JP2009128002A - Suction facility of exhaust gas - Google Patents

Suction facility of exhaust gas Download PDF

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JP2009128002A
JP2009128002A JP2007307451A JP2007307451A JP2009128002A JP 2009128002 A JP2009128002 A JP 2009128002A JP 2007307451 A JP2007307451 A JP 2007307451A JP 2007307451 A JP2007307451 A JP 2007307451A JP 2009128002 A JP2009128002 A JP 2009128002A
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main
duct
exhaust gas
exhaust fan
chamber box
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JP4941839B2 (en
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Yoshiyuki Hayashi
由幸 林
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Sintokogio Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction facility of exhaust gas capable of maintaining and stabilizing the quantity of exhaust gas sucked from an exhaust gas generation source to a target value when starting a stopped standby exhauster when switching the operation of the standby exhauster from the operation of a main exhauster. <P>SOLUTION: The suction facility of exhaust gas includes a chamber box 1 collecting exhaust gas from a clean room serving as the exhaust gas generation source through a duct; a main damper device 3 adjusting the opening degree of a main duct 2 connected in communication with the chamber box; the main exhauster 6 connected in communication with the main duct; a standby damper device 8 adjusting the opening degree of a standby duct 7 connected in communication with the chamber box in parallel with the main duct 2; the standby exhauster 10 connected in communication with the standby duct; a pressure detecting means 11 detecting static pressure in the chamber box; and a controller 12 transmitting commands of the rotating speed of each exhauster driving motor to inverters of the main exhauster and the standby exhauster based on the detection result of the pressure detecting means. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、排ガスを一定の風量あるいは静圧で吸引する排ガスの吸引設備に関する。   The present invention relates to an exhaust gas suction facility for sucking exhaust gas with a constant air volume or static pressure.

従来、排ガスの吸引設備の一つとして、例えば、クリーン・ルームからの排ガスを収集するチャンバーボックスに、主ダクトと予備ダクトを並列に連通接続し、主ダクトには排ガスを排ガス浄化装置に送り込む電動機付き主排風機を連通接続し、また予備ダクトには排ガスをチャンバーボックスから吸引するとともに、吸引した排ガスを排ガス浄化装置の煙道に送り込む電動機付き予備排風機を連通接続したものがある。
なお、この技術は、経験的・現場的なものであるためこれを記載した技術文献を発見することができませんでした。 Conventionally, as one of the exhaust gas suction equipment, for example, an electric motor that connects a main duct and a spare duct in parallel to a chamber box that collects exhaust gas from a clean room, and sends the exhaust gas to the exhaust gas purification device in the main duct Some auxiliary ducts are connected in communication, and some of the auxiliary ducts are connected to an auxiliary exhaust fan with an electric motor that sucks the exhaust gas from the chamber box and sends the sucked exhaust gas to the flue of the exhaust gas purification device.
Since this technology is empirical and on-site, we could not find any technical literature describing it.

しかし、このように構成された従来の排ガスの吸引設備では、主排風機が稼動してクリーン・ルーム内を所定の静圧にしている状態から、停止している予備排風機を起動して主排風機の稼動から
予備排風機の稼動に切り換える際に、クリーン・ルームから吸引される排ガスの風量が増減して、クリーン・ルーム内を所定の静圧に維持することができないなどの問題があった。 However, in the conventional exhaust gas suction equipment configured as described above, the main exhaust fan is in operation and the clean room is at a predetermined static pressure, and then the standby exhaust fan is stopped and the main exhaust fan is started. When switching from the operation of the exhaust fan to the operation of the auxiliary exhaust fan, there is a problem that the flow rate of exhaust gas sucked from the clean room increases or decreases, and the clean room cannot be maintained at a predetermined static pressure. It was.

本発明は上記の事情に鑑みてなされたもので、その目的は、停止している予備排風機を起動して主排風機の稼動から予備排風機の稼動に切り換える際に、排ガス発生源から吸引される排ガスの風量を目標値に維持するとともに安定させることが可能な排ガスの吸引設備を提供することにある。 The present invention has been made in view of the above circumstances. The purpose of the present invention is to start suction of the exhausted gas exhaust source when the standby exhaust fan is stopped and switched from operation of the main exhaust fan to operation of the auxiliary exhaust fan. Another object of the present invention is to provide an exhaust gas suction facility capable of maintaining the air volume of exhaust gas to be a target value and stabilizing it.

上記の目的を達成するため本発明における排ガスの吸引設備は、排ガスを一定の風量あるいは静圧で吸引する設備であって、排ガス発生源からの排ガスをダクトを介して収集するチャンバーボックスと、このチャンバーボックスに連通接続された主ダクトの開口度を調整する主ダンパ装置と、前記主ダクトに連通接続されて前記チャンバーボックスから排ガスを吸引するインバータ駆動の電動機付き主排風機と、前記チャンバーボックスに前記主ダクトと並列に連通接続された予備ダクトの開口度を調整する予備ダンパ装置と、前記予備ダクトに連通接続されて前記チャンバーボックスから排ガスを吸引するインバータ駆動の電動機付き予備排風機と、前記チャンバーボックス内の静圧を検出する圧力検出手段と、この圧力検出手段と前記主排風機および前記予備排風機のインバータに電気的に接続されて前記圧力検出手段の検出結果に基づき前記主排風機および前記予備排風機のインバータに各電動機の回転数の指令を発信するコントローラと、を備えていて、前記主排風機の稼動から前記予備排風機の稼動への切換は、前記予備排風機の電動機を起動し、予備排風機の電動機の回転数が前記主排風機の電動機のそれに一致したのちは、前記コントローラから前記インバータへの指令により前記予備排風機および前記主排風機の電動機の回転数を制御して前記チャンバーボックスの静圧を目標値に維持しながら、前記予備ダンパ装置の操作により前記予備ダクトの開口度を次第に上昇させ、前記予備ダクトの開口度が所定値に上昇したのちは、前記主ダンパ装置の操作により前記主ダクトの開口度を次第に下降させ、前記主ダクトの開口度が所定値に下降したのちは、前記主排風機の稼動を停止する工程により行うことを特徴とする。 In order to achieve the above object, an exhaust gas suction facility according to the present invention is a facility for sucking exhaust gas at a constant air volume or static pressure, and a chamber box for collecting exhaust gas from an exhaust gas generation source through a duct, A main damper device that adjusts an opening degree of a main duct that is connected to the chamber box; an inverter-driven main exhaust fan that is connected to the main duct and sucks exhaust gas from the chamber box; and the chamber box A spare damper device that adjusts an opening degree of a spare duct that is connected in parallel with the main duct; a preliminary exhaust fan with an inverter-driven motor that is connected to the spare duct and sucks exhaust gas from the chamber box; A pressure detecting means for detecting a static pressure in the chamber box; A controller that is electrically connected to the inverter of the wind fan and the preliminary exhaust fan and transmits a command of the rotational speed of each electric motor to the inverter of the main exhaust fan and the preliminary exhaust fan based on the detection result of the pressure detection means; The switching from the operation of the main exhaust fan to the operation of the auxiliary exhaust fan starts the electric motor of the auxiliary exhaust fan, and the rotational speed of the electric motor of the auxiliary exhaust fan coincides with that of the electric motor of the main exhaust fan After that, according to a command from the controller to the inverter, the rotational speeds of the motors of the preliminary exhauster and the main exhauster are controlled to maintain the static pressure of the chamber box at a target value, while the preliminary damper device The opening degree of the auxiliary duct is gradually increased by the operation, and after the opening degree of the auxiliary duct is increased to a predetermined value, the operation of the main damper device causes the Gradually lowering the degree of opening of the duct, after the opening degree of the main duct is lowered to a predetermined value, and performs the step of stopping the operation of the main air blower.

上記の説明から明らかなように本発明によれば、主排風機の稼動から予備排風機の稼動への切換は、予備排風機の電動機を起動し、予備排風機の電動機の回転数が主排風機の電動機のそれに一致したのちは、コントローラからインバータへの指令により予備排風機および主排風機の電動機の回転数を制御してチャンバーボックスの静圧を目標値に維持しながら、予備ダンパ装置の操作により予備ダクトの開口度を次第に上昇させ、予備ダクトの開口度が所定値に上昇したのちは、主ダンパ装置の操作により主ダクトの開口度を次第に下降させ、主ダクトの開口度が所定値に下降したのちは、主排風機の稼動を停止する工程により行うため、吸引作用による風量あるいは静圧を目標値に維持するとともに安定させた状態で主排風機の稼動から予備排風機への稼動に円滑に切り換えることが可能になるなどの優れた実用的効果を奏する。 As is clear from the above description, according to the present invention, switching from the operation of the main exhaust fan to the operation of the auxiliary exhaust fan starts the electric motor of the auxiliary exhaust fan, and the rotation speed of the electric motor of the auxiliary exhaust fan is the main exhaust. After matching with that of the motor of the wind machine, the rotation speed of the motors of the preliminary exhaust fan and the main exhaust fan is controlled by a command from the controller to the inverter to maintain the static pressure of the chamber box at the target value, and The opening degree of the auxiliary duct is gradually increased by the operation, and after the opening degree of the auxiliary duct is increased to a predetermined value, the opening degree of the main duct is gradually decreased by the operation of the main damper device, and the opening degree of the main duct is a predetermined value. After the lowering of the main exhaust fan, the main exhaust fan is operated in a process to stop the operation. Possible to smoothly switch to the operation of the exhauster exhibits an excellent practical effect of such is possible.

本発明を適用した排ガスの吸引設備の一実施例について図１および図２に基づき詳細に説明する。本排ガスの吸引設備は、図１に示すように、排ガス発生源としてのクリーン・ルームからの排ガスをダクトを介して収集するチャンバーボックス１と、このチャンバーボックス１に連通接続された主ダクト２の開口度を調整する主ダンパ装置３と、前記主ダクト２に連通接続されて前記チャンバーボックス１から排ガスを吸引するインバータ５駆動の電動機付き主排風機６と、前記チャンバーボックス１に前記主ダクト２と並列して連通接続された予備ダクト７の開口度を調整する予備ダンパ装置８と、前記予備ダクト７に連通接続されて前記チャンバーボックス１から排ガスを吸引するインバータ９駆動の電動機付き予備排風機１０と、前記チャンバーボックス１内の静圧を検出する圧力検出手段１１と、この圧力検出手段１１と前記主排風機６および前記予備排風機１０のインバータ９に電気的に接続されて前記圧力検出手段１１の検出結果に基づき前記主排風機６および前記予備排風機１０のインバータ９に各電動機の回転数の指令を発信するコントローラ１２と、で構成してある。 An embodiment of an exhaust gas suction facility to which the present invention is applied will be described in detail with reference to FIGS. As shown in FIG. 1, the exhaust gas suction facility includes a chamber box 1 that collects exhaust gas from a clean room as an exhaust gas generation source through a duct, and a main duct 2 that is connected to the chamber box 1. A main damper device 3 for adjusting the opening degree, a main exhauster 6 with an electric motor driven by an inverter 5 connected to the main duct 2 and sucking exhaust gas from the chamber box 1, and the main duct 2 in the chamber box 1 A preliminary damper device 8 for adjusting the opening degree of the preliminary duct 7 connected in parallel with the auxiliary duct 7, and a preliminary exhaust fan with an electric motor driven by an inverter 9 connected to the preliminary duct 7 and sucking exhaust gas from the chamber box 1 10, pressure detection means 11 for detecting the static pressure in the chamber box 1, and the pressure detection means 11 and the main exhaust The motor 6 and the auxiliary exhaust fan 10 are electrically connected to each other, and based on the detection result of the pressure detection means 11, the main exhaust fan 6 and the auxiliary exhaust fan 10 are instructed to command the rotational speed of each motor. , And a controller 12 for transmitting.

そして、前記主排風機６の排出口は吸引した排ガスを浄化する排ガス浄化装置４に、また、前記予備排風機１０の排出口は前記排ガス浄化装置４の煙道にそれぞれ連通接続してある。また、前記コントローラ１２はコンピュータで構成してあって、圧力検出手段１１の検出結果に基づき、インバータ５，９をＰＩＤ制御するようになっている。 The exhaust port of the main exhaust fan 6 is connected to the exhaust gas purification device 4 for purifying the exhausted exhaust gas, and the exhaust port of the preliminary exhaust device 10 is connected to the flue of the exhaust gas purification device 4. The controller 12 is composed of a computer, and the inverters 5 and 9 are PID-controlled based on the detection result of the pressure detecting means 11.

このように構成したものにおいては、主排風機６の稼動から予備排風機１０の稼動への切換は、次の工程により行う。すなわち、予備排風機９の電動機を起動し、予備排風機９の電動機の回転数が主排風機５の電動機のそれに一致したのちは、コントローラ１２からインバータへの指令により予備排風機９および主排風機５の電動機の回転数を制御してチャンバーボックス１の静圧を目標値に維持しながら、予備ダンパ装置８の操作により予備ダクト７の開口度を次第に上昇させ、予備ダクト７の開口度が所定値に上昇したのちは、主ダンパ装置３の操作により主ダクト２の開口度を次第に下降させ、主ダクト２の開口度が所定値に下降したのちは、主排風機６の稼動を停止する（図２参照）。 In the configuration as described above, switching from the operation of the main exhaust fan 6 to the operation of the preliminary exhaust fan 10 is performed by the following process. That is, after the electric motor of the auxiliary exhaust fan 9 is started and the rotational speed of the electric motor of the auxiliary exhaust fan 9 coincides with that of the electric motor of the main exhaust fan 5, the auxiliary exhaust fan 9 and the main exhaust apparatus are instructed by a command from the controller 12 to the inverter. While maintaining the static pressure of the chamber box 1 at the target value by controlling the rotational speed of the electric motor of the fan 5, the opening degree of the auxiliary duct 7 is gradually increased by the operation of the auxiliary damper device 8. After increasing to a predetermined value, the opening degree of the main duct 2 is gradually lowered by operating the main damper device 3, and after the opening degree of the main duct 2 has decreased to a predetermined value, the operation of the main exhaust fan 6 is stopped. (See FIG. 2).

なお、上記の実施例では、排ガス発生源からの排ガスの収集をチャンバーボックス１によって行っているが、これに限定されるものではなく、例えば、二股構造のダクトを用いて行い、これの二股部分に主ダクト２および予備ダクト７をそれぞれ連通接続するようにしてもよい。 In the above embodiment, the exhaust gas from the exhaust gas generation source is collected by the chamber box 1. However, the present invention is not limited to this, and for example, a bifurcated duct is used. Alternatively, the main duct 2 and the spare duct 7 may be connected in communication.

本発明を適用した排ガスの吸引設備の模式図である。It is a schematic diagram of the exhaust gas suction equipment to which the present invention is applied. 図１に示す排ガスの吸引設備の作動工程図である。FIG. 2 is an operation process diagram of the exhaust gas suction facility shown in FIG. 1.

符号の説明Explanation of symbols

１ チャンバーボックス
２ 主ダクト
３ 主ダンパ装置
４ 排ガス浄化装置
５ インバータ
６ 主排風機
７ 予備ダクト
８ 予備ダンパ装置
９ インバータ
１０ 予備排風機
１１ 圧力検出手段
１２ コントローラ DESCRIPTION OF SYMBOLS 1 Chamber box 2 Main duct 3 Main damper apparatus 4 Exhaust gas purification apparatus 5 Inverter 6 Main exhaust fan 7 Preliminary duct 8 Preliminary damper apparatus 9 Inverter 10 Preexhaust fan 11 Pressure detection means 12 Controller

Claims (2)

排ガスを一定の風量あるいは静圧で吸引する設備であって、
排ガス発生源からの排ガスをダクトを介して収集するチャンバーボックスと、
このチャンバーボックスに連通接続された主ダクトの開口度を調整する主ダンパ装置と、
前記主ダクトに連通接続されて前記チャンバーボックスから排ガスを吸引するインバータ駆動の電動機付き主排風機と、
前記チャンバーボックスに前記主ダクトと並列に連通接続された予備ダクトの開口度を調整する予備ダンパ装置と、
前記予備ダクトに連通接続されて前記チャンバーボックスから排ガスを吸引するインバータ駆動の電動機付き予備排風機と、
前記チャンバーボックス内の静圧を検出する圧力検出手段と、
この圧力検出手段と前記主排風機および前記予備排風機のインバータに電気的に接続されて前記圧力検出手段の検出結果に基づき前記主排風機および前記予備排風機のインバータに各電動機の回転数の指令を発信するコントローラと、
を備えていて、
前記主排風機の稼動から前記予備排風機の稼動への切換は、前記予備排風機の電動機を起動し、予備排風機の電動機の回転数が前記主排風機の電動機のそれに一致したのちは、前記コントローラから前記インバータへの指令により前記予備排風機および前記主排風機の電動機の回転数を制御して前記チャンバーボックスの静圧を目標値に維持しながら、前記予備ダンパ装置の操作により前記予備ダクトの開口度を次第に上昇させ、前記予備ダクトの開口度が所定値に上昇したのちは、前記主ダンパ装置の操作により前記主ダクトの開口度を次第に下降させ、前記主ダクトの開口度が所定値に下降したのちは、前記主排風機の稼動を停止する工程により行うことを特徴とする排ガスの吸引設備。 A facility that sucks exhaust gas at a constant air volume or static pressure,
A chamber box for collecting exhaust gas from an exhaust gas source through a duct;
A main damper device for adjusting the opening degree of the main duct connected to the chamber box;
A main exhaust fan with an inverter-driven motor that is connected to the main duct and sucks exhaust gas from the chamber box;
A spare damper device for adjusting an opening degree of a spare duct connected in parallel with the main duct to the chamber box;
A preliminary exhaust fan with an inverter-driven electric motor that is connected to the preliminary duct and sucks exhaust gas from the chamber box;
Pressure detecting means for detecting static pressure in the chamber box;
The pressure detecting means is electrically connected to the inverters of the main exhaust fan and the preliminary exhaust fan, and the rotation speeds of the respective motors are connected to the inverters of the main exhaust fan and the preliminary exhaust fan based on the detection result of the pressure detecting means. A controller that transmits a command;
With
Switching from the operation of the main exhaust fan to the operation of the auxiliary exhaust fan starts the electric motor of the auxiliary exhaust fan, and after the rotation speed of the electric motor of the auxiliary exhaust fan matches that of the electric motor of the main exhaust fan, The spare damper device is operated by operating the spare damper device while controlling the rotational speeds of the preliminary exhaust fan and the motor of the main exhaust fan according to a command from the controller to the inverter and maintaining the static pressure of the chamber box at a target value. After the opening degree of the duct is gradually increased and the opening degree of the preliminary duct is increased to a predetermined value, the opening degree of the main duct is gradually lowered by the operation of the main damper device, and the opening degree of the main duct is predetermined. The exhaust gas suction facility is characterized in that after the value is lowered to a value, the exhaust gas suction facility is performed by a process of stopping the operation of the main exhaust fan. 前記チャンバーボックスの代わりに二股構造のダクトを用いることを特徴とする請求項１に記載の排ガスの吸引設備。 The exhaust gas suction facility according to claim 1, wherein a duct having a bifurcated structure is used instead of the chamber box.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024185115A1 (en) * 2023-03-09 2024-09-12 株式会社日立産機システム Safety cabinet and exhaust system

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