JP2009070707A5 - - Google Patents

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Publication number
JP2009070707A5
JP2009070707A5 JP2007238454A JP2007238454A JP2009070707A5 JP 2009070707 A5 JP2009070707 A5 JP 2009070707A5 JP 2007238454 A JP2007238454 A JP 2007238454A JP 2007238454 A JP2007238454 A JP 2007238454A JP 2009070707 A5 JP2009070707 A5 JP 2009070707A5
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JP
Japan
Prior art keywords
gas
gas blowing
main body
electrode needle
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007238454A
Other languages
English (en)
Japanese (ja)
Other versions
JP4919908B2 (ja
JP2009070707A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007238454A priority Critical patent/JP4919908B2/ja
Priority claimed from JP2007238454A external-priority patent/JP4919908B2/ja
Publication of JP2009070707A publication Critical patent/JP2009070707A/ja
Publication of JP2009070707A5 publication Critical patent/JP2009070707A5/ja
Application granted granted Critical
Publication of JP4919908B2 publication Critical patent/JP4919908B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007238454A 2007-09-13 2007-09-13 除電装置 Expired - Fee Related JP4919908B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007238454A JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007238454A JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Publications (3)

Publication Number Publication Date
JP2009070707A JP2009070707A (ja) 2009-04-02
JP2009070707A5 true JP2009070707A5 (https=) 2010-05-06
JP4919908B2 JP4919908B2 (ja) 2012-04-18

Family

ID=40606741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007238454A Expired - Fee Related JP4919908B2 (ja) 2007-09-13 2007-09-13 除電装置

Country Status (1)

Country Link
JP (1) JP4919908B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101221939B1 (ko) * 2011-06-13 2013-01-15 한국기계연구원 고효율 광조사식 제전 시스템
KR101178783B1 (ko) * 2011-06-13 2012-09-07 한국기계연구원 연 엑스선을 이용한 광조사식 제전기
KR102164671B1 (ko) 2014-08-20 2020-10-12 삼성전자주식회사 이온 발생기 및 이를 갖는 기판 이송 시스템
JP6960582B2 (ja) * 2017-10-19 2021-11-05 Smc株式会社 イオナイザ
KR102461342B1 (ko) * 2020-06-25 2022-11-01 (주)선재하이테크 이오나이저용 이온화 기류 이송 장치
KR102697464B1 (ko) * 2021-11-30 2024-08-21 (주)선재하이테크 에어 부스트 부재의 구조 및 바 타입의 정전기제거장치
JP2025165231A (ja) * 2024-04-22 2025-11-04 Smc株式会社 イオナイザ用取付具、それを有するイオナイザ、及びそれを用いた取付構造

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035686A (ja) * 1999-07-15 2001-02-09 Kasuga Electric Works Ltd 直流除電器
JP4634186B2 (ja) * 2005-02-24 2011-02-16 株式会社テクノ菱和 シースエア式イオナイザー
JP4704192B2 (ja) * 2005-11-09 2011-06-15 株式会社キーエンス イオン化装置の電極針ユニットおよびイオン化装置

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