JP2009128157A - Inspection system of surface inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide the inspection system of the surface inspection device, more reducing the load applied to a user than before, and accelerating the automation and labor saving of inspection work by the surface inspection device. <P>SOLUTION: The inspection system 100 is adapted to the surface inspection device 1 constituted so as to move the inspection head 16, which is provided in the leading end of a head body 16A in a detachable manner and equipped with an axial scanning part 16B in which a mirror 18 is incorporated, along an axial line AX while rotating the same around the axial line AX and altering the light path of inspection light incident in the inspection head 16 along the axial line AX by the mirror 18 to irradiate a work W and inspecting the surface of the work W on the basis of the quantity of the reflected light returned to the inspection head 16 from the work W and diagnoses the presence of the abnormality of the inspection head 16. This inspection system includes: a diagnosing device 200 for diagnosing the presence of the abnormality of the inspection head 16; and a replacing device 300 for replacing the scanning part 16B of the inspection head 16 in the case where the diagnosing device 200 determines that there is abnormality in the inspection head 16. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an inspection system for diagnosing the presence or absence of an abnormality in an inspection head of a surface inspection apparatus.

  As a device for inspecting the inner peripheral surface of a cylindrical object to be inspected, a hollow shaft inspection head is rotated around its axis and sent in the axial direction to insert the inspection head inside the object to be inspected. The inspection object is irradiated with laser light as inspection light from the outer periphery of the head, and the inner peripheral surface of the inspection object is sequentially scanned from one end to the other end in the axial direction, and reflection from the inspection object corresponding to the scanning is performed. There is known a surface inspection apparatus that receives light through an inspection head and determines the state of an inner peripheral surface of an object to be inspected, for example, the presence or absence of a defect, based on the amount of reflected light received (for example, patent document) 1).

JP-A-11-281582

  In the surface inspection apparatus described above, if the portion of the inspection head that irradiates the inspection light or receives the reflected light becomes dirty, the amount of the inspection light decreases or the light receiving sensitivity of the reflected light changes, resulting in a decrease in inspection accuracy. To do. However, since the conventional surface inspection apparatus is not provided with a function for self-diagnosis of such an abnormality, the user of the surface inspection apparatus determines the presence / absence of an abnormality by his / her own vision or the like. Further, in the conventional surface inspection apparatus, when an abnormality occurs in this way, a user replaces a part. Therefore, the burden placed on the user is large.

  Therefore, an object of the present invention is to provide an inspection system for a surface inspection apparatus that can reduce the burden on the user more than ever and can promote automation and labor saving of inspection work by the surface inspection apparatus.

  The inspection system of the present invention includes an inspection head including a head body (16A) and a shaft-shaped scanning section (16B) that is detachably provided at the tip of the head body and in which an optical path changing means (18) is incorporated. Is rotated around the axis (AX) by the rotation driving means (40), and is moved along the axis by the linear driving means (30), and the optical path of the inspection light incident along the axis in the inspection head Is changed by the optical path changing means, the inspection light whose optical path is changed is irradiated onto the inspection object (W), the reflected light returned from the inspection object to the inspection head is received, and the amount of the reflected light Applied to the surface inspection apparatus (1) for inspecting the surface of the object to be inspected based on the above, and in the inspection system (100) for diagnosing the presence or absence of abnormality of the inspection head, the presence or absence of abnormality of the inspection head is diagnosed And the replacement device (300) that replaces the scanning unit of the inspection head when the diagnostic device determines that the inspection head is abnormal. Resolve.

  According to the inspection system of the present invention, the diagnostic device can diagnose the presence or absence of an abnormality in the inspection head, and when the diagnosis device determines that the inspection head is abnormal, the scanning device is replaced by the replacement device. The burden on the user can be reduced as compared with the conventional case. Further, by performing the diagnosis of the inspection head and the replacement of the scanning unit in this manner, the diagnosis work and the replacement work by the user can be reduced or omitted, respectively, so that the inspection work by the surface inspection apparatus can be automated and labor-saving. Can be promoted.

  In one form of the inspection system of this invention, it is arrange | positioned on the movement path | route of the said inspection head at the time of inspecting the said to-be-inspected object with the said surface inspection apparatus, and a pseudo defect (220b-220e) is provided in an internal peripheral surface. A sample piece (220) that is provided and has a through hole (220a) through which the inspection head can pass; and the diagnostic device has an inspection result obtained by causing the surface inspection device to inspect the inner peripheral surface of the sample piece. The presence or absence of abnormality of the inspection head may be diagnosed based on the above. In this case, it is possible to diagnose whether or not the inspection head is abnormal by causing the surface inspection apparatus to inspect a pseudo defect having a known shape and size and comparing the inspection result with the actual pseudo defect.

  In this embodiment, the diagnostic device causes the surface inspection device to inspect the inner peripheral surface of the sample piece every time the surface inspection device inspects the inspection object, and diagnoses the presence or absence of abnormality of the inspection head. Also good. As described above, the abnormality of the inspection head can be quickly found by diagnosing the presence or absence of abnormality every time the inspection object is inspected. Therefore, the reliability of the inspection result of the surface inspection apparatus can be improved.

  In one form of the inspection system of the present invention, test pieces (231A, 231B) having test inspection portions (233A, 233B, 233C) formed in a shape corresponding to the inspection target portion of the inspection object and provided with pseudo defects. 231C), an inspection position (P1) where the surface inspection apparatus can inspect the inspection object portion of the inspection object, and the surface inspection apparatus performs the test inspection of the test piece. Moving means (210) that can be driven to a diagnostic position (P2) capable of inspecting a part, and the diagnostic apparatus, when a predetermined diagnostic condition is satisfied, The moving means is controlled to be driven to a diagnostic position, the surface inspection device is inspected for the test piece, and the inspection head is in an abnormal state based on the inspection result. No it may be to diagnose. By diagnosing the presence or absence of an abnormality in the inspection head using the test inspection unit having such a shape, the reliability of the diagnosis result can be improved.

  In this embodiment, the predetermined diagnostic condition may be satisfied when a predetermined number of the inspection objects are continuously inspected by the surface inspection apparatus. In this case, by appropriately setting the predetermined number, it is possible to improve the reliability of the diagnosis result of the presence or absence of abnormality while suppressing the number of times of moving the surface inspection apparatus to the diagnosis position. Therefore, the inspection efficiency by the surface inspection apparatus can be improved.

  Further, the test inspection part and the inspection target part have the same shape, and the test inspection part is provided with a pseudo defect at the same position as a position where a defect is expected to occur in the inspection target part. Also good. The place where a defect occurs in the inspection object can be predicted by the processing method of the inspection object or the shape of the inspection target portion. Therefore, by providing a pseudo defect at such a position of the test inspection unit (hereinafter sometimes referred to as an expected position) and diagnosing whether the surface inspection apparatus can detect the pseudo defect at the predicted position, The inspection accuracy of the inspection object by the inspection apparatus can be improved. Moreover, the reliability of the diagnostic result using the test piece can be further improved.

  In one form of the inspection system of the present invention, a chuck mechanism (22) capable of switching between a gripping state for gripping the scanning unit and a releasing state for releasing the scanning unit is provided at the tip of the head body, The exchange device includes an operation mechanism (320) capable of switching the state of the chuck mechanism to the gripping state and the release state, and the scanning unit to the chuck mechanism switched to the release state by the operation mechanism. A scanning unit attaching / detaching mechanism (330) that can be held and removed and inserted, and the scanning unit attaching / detaching mechanism and the scanning unit can be transferred, and the scanning unit removed from the head body A scanning unit replacement mechanism (340) that receives the scanning unit from the scanning unit attaching / detaching mechanism and holds the replacement scanning unit by passing it to the scanning unit attaching / detaching mechanism; After controlling the operation mechanism to switch to the released state, the scanning unit attaching / detaching mechanism is controlled such that the scanning unit is removed from the chuck mechanism, and then the scanning unit attaching / detaching mechanism is used as the replacement scanning unit. The scanning unit replacement mechanism is controlled so that the scanning unit replacement mechanism is held, and then the scanning unit attaching / detaching mechanism is controlled so that the replacement scanning unit is inserted into the chuck mechanism, and the replacement scanning unit is inserted. Control means (400) for controlling the operation mechanism so that the chuck mechanism is switched to the gripping state may be provided. Thus, the scanning unit can be exchanged by controlling each mechanism of the exchange device.

  In one form of the inspection system of the present invention, the chuck mechanism is switched to the released state by being pushed into the head main body from the front end side, and is switched to the gripping state when the pushing force is removed (23 The operation mechanism includes a jig (321) for pushing the chuck member into the head body, and the jig is placed in front of the inspection head so that the jig abuts the chuck member. Jig moving means (322, 324) for arranging and moving the jig in the axial direction of the inspection head in this state may be provided. In this case, the operation mechanism can switch the state of the chuck mechanism between the gripping state and the release state only by the operation of positioning the jig in front of the inspection head and the operation of moving the jig in the axial direction of the inspection head. Therefore, the operation mechanism can be provided with a relatively simple configuration.

  In addition, in the above description, in order to make an understanding of this invention easy, the reference sign of the accompanying drawing was attached in parenthesis, but this invention is not limited to the form of illustration by it.

  As described above, according to the inspection system of the present invention, a diagnostic device for diagnosing the presence or absence of an abnormality in the inspection head, and an exchange device for replacing the scanning unit when the diagnosis device determines that the inspection head is abnormal Therefore, the diagnostic work and replacement work by the user can be reduced or omitted, respectively. Therefore, it is possible to reduce the burden on the user compared to the conventional case. Moreover, automation and labor saving of the inspection work by the surface inspection apparatus can be promoted.

  FIG. 1 shows a schematic configuration of an inspection system according to an embodiment of the present invention. The inspection system 100 is a system for diagnosing the presence or absence of an abnormality in the surface inspection apparatus 1 that inspects the inner peripheral surface F of a cylindrical hole H provided in a workpiece W as an object to be inspected. A diagnostic device 200 for diagnosing the presence or absence of an abnormality in the head 16 and an exchange device 300 for exchanging the scanning unit 16B of the inspection head 16 are provided.

  An outline of the method for inspecting the workpiece W by the surface inspection apparatus 1 will be described. The workpiece W is transported on a predetermined transport line by the transport device 101. The workpiece W is fixed on the transport device 101 by the fall prevention jig 102 so that the opening of the hole H faces upward. Above the transport line, the surface inspection apparatus 1 is supported by the moving apparatus 210 so that the tip of the inspection head 16 faces downward. An inspection position D for stopping the workpiece W when performing inspection with the surface inspection apparatus 1 is set on the transport line. When the workpiece W being conveyed reaches the inspection position D, the conveyance device 101 temporarily stops the conveyance and temporarily stops the workpiece W at the inspection position D. The surface inspection apparatus 1 inspects the inner peripheral surface F of the hole H by inserting the inspection head 16 into the hole H of the workpiece W stopped at the inspection position D. Details of this inspection will be described later. After the inspection by the surface inspection apparatus 1 is completed, the transport apparatus 101 carries out the workpiece W that has been inspected from the inspection position D and transports the next workpiece W to the inspection position D. Thereafter, the above-described operation is repeatedly performed, whereby a plurality of workpieces W are inspected.

  The surface inspection apparatus 1 will be described with reference to FIG. FIG. 2 shows a schematic configuration of the surface inspection apparatus 1. The surface inspection apparatus 1 includes an inspection mechanism 2 for executing an inspection, and a control unit 3 for executing operation control of the inspection mechanism 2, processing of measurement results by the inspection mechanism 2, and the like. Further, the inspection mechanism 2 projects inspection light onto the workpiece W and detects the detection unit 5 as detection means for receiving reflected light from the workpiece W, and gives a predetermined operation to the detection unit 5. And a drive unit 6 for the purpose.

  The detection unit 5 receives a laser diode (hereinafter referred to as LD) 11 as a light source of inspection light and reflected light from the work W, and according to the amount of light (reflected light intensity) per unit time of the reflected light. A photodetector (hereinafter referred to as PD) 12 that outputs a current or voltage signal, a light projecting fiber 13 that guides the inspection light emitted from the LD 11 toward the work W, and reflected light from the work W to the PD 12. It includes a light receiving fiber 14 for guiding, a holding cylinder 15 that holds the fibers 13 and 14 in a bundled state, and a hollow shaft-like inspection head 16 that is provided coaxially outside the holding cylinder 15. . The inspection head 16 is rotatably supported by a head holding cylinder (not shown) provided outside the holding cylinder 15.

  At the tip of the holding cylinder 15, the inspection light guided through the light projecting fiber 13 is emitted in the form of a beam along the direction of the axis AX of the inspection head 16 (hereinafter referred to as the axial direction), and the inspection head A lens 17 is provided that collects reflected light that travels in the direction opposite to the inspection light along the 16 axial direction on the light receiving fiber 14. A mirror 18 as an optical path changing means is fixed to the tip portion (right end portion in FIG. 1) of the inspection head 16, and a light transmission window 16 a is provided on the outer periphery of the inspection head 16 so as to face the mirror 18. ing. The mirror 18 changes the optical path of the inspection light emitted from the lens 17 toward the light transmission window 16 a, and advances the optical path of the reflected light that has entered the inspection head 16 from the light transmission window 16 a toward the lens 17. Change direction.

  The drive unit 6 includes a linear drive mechanism 30, a rotation drive mechanism 40, and a focus adjustment mechanism 50. The linear drive mechanism 30 is provided as a linear drive means for moving the inspection head 16 in the axial direction. In order to realize such a function, the linear drive mechanism 30 includes a base 31, a pair of rails 32 fixed to the base 31, and a slider 33 that can move in the axial direction of the inspection head 16 along the rails 32. Further, a feed screw 34 disposed in parallel to the axis AX of the inspection head 16 and a motor 35 that rotationally drives the feed screw 34 are provided on the side of the slider 33. The slider 33 functions as a means for supporting the entire detection unit 5. That is, the LD 11 and PD 12 are fixed to the slider 33, the inspection head 16 is attached to the slider 33 via the rotation drive mechanism 40, and the holding cylinder 15 is attached to the slider 33 via the focus adjustment mechanism 50. Further, a nut 36 is fixed to the slider 33, and a feed screw 34 is screwed into the nut 36. Therefore, when the feed screw 34 is rotationally driven by the electric motor 35, the slider 33 moves along the rail 32 in the axial direction of the inspection head 16, and accordingly, the entire detection unit 5 supported by the slider 33 is moved. It moves in the axial direction of the inspection head 16. By driving the detection unit 5 using the linear drive mechanism 30, the irradiation position (scanning position) of the inspection light on the inner peripheral surface F of the workpiece W can be changed with respect to the axial direction of the inspection head 16.

  The rotation drive mechanism 40 is provided as a rotation drive unit that rotates the inspection head 16 around the axis AX. In order to realize such a function, the rotation drive mechanism 40 includes an electric motor 41 as a rotation drive source and a transmission mechanism 42 that transmits the rotation of the electric motor 41 to the inspection head 16. For the transmission mechanism 42, a known rotation transmission mechanism such as a belt transmission device or a gear train may be used. In this embodiment, a belt transmission device is used. By transmitting the rotation of the electric motor 41 to the inspection head 16 via the transmission mechanism 42, the inspection head 16 rotates around the axis AX with the mirror 18 as an optical path changing means fixed therein. By rotating the inspection head 16 using the rotation drive mechanism 40, the irradiation position of the inspection light on the inner peripheral surface F of the workpiece W can be changed with respect to the circumferential direction of the workpiece W. Then, by combining the movement of the inspection head 16 in the axial direction and the rotation around the axis AX, the inner peripheral surface F of the workpiece W can be scanned with the inspection light over the entire surface. Note that the holding cylinder 15 does not rotate when the inspection head 16 rotates. Further, the rotary drive mechanism 40 is provided with a rotary encoder 43 that outputs a pulse signal each time the inspection head 16 rotates by a predetermined unit angle. The number of pulse signals output from the rotary encoder 43 correlates with the rotation amount (rotation angle) of the inspection head 16, and the period of the pulse signals correlates with the rotation speed of the inspection head 16.

  The focus adjusting mechanism 50 is provided as a focus adjusting means for driving the holding cylinder 15 in the direction of the axis AX so that the inspection light is focused on the inner peripheral surface F of the workpiece W. In order to realize the function, the focus adjustment mechanism 50 is disposed between the support plate 51 fixed to the base end portion of the holding cylinder 15 and the slider 33 and the support plate 51 of the linear drive mechanism 30. Rail 52 that guides the inspection head 16 in the axial direction, a feed screw 53 that is arranged parallel to the axis AX of the inspection head 16 and screwed into the support plate 51, and an electric motor 54 that rotationally drives the feed screw 53. It has. By rotating the feed screw 53 with the electric motor 54, the support plate 51 moves along the rail 52, and the holding cylinder 15 moves in the axial direction of the inspection head 16. Thereby, the length of the optical path from the lens 17 through the mirror 18 to the inner peripheral surface F can be adjusted so that the inspection light is focused on the inner peripheral surface F of the workpiece W.

  Next, the control unit 3 will be described. The control unit 3 includes an arithmetic processing unit 60 as a computer unit that executes inspection process management by the surface inspection apparatus 1, processing of measurement results of the detection unit 5, etc., and each unit of the detection unit 5 in accordance with instructions from the arithmetic processing unit 60. An operation control unit 61 for controlling the operation of the signal processing unit, a signal processing unit 62 for executing a predetermined process on the output signal of the PD 12, an input unit 63 for a user to input an instruction to the arithmetic processing unit 60, An output unit 64 for presenting test results and the like processed by the arithmetic processing unit 60 to the user, a computer program to be executed by the arithmetic processing unit 60, and a storage unit 65 for storing measured data and the like. ing. The arithmetic processing unit 60, the input unit 63, the output unit 64, and the storage unit 65 can be configured using a general-purpose computer device such as a personal computer. In this case, the input unit 63 is provided with input devices such as a keyboard and a mouse, and the output unit 64 is provided with a monitor device. An output device such as a printer may be added to the output unit 64. The storage unit 65 is a hard disk storage device or a storage device such as a semiconductor storage element capable of storing data. The operation control unit 61 and the signal processing unit 62 may be realized by a hardware control circuit or may be realized by a computer unit.

  Details of the inspection method of the workpiece W by the surface inspection apparatus 1 will be described. When inspecting the surface of the inner peripheral surface F of the workpiece W, each of the arithmetic processing unit 60, the operation control unit 61, and the signal processing unit 62 operates as follows. In starting the inspection, the arithmetic processing unit 60 instructs the operation control unit 61 to start an operation necessary for inspecting the inner peripheral surface F of the workpiece W in accordance with an instruction from the input unit 63. Upon receiving the instruction, the operation control unit 61 causes the LD 11 to emit light with a predetermined intensity, and the operations of the motors 35 and 41 so that the inspection head 16 moves in the axial direction and rotates around the axis AX at a constant speed. To control. Further, the operation control unit 61 controls the operation of the motor 54 so that the inspection light is focused on the inner peripheral surface F as the surface to be inspected. By such operation control, the inner peripheral surface F is scanned by inspection light from one end to the other end. The driving of the inspection head 16 in the axial direction may be a feeding operation at a constant speed, or an intermittent feeding operation that moves by a predetermined pitch every time the inspection head 16 rotates.

  In conjunction with the scanning of the inner peripheral surface F described above, the output signal of the PD 12 is sequentially guided to the signal processing unit 62. The signal processing unit 62 performs analog signal processing necessary for processing the output signal of the PD 12 by the arithmetic processing unit 60, and further performs A / D conversion on the analog signal after the processing with a predetermined number of bits, The obtained digital signal is output to the arithmetic processing unit 60 as a reflected light signal. The signal processing executed by the arithmetic processing unit 60 includes various processes such as a process of nonlinearly amplifying the output signal so as to enlarge the brightness difference of the reflected light detected by the PD 12 and a process of removing a noise component from the output signal. May be used as appropriate. Fast Fourier transform processing, inverse Fourier transform processing, and the like can be appropriately combined. The A / D conversion by the signal processing unit 62 is performed using a pulse train output from the rotary encoder 43 as a sampling clock signal. As a result, a digital signal having a gradation correlated with the amount of light received by the PD 12 while the inspection head 16 rotates by a predetermined angle is generated and output from the signal processing unit 62.

  The arithmetic processing unit 60 that has received the reflected light signal from the signal processing unit 62 stores the received signal in the storage unit 65. Further, the arithmetic processing unit 60 generates a two-dimensional image in which the inner peripheral surface F of the work W is developed in a planar manner using the reflected light signal stored in the storage unit 65. The two-dimensional image is, for example, an image in which the inner peripheral surface F is developed on a plane defined by an orthogonal two-axis coordinate system in which the circumferential direction of the workpiece W is the x-axis direction and the axial direction of the inspection head 16 is the y-axis direction. Equivalent to. Note that, when generating a two-dimensional image in the arithmetic processing unit 60, a two-dimensional image in which defects to be detected are emphasized by performing edge processing, binarization processing, etc. on the original image obtained from the reflected light signal. May be generated. Then, the arithmetic processing unit 60 determines whether or not a defect exceeding an allowable limit exists on the inner peripheral surface F by processing the obtained image with a predetermined algorithm, and outputs the determination result to the output unit. 64.

  Details of the inspection head 16 will be described with reference to FIG. FIG. 3 is an enlarged view of the cross section of the tip portion of the inspection head 16. In FIG. 3, the right side of the inspection head 16 corresponds to the distal end side, and the left side corresponds to the proximal end side. The inspection head 16 is a head main body 16A that is rotatably supported by a head holding cylinder (not shown) disposed between the holding cylinder 15 and the inspection head 16, and a scanning that is detachably provided at the tip of the head main body 16A. Part 16B. A lens pipe 15a attached to the holding cylinder 15 protrudes from the tip of the head main body 16A. As shown in FIG. 3, the scanning unit 16B is attached to the head main body 16A so as to cover the lens pipe 15a.

  The scanning unit 16B includes a support unit 20 supported by the head main body 16A, and an optical path changing unit 21 provided with the mirror 18 and the light transmission window 16a. The support part 20 and the optical path changing part 21 are each cylindrical and provided coaxially. The support portion 20 is provided with an insertion portion 20a formed with a predetermined outer diameter in order from the side inserted into the head main body 16A, and a large-diameter portion 20b having an outer diameter larger than the insertion portion 20a. The insertion portion 20a is a portion that is gripped by the chuck mechanism 22 of the head main body 16A.

  As shown in FIG. 3, a chuck mechanism 22 for holding the support portion 20 of the scanning portion 16B is provided at the tip of the head main body 16A. The chuck mechanism 22 includes a chuck member 23 provided so as to be movable in the axial direction, a restraining member 24 provided between the chuck member 23 and the head main body 16A, and the chuck member 23 on the tip side of the head main body 16A (in FIG. 3). A spring 25 biased to the right side), and a pressing ring 26 for preventing the chuck member 23 and the restraining member 24 from jumping out of the tip of the head body 16A by the biasing force of the spring 25. As the chuck member 23 and the restraining member 24, a collet chuck is provided. The spring 25 is in a state of being contracted to some extent so as to urge the chuck member 23 toward the distal end side (right side in FIG. 3), and when the chuck member 23 is pushed into the proximal end side (left side in FIG. 3). It is attached in a state where a predetermined amount of shrinkage allowance is provided so that it can be shrunk. As the spring 25, for example, a coil spring or a disc spring is used.

  As shown in FIG. 3, a tapered surface 24 a is formed on the inner periphery of the restraining member 24 so that the inner diameter gradually increases toward the base end side (left side in FIG. 2). A tapered surface 23 a that is inclined in the same direction as the tapered surface 24 a of the restraining member 24 and is in surface contact with the tapered surface 24 a is formed on the outer periphery of the chuck portion 23. An insertion hole 23b into which the scanning unit 16B is inserted passes through the center of the chuck member 23. As the inner diameter of the insertion hole 23b, for example, a value slightly larger than the outer diameter of the insertion section 20a of the scanning section 16B and smaller than the outer diameter of the large diameter section 20b is set. Note that the inner diameter of the insertion hole 23b may be set to a value substantially the same as the outer diameter of the insertion portion 20a of the scanning portion 16B. The chuck member 23 is provided with a plurality of slits (not shown) in the axial direction from the distal end portion 23c. Therefore, when the chuck member 23 is pushed into the restraint member 24 by the spring 25, the motion in the axial direction is converted into the motion in the radial center by the tapered surfaces 23a and 24a by the wedge action, and the inner diameter of the insertion hole 23b is reduced. Get smaller.

  The size of the slit provided in the chuck member 23 is such that when the chuck member 25 is pushed into the restraint member 24 by the spring 25, the tip end 23c of the chuck member 23 is the tip end 24b of the restraint member 24. And the inner diameter of the insertion hole 23b is set to be smaller than the outer diameter of the support portion 20 of the scanning portion 16B. Therefore, if the scanning portion 16B is inserted into the insertion hole 23b when the inner diameter of the insertion hole 23b is reduced in this way, the scanning portion 16B can be held and restrained by the chuck member 23. Hereinafter, this state may be referred to as a restrained state. On the other hand, when the chuck member 23 is moved to a position where the distal end side end 23c of the chuck member 23 and the distal end side end 24b of the restraining member 24 are aligned, or to the base end side (left side in FIG. 3) from the position, Since the force acting on the member 23 toward the center in the radial direction is lost, the inner diameter of the insertion hole 23b returns to the original size, that is, the same diameter as the outer diameter of the support portion 20 of the scanning portion 16B. Therefore, the scanning unit 16B can be easily removed or inserted. Hereinafter, this state may be referred to as a released state.

  The restraining member 24 is also provided with a plurality of slits (not shown) in the axial direction from the proximal end portion. Therefore, when the chuck member 23 is pushed into the restraint member 24 by the spring 25, the outer diameter of the restraint member 24 is expanded. Thereby, since the outer periphery of the restraining member 24 and the inner periphery of the head main body 16A can be brought into close contact with each other, the scanning unit 16B held by the chuck member 23 can be rotated together with the head main body 16A. On the other hand, when the chuck member 23 is pushed into the head main body 16A, the force acting on the restraining member 24 toward the outer periphery in the radial direction disappears, so that the outer periphery of the restraining member 24 is separated from the inner circumference of the head main body 16A.

  Returning to FIG. 1, the description of the inspection system 100 will be continued. The diagnosis device 200 is a device for diagnosing whether or not the surface inspection device 1 is abnormal. The surface inspection device 1 includes an inspection position P1 and a surface inspection device 1 arranged above the inspection position D set on the conveyance line. A moving device 210 that drives the moving base 211 between a plurality of (three in FIG. 1) test pieces 231A, 231B, and 231C and a diagnostic position P2 (see FIG. 4) disposed above the test device 230. A sample piece 220 provided coaxially with the inspection head 16 of the surface inspection apparatus 1 at the lower end of the moving base 211, and any of the test pieces 231A, 231B, 231C when the moving base 211 is at the diagnostic position P2. And an inspection test device 230 that supports these test pieces 231A, 231B, and 231C. FIG. 4 shows the state of the inspection system 100 when the movement base 211 is moved to the diagnostic position P2. As the inspection position P1, a position where the center of the hole H of the workpiece W at the inspection position D of the workpiece W set on the transport line and the axis AX of the inspection head 16 are substantially coaxial is set.

  The moving device 210 includes a pair of rails 212 that extend in a direction intersecting with the conveying line of the conveying device 101 and supports the moving base 211, and an actuator 213 that moves the moving base 211 along the rail 212. The movement base 211 is supported by these rails 212 so as to be movable along the pair of rails 212. The surface inspection apparatus 1 is supported on the moving base 211 so as to be movable in the axial direction, and the moving base 211 is provided with a drive mechanism 213 for moving the surface inspection apparatus 1 in the axial direction. The drive mechanism 213 moves the surface inspection apparatus 1 between the forward end P3 and the backward end P4. As the forward end P3, a position where the inspection head 16 can be inspected below the lower end of the moving base 211 to inspect the workpiece W is set. As the backward end P4, a position where the inspection head 16 can be prevented from interfering with the operation of each part of the exchange device 300 in a state where the inspection head 16 is most pulled into the apparatus is set. As the drive mechanism 213, for example, a drive mechanism using a feed screw is provided in the same manner as the linear drive mechanism 30 of the surface inspection apparatus 1 described above. In the following, moving downward in FIG. 1 may be referred to as forward, and moving upward in FIG. 1 may be referred to as backward.

  The sample piece 220 is fixed to the moving base 211 so as not to move, and a through hole 220a coaxial with the inspection head 16 is provided on the center line thereof. The through hole 220a has an inner diameter through which the inspection head 16 can pass, and the inspection head 16 passes through the through hole 220a and is drawn downward from the lower end of the moving base 211. FIG. 5 is a sectional view taken along the center line of the sample piece 220. As shown in FIG. 5, a plurality of pseudo defects 220b, 220c, 220d, and 220e are formed along the center line CL (corresponding to the axis AX of the inspection head 16) on the inner peripheral surface of the through hole 220a. . A chamfered portion 220f is formed at the mouth of one end of the through hole 220a. The inner peripheral surface of the through hole 220a is processed into a smooth surface having a constant reflectivity using polishing or the like, and the reflectivity of the pseudo defects 220b to 220e is set to be significantly lower than the inner peripheral surface of the through hole 220a. Has been. The sizes and shapes of the pseudo defects 220b to 220e may be appropriate. In this embodiment, as an example, all of the pseudo defects 220b to 220e are circular, and their sizes (diameters) are set so as to increase with distance from the chamfered portion 220f in the direction of the center line CL. The sample piece 220 is attached to the moving base 211 such that the chamfered portion 220f faces the detection unit 5 side. Accordingly, when the inspection head 16 is advanced downward from the lower end of the moving base 211, the inspection head 16 passes through the through hole 220a along the direction of arrow F in FIG.

  The inspection test device 230 includes a rotating disk 232 that is driven to rotate by an actuator (not shown). The test pieces 231A, 231B, and 231C are provided at equal intervals on the same circumference of the rotating disk 232 (see FIG. 6). Further, each of the test pieces 231A, 231B, 231C is supported by the rotating disk 232 so that one of them is coaxial with the inspection head 16 when the moving base 211 is at the diagnosis position P2. As shown in FIGS. 1 and 4, each test piece 231A, 231B, 231C has test inspection portions 233A, 233B, 233C having different shapes. In the test pieces 231A, 231B, and 231C shown in this embodiment, the depths of the test inspection units 233A, 233B, and 233C are different from each other. The shapes of these test inspection units 233A, 233B, and 233C are set according to the workpiece W to be inspected by the surface inspection apparatus 1. For example, when the surface inspection apparatus 1 inspects three types of workpieces W having different shapes of the holes H, a test having three types of test inspection units 233A, 233B, and 233C corresponding to the shapes of the holes H of these workpieces W. Pieces 231A, 231B, and 231C are provided. In this case, the test inspection units 233A, 233B, and 233C are formed in the same shape as the shape of the hole H of the three types of workpieces W to be inspected by the surface inspection apparatus 1. Each test inspection unit 233A, 233B, 233C is provided with a pseudo defect at the same position as the position where a defect is expected to occur in the hole H of the workpiece W corresponding to the shape. Hereinafter, when it is not necessary to distinguish between the test pieces 231A, 231B, and 231C, they are simply referred to as test pieces 231. Similarly, the test inspection units 233A, 233B, and 233C are simply referred to as the test inspection unit 233 when it is not necessary to distinguish them.

  Next, the exchange device 300 will be described with reference to FIGS. 1, 4, and 6. FIG. 6 is a view of the moving base 211 at the diagnosis position P2 as viewed from below in FIG. 4 and 6, the central controller 400 is not shown. The exchange device 300 includes a scanning unit holding mechanism 310 that holds the scanning unit 16B for replacement, and a jig driving mechanism as an operation mechanism that drives a jig 321 for switching the chuck mechanism 22 of the inspection head 16 to a released state. 320, a scanning unit attaching / detaching mechanism 330 for attaching / detaching the scanning unit 16B to / from the inspection head 16, a scanning unit replacement mechanism 340 for replacing the scanning unit 16B detached from the inspection head 16 and the scanning unit 16B attached to the inspection head 16. And a scanning unit moving mechanism 350 that transfers the scanning unit 16B between the scanning unit holding mechanism 310 and the scanning unit replacement mechanism 340. The replacement scanning unit 16B includes not only unused ones but also ones that can be reused by performing maintenance such as cleaning of the transparent window 16a. As shown in FIG. 1, the jig driving mechanism 320, the scanning unit attaching / detaching mechanism 330, the scanning unit replacing mechanism 340, and the scanning unit moving mechanism 350 are provided on the moving base 211. On the other hand, the scanning unit holding mechanism 310 is provided at one end of the pair of rails 212 of the moving device 210. The scanning unit holding mechanism 310 is provided so that the scanning unit moving mechanism 350 and the scanning unit 16B can be transferred when the moving base 211 is at the diagnosis position P2.

  The scanning unit holding mechanism 310 is provided on each of the actuator 311 having a rotation axis, the arm 312 attached to rotate integrally with the rotation shaft of the actuator 311, and both ends of the arm 312, and holds the scanning unit 16 </ b> B. A pair of possible holders 313 and a linear drive actuator 314 for moving the actuator 311 in parallel with the axis AX of the inspection head 16 are provided. As shown in FIG. 6, the arm 312 is attached to the rotation shaft of the actuator 311 so as to rotate around its center. The actuator 311 includes a first position P11 that makes the arm 312 substantially parallel to the moving base 211 so that one of the pair of holders 313 is positioned on the surface inspection apparatus 1 side, and the other of the one holder 313 is the surface inspection apparatus 1. The position of the arm 312 is switched to the second position P12 that makes the arm 312 substantially parallel to the movement base 211 so as to be positioned on the side. The linear drive actuator 314 moves the actuator 311 between the forward end P13 and the backward end P14. The forward end P13 can cause the opening / closing chuck 353 of the scanning unit moving mechanism 350 to grip the scanning unit 16B held by the holder 313 located on the surface inspection apparatus 1 side at the first position P11 and the second position P12. The position is set. In FIG. 4, the scanning unit 16B is shown by an imaginary line when the actuator 311 is moved to the forward end P13 while the scanning unit 16B is held by the holder 313. The backward end P14 is a position where the scanning unit 16B held by the holder 313 located on the surface inspection apparatus 1 side at the first position P11 and the second position P12 does not interfere with the movement of the opening / closing chuck 353 of the scanning unit moving mechanism 350. Is set.

  The holder 313 includes a through hole 313a into which the support unit 20 of the scanning unit 16B is inserted, and a gripping member 313b that holds the support unit 20 of the scanning unit 16B inserted into the through hole 313a. A plurality of gripping members 313b are provided at equal intervals in the circumferential direction of the through hole 313a. The gripping member 313b is provided so that its tip protrudes into the through-hole 313a and its tip can move to substantially the same position as the inner peripheral surface of the through-hole 313a. It is biased to protrude. Therefore, when the support part 20 of the scanning unit 16B is inserted into the through hole 313a of the holder 313, the tip of each gripping member 313b comes into contact with the support part 20 from the circumferential direction, thereby gripping the scanning part 16B. be able to. Further, since the scanning unit 16B is gripped by the biasing force of the spring, the scanning unit 16B is removed from the holder 313 by pulling out the scanning unit 16B inserted into the through hole 313a from the optical path changing unit 21 side. Can do.

  As shown in FIGS. 1 and 6, the jig driving mechanism 320 includes an actuator 322 having a rotation axis, an arm 323 provided with a jig 321 at one end and the other end attached to the rotation axis of the actuator 322, and an actuator. A linear drive actuator 324 that moves 322 in parallel with the axis AX of the surface inspection apparatus 1 is provided. The jig 321 has a cylindrical shape provided with a through hole 321a having an inner diameter through which the inspection head 16 can pass on the center line, and the upper end of the jig 321 comes into contact with only the end of the chuck member 23 to chuck. The member 23 is formed in a shape that can be pushed into the inspection head 16. The actuator 322 controls the operation position P21 where the arm 323 is substantially parallel to the moving base 211 and each operation of the surface inspection apparatus 1 so that the center of the through hole 321a of the jig 321 and the axis AX of the inspection head 16 are coaxial. The arm 323 is rotated between the retracted position P22 that makes the arm 323 substantially perpendicular to the moving base 211 so that the interference between the tool 321 and the arm 323 can be prevented. The linear drive actuator 324 drives the actuator 322 between the forward end P23 and the backward end P24. As the forward end P23, a position is set in which the jig 321 of the arm 323 at the operation position P21 pushes the chuck member 23 of the surface inspection apparatus 1 at the forward end P3 into the inspection head 16 to bring the chuck mechanism 22 into a released state. . As the backward end P24, a position slightly higher than the length of the insertion portion 20a of the scanning portion 16B is set with respect to the forward end P23. In this jig driving mechanism 320, the jig 321 is moved by the actuator 322 and the linear drive actuator 324, and these actuators 322 and 324 correspond to the jig moving means of the present invention.

  The scanning unit attaching / detaching mechanism 330 includes an actuator 331 having a rotating shaft, an arm 332 attached to rotate integrally with the rotating shaft of the actuator 331, and a gripping state that is provided at the tip of the arm 332 and grips the scanning unit 16B. An open / close chuck 333 that can be switched to a release state in which the scanning unit 16B is released is provided. One end of the arm 332 is attached to the rotation shaft of the actuator 331, and an open / close chuck 333 is provided at the other end. The actuator 331 has an insertion position P31 and an opening / closing chuck 333 that make the arm 332 substantially parallel to the moving base 211 so that the center of the scanning unit 16B held by the opening / closing chuck 333 and the axis AX of the inspection head 16 are coaxial. The arm 332 is rotated between the transfer position P32 and the arm 332 that is substantially perpendicular to the moving base 211 so that the gripped scanning unit 16B can be transferred to the scanning unit replacement mechanism 340. As shown in FIG. 1, the scanning unit attaching / detaching mechanism 330 is provided by the jig driving mechanism 320 so that the movable range of the arm 332 and the opening / closing chuck 333 does not overlap the movable range of the jig 321 and the arm 323 of the jig driving mechanism 320. Are also shifted downward.

  The scanning unit replacement mechanism 340 is provided on each of the actuator 341 having a rotating shaft, the arm 342 attached to rotate integrally with the rotating shaft of the actuator 341, and both ends of the arm 342, and holds the scanning unit 16B. A pair of possible holders 343 and a linear drive actuator 344 for moving the actuator 341 in parallel with the axis AX of the inspection head 16 are provided. The arm 342 is attached to the rotation shaft of the actuator 341 so as to rotate around its center. The holder 343 is the same as the holder 313 of the scanning unit holding mechanism 310. The actuator 341 can deliver the scanning unit 16B to the first delivery position P41 where the scanning unit 16B can be delivered to the scanning unit attaching / detaching mechanism 330 and the scanning unit moving mechanism 350 by rotating the arm 342. The position of each holder 343 is switched to the second delivery position P42. Since the pair of holders 343 are provided at both ends of the arm 342, when the position of one holder 343 is switched to the first delivery position P41, the position of the other holder 343 becomes the second delivery position P42. When the position of the holder 343 is switched to the second delivery position P42, the position of the other holder 343 becomes the first delivery position P41.

  As shown in FIG. 6, the scanning unit replacement mechanism 340 includes the center of the scanning unit 16B held by the opening / closing chuck 333 and the first delivery position P41 or the arm 332 of the scanning unit attaching / detaching mechanism 330 at the delivery position P32. The second delivery position P42 is arranged at a position higher than the scanning unit attaching / detaching mechanism 330 with the moving base 211 as a reference so that the center of the holder 343 located on the scanning unit attaching / detaching mechanism 330 side is coaxial. The linear drive actuator 344 drives the actuator 341 between the forward end P43 and the backward end P44. As the forward end P43, a position where the scanning unit 16B held by the holder 343 can be held by the opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330 or the opening / closing chuck 353 of the scanning unit moving mechanism 350 is set. As the backward end P44, a position where the scanning unit 16B held by each holder 343 does not interfere with the movement of the opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330 and the opening / closing chuck 353 of the scanning unit moving mechanism 350 is set.

  The scanning unit moving mechanism 350 is the same as the scanning unit attaching / detaching mechanism 330, and is provided at the tip of the arm 352, an actuator 351 having a rotation axis, an arm 352 attached to rotate integrally with the rotation axis of the actuator 351, and the like. And an open / close chuck 353 that can be switched between a gripping state for gripping the scanning portion 16B and a releasing state for releasing the scanning portion 16B. The scanning unit moving mechanism 350 is arranged at the same height as the scanning unit attaching / detaching mechanism 330, and its arm 352 rotates to the same height as the arm 332 of the scanning unit attaching / detaching mechanism 330. One end of the arm 352 is attached to the rotation shaft of the actuator 351, and an open / close chuck 353 is provided at the other end. The actuator 351 includes a first transfer position P51 that makes the arm 352 substantially parallel to the moving base 211 and the scanning unit replacement mechanism 340 so that the scanning unit 16B can be transferred to and from the scanning unit holding mechanism 310. The position of the arm 352 is switched to the second transfer position P52 that makes the arm 352 substantially vertical with respect to the moving base 211 so that the scanning unit 16B can be transferred to and from.

  The operations of the drive mechanism 213 of the diagnosis apparatus 200 and the mechanisms 310, 320, 330, 340, and 350 of the exchange apparatus 300 are controlled by a central controller 400 as a computer unit. The central control device 400 controls the rotational position of the rotating disk 232 by controlling the actuator of the inspection test device 230. Further, the central control device 400 outputs a command to the control unit 3 of the surface inspection apparatus 1 and controls the operation of each mechanism of the surface inspection device 1 via the control unit 3. The central control device 400 outputs a command to the control unit 3 to cause the surface inspection device 1 to inspect the work W, or to cause the diagnosis device 200 to diagnose the presence or absence of the inspection head 16. For example, the central controller 400 controls the drive mechanism 213 to move the movement base 211 to the inspection position P1 in order to cause the surface inspection apparatus 1 to inspect the workpiece W. Further, the arm 323 of the jig driving mechanism 320 is moved to the retreat position P22 so that the jig driving mechanism 320 and the scanning unit attaching / detaching mechanism 330 of the exchange device 300 do not interfere with each operation of the surface inspection apparatus 1. In addition to controlling the actuator 322, the actuator 331 is controlled such that the arm 332 of the scanning unit attaching / detaching mechanism 330 moves to the delivery position P32. Further, the operation of the drive mechanism 213 is controlled to move the surface inspection apparatus 1 to the forward end P3. Hereinafter, this state may be referred to as a ready state. Then, after these controls are completed, the central controller 400 outputs a command to the control unit 3 so that the inner surface F of the workpiece W is inspected by the surface inspection device 1 as described above.

  7 and 8 show an abnormality diagnosis that is repeatedly executed by the central controller 400 at a predetermined interval in order to diagnose the presence or absence of an abnormality in the inspection head 16 when the surface inspection apparatus 1 is inspecting the workpiece W. It is a flowchart which shows a routine. FIG. 7 shows a first abnormality diagnosis routine executed by the central controller 400 to perform the diagnosis of the inspection head 16 every time the workpiece W is inspected using the sample piece 220. FIG. 8 shows a second abnormality diagnosis routine executed by the central controller 400 to diagnose the inspection head 16 using the test piece 231 when a predetermined diagnosis condition is satisfied. The routines shown in FIGS. 7 and 8 are executed in parallel with each other and also with respect to other routines executed by the central controller 400.

  First, the first abnormality diagnosis routine of FIG. 7 will be described. In the first abnormality diagnosis routine of FIG. 7, first, the central controller 400 determines whether or not the work W is inspected by the surface inspection apparatus 1 in step S11. For example, it is determined that the inspection by the surface inspection apparatus 1 is stopped when an apparatus necessary for the inspection such as the surface inspection apparatus 1 or the conveyance apparatus 101 is stopped. If it is determined that the inspection of the workpiece W has been stopped, the current routine is terminated. On the other hand, if it is determined that the workpiece W is being inspected by the surface inspection apparatus 1, the process proceeds to step S <b> 12, and the central control device 400 executes a pre-inspection diagnosis process using the sample piece 220. As described above, the sample piece 220 is provided coaxially with the inspection head 16 at the lower end of the moving base 211. When inspecting the workpiece W, the surface inspection apparatus 1 causes the inspection head 16 to protrude downward from the lower end of the moving base 211 and inserts the inspection head 16 into the hole H of the workpiece W. Therefore, the inspection head 16 passes through the through hole 220a of the sample piece 220 and is inserted into the hole H of the workpiece W. Therefore, when the inspection head 16 passes through the through hole 220a of the sample piece 220, the surface inspection apparatus 1 inspects the inner peripheral surface of the through hole 220a and diagnoses the presence or absence of abnormality of the inspection head 16 based on the inspection result. To do. Hereinafter, this diagnosis may be referred to as pre-test diagnosis. This pre-inspection diagnosis is performed every time the workpiece W is inspected by the surface inspection apparatus 1.

  As described above, the pseudo defects 220b to 220e are provided on the inner peripheral surface of the through hole 220a of the sample piece 220. Therefore, the shapes and sizes of the pseudo defects 220b to 220e are stored in the storage unit 65 of the control unit 3 in advance. The pre-inspection diagnosis is performed by comparing the result of inspecting the inner peripheral surface of the through hole 220a of the sample piece 220 by the surface inspection apparatus 1 with the content stored in the storage unit 65. For example, when the light transmission window 16a of the inspection head 16 is dirty, the inspection light from the light transmission window 16a and the reflected light from the work W are weakened by the dirt of the light transmission window 16a, so that the actual pseudo defects 220b to 220e. There is a possibility that a value different from the shape and the size of is detected. Further, when the inspection head 16 is shaken, the image of the pseudo defects 220b to 220e is distorted and the shape or size changes according to the degree of the shake. Therefore, the shapes and sizes of the pseudo defects 220b to 220e detected by the surface inspection apparatus 1 are within a predetermined allowable range with respect to the actual shapes and sizes of the pseudo defects 220b to 220e given to the storage unit 65 in advance. If it is, it is determined that the inspection head 16 is normal, and if it is outside the allowable range, it is determined that the inspection head 16 is abnormal.

  In the next step S13, the central controller 400 determines whether or not there is an abnormality in the inspection head 16 as a result of the pre-inspection diagnosis. If the inspection head 16 is normal, the process proceeds to step S14, and the central control device 400 outputs a command to the control unit 3 so as to continue the inspection of the workpiece W by the surface inspection device 1. In this case, for example, when the surface inspection apparatus 1, the diagnosis apparatus 200, and the exchange apparatus 300 are in a state where the inspection of the workpiece W cannot be performed by the surface inspection apparatus 1, such as when the moving base 211 is at the diagnosis position P2. The position of the surface inspection device 1, the state of the diagnostic device 200, and the state of the exchange device 300 are changed to the ready state, and then the inspection of the workpiece W by the surface inspection device 1 is continued. Hereinafter, this process may be referred to as an inspection continuation process. On the other hand, if there is an abnormality in the inspection head 16, the process proceeds to step S15, and the central controller 400 controls the diagnostic device 200 and the exchange device 300 to replace the scanning unit 16B of the inspection head 16.

  A method for replacing the inspection head 16 will be described with reference to FIGS. 1, 4, and 6. When replacing the inspection head 16, the central control device 400 outputs a command to the control unit 3, stops the operation of the LD 11 and PD 12, and causes the inspection head 16 to be most drawn into the device by the linear drive mechanism 30. Next, the central control device 400 controls the operation of the driving mechanism 213 to move the surface inspection device 1 to the retracted end P4, and then controls the operation of the moving device 210 to move the movement base 211 to the diagnosis position P2. . In parallel with these controls, the central controller 400 moves the actuator 311 of the scanning unit holding mechanism 310 of the exchange apparatus 300 to the backward end P14. Further, the arm 312 is switched to the first position P11 or the second position P12 so that the holder 313 holding the replacement scanning unit 16B moves to the surface inspection apparatus 1 side.

  After moving the movement base 211 to the diagnostic position P2, the central controller 400 moves the actuator 322 of the jig driving mechanism 320 to the forward end P23 and moves the arm 323 to the operation position P21. Further, the arm 332 of the scanning unit attaching / detaching mechanism 330 is moved to the insertion position P31 and the open / close chuck 333 is switched to the released state. Further, the arm 352 of the scanning unit moving mechanism 350 is moved to the first transfer position P51 and the open / close chuck 353 is switched to the released state. In parallel with these controls, the central controller 400 moves the actuator 341 of the scanning unit replacement mechanism 340 to the retracted end P44, switches one holder 343 to the first delivery position P41, and sets the other holder 343 to the second position. The arm 342 of the scanning unit replacement mechanism 340 is rotated so as to switch to the delivery position P42.

  Thereafter, the central controller 400 controls the operation of the drive mechanism 213 to move the surface inspection apparatus 1 to the forward end P3. Thereby, the chuck member 23 can be pushed into the inspection head 16 by the jig 321 and the chuck mechanism 22 can be switched to the released state. In FIG. 4, the inspection head 16 of the surface inspection apparatus 1 in this state is indicated by an imaginary line. Next, the open / close chuck 333 of the scanning unit attaching / detaching mechanism 330 is switched to the gripping state. Thereby, the scanning unit 16B mounted on the inspection head 16 can be gripped by the open / close chuck 333. Subsequently, the central controller 400 moves the surface inspection apparatus 1 to the retracted end P4 and moves the actuator 322 of the jig driving mechanism 320 to the retracted end P24 at the same speed as the surface inspection apparatus 1. Accordingly, the scanning unit 16B can be removed from the inspection head 16. In parallel with these controls, the central controller 400 moves the actuator 311 of the scanning unit holding mechanism 310 to the forward end P13, and then switches the open / close chuck 353 of the scanning unit moving mechanism 350 to the gripping state. Then, the actuator 311 of the scanning unit holding mechanism 310 is moved to the backward end P14 while the open / close chuck 353 of the scanning unit moving mechanism 350 is held. Accordingly, the opening / closing chuck 353 of the scanning unit moving mechanism 350 can be held by the replacement scanning unit 16B.

  The opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330 grips the scanning unit 16B that has been mounted on the inspection head 16 and the opening / closing chuck 353 of the scanning unit moving mechanism 350 grips the replacement scanning unit 16B. The control device 400 moves the arm 332 of the scanning unit attaching / detaching mechanism 330 to the delivery position P32 and moves the arm 352 of the scanning unit moving mechanism 350 to the second transfer position P52. Subsequently, the actuator 341 of the scanning unit replacement mechanism 340 is moved to the forward end P43, and then the opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330 and the opening / closing chuck 353 of the scanning unit moving mechanism 350 are switched to the released state. Accordingly, the scanning unit 16B held by the scanning unit attaching / detaching mechanism 330 can be held by one holder 343, and the scanning unit 16B held by the scanning unit moving mechanism 350 can be held by the other holder 343.

  Next, the central controller 400 moves the actuator 341 of the scanning unit replacement mechanism 340 to the retracted end P44. Subsequently, the central controller 400 rotates the arm 342 of the scanning unit replacement mechanism 340 by 180 °, and moves one holder 343 to the second delivery position P42 and the other holder 343 to the first delivery position P1. That is, the positions of the scanning units 16B are changed so that the replacement scanning unit 16B is sent to the scanning unit attaching / detaching mechanism 330 and the scanning unit 16B that has been mounted on the inspection head 16 is sent to the scanning unit moving mechanism 350. Replace. Thereafter, the central controller 400 moves the actuator 341 of the scanning unit replacement mechanism 340 to the forward end P43, and then switches the open / close chuck 333 of the scanning unit attaching / detaching mechanism 330 to the gripping state. Subsequently, the central controller 400 moves the actuator 341 of the scanning unit replacement mechanism 340 to the retracted end P44. Accordingly, the opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330 can grip the replacement scanning unit 16B. On the other hand, the scanning unit 16B mounted on the inspection head 16 until then is held by the holder 343 of the scanning unit replacement mechanism 340.

  After the replacement scanning unit 16B is gripped by the opening / closing chuck 333 of the scanning unit attaching / detaching mechanism 330, the central controller 400 moves the arm 332 of the scanning unit attaching / detaching mechanism 330 to the insertion position P31. Next, the actuator 322 of the jig driving mechanism 320 is moved to the forward end P23, and then the surface inspection apparatus 1 is moved to the forward end P3. As a result, the replacement scanning unit 16 </ b> B can be inserted into the chuck mechanism 22 of the inspection head 16. Thereafter, the central controller 400 switches the open / close chuck 333 of the scanning unit attaching / detaching mechanism 330 to the released state, and then moves the surface inspection apparatus 1 to the retracted end P4. As a result, the chuck mechanism 22 is switched to the restrained state, and the replaced scanning unit 16B is mounted on the inspection head 16. After mounting the scanning unit 16B on the inspection head 16, the central controller 400 moves the arm 332 of the scanning unit attaching / detaching mechanism 330 to the delivery position P32 and moves the arm 323 of the jig driving mechanism 320 to the retracted position P22. . Thereby, the replacement work of the scanning unit 16B is completed. By controlling the operations of the mechanisms 310 to 350 of the exchange device 300 in this way, the central control device 400 functions as the control means of the present invention.

  Returning to FIG. 7, the description of the first abnormality diagnosis routine will be continued. After replacing the scanning unit 16B, in the next step S16, the central control device 400 executes abnormality diagnosis processing for diagnosing whether or not the inspection head 16 is abnormal using the sample piece 220 and the test piece 231. This process is performed in order to diagnose whether or not the inspection can be continued with the inspection head 16 with the replacement of the scanning unit 16B. Since the diagnosis method using the sample piece 220 is the same as the above-described pre-examination diagnosis, description thereof is omitted. Therefore, here, a diagnostic method using the test piece 231 will be described. When diagnosing the presence or absence of abnormality of the inspection head 16 using the test piece 231, the central control device 400 first has the same as the hole H of the workpiece W to be inspected next by the surface inspection device 1 among the test pieces 231A, 231B, and 231C. The rotating disk 232 of the inspection test device 230 is controlled so that the test piece 231 having the shape test inspection unit 233 moves to a position coaxial with the inspection head 16. Subsequently, the central controller 400 causes the surface inspection apparatus 1 to inspect the test inspection unit 233 of the test piece 231 that is coaxial with the inspection head 16. At this time, the central controller 400 controls the surface inspection apparatus 1 so that the test inspection unit 233 is performed by the same inspection method as that for inspecting the hole H of the workpiece W.

  Next, the central controller 400 diagnoses whether or not the inspection head 16 is abnormal. As described above, the test inspection unit 233 is provided with a pseudo defect similarly to the through hole 220a of the sample piece 220. Therefore, the shape and size of the pseudo defect of the test inspection unit 233 is stored in the storage unit 65 of the control unit 3 in advance, and the stored contents are compared with the inspection result to thereby inspect the inspection head 16. Diagnose the presence or absence of abnormalities. As described above, when the light transmission window 16a of the inspection head 16 is soiled or the rotation of the inspection head 16 is shaken, a value different from the shape and size of the pseudo defect of the actual test inspection unit 233 is detected. There is a fear. Therefore, the size and shape of the pseudo defect of the test inspection unit 233 detected by the surface inspection apparatus 1 are predetermined with respect to the actual shape and size of the pseudo defect of the test inspection unit 233 given to the storage unit 65 in advance. If it is within the allowable range, it is determined that the inspection head 16 is normal, and if it is outside the allowable range, it is determined that the inspection head 16 is abnormal.

  In subsequent step S <b> 17, the central controller 400 determines whether or not there is an abnormality in the inspection head 16. If the inspection head 16 is normal, the process proceeds to step S14, the inspection continuation process is executed, and the inspection of the workpiece W by the surface inspection apparatus 1 is continued. Thereafter, the current routine is terminated. On the other hand, if there is an abnormality in the inspection head 16, the process proceeds to step S18, and the central controller 400 executes an abnormality handling process. As the abnormality handling processing, first, processing for stopping the inspection by the surface inspection apparatus 1 is performed. In addition, a warning process is performed to notify the user that there is an abnormality in the surface inspection apparatus 1. As the warning process, for example, a warning sound may be sounded or a warning may be output to the output unit 64 of the control unit 3. Thereafter, the current routine is terminated.

  Next, the second abnormality diagnosis routine will be described with reference to FIG. In FIG. 8, the same processes as those in FIG. 7 are denoted by the same reference numerals and description thereof is omitted. Note that the routine of FIG. 8 is executed in parallel with other routines executed by the central controller 400. In the routine of FIG. 8, the central controller 400 first determines in step S11 whether or not the work W is inspected by the surface inspection apparatus. If it is determined that the inspection of the workpiece W has been stopped, the current routine is terminated. On the other hand, if it is determined that the workpiece W is being inspected by the surface inspection apparatus 1, the process proceeds to step S21, and the central controller 400 determines whether or not a predetermined diagnosis condition is satisfied. The predetermined diagnosis condition is determined to be satisfied when, for example, a predetermined number (for example, 10) of workpieces W are continuously inspected by the surface inspection apparatus 1. If it is determined that the diagnosis condition is not satisfied, the current routine is terminated.

  On the other hand, if it is determined that the diagnosis condition is satisfied, the process proceeds to step S22, in which the central controller 400 resets a flag indicating that the scanning unit 16B has been replaced, and switches this flag to an off state. In the next step S16, the central controller 40 executes a diagnosis preparation process for moving the movement base 211 to the diagnosis position P2 so that the abnormality diagnosis process can be executed. In this diagnosis preparation process, the central control device 400 first outputs a command to the control unit 3 to stop the operation of the LD 11 and the PD 12 and causes the inspection head 16 to be most drawn into the device by the linear drive mechanism 30. Next, the operation of the driving mechanism 213 is controlled to move the surface inspection apparatus 1 to the backward end P4, and then the operation of the moving apparatus 210 is controlled to move the movement base 211 to the diagnosis position P2. Thereafter, the surface inspection apparatus 1 is moved to the forward end P3. With these operations, preparation for diagnosis of the inspection head 16 by the test piece 231 is completed.

  In next step S <b> 16, the central controller 400 executes abnormality diagnosis processing. In subsequent step S <b> 17, the central controller 400 determines whether or not there is an abnormality in the inspection head 16. If the inspection head 16 is normal, the process proceeds to step S14, and inspection continuation processing is executed. Thereafter, the current routine is terminated. On the other hand, if there is an abnormality in the inspection head 16, the process proceeds to step S24, and the central controller 400 determines whether or not the flag indicating that the scanning unit 16B has been replaced is on. If it is determined that the flag is off, the process proceeds to step S15, and the central controller 400 executes a scanning part replacement process for replacing the scanning part 16B. In the next step S25, the central controller 400 switches the flag to the on state. Thereafter, the process is returned to step S16, and it is diagnosed again whether or not there is an abnormality in the inspection head 16.

  On the other hand, if it is determined in step S24 that the flag is on, the process proceeds to step S18, and the central controller 400 executes an abnormality handling process. Thereafter, the current routine is terminated.

  As described above, according to the inspection system 100 of the present invention, the diagnosis device 200 periodically diagnoses whether or not the inspection head 16 is abnormal. If the inspection head 16 is abnormal, the scanning unit 16B is replaced. Is performed by the exchange apparatus 300. Abnormalities caused by the scanning unit 16B occur more frequently than abnormalities caused by other parts of the inspection head 16. Therefore, by making it possible to exchange the scanning unit 16B with the exchange device 300 in this way, it is possible to reduce the burden on the user as compared with the conventional case. Moreover, automation and labor saving of inspection work by the surface inspection apparatus 1 can be promoted. The user may perform a replenishment operation for replenishing the replacement scanning unit 16B to the scanning unit holding mechanism 310 and a removal operation for removing the scanning unit 16B held by the scanning unit replacement mechanism 340 at appropriate intervals.

  In the inspection system 100, the shape and size of the workpiece W conveyed by the conveying device 101 may not be the same. For example, the workpieces W having different shapes and sizes may be transported to the transport device 101 and the workpieces W may be inspected by the surface inspection device 1. In this case, the scanning unit holding mechanism 310 holds the scanning unit 16B having a shape corresponding to each workpiece W, and the scanning unit 16B is exchanged according to the workpiece W to be inspected. Moreover, the diagnosis of the inspection head 16 using the test piece 231 is performed when the scanning unit 16B is replaced in order to inspect the workpiece W having a different shape and size from the workpiece W that has been inspected by the surface inspection apparatus 1 You may go to

  The control unit 3 of the surface inspection apparatus 1 performs the abnormality diagnosis and, when the inspection head 16 is normal, based on the detection result of the sample piece 220 or the detection result of the test piece 231 detected by the inspection head 16 at the time of abnormality diagnosis. The detection result of the workpiece W may be corrected. For example, when the presence or absence of abnormality of the inspection head 16 is diagnosed with the sample piece 220, the correction coefficient is based on the detection result at that time and the actual size and shape of the pseudo defects 220 b to 220 e stored in the storage unit 65. And a value obtained by multiplying the value detected by the inspection head 16 when the workpiece W is inspected by the correction coefficient may be output as a detection result. By performing correction in this way, the reliability of the inspection result of the surface inspection apparatus 1 can be improved.

  The present invention is not limited to the form described above, and may be implemented in various forms. For example, diagnosis of whether there is an abnormality in the inspection head is not limited to diagnosis using a sample piece and a test piece. For example, a sensor such as a vibration sensor that detects the rotational shake state of the inspection head may be provided in the inspection head, and the presence or absence of an abnormality in the inspection head may be diagnosed based on a detection value detected by the sensor.

The figure which shows schematic structure of the test | inspection system which concerns on one form of this invention. The figure which shows schematic structure of a surface inspection apparatus. The figure which expands and shows the inside of the front-end | tip of a test | inspection head. The figure which shows the test | inspection system of the state which moved the movement base to the diagnostic position. Sectional drawing along the centerline of a sample piece. The figure which looked at the inspection system of the state shown in Drawing 4 from the lower part of Drawing 4. The flowchart which shows the 1st abnormality diagnosis routine which a central control apparatus performs. The flowchart which shows the 2nd abnormality diagnosis routine which a central control apparatus performs.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface inspection apparatus 16 Inspection head 16A Head main body 16B Scanning part 18 Mirror (optical path changing means)
22 Chuck mechanism 23 Chuck member 30 Linear drive mechanism (linear drive means)
40 Rotation drive mechanism (rotation drive means)
DESCRIPTION OF SYMBOLS 100 Inspection system 200 Diagnostic apparatus 220 Sample piece 220a Through-hole 220b, 220c, 220d, 220e Pseudo defect 231A, 231B, 231C Test piece 233A, 233B, 233C Test inspection part 300 Exchanger 320 Jig drive mechanism (operation mechanism)
321 Jig 322 Actuator (Jig moving means)
324 Linear drive actuator (Jig moving means)
330 Scanning section attaching / detaching mechanism 340 Scanning section replacing mechanism 400 Central control device (control means)
W Workpiece (inspected object)
AX axis

Claims (8)

By means of a linear drive means, an inspection head provided with a head body and a shaft-like scanning part which is detachably provided at the tip of the head body and in which an optical path changing means is incorporated is rotated around an axis line by the rotation drive means. The optical path of the inspection light incident along the axis in the inspection head is moved by the optical path changing means, and the inspection light with the changed optical path is irradiated to the inspection object. Applied to a surface inspection apparatus that receives reflected light returned from the inspection object to the inspection head and inspects the surface of the inspection object based on the amount of the reflected light, and diagnoses the presence or absence of abnormality of the inspection head In the inspection system
A diagnostic device for diagnosing the presence or absence of abnormality of the inspection head; and an exchange device for replacing the scanning unit of the inspection head when the diagnostic device determines that the inspection head is abnormal. Inspection system for surface inspection equipment. A sample that is arranged on the movement path of the inspection head when the inspection object is inspected by the surface inspection apparatus, has a pseudo defect on an inner peripheral surface, and has a through-hole through which the inspection head can pass. Further comprising a piece,
The surface inspection apparatus according to claim 1, wherein the diagnosis apparatus diagnoses the presence or absence of abnormality of the inspection head based on an inspection result obtained by causing the surface inspection apparatus to inspect an inner peripheral surface of the sample piece. Inspection system.   The diagnostic device diagnoses the presence or absence of an abnormality in the inspection head by causing the surface inspection device to inspect the inner peripheral surface of the sample piece every time the surface inspection device inspects the inspection object. The inspection system of the surface inspection apparatus according to claim 2. A test piece having a test inspection unit formed in a shape corresponding to an inspection target portion of the inspection object and provided with a pseudo defect, and the surface inspection device of the surface inspection device of the inspection target portion of the inspection object A moving means that can be driven to an inspection position where inspection can be performed and a diagnostic position where the surface inspection apparatus can inspect the test inspection portion of the test piece,
The diagnostic apparatus controls the moving means so that the surface inspection apparatus is driven to the diagnostic position when a predetermined diagnostic condition is satisfied, and the surface inspection apparatus inspects the test inspection unit of the test piece. The surface inspection apparatus inspection system according to any one of claims 1 to 3, wherein the inspection head is diagnosed for the presence or absence of an abnormality based on the inspection result.   The inspection system for a surface inspection apparatus according to claim 4, wherein the predetermined diagnosis condition is satisfied when a predetermined number of the inspection objects are continuously inspected by the surface inspection apparatus. The test inspection part and the inspection object part have the same shape,
6. The inspection system for a surface inspection apparatus according to claim 4, wherein the test inspection unit is provided with a pseudo defect at the same position as a position where a defect is expected to occur in the inspection target portion. A chuck mechanism capable of switching between a gripping state for gripping the scanning unit and a releasing state for releasing the scanning unit is provided at the tip of the head body,
The exchange device holds the scanning unit with respect to the operation mechanism that can switch the state of the chuck mechanism to the gripping state and the release state, and the chuck mechanism that is switched to the release state by the operation mechanism. The scanning section attaching / detaching mechanism capable of removing and inserting the scanning section, and the scanning section attaching / detaching mechanism and the scanning section can be transferred, and the scanning section removed from the head main body is attached to the scanning section attaching / detaching portion. A scanning part replacement mechanism that receives from the mechanism and passes and holds the replacement scanning part to the scanning part attaching / detaching mechanism; and first, after controlling the operation mechanism so that the chuck mechanism is switched to the released state, The scanning unit attaching / detaching mechanism is controlled so that the scanning unit is removed, and then the scanning unit attaching / detaching mechanism holds the replacement scanning unit. The switching mechanism is controlled, and then the scanning section attaching / detaching mechanism is controlled so that the replacement scanning section is inserted into the chuck mechanism, and the chuck mechanism in which the replacement scanning section is inserted is in the gripping state. The inspection system for a surface inspection apparatus according to any one of claims 1 to 6, further comprising a control unit that controls the operation mechanism so that the operation mechanism can be switched. The chuck mechanism includes a chuck member that switches to the released state by being pushed into the head main body from the tip side, and switches to the gripping state when the pushing force is removed.
The operation mechanism includes a jig for pushing the chuck member into the head body, and the jig is arranged in front of the inspection head so that the jig abuts the chuck member. The inspection system for a surface inspection apparatus according to claim 7, further comprising a jig moving unit that moves the jig in the axial direction of the inspection head.

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