JP2009069374A - Inner surface inspection device - Google Patents

Inner surface inspection device Download PDF

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JP2009069374A
JP2009069374A JP2007236535A JP2007236535A JP2009069374A JP 2009069374 A JP2009069374 A JP 2009069374A JP 2007236535 A JP2007236535 A JP 2007236535A JP 2007236535 A JP2007236535 A JP 2007236535A JP 2009069374 A JP2009069374 A JP 2009069374A
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cylindrical body
hole
illumination
light
reflected
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JP5043571B2 (en
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Kazunori Noso
千典 農宗
Yukio Yoshikawa
幸男 吉川
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Nidec Powertrain Systems Corp
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Nidec Tosok Corp
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  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inner surface inspection device capable of inspecting a hole, regardless of being a small-diameter hole or a deep hole. <P>SOLUTION: A flat part 21 is formed by polishing the base end of a columnar body 11 to a flat-shape, and a conical part 22 is formed by conically hollowing out the leading end of the body 11 and polishing. An illumination 12 is formed to a circular ring-shape, and illumination light 41 is emitted toward the flat part 21 of the columnar body 11. The illumination light 41 is inputted from the flat part 21 into the columnar body 11, then, guided toward the leading end while reflecting the light by the circumferential surface 51. The light is reflected by the slope 23 of the conical part 22 and outputted outside the columnar body 11 so as to illuminate the inner surface 4 of the hole 3 as an inspection object. The inner surface 4 illuminated with the illumination light 41 is reflected on the slope 23 of the conical part 22, then, the image is picked up by a CCD camera 13 through the flat part 21 of the columnar body 11 and the center aperture 31 of the illumination 12. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、孔の内面の状態を検査する内面検査装置に関する。   The present invention relates to an inner surface inspection apparatus that inspects the state of an inner surface of a hole.

従来、孔の内面を検査する際には、内面検査装置が用いられていた(例えば、特許文献1)。   Conventionally, when inspecting the inner surface of a hole, an inner surface inspection device has been used (for example, Patent Document 1).

この内面検査装置は、検査対象孔に挿入される内視鏡を備えており、該内視鏡は、円筒状のスコープ本体と、スコープ本体に設けられたライトガイドと、スコープ本体先端にガラスパイプを介して固定された円錐状のコーンミラーとによって構成されている。   This inner surface inspection apparatus includes an endoscope that is inserted into a hole to be inspected. The endoscope includes a cylindrical scope body, a light guide provided in the scope body, and a glass pipe at the distal end of the scope body. And a cone-shaped cone mirror fixed through the.

これにより、この内視鏡のコーンミラーに投影された映像をCCDカメラで撮像することで、検査を行えるように構成されている。
特開平9−089788号公報
As a result, the image projected on the cone mirror of the endoscope is picked up by the CCD camera so that the inspection can be performed.
JP-A-9-089788

しかしながら、このような従来の内面検査装置にあっては、コーンミラーを支持する為の円筒状のガラスパイプを前記コーンミラーを外周部に設ける必要があった。   However, in such a conventional inner surface inspection apparatus, it has been necessary to provide a cylindrical glass pipe for supporting the cone mirror on the outer peripheral portion thereof.

また、照明を照射する為に、前記ガラスパイプのさらに外側にライトガイドが必要であり、外形寸法が大径化されてしまう。   Moreover, in order to irradiate illumination, a light guide is required further outside the glass pipe, and the outer dimensions are increased.

このため、直径の小さな孔の検査には、不向きであった。   For this reason, it was unsuitable for the inspection of a hole having a small diameter.

また、小径化に対応する為に、前記コーンミラーを小径化する方法が考えられるが、この場合、コーンミラーに投影された映像をレンズで拡大する必要がある。しかし、レンズを前記コーンミラーに近付けると、深い孔を検査することができなくなってしまう。   In order to cope with a reduction in diameter, a method of reducing the diameter of the cone mirror can be considered. In this case, it is necessary to enlarge an image projected on the cone mirror with a lens. However, if the lens is brought close to the cone mirror, a deep hole cannot be inspected.

本発明は、このような従来の課題に鑑みてなされたものであり、小さな直径の孔であっても深い孔であっても検査が可能な内面検査装置を提供することを目的とするものである。   The present invention has been made in view of such a conventional problem, and an object of the present invention is to provide an inner surface inspection apparatus capable of inspecting a hole having a small diameter or a deep hole. is there.

前記課題を解決するために本発明の内面検査装置にあっては、孔の内面の状態を検査する内面検査装置において、前記孔へ先端部より挿入される透明な円柱状であって基端が平面状に研磨されてなる平面部及び先端が円錐状に刳り貫かれて研磨された円錐部が設けられた円柱体と、前記平面部から前記円柱体内部へ光を入力し当該円柱体で導かれた光を前記円錐部で反射して前記内面を照明する照明照射手段と、前記円錐部に映った前記内面の状態を前記平面部を介して撮像する撮像手段と、を備えている。   In order to solve the above problems, in the inner surface inspection apparatus of the present invention, in the inner surface inspection apparatus for inspecting the state of the inner surface of the hole, the base end is a transparent columnar shape inserted into the hole from the distal end portion. A cylindrical body provided with a flat portion polished in a flat shape and a conical portion whose tip is pierced into a conical shape and polished, and light is input from the flat portion into the cylindrical body and guided by the cylindrical body. Illumination irradiating means for illuminating the inner surface by reflecting the reflected light at the conical portion, and imaging means for imaging the state of the inner surface reflected by the conical portion through the flat portion.

すなわち、照明照射手段からの照明光は、円柱体基端の平面部から当該円柱体内部へ入力され、該円柱体の側面に全反射しながら当該円柱部内部を進む。そして、該円柱体先端の円錐部で反射して、検査対象孔の内面に照射される。   That is, the illumination light from the illumination irradiating means is input into the cylindrical body from the flat portion at the base end of the cylindrical body, and travels through the cylindrical portion while being totally reflected on the side surface of the cylindrical body. And it reflects with the cone part of this cylindrical body front-end | tip, and is irradiated to the inner surface of a test object hole.

前記照明光が照射された前記内面からの反射光は、前記円錐部で反射して当該円柱体の基端側へ進み、基端が構成する平面部を直進して撮像手段に入力される。   The reflected light from the inner surface irradiated with the illumination light is reflected by the conical portion and proceeds to the proximal end side of the cylindrical body, and travels straight through the plane portion formed by the proximal end and is input to the imaging means.

これにより、前記照明光で照らされた前記内面は、その状態が撮像手段で撮像され、欠損の有無等が検査される。   Thereby, the state of the inner surface illuminated by the illumination light is imaged by the imaging means, and the presence or absence of a defect or the like is inspected.

このとき、前記内面を映す前記円錐部は、中実の円柱体の先端面が刳り貫かれ研磨されることによって、当該円柱体に一体形成されている。このため、孔内に挿入される円柱体の直径と同径の円錐部が形成される。   At this time, the conical portion that reflects the inner surface is integrally formed with the cylindrical body by grinding and grinding the tip end surface of the solid cylindrical body. For this reason, the conical part of the same diameter as the diameter of the cylindrical body inserted in the hole is formed.

また、前記照明光は、前記内面に対してほぼ直角に照射される。このため、正反射に近い光を画像化することができる。   Further, the illumination light is irradiated at a substantially right angle with respect to the inner surface. For this reason, light close to regular reflection can be imaged.

さらに、前記円錐部に映った像は、中実の円柱体で導かれて撮像手段に達するため、当該円柱体の屈折率により浮き上がって見える。このため、撮像手段のレンズを遠い位置設置でき、深い孔の検査が可能となる。   Furthermore, the image reflected on the conical portion is guided by a solid cylindrical body and reaches the imaging means, so that it appears to float due to the refractive index of the cylindrical body. For this reason, the lens of the imaging means can be installed at a distant position, and a deep hole can be inspected.

以上説明したように本発明の内面検査装置にあっては、中実の円柱体の先端面を刳り貫き研磨して検査対象孔の内面を映す円錐部を形成したので、検査対象孔に挿入される円柱体の直径と同径の円錐部を当該円柱体に一体形成することができる。   As described above, in the inner surface inspection apparatus of the present invention, the tip of the solid cylindrical body is pierced and polished to form a conical portion that reflects the inner surface of the inspection target hole, so that it is inserted into the inspection target hole. A conical portion having the same diameter as that of the cylindrical body can be formed integrally with the cylindrical body.

このため、円錐状のコーンミラーの外周部に円筒状のガラスパイプを設けてコーンミラーを支持しなければならなかった従来と比較して、小径化を図ることができる。   For this reason, the diameter can be reduced as compared with the conventional case in which a cylindrical glass pipe is provided on the outer periphery of the conical cone mirror to support the cone mirror.

また、照明光を中実の円柱体で導いて検査対象孔の内面に当てることができるため、前記コーンミラーを支持した前記ガラスパイプの外側にライトガイドを設けて照明を照射する従来と比較して、照明の為の大径化も防止することができる。   In addition, the illumination light can be guided by a solid cylindrical body and applied to the inner surface of the hole to be inspected, so compared with the conventional case where a light guide is provided outside the glass pipe supporting the cone mirror to illuminate the illumination. Therefore, it is possible to prevent an increase in diameter for illumination.

これにより、前記内面を映す前記円錐部を小径化すること無く、円柱体の小径化を実現できるため、直径の小さな孔であっても検査が可能となる。   Accordingly, since the diameter of the cylindrical body can be reduced without reducing the diameter of the conical portion that reflects the inner surface, even a hole having a small diameter can be inspected.

このとき、前記照明光は、前記内面に対してほぼ直角に照射される。このため、正反射に近い光を画像化することができるので、前記内面に形成された巣や欠け等の欠損の検査に適する。   At this time, the illumination light is irradiated at a substantially right angle to the inner surface. For this reason, since light close to regular reflection can be imaged, it is suitable for inspection of defects such as nests and chips formed on the inner surface.

そして、前記円錐部に映った像は、中実の円柱体で導かれて撮像手段に達する構造上、当該円柱体の屈折率により浮き上がって見え、当該像とカメラのレンズとの見かけ上の距離を近づけることができる。   Then, the image reflected on the cone portion is guided by a solid cylinder and reaches the imaging means, and appears to be lifted by the refractive index of the cylinder, and the apparent distance between the image and the lens of the camera. Can be brought closer.

これにより、コーンミラーに映った像を中空体を通して撮像する場合と比較して、カメラレンズの焦点距離が同じであっても、前記円錐部を離れた位置に設定することができ、より深い孔の検査が可能となる。   As a result, compared with the case where the image reflected on the cone mirror is taken through the hollow body, the cone portion can be set at a position away from the deeper hole even if the focal length of the camera lens is the same. Can be inspected.

したがって、直径が小さく、深い孔であっても検査が可能となる。   Therefore, it is possible to inspect even a small hole having a small diameter.

以下、本発明の一実施の形態を図に従って説明する。図1は、本実施の形態にかかる内面検査装置1を示す図であり、該内面検査装置1は、筒体等も含む被検査ワーク2に設けられた検査対象孔3の内面4の状態を検査する装置である。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a view showing an inner surface inspection apparatus 1 according to the present embodiment. The inner surface inspection apparatus 1 shows a state of an inner surface 4 of an inspection object hole 3 provided in a workpiece 2 to be inspected including a cylindrical body and the like. It is a device to inspect.

この内面検査装置1は、前記検査対象孔3に挿入される円柱体11と、該円柱体11の基端側に配置された照明照射手段としての照明12と、前記円柱体11の基端側に配置された撮像手段としてのCCDカメラ13とを備えている。   The inner surface inspection apparatus 1 includes a cylindrical body 11 inserted into the inspection object hole 3, an illumination 12 as an illumination irradiation unit disposed on the proximal end side of the cylindrical body 11, and a proximal end side of the cylindrical body 11. And a CCD camera 13 as an image pickup means.

前記円柱体11は、透明なガラスやアクリルによって中実の円柱状に形成されており、当該円柱体11は、その先端部より前記検査対象孔3に挿入されるように構成されている。   The columnar body 11 is formed in a solid columnar shape with transparent glass or acrylic, and the columnar body 11 is configured to be inserted into the inspection object hole 3 from its tip.

この円柱体11の基端面は、平面状に研磨されており、当該円柱体11の基端には、平坦な平面部21が形成されている。また、前記円柱体11の先端面は、円錐状に刳り貫かれた後、研磨されており、当該円柱体11の先端部には、内側へ円錐状に後退した円錐部22が設けられている。   The base end surface of the cylindrical body 11 is polished in a flat shape, and a flat plane portion 21 is formed at the base end of the cylindrical body 11. Further, the front end surface of the cylindrical body 11 is polished after being pierced in a conical shape, and a conical portion 22 that is receded in a conical shape is provided at the front end of the cylindrical body 11. .

この円錐部22の斜面23は、研磨後にコーティングしても良く、ミラーコーティングすることが望ましい。そして、この斜面23は、当該円柱体11の中心軸24に対して約45度傾斜するように設定されている。   The inclined surface 23 of the conical portion 22 may be coated after polishing, and is preferably mirror-coated. The slope 23 is set so as to incline about 45 degrees with respect to the central axis 24 of the cylindrical body 11.

前記照明12は、円形リング状に形成されており、中央部には、中央開口部31が設けられている。この照明12は、前記円柱体11の基端よりやや上方へ離れた位置に配置されており、その中心が前記円柱体11の中心軸24上に配置されるように設定されている。これにより、前記照明12の前記中央開口部31の真下に、前記円柱体11が配置されるように構成されている。   The illumination 12 is formed in a circular ring shape, and a central opening 31 is provided at the center. The illumination 12 is disposed at a position slightly away from the base end of the cylindrical body 11, and the center thereof is set on the central axis 24 of the cylindrical body 11. Accordingly, the cylindrical body 11 is configured to be disposed directly below the central opening 31 of the illumination 12.

この照明12からは、前記円柱体11基端の前記平面部21の外周部斜め上方から該平面部21へ向けて照明光41を照射するように構成されており、該照明光41を前記平面部21から前記円柱体11内部へ入力するように構成されている。   From this illumination 12, it is comprised so that illumination light 41 may be irradiated toward this plane part 21 from the outer peripheral part slanting upper part of the said plane part 21 of the said cylindrical body 11 toward the said plane part 21, and this illumination light 41 is said plane | planar It is comprised so that it may input into the said cylindrical body 11 from the part 21. FIG.

この照明光41は、前記平面部21で屈折し前記円柱体11の周面51を反射しながら当該円柱体11に沿って先端側へ導かれるように構成されており、該円柱体11の先端部では、前記円錐部22の前記斜面23で反射して当該円柱体11の外側へ出力されるように構成されている。   The illumination light 41 is configured to be guided to the distal end side along the cylindrical body 11 while being refracted by the planar portion 21 and reflecting the peripheral surface 51 of the cylindrical body 11. The portion is configured to be reflected by the inclined surface 23 of the conical portion 22 and output to the outside of the cylindrical body 11.

これにより、前記照明12からの前記照明光41によって前記検査対象孔3の内面4を照明できるように構成されており、この照明光41で照らされた前記内面4の部位が前記円錐部22の斜面23に映るように構成されている。   Thereby, it is comprised so that the inner surface 4 of the said to-be-inspected hole 3 can be illuminated with the said illumination light 41 from the said illumination 12, The site | part of the said inner surface 4 illuminated with this illumination light 41 is the said cone part 22. It is configured to be reflected on the slope 23.

前記CCDカメラ13は、前記照明12の上部に配設されており、当該CCDカメラ13のレンズ61が前記照明12の前記中央開口部31の真上に配置されている。   The CCD camera 13 is disposed above the illumination 12, and the lens 61 of the CCD camera 13 is disposed directly above the central opening 31 of the illumination 12.

これにより、当該CCDカメラ13は、そのレンズ61が前記照明12の前記中央開口部31を介して前記円柱体11の前記平面部21に対向するように構成されており、前記円柱体11の円錐部22に映った前記内面4の状態を、前記平面部21及び前記照明12の中央開口部31を介して前記CCDカメラ13で撮像できるように構成されている。   Accordingly, the CCD camera 13 is configured such that the lens 61 faces the flat surface portion 21 of the cylindrical body 11 through the central opening 31 of the illumination 12. The state of the inner surface 4 reflected on the part 22 can be imaged by the CCD camera 13 through the flat part 21 and the central opening 31 of the illumination 12.

そして、このCCDカメラ13は、図外のパソコン等で構成された制御装置に接続されており、取得した内面画像を解析することで、前記内面4の状態を検査できるように構成されている。   The CCD camera 13 is connected to a control device composed of a personal computer (not shown) and is configured to inspect the state of the inner surface 4 by analyzing the acquired inner surface image.

以上の構成において、被検査ワーク2の検査対象孔3を検査する際には、前記円柱体11を先端から前記検査対象孔3に挿入し、前記照明12及び前記CCDカメラ13並びに前記円柱体11を前記検査対象孔3に対して移動しながら、あるいは前記照明12及び前記CCDカメラ13並びに前記円柱体11に対して前記検査ワーク2を移動しながら検査を行う。   In the above configuration, when inspecting the inspection target hole 3 of the workpiece 2 to be inspected, the cylindrical body 11 is inserted into the inspection target hole 3 from the tip, and the illumination 12, the CCD camera 13, and the cylindrical body 11 are inserted. Is inspected while moving the inspection work 2 with respect to the illumination 12, the CCD camera 13 and the cylindrical body 11.

このとき、前記照明12からの照明光41は、前記円柱体11基端の平面部21から当該円柱体11内部へ入力され、該円柱体11の周面51に全反射しながら当該円柱部11内部を進む。そして、該円柱体11先端の円錐部22の斜面23で反射して、検査対象孔3の内面4に照射される。   At this time, the illumination light 41 from the illumination 12 is input into the cylindrical body 11 from the flat surface portion 21 at the base end of the cylindrical body 11 and is totally reflected on the peripheral surface 51 of the cylindrical body 11. Go inside. Then, the light is reflected by the inclined surface 23 of the conical portion 22 at the tip of the cylindrical body 11 and irradiated on the inner surface 4 of the inspection object hole 3.

この照明光41が照射された前記内面4からの反射光71は、前記円錐部22の斜面23で反射して当該円柱体11の基端側へ進み、基端が構成する平面部21を直進し、レンズ61を介してCCDカメラ13で撮像される。   The reflected light 71 from the inner surface 4 irradiated with the illumination light 41 is reflected by the inclined surface 23 of the conical portion 22 and proceeds to the proximal end side of the cylindrical body 11, and travels straight through the flat portion 21 formed by the proximal end. Then, the image is picked up by the CCD camera 13 through the lens 61.

これにより、前記照明光41で照らされた前記内面4の状態を、前記CCDカメラ13で撮像し、その内面画像から欠損の有無等を制御装置によって検査することができる。   Thereby, the state of the inner surface 4 illuminated by the illumination light 41 can be imaged by the CCD camera 13, and the presence or absence of a defect can be inspected from the inner surface image by the control device.

このとき、前記内面4を映す前記円錐部22は、中実の円柱体11の先端面が刳り貫かれ研磨されることによって、当該円柱体11に一体形成されている。このため、前記検査対象孔3内に挿入される円柱体11の直径と同径の円錐部22を当該円柱体11に一体形成することができる。   At this time, the conical portion 22 that reflects the inner surface 4 is integrally formed with the cylindrical body 11 by grinding and polishing the tip end surface of the solid cylindrical body 11. For this reason, a conical portion 22 having the same diameter as the cylindrical body 11 inserted into the inspection object hole 3 can be integrally formed with the cylindrical body 11.

このため、円錐状のコーンミラーの外周部に円筒状のガラスパイプを設けてコーンミラーを支持しなければならなかった従来と比較して、小径化を図ることができる。   For this reason, the diameter can be reduced as compared with the conventional case in which a cylindrical glass pipe is provided on the outer periphery of the conical cone mirror to support the cone mirror.

また、前記照明光41を中実の円柱体11で導いて前記検査対象孔3の内面4に当てることができる。このため、前記コーンミラーを支持した前記ガラスパイプの外側にライトガイドを設けて照明を照射する従来と比較して、照明するの為の大径化も防止することができる。   Further, the illumination light 41 can be guided by the solid cylindrical body 11 and applied to the inner surface 4 of the inspection object hole 3. For this reason, compared with the conventional case where a light guide is provided outside the glass pipe supporting the cone mirror to irradiate illumination, it is possible to prevent an increase in diameter for illumination.

これにより、前記内面4を映す前記円錐部22を小径化すること無く、円柱体11の小径化を実現できるので、直径の小さな検査対象孔3であっても検査が可能となる。   Thereby, since the diameter of the cylindrical body 11 can be reduced without reducing the diameter of the conical portion 22 that reflects the inner surface 4, it is possible to inspect even the inspection object hole 3 having a small diameter.

また、前記照明光41は、前記内面4に対してほぼ直角に照射され、正反射に近い光を画像化することができる。このため、前記内面4に形成された巣や欠け等の欠損の画像化に適し、これらの検査に適用することができる。   Moreover, the illumination light 41 is irradiated at a substantially right angle with respect to the inner surface 4, and light close to regular reflection can be imaged. Therefore, it is suitable for imaging defects such as nests and chips formed on the inner surface 4, and can be applied to these inspections.

そして、前記CCDカメラ13及び前記照明12を前記円柱体11の基端側に配置するとともに、前記照明12からの照明光41を前記内面4に対してほぼ直角に照射することができる。このため、図2に示すように、中途部で内径寸法が変化する段付き穴101や、底面102を備えた非貫通穴103であっても隅々まで検査を行うことができる。   The CCD camera 13 and the illumination 12 can be arranged on the base end side of the cylindrical body 11, and the illumination light 41 from the illumination 12 can be irradiated at a substantially right angle to the inner surface 4. For this reason, as shown in FIG. 2, even a stepped hole 101 whose inner diameter changes in the middle part and a non-through hole 103 having a bottom surface 102 can be inspected to every corner.

さらに、前記円錐部22に映った像は、中実の円柱体11で導かれて前記CCDカメラ13のレンズ61に達する構造上、当該円柱体11の屈折率により浮き上がって見え、当該像への見かけ上の焦点位置を近づけることができる。   Further, the image reflected on the conical portion 22 is guided by the solid cylindrical body 11 and reaches the lens 61 of the CCD camera 13, so that the image appears to be lifted by the refractive index of the cylindrical body 11. The apparent focal position can be brought closer.

このため、図3に示すように、コーンミラー201に映った像を中空体202を通してCCDカメラ203で撮像する場合と比較して、焦点距離が同じであっても、前記CCDカメラ13から前記円錐部22を離れた位置に設定することができ、より深い検査対象孔3の検査が可能となる。   For this reason, as shown in FIG. 3, even if the focal length is the same as when the image reflected on the cone mirror 201 is captured by the CCD camera 203 through the hollow body 202, the CCD camera 13 can reduce the cone. The part 22 can be set at a position away, and a deeper inspection target hole 3 can be inspected.

したがって、直径が小さく、深い検査対象孔3であっても検査が可能となる。   Therefore, the inspection can be performed even for the deep inspection target hole 3 having a small diameter.

本発明の一実施の形態を示す図である。It is a figure which shows one embodiment of this invention. 同実施の形態の使用例を示す説明図である。It is explanatory drawing which shows the usage example of the same embodiment. 同実施の形態の効果を示す説明図である。It is explanatory drawing which shows the effect of the same embodiment.

符号の説明Explanation of symbols

1 内面検査装置
2 被検査ワーク
3 検査対象孔
4 内面
11 円柱体
12 照明
13 CCDカメラ
21 平面部
22 円錐部
61 レンズ
DESCRIPTION OF SYMBOLS 1 Inner surface inspection apparatus 2 Work to be inspected 3 Hole to be inspected 4 Inner surface 11 Cylindrical body 12 Illumination 13 CCD camera 21 Plane portion 22 Conical portion 61 Lens

Claims (1)

孔の内面の状態を検査する内面検査装置において、
前記孔へ先端部より挿入される透明な円柱状であって基端が平面状に研磨されてなる平面部及び先端が円錐状に刳り貫かれて研磨された円錐部が設けられた円柱体と、
前記平面部から前記円柱体内部へ光を入力し当該円柱体で導かれた光を前記円錐部で反射して前記内面を照明する照明照射手段と、
前記円錐部に映った前記内面の状態を前記平面部を介して撮像する撮像手段と、
を備えたことを特徴とする内面検査装置。
In the inner surface inspection device that inspects the state of the inner surface of the hole,
A columnar body provided with a transparent columnar shape inserted into the hole from the distal end portion and having a base end polished flatly and a conical portion with a distal end penetrating conically and polished; ,
Illumination irradiating means for illuminating the inner surface by inputting light from the planar portion into the cylindrical body and reflecting the light guided by the cylindrical body at the conical portion;
Imaging means for imaging the state of the inner surface reflected in the conical portion via the plane portion;
An inner surface inspection apparatus comprising:
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Publication number Priority date Publication date Assignee Title
JP2012229978A (en) * 2011-04-26 2012-11-22 Ryoei Engineering Kk Device for photographing inner peripheral surface of hole
WO2013046451A1 (en) * 2011-09-30 2013-04-04 オリンパス株式会社 Inner surface shape measuring apparatus, detecting head, and endoscope apparatus
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JP2015104452A (en) * 2013-11-29 2015-06-08 オリンパス株式会社 Light projector
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JP2016075509A (en) * 2014-10-03 2016-05-12 有限会社 東北メカニクス Tool for inspecting inside of cylindrical hole, and inspection device of inside of cylindrical hole using the same
JP2016183941A (en) * 2015-03-27 2016-10-20 日本電産トーソク株式会社 Inner surface inspection device
JP2020156253A (en) * 2019-03-22 2020-09-24 日立オートモティブシステムズ株式会社 Joint inspection method and joint inspection equipment
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CN113906288A (en) * 2019-12-13 2022-01-07 在线业务解决方案株式会社 Cylinder inner surface inspection device

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