JP2009128215A - Spectroscopic measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a spectroscopic measuring instrument capable of rapidly obtaining the optimal number of additions and conducting a precise measurement in a short time. <P>SOLUTION: The spectroscopic measuring instrument comprises: a light source 12; a spectroscopy means 13 for dispersing light emitted from the light source and irradiating a sample 14 with the processed light; a CCD image sensor 21 which is composed of a plurality of light-sensitive pixels, receives the spectroscopically processed light passing through the sample and outputs a signal corresponding to the intensity of the light; a floating diffusion amplifier 34 for adding respective outputs of the CCD image sensor, which correspond to a number, S, of successive light-sensitive pixels, and outputting a result; and a control circuit 22 for setting the parameter S such that the product of respective parameters E(x), A(x), m(x), n(x) and S is a value which is previously set for an output value of the floating diffusion amplifier, wherein E(x) is the energy of the spectroscopic light for measurements in association with wavelengths used for the measurements, and A(x) is the sensitivity of the light-sensitive pixels, and m(x) is the modulus of decay due to the spectroscopy means, and n(x) is the modulus of decay due to the sample which is set as a temporary value. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a spectroscopic measurement apparatus, and more particularly to a spectroscopic measurement apparatus capable of performing highly accurate measurement in a short time.

  An example of a spectroscopic measurement device that measures the reflectance or transmittance of light of a sample is disclosed in Japanese Patent Application Laid-Open No. 2000-65643. FIG. 12 shows a basic configuration of the spectroscopic measurement apparatus disclosed in the publication. The spectroscopic measurement device that measures the reflectance or transmittance of light of this sample includes a light source 112, a spectroscopic unit 113 that spatially disperses the light irradiated by the light source 112 for each wavelength, And light detecting means 111 arranged to receive light reflected or transmitted through the substance to be measured (sample 114).

  13 shows the configuration of the photodetecting means 111, FIG. 14 shows the drive timing of the CCD image sensor 121 constituting the photodetecting means, and FIG. 15 shows the energy of light applied to the CCD image sensor 121. As shown in FIG. 12, the spectroscopic measurement device disclosed in the above publication is configured to detect light in which light obtained from the light source 112, the spectroscopic means 113, and the spectroscopic means 113 detects a component transmitted through the sample 114 as described above. Means 111 is comprised. The light source 112 has a line shape with a long depth direction on the drawing. The spectroscopic means 113 is arranged so that light having different wavelengths is dispersed in the horizontal direction on the drawing.

  As shown in FIG. 13, the light detection means 111 is composed of a control circuit 122 and a CCD image sensor 121. In the CCD image sensor 121, the vertical transfer path 133-v is arranged to coincide with the depth direction of the drawing of FIG. . With this arrangement, light having the same wavelength is incident on the plurality of pixels 131 arranged in the vertical direction of the CCD image sensor 121.

  The timing chart shown in FIG. 14 shows the signals φV and φH generated by the control circuit 122, where φV is a control signal for the vertical transfer path 133-v and φH is a control signal for the horizontal transfer path 133-h. The charge accumulation in the pixel 131 starts at a timing not shown and ends when φV becomes a high voltage XSG. At this time, the charge accumulated in the pixel 131 is transferred vertically via the transfer gate 132. Moved to Road 133-v. Thereafter, the charges transferred to the vertical transfer path 133-v are transferred on the vertical transfer path 133-v to the horizontal transfer path 133-h by the number corresponding to the number of times φV is set to a low voltage.

  In the timing chart shown in FIG. 14, the number of transfers is switched once in step 1, 3 times in step 2, and 10 times in step 3, and 1 pixel, 3 pixels, Charge for 10 pixels is transferred. While transferring the charge on the vertical transfer path 133-v, the horizontal transfer path 133-h is stopped, and the charge corresponding to the number of times the vertical transfer path 133-v is moved is added to the horizontal transfer path 133-h and held. . Thereafter, by driving φH, the charge held in the horizontal transfer path 133-h is transferred to the floating diffusion amplifier 134, where it is converted into a voltage. In FIG. 13, 135 is an overflow control gate and 136 is an overflow drain.

FIG. 15 shows the energy of light transmitted through the sample 114. A having a short wavelength has a large energy, and B and C have a smaller energy.
JP 2000-65643 A

  By the way, in the prior art disclosed in the above publication, no consideration is given to how to obtain the optimum addition number of pixel signals in a short time and to perform high-precision measurement. The present invention has been made in view of the above problems, and an object of the present invention is to provide a spectroscopic measurement apparatus capable of obtaining an optimum addition number in a short time and performing highly accurate measurement in a short time.

  In order to solve the above-mentioned problem, the invention according to claim 1 is composed of a light source, a spectroscopic means for splitting light from the light source and irradiating the sample as a measurement object, and a plurality of light receiving pixels. A CCD image sensor that receives the spectral light that has passed through and outputs a signal corresponding to the light intensity, and an addition that adds and outputs the outputs corresponding to the S consecutive light receiving pixels output from the CCD image sensor. E (x), the sensitivity of the light receiving pixel with respect to the spectral light for measurement, A (x), and attenuation by the spectroscopic means for the spectral light for measurement The rate is m (x), and the attenuation rate by the sample with respect to the measurement spectral light is a temporary value n (x), and the parameters E (x), A (x), m (x), n The product of (x) and S is the output of the adder circuit. It constitutes a spectroscopic measuring device and a control circuit for setting the parameter S as a preset value for value.

  According to a second aspect of the present invention, in the spectroscopic measurement device according to the first aspect, the control circuit preliminarily sets the parameter n (x) as a minimum value that can be taken by an attenuation factor and with respect to an output value of the addition circuit. The parameter S is set using the set value as the saturated output value of the adder circuit.

  According to a third aspect of the present invention, in the spectroscopic measurement apparatus according to the first aspect, the control circuit preliminarily sets the parameter n (x) as an average value that can be taken by an attenuation factor and with respect to an output value of the addition circuit. The parameter S is set using the set value as an average output value of the adder circuit.

  According to a fourth aspect of the present invention, in the spectroscopic measurement device according to the first aspect, the CCD image sensor transfers a transfer path for sequentially transferring signals in units of the light receiving pixels, and transfers an output from the light receiving pixels to the transfer path. A transfer gate, and the adder circuit includes a floating diffusion amplifier to which an output from the transfer path is input. The control circuit is reset to the floating diffusion amplifier at a timing according to the parameter S. A signal is applied.

  According to a fifth aspect of the present invention, in the spectroscopic measurement apparatus according to the first aspect, the CCD image sensor transfers a transfer path for sequentially transferring signals in units of the light receiving pixels, and transfers an output from the light receiving pixels to the transfer path. A transfer gate, and the adder circuit includes a floating diffusion amplifier to which an output from the transfer path is input. Here, the control circuit is configured to position the spectroscopic unit, the sample, and the CCD image sensor. The timing of the reset signal applied to the floating diffusion amplifier is changed according to the relationship.

  According to the first aspect of the present invention, when the parameter S relating to the number of additions (the number of light receiving pixels for which the output signal is continuously output) takes the provisional value n (x) as the sample attenuation rate, Since the output value is determined to be a value set in advance, the optimum addition number (parameter) S is obtained in a short time, and high-precision measurement can be performed in a short time. According to the second aspect of the present invention, it is possible to obtain the parameter S without saturating the output from the adder circuit, and to perform more accurate measurement. According to the invention of claim 3, since the actual measurement value is output by the adder circuit centering on the average output value, the saturation of the output value and the inability to detect due to noise can be suppressed, and more accurate measurement can be performed. Is possible. According to the fourth aspect of the present invention, it is possible to add outputs from the transfer path in an analog space. According to the invention of claim 5, even if there is a positional deviation between the spectroscopic means and the sample and the CCD image sensor, the timing of the reset signal applied to the floating diffusion amplifier is changed according to the positional deviation. Therefore, measurement with higher accuracy can be performed.

  Next, the best mode for carrying out the present invention will be described.

(Example 1)
First, a first embodiment of a spectroscopic measurement apparatus according to the present invention will be described with reference to FIGS. FIG. 1 illustrates a basic configuration of the spectroscopic measurement apparatus according to the first embodiment. The spectroscopic measurement apparatus according to this embodiment includes a light source 12, a spectroscopic means 13, and a light detection means 11, and the transmittance of light transmitted through a sample 14 placed between the spectroscopic means 13 and the light detection means 11. From n, the spectroscopic measurement for examining the composition and state of the sample 14 is performed. In the following description, each value for each wavelength is expressed with (x) (x = 1, 2, 3). x is a number indicating the wavelength of the incident light. Here, the light having the shortest wavelength is represented by 1, the light having a longer wavelength is represented by 2, and the light having the longest wavelength is represented by 3.

The light detection means 11 includes a CCD image sensor 21 and a control circuit 22. The light shown in the formula (1) generated by the light source 12, for example, a halogen lamp, is irradiated to the spectroscopic means 13.
E = ∫E (x) (x = 1, 2, 3) (1)

The spectroscopic means 13 generates a plurality of light K ₀ (x) [K ₀ (1), K ₀ (2), K ₀ (3)] arranged in a short wavelength to long wavelength direction from left to right in the drawing. . Outputs K ₀ (1) to K ₀ (3) of the spectroscopic means 13 are applied to the sample 14 to be measured, and light transmitted through the sample 14 to be measured is applied to the CCD image sensor 21 constituting the light detecting means 11. . The CCD image sensor 21 includes a plurality of pixels 31, a transfer gate 32, a transfer path 33, and a floating diffusion amplifier 34. The numbers N = 1, 2, 3,... Added to each pixel 31 are the numbers of the pixels used when the operation is described.

Assume that the output of the spectroscopic means 13, K ₀ (1) to K ₀ (3), has the relationship shown in the equation (2) with the output of the light source 12 shown in the equation (1). M (x) corresponding to the transmittance of the spectroscopic means 13 is a constant of 1 or less and a known value.
K ₀ (x) = m (x) × E (x) (x = 1, 2, 3) (2)
Further, the outputs K ₀ (1) to K ₀ (3) of the spectroscopic means 13, the light transmittance n (x) of the sample 14, and the light K ₁ (1) to K ₁ (3) transmitted through the sample 14. There is a relationship shown in Equation (3).
K ₁ (x) = n (x) × K ₀ (x) (x = 1, 2, 3) (3)

  In FIG. 1, the control circuit 22 constituting the light detection means 11 has three terminals, RST, TG, and φ. The CCD image sensor 21 has three terminals connected to the control circuit 22, RST, TG, φ, and an output terminal Vout. The signal applied to the RST terminal generated by the control circuit 22 is a signal for resetting the floating diffusion amplifier 34 of the CCD image sensor 21. Similarly, the signal applied to the TG terminal is a transfer gate for transferring charges from each pixel 31 to the transfer path 33. 32 is a signal for controlling 32, and a signal applied to the φ terminal is a signal for controlling the transfer path 33.

  The operation of accumulating and transferring charges generated in each pixel 31 will be described with reference to FIGS. FIG. 2 shows the configuration of the floating diffusion amplifier 34. FIG. 3 shows the configuration of the transfer gate 32. FIG. 4 shows a control timing chart of the transfer gate 32. FIG. 5 shows a configuration of the transfer path 33 and a control timing chart.

  The floating diffusion amplifier 34 shown in FIG. 2 includes a capacitor 51 realized with a reverse bias applied to a semiconductor PN junction, a reset SW 52, and a source follower circuit 53. A connection point between one end of the capacitor 51, one end of the reset SW 52, and the input end of the source follower circuit 53 is connected to the end of the transfer path 33. The reset SW 52 is composed of a MOS transistor, the other terminal that is not the common connection terminal described above is connected to the power supply voltage, and the RST terminal is connected to the gate. The output terminal of the source follower circuit 53 is connected to the Vout terminal. When the RST terminal is set to the H level, the power supply voltage is supplied to the capacitor 51 connected to the end of the transfer path 33.

  Thereafter, when the RST terminal is set to the L level, a charge determined by the parasitic capacitance of the MOS transistor constituting the set SW 52 is added to the capacitor 51. Thereafter, when the transfer path 33 is driven by a signal applied to the φ terminal, the charge carried on the transfer path 33 is sent to the capacitor 51 and converted into a voltage. When the φ terminal is driven once while the RST terminal is set to H as in the case of the RST terminal → φ terminal → RST terminal, a voltage indicating a charge in one of the transfer paths 33 appears at the output terminal Vout. In the same manner, RST terminal → φ terminal (first time) → φ terminal (second time)... Φ terminal (Sum time). When the φ terminal is driven, a voltage indicating the sum of charges corresponding to Sum of the transfer path 33 appears at the output terminal Vout.

  Next, the function of the transfer gate 32 will be described with reference to FIGS. The transfer gate 32 is disposed between the plurality of pixels 31 and the transfer path 33, and functions to transfer charges from each pixel 31 to the transfer path 33 by a potential determined by a voltage applied to the TG terminal. 3A shows the potential of the transfer gate 32 when the TG terminal is set to the L level, and FIG. 3B shows the potential of the transfer gate 32 when the TG terminal is set to the H level. The timing chart shown in FIG. 4 illustrates the operation of accumulating photocharges in the pixel 31 for a certain period by controlling the voltage applied to the TG terminal. In FIG. 4, the voltage at the TG terminal, the voltage at the RST terminal, the voltage at the φ terminal, and the voltage at the Vout terminal are shown side by side from the top. The operation of accumulating the charge in the pixel 31 for a certain period and the operation of reading out the signal of the pixel 31 are performed in parallel, but during the operation of accumulating the yth charge, the (y-1) th accumulation is performed. A charge reading operation is performed. In FIG. 4, the period shown in gray for the signals applied to the RST terminal and the φ terminal is arbitrary. The operation of this part will be described later. As shown in FIG. 3B, when an H level is applied to the TG terminal, the potential between each pixel 31 and the transfer path 33 decreases, and the charge in each pixel 31 moves to the transfer path 33. This operation eliminates the charge of the pixel 31, and the charge generated by the light irradiated to the pixel 31 is accumulated here until the H level is next applied to the TG terminal. Next, when the H level is applied to the TG terminal, the charge previously accumulated in the pixel 31 moves to the transfer path 33.

  Finally, the configuration and operation timing of the transfer path 33 will be described with reference to FIG. The transfer path 33 described here has a configuration corresponding to a system called double-layer pulse drive, and the drive signal represented by φ in FIGS. 1 to 5 is converted into two signals φ1 in opposite layers. And φ2. As shown in FIG. 5A, the transfer path 33 includes a P-type semiconductor layer 82 on an N-type semiconductor substrate 81, an N-type semiconductor layer 83 arranged at a predetermined interval therein, and an N-type semiconductor. The first electrode 84 is placed on the upper surface of 83, and the second electrode 85 is placed on the upper surface of the P-type semiconductor layer 82. A pair of a first electrode 84 placed on the upper surface of the N-type semiconductor 83 shown as a minimum unit in FIG. 5A and a second electrode 85 placed on the upper surface of the P-type semiconductor layer 82. When the signal φ1 is added here, the signal φ2 is added to the next smallest unit. Thus, the first electrode 84 and the second electrode 85 are connected so that the signals φ1 and φ2 are alternately applied. In this state, as shown in FIG. 5C, when signals φ1 and φ2 having opposite phases are added, the potential at the timing of time t = 1, time t = 2 and time t = 3 is shown in FIG. As shown in (B), the charge is transferred from right to left. The transfer gate 32 shown in FIG. 3 is arranged before or behind the paper surface of the transfer path 33 shown in FIG. 5, and the pixel 31 is arranged before or behind the transfer gate 32.

  Next, the timing chart shown in FIG. 6 will be described. In FIG. 6, a schematic diagram of the arrangement of a plurality of pixels, an RST terminal signal, a φ terminal signal, and an output terminal output signal Vout [the number of charges added indicated by Sum (x)] are shown in order from the top. The schematic diagram of the pixel arrangement corresponds to the plurality of pixels 31 shown in FIG. FIG. 6 illustrates an operation after the charge accumulated in the pixel 31 is transferred to the transfer path 33 via the transfer gate 32. The operation of accumulating charges in the pixel 31 has been described with reference to FIGS. When reading the incident light E (x) (x = 1), the signal φ rises five times while the floating diffusion amplifier 34 is reset by the input signal to the RST terminal, and the incident light E (x) (x = 2) In reading, the signal φ rises three times while the floating diffusion amplifier 34 is reset, and in reading out the incident light E (x) (x = 3), the signal φ rises five times while the floating diffusion amplifier 34 is reset. Is shown. As described with reference to FIG. 2, the number of times the signal φ rises while the floating diffusion amplifier 34 is reset corresponds to the number Sum (x) that is added to the charge received from the transfer path 33 by the floating diffusion amplifier 34. .

The output signal Vout (x) is an output of the pixel unit according to the charge addition number Sum (x), and is expressed by Expression (4).
Vout (x) = A (x) × K ₁ (x) × Sum (x)
= A (x) * m (x) * n (x) * E (x) * Sum (x) (x = 1, 2, 3)
(4)
A (x): Sensitivity of pixel 31 E (x): Energy of light source 12 m (x): Light transmittance of known spectroscopic means n (x): Light transmittance of sample 14 to be measured Sum (x) : Number of charge additions Table 1 shows an example of each value constituting Equation (4).

The conditions in Table 1 are to obtain the light transmittance n (x) of the sample 14, and when the maximum value of this value, nmax (x) is detected, each value is set so that Equation (5) holds. I have decided.
Vsat = A (x) * m (x) * nmax (x) * E (x) * Sum (x) (x = 1, 2, 3)
(5)
When the sum of charges Sum (x) is determined from the transmittance m (x) of the spectroscopic means 12, the sensitivity A (x) of the pixel 31, and the light energy E (x), It shows that the output Vout becomes the saturation level Vsat at the wavelength (x = 1, 2, 3). Actually, since n (x) = 0 to 1 is measured, the output Vout (x = 1, 2, 3) of all wavelengths is below the saturation level Vsat, and the output Vout exceeds the saturation level Vsat. There is no problem to measure. The values of the light transmittance m (x) of the spectroscopic means 12, the sensitivity A (x) of the pixel 31, and the light energy E (x) shown in Table 1 are for illustrative purposes. The values are determined by the composition, configuration, and implementation means of the optical filter, pixel, and light source. Next, the pixel and the light source will be described in a specific example.

FIG. 7 shows an example of energy E (x) in wavelength units for each color temperature of the light source. This is a copy of the information published on Ushio's website. FIG. 8 shows an example of the spectral sensitivity A (x) of the pixel. This is a transcription of the spectral sensitivity of a silicon photodiode shown in “Natural imaging device basics” (p133, FIG. 5-1), published by Nippon Riko Publishing Co., Ltd. In FIG. 8, the vertical axis indicates the spectral sensitivity R (mA / W), L _D indicates the depletion layer width, and each curve indicates the minority carrier diffusion length L _n . In the above description, the attenuation rate is described as the light transmittance m (x) and n (x) corresponding to the transmittance. However, the attenuation rate is described as the reflectance corresponding to the reflectance. May be. The same applies to the following embodiments.

(Example 2)
Next, Embodiment 2 according to the present invention will be described with reference to FIG. Regarding the first embodiment, the basic configuration of the spectroscopic measurement apparatus shown in FIG. 1 and the technical contents shown in FIGS. 2 to 5, 7, and 8 are the same in the second embodiment, and the description thereof is omitted. To do. As in the timing chart shown in FIG. 6, the timing chart shown in FIG. 9 is a schematic diagram of the arrangement of a plurality of pixels in order from the top, RST terminal signal, φ terminal signal, output terminal output signal Vout [Sum ( x) are shown side by side. The timing chart of the present embodiment shown in FIG. 9 and the timing chart of the first embodiment shown in FIG. 6 differ in the number of additions Sum (x) determined by the signals at the RST terminal and the φ terminal. This embodiment corresponds to the operation when setting with the values shown in Table 2.

The conditions in Table 2 are to obtain the light transmittance n (x) of the sample 14, and when the average value of this value, nave (x) is detected, each value is set so that Equation (6) holds. I have decided.
Vave = A (x) * m (x) * nave (x) * E (x) * Sum (x) (x = 1, 2, 3)
(6)
In equation (6), the sum of charges Sum (x) is determined from the transmittance m (x) of the spectroscopic means 12, the sensitivity A (x) of the pixel 31, and the light energy E (x). It shows that the output Vout becomes the average value Vave at all wavelengths (x = 1, 2, 3). Actually, since n (x) = 0 to 1 is measured, the output Vout (x = 1, 2, 3) of all wavelengths is distributed around the average value Vave, and is above the noise level and below the saturation level. The output is buried in noise, or the problem of remeasurement due to exceeding the saturation level is low. The values of the light transmittance m (x) of the spectroscopic means 12, the sensitivity A (x) of the pixel 31, and the light energy E (x) shown in Table 2 are for illustrative purposes. The optical filter, pixel, and light source composition, configuration, and implementation means determine their values, and the specific example shown in Example 1 can be applied.

(Example 3)
Next, Example 3 will be described. The description about the first embodiment other than FIG. 6 is applied to the third embodiment. FIG. 10 is a timing chart corresponding to FIG. 6 for explaining the operation of the third embodiment. Table 3 shows values in Example 3 corresponding to the values of the parameters constituting the expression (4) in Table 1. In Table 3, parts different from Table 1 are marked with *. In the timing chart shown in FIG. 10, the added value of the pixel 31 having the wavelength of x = 3, Sum (3) is 4. The difference between the sum of the wavelengths x = 3 and Sum (3) being 5 and 4 is determined by the relationship between the signal applied to the RST terminal and the signal applied to the φ terminal.

Example 4
Next, Example 4 will be described. The description about the first embodiment other than FIG. 6 is also applied to the fourth embodiment. FIG. 11 is a timing chart corresponding to FIG. 6 for explaining the operation of the fourth embodiment. Table 4 shows the setting values in Example 4 corresponding to the parameter values constituting the equation (4). In Table 4, parts different from Table 1 are marked with *. In the timing chart shown in FIG. 11, the position of the pixel (31) that receives light of wavelengths x = 1, 2, and 3 is shifted to the right by one pixel. Even if the incident light is shifted, the signal shown in Expression (4) is obtained by the relationship between the signal applied to the RST terminal and the signal applied to the φ terminal. The shift of the incident light is determined by one or a plurality of positional relationships among the light source 12, the spectroscopic means 13, and the light detection means 11. In FIG. 11, in the voltages at the RST terminal and the Vout terminal, the dot pattern portion indicates an indeterminate signal region.

It is a figure which shows the basic composition of Example 1 of the spectroscopic measurement apparatus which concerns on this invention. FIG. 3 is a diagram illustrating a configuration of a floating diffusion amplifier in the first embodiment. FIG. 3 is a schematic diagram illustrating a configuration of a transfer gate according to the first embodiment. 3 is a timing chart for explaining an operation of a transfer gate in the first embodiment. 4 is a timing chart of the configuration and operation of a transfer path in the first embodiment. 3 is a timing chart for explaining the operation of the first embodiment. It is a figure which shows an example of the energy of the wavelength unit of the light source relevant to Example 1. FIG. 7 is a diagram illustrating an example of spectral sensitivity of a pixel related to Example 1. FIG. 6 is a timing chart for explaining an operation of the second embodiment. 10 is a timing chart for explaining the operation of the third embodiment. 10 is a timing chart for explaining the operation of the fourth embodiment. It is a figure which shows the structural example of the conventional spectroscopic measurement apparatus. FIG. 13 is a diagram showing a configuration of the conventional photodetecting means shown in FIG. 14 is a timing chart for explaining the operation of the light detection means shown in FIG. FIG. 13 is a diagram showing the energy of light that has passed through a sample in FIG.

Explanation of symbols

11 Light detection means
12 Light source
13 Spectroscopic means
14 samples
21 CCD image sensor
31 pixels
32 Transfer gate
33 Transfer path
34 Floating diffusion amplifier
51 capacity
52 Reset SW
53 Source follower circuit
81 N-type semiconductor substrate
82 P-type semiconductor
83 N-type semiconductor
84 First electrode
85 Second electrode

Claims (5)

A light source;
Spectroscopic means for spectrally dividing the light from the light source and irradiating the sample as a measurement object;
A CCD image sensor comprising a plurality of light receiving pixels, receiving the spectral light having passed through the sample, and outputting a signal corresponding to the light intensity;
An adding circuit for adding and outputting the outputs corresponding to the S consecutive light receiving pixels output from the CCD image sensor;
The energy of the spectral light for measurement related to the wavelength used for measurement is E (x), the sensitivity of the light receiving pixel to the spectral light for measurement is A (x), and the attenuation rate by the spectral means for the spectral light for measurement is m (x), and the attenuation rate by the sample with respect to the spectral light for measurement is a temporary value n (x), and the parameters E (x), A (x), m (x), n (x) And a control circuit that sets the parameter S so that the product of S and S is a value set in advance with respect to the output value of the adder circuit.   The control circuit uses the parameter n (x) as a minimum value that can be taken by an attenuation factor, and uses a value preset for the output value of the adder circuit as a saturated output value of the adder circuit. The spectroscopic measurement apparatus according to claim 1, wherein the spectroscopic measurement apparatus is set.   The control circuit sets the parameter S to the parameter n (x) as an average value that can be taken by an attenuation factor, and a value preset for the output value of the adder circuit as an average output value of the adder circuit. The spectroscopic measurement apparatus according to claim 1, wherein the spectroscopic measurement apparatus is set.   The CCD image sensor includes a transfer path for sequentially transferring a signal in units of light receiving pixels and a transfer gate for transferring an output from the light receiving pixels to the transfer path, and the adder circuit receives an output from the transfer path. The spectroscopic measurement apparatus according to claim 1, wherein the control circuit applies a reset signal to the floating diffusion amplifier at a timing according to the parameter S.   The CCD image sensor includes a transfer path for sequentially transferring a signal in units of light receiving pixels and a transfer gate for transferring an output from the light receiving pixels to the transfer path, and the adder circuit receives an output from the transfer path. The control circuit includes a floating diffusion amplifier that is input. Here, the control circuit changes a timing of a reset signal applied to the floating diffusion amplifier according to a positional relationship between the spectroscopic unit, the sample, and the CCD image sensor. The spectroscopic measurement device according to claim 1.

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