the vibrating body 15 changes due to load conditions and environmental changes. When the equivalent internal loss of the vibrating body 15 changes, the power factor of the amplifying unit 3 changes, so that the frequency at which the efficiency index becomes maximum and the vibration amplitude of the vibrating body 15 at that time also change. Therefore, the vibration amplitude of the vibration body 15 at the maximum efficiency index position that decreases as the equivalent internal loss of the vibration body 15 increases, and the alternating voltage applied to the electrode 1-a output from the phase difference detection unit 6 at that time. A phase difference from the vibration of the vibrating body 15 output from the electrode 1-d is obtained in advance. A lookup table of the phase difference target value setting unit 8 is constructed from this relationship. Then, it becomes possible to obtain a phase difference target value for maximizing the efficiency index according to the vibration amplitude of the vibrating body 15.

  FIG. 7 is a graph showing a look-up table showing this relationship and also shows the characteristics of the vibration wave actuator having different internal losses. Since the look-up table can also be expressed as a function, it may be calculated as a function of vibration amplitude. The solid line indicates the characteristics of the lookup table, the chain line indicates the characteristics of the vibration wave actuator with a small equivalent internal loss, and the alternate long and short dash line indicates the characteristics of the vibration wave actuator with a large equivalent internal loss. The phase difference target value tends to increase as the vibration amplitude of the vibrating body 15 increases. When the phase difference target value is changed according to the vibration amplitude using this look-up table, the vibration amplitude of the vibrating body 15 finally becomes the intersection of the phase difference target value indicated by the solid line and the characteristics of each vibration wave actuator. The frequency is controlled so as to obtain the vibration amplitude. That is, in the case of a vibration wave actuator with little internal loss, the phase difference between the AC voltage and the vibration of the vibrating body 15 is controlled to PH1, and as a result, the vibration amplitude is S1. In the case of a vibration wave actuator having a large internal loss, the phase difference between the AC voltage and the vibration of the vibrating body 15 is controlled to PH2, so that the vibration amplitude is S2. Here, since the phase difference increases or decreases depending on which signal polarity or reference is used, it is natural that the phase difference target value tends to decrease as the vibration amplitude of the vibrating body 15 increases. . The efficiency index is obtained from the relationship between the vibration amplitude and the power, but may be a value corresponding to the rotational speed, the inflow current to the A phase 1-a or the B phase 1-b, or the applied voltage instead of the vibration amplitude. In that case, the input variable of the phase difference target value look-up table is replaced with a value corresponding to the rotational speed, the inflow current to the A phase 1-a or the B phase 1-b, or the applied voltage instead of the vibration amplitude. Of course, the same effect can be obtained. In this embodiment, the efficiency index may be simply the efficiency of the amplifying unit 3 or may be a function weighted for some efficiency. Further, an upper limit and a lower limit may be provided for the phase difference target value. The table may be configured under different conditions for each vibration amplitude region. In that case, the change in the target value of the phase difference with respect to the vibration amplitude may become discontinuous in the middle, or the one that has been increasing tends to decrease once at the discontinuity point, but changes in the same direction within the continuous region. I need it. FIG. 8 shows an example of discontinuity. In this embodiment, an inductor element for impedance matching is used, but it is natural that the same effect can be expected even without this. In this embodiment, the phase difference detection unit 6 detects the phase difference between the AC voltage applied to the A phase 1-a and the AC signal corresponding to the vibration of the vibrating body output from the S2 phase 1-d. Of course, the same effect can be expected even if the phase difference between the voltages at both ends of the inductor element 4 or the inductor element 5 is obtained.

  FIG. 9 is a block diagram showing the configuration of the second embodiment, 16 is a rotary encoder that outputs a pulse signal having a frequency corresponding to the rotational speed of a rotor 12 (not shown) of the vibration wave actuator, and 17 is an output of the rotary encoder 16. A speed detection unit 18 detects the rotation speed of the rotor 12 by detecting the frequency of the pulse signal to be detected, and 18 obtains a deviation between a value corresponding to the rotation speed of the rotor 12 output from the speed detection unit 17 and a predetermined speed target value. This is an amplification factor setting unit that sets the amplification factor of the amplification unit 3 to be zero. The amplification factor referred to here is a ratio of effective values between the input and output of the amplifying unit 3 and includes substantial amplification due to change in waveform in addition to amplification due to change in amplitude. In this embodiment, the amplifying unit 3 is composed of a half-bridge circuit, converts the amplitude of a pulse signal of about 3 to 5 V input from the oscillating unit 2 into a 40 V pulse signal, and 40 V according to the setting signal from the amplification factor setting unit 18. The amplification factor is substantially changed by changing the pulse width of the pulse signal. In the first embodiment, the input to the phase difference target value setting unit 8 is only a value corresponding to the vibration amplitude of the vibrating body 15 output from the vibration amplitude detection unit 7. In this embodiment, the amplification factor setting unit 18 is used. A value corresponding to the amplification factor of the amplifying unit 3 is also input, and the phase difference target value is set according to both the vibration amplitude of the vibrating body 15 and the amplification factor of the amplifying unit 3. Since other configurations are substantially the same as those in the first embodiment, description thereof is omitted. In the first embodiment, since there is no substantial change in the amplification factor of the amplifying unit 3, the efficiency of circuit incorporation is only controlled to a good state according to the equivalent internal loss of the vibrating body 15. For this reason, the variation in rotational speed was large. Therefore, in order to solve this, in this embodiment, the rotational speed of the rotor 12 is detected, and the state called the amplification factor of the amplifying unit 3 is changed in order to control this to the target speed value. This makes it possible to control the rotational speed of the rotor 12 to a predetermined speed target value while maintaining the efficiency in a good state. Here, let us consider what happens to the efficiency index when the amplification factor of the amplification unit 3 changes. When the amplitude of the AC voltage output from the amplifying unit 3 is substantially increased, the amplitude of the AC voltage applied to the A phase 1-a and the B phase 1-b is also increased. Therefore, since the vibration amplitude when the vibrating body 15 is vibrated at the same frequency increases, the vibration frequency when compared with the same vibration amplitude becomes a frequency farther from the resonance frequency. Therefore, the phase difference between the AC voltage applied to the A phase 1-a and the vibration of the vibrating body 15 output from the S2 phase 1-d is reduced, and the same lookup table used in the first embodiment cannot be used. I understand that. Therefore, in this embodiment, a plurality of lookup tables are prepared according to the state of the amplifying unit 3 to cope with this. 10 shows the phase difference target values (PH1,1), (PH1,2),... (PH1 when the vibration amplitude is S1, S2,... Sn, and the amplification factor 3 is C1, C2,. , n) ... (PH2,1), (PH2,2), ... (PH2, n), ..., ..., (PHn, 1), (PHn, 2), ... (PHn, n) A lookup table is shown. In this way, the phase difference target value is immediately obtained from the vibration amplitude and amplification factor. Similarly to the first embodiment, the input variable of the phase difference target value look-up table depends on the rotational speed, the inflow current to the A phase 1-a or the B phase 1-b, or the applied voltage instead of the vibration amplitude. It is natural that the equivalent effect can be obtained even if a value substitute is used. In this embodiment, an inductor element for impedance matching is used, but it is natural that the same effect can be expected even without this. In this embodiment, the phase difference detection unit 6 detects the phase difference between the AC voltage applied to the A phase 1-a and the AC signal corresponding to the vibration of the vibrating body output from the S2 phase 1-d. Of course, the same effect can be expected even if the phase difference between the voltages at both ends of the inductor element 4 or the inductor element 5 is obtained.

  FIG. 11 is a block diagram showing the configuration of the third embodiment, and 19 is a power control unit for controlling the power input to the amplification unit 3. In the above embodiment, the S2 phase 1-d is used as the vibration detection electrode. However, in this embodiment, the S1 phase 1-c is used. Since the phase difference between the output signal of the S1 phase 1-c and the AC voltage applied to the A phase 1-a does not change in the rotation direction of the rotor 2, the same phase difference target value can be used. The power control unit 19 may control the input power of the power control unit. Since other configurations are substantially the same as those in the above embodiment, description thereof is omitted. In this embodiment, the power supply voltage of the amplifying unit 3 is controlled so that the power does not exceed the allowable power. Therefore, the rotor 12 can be rotated at the highest speed below the allowable power. The look-up table of the phase difference target value setting unit 8 is set with a phase difference target value for the vibration amplitude at the allowable power, and the power supply voltage supplied to the amplifying unit 3 is fixed at a predetermined upper limit voltage within the allowable power. Yes. FIG. 12 is a diagram showing the relationship between the vibration amplitude, the power supply voltage supplied to the amplifying unit 3, the power and phase difference output to the amplifying unit 3, and the phase difference target value. The characteristics are shown when approaching the frequency. The solid line in the upper diagram indicates the power supply voltage, and the chain line in the lower diagram indicates the AC voltage applied to the A phase 1-a and the signal corresponding to the vibration of the vibrating body 15 output from the S1 phase 1-c. The phase difference between them and the chain line indicate the phase difference target value. The power supply voltage is fixed at VOmax until the vibration amplitude of the vibrating body 15 exceeds SA, and the power output to the amplifying unit 3 tends to increase after once decreasing. When the vibration amplitude exceeds SA, the power output to the amplifying unit 3 is fixed at the allowable power POmax and the power supply voltage is decreasing. When the vibration amplitude fixed at the allowable power POmax is SA or more, the phase difference between the signals corresponding to the AC voltage applied to the A phase 1-a and the vibration of the vibrating body 15 output from the S1 phase 1-c is significant. It intersects with the graph of the phase difference target value, and the phase difference is controlled to PH1 so as to be the vibration amplitude S1 at this intersection position. FIG. 13 is a graph showing the relationship between the vibration frequency, the power supply voltage supplied to the amplifier 3, the power and phase difference output to the amplifier 3, and the rotational speed of the rotor 12. In the region limited by the allowable power POmax, the rotational frequency of the rotor 12 is VE1 at the vibration frequency F1 at which the vibration amplitude S1 is obtained. Since the frequency of the output signal of the oscillation unit 2 is controlled so that the phase difference becomes the phase difference target value PH1, the vibration frequency becomes F1. Therefore, the rotational speed of the rotor 12 becomes the maximum rotational speed VE1 within the allowable power POmax. FIG. 14 is a block diagram showing a second configuration of the third embodiment, in which the rotational speed of the rotor 12 is detected and controlled to a predetermined speed target value as in the second embodiment. . 20 is a power setting for obtaining a deviation between a value corresponding to the rotational speed of the rotor 12 output from the speed detection unit 17 and a predetermined target speed value, and setting an allowable power or a power target value of the power control unit 19 so that it becomes zero. Part. In the second embodiment, the input of the phase difference target value setting unit 8 is a value corresponding to the vibration amplitude of the vibrating body 15 output from the vibration amplitude detection unit 7 and the amplification of the amplification unit 3 output from the amplification factor setting unit 18. In this embodiment, the allowable power or the power target value of the power control unit 19 is input instead of the amplification factor of the amplification unit 3, and the vibration amplitude of the vibrating body 15 and the allowable power of the power control unit 19 are input. Alternatively, the phase difference target value is set according to both the power target value. As a result, the efficiency can be kept high while controlling the rotational speed of the rotor 12 to a predetermined speed as in the second embodiment. FIG. 15 is a block diagram showing a third configuration of the third embodiment, in which a part of the second configuration of the third embodiment is replaced by the CPU 21. In FIG. The power setting unit 20 and the frequency setting unit 10 are replaced, and these processes operate in a software manner in the CPU 21. FIG. 16 is a flowchart showing this operation. First, as an initial operation, the frequency F of the oscillation unit 2 is set to the initial frequency F0, and the power target value PO of the power control unit 19 is set to the initial power target value PO0. As a result, power is supplied to the amplifying unit 3, and the vibrating body 15 is vibrated at the initial frequency to increase the vibration amplitude. In the next step, the phase difference deviation PHd, which is the output of the phase difference deviation calculating unit 9, is input, and the frequency F of the oscillating unit 2 is changed by an amount obtained by multiplying the phase difference deviation PHd by the gain G1 so that it becomes zero. Next, the speed VEi from the speed detector 17 is input to obtain a speed deviation VEd from a predetermined speed target value VE0. Next, the power target value PO of the power control unit 19 is changed by an amount obtained by multiplying the speed deviation VEd gain G2 so that the speed deviation VEd becomes zero. By repeating such an operation, the power consumption can be kept at the lowest level while rotating the rotor 12 at a predetermined speed target value. Further, as in the second embodiment, the look-up table of the phase difference target value setting unit 8 is set according to the amplification factor of the amplifying unit 3, and instead of setting the power target value PO of the power control unit 19 by the CPU 21, the amplifying unit 3. Of course, it may be configured to set the amplification factor. In addition, in this embodiment, the integral control for setting the power target value according to the integration result of the speed deviation VEd is adopted. However, by adding the value according to the speed deviation VEd, the proportional integral control or the phase compensation by various filters is added. Of course, it is okay. Similarly to the above embodiment, as an input variable of the phase difference target value look-up table, a value corresponding to the rotational speed, the inflow current to the A phase 1-a or the B phase 1-b, or the applied voltage is used instead of the vibration amplitude. Of course, the equivalent effect can be obtained even if a substitute is used. In this embodiment, an inductor element for impedance matching is used, but it is natural that the same effect can be expected even without this. In this embodiment, the phase difference detection unit 6 detects the phase difference between the AC voltage applied to the A phase 1-a and the AC signal corresponding to the vibration of the vibrating body output from the S2 phase 1-d. Of course, the same effect can be expected even if the phase difference between the voltages at both ends of the inductor element 4 or the inductor element 5 is obtained.

  FIG. 17 is a block diagram showing a first configuration of the fourth embodiment, in which 22 is a piezoelectric body of a standing wave type vibration wave actuator (not shown), 23 is a known mechanical arm current to the piezoelectric body 22 is detected. The vibration detection unit 24 detects vibration of the piezoelectric body 22, 24 is an oscillation unit that generates an AC voltage, and 25 is a power conversion unit that amplifies the power of the AC signal output from the oscillation unit 24. In the above embodiment, a two-phase AC voltage is applied to the vibration wave actuator, but in this embodiment, a one-phase AC voltage is applied to a standing wave type vibration wave actuator made of only a piezoelectric body. In addition, a moving body (not shown) moves linearly instead of rotating output. Therefore, the speed information is not speed but speed. The state of the power converter 25 can be set in various states such as input power, output power, amplification factor, output current, and output voltage by a setting signal from the CPU 21. Since other configurations are almost the same as those in the above embodiment, description thereof is omitted. Since the CPU 21 can perform various operations in the above embodiment and can secure a lookup table in the internal storage area, it is possible to set a target by advanced judgment according to conditions. FIG. 18 is a flowchart showing a first control method of the fourth embodiment. First, as an initial setting step, the frequency F of the oscillator 2 is set to the initial frequency F0, and the power supply voltage or output voltage amplitude VO of the power converter 25 is set to the initial voltage VO0. As a result, electric power is supplied to the power conversion unit 25, and the piezoelectric body 22 is vibrated at the initial frequency to increase the vibration amplitude. Next, in the detection step, the phase difference detection value PHi output from the phase difference detection unit 6 and the speed detection value VEi output from the speed detection unit 17 are input. Then, the vibration amplitude detection value Si of the piezoelectric body 22 corresponding to the speed detection value VEi is calculated by the function f1. The function f1 is a linear function of about 1st order to 3rd order, but may be a lookup table as in the above embodiment. Next, in a calculation step, the phase difference target value PHs is obtained by inputting the vibration amplitude detection value Si into the function f2, and the phase difference detection value PHi is subtracted from the phase difference target value PHs to obtain the phase difference deviation PHd. Next, in the setting step, the frequency F of the oscillation unit 2 is changed by an amount obtained by multiplying the phase difference deviation PHd by the gain G1. When such an operation is repeated, the vibration amplitude detection value Si gradually increases, and the phase difference target value PHs also increases accordingly. As the vibration amplitude Si further increases, the phase difference detection value PHi approaches the change in the phase difference target value PHs at the beginning. Finally, the phase difference deviation PHd becomes 0, and the most efficient driving state is realized in the state where the output voltage amplitude VO is VO0. FIG. 19 is a flowchart showing a second control method of the fourth embodiment. In the first control method, the speed of a standing wave actuator (not shown) was not controlled, but in the second control method, an efficient driving state is achieved by controlling the frequency in the same manner as the first control method. On the other hand, the speed control is performed by changing the output voltage amplitude VO of the power converter 25. First, as an initial setting step, the frequency F of the oscillator 2 is set to the initial frequency F0, the output voltage amplitude VO of the power converter 25 is set to the initial voltage VO0, and the initial speed target value VEs is set to VE0. As a result, electric power is supplied to the power conversion unit 25, and the piezoelectric body 22 is vibrated at the initial frequency to increase the vibration amplitude. In the next detection step, the phase difference detection value PHi output from the phase difference detection unit 6 and the speed detection value VEi output from the speed detection unit 17 are input, and the velocity detection value VEi is set to the function amplitude f1 of the vibration amplitude Si of the piezoelectric body 22. It is calculated by inputting. In the next calculation step, the phase difference target value PHs is obtained by inputting the vibration amplitude detection value Si and the output voltage amplitude VO into the function f2. In this case, the function f2 is a two-variable function or a two-dimensional lookup table. Further, the phase difference detected value PHi is subtracted from the phase difference target value PHs to obtain the phase difference deviation PHd, and the speed detected value VEi is subtracted from the speed command VEs to obtain the speed deviation VEd. In the next setting step, the frequency F of the oscillating unit 2 is changed by the amount obtained by multiplying the phase difference deviation PHd by the gain G1, the control frequency is controlled to the maximum efficiency frequency, and the speed deviation VEd is multiplied by the gain G2. The output voltage amplitude VO of the power converter 25 is changed. When such an operation is repeated, the output voltage amplitude VO of the power conversion unit 25 gradually increases, the speed deviation VEd finally becomes 0, and the speed is controlled to the speed target value VEs. Even when the speed target value changes, according to such a control method, it is possible to obtain the best efficiency while keeping the speed following the speed target value. In this embodiment, the vibration detection unit 23 detects the vibration of the piezoelectric body 22 by detecting the mechanical arm current flowing into the piezoelectric body 22, but the piezoelectric body 22 is provided with a vibration detection electrode (not shown). An output signal may be used. Further, as a sensor for detecting vibration, there are a strain gauge, a non-contact optical displacement sensor and the like, and these sensors may be used. In this embodiment, the vibration amplitude detection value Si of the piezoelectric body 22 is calculated by the function f1 for obtaining the vibration amplitude detection value Si of the piezoelectric body 22 corresponding to the speed detection value VEi. The amplitude of the output signal may be detected. In that case, a circuit for detecting vibration amplitude is required as an external circuit. In this embodiment, an inductor element for impedance matching is used, but it is natural that the same effect can be expected even without this. In the above example, the velocity detection value VEi is input to the function f1, the vibration amplitude detection value Si is obtained from the function f1 (VEi), and then the phase difference target value PHs is obtained from the function f2 (Si). However, in order to simplify this, the phase difference target value PHs may be obtained directly as the function f2 (f1 (VEi)) or the function f2 (f1 (VEi), VO) of the speed detection value VEi. FIG. 20 is a block diagram showing a second configuration of the fourth embodiment. In the first configuration, the phase difference detection unit 6 has a mechanical arm current flowing into the piezoelectric body 22 and an AC voltage applied to the piezoelectric body 22. In the second configuration, the phase difference between the AC voltages at both ends of the inductor element 4 is detected. Reference numeral 26 denotes an amplitude detector for outputting the detected amplitude value Vai of the AC voltage applied to the piezoelectric body 22. The amplitude of the AC voltage applied to the piezoelectric body 22 has a characteristic that the amplitude decreases as the frequency of the AC voltage approaches the resonance frequency of the piezoelectric body 22 due to the influence of the inductor element 4. Therefore, if the range of the frequency of the AC voltage is limited, it can be used as a sensor for detecting the amplitude of the AC voltage applied to the piezoelectric body 22. Therefore, the phase difference target value is obtained as f2 (f1 (VEi)) in the first configuration, but the phase difference target value is obtained from f2 (f1 (VAi)) in the second configuration. Since it is a well-known technique that the vibration amplitude can be obtained from the speed, the amplitude of the alternating voltage applied to the piezoelectric body 22 and the amplitude of the flowing alternating current in this way, the phase difference target value corresponding to that is known. Of course, it is possible to construct a function or a lookup table.

  The system configuration of the present embodiment is the same as that of the fourth embodiment, and the description of the system configuration is omitted. FIG. 21 is a flowchart showing the first control method of the fifth embodiment. First, as an initial setting step, the frequency F of the oscillation unit 2 is set to the initial frequency F0, the power supply voltage or output voltage amplitude VO of the power conversion unit 25 is set to the initial voltage VO0, and the initial power target value of the power input to the power conversion unit 25 is set. POs is set to PO0. As a result, electric power is supplied to the power conversion unit 25, and the piezoelectric body 22 is vibrated at the initial frequency to increase the vibration amplitude. Next, in the detection step, the phase difference detection value PHi output from the phase difference detection unit 6 and the speed detection value VEi output from the speed detection unit 17 are input. Then, the vibration amplitude detection value Si of the piezoelectric body 22 corresponding to the speed detection value VEi is calculated by the function f1. Further, the input power value detection value POi of the power converter 25 is measured and input. In the next calculation step, the phase difference target value PHs is obtained by inputting the vibration amplitude detection value Si and the input power detection value POi into the function f2. In this case, the function f2 is a two-variable function or a two-dimensional lookup table. Next, the phase difference deviation PHd is obtained by subtracting the phase difference detection value PHi from the phase difference target value PHs. Then, the speed detection value VEi is input to the function f3, and a power target value POs determined in advance according to the speed of a standing wave actuator (not shown) is obtained. Further, the detected power input value POi is subtracted from the power target value POs to obtain the power deviation POd. In the next setting step, the frequency F of the oscillator 2 is changed by the amount obtained by multiplying the phase difference deviation PHd by the gain G1, the drive frequency is controlled to the maximum efficiency frequency, and the power deviation POd is further multiplied by the gain G2. Only the output voltage amplitude VO of the power converter 25 is changed. By repeating such an operation, it becomes possible to keep the driving state of a standing wave actuator (not shown) at a high efficiency while controlling the input power of the power conversion unit 25 to a predetermined value, and the power target value POs In this case, it is possible to control the speed detection value VEi to the highest state. FIG. 22 is a flowchart showing a second control method of the fifth embodiment. In the first control method, feedback control of the speed of a standing wave type actuator (not shown) was not performed, but in the second control method, efficient driving is achieved by controlling the frequency as in the first control method. While realizing the state, the speed control is performed by changing the power supply voltage VO of the power conversion unit 25. First, as an initial setting step, the frequency F of the oscillation unit 2 is set to the initial frequency F0, the power supply voltage VO of the power conversion unit 25 is set to the initial voltage VO0, and the initial power target value POs of the power input to the power conversion unit 25 is set to PO0. The initial speed target value VEs is set to VE0. As a result, electric power is supplied to the power conversion unit 25, and the piezoelectric body 22 is vibrated at the initial frequency to increase the vibration amplitude. In the next detection step, the phase difference detection value PHi output from the phase difference detection unit 6 and the speed detection value VEi output from the speed detection unit 17 are input, and the speed detection value VEi is input to the function f1 to thereby detect the piezoelectric body 22. The vibration amplitude detection value Si is calculated. Further, the input power detection value POi of the power converter 25 is detected. In the next calculation step, the phase difference target value PHs is obtained by inputting the vibration amplitude detection value Si and the input power detection value POi into the function f2. In this case, the function f2 is a two-variable function or a two-dimensional lookup table. Next, the phase difference detection value PHi is subtracted from the phase difference target value PHs to obtain the phase difference deviation PHd, and the speed detection value VEi is subtracted from the speed command VEs to obtain the speed deviation VEd. Then, the power target value POs is obtained by changing the value of the power target value POs by the amount obtained by multiplying the speed deviation VEd by the gain G3, and the power deviation POd is obtained by subtracting the detected input power value POi from the power target value POs. Yes. In the next setting step, the frequency F of the oscillating unit 2 is changed by the amount obtained by multiplying the phase difference deviation PHd by the gain G1 to control the drive frequency to the maximum efficiency frequency, and the power is obtained by multiplying the speed deviation VEd by the gain G2. The power supply voltage VO of the conversion unit 25 is changed. When such an operation is repeated, the power supply voltage VO of the power conversion unit 25 increases in the beginning, and the power target value POs also increases. Then, the speed deviation VEd finally becomes 0, and the speed is controlled to the speed target value VEs. Even when the speed target value changes, according to such a control method, it is possible to obtain the best efficiency while keeping the speed following the speed target value. In the above example, the velocity detection value VEi is input to the function f1, the vibration amplitude detection value Si is obtained from the function f1 (VEi), and then the phase difference target value PHs is obtained from the function f2 (Si, POi). However, in order to simplify this, the phase difference target value PHs may be obtained directly as the function f2 (f1 (VEi), POi) of the speed detection value VEi.

  The system configuration of the present embodiment is the same as that of the fourth embodiment, and the description of the system configuration is omitted. FIG. 23 is a flowchart showing the control method of the sixth embodiment. First, as an initial setting step, the frequency F of the oscillator 2 is set to the initial frequency F0, and the output voltage amplitude VO of the power converter 25 is set to the initial voltage VO0. Further, the initial power target value POs of the power input to the power conversion unit 25 is set to PO0, and the initial speed target value VEs is set to VE0. As a result, electric power is supplied to the power conversion unit 25, and the piezoelectric body 22 is vibrated at the initial frequency to increase the vibration amplitude. In the next detection step, the phase difference detection value PHi output from the phase difference detection unit 6 and the speed detection value VEi output from the speed detection unit 17 are input, and the speed input VEi is input to the function f1 to input the vibration amplitude of the piezoelectric body 22. The detection value Si is calculated. The function f1 can be expressed by a linear function of the first to third order, but a lookup table may be used as in the above embodiment. Further, the input power detection value POi of the power converter 25 is measured and input. In the next calculation step, the phase difference target value PHs is obtained by inputting the vibration amplitude detection value Si and the output voltage amplitude VO into the function f2. In this case, the function f1 is a two-variable function or a two-dimensional lookup table. Next, the phase difference detection value PHi is subtracted from the phase difference target value PHs to obtain the phase difference deviation PHd, and the speed detection value VEi is input to the function f3 to be determined in advance according to the speed of the standing wave actuator not shown. Power target value POs. The detected power input value POi is subtracted from the power target value POs to obtain a power deviation POd, and the speed detection value VEi is subtracted from the speed command VEs to obtain a speed deviation VEd. Next, in the selection determination step, the magnitude of the phase difference deviation PHd and the speed deviation VEd are compared, and the smaller deviation is selected. Here, since the phase difference deviation PHd and the speed deviation VEd are deviation information having different units, the comparison is made by multiplying one deviation by an appropriate value and then comparing them. In this example, the comparison is made after the speed deviation VEd is multiplied by the gain G4. The next step is a setting step, which is different depending on the result of the selection determination step. When the phase difference deviation PHd is small, the frequency F of the oscillator 2 is changed by the amount obtained by multiplying the phase difference deviation PHd by the gain G1, and when the value obtained by multiplying the speed deviation VEd by the gain G4 is small, the speed deviation VEd is gain G2. The frequency F of the oscillation unit 2 is changed by an amount multiplied by. Further, the output voltage amplitude VO of the power converter 25 is changed by an amount obtained by multiplying the power deviation POd by the gain G3. By doing so, when the speed target value VEs is too large and the driving frequency exceeds the maximum efficiency frequency and approaches the resonance frequency of the piezoelectric body 22, the phase difference detection value PHi is limited by the efficient phase difference target value PHs. The In addition, when the speed target value is small and the drive device can be driven without high efficiency, the speed detection value VEi is controlled by the speed target value VEs. By repeating such an operation, the input power of the power conversion unit 25 is controlled to a predetermined value, and speed control is performed during acceleration / deceleration of a standing wave type actuator (not shown), and the speed target value VEs is too large. When the detection value VEi cannot be reached, it is possible to keep the driving state at a high efficiency so that the speed is as fast as possible. In the selection determination step, the selection is switched under one condition, but a plurality of conditions may be used. Of course, it may be configured to suppress hunting by providing hysteresis in the conditions. In the above example, the velocity detection value VEi is input to the function f1, the vibration amplitude detection value Si is obtained from the function f1 (VEi), and then the phase difference target value PHs is obtained from the function f2 (Si, VO). However, in order to simplify this, the phase difference target value PHs may be obtained directly as the function f2 (f1 (VEi), VO) of the velocity detection value VEi.

The block diagram which shows the structure of a 1st Example. The block diagram of a vibration type actuator. The figure which shows the electrode structure of the piezoelectric element of a vibration type actuator. The figure which shows the relationship of the phase difference of the drive frequency of a vibration wave actuator, a rotational speed, an alternating current applied voltage, and the vibration of the vibrating body. The figure which shows the drive frequency and rotational speed of a vibration wave actuator, and the efficiency of the amplifier 3. The figure which shows the relationship of the frequency in a predetermined load condition, a vibration amplitude, and an efficiency index. The figure which shows the characteristic of the vibration wave actuator from which the internal loss according to the relationship between a vibration amplitude and the phase difference target value for making an efficiency index the maximum according to a vibration amplitude differs according to a vibration amplitude. The figure which shows the example of the discontinuous characteristic which has the relationship between the vibration amplitude and phase difference target value which differ for every vibration amplitude area | region. The block diagram which shows the structure of a 2nd Example. The figure which shows the example of a two-dimensional lookup table. The block diagram which shows the structure of a 3rd Example. The figure which shows the relationship between a vibration amplitude, the power supply voltage supplied to the amplifier 3, the electric power and phase difference output to the amplifier 3, and a phase difference target value. The figure which shows the relationship between the rotational frequency of the rotor frequency with the vibration frequency, the power supply voltage supplied to the amplifier 3, the electric power and phase difference output to the amplifier 3, and The block diagram which shows the 2nd structure of a 3rd Example. The block diagram which shows the 3rd structure of a 3rd Example. The flowchart explaining operation | movement of CPU21 of the 3rd structure of a 3rd Example. The block diagram which shows the 1st structure of a 4th Example. The flowchart which shows the 1st control method of a 4th Example. The flowchart which shows the 2nd control method of a 4th Example. The block diagram which shows the 2nd structure of a 4th Example. The flowchart which shows the 1st control method of a 5th Example. The flowchart which shows the 2nd control method of a 5th Example. The flowchart which shows the control method of a 6th Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 22 Piezoelectric body 2, 24 Oscillating unit 3 Amplifying unit 4, 5 Inductor element 6 Phase difference detecting unit 7 Vibration amplitude detecting unit 8 Phase difference target value setting unit 9 Phase difference deviation calculating unit 10 Frequency setting unit 11 Elastic body 12 Rotor DESCRIPTION OF SYMBOLS 13 Friction material 14 Rotating shaft 15 Vibrating body 16 Rotary encoder 17 Speed detection part 18 Amplification factor setting part 19 Power control part 20 Power setting part 21 CPU
23 Vibration detection unit 25 Power conversion unit

Claims (23)

A driving device for a vibration wave actuator having at least a vibrating body having an electro-mechanical energy conversion unit and a moving body that moves by vibration generated in the vibrating body by applying an AC voltage to the electro-mechanical energy conversion unit. And
An oscillation unit that generates a signal of a desired frequency, an amplification unit that amplifies the signal of the desired frequency and outputs an alternating voltage applied to the electro-mechanical energy conversion unit directly or via an impedance matching element, and A vibration detection unit that outputs a vibration detection signal corresponding to the vibration of the vibration body, a vibration amplitude detection unit that outputs a vibration amplitude detection signal having a value corresponding to the vibration amplitude of the vibration body, the vibration detection signal, and the alternating current A phase difference detector that detects a phase difference between the voltages or a voltage phase difference between both ends of the impedance matching element and outputs a phase difference signal; and the phase difference signal and a predetermined phase difference target value A first deviation calculator that outputs a first deviation signal by obtaining a deviation of the frequency, and a frequency setting unit that sets the frequency of the oscillating unit so that the output of the first deviation signal is substantially zero,
2. The vibration wave actuator driving apparatus according to claim 1, wherein the phase difference target value is obtained by a predetermined look-up table or function having a vibration amplitude detection signal as an input.   2. The vibration wave actuator driving device according to claim 1, wherein the phase difference target value changes to either increase or decrease as the vibration amplitude detection signal increases.   The value corresponding to the vibration amplitude is a value corresponding to the speed of the moving body, the current flowing into the electro-mechanical energy conversion unit, or the voltage of the connection part between the impedance matching element and the electro-mechanical energy conversion unit. The drive device for the vibration wave actuator according to claim 1, wherein the drive device is a vibration wave actuator.   4. The look-up table or function has a two-dimensional characteristic in which the vibration amplitude detection signal is input and a value corresponding to the state of the amplifying unit is input. The drive device of the vibration wave actuator in any one.   A speed detector that detects a speed of the moving body and outputs a speed signal; a second deviation calculator that calculates a deviation between the speed signal and a speed target value; and outputs a second deviation signal; 5. The vibration wave according to claim 1, further comprising a state setting unit that sets a state of the amplifying unit so that the second deviation signal is substantially zero in accordance with the deviation signal. Actuator drive. A driving device for a vibration wave actuator having at least a vibrating body having an electro-mechanical energy conversion unit and a moving body that moves by vibration generated in the vibrating body by applying an AC voltage to the electro-mechanical energy conversion unit. And
An oscillation unit that generates a signal of a desired frequency, an amplification unit that amplifies the signal of the desired frequency and outputs an AC voltage applied to the electro-mechanical energy conversion unit directly or via an impedance matching element, and A power control unit that supplies power to the amplification unit, a vibration detection unit that outputs a vibration detection signal corresponding to the vibration of the vibrating body, and a vibration amplitude detection signal that is a value corresponding to the vibration amplitude of the vibrating body A vibration amplitude detection unit, and a phase difference detection unit that outputs a phase difference signal by detecting a value corresponding to a phase difference between the vibration detection signal and the AC voltage or a voltage phase difference between both ends of the impedance matching element And a first deviation calculator that obtains a deviation between the phase difference signal and a predetermined phase difference target value and outputs the first deviation signal, and the oscillation so that the output of the first deviation signal becomes substantially zero. Frequency to set the frequency of It has a tough,
2. The vibration wave actuator driving apparatus according to claim 1, wherein the phase difference target value is obtained by a predetermined look-up table or function having a vibration amplitude detection signal as an input.   7. The vibration wave actuator driving device according to claim 6, wherein the phase difference target value changes to either increase or decrease as the vibration amplitude detection signal increases.   The value corresponding to the vibration amplitude is a value corresponding to the speed of the moving body, the current flowing into the electro-mechanical energy conversion unit, or the voltage of the connection part between the impedance matching element and the electro-mechanical energy conversion unit. The drive device for the vibration wave actuator according to claim 6, wherein the drive device is a vibration wave actuator.   The vibration power actuator according to any one of claims 6 to 8, wherein the power control unit controls input power to the power control unit or output power from the power control unit to a predetermined power. Drive device.   The said look-up table or function has the two-dimensional characteristic which inputs the value according to the state of the said electric power control part while inputting the said vibration amplitude detection signal. The drive device of the vibration wave actuator in any one.   A speed detector that detects a speed of the moving body and outputs a speed signal; a second deviation calculator that calculates a deviation between the speed signal and a speed target value; and outputs a second deviation signal; 11. The vibration according to claim 6, further comprising: a state setting unit that sets a state of the power control unit so that the second deviation signal is set to approximately zero according to the deviation signal. Drive device for wave actuator.   A speed detector that detects a speed of the moving body and outputs a speed signal; a second deviation calculator that calculates a deviation between the speed signal and a speed target value and outputs a second deviation signal; and the first And a selection means for determining which one to select and outputting the selected signal as a third deviation signal, and the frequency setting section includes the third deviation signal. The frequency of the oscillating unit is set so as to be substantially 0. The vibration wave actuator according to any one of claims 1 to 4, or the vibration wave actuator according to any one of claims 6 to 10, Drive device. A vibrating body having at least an electro-mechanical energy conversion unit, a moving body that moves by vibration generated in the vibrating body by applying an AC voltage to the electro-mechanical energy conversion unit, and a frequency of the AC voltage according to a frequency command A method for controlling a driving device of a vibration wave actuator having an oscillating unit to be set and an amplifying unit that amplifies an output of the oscillating unit and applies the AC voltage to the electromechanical energy conversion unit directly or through an impedance matching element. ,
A phase difference detecting step for detecting a phase difference between the AC voltage and the vibration of the vibrating body or a voltage phase difference between both ends of the impedance matching element; and an amplitude for detecting a value corresponding to the vibration amplitude of the vibrating body A detection step; a phase difference target setting step for obtaining a phase difference target value by inputting the vibration amplitude into a predetermined lookup table or function; and calculating a deviation between the phase difference and the phase difference target value. A control method for a driving device of a vibration wave actuator, comprising: a phase difference deviation calculating step for obtaining a deviation of 1; and a frequency setting step for setting the frequency command so that the phase difference deviation is substantially zero.   14. The method of controlling a vibration wave actuator drive device according to claim 13, wherein the phase difference target value changes to either increase or decrease as the vibration amplitude detection signal increases.   The value corresponding to the vibration amplitude is a value corresponding to the speed of the moving body, the current flowing into the electro-mechanical energy conversion unit, or the voltage of the connection part between the impedance matching element and the electro-mechanical energy conversion unit. 15. The method for controlling a driving device for a vibration wave actuator according to claim 13 or claim 14.   16. The control of the driving device of the vibration wave actuator according to claim 13, further comprising a function changing step of changing the look-up table or function according to a value corresponding to a state of the amplifying unit. Method.   A speed detecting step for detecting the speed of the moving body, a speed deviation calculating step for calculating a deviation between the speed of the moving body and a speed target value to obtain a second deviation, and the second deviation being substantially zero 17. The method for controlling a vibration wave actuator driving apparatus according to claim 13, further comprising a state setting step of setting a state of the amplifying unit. A vibrating body having at least an electro-mechanical energy conversion unit, a moving body that moves by vibration generated in the vibrating body by applying an AC voltage to the electro-mechanical energy conversion unit, and a frequency of the AC voltage according to a frequency command An oscillation unit to be set, an amplification unit for amplifying the output of the oscillation unit and applying the AC voltage to the electro-mechanical energy conversion unit directly or via an impedance matching element, a power control unit for supplying power to the amplification unit, and A value according to the vibration amplitude of the vibration detecting unit for detecting vibration of the vibrating member, a phase difference detecting unit for detecting a value according to the phase difference between the AC voltage and the output signal of the vibration detecting unit A vibration wave actuator drive device having a vibration amplitude detector for detecting
A phase difference detecting step for detecting a phase difference between the AC voltage and the vibration of the vibrating body or a voltage phase difference between both ends of the impedance matching element; and an amplitude for detecting a value corresponding to the vibration amplitude of the vibrating body A detection step; a phase difference target setting step for obtaining a phase difference target value by inputting the vibration amplitude into a predetermined lookup table or function; and calculating a deviation between the phase difference and the phase difference target value. A phase difference deviation calculating step for obtaining a deviation of 1, a first frequency setting step for setting the frequency command so that the phase difference deviation is substantially zero, and power for detecting input power or output power of the power control unit A vibration wave actuator comprising: a detection step; and a power control step of controlling the input power or the output power to a predetermined power or controlling it within a predetermined limit power. Method of controlling the braking system.   19. The method of controlling a vibration wave actuator driving device according to claim 18, wherein the phase difference target value changes to either increase or decrease as the vibration amplitude detection signal increases.   The value corresponding to the vibration amplitude is a value corresponding to the speed of the moving body, the current flowing into the electro-mechanical energy conversion unit, or the voltage of the connection part between the impedance matching element and the electro-mechanical energy conversion unit. 20. A method for controlling a vibration wave actuator drive device according to claim 18 or claim 19.   21. The vibration wave actuator driving apparatus according to claim 18, further comprising a function changing step of changing the lookup table or the function according to a value corresponding to a state of the power control unit. Control method.   A speed detecting step for detecting the speed of the moving body, a speed deviation calculating step for calculating a deviation between the speed of the moving body and a speed target value to obtain a second deviation, and the second deviation being substantially zero The method for controlling a vibration wave actuator drive device according to any one of claims 18 to 21, further comprising a state setting step of setting a state of the power control unit.   A speed detection step for detecting the speed of the moving body, a speed deviation calculating step for calculating a deviation between the speed of the moving body and a speed target value to obtain a second deviation, the first deviation, and the second deviation are calculated. A selection selection step for inputting and determining which one to select and a deviation selection step for selecting either the first deviation or the second deviation and setting a third deviation according to the result of the selection determination step And a second frequency setting step for setting the frequency command so that the third deviation is substantially zero. A method for controlling a drive device for a vibration wave actuator according to claim 21.

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