JP2009079980A - Device and method for collecting contaminant in atmosphere - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive method or a device for collecting contaminant in the atmosphere capable of collecting particles on a filter, stratifying particles regardless of a collection place and collecting liquid ionic material simultaneously. <P>SOLUTION: This sampling device for filter collecting and liquid collecting of contaminant in the atmosphere comprises: filter holders (12, 14) equipped with membrane filters (11, 13); impingers (19, 23); and a pump (26). The filter holders, impingers and pump are connected in this sequence in the device for collecting contaminant in the atmosphere. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an apparatus and method for collecting pollutants in the atmosphere, and more particularly, to a collection apparatus and method for simultaneously collecting filters and liquids for gaseous or particulate pollutants in the atmosphere. .

  Semiconductor products such as silicon wafers, ICs, LSIs, FDDs that are storage devices for computer peripheral devices, magneto-optical disk drives, HDDs, MR (magnetoresistance effect) heads, and other electronic components such as FDs and HDs that are memory media, Precision machine products, optical products, liquid crystals, and the like are generally manufactured and stored in clean rooms because of extremely small or trace amounts of contaminants that cause corrosion and malfunction.

  Of the contaminants, management of ionic substances and particles is particularly essential. In order to find pollution sources that exist in the manufacturing and storage environment and take effective pollution prevention measures, Identification and concentration measurement are essential. In addition, regarding the particles, not only the number of particles but also the shape and composition analysis of the particles are essential.

  In addition to the above product fields, new materials, fine chemicals, pharmaceuticals, packaging materials, foods, etc., the level of foreign matter, which is a problem every year, increases, and micron-order foreign matter may be regarded as a problem. Manufacture and storage in environments with clean booths, partitions, etc. are becoming commonplace.

  As the ionic substance, sodium ions, potassium ions, magnesium ions, calcium ions, ammonium ions, etc. as cations, and chloride ions, nitrite ions, nitrate ions, phosphate ions, sulfate ions, etc. as anions are ions to be measured. It has become.

  Impingers and mini-pumps are often used to collect ionic substances in the environment, and mini-pumps are inexpensive (about 50,000 to 100,000 yen) and small, so there is an advantage that the collection point is not selected. .

  The above particles are generally referred to as particles having a size of about 0.1 to 100 μm, and in order to measure the number of particles in the air, a light scattering particle counter, a condensation nucleus particle counter, a Faraday cup, aerosol, electro Although a meter or the like is used, it is known that these measuring machines can only obtain information on the number of particles per unit volume and particle size distribution, and may include uncertainty in measurement.

  In order to identify the number, shape, and type of existing particles, a microscopic observation and various analyzes are performed after trapping on an adhesive sheet, a silicon wafer, or a filter. Particle collection on the adhesive sheet is a static collection for particles of several μm or more, and because it collects falling dust, it is necessary to collect floating particles, observe them, and perform various analyses. Not suitable. In addition, collection on silicon wafers is used when manufacturing products in the electronics field and possesses a wafer inspection machine, but it is a filter for ease of handling during particle collection, observation, and analysis. The collection is excellent.

As a dust collector used for filter collection, a low volume sampler is used when the environmental level is relatively low, and a high volume sampler or a cyclone type dust collector (for example, see Patent Document 1) when the environmental level is high. In many cases, both low volume samplers and high volume samplers are priced between 400,000 and 600,000 yen.

Currently, HORIBA is selling a device called Particle Analyzer DP-1000 that performs elemental analysis of the particles collected on the filter by plasma emission analysis. Class 10 (Air Cleanliness, US Federal Standard) FED-STD-209D; when collecting in a clean room or the like where the number of fine particles of 0.5 μm or more is 10 / ft ³ or less), it is recommended to use a cyclonic dust collector PY-3000. This cyclone type dust collector PY-3000 draws air in a clean room at 1200 L / min. It is assumed that the device itself is not suitable for the collection of local air particles, and the apparatus itself is as large as 310 (W) × 475 (D) × 1040 (H) mm, and the weight is about 42 kg. Therefore, even if a 2 m hose for suction is connected, it is considered that there are restrictions on the places where air particles can be collected.

Particles vary depending on the height of the floor where they are collected, the distance from devices and people, working conditions, etc., so it is preferable to be able to collect particles locally and temporarily to identify the source. In the case of the cyclone type, it is impossible to flexibly respond to changes in the collection location, and there are multiple kitchens with cyclone dust collectors, and particles are collected simultaneously at multiple locations when the production line is operating. It is also difficult to do. Furthermore, if the inside of the apparatus is contaminated, it takes a lot of time for cleaning. Since only one filter having a diameter of 25 mm can be set, layering by particle diameter is impossible, and the price is quite expensive at about 5 million yen.
JP 2003-307470 A

  The present invention has been made in consideration of the above-mentioned problems, and it is possible to collect particles on a filter and stratify particles regardless of the collection point, and at the same time collect liquid of ionic substances. It is another object of the present invention to provide a method and apparatus for collecting pollutants in the atmosphere that can be further inexpensive.

In order to solve the above problems, first, the invention according to claim 1
A sampling device for collecting pollutants in air and collecting liquids,
It has a filter holder with a membrane filter set, an impinger, and a pump.
The air pollutant collecting apparatus, wherein the filter holder, the impinger, and the pump are connected in this order.

The invention according to claim 2
2. The air pollutant trap according to claim 1, wherein the pump has a constant flow rate function, and a suction amount per minute is 0.5 L to 5 L. 3.

The invention according to claim 3
3. The atmospheric pollutant collecting device according to claim 1, wherein two or more filter holders set with membrane filters having different pore diameters are connected.

The invention according to claim 4
The air pollutant trap according to any one of claims 1 to 3, wherein the membrane filter has a diameter of 25 mm or less.

The invention according to claim 5
A sampling method for collecting pollutants in the atmosphere and collecting liquids by liquid,
A method for collecting pollutants in air, wherein a filter holder, an impinger, and a pump in which a membrane filter is set are connected in this order.

The invention according to claim 6 provides
6. The air pollutant collecting method according to claim 5, wherein the pump has a constant flow rate function and has a suction amount of 0.5 L to 5 L per minute.

The invention according to claim 7 provides
7. The method for collecting pollutants in air according to claim 5, wherein two or more filter holders set with membrane filters having different pore diameters are connected.

The invention according to claim 8 provides
The method for collecting pollutants in air according to any one of claims 5 to 7, wherein the membrane filter has a diameter of 25 mm or less.

  The present invention can collect particles on a filter and stratify particles regardless of the location of collection, and can also collect liquid ionic substances at the same time. There is an effect that a substance collection method or a collection device can be provided.

  The best embodiment of the present invention will be described below.

  An example of the atmospheric pollutant collection apparatus of the present invention shown in FIG. 1 includes a filter holder 12 in which one membrane filter 11 is set, a filter holder 14 in which one membrane filter 13 is set, a filter holder 12, 14, a connector 15 connecting the filter 14, a plastic tube 16 connecting the filter holder 14 and the long impinger tube 17 of the impinger 19, and an impinger 19 having a long impinger tube 17 and a short impinger tube 18. , A plastic tube 20 connecting the short impinger tube 18 of the impinger 19 and the long impinger tube 21 of the impinger 23, an impinger 23 having a long impinger tube 21 and a short impinger tube 22, Jar 2 Short and impinger tube 22 and plastic tubing 24 which connects the inlet port 25 of the suction pump 26, and a suction pump 26 having an inlet 25 and outlet 27 of.

  When two or more filter holders are connected for the purpose of stratifying particles, the pore size of the suction upstream membrane filter (membrane filter 11 in FIG. 1) is larger than that of the downstream membrane filter (membrane filter 13 in FIG. 1). It must be large.

  In addition, when collecting particles in a clean environment of class 10 or lower, a cassette type HEPA filter is connected to the exhaust port 27 so that the collection environment is not contaminated by the exhaust of the suction pump 26, It is preferred to exhaust the exhaust through the filter from the clean room grating.

  As the filter holder used in the atmospheric pollutant collection device, metal such as stainless steel or plastic can be used, and in particular, a plastic holder such as polypropylene (hereinafter also referred to as PP), It is preferably used because of its low price, ease of handling, and ease of disposal when it is contaminated, for example, ADVANTEC plastic holder PP series.

  An example of the filter holder will be described based on the overall view of FIG. 2 and the exploded view of FIG. As shown in the figure, the filter holder includes, in order from the suction upstream side, a locking nut 31, a nut O-ring 32, an inlet 33 (tip air suction port), and a top cover 34 (top plate). A support screen 35, a filter press O-ring 36, a support screen 37, a base plate O-ring 38, a base plate 39, an outlet 40 (rear end air suction port), and a tube connector 41; A membrane filter is set between the top cover 34 and the support screen 35.

  As shown in the figure, it is preferable that the filter holder is not an open face type but has a top cover (or top plate). Such a filter holder is originally intended for liquid filtration. Normally, when a liquid is filtered, a tube or the like is connected to an inlet 33 provided on the top cover 34 to flow the liquid to be filtered. Is characterized in that air is sucked from an inlet (hereinafter referred to as a suction port) portion provided on the top plate to suck air particles.

  In addition, the open face type used for asbestos collection and the like has a concern that it will be contaminated by the time of actual air particle collection because the filter surface is exposed. Is not suitable.

  As the membrane filter used in the atmospheric pollutant collecting device, a polycarbonate filter having through holes suitable for microscopic observation of particles is preferably used. The diameter of the membrane filter is generally less than 13 mm, 13 mm, 25 mm, 47 mm, etc., but the filter diameter used in the present invention is preferably 25 mm or less. The reason is that the suction pump suction amount when collecting the ionic substance is 0.5 to 5 L / min. Therefore, there is a concern that the suction force is insufficient with a filter having a diameter of 47 mm. Further, the pore size of the polycarbonate filter is generally 0.1, 0.2, 0.4, 0.8, 8.0 μm, but depending on the purpose, it is 0.2 μm, 0.8 μm, 0.8 μm. It is preferable to stratify the particles in combination with a combination of 8.0 μm.

  There are many commercially available airborne particle counters that measure particle sizes of about 0.1 to 100 μm, so if you want to correlate the airborne particle counter and the particles collected on the filter, use the particle counter channel. It is preferable to match the pore sizes of the membrane filter and the flow rate of each device. In determining the pore size and suction amount of the membrane filter to be used, it is preferable to consider the pressure loss of the membrane filter.

  When organic analysis of the particles collected by the filter is the primary purpose, the polycarbonate membrane filter may be damaged by a laser or the like during Raman spectroscopic analysis. In such a case, it is difficult to observe the particles, but it is also preferable to use a filter of another material.

The suction amount of the suction pump 26 is 0.5 to 5 L / min. The degree is preferred. When the amount of suction is small, particles may not be collected on the filter, and when the amount of suction is large, the membrane filter may be damaged, so it is preferable to check in advance. A commercially available air particle counter has a minimum particle size of 0.1 μm and a suction amount of 0.3 to 30 L / min. Since there are many things, it is also preferable to match the suction amount of the air particle counter and the suction amount of the filter collection as described above.

  As the suction pump 26, a suction pump having a diaphragm type constant flow rate function called a mini pump is preferable. Since such a suction pump does not use oil or water, the collection location is not limited, and the possibility of contaminating the collection location is low even when collected in a clean room. Further, since the weight of the mini pump is 1 kg or less and the filter holder and the like are lightweight, the collection device of the present invention has the advantage that it is easy to carry and install.

  As the tube, a plastic tube having a suitable diameter without leak is used, and a Tygon tube, a silicon tube, a Teflon (registered trademark) tube, a PP tube, or the like is used. In particular, when collecting in a clean room having a high degree of cleanliness, it is preferable to use a Teflon (registered trademark) tube with less elution of particles and ionic substances.

  As the impinger, quartz glass, silicate glass, plastic, or the like can be used, but perfluoroalkoxyalkanes (four fluorocarbons) are particularly preferably used because of the low elution of ionic substances. It is an impinger having a capacity of about 100 ml made of a fluorinated ethylene perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA).

  In general, the impinger method for atmospheric collection is a method in which pure water is put into the impinger, the atmosphere is sucked for a certain period of time using a suction pump, and impurities in the atmosphere are collected in pure water by bubbling water. is there.

  Also in the present invention, water is put into the impinger to collect the ionic substance, and at this time, it is preferable to use pure water or higher. In particular, when collecting in a clean room with high cleanliness, it is preferable to use ultrapure water in order to avoid elution ions from the container, and the specific resistance of ultrapure water is 18.0 MΩ · cm or more, The concentration is preferably 1 ppb or less and the number of particles having a particle size of 0.3 μm or more is preferably 2 particles / ml or less. More preferably, it is ultrapure water having a specific resistance of 18.2 MΩ or more and a number of particles of 0.05 μm of 1 / ml or less.

  Moreover, as shown in FIG. 1, it is also preferable to connect two or more impingers to increase the collection efficiency.

  The procedure from the cleaning and assembly of the air pollutant collecting device to the collection of air pollutants, the collected membrane filter, and the collected water in the impinger is described in detail below.

  First, when the air pollutant collection device of the present invention is used in a clean room, in order to distinguish particles adhering to the air pollutant collection device from particles collected from the environment, the membrane It is preferable to clean the filter, filter holder, tube and impinger and wipe the suction pump. In particular, the fibers of the interleaf paper may adhere to the membrane filter, and cleaning is necessary so as not to mistakenly identify the particles collected during particle observation and analysis.

In that case, a specific resistance of 18.2 MΩ or more and 0.05 μm in a clean room of class 1000 (air cleanliness, US federal standard FED-STD-209D; fine particles of 0.5 μm or more 1000 particles / ft ³ or less) It is preferable to wash the membrane filter, filter holder, and tube using ultrapure water having a particle number of 1 / ml or less.

  First, the membrane filter should be washed three times or more in a glass container containing ultrapure water, or replaced with ultrapure water washed glass filter or the like. Wash with ultrapure water 3 times or more. Place the cleaned membrane filter in a petri dish or the like that has been cleaned with ultrapure water and let it dry naturally in a clean room to prevent falling dust.

  The filter holder is dismantled and each part is washed with ultrapure water and then naturally dried to prevent falling dust in a clean room or dried with an air gun that can supply clean air.

  Set the dried membrane filter in the disassembled dry filter holder, paying attention to the assembly direction, assemble the filter holder by combining each assembly part in order, and then place the filter holder in a clean bag with few particles. Put in and seal. The clean air suction port (inlet 33) and the exhaust tube are washed with running ultrapure water for 5 minutes or more and dried naturally in a clean room to prevent falling dust, or dried with an air gun that can supply clean air. These are also sealed in a clean bag with few particles.

  The impinger puts ultrapure water into the container, shakes it 100 times or more with the lid closed, throws away the ultrapure water therein, and then fills the ultrapure water until it is completely covered with the lid.

  The suction pump is immersed in the above-mentioned ultrapure water and wiped with a clean cloth for clean room, and then sealed in a clean bag with few particles.

  The above washing procedure is a guide only, and before performing actual collection, when observing the membrane filter after a series of washing procedures, confirm that there is no contamination and the ion concentration in ultrapure water Is preferably performed.

  Second, the device is assembled at the air pollutant collection point. When collecting in a clean room, it is preferable to assemble each apparatus by bringing each part using a pass box or the like and opening each clean bag at the collection point.

  First, a suction port tube (suction port 25 tube 24 in FIG. 1) is attached to a suction pump (suction pump 26 in FIG. 1). When collecting in a very clean environment such as class 10 or lower, it is preferable to attach a cassette type filter to the exhaust port 27 of the suction pump 26 and exhaust through the grating.

  Next, the amount of ultrapure water in the impinger is fixed, and the upper lid is changed to a lid containing two different length tubes. If two or more impingers (impinger 19 or 23 in FIG. 1) containing sampling tubes are connected, the impingers are connected by a tube (tube 20 in FIG. 1) and then collected at the final stage. The impinger (impinger 23 in FIG. 1) is connected to a suction tube (suction port 25 tube 24 in FIG. 1).

  Further, when two or more filter holders (filter holders 12 and 14 in FIG. 1) are connected, they are connected by a connecting jig (connector 15 in FIG. 1), and a membrane filter having a small hole diameter (membrane filter 13 in FIG. 1). Is connected to the first-stage impinger (impinger 19 in FIG. 1) by a tube (tube 16 in FIG. 1). Between the filter holders, not only a connecting jig but also a tube may be sandwiched.

  Third, the location for collecting the pollutant is determined, and the suction port (inlet 33) in the center of the top cover 34 of the filter holder (the filter holder 12 in FIG. 1) at the tip of the suction upstream side collects the pollutant. Fix the filter holder, impinger, and tube to the construction material or support frame of the collection site with tape as necessary so that it can be directed in the desired direction. When collecting in a clean room, it is preferable to use a clean tape.

  Next, turn on the suction pump. Check if the suction volume is as set. If the particle counter measurement is performed at the same time, it is performed.

  Since the particles vary depending on the height from the floor where the particles are collected, the distance from the apparatus and the person, the working condition, and the like, it is preferable to locally and temporarily collect the particles in order to specify the generation source.

  The atmospheric pollutant collection device and the collection method using the collection device of the present invention can be collected anywhere as long as a suction pump can be installed. For example, it can be easily collected at different heights, and evaluation of clean booths, clean units, clean benches, etc., which have different atmospheric pollutant environments inside and outside, is easy. If it is assumed that the types of dust and ionic substances are different for each unit of the machine, prepare multiple collection devices for each unit and collect them simultaneously. Air pollutants can be collected for a short time or a long time only during the period. As a condition for collecting the ionic substance, a total of about 120 L will be generally used at 2 L per minute for 60 minutes.

  Next, there is also a suction pump that automatically turns off the power of the suction pump when the set collection time has elapsed, or inputs an integrated suction amount or the like, and automatically turns off the power when it is satisfied. Keep the collected membrane filter in a clean bag without taking it out of the filter holder and keep it sealed until observation and analysis. Replace the impinger with a lid that can seal the top lid and keep it sealed until measurement.

  For reference, two PP filter holders and two PFA impingers and 5 L / min. The total amount of the mini pump that can be sucked up is about 150,000 yen. In addition to this, in the case of collection in the suction port tube, membrane filter, clean room, the exhaust port tube, cassette type filter etc. are necessary, In total, it is very inexpensive.

  The membrane filter that collects airborne particles using the collection device of the present invention is preferably subjected to shape observation and particle number counting by a scanning electron microscope (SEM). Elemental analysis by energy dispersive X-ray analysis (EDX), Auger electron spectroscopy (AES), electron microanalyzer (EPMA), fluorescent X-ray analysis, charged particle cooler X-ray detection method, often attached to SEM, Rutherford backscatter analysis is also preferably performed. In organic analysis, analysis by Fourier transform infrared spectroscopy (FT-IR) or Raman spectroscopy is also preferably performed.

  The water which collected the ionic substance using the collection device of the present invention is subjected to ion concentration measurement by an ion chromatograph (IC). In addition to IC, various analyzes such as liquid chromatograph (LC), capillary electrophoresis, atomic absorption spectrophotometry (AAS) and coupled induction plasma-mass spectrometer (ICP-MS) can be performed.

  Examples of the present invention are shown below, but the technical scope of the present invention is not limited to these Examples.

<Example 1>
In a factory that manufactures and processes food packaging films, the general environment outside the clean unit partitioned by a curtain (height 45 cm from the floor) (collection point 1) and the T installed in the clean unit with the HEPA filter installed A polycarbonate membrane filter with a diameter of 25 mm and a pore diameter of 8 μm is attached to the filter holder on the upstream side of the filter holder on the downstream side (at a height of 45 cm from the floor) (collection point 2). Set a polycarbonate membrane filter with a diameter of 25 mm and a pore diameter of 0.8 μm, connected with a connector, a 100 ml capacity PFA impinger filled with 50 ml of ultrapure water, and a mini pump each with a silicon tube The collection device connected by the was installed. The suction port (inlet 33) of the top cover 34 has a diameter of 4.5 mm. The parts constituting the device were not cleaned in advance. Air pollutants are 2L / min. For 1 hour.

From the start to the end of collection, the average value measured once per hour with a light scattering type airborne particle counter is 40000 pieces / ft ³ at 0.5 μm at collection point 1 and 0.5 μm at collection point 2 Was 220,000 pieces / ft ³ , and the extrusion machine was in operation during the collection.

  SEM observation of the collected membrane filter revealed that there was no damage to the filter hole even with a filter with a pore size of 0.8 μm, and particles that were observed with each of the membrane filters with a pore size of 8 μm and 0.8 μm at the collection point 1 outside the clean unit. There were many, and the tendency that there were few particles was confirmed in the collection location 2 in a clean unit. Table 1 shows the results of calculating the number of particles of 10 μm or more in the environment from the results of observing five 8 μm pore size membrane filters at SEM observation magnification of 500 times.

表１の結果より、パーティクルカウンターでの測定結果でもパーティクル数が多い捕集箇所１は捕集箇所２に比較し、ＳＥＭ観察でも多くのパーティクルが観察され、その差異は明らかだった。

From the results shown in Table 1, in the measurement result with the particle counter, the collection point 1 having a large number of particles was compared with the collection point 2 and more particles were observed in the SEM observation, and the difference was clear.

  Of the particles collected on the filter by the EDX attached to the SEM, the element is about 3 particles each of 10 μm or more on the 8 μm pore size membrane filter and 1 μm or more on the 0.8 μ membrane pore size filter. Table 2 shows the results of the analysis.

表２の結果より、パーティクルの種類は、捕集箇所１では酸化鉄、Ｎａ、Ａｌ、Ｓｉ等他の元素を多数含む無機物あるいは無機物と有機物が複合したパーティクルが多いが、捕集箇所２ではほとんどが有機物で、形状から樹脂と推定され、その種類が異なることがわかった。

From the results of Table 2, the type of particles is mostly at the collection point 1, but there are many particles containing a large number of other elements such as iron oxide, Na, Al, Si, etc., or a combination of inorganic and organic substances. Was an organic substance, and it was estimated that it was a resin from its shape.

  Table 3 shows the results of ion chromatograph measurements on the collected water in the impinger.

表３の結果より、捕集箇所１と２とではケミカルフィルター等の対策を施していないため、捕集箇所１と２との両方でＮＨ₄イオンやＳＯ₄イオンの濃度が高く、イオン濃度にはほとんど違いがないことがわかった。
＜実施例２＞
クラス１００のダウンフロー式クリーンルーム内のカラーフィルター製造ライン内にお
いて、捕集箇所１（床からの高さ４５ｃｍ）、捕集箇所２（床からの高さ１３５ｃｍ）の２箇所で図１に示す大気中汚染物質捕集装置を設置した。なお、捕集箇所２の近傍にはスポット用ＮＨ₄用ケミカルフィルターが設置されている。

From the results in Table 3, since no countermeasures such as chemical filters are applied at collection points 1 and 2, the concentration of NH ₄ ions and SO ₄ ions at both collection points 1 and 2 is high, and the ion concentration is Found almost no difference.
<Example 2>
In the color filter production line in a class 100 down-flow clean room, the atmosphere shown in FIG. 1 at two locations, a collection location 1 (height 45 cm from the floor) and a collection location 2 (height 135 cm from the floor). A medium pollutant trap was installed. A spot NH ₄ chemical filter is installed in the vicinity of the collection point 2.

  Each component constituting the atmospheric pollutant device was cleaned in advance in a class 100 clean room, placed in a clean bag, and impulse-sealed, and opened immediately before collection to assemble the device.

  A polycarbonate membrane filter 11 having a diameter of 25 mm and a hole diameter of 0.8 μm is set in the filter holder 12 on the upstream side of suction, and a polycarbonate membrane filter 13 having a diameter of 25 mm and a hole diameter of 0.2 μm is set in the downstream filter holder 14. 15, a 100 ml PFA impinger 19 with 50 ml of ultrapure water, a 100 ml PFA impinger 23 with 50 ml of ultrapure water, and a suction pump 26. The silicon tube 16, silicon tube 20, and silicon tube 24 were connected to each other. The suction port (inlet 33) of the top cover 34 has a diameter of 4.5 mm. Air pollutants are 2L / min. For 1 hour.

From the start to the end of the collection, when measured once per hour with a light scattering type airborne particle counter, on average, the collection point 1 is 3000 μm / ft ³ , and the collection point 2 is 0.3 μm. Was 90 pieces / ft ³ . During the collection, the device repeatedly started and stopped.

  The number of particles collected on the filter was small at the collection points 1 and 2 and the numbers were not compared, but the filter hole was not damaged even with the filter having a pore diameter of 0.2 μm. Table 4 shows the results of elemental analysis of three particles each having a size of 1 μm or more collected on a filter having a pore diameter of 0.8 μm by EDX provided in the SEM.

表４の結果より、パーティクルの種類は、捕集箇所１ではＭｇ，Ｆｅ等からなる無機系が多く、捕集箇所２では有機物で、その形状から樹脂と推定され、捕集箇所により、パーティクルの形状、組成が異なることが確認できた。

From the results shown in Table 4, the types of particles are mostly inorganic based on Mg, Fe, etc. at the collection point 1, organic matter at the collection point 2, and presumed to be resin from its shape. It was confirmed that the shape and composition were different.

  Table 5 shows the results of ion chromatograph measurements on the collected water in the impinger.

表５の結果より、近傍にＮＨ₄用ケミカルフィルターが設置されている捕集箇所２では、ＮＨ₄用ケミカルフィルターが設置されていない捕集箇所１よりかなりＮＨ₄濃度が低いことがわかった。

From the results shown in Table 5, it was found that the NH ₄ concentration was considerably lower in the collection site 2 where the NH ₄ chemical filter was installed in the vicinity than in the collection site 1 where the NH ₄ chemical filter was not installed.

The figure which shows an example of the atmospheric pollutant collection apparatus. The figure which shows an example of a filter holder. The exploded view of an example of a filter holder.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Membrane filter 12 ... Filter holder 13 ... Membrane filter 14 ... Filter holder 15 ... Connector 16 ... Tube 17 ... Impinger tube (long)
18 ... Impinger tube (short)
19 ... Impinger 20 ... Tube 21 ... Impinger tube (long)
22 ... Impinger tube (short)
23 ... Impinger 24 ... Tube 25 ... Suction port 26 ... Suction pump 27 ... Exhaust port 31 ... Rocking nut 32 ... O-ring 33 for nut ... Inlet (suction port)
34 ... Top cover (top plate)
35 ... Support screen 36 ... Filter holder O-ring 37 ... Support screen 38 ... Base plate O-ring 39 ... Base plate 40 ... Outlet 41 ... Tube connector

Claims (8)

A sampling device for collecting pollutants in air and collecting liquids,
It has a filter holder with a membrane filter set, an impinger, and a pump.
The filter holder, the impinger, and the pump are connected in this order.   2. The atmospheric pollutant collecting apparatus according to claim 1, wherein the pump has a constant flow rate function and has a suction amount of 0.5 L to 5 L per minute.   3. The atmospheric pollutant collecting apparatus according to claim 1, wherein two or more filter holders set with membrane filters having different pore diameters are connected.   The air pollutant collecting device according to any one of claims 1 to 3, wherein the membrane filter has a diameter of 25 mm or less. A sampling method for collecting pollutants in the atmosphere and collecting liquids by liquid,
A method for collecting pollutants in the atmosphere, comprising connecting a filter holder in which a membrane filter is set, an impinger, and a pump in this order.   6. The method for collecting pollutants in the atmosphere according to claim 5, wherein the pump has a constant flow rate function, and a suction amount per minute is 0.5L to 5L.   The method for collecting atmospheric pollutants according to claim 5 or 6, wherein two or more filter holders set with membrane filters having different pore diameters are connected.   The method for collecting atmospheric pollutants according to any one of claims 5 to 7, wherein the membrane filter has a diameter of 25 mm or less.

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