JP2009095826A - 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 - Google Patents

塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 Download PDF

Info

Publication number
JP2009095826A
JP2009095826A JP2008245726A JP2008245726A JP2009095826A JP 2009095826 A JP2009095826 A JP 2009095826A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2009095826 A JP2009095826 A JP 2009095826A
Authority
JP
Japan
Prior art keywords
coating nozzle
value
luminance
coating
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008245726A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009095826A5 (https=
Inventor
Osamu Kuramata
理 倉又
Hirokata Sasamoto
裕方 佐々本
Hiroshi Nagai
啓史 長井
Takuya Kawagoe
拓也 川越
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2008245726A priority Critical patent/JP2009095826A/ja
Publication of JP2009095826A publication Critical patent/JP2009095826A/ja
Publication of JP2009095826A5 publication Critical patent/JP2009095826A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2008245726A 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 Withdrawn JP2009095826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007247933 2007-09-25
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Publications (2)

Publication Number Publication Date
JP2009095826A true JP2009095826A (ja) 2009-05-07
JP2009095826A5 JP2009095826A5 (https=) 2011-09-29

Family

ID=40699336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008245726A Withdrawn JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Country Status (1)

Country Link
JP (1) JP2009095826A (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009160546A (ja) * 2008-01-09 2009-07-23 Toray Ind Inc 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法
JP2016115863A (ja) * 2014-12-17 2016-06-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR20170015180A (ko) 2015-07-29 2017-02-08 가부시키가이샤 스크린 홀딩스 유하 판정 방법, 유하 판정 장치 및 토출 장치
JP2017090232A (ja) * 2015-11-10 2017-05-25 株式会社Ｓｃｒｅｅｎホールディングス 吐出判定方法および吐出装置
KR101906288B1 (ko) * 2016-12-22 2018-12-06 삼성디스플레이 주식회사 하향식 기판 에칭장치
KR20190049282A (ko) * 2017-11-01 2019-05-09 주식회사 포스코 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법
US10531550B2 (en) 2015-09-24 2020-01-07 Gigaphoton Inc. Extreme ultraviolet light generation device
US10665481B2 (en) 2014-03-11 2020-05-26 SCREEN Holdings Co., Ltd. Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009160546A (ja) * 2008-01-09 2009-07-23 Toray Ind Inc 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法
US10665481B2 (en) 2014-03-11 2020-05-26 SCREEN Holdings Co., Ltd. Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle
JP2016115863A (ja) * 2014-12-17 2016-06-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
KR101858816B1 (ko) * 2015-07-29 2018-05-16 가부시키가이샤 스크린 홀딩스 유하 판정 방법, 유하 판정 장치 및 토출 장치
US9838575B2 (en) 2015-07-29 2017-12-05 SCREEN Holdings Co., Ltd. Flow-down determination method, flow-down determination apparatus and discharge apparatus
JP2017029883A (ja) * 2015-07-29 2017-02-09 株式会社Ｓｃｒｅｅｎホールディングス 流下判定方法、流下判定装置および吐出装置
KR20170015180A (ko) 2015-07-29 2017-02-08 가부시키가이샤 스크린 홀딩스 유하 판정 방법, 유하 판정 장치 및 토출 장치
US10531550B2 (en) 2015-09-24 2020-01-07 Gigaphoton Inc. Extreme ultraviolet light generation device
JP2017090232A (ja) * 2015-11-10 2017-05-25 株式会社Ｓｃｒｅｅｎホールディングス 吐出判定方法および吐出装置
US10065208B2 (en) 2015-11-10 2018-09-04 SCREEN Holdings Co., Ltd. Discharge determination method and discharge apparatus
KR101906288B1 (ko) * 2016-12-22 2018-12-06 삼성디스플레이 주식회사 하향식 기판 에칭장치
KR20190049282A (ko) * 2017-11-01 2019-05-09 주식회사 포스코 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법
KR101998965B1 (ko) * 2017-11-01 2019-07-10 주식회사 포스코 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법

Similar Documents

Publication Publication Date Title
JP2009095826A (ja) 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法
US12179227B2 (en) Cleaning device for an application device
US8356951B2 (en) Wet-processing apparatus
CN101247957B (zh) 喷墨头及其喷出异常检测方法、以及膜成形方法
JP4315787B2 (ja) 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
JP5285916B2 (ja) 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法
TW201332788A (zh) 噴墨裝置及液滴測定方法
JPWO2007126027A1 (ja) カラーフィルタ検査方法およびカラーフィルタ製造方法並びにカラーフィルタ検査装置
DK2325394T3 (en) Method and apparatus for applying a liquid to a rope
US5436645A (en) Inspection/adjustment method and apparatus for laser beam output optical unit and laser scanning optical system
KR20180066935A (ko) 도포액 검사 기능이 구비된 디스펜서
JP2001150696A (ja) インクジェット射出検査装置
TWI394989B (zh) 塗佈針，使用此塗佈針之塗佈機構，缺陷修正裝置，塗佈方法以及液晶顯示面板用彩色過濾器之缺陷修正方法
JPH0824749A (ja) 接着剤塗布方法及び装置
JP2018063144A (ja) 油膜検査方法及び油膜検査装置
KR20010042584A (ko) 염료 침투 방법 또는 자성 방법 이후 사용되는 크랙 검출장치
CN101746130B (zh) 喷墨头的喷出异常检测装置及检测方法
CN101746131B (zh) 膜形成方法及膜形成装置
JP5109689B2 (ja) ヘッド検査洗浄装置、ヘッド検査洗浄方法
KR20090080407A (ko) 평판 디스플레이 장치의 패널 검사 장치
JP2013064831A (ja) インクジェット塗工装置
JP2021050997A (ja) 液滴量測定装置および液滴量測定方法
KR102379000B1 (ko) 액적 검사 장치 및 방법
US12447739B2 (en) Droplet analysis unit and substrate treatment apparatus including the same
JPH1044399A (ja) インクジェットヘッドの検査方法及び装置

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100316

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20100319

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20100827

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100906

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110811

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110811

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20121023