JP2009111149A - Solid-state imaging apparatus - Google Patents
Solid-state imaging apparatus Download PDFInfo
- Publication number
- JP2009111149A JP2009111149A JP2007281760A JP2007281760A JP2009111149A JP 2009111149 A JP2009111149 A JP 2009111149A JP 2007281760 A JP2007281760 A JP 2007281760A JP 2007281760 A JP2007281760 A JP 2007281760A JP 2009111149 A JP2009111149 A JP 2009111149A
- Authority
- JP
- Japan
- Prior art keywords
- solid
- translucent member
- state imaging
- region
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
本発明は、固体撮像装置に関し、特に、中空構造を有する固体撮像装置に関する。 The present invention relates to a solid-state imaging device, and more particularly to a solid-state imaging device having a hollow structure.
図9は、従来の中空構造を有する固体撮像装置の一般的な構造を示す図である。 FIG. 9 is a diagram illustrating a general structure of a solid-state imaging device having a conventional hollow structure.
1がセラミック又はプラスチックからなる中空状のパッケージ、2が透光性部材、3が固体撮像素子、5が受光部、6が樹脂接着剤、7が外部基板との接続のための配線導体(リード)である。また、4は固体撮像素子3とリード7とを接続するワイヤを示している。 1 is a hollow package made of ceramic or plastic, 2 is a translucent member, 3 is a solid-state imaging device, 5 is a light receiving portion, 6 is a resin adhesive, 7 is a wiring conductor (lead) for connection to an external substrate ). Reference numeral 4 denotes a wire for connecting the solid-state imaging device 3 and the lead 7.
固体撮像素子3は、パッケージ1の凹部の底面に熱硬化性樹脂接着剤等により接合され搭載されている。 The solid-state imaging device 3 is mounted on the bottom surface of the recess of the package 1 by being bonded with a thermosetting resin adhesive or the like.
また、固体撮像素子3の表面の外周部には電極が形成されており、この電極と配線導体7とを、金やアルミニウム等のワイヤ4で電気的に接続している。 Further, an electrode is formed on the outer peripheral portion of the surface of the solid-state imaging device 3, and this electrode and the wiring conductor 7 are electrically connected by a wire 4 such as gold or aluminum.
また、パッケージ1の上面には、平板状の透光性部材2が光硬化性又は熱硬化性の樹脂接着剤6を介して配置される。 In addition, on the upper surface of the package 1, a flat plate-like translucent member 2 is disposed via a photocurable or thermosetting resin adhesive 6.
このような構成により、固体撮像素子は、透光性部材とパッケージによって密閉されている。このようにして、外部に存在するゴミ又は湿気などの中空内への浸入による、固体撮像素子の劣化を防いでいる。 With such a configuration, the solid-state imaging element is hermetically sealed with the light-transmitting member and the package. In this way, deterioration of the solid-state image sensor due to the penetration of dust or moisture existing outside into the hollow is prevented.
このような従来の固体撮像装置は、特許文献1又は特許文献2に開示されている。
従来の固体撮像装置において、透光性部材の表裏面に異物が付着すると、受光部に進入する光線が遮蔽され、受光不良又は像ボケが発生することがあった。 In a conventional solid-state imaging device, when a foreign substance adheres to the front and back surfaces of a translucent member, a light beam entering the light receiving unit may be blocked, resulting in poor light reception or image blur.
透光性部材の表面に付着する可能性が高い異物は、製造時の雰囲気中から付着したゴミ又は製造工程で発生したキズ等である。 The foreign matter that has a high possibility of adhering to the surface of the translucent member is dust adhering from the atmosphere at the time of manufacture or scratches generated in the manufacturing process.
そして、受光部に配置されている画素の面積に対して、ゴミ又はキズ等がある割合以上占めてしまうと、受光不良又は像ボケが発生する。 Then, if dust or scratches occupy a certain ratio or more with respect to the area of the pixels arranged in the light receiving portion, light reception failure or image blur occurs.
一方、透光性部材の裏面に付着する可能性が高い異物は、温度低下によって発生する結露である。 On the other hand, the foreign matter that has a high possibility of adhering to the back surface of the translucent member is dew condensation that occurs due to a decrease in temperature.
とりわけ、固体撮像装置の中空内部には、作製時の雰囲気中の空気に存在する水分を必然的に含んでおり、同時に時間の経過とともに樹脂接着剤や樹脂接着剤と透光性部材又はパッケージとの界面から浸入した水分も存在している。 In particular, the hollow interior of the solid-state imaging device inevitably contains moisture present in the air in the atmosphere at the time of manufacture, and at the same time, the resin adhesive, the resin adhesive, and the translucent member or package Moisture infiltrated from the interface is also present.
このような水分を中空内部に含有している場合、温度低下が起こると、中空内部の空気が冷却され、飽和水蒸気量を超えた時点で中空内部に結露が発生する。 When such moisture is contained in the hollow interior, when the temperature drops, the air in the hollow interior is cooled, and condensation occurs in the hollow interior when the amount of saturated water vapor is exceeded.
特に、近年においては、固体撮像装置の小型化に伴う、透光性部材の薄型化が要求されており、透光性部材の厚みとしては、例えば0.3mmから1.5mm程度の厚みのものが多く使用されている。 In particular, in recent years, there has been a demand for thin translucent members accompanying the miniaturization of solid-state imaging devices, and the translucent member has a thickness of, for example, about 0.3 mm to 1.5 mm. Is often used.
このような厚みの透光性部材を用いた場合、透光性部材の熱容量がパッケージの熱容量と比較して低くなる場合が多く、透光性部材がパッケージより先に冷却されてしまう。その結果、透光性部材の裏面に結露が生じてしまう。 When the translucent member having such a thickness is used, the heat capacity of the translucent member is often lower than the heat capacity of the package, and the translucent member is cooled before the package. As a result, condensation occurs on the back surface of the translucent member.
透光性部材裏面の主光線透過領域に結露が発生すると、受光部に進入する光線を遮蔽し、受光部に進入する光線の光量低下を引き起こし、受光不良又は像ボケが発生する。 When dew condensation occurs in the principal ray transmission region on the back surface of the translucent member, the light ray entering the light receiving unit is blocked, the light amount of the light ray entering the light receiving unit is reduced, and light reception failure or image blur occurs.
そこで、本発明は、透光性部材の表面に付着するゴミ又はキズに起因する受光不良又は像ボケと、透光性部材の裏面に発生する結露に起因する受光不良又は像ボケとの両方を同時に解決することを目的とする。 Therefore, the present invention eliminates both light reception failure or image blur caused by dust or scratches adhering to the surface of the light transmissive member and light reception failure or image blur caused by condensation occurring on the back surface of the light transmissive member. The purpose is to solve simultaneously.
本発明は、上記課題を解決するための手段として、固体撮像素子を搭載する中空状のパッケージと、該パッケージを封止する透光性部材とを備える固体撮像装置において、前記透光性部材の主光線透過領域を含む領域の光入射側を、他の領域に比べて厚くした凸形状にすることを特徴とする。 The present invention provides a solid-state imaging device comprising a hollow package on which a solid-state imaging element is mounted and a translucent member that seals the package as means for solving the above-described problems. The light incident side of the region including the principal ray transmission region is formed in a convex shape that is thicker than the other regions.
本発明によれば、透光性部材の主光線透過領域を含む領域を他の領域より厚くしたので、温度低下時に発生する結露を主光線透過領域以外に選択的に発生させることができる。その結果、撮影時の受光不良又は像ボケを抑制できる。 According to the present invention, since the region including the principal ray transmission region of the translucent member is made thicker than the other regions, dew condensation that occurs when the temperature decreases can be selectively generated in addition to the principal ray transmission region. As a result, it is possible to suppress poor light reception or image blur during photographing.
また、透光性部材の光入射側(透光性部材の表面側)の一部を凸形状にすることによって、透光性部材表面と受光面との距離を遠くすることができる。その結果、透光性部材の表面に異物や結露が付着した場合でも、より大きい異物まで撮影時の受光不良又は像ボケを抑制することができる。 In addition, by forming a part of the light incident side of the translucent member (the surface side of the translucent member) into a convex shape, the distance between the translucent member surface and the light receiving surface can be increased. As a result, even when foreign matter or condensation adheres to the surface of the translucent member, it is possible to suppress light reception failure or image blur at the time of shooting up to a larger foreign matter.
以下、添付図面を参照して本発明を実施するための最良の実施の形態を説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS The best mode for carrying out the present invention will be described below with reference to the accompanying drawings.
[第1の実施形態]
図1は、本発明の第1の実施形態としての固体撮像装置を示す斜視図である。図2は、図1に示す固体撮像装置を示す断面図である。
[First embodiment]
FIG. 1 is a perspective view showing a solid-state imaging device as a first embodiment of the present invention. FIG. 2 is a cross-sectional view showing the solid-state imaging device shown in FIG.
図1、図2において、1がセラミック又はプラスチックからなる中空状のパッケージ、2がパッケージを封止する透光性部材、3が固体撮像素子、5が固体撮像素子の受光部、6が樹脂接着剤である。また、4は固体撮像素子3とリード(不図示)とを接続するワイヤを示している。 1 and 2, 1 is a hollow package made of ceramic or plastic, 2 is a translucent member for sealing the package, 3 is a solid-state image sensor, 5 is a light-receiving portion of the solid-state image sensor, and 6 is a resin bond It is an agent. Reference numeral 4 denotes a wire for connecting the solid-state imaging device 3 and a lead (not shown).
図1及び図2に示すように、本実施の形態において、透光性部材2の光入射側の一部を凸形状にした構成になっており、凸形状の領域は後記する主光線透過領域を含んで形成されている。 As shown in FIGS. 1 and 2, in the present embodiment, a part of the light incident side of the translucent member 2 has a convex shape, and the convex region is a principal ray transmission region described later. It is formed including.
L1は透光性部材2の凸形状領域の厚み、L2は凸形状領域以外の周辺領域の透光性部材2の厚みであり、この透光性部材2の厚みはL1>L2となっている。 L1 is the thickness of the convex region of the translucent member 2, L2 is the thickness of the translucent member 2 in the peripheral region other than the convex region, and the thickness of the translucent member 2 is L1> L2. .
透光性部材2の熱容量は材料の体積に比例することから、透光性部材2が厚くなれば熱容量も大きくなる。すなわち、熱容量を比較すると、凸形状領域>周辺領域となり、温度低下が起こった場合、凸形状領域よりも周辺領域の方が先に冷却される。 Since the heat capacity of the translucent member 2 is proportional to the volume of the material, the heat capacity increases as the translucent member 2 becomes thicker. That is, when the heat capacities are compared, the convex region> the peripheral region, and when the temperature decreases, the peripheral region is cooled earlier than the convex region.
よって、温度低下によって飽和水蒸気量を超えた時点で結露が発生し、発生した水分は透光性部材2の裏面の周辺部に選択的に付着するため、凸形状領域の結露を防ぐことができる。その結果、主光線透過領域は結露することがなくなり、撮影時の受光不良又は像ボケを抑制することができる。 Therefore, dew condensation occurs when the saturated water vapor amount is exceeded due to the temperature drop, and the generated water selectively adheres to the peripheral portion of the back surface of the translucent member 2, thereby preventing dew condensation in the convex region. . As a result, condensation does not occur in the principal ray transmission region, and poor light reception or image blur at the time of photographing can be suppressed.
また、本実施形態においては、凸形状領域を少なくとも透光性部材2の光入射側(透光性部材2の表面側)に設けている。 Moreover, in this embodiment, the convex-shaped area | region is provided in the light-incidence side (surface side of the translucent member 2) of the translucent member 2 at least.
透光性部材2の表面側に凸形状を形成することによって、透光性部材2の表面と受光面との距離が遠くなり、透光性部材の表面に付着したゴミ又はキズ等の異物に対してより大きい異物まで撮影時の受光不良又は像ボケを抑制できる。 By forming a convex shape on the surface side of the translucent member 2, the distance between the surface of the translucent member 2 and the light receiving surface is increased, and foreign matter such as dust or scratches attached to the surface of the translucent member is removed. On the other hand, it is possible to suppress light reception failure or image blur at the time of shooting up to a larger foreign object.
この効果について図3を用いて説明する。 This effect will be described with reference to FIG.
図3は、受光部から異なる高さにゴミ又はキズ等の異物が存在した場合を説明するために用いられる側面図である。 FIG. 3 is a side view used for explaining a case where foreign matters such as dust or scratches exist at different heights from the light receiving unit.
図3において、3が固体撮像素子、5が固体撮像素子の受光部、9が受光部に配置されている画素、10がゴミ又はキズ等の異物、11が透光性部材表面、12が画素に進入してくる光線を示す。 In FIG. 3, 3 is a solid-state imaging device, 5 is a light-receiving portion of the solid-state imaging device, 9 is a pixel disposed in the light-receiving portion, 10 is a foreign matter such as dust or scratches, 11 is a surface of a translucent member, and 12 is a pixel. Shows the rays that enter.
ここで画素に進入してくる光線12は画素面の法線方向の軸に対して5°の広がりを持って結像されることを想定する。画素から2.5mm離れた場所に透光性部材表面11があった場合と、画素から3.5mm離れた場所に透光性部材表面11があった場合を考える。 Here, it is assumed that the light beam 12 entering the pixel is imaged with a 5 ° spread with respect to the axis in the normal direction of the pixel surface. Consider the case where the translucent member surface 11 is located 2.5 mm away from the pixel and the case where the translucent member surface 11 is located 3.5 mm away from the pixel.
画素から2.5mm離れた場所に透光性部材表面11があった場合は画素に進入してくる光線12の面積はπ・(2.5tan5°)2=0.15mm2となる。画素の10%が遮蔽された場合に受光不良になることを仮定すると、異物の許容サイズは0.015mm2となる。 When the translucent member surface 11 is located 2.5 mm away from the pixel, the area of the light beam 12 entering the pixel is π · (2.5 tan 5 °) 2 = 0.15 mm 2 . Assuming that light reception failure occurs when 10% of the pixels are shielded, the allowable size of the foreign matter is 0.015 mm 2 .
一方、画素から3.5mm離れた場所に透光性部材表面11があった場合、画素に進入してくる光線12の面積はπ・(3.5tan5°)2=0.29mm2となる。同様の計算から異物の許容サイズは0.029mm2となり、より大きい異物まで許容範囲を広げることができる。 On the other hand, when the translucent member surface 11 is located 3.5 mm away from the pixel, the area of the light beam 12 entering the pixel is π · (3.5 tan 5 °) 2 = 0.29 mm 2 . From the same calculation, the allowable size of foreign matter is 0.029 mm 2 , and the allowable range can be expanded to larger foreign matters.
透光性部材2の凸形状としては、凸形状領域及び周辺領域ともに厚みが均一であって、凸形状領域の側壁が急激な段差が形成されていることが好適である。 As the convex shape of the translucent member 2, it is preferable that the convex region and the peripheral region have a uniform thickness, and the side wall of the convex region has a steep step.
凸形状領域及び周辺領域ともに厚みを均一とし、側壁面に急激な段差が形成されていることによって、凸形状領域と周辺領域の熱容量を急峻に変化させることができる。 By making the thickness uniform in both the convex region and the peripheral region and forming a steep step on the side wall surface, the heat capacity of the convex region and the peripheral region can be changed abruptly.
その結果、確実に周辺領域のみに結露を生じさせることが可能であり、言い換えれば、主光線透過領域では結露の発生を防止することができる。 As a result, it is possible to reliably cause condensation only in the peripheral area, in other words, it is possible to prevent the occurrence of condensation in the principal ray transmission area.
また、急激な段差を形成することによって、透光性部材2の大きさを極力小さくすることが可能である。 Moreover, it is possible to make the size of the translucent member 2 as small as possible by forming an abrupt step.
急激な段差をつけるための形状としては、例えば、図4(a)で示すような直角の凸型形状や、図4(b)で示すようなテーパーのかかった凸型の形状が好適である。 For example, a right-angled convex shape as shown in FIG. 4 (a) or a tapered convex shape as shown in FIG. 4 (b) is preferable as the shape for making a steep step. .
とりわけ、テーパーのかかった形状においては、側壁面の欠けが発生しにくい。そのため、欠けを起点とした透光性部材のクラック又は割れの発生を防止することが可能となる。 In particular, in the tapered shape, the side wall surface is less likely to be chipped. Therefore, it becomes possible to prevent the translucent member from cracking or cracking starting from the chipping.
しかしながら、テーパーの角度が大きすぎると急激な容量変化を付加することが困難になったり、透光性部材の面積が大きくなってコストアップしてしまう。そのため、凸形状領域の表面と側面の成す角は、90°から130°程度が好ましい。 However, if the taper angle is too large, it becomes difficult to add a sudden capacity change, or the area of the translucent member becomes large and the cost increases. Therefore, the angle formed between the surface and the side surface of the convex region is preferably about 90 ° to 130 °.
また、急激な熱容量差を持たせるための透光性部材2の凸形状領域と周辺領域との厚みの比L1/L2は1.05以上が好適であり、主光線透過領域への結露を防止することが可能である。 Further, the ratio L1 / L2 of the thickness of the convex region and the peripheral region of the translucent member 2 for giving a sharp heat capacity difference is preferably 1.05 or more, and prevents dew condensation on the principal ray transmission region. Is possible.
さらに、透光性部材2の凸形状領域を規定する主光線透過領域について、図5に示す断面図を用いて説明する。 Furthermore, the principal ray transmission region that defines the convex region of the translucent member 2 will be described with reference to the cross-sectional view shown in FIG.
図5において、1がセラミック又はプラスチックからなる中空状のパッケージ、2が透光性部材、3が固体撮像素子、5が固体撮像素子の受光部、6が樹脂接着剤、8が主光線透過領域である。また、4は固体撮像素子3とリード(不図示)とを接続するワイヤを示している。 In FIG. 5, 1 is a hollow package made of ceramic or plastic, 2 is a translucent member, 3 is a solid-state imaging device, 5 is a light-receiving part of the solid-state imaging device, 6 is a resin adhesive, and 8 is a principal ray transmission region. It is. Reference numeral 4 denotes a wire for connecting the solid-state imaging device 3 and a lead (not shown).
受光部5に進入してくる光線は、レンズ等によって集光されるため、受光面の法線方向に対して、ある角度をもっており、透光性部材2内においてこの光線の通過する領域を主光線透過領域8として規定している。 Since the light beam entering the light receiving unit 5 is collected by a lens or the like, the light beam has a certain angle with respect to the normal direction of the light receiving surface, and a region through which the light beam passes in the translucent member 2 is mainly used. It is defined as a light transmission region 8.
透光性部材2の凸形状領域の面積は、この主光線透過領域を含むように主光線透過領域以上の大きさに設定されている。 The area of the convex region of the translucent member 2 is set to be larger than the principal ray transmission region so as to include this principal ray transmission region.
例えば、ここで、主光線透過領域が受光面の法線方向の軸に対して5°の広がりを持って受光部に結像されることを想定すると、受光面の法線方向より5°外側に広げた領域が主光線が通過する領域である。 For example, assuming that the principal ray transmission region forms an image on the light receiving portion with a 5 ° spread with respect to the normal axis of the light receiving surface, for example, 5 ° outside the normal direction of the light receiving surface. The region extended in the region is the region through which the chief ray passes.
透光性部材裏面と受光面の距離を2mmとし、凸形状領域の厚さL1を1.5mmとすると、透光性部材表面の主光線が通過する最端部の距離は3.5×tan5°=0.31mmである。受光端部よりも全周にわたり0.31mm以上広い領域を凸形状とすれば、主光線を妨げることなく結像することができる。 When the distance between the back surface of the translucent member and the light receiving surface is 2 mm and the thickness L1 of the convex region is 1.5 mm, the distance between the end of the principal ray on the surface of the translucent member is 3.5 × tan5. ° = 0.31 mm. If a region wider than the light receiving end by 0.31 mm or more is formed in a convex shape, an image can be formed without disturbing the principal ray.
図1は、主光線透過領域の端部4辺の内側を凸形状とした図であるが、図6及び図7に示すように、主光線透過領域の端部2辺の内側のみを凸形状にした場合でも同様の効果を奏することができる。 FIG. 1 is a diagram in which the inside of the four edge portions of the chief ray transmission region is convex, but as shown in FIGS. 6 and 7, only the inner side of the two sides of the chief ray transmission region is convex. The same effect can be achieved even in the case of.
また、透光性部材の材質としては、透明部材であって、例えば、ガラスやアクリル等のプラスチック材質のものが使用可能である。特に、アクリル等のプラスチック材質の透光性部材の場合には、金型に樹脂を流し込むだけの樹脂成型で凸形状を成型することができ、生産性の面からより好適である。 Moreover, as a material of a translucent member, it is a transparent member, For example, the thing of plastic materials, such as glass and an acryl, can be used. In particular, in the case of a translucent member made of a plastic material such as acrylic, a convex shape can be formed by resin molding simply by pouring resin into a mold, which is more preferable in terms of productivity.
[第2の実施形態]
図8は、本発明の第2の実施形態としての固体撮像装置を示す断面図である。
[Second Embodiment]
FIG. 8 is a cross-sectional view showing a solid-state imaging device as a second embodiment of the present invention.
本実施の形態においては、透光性部材2に光入射側を凸形状にしただけではなく、透光性部材2の裏面側も凸形状にした点が第1の実施形態と異なっている。 The present embodiment is different from the first embodiment in that not only the light incident side of the translucent member 2 has a convex shape, but also the back side of the translucent member 2 has a convex shape.
1がセラミック又はプラスチックからなる中空状のパッケージ、2が透光性部材、3が固体撮像素子、5が固体撮像素子の受光部、6が樹脂接着剤である。また、4は固体撮像素子3とリード(不図示)とを接続するワイヤを示している。 1 is a hollow package made of ceramic or plastic, 2 is a translucent member, 3 is a solid-state image sensor, 5 is a light-receiving portion of the solid-state image sensor, and 6 is a resin adhesive. Reference numeral 4 denotes a wire for connecting the solid-state imaging device 3 and a lead (not shown).
図8において、主光線透過領域の凸形状は透光性部材の表裏面側に形成されている。 In FIG. 8, the convex shape of the chief ray transmitting region is formed on the front and back sides of the translucent member.
この形状によって、中空内部側にも厚みを持たせることができ、より急激な容量変化を誘起し、結露発生の選択性を向上させることができる。 With this shape, it is possible to increase the thickness of the hollow inner side, to induce a more rapid change in capacity, and to improve the selectivity for the occurrence of condensation.
また、凸形状を裏面側にも形成することによって、中空内部の体積が減少し、中空内部の空気の量を減少させることができる。 Further, by forming the convex shape also on the back surface side, the volume inside the hollow is reduced, and the amount of air inside the hollow can be reduced.
これにより、固体撮像装置作製時の空気中の水分に由来する中空内部の水分量が減少するため、温度低下時の結露発生量を抑制することができる。 Thereby, since the moisture content in the hollow derived from moisture in the air at the time of manufacturing the solid-state imaging device is reduced, it is possible to suppress the amount of condensation generated when the temperature is lowered.
その結果、透光性部材裏面の主光線透過領域の周辺部に付着した水分が、撮像素子上の画素エリアに落下して汚す等の不具合の発生確率を低減することができる。 As a result, it is possible to reduce the probability of occurrence of problems such as moisture that adheres to the periphery of the principal ray transmitting region on the back surface of the translucent member, dropping and fouling the pixel area on the image sensor.
本発明は、中空構造を有する固体撮像装置に利用可能である。 The present invention is applicable to a solid-state imaging device having a hollow structure.
1 パッケージ
2 透光性部材
3 固体撮像素子
4 ワイヤ
5 受光部
6 樹脂接着剤
7 配線導体(リード)
8 主光線透過領域
9 画素
10 ゴミ、キズ等の異物
11 透光性部材表面
12 画素に進入してくる光線
DESCRIPTION OF SYMBOLS 1 Package 2 Translucent member 3 Solid-state image sensor 4 Wire 5 Light-receiving part 6 Resin adhesive 7 Wiring conductor (lead)
8 Principal ray transmission area 9 Pixel 10 Foreign matter such as dust, scratch, etc. 11 Translucent member surface 12 Light entering the pixel
Claims (8)
前記透光性部材の主光線透過領域を含む領域の光入射側を、他の領域に比べて厚くした凸形状にすることを特徴とする固体撮像装置。 In a solid-state imaging device comprising a hollow package on which a solid-state imaging element is mounted and a translucent member that seals the package,
A solid-state imaging device, wherein a light incident side of a region including a principal ray transmitting region of the translucent member is formed in a convex shape that is thicker than other regions.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007281760A JP2009111149A (en) | 2007-10-30 | 2007-10-30 | Solid-state imaging apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007281760A JP2009111149A (en) | 2007-10-30 | 2007-10-30 | Solid-state imaging apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009111149A true JP2009111149A (en) | 2009-05-21 |
Family
ID=40779323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007281760A Pending JP2009111149A (en) | 2007-10-30 | 2007-10-30 | Solid-state imaging apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2009111149A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101420934B1 (en) * | 2011-12-06 | 2014-07-17 | 옵티즈 인코포레이티드 | Wire bond interposer package for cmos image sensor and method of making same |
JP2019107887A (en) * | 2017-12-19 | 2019-07-04 | キヤノン株式会社 | Transparent member, imaging device, and method for producing transparent member |
-
2007
- 2007-10-30 JP JP2007281760A patent/JP2009111149A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101420934B1 (en) * | 2011-12-06 | 2014-07-17 | 옵티즈 인코포레이티드 | Wire bond interposer package for cmos image sensor and method of making same |
JP2019107887A (en) * | 2017-12-19 | 2019-07-04 | キヤノン株式会社 | Transparent member, imaging device, and method for producing transparent member |
JP7271145B2 (en) | 2017-12-19 | 2023-05-11 | キヤノン株式会社 | Transparent member, imaging device, and method for manufacturing transparent member |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5489543B2 (en) | Solid-state imaging device | |
WO2010086926A1 (en) | Optical device and method for manufacturing same | |
JP4686400B2 (en) | Optical device, optical device apparatus, camera module, and optical device manufacturing method | |
KR100705349B1 (en) | Solid state imaging device, semiconductor wafer and camera module | |
JP5676171B2 (en) | Solid-state imaging device, manufacturing method thereof, and electronic apparatus | |
JP2008166632A (en) | Solid-state imaging apparatus, its manufacturing method and camera module | |
TWI698009B (en) | Image sensor chip encapsulation structure and method for manufacturing same | |
JP2006222249A (en) | Solid-state image sensor package | |
WO2017126376A1 (en) | Image sensor, manufacturing method, and electronic device | |
JP4705084B2 (en) | Electronic equipment | |
JP4672301B2 (en) | Solid-state imaging device and method for manufacturing solid-state imaging device | |
JP2008250285A (en) | Optical member and imaging device having the same | |
JP2011187482A (en) | Solid-state imaging apparatus, module for optical device, and method of manufacturing solid-state imaging apparatus | |
JP2006269841A (en) | Solid-state imaging device | |
JP2010147327A (en) | Method of manufacturing solid-state imaging device, and solid-state imaging device | |
JP2011054794A (en) | Optical device and method of manufacturing the same | |
JP2010165939A (en) | Solid-state imaging device and method of manufacturing the same | |
JP2014216394A (en) | Solid state imaging device and electronic camera | |
JP2009135263A (en) | Optical device | |
JP2009111149A (en) | Solid-state imaging apparatus | |
JP2010050391A (en) | Semiconductor device and electronic apparatus using the same | |
JP2010147200A (en) | Solid-state imaging apparatus and method of manufacturing same | |
JPH0888339A (en) | Solid-state image sensing device | |
JP2008047587A (en) | Optical detector | |
JP2011061133A (en) | Semiconductor image sensor and method of manufacturing the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20090324 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100201 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20100630 |