JP2009115702A - Temperature measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature measuring apparatus which is excellent in corrosion resistance and can continuously measure temperatures in a wide range from a low temperature to a high temperature. <P>SOLUTION: The temperature measuring apparatus includes: a terminal 2 which is formed of sintered silicon carbide and contacts with the surface of an object to be measured 1; and a resistance measuring device 4 for measuring the volume resistivity of the terminal 2 through conducting wires 3a, 3b which are connected to the terminal 2. The resistance measuring device 4 includes: a temperature calculating section 4a for calculating the temperature of the object to be measured 1 from the volume resistivity of the terminal part 2 by referring to a map representing the temperature dependency of the volume resistivity of the terminal 2; and a temperature display section 4b for displaying the temperature of the object to be measured 1 calculated by the temperature calculating section 4a. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a temperature measuring device that measures the temperature of an object to be measured.

Conventionally, the ends of two types of metal wires with different thermoelectric power are joined together, and the thermoelectromotive force generated between the two junctions is measured by setting the two junctions to different temperatures. Thermocouples that measure the temperature of an object are known.
“How to select and use a temperature sensor”, Osamu Takahashi, Electricity and Construction, December 2003 issue separate volume, Electric Heat Technology / Parts Practice Guide, p108-112, Ohmsha

  In conventional thermocouples, the heat resistance of the metal wire differs depending on the metal type, so that the measurable temperature range (for example, the temperature range from room temperature to 400 ° C. or the temperature range from 400 ° C. to 1200 ° C.) However, a wide temperature range from low temperature to high temperature cannot be measured continuously. Furthermore, since conventional thermocouples are composed of metal wires, they cannot be used in an acidic gas atmosphere or a corrosive gas atmosphere, and in particular, the temperature of an object to be measured where metal contamination is a concern cannot be measured. .

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a temperature measuring device excellent in corrosion resistance capable of continuously measuring a wide temperature range from a low temperature to a high temperature.

  A temperature measuring device according to the present invention includes a terminal portion formed of a silicon carbide sintered body that is in contact with the surface of the object to be measured, a volume resistivity measuring portion that measures the volume resistivity of the terminal portion, and a volume resistivity measuring portion. And a temperature calculation unit for calculating the temperature of the object to be measured from the volume resistivity measured by the above.

  According to the temperature measuring device of the present invention, the terminal portion is formed of the silicon carbide sintered body whose volume resistivity stably depends on the temperature in a wide temperature range from room temperature to 1500 ° C. The temperature of the object to be measured can be continuously measured in a wide temperature range up to. Further, according to the temperature measuring device of the present invention, since the terminal portion is formed of the silicon carbide sintered body having high corrosion resistance, it can be used in an acidic gas atmosphere or a corrosive gas atmosphere, and the object to be measured The temperature of the object to be measured can be measured without contaminating the sample.

  Hereinafter, a configuration of a temperature measurement device according to an embodiment of the present invention and a temperature measurement method for an object to be measured using the temperature measurement device will be described with reference to the drawings.

[Configuration of temperature measurement device]
As shown in FIG. 1, a temperature measuring apparatus according to an embodiment of the present invention is a high-purity silicon carbide sintered body (for example, PureBeta (registered trademark) -S: ( The volume resistivity of the terminal part 2 via the terminal part 2 formed by Bridgestone Co., Ltd. and the conductive wires 3a and 3b joined to the terminal part 2 by a conductive paste such as Dotite (registered trademark) or platinum paste. A resistance measuring instrument 4 to be measured. The resistance measuring device 4 refers to a map showing the temperature dependence of the volume resistivity of the terminal portion 2 as shown in FIG. 2 and calculates a temperature of the device under test 1 from the volume resistivity of the terminal portion 2. 4a and a temperature display unit 4b for displaying the temperature of the DUT 1 calculated by the temperature calculation unit 4a.

  The shape of the terminal portion 2 is preferably processed into a cylindrical shape or a rectangular parallelepiped shape so that the volume resistivity can be accurately measured. Further, the shape of the terminal portion 2 may be processed so as to contact the device under test 1 with a point or a curved surface in order to improve contact depending on the surface roughness of the device under test 1. The volume of the terminal portion 2 is desirably as small as possible so that the terminal portion 2 does not absorb the heat of the device under test 1. The temperature calculation unit 4a stores in advance a computer program describing the map shown in FIG. 2 and the function (operation) of the temperature calculation unit 4a in a storage device such as a ROM in the resistance measurement device 4, and the temperature calculation unit 4a This can be realized by causing an arithmetic processing unit such as a CPU to execute a computer program. The temperature display unit 4b can be configured by a known display device such as a liquid crystal display device or a segment display device.

[Temperature measurement method]
When the temperature of the device under test 1 is measured using the above temperature measuring device, the terminal portion 2 is first brought into contact with the surface or inside of the device under test 1. Next, a voltage is applied to the terminal part 2 from the resistance measuring device 4 via the conducting wires 3a and 3b, and the volume resistivity of the terminal part 2 is measured. Finally, the temperature calculation unit 4a calculates the temperature of the DUT 1 from the volume resistivity of the terminal unit 2 with reference to a map showing the temperature dependence of the volume resistivity of the terminal unit 2, and the temperature display unit 4b The temperature of the DUT 1 calculated by the temperature calculation unit 4a is displayed.

  As is apparent from the above description, according to the temperature measuring device according to the embodiment of the present invention, the volume resistivity is stable in a wide temperature range from room temperature to about 1500 ° C. of the terminal portion 2 that contacts the DUT 1. Therefore, the temperature of the DUT 1 can be continuously measured over a wide temperature range from low temperature to high temperature.

  Moreover, according to the temperature measuring apparatus which becomes embodiment of this invention, since the terminal part 2 which contacts the to-be-measured object 1 is formed with the silicon carbide sintered compact with high corrosion resistance, in acidic gas atmosphere or corrosive gas atmosphere The temperature of the device under test 1 can be measured without contaminating the device under test 1.

  Moreover, according to the temperature measuring apparatus which becomes embodiment of this invention, since the terminal part 2 is formed with the silicon carbide sintered compact with high heat conductivity, the temperature of the terminal part 2 is short with the temperature of the to-be-measured object 1. It becomes the same in time, and the temperature of the DUT 1 can be measured in a short time. Moreover, according to the temperature measuring apparatus which becomes embodiment of this invention, since the terminal part 2 is formed with the high purity silicon carbide sintered compact, the terminal part 2 is made to contact the to-be-measured object 1 and the to-be-measured object 1 It is possible to directly measure the temperature of the DUT 1 without contaminating it.

  As mentioned above, although embodiment which applied the invention made | formed by this inventor was demonstrated, this invention is not limited with the description and drawing which make a part of indication of this invention by this embodiment. That is, all other embodiments, examples, operation techniques, and the like made by those skilled in the art based on the above-described embodiments are all included in the scope of the present invention.

It is a block diagram which shows the structure of the temperature measuring apparatus used as embodiment of this invention. It is an example of the map which shows the temperature dependence of the volume resistivity of a terminal part.

Explanation of symbols

1: DUT 2: Terminal portions 3a, 3b: Conductor 4: Resistance measuring device 4a: Temperature calculation unit 4b: Temperature display unit

Claims (3)

A terminal portion formed of a silicon carbide sintered body in contact with the surface of the object to be measured;
A volume resistivity measuring unit for measuring the volume resistivity of the terminal part;
A temperature calculation unit comprising: a temperature calculation unit that calculates the temperature of the object to be measured from the volume resistivity measured by the volume resistivity measurement unit. The temperature measuring device according to claim 1,
The temperature measuring device, wherein the terminal portion has a cylindrical shape or a rectangular parallelepiped shape. In the temperature measuring device according to claim 1 or 2,
A temperature measuring apparatus comprising: a display unit that displays the temperature of the object to be measured calculated by the temperature calculating unit.

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