JP2009103625A - Probe device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a probe device capable of easily recognizing a part to be visually measured of a measuring object, and capable of detecting highly precisely relating to the probe for measuring the electrical characteristics. <P>SOLUTION: The probe device of a cantilever type supported at the base-end part has a probe chip 7, the tip part of which is abutted against a metal exposed part 5 (the part to be measured) of the printed substrate 3 (measuring object) in a slanting fashion; and a piezoelectric element 13 (force-detecting means) which is in contact with the probe chip 7 for measuring the force acting on the probe chip 7, at abutting against the tip of the probe chip 7, on the metal exposed part 5 of the printed substrate 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a probe device for measuring electrical characteristics.

  In order to measure whether the component is correctly mounted or the transmission signal is correctly transmitted and received during the printed circuit board manufacturing test process, the probe is brought into contact with the exposed metal part (measurement location) of the printed circuit board, which is the object to be measured. To measure.

  In recent years, exposed metal portions have become very small due to the miniaturization and high density of printed circuit boards. In order to cope with this, since the probe itself is also downsized, it is difficult to confirm whether the probe is in contact with the exposed metal portion and the correct electrical characteristics can be measured by human eyes. Similarly, it is difficult to check whether the probe is in reliable contact with respect to electrical measurements such as voltage and current.

As a probe device that can confirm whether or not it is surely in contact with a measurement location, a probe device described in Patent Document 1 has been proposed. Patent Document 1 discloses a bottomed cylindrical sleeve with one end face open, a piezoelectric element provided at the bottom of the sleeve, and a probe tip provided so as to protrude outward from the open face of the sleeve. A probe comprising a spring provided between a piezoelectric element and a probe tip is described. When the tip of the probe tip of the probe is applied to the measurement site, the pressure acting on the probe tip is transmitted to the piezoelectric element via the spring and converted into a voltage by the piezoelectric element. The magnitude of this voltage makes it possible to confirm whether or not the probe is reliably in contact with the location to be measured.
JP-A-5-19014

However, the probe device of the invention described in Patent Document 1 described above has the following problems.
(1) Since the probe hits from directly above the location to be measured, it is difficult to visually recognize the location to be measured.
(2) If the spring is caught on the inner wall surface of the sleeve, it cannot be detected with high accuracy.

This invention is made | formed in view of the said problem, The subject is providing the probe apparatus which is easy to visually recognize the to-be-measured location of a to-be-measured object.
Another object of the present invention is to provide a probe device capable of highly accurate detection.

  The invention according to claim 1, which solves the above problem, is a cantilever beam in which the base end side is supported, and the tip end side is obliquely applied to the measurement location of the object to be measured, and the probe tip And a force detection means for detecting a force applied to the probe tip when the tip of the probe tip is applied to the measurement location of the object to be measured. .

  A force is applied to the probe tip when the tip end side of the probe tip in the form of a cantilever beam whose base end portion is supported is obliquely applied to the measurement location of the object to be measured. The force detection means detects the force applied to the probe tip.

The invention according to claim 2 is the probe apparatus according to claim 1, further comprising a notification unit that responds when the output value of the force detection unit becomes larger than the first set value.
When the output value of the force detection means becomes larger than the first set value, the notification means responds.

  The invention according to claim 3 is a cantilever beam in which the base end side is supported, and a plurality of probe tips whose tip end side is obliquely applied to a plurality of measurement points on the object to be measured are arranged in parallel. A force detecting means that is provided in contact with the probe and each probe tip, and detects a force applied to each probe tip when the tip of each probe tip is applied to each measurement location of the object to be measured And a notification that responds when the output value of each force detection means is greater than the first set value and the difference between the maximum value and the minimum value of the output values of each force detection means is less than the second set value. And a probe device.

  When the tip end side of a plurality of probe tips arranged in parallel with the probe is obliquely applied to the measurement location of the object to be measured, force is applied to each probe tip. . Each force detection means detects the force applied to each probe tip.

The notifying means responds when the output value of each force detecting means is larger than the first set value and the difference between the maximum value and the minimum value among the output values of each force detecting means is less than the second set value. To do.
The invention according to claim 4 is the probe apparatus according to any one of claims 1 to 3, wherein the force detection means is a piezoelectric element pushed by the probe tip.

The piezoelectric element is pushed by the probe tip and generates a voltage corresponding to the pushed force.
The invention according to claim 5 is a cantilever beam in which the base end side is supported, and a plurality of probe tips whose tip end side is obliquely applied to a plurality of measurement locations on the object to be measured are arranged in parallel. A probe, a piezoelectric element that is provided in contact with each of the probe tips, and is pressed by each of the probe tips when a tip of the probe tip is applied to a measurement location of the measurement target; and the measurement target Z-axis direction probe moving means for moving the probe in the Z-axis direction, which is a direction orthogonal to the surface on which the measurement object is provided, and X is the direction orthogonal to the Z-axis on the surface on which the object to be measured is provided X-axis direction probe moving means for moving the probe in the direction, and Y for moving the probe in the Y direction, which is a direction perpendicular to the Z axis and the X axis, on the surface on which the object to be measured is provided A direction probe moving means, a probe rotating means for rotating the probe about the Y axis, and a difference between a maximum value and a minimum value among voltages generated in each piezoelectric element pushed by the probe tip, and the difference A first table in which a relationship between the probe rotation angle at which the probe is rotated from the position of the probe where the difference is 0 and the difference is generated when the probe rotates about the Y axis, and the probe is the Y axis And a second table in which the coordinates of the probe on the XY plane composed of the X axis and the Y axis are recorded, and the probe tip is a plurality of the objects to be measured. The voltage generated in each piezoelectric element when applied to the measured location of the second is larger than the first set value, and the difference between the maximum value and the minimum value among the voltages generated in each piezoelectric element is the second set. Than the value If so, the Z-axis direction probe moving means is driven to move the tip end side of the probe tip away from the measurement location of the object to be measured, and the maximum voltage of each piezoelectric element is referred to by referring to the first table. The probe rotation means is rotated so that the difference between the value and the minimum value is within the second set value similarity, and the probe is shifted on the XY plane with reference to the second table. A probe apparatus comprising: an X-direction probe moving means and a control means for driving the Y-direction probe moving means so as to correct the amount.

  When the tip end side of a plurality of probe tips arranged in parallel to the probe is obliquely applied to the measurement location of the object to be measured, force is applied to each probe tip. . Each piezoelectric element is pushed by each probe tip and generates a voltage corresponding to the pushed force.

  The control means is configured such that when the probe tip is applied to a plurality of measurement locations of the measurement object, a voltage generated in each piezoelectric element is greater than a first set value, and a voltage generated in each piezoelectric element is If the difference between the maximum value and the minimum value is larger than the second set value, the Z-axis direction probe moving means is driven to move the tip end side of the probe tip away from the measurement location of the object to be measured. Referring to the table in FIG. 1, the probe rotating means is rotated so that the difference between the maximum value and the minimum value of the voltage of each piezoelectric element is within the second set value, and the second table is Referring to, the X direction probe moving means and the Y direction probe moving means are driven so as to correct the displacement amount of the probe on the XY plane.

  According to the first to fourth aspects of the invention, since the tip of the probe tip of the probe device is applied obliquely with respect to the measurement location of the measurement object, it is easy to visually recognize the measurement location of the measurement object. Moreover, since the force detection means is in contact with the probe tip, it can be detected with high accuracy.

  The invention according to claim 2 is provided with notifying means that responds when the output value of the force detecting means becomes larger than the first set value. By setting the first set value to an optimum value, it can be easily understood that the probe tip of the probe device is reliably in contact with the measurement location of the measurement object.

  According to the invention of claim 3, the output value of each force detection means is greater than the first set value, and the difference between the maximum value and the minimum value of the output values of each force detection means is the second set value. In addition, a notification means that responds to the following cases was provided.

  By setting the first set value to an optimum value, it can be easily understood that each probe tip of the probe device is reliably in contact with each measurement location of the measurement object. In addition, by making the second set value optimum, it can be easily understood that each probe tip is in uniform contact with each measurement location.

According to the fourth aspect of the present invention, the force detecting means is a piezoelectric element pushed by the probe tip, so that the structure is simple, small and light, and easy to handle.
According to the invention which concerns on Claim 5, since the front-end | tip part side is diagonally applied with respect to the to-be-measured location of a to-be-measured object, the probe tip of a probe apparatus is easy to visually recognize the to-be-measured location of a to-be-measured object. Further, since the piezoelectric element is provided so as to be in contact with the probe chip, it can be detected with high accuracy.

  And a probe having a plurality of probe tips arranged side by side in a cantilever shape in which the base end side is supported and the tip end side being obliquely applied to a plurality of measurement points on the object to be measured. A piezoelectric element that is provided in contact with the tip and is pressed by each probe tip when the tip of the probe tip is applied to the location to be measured, and the surface on which the device to be measured is provided And a Z-axis direction probe moving means for moving the probe in the Z-axis direction that is orthogonal to the Z-axis direction, and the probe is moved in the X direction that is orthogonal to the Z-axis on the surface on which the object to be measured is provided Y-axis direction probe movement means for moving the probe in the Y direction, which is a direction perpendicular to the Z axis and the X axis, on the surface on which the X-axis direction probe moving means and the object to be measured are provided The difference between the maximum value and the minimum value among the voltages generated in each piezoelectric element pushed by the probe tip, the probe rotating means for rotating the probe around the Y axis, and this difference is 0 A first table in which a relationship between a rotation angle of the probe in which the difference occurs when the probe rotates around the Y axis from the position of the probe, and the probe around the Y axis A second table in which the coordinates of the probe on the XY plane composed of the X-axis and the Y-axis are recorded when rotated, and the probe tip is a plurality of measured objects of the measured object. When applied to a location, the voltage generated in each piezoelectric element is greater than the first set value, and the difference between the maximum value and the minimum value of the voltages generated in each piezoelectric element is greater than the second set value. Z The direction probe moving means is driven to move the tip end side of the probe tip away from the location to be measured of the object to be measured, and with reference to the first table, the maximum value and the minimum value of the voltage of each piezoelectric element The probe rotating means is rotated so that the difference is within the second set value, and the displacement amount of the probe on the XY plane is corrected with reference to the second table. By including the control means for driving the X-direction probe moving means and the Y-direction probe moving means, it is possible to automatically and reliably measure a plurality of contact points.

<First Embodiment>
A first embodiment will be described with reference to FIGS.
As shown in FIG. 1 which is a block diagram showing the entire probe apparatus according to the first embodiment, the probe apparatus 1 is applied to a metal exposed portion 5 which is a measurement target portion of a printed circuit board 3. It is roughly divided into a probe 9 provided with a probe tip 7 and a positioner 11 for moving the probe 9 to a desired position.

  As shown in FIG. 2, which is a cross-sectional view of the probe 9, the probe tip 7 has a cantilever shape with the base end side supported, and the tip end side is obliquely applied to the metal exposed portion 5 of the printed circuit board 3. It is like.

  In the probe 9, there is provided a force detection means for detecting a force applied to the probe chip 7 when it contacts the probe chip 7 and the tip of the probe chip 7 is applied to the exposed metal part 5 of the printed circuit board 3. . In this embodiment, the piezoelectric element 13 is used. When the probe tip 7 is pressed against the metal exposed portion 5, when the probe tip 7 is an elastic body, the probe tip 7 is elastically deformed to push the piezoelectric element 13, and the piezoelectric element 13 has a voltage corresponding to the pushed force. Is generated. Even if the probe tip 7 is a rigid body, the reaction force from the metal exposed portion 5 acts on the piezoelectric element 13, and a voltage corresponding to the reaction force is generated in the piezoelectric element 13. In the case where the probe tip 7 is an elastic body, a strain gauge or the like that detects strain generated in the probe tip 7 can be applied.

Returning to FIG. 1, the positioner 11 will be described. The probe 9 is attached to the positioner 11 using a screw 10.
The positioner 11 has Z-axis direction probe moving means for moving the probe 9 in the Z-axis direction that is a direction orthogonal to the surface on which the printed circuit board 3 is provided (the vertical direction in this embodiment). This Z-axis direction probe moving means operates by rotating the knob 21.

  Further, the positioner 11 moves the probe 9 in the X direction (in this embodiment, the direction perpendicular to the paper surface of FIG. 1) that is perpendicular to the Z axis on the surface on which the printed circuit board 3 is provided. Directional probe moving means is included. This X-axis direction probe moving means operates by rotating the knob 23.

  Further, the positioner 11 has Y-axis direction probe moving means for moving the probe 9 in the Y direction, which is a direction orthogonal to the Z axis and the X axis, on the surface on which the printed circuit board 3 is provided. This Y-axis direction probe moving means operates by rotating the knob 25.

  As shown in FIGS. 1 and 2, one end side is electrically connected to the coaxial cable 31 on the proximal end side of the probe chip 7, and the other end side of the coaxial cable 31 is an electric special product of the metal exposed portion 5. Is connected to an electrical characteristic measuring device 33 for measuring One end of a cable 35 is electrically connected to the piezoelectric element 13, and the other end of the cable 35 is connected to a contact confirmation device 37 as a notification means. The contact confirmation device 37 displays a voltage generated in the piezoelectric element 13.

The operation of the above configuration will be described.
(1) With the distal end side of the probe tip 7 of the probe 9 away from the printed circuit board 3, the knob 23 and the knob 25 are turned so that the distal end side of the probe chip 7 is positioned on the metal exposed portion 5 of the printed circuit board 3. The positioner 11 is moved to the position.
(2) The knob 21 is turned so that the tip side of the probe tip 7 of the probe 9 is brought into contact with the exposed metal portion 5 of the printed board 3. At this time, looking at the display of the contact confirmation device 37, the knob 21 is turned until the voltage generated in the piezoelectric element 13 becomes larger than the first set value.

According to the above configuration, the following effects can be obtained.
(1) Since the tip end side of the probe tip 7 of the probe device 1 is obliquely applied to the metal exposed portion 5, the metal exposed portion 5 is easily visible.
(2) Since the piezoelectric element 13 as the force detecting means is in contact with the probe tip 7, it can be detected with high accuracy.

Further, since the force detecting means is the piezoelectric element 13, the structure is simple, the light weight is small, and the handling is easy.
(3) By providing a contact confirmation device 37 that displays the voltage generated in the piezoelectric element 13 and setting the first set value to an optimum value, the probe tip 7 of the probe device 1 is surely brought into contact with the metal exposed portion 5. It is easy to see that

  The present invention is not limited to the above embodiment. In the above-described embodiment, the contact confirmation device 37 that displays the voltage generated in the piezoelectric element 13 is provided as a notification unit. Alternatively, an LED or the like may be emitted when the first set value is reached, a buzzer, or the like. You can also make a sound.

Further, the Z-axis direction probe moving means is driven by a motor, and the tip end side of the probe tip 7 of the probe 9 is placed on the metal exposed portion 5 of the printed circuit board 3 until the voltage generated in the piezoelectric element 13 becomes larger than the first set value. You may make it press.

<Second Embodiment>
A second embodiment will be described with reference to FIGS.

  In general, in order to measure the electrical characteristics of the exposed metal portion on the printed circuit board, the probe tip must be applied to at least two points, the reference point and the point to be measured. The present embodiment is a probe device having a plurality of probe tips.

  As shown in FIG. 3 which is a block diagram showing the entire probe apparatus according to the second embodiment, the probe apparatus 101 is a probe applied to a metal exposed portion which is a measurement target of a printed board 103 which is a measurement object. The probe 109 is roughly divided into a probe 109 provided with a tip and a positioner 111 that moves the probe 109 to a desired position.

  As shown in FIG. 4, which is a view taken in the direction of arrow A in FIG. 3, the probe 109 has a first probe tip 107 applied to a reference point and a second probe tip 108 applied to a measurement point. It is installed.

  Similarly to the first embodiment, the first probe tip 107 and the second probe tip 108 are cantilever beams with the base end side supported, and the tip end side is the first of the printed circuit board 103. The metal exposed portion 105 and the second metal exposed portion 106 are applied obliquely. In the probe 109, the first probe tip 107 and the second probe tip 108 are in contact with each other, and the tips of the first probe tip 107 and the second probe tip 108 are exposed to the first metal of the printed circuit board 103. Force detecting means for detecting the force applied to the first probe tip 107 and the second probe tip 108 when applied to the portion (reference point) 105 and the second exposed metal portion (measured point) 106 Is provided. In the present embodiment, the first piezoelectric element and the second piezoelectric element are used.

Returning to FIG. 3, the positioner 111 will be described. The probe 109 is attached to the positioner 111 using a screw 110.
The positioner 111 has Z-axis direction probe moving means 121 that moves the probe 109 in the Z-axis direction that is a direction orthogonal to the surface on which the printed circuit board 103 is provided (in this embodiment, the vertical direction). This Z-axis direction probe moving means operates by driving a motor (not shown).

  Further, the positioner 111 moves the probe 109 in the X direction (in this embodiment, the direction perpendicular to the paper surface of FIG. 3) that is orthogonal to the Z axis on the surface on which the printed circuit board 103 is provided. Directional probe moving means 123 is provided. This X-axis direction probe moving means operates by driving a motor (not shown).

  Further, the positioner 111 has a Y-axis direction probe moving means 125 that moves the probe 109 in the Y direction, which is a direction orthogonal to the Z axis and the X axis, on the surface on which the printed circuit board 103 is provided. This Y-axis direction probe moving means operates by driving a motor (not shown).

  The positioner 111 has probe rotating means 127 that rotates the probe 109 about the Y axis. The probe rotating means 127 operates by driving a motor (not shown).

  Similar to the first embodiment, an electrical property measuring device 133 that measures electrical properties of the second exposed metal portion 106, and the first piezoelectric elements of the first probe chip 107 and the second probe chip 108. A contact confirmation device 137 for displaying the voltage generated in the second piezoelectric element is provided.

Next, the electrical configuration will be described with reference to FIG. 5 which is a block diagram showing the electrical connection of this embodiment.
151 receives signals from the first piezoelectric element 161 and the second piezoelectric element 163, and X-axis direction probe moving means 123, Y-axis direction probe moving means 125, Z-axis direction probe moving means 121, probe rotating means. The control means for driving 127.

  165 is a difference Δ (in this embodiment, Δ) between voltages (V1, V2) generated in the first piezoelectric element 161 and the second piezoelectric element 163 pushed by the first probe chip 107 and the second probe chip 108. (Δ = V1−V2) and the relationship between the probe 109 where the difference is 0 and the rotation angle of the probe 109 at which the difference (Δ) occurs when the probe 109 rotates around the Y axis is recorded. It is a 1st table.

  Reference numeral 167 denotes a second record in which the coordinates ((x, y)) of the probe 109 on the XY plane constituted by the X axis and the Y axis when the probe 109 rotates around the Y axis are recorded. It is a table.

  Here, using FIG. 6 which is a flowchart showing the operation of the control means, the first probe tip 107 and the second probe tip 108 are the first metal exposed portion 105 and the second metal exposed portion of the printed circuit board 103. The operation at the time of being applied to 106 will be described.

  First, the Z-axis direction probe moving means 121 is driven until the voltages (V1, V2) generated in the first piezoelectric element 161 and the second piezoelectric element 163 become larger than the first set value (K1). The first probe tip 107 and the second probe tip 108 are applied to the first metal exposed portion 105 and the second metal exposed portion 106 (steps 1, 2, and 3).

  The first set value (K1) is determined when the first probe tip 107 and the second probe tip 108 of the probe device 101 are in contact with the first metal exposed portion 105 and the second metal exposed portion 106 reliably. The voltage values generated in the first piezoelectric element 161 and the second piezoelectric element 163 are set as follows.

  Here, the difference Δ (Δ = V1−V2) between the voltages (V1, V2) generated in the first piezoelectric element 161 and the second piezoelectric element 163 pushed by the first probe chip 107 and the second probe chip 108. ) Is less than or equal to the second set value (K2), the electrical characteristics are measured, and the series of operations is terminated (steps 4 and 8).

  In step 4, the difference Δ (Δ = V1−) between the voltages (V1, V2) generated in the first piezoelectric element 161 and the second piezoelectric element 163 pushed by the first probe tip 107 and the second probe tip 108. If V2) is larger than the second set value (K2), the Z-axis direction probe moving means 127 is driven in the opposite direction to the previous one, and the first probe tip 107 and the second probe tip 108 are moved to the printed circuit board 103. Separated from the first metal exposed portion 105 and the second metal exposed portion 106 (steps 4 and 5).

  Next, referring to the first table 165, the difference Δ (Δ = V1−V2) between the voltages (V1, V2) generated in the first piezoelectric element 161 and the second piezoelectric element 163 is the second set value. (K2) The probe rotating means 127 is rotated so as to be within the same range (step 6). With reference to the second table 167, the X-direction probe moving means 123 and the Y-direction probe moving means 125 are driven so as to correct the displacement amount of the probe 109 on the XY plane (step 7).

And the electrical characteristic of the 2nd metal exposure part 106 is measured, and a series of operation | movement is complete | finished (step 8).
According to the above configuration, the following effects can be obtained.
(1) Since the first probe tip 107 and the second probe tip 108 of the probe device 101 are obliquely applied to the first metal exposed portion 105 and the second metal exposed portion 106, the first probe tip 107 and the second probe tip 108 are The first exposed metal portion 105 and the second exposed metal portion 106 are easily visible.
(2) Since the first piezoelectric element 161 and the second piezoelectric element 163 as force detecting means are in contact with the first probe chip 107 and the second probe chip 108, highly accurate detection can be performed. In addition, since the force detecting means is a piezoelectric element, the structure is simple, small and light, and easy to handle.
(3) By setting the first set value (K1) to an optimum value, it can be seen that the probe tips 107 and 108 of the probe device 101 are in reliable contact with the metal exposed portions 105 and 106. Further, it is easily understood that the probe tips 106 and 108 are in contact with the exposed portions 105 and 106 evenly by setting the second set value (K2) to an optimum value.
(4) A plurality of contact points can be measured automatically and reliably.
(5) The first probe chip 107 and the second probe chip 108 are provided on one probe 109. Then, the first probe tip 107 is applied to the first metal exposed portion 105 serving as a reference, and the second probe tip 108 is applied to the metal exposed portion 106 to be measured, and the cable of the first probe tip 107, the second probe tip By pairing 108 cables, the probe itself can be prevented from becoming a large antenna, and noise can be prevented from being picked up and high-precision measurement can be performed.

  The present invention is not limited to the above embodiment. In the above embodiment, the description has been given of the case of two probe chips as the plurality of probe chips provided on the probe, but the present invention can be applied to the case of three or more.

It is a block diagram which shows the whole probe apparatus of the example of 1st Embodiment. It is sectional drawing of the probe of FIG. It is a block diagram which shows the whole probe apparatus of the example of 2nd Embodiment. It is an A direction arrow directional view of FIG. It is a block diagram which shows the electrical connection of a 2nd form example. It is a flowchart which shows the action | operation of the control means of FIG.

Explanation of symbols

3 Printed circuit board (measurement object)
5 Exposed metal part (measurement location)
7 Probe tip 13 Piezoelectric element (force detection means)

Claims (5)

A probe tip in which the base end side is supported in a cantilever shape, and the tip end side is obliquely applied to the measurement location of the object to be measured;
A force detection means for detecting a force applied to the probe tip when the tip of the probe tip is brought into contact with the probe tip and being contacted with the measurement location of the object to be measured;
A probe device comprising:   2. The probe apparatus according to claim 1, further comprising a notification unit that responds when an output value of the force detection unit becomes larger than a first set value. A probe in which a plurality of probe tips are arranged side by side in a cantilever shape in which the base end side is supported, and the tip end side is obliquely applied to a plurality of measurement points on the object to be measured;
Force detecting means provided so as to be in contact with each of the probe tips, and detecting a force applied to each of the probe tips when a tip portion of each of the probe tips is applied to each measurement location of the object to be measured;
A notification means that responds when the output value of each force detection means is greater than a first set value and the difference between the maximum value and the minimum value of the output values of each force detection means is less than or equal to a second set value; ,
A probe device comprising:   The probe apparatus according to claim 1, wherein the force detection means is a piezoelectric element pushed by the probe tip. A probe in which a plurality of probe tips are arranged side by side in a cantilever shape in which the base end side is supported, and the tip end side is obliquely applied to a plurality of measurement points on the object to be measured;
A piezoelectric element that is provided in contact with each of the probe tips, and is pressed by each of the probe tips when the tip of the probe tip is applied to a measurement location of the object to be measured;
Z-axis direction probe moving means for moving the probe in the Z-axis direction which is a direction orthogonal to the surface on which the object to be measured is provided;
X-axis direction probe moving means for moving the probe in the X direction, which is a direction orthogonal to the Z axis, on the surface on which the object to be measured is provided;
Y-axis direction probe moving means for moving the probe in the Y direction, which is a direction orthogonal to the Z axis and the X axis, on the surface on which the object to be measured is provided;
Probe rotating means for rotating the probe about the Y axis;
The difference between the maximum value and the minimum value of the voltage generated in each piezoelectric element pushed by the probe tip, and the probe rotates around the Y axis from the position of the probe where the difference is zero. A first table in which a relationship with a rotation angle of the probe at which a difference occurs is recorded;
A second table in which the coordinates of the probe on the XY plane composed of the X axis and the Y axis when the probe rotates about the Y axis are recorded;
When the probe tip is applied to a plurality of measurement locations of the measurement object,
If the voltage generated in each piezoelectric element is greater than the first set value and the difference between the maximum value and the minimum value among the voltages generated in each piezoelectric element is greater than the second set value, the probe movement in the Z-axis direction Driving the means to move the tip end side of the probe tip away from the measurement location of the object to be measured, referring to the first table, the difference between the maximum value and the minimum value of the voltage of each piezoelectric element is The probe rotating means is rotated so as to be within the second set value, and the probe displacement on the XY plane is corrected with reference to the second table so as to correct the X direction. Probe moving means, control means for driving the Y-direction probe moving means,
A probe device comprising:

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