JP2009109438A - Probe for measurement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To constitute a part of a probe for four-probe measurement for an usual probe, to reduce the number of kinds of components required for manufacturing the usual probe and the probe for four-probe measurement, to reduce the manufacturing cost of the probe, and to achieve a mass production. <P>SOLUTION: A pair of conductive pieces 20 and 20 constituting a peripheral side probe section 4 are formed in a pipe shape, an inner probe section 6 usable also as the usual probe can be loosely inserted into it, and the probe 2 for four-probe measurement is configued by its peripheral side probe section 30 and the inner probe section 6 loosely inserted into it. Then, in order to prevent removal of the inner probe section 6 from the peripheral side probe section 4, a barrel 14 of the inner probe section 6 is bonded (adhesive 32) to a coil spring 24 of the peripheral side probe section 4 at intermediate parts. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  In the present invention, a normal probe used for relay for connecting each electrode of an electronic component such as a semiconductor element and an electronic circuit such as a tester circuit can be used as a part for a four-probe measurement. The present invention relates to a measurement probe.

  Electronic circuits using ICs, LSIs, transistors, and other electronic components are used in a large number of devices and devices, and their applications are steadily expanding. It is usually constructed using a printed circuit board with wiring films printed on both sides, and an electronic circuit is mounted by mounting various electronic components such as IC, LSI, transistor, etc. on the printed circuit board and performing necessary soldering. Is configured.

Many of devices and devices using electronic circuits are required to be downsized, highly functional, and high in performance, and accordingly, the circuit configuration of electronic circuits is complicated and high integration is required. Therefore, the wiring of the printed circuit board also tends to be miniaturized and highly integrated, and as a result, measurement for the inspection becomes difficult. This is because it is necessary to increase the arrangement density of the probes for measurement and the accuracy of the arrangement position by miniaturization and high integration of the wiring. Nevertheless, the importance of inspection is increasing.
This is because the incidence of short-circuit defects increases as the wiring becomes finer and more integrated.

  A tester equipped with a measurement circuit is used for the inspection, and a contact device is used for electrical derivation of each wiring film, electrode, etc. of the printed circuit board to the measurement circuit. This contact device has a number of probes on a plate, one end of each probe is brought into contact with a portion to be electrically connected to a measurement circuit such as each wiring film on a printed circuit board, and the other end of a cord connected to the measurement circuit. Many are designed to come into contact with the tip. In this regard, the applicant company has made various proposals according to Japanese Patent Application No. 7-61728, Japanese Patent Application No. 8-183449, Japanese Patent Application No. 10-66333, and the like.

By the way, in the measurement, there are normal measurement performed by simply bringing one end of each probe into contact with each wiring film or each electrode, and four-probe measurement. The four-probe measurement is performed while separately making electrical contact with two probe terminals [I (current) terminal, V (voltage) terminal] for one probe point.
For example, in resistance measurement by four-probe measurement, when the case of measuring the parasitic resistance between two points A and B to be measured is taken as an example, a predetermined current is passed between the two points A and B, Thereby, the voltage drop generated between A and B is obtained, and the parasitic resistance is obtained by dividing the voltage drop by the current, and the measurement accuracy is extremely high.

  Therefore, for the measurement, a normal probe for performing a normal measurement and a probe for four-probe measurement are required. FIG. 2A shows a typical conventional example of a normal probe. In the figure, a and a are a pair of rod-shaped conductors, b and b are contact ends of one end of the conductors a and a, and in this conventional example, the contact ends b and b are needle-shaped. However, it may be crowned. c and c are engaging stepped portions facing toward the outside (facing the contact end side) formed in the middle portion of the outer peripheral surface of the conductors a and a, and are formed by increasing the outer diameter on the base side from the tip side. Yes.

  d is a conductive coil-shaped spring interposed between the pair of conductors a and a with the contact ends b and b facing outward and back to back. e is a barrel, which is externally fitted to the base half of the pair of conductors a and a and a spring d, and one end f of which is bent inward and biased outward by the spring d. Engaged with the engagement step c of the conductor a, the other end f is also bent inward and is also urged outward by the spring d to be engaged with the engagement step c of the other conductor a. Yes.

  A large number of the probes g are arranged in a penetrating manner so as to protrude from the contact ends b and b on both surfaces of a multi-layer plate of the contact device. The plate is interposed between an electronic device to be measured, for example, an IC and a tester circuit, and each probe g, g,... Is pressed between each electrode of the IC and each terminal of the tester circuit, for example. The spring d is contracted by the pressing force and accumulates elasticity, and by the elasticity, the contact ends b and b of the conductors a and a of the probes g, g,... Are terminals of the IC and terminals of the tester circuit. And a good electrical connection state is formed.

Next, FIG. 2 (B) shows a conventional example of a four-probe measurement probe. Hereinafter, the four-probe measurement probe (106) will be described with reference to FIG. 2 (B).
Reference numeral 101 denotes a contact device, and 102 denotes a probe storage board, which is formed by laminating a plurality of plates 102a, 102b, 102c, and 102d. In this figure, the probe storage board 102 is shown only in a portion where one probe storage hole 104 is formed. However, the probe storage board 102 has a plurality of probe storage holes 104, 104,. In this example, the structure and dimensions of each probe storage hole 104 are exactly the same.

Each of the probe storage holes 104 is an inward retaining step 104a formed by increasing the inner diameter of the outer side from the inner side at a position closer to the inner side of the probe storage board 102 from both main surfaces. 104a. Four probe measuring probes 106 are respectively stored in the probe storage holes 104.
The four-probe measurement probe 106 includes an inner relay element 108 and a circumferential relay element 110 that is located outside and can move independently. The inner relay element 108 includes a pair of rod-shaped conductors 112 and 112 and a conductive spring 114 that is interposed between the pair of rod-shaped conductors 112 and 112 and biases them in the direction of separating them.

Each of the rod-like conductors 112, 112 has a smaller inner diameter than a substantially outer half, and an inwardly inclined step 116, 116 is formed between them. By engaging the stepped portions 116 and 116 between the rod-like conductors 112 and 112, they are biased in the direction of separating them. The conductive spring 114 is basically in the form of a coil, but the intermediate portion is configured such that adjacent wire ring portions are in contact with each other. The portions are elastic without contact between adjacent wire ring portions. Thus, the part which adjacent wire ring parts contact is provided in order to make the parasitic resistance between the both ends of the electroconductive spring 114 smaller.
Reference numerals 118 and 118 denote insulating tubes (first insulating tubes) fixed to the outer half portions of the outer peripheral surfaces of the rod-shaped conductors 12 and 12 in an outer fitting manner.

  The circumferential relay element 110 includes a pair of cylindrical conductors 120 and 120 and a conductive spring 22 that is interposed between the pair of cylindrical conductors 120 and 120 and biases them in a direction to separate them. Each of the cylindrical conductors 120, 120 has stepped portions 124, 124 facing inwardly at the inner end of the outer peripheral surface, and the spring 122 has stepped portions 124, 124 between the cylindrical conductors 120, 120. By being engaged with each other, it is urged in the direction of separating them. The conductive spring 122 is basically in the form of a coil like the conductive spring 114, but the adjacent wire ring portions are in contact with each other at the intermediate portion. However, the outer portion of the outer ring portion is not in contact with each other and has elasticity.

126 and 126 are stepped portions formed on the inner peripheral surfaces of the cylindrical conductors 120 and 120 facing inward, and an insulating tube (second insulating tube) made of, for example, polyimide is formed inside each stepped portion 126 and 126. ) 128 and 128 are arranged. The inner diameters of the insulating tubes 126 and 126 are appropriately smaller than the outer diameters of the insulating tubes (first insulating tubes) 118 and 118.
Reference numeral 130 denotes a spring disposed between the insulating tubes 128 and 128, which urges the springs in a direction to separate them. The spring 130 may be a conductive material or an insulating material.

Each of the probe probes for measuring the four probes 106 has a cylindrical conductor of the peripheral relay element 110 on a stepped portion 104a, 104a for retaining the pin formed on the inner peripheral surface of each probe storage hole 104 of the probe storage board 102. The step portions 132 and 132 formed on the outer peripheral surfaces of the 120 and 120 are prevented from coming off by engaging with each other.
In each of the four probe measuring probes 106, the cylindrical conductors 120 and 120 constituting the peripheral relay element 110 by the elasticity of the conductive spring 122 and the spring 130 are normally provided in the step portions 132 and 132. Is stably positioned where it engages with the steps 104a, 104a for retaining.

In addition, electrical conduction is established between both ends of the circumferential relay element 110 of each of the four probe measuring probes 106 by the conductive spring 22.
On the other hand, the inner relay 108 is electrically connected between both ends by a conductive spring 114 between the rod-shaped conductors 112, 112.
Japanese Patent Application No. 7-61728 Japanese Patent Application No. 8-183449 Japanese Patent Application No. 10-66333 JP 2002-207049 A Japanese Patent Laid-Open No. 2006-145312

By the way, the conventional probe has a structure as shown in FIG. 2 (A), and the four-probe probe has a structure as shown in FIG. 2 (B). Even for the same electronic components (for example, IC), for ordinary probes, we prepare parts for ordinary probes, and for probes for four-probe measurement, It was necessary to prepare and manufacture parts.
However, it is preferable to reduce the number of parts used for manufacturing in order to reduce manufacturing costs and mass production, but in this way, conventional probes and four-probe measuring probes are completely separated from each other. There was a limit to reducing the number of types of parts because it had to be prepared and manufactured.

  The present invention has been made to solve such problems, and an ordinary probe is made to constitute a part of a four-probe measuring probe, so that the ordinary probe and the four-probe measuring probe are used. The purpose is to reduce the number of types of parts required for manufacturing the probe, to reduce the manufacturing cost of the probe, and to mass-produce.

  The probe according to claim 1 is arranged in such a manner that a pair of tubular conductors having distal ends facing each other outward and having an outward engagement stepped portion on an outer peripheral surface are spaced apart from each other between the pair of tubular conductors. The conductive coil spring and one end that are interposed so as to be biased are engaged with one of the engagement step portions of the tubular conductor, and the other end is engaged with the engagement step portion of the other tubular conductor. The pair of tubular conductors are arranged so that the outer probe is provided with a barrel externally fitted to allow axial movement of the pair of tubular conductors, and the distal end faces each other. A pair of rod-shaped conductors having a stepped portion, a conductive coil spring interposed between the pair of rod-shaped conductors so as to be urged away from each other, and one end of the rod-shaped conductor above The above-mentioned engagement of the other bar-shaped conductor at the other end of the engagement step Engaged with the stepped portion to allow the pair of rod-like conductors to move in the axial direction, and the outer diameter is larger than the inner diameter of the tubular conductor and the conductive coil spring of the circumferential probe portion. An inner probe portion having a barrel having a small outer diameter, and the inner probe portion is slidably inserted into the inner side of the peripheral probe portion for four-probe measurement. .

According to a second aspect of the present invention, in the measurement probe according to the first aspect, an intermediate portion between the inner probe portion and the peripheral probe portion is fixed.
According to a third aspect of the present invention, in the measurement probe according to the first or second aspect, a coil spring for preventing expansion of the diameter is fixed to the outer peripheral surface of each of the pair of tubular conductors of the circumferential probe in an outer fitting shape. It is characterized by becoming.

According to the measurement probe of the first aspect, the inner probe portion constituting the probe can also be used as an ordinary probe, so that it is not necessary to prepare a member dedicated to the ordinary probe.
Therefore, it is possible to reduce the number of types of parts necessary for providing a normal probe and a four-probe measuring probe, and to increase mass productivity.

According to the measurement probe of the second aspect, since the intermediate portion between the inner probe portion and the peripheral probe portion is fixed, the possibility that the inner probe portion slips out of the peripheral probe portion can be eliminated.
According to the measurement probe of the third aspect, there is a possibility that the repeated use of the probe increases the diameter of the tip of each of the pair of tubular conductors of the circumferential probe, which may prevent good contact. This can be prevented by a coil spring for preventing diameter expansion provided on the outer peripheral surface of each tip of each electron.

In the present invention, basically, the inner probe portion is slidably inserted into the circumferential probe portion to form a four-probe measuring probe, and the inner probe portion can be used alone as a normal probe. Can be used.
Note that if the inner probe portion is merely slidably inserted inside the peripheral probe portion, the inner probe portion may come out of the peripheral probe portion. It is desirable to fix the intermediate part with the probe part.
In addition, in order to eliminate the possibility that repeated use of the probe will increase the diameter of each of the pair of tubular conductors of the circumferential probe and prevent good contact, the pair of tubular conductors of the circumferential probe. A coil spring for preventing expansion of the diameter may be fixed to the outer peripheral surface of each tip of the electron in an outer fitting shape.

Hereinafter, the present invention will be described in detail according to illustrated embodiments. 1A to 1C are diagrams for explaining one embodiment of the present invention, where FIG. 1A is a cross-sectional view showing a second embodiment, and FIG. 1B is a cross-sectional view showing a circumferential probe portion 4. (C) is sectional drawing which shows the inner side probe part 6. FIG.
Example 2 shown in FIG. 1 (A) is a four-probe measuring probe, and is composed of a peripheral probe part 4 shown in FIG. 1 (B) and an inner probe part 6 shown in FIG. 1 (C).

First, the inner probe portion 6 will be described with reference to FIG. The inner probe portion 6 basically has the same structure as that conventionally used as an ordinary probe, for example, the probe shown in FIG. 2A, but will be described just in case.
Reference numerals 8 and 8 denote a pair of conductors, which are arranged so that their tips face each other, and have outwardly facing engaging steps 10 and 10 on the outer peripheral surface.

Reference numeral 12 denotes a conductive coil spring interposed between the pair of conductors 8. Reference numeral 14 denotes a barrel which houses the coil spring 12 and the base side portion of the pair of conductors 8 and 8. Specifically, the engaging step portions 16, 16 at both ends of the barrel 14 are engaged by the engaging step portions 10, 10 of the pair of conductors 8, 8, and the coil spring 12 and the pair of conductors 8 are engaged. , 8 base side portions are accommodated.
As will be described later, the inner probe portion 6 has an outer peripheral surface coated with an insulating material so that electrical insulation from the probe 4 is maintained when the inner probe portion 6 is housed in the circumferential probe portion 4.

A coil spring 12 interposed between the pair of conductors 8 and 8 biases the conductors 8 and 8 outward in the barrel 14.
Therefore, the inner probe portion 6 is interposed between, for example, an IC electrode and an electrode on the IC tester side, and when the distance between the electrodes becomes much shorter than the length of the probe 6 at the normal time (non-contact time), The coil spring 12 is compressed and accumulates elasticity, and the elasticity causes the conductors 8 and 8 to elastically contact the IC electrode and the IC tester side electrode so that the conductors 8 and 8 are in good contact with the electrodes.
Therefore, the inner probe portion 6 functions as an ordinary probe by itself. Further, in this embodiment, it is a constituent element of the four-probe measuring probe, which will be clarified later.

Next, the peripheral probe section 4 will be described with reference to FIG.
Reference numerals 20 and 20 denote a pair of tubular conductors, for example, arranged so that crown-shaped tips face each other outward, and have outward engaging step portions 22 and 22 on the outer peripheral surface. The reason why the conductors 22 and 22 are tubular is to allow the inner probe portion 6 to be loosely inserted therein.
Reference numeral 24 denotes a coil spring having conductivity interposed between the pair of conductors 20. A barrel 26 accommodates the coil spring 24 and the base portion of the pair of conductors 20 and 20. Specifically, the engagement step portions 28, 28 at both ends of the barrel 26 are engaged with the engagement step portions 22, 22 of the pair of tubular conductors 20, 20 so that the coil spring 24 and the pair of tubular portions are engaged. The base portions of the conductors 20 and 20 are accommodated. A coil spring 24 interposed between the pair of conductors 20 and 20 biases the tubular conductors 20 and 20 outward in the barrel 26.

Therefore, the outer probe portion 4 is interposed between, for example, an IC electrode and an electrode on the IC tester side, and when the distance between the electrodes becomes much shorter than the probe 4 at the normal time (non-contact time), the coil spring 24 is arranged. Is compressed and accumulates elasticity, and the elasticity causes the conductors 20 and 20 to elastically contact the electrodes of the IC and the IC tester side electrode so that the conductors 20 and 20 are in good contact with the electrodes.
Reference numerals 30 and 30 denote springs for preventing the expansion of the diameter of the conductors 20 and 20 which are externally fitted and fixed to the outer peripheral surfaces of the ends of the conductors 20 and 20, respectively. It plays a role in preventing the contactability from worsening.

Next, with reference to FIG. 1 (A), the measurement probe 2 for four-probe measurement which is an Example is demonstrated.
The measurement probe 2 is housed in the inner probe portion 6 in the peripheral probe portion 4, and an intermediate portion of the spring 24 and an intermediate portion of the inner probe portion 6 are bonded with an adhesive 32. This prevents the inner probe portion 6 from coming off the circumferential probe portion 4. In the present embodiment, adjacent portions of the coil are fixed to the portion of the spring 24 bonded to the inner probe portion 6 and the portion is not elastic. However, this increases the conductivity of the spring 24.

According to the second embodiment, two electric paths can be formed by the inner probe portion 6 and the peripheral probe portion 4 surrounding the inner probe portion 6, and four-probe measurement is possible.
Since the inner probe section 6 functions as an ordinary probe by itself, it can be used as an ordinary probe, and it is not necessary to prepare a dedicated part for the inner probe section. It is possible to reduce the number of types of parts necessary for providing the probe for use and to increase mass productivity.

  INDUSTRIAL APPLICABILITY The present invention is generally applicable to a measurement probe used in a contact device used for relaying to connect each electrode of an electronic component such as a semiconductor element and an electronic circuit such as a tester circuit.

(A)-(C) is for demonstrating one Example of this invention, (A) is sectional drawing which shows an Example, (B) is sectional drawing which shows a circumference side probe part, (C) FIG. 6 is a sectional view showing an inner probe portion. (A), (B) is for demonstrating background art, (A) is sectional drawing of a normal probe, (B) is sectional drawing of the prior art example of the probe for four-probe measurement.

Explanation of symbols

2 ... Examples (probes for four-probe measurement), 4 ... circumferential probe,
6 ... peripheral side probe part, 8 ... rod-shaped conductor, 10 ... engagement step part,
12 ... Coil spring, 14 ... Barrel, 16 ... Engagement step,
20 ... engaging step, 22 ... engaging step, 24 ... coil spring,
26 ... Barrel, 28 ... Engagement step, 30 ... Spring for preventing diameter expansion,
32: Adhesive.

Claims (3)

A pair of tubular conductors having distal ends arranged to face each other and having outwardly engaging stepped portions on the outer peripheral surface, and interposed between the pair of tubular conductors so as to be urged away from each other. The conductive coil spring and one end are engaged with one of the engaging step portions of the tubular conductor, and the other end is engaged with the engaging step portion of the other tubular conductor, and the pair of tubular conductors. A peripheral probe portion having a barrel fitted outside so as to allow movement in the axial direction thereof;
A pair of rod-shaped conductors that are arranged so that their tips face each other outward and have an outwardly engaging stepped portion on the outer peripheral surface, are interposed between the pair of rod-shaped conductors so as to be urged away from each other. The pair of rod-shaped conductors with the conductive coil spring and one end engaged with the engagement step of one of the rod-shaped conductors and the other end engaged with the engagement step of the other rod-shaped conductor. And an inner probe part including a barrel having an outer diameter smaller than the inner diameter of the tubular conductor and the conductive coil spring of the circumferential probe part,
With
A measuring probe, wherein the inner probe portion is slidably inserted inside the circumferential probe portion for four-probe measurement. The measurement probe according to claim 1, wherein a barrel of the inner probe portion and a coil spring of the circumferential probe portion are fixed to each other between the intermediate portions. The measurement probe according to claim 1 or 2, wherein a diameter expansion preventing coil spring is fixed to the outer peripheral surface of the tip of each of the pair of tubular conductors of the peripheral probe.

Images