JP2009066855A - Method of forming long metal foil/resin film laminated sheet - Google Patents

Method of forming long metal foil/resin film laminated sheet Download PDF

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JP2009066855A
JP2009066855A JP2007236696A JP2007236696A JP2009066855A JP 2009066855 A JP2009066855 A JP 2009066855A JP 2007236696 A JP2007236696 A JP 2007236696A JP 2007236696 A JP2007236696 A JP 2007236696A JP 2009066855 A JP2009066855 A JP 2009066855A
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metal foil
long
resin film
drum
thermocompression bonding
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JP5165310B2 (en
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Yoshitaka Mineki
義孝 嶺木
Kazuo Yasuda
一雄 安田
Katsuzo Kato
勝三 加藤
Toshinori Hosoma
敏徳 細馬
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Ube Exsymo Co Ltd
Ube Corp
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Ube Industries Ltd
Ube Nitto Kasei Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a forming method suitable for the formation of a thin long metal foil/resin film laminated sheet. <P>SOLUTION: The method of forming the laminated sheet is carried out by overlapping metallic foils and resin films in the number of sheets required to form the long metal foil 3a, 3b/resin film 4 laminated sheet and supplying between both drums of a heating and compression device comprising an upper side and a lower side drum 2a, 2b pivotally supported by a rotary shaft to be rotatable and passing through the heating and compression device to heat and compress. The heating and compression device is constituted so that the upper side and the lower side drums are capable of rocking, rotary rolls 8a, 8b for guiding the introduction of the metal foil and/or the resin film from the direction to become upper side or the lower side to the contact surface between the upper side and the lower side rolls in the heating and compression device are provided in the front of the drum and the rotary shaft of the rotary roll is connected to the rotary shaft of the upper side or the lower side drum to rock to be synchronized with the rocking of the drum is used and the metal foil and/or the resin film are supplied to the heating and compression device while being rocked in the width direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、一組もしくは二組以上の長尺状金属箔/樹脂フィルム積層シートを製造する方法に関する。本発明は特に、長尺状の銅箔と長尺状のポリイミドフィルムとの積層シートの二組もしくはそれ以上を同時に製造することのできる方法に関する。   The present invention relates to a method for producing one set or two or more sets of long metal foil / resin film laminated sheets. In particular, the present invention relates to a method capable of simultaneously producing two or more laminated sheets of a long copper foil and a long polyimide film.

芳香族ポリイミドフィルムに代表される高耐熱性で熱圧着性を有する樹脂フィルムと銅箔に代表される高導電性金属箔とを積層圧着した積層シートは、たとえば、各種電子部品のプリント配線基板の製造に利用されている。この積層シートの代表的な構成としては、金属箔/樹脂フィルム/金属箔の構成の三層積層シートおよび金属箔/樹脂フィルムの構成の二層積層シートがある。   A laminated sheet obtained by laminating and bonding a resin film having high heat resistance and thermocompression bonding represented by an aromatic polyimide film and a highly conductive metal foil represented by copper foil is, for example, a printed wiring board of various electronic components. It is used for manufacturing. Typical configurations of this laminated sheet include a three-layer laminated sheet having a metal foil / resin film / metal foil configuration and a two-layer laminated sheet having a metal foil / resin film configuration.

上記のような積層シートは、その積層シート自体の製造の効率、そして積層シートを利用するプリント配線基板などの各種部品の製造の効率を考慮して、長尺状積層シートとして製造するのが一般的である。このための方法としては、ロール状に巻かれた長尺状の金属箔と同じくロール状に巻かれた長尺状の樹脂フィルムのそれぞれを連続的に、それぞれ回転軸に軸支された回転可能な上側ドラムと下側ドラムとからなる一対の加熱圧着装置に重ね合わせた状態で、あるいは加熱圧着装置の入口で重ね合わされるようにして供給し、次いで加熱圧着装置により積層圧着された長尺状積層シートを巻き取りロールにより巻き取る方法が一般的に利用されている。加熱圧着装置としては、上側ドラムと下側ドラムのそれぞれを単ロールとした従来タイプのもの、そして上側ドラムと下側ドラムのそれぞれを前方ドラムと後方ドラム、そして両ドラムの周囲をドラムと同期して回転するベルトから構成したダブルベルトプレス装置が代表的である。   The laminated sheet as described above is generally produced as a long laminated sheet in consideration of the production efficiency of the laminated sheet itself and the production efficiency of various components such as a printed wiring board using the laminated sheet. Is. As a method for this purpose, each of the long resin films wound in a roll shape as well as the long metal foil wound in a roll shape can be continuously supported by a rotating shaft. A long shape that is supplied in a state of being superimposed on a pair of thermocompression bonding devices composed of an upper drum and a lower drum, or superimposed at the inlet of the thermocompression bonding device, and then laminated and crimped by the thermocompression bonding device A method of winding a laminated sheet with a winding roll is generally used. The thermocompression bonding equipment is a conventional type in which each of the upper drum and the lower drum is a single roll, and each of the upper drum and the lower drum is synchronized with the front drum and the rear drum, and the periphery of both drums is synchronized with the drum. A double belt press device composed of a rotating belt is representative.

長尺状金属箔/樹脂フィルム積層シートは、上記のように、加熱圧着装置を用いて連続的に製造されているが、近年、長尺状金属箔/樹脂フィルム積層シートの需要の増加に応じて、そしてその製造コストの低減を図るために、複数の長尺状金属箔/樹脂フィルム積層シートを同時に製造することが検討されている。   As described above, long metal foil / resin film laminated sheets are continuously manufactured using a thermocompression bonding apparatus. However, in response to an increase in demand for long metal foil / resin film laminated sheets in recent years. In order to reduce the manufacturing cost, it has been studied to simultaneously manufacture a plurality of elongated metal foil / resin film laminated sheets.

特許文献1には、ダブルベルトプレス装置を用いて外観が良好なフレキシブル金属箔積層体を安定的に製造する方法の記載があり、その記載中に、複数の長尺状金属箔/樹脂フィルム積層シートを同時に製造することが可能であることの記載がある。
特開2005−306002号公報
Patent Document 1 has a description of a method for stably producing a flexible metal foil laminate having a good appearance using a double belt press apparatus. In the description, a plurality of long metal foil / resin film laminates are described. There is a description that sheets can be produced simultaneously.
JP 2005-306002 A

一方、近年の各種電子部品の小型化への要求に答えて、積層シートを構成する金属箔と樹脂フィルムの双方を薄膜化して、積層シートの薄膜化を図る動向が一般的になっている。   On the other hand, in response to the recent demand for miniaturization of various electronic components, there is a general trend of thinning the laminated sheet by thinning both the metal foil and the resin film constituting the laminated sheet.

本発明者は、上記の薄膜積層シートの需要の動向を考慮して、従来の加熱圧着装置を用いて長尺状薄膜積層シートを製造する技術の検討を行なった。その結果、本発明者は、従来採用されていた加熱圧着装置を用いる加熱圧着操作では、特に薄膜積層シートを製造しようとすると、長尺状金属箔に折れや皺の発生などのトラブルが発生しやすいことを見出した。   This inventor considered the trend of the demand of said thin film lamination sheet, and examined the technique which manufactures an elongate thin film lamination sheet using the conventional thermocompression bonding apparatus. As a result, the present inventor, in the thermocompression bonding operation using the conventionally employed thermocompression bonding apparatus, particularly when trying to produce a thin film laminated sheet, troubles such as folds and wrinkles occur in the long metal foil. I found it easy.

すなわち、従来の加熱圧着装置を用いる長尺状積層シートの製造に際しては、目的とする長尺状積層シートに高度の平面均一性が要求されることを考慮して、積層シートの構成材料である長尺状金属箔と長尺状樹脂フィルムの双方について、高い張力を付与した状態で加熱圧着装置に供給していた。しかしながら、本発明者の研究によると、長尺状金属箔の巻き出しロールと加熱圧着装置のドラムとの僅かな軸位置(角度)のずれによると推測されるが、長尺状金属箔が加熱圧着装置に取り込まれる際に僅かな平面方向のずれが発生し、このずれに起因して、導入される長尺状金属箔や長尺状樹脂フィルムに折れや皺の発生などのトラブルが発生しやすい。   That is, in the production of a long laminated sheet using a conventional thermocompression bonding apparatus, it is a constituent material of the laminated sheet in consideration of the fact that a high degree of planar uniformity is required for the intended long laminated sheet. Both the long metal foil and the long resin film were supplied to the thermocompression bonding apparatus in a state where high tension was applied. However, according to the inventor's research, it is estimated that this is due to a slight shift of the axial position (angle) between the unwinding roll of the long metal foil and the drum of the thermocompression bonding apparatus. A slight shift in the plane direction occurs when being taken into the crimping device, and this shift causes troubles such as breakage and wrinkles in the long metal foil and long resin film introduced. Cheap.

従って、本発明は、今回新たに見出された、薄膜の長尺状金属箔/樹脂フィルム積層シートを上側ドラムと下側ドラムとからなる加熱圧着装置を用いて製造する際に発生しやすい、薄膜長尺状金属箔の折れや皺の発生などのトラブルの発生を回避することのできる長尺状金属箔/樹脂フィルム積層シートの製造方法を提供することを主な目的とする。   Therefore, the present invention is likely to occur when a thin metal foil / resin film laminate sheet newly found this time is produced using a thermocompression bonding apparatus composed of an upper drum and a lower drum. The main object is to provide a method for producing a long metal foil / resin film laminate sheet that can avoid the occurrence of troubles such as the folding of the thin metal foil and the occurrence of wrinkles.

本発明は、一組もしくは複数組の長尺状金属箔/樹脂フィルム積層シートの製造に必要な枚数の長尺状金属箔と長尺状樹脂フィルムとを、それぞれ回転軸に軸支された回転可能な上側ドラムと下側ドラムとからなる加熱圧着装置の両ドラム間に重ね合せた状態で供給し、次いで重ね合わされた状態の長尺状金属箔と長尺状樹脂フィルムとを加熱圧着装置を通過させて加熱圧着することにより長尺状金属箔/樹脂フィルム積層シートを製造する方法であって、該加熱圧着装置として、上側ドラムと下側ドラムとが揺動可能とされていて、少なくとも一方のドラムの前方に、長尺状金属箔及び/又は長尺状樹脂フィルムの、加熱圧着装置内での上側ドラムと下側ドラムとの接触面に対して上方もしくは下方となる方向からの導入を案内する少なくとも一つの案内用回転ロールが設けられ、かつ該案内用回転ロールの回転軸が上側ドラムまたは下側ドラムの回転軸に当該ドラムの揺動と同期して揺動するように接続されている加熱圧着装置を用いることにより、長尺状金属箔及び/又は長尺状樹脂フィルムを幅方向に揺動させながら加熱圧着装置に供給することを特徴とする長尺状金属箔/樹脂フィルム積層シートの製造方法にある。   In the present invention, the number of long metal foils and long resin films necessary for the production of one set or a plurality of long metal foil / resin film laminated sheets are respectively supported by rotation shafts. Supply in a state where it is overlapped between both drums of a thermocompression bonding apparatus comprising an upper drum and a lower drum where possible, and then apply a thermocompression bonding apparatus to the long metal foil and the long resin film in a superposed state. A method of producing a long metal foil / resin film laminated sheet by passing and thermocompression bonding, wherein the upper and lower drums are swingable as at least one of the thermocompression bonding devices. In front of the drum, the long metal foil and / or the long resin film is introduced from above or below the contact surface between the upper drum and the lower drum in the thermocompression bonding apparatus. Less to guide A heating roll provided with another guide rotary roll and connected to the rotary shaft of the upper drum or the lower drum so as to swing in synchronization with the swing of the drum. A long metal foil / resin film laminate sheet, characterized in that a long metal foil and / or a long resin film is supplied to a thermocompression bonding device while swinging in the width direction by using a crimping device. In the manufacturing method.

本発明の製造方法を利用することにより、長尺状金属箔や長尺状樹脂フィルムの折れや皺の発生などのトラブルの発生の回避が可能になる。本発明は特に、それぞれ薄膜の長尺状金属箔と長尺状樹脂フィルムとからなる積層シートの製造に有利であり、また特に、加熱圧着装置の基本構成として公知のダブルベルトプレスを用いることにより有利に利用できる。また更に、本発明は特に、薄膜の長尺状銅箔と薄膜の長尺状ポリイミドフィルムとから長尺状積層シートを二組以上同時に製造する際に有利に利用できる。   By using the manufacturing method of the present invention, it is possible to avoid troubles such as breakage of a long metal foil or a long resin film or generation of wrinkles. The present invention is particularly advantageous for the production of laminated sheets each consisting of a thin long metal foil and a long resin film, and in particular, by using a known double belt press as the basic structure of a thermocompression bonding apparatus. It can be used advantageously. Further, the present invention can be advantageously used particularly when two or more long laminated sheets are simultaneously produced from a thin long copper foil and a thin long polyimide film.

本発明の好ましい態様を次に記載する。
(1)案内用回転ロールが少なくとも長尺状金属箔を回転下に案内する案内用回転ロールである。
(2)案内用回転ロールを介して上側ドラム或いは下側ドラムに導入される長尺状金属箔及び/又は長尺状樹脂フィルムが、案内用回転ロールでの抱角(図1のθ)が30〜180゜の範囲の角度で導入される。
(3)長尺状樹脂フィルムが長尺状ポリイミドフィルムである。
(4)長尺状樹脂フィルムが、300℃未満ではガラス転移点が観測されない芳香族ポリイミドからなる中央層、そして該中央層の両側に配置された熱可塑性を示す芳香族ポリイミドからなる表面層からなる複合フィルムである。
(5)長尺状金属箔が長尺状銅箔である。
(6)積層シートが、金属箔/樹脂フィルム/金属箔の構成の三層積層シートである。
(7)積層シートが、金属箔/樹脂フィルムの二層積層シートである。
(8)二組の長尺状積層シートを同時に製造する。
(9)三組の長尺状積層シートを同時に製造する。
Preferred embodiments of the invention will now be described.
(1) The guide rotary roll is a guide rotary roll that guides at least the long metal foil under rotation.
(2) The long metal foil and / or the long resin film introduced into the upper drum or the lower drum via the guide rotating roll has a holding angle (θ in FIG. 1) at the guide rotating roll. It is introduced at an angle in the range of 30-180 °.
(3) The long resin film is a long polyimide film.
(4) From the central layer made of an aromatic polyimide in which the glass transition point is not observed at less than 300 ° C., and the surface layer made of aromatic polyimide showing thermoplasticity disposed on both sides of the central layer It is a composite film.
(5) The long metal foil is a long copper foil.
(6) The laminated sheet is a three-layer laminated sheet having a configuration of metal foil / resin film / metal foil.
(7) The laminated sheet is a two-layer laminated sheet of metal foil / resin film.
(8) Two sets of long laminated sheets are manufactured simultaneously.
(9) Three sets of long laminated sheets are manufactured simultaneously.

次に本発明の長尺状金属箔/樹脂フィルム積層シートの製造方法を、その利用が好ましいダブルベルトプレス型の加熱圧着装置を用い、銅箔/ポリイミドフィルム/銅箔の三層構成の積層シートを製造する方法を代表例として利用し、説明する。   Next, the manufacturing method of the long metal foil / resin film laminate sheet according to the present invention uses a double-belt press-type thermocompression bonding apparatus that is preferably used, and a laminate sheet having a three-layer structure of copper foil / polyimide film / copper foil. A method of manufacturing the above will be described as a representative example.

図1は、本発明の長尺状金属箔/樹脂フィルム積層シートの製造法に有利に用いられる装置の代表的な構成を示す模式図である。   FIG. 1 is a schematic diagram showing a typical configuration of an apparatus advantageously used in the method for producing a long metal foil / resin film laminated sheet of the present invention.

図1の製造装置は、それぞれ回転軸1a、1bに軸支された回転可能な上側ドラム2aと下側ドラム2bとからなる一対の加熱圧着装置、該加熱圧着装置の前方に設けられた一組もしくは複数組の長尺状金属箔/樹脂フィルム積層シートの製造に必要な枚数の長尺状金属箔3a、3bと長尺状樹脂フィルム4とを該加熱圧着装置に供給する複数の巻き出しロール(図示なし)、及び該加熱圧着装置での加熱圧着操作の終了後に生成した複数組の長尺状金属箔/樹脂フィルム積層シートのそれぞれを巻き取る一個もしくは複数個の巻き取りロール5、6を含む長尺状金属箔/樹脂フィルム積層シートの製造装置であって、該加熱圧着装置の上側ドラム2aと下側ドラム2bとが揺動可能とされており、少なくとも一方のドラムと該巻き出しロールとの間に長尺状金属箔3a、3bもしくは長尺状樹脂フィルム4の、加熱圧着装置内での上側ドラム2aと下側ドラム2bとの接触面7に対して上方もしくは下方となる方向からの導入を案内する少なくとも一つの案内用回転ロール8a、8bが設けられ、かつ該案内用回転ロール8a、8bの回転軸は上側ドラム2aまたは下側ドラム2bの回転軸1a、1bに当該ドラムの揺動と同期して揺動するように接続されている。   The manufacturing apparatus of FIG. 1 includes a pair of a thermocompression bonding apparatus composed of a rotatable upper drum 2a and a lower drum 2b supported by rotating shafts 1a and 1b, respectively, and a set provided in front of the thermocompression bonding apparatus. Alternatively, a plurality of unwinding rolls for supplying a plurality of long metal foils 3a and 3b and a long resin film 4 necessary for manufacturing a plurality of long metal foil / resin film laminated sheets to the thermocompression bonding apparatus. (Not shown), and one or a plurality of winding rolls 5 and 6 for winding each of a plurality of long metal foil / resin film laminated sheets generated after the thermocompression operation in the thermocompression bonding apparatus. An apparatus for producing a long metal foil / resin film laminated sheet including an upper drum 2a and a lower drum 2b of the thermocompression bonding apparatus, wherein at least one drum and the unwinding roll From the direction in which the long metal foils 3a and 3b or the long resin film 4 are above or below the contact surface 7 between the upper drum 2a and the lower drum 2b in the thermocompression bonding apparatus. And at least one guide rotary roll 8a, 8b for guiding the introduction of the drum, and the rotary shaft of the guide rotary roll 8a, 8b is connected to the rotary shaft 1a, 1b of the upper drum 2a or the lower drum 2b. It is connected to swing in synchronization with the swing.

長尺状金属箔3aは、案内用回転ロール8aを介して案内用回転ロールでの抱角(図1のθに相当)が、30〜180゜の範囲の角度、好ましくは、45〜180゜の範囲の角度、さらに好ましくは45〜120゜の範囲の角度で、上側ドラム2aに導入される。長尺状金属箔3bは、案内用回転ロール8bを介して案内用回転ロールでの抱角(図1のθに相当)が、30〜180゜の範囲の角度、好ましくは、45〜180゜の範囲の角度、さらに好ましくは45〜120゜の範囲の角度で、下側ドラム2bに導入される。長尺状樹脂フィルムも長尺状金属箔と同様に、案内用回転ロールを介して案内用回転ロールでの抱角(図1のθに相当)が、30〜180゜の範囲の角度、好ましくは、45〜180゜の範囲の角度、さらに好ましくは45〜120゜の範囲の角度で、上側ドラム或いは下側ドラムに導入することができる。   The long metal foil 3a has a holding angle (corresponding to [theta] in FIG. 1) of 30 to 180 [deg.], Preferably 45 to 180 [deg.] Through the guiding rotating roll 8a. Is introduced into the upper drum 2a at an angle in the range of 45 to 120 °, more preferably in the range of 45 to 120 °. The long metal foil 3b has a holding angle (corresponding to [theta] in FIG. 1) of 30 to 180 [deg.], Preferably 45 to 180 [deg.] On the guiding rotating roll via the guiding rotating roll 8b. Is introduced into the lower drum 2b at an angle in the range of 45 to 120 [deg.]. Similarly to the long metal foil, the long resin film has a holding angle (corresponding to θ in FIG. 1) in the range of 30 to 180 ° through the guide rotary roll, preferably 30 ° to 180 °. Can be introduced into the upper or lower drum at an angle in the range of 45-180 °, more preferably in the range of 45-120 °.

図1において、長尺状樹脂フィルム4を導入する案内用回転ロール13は、ドラムの揺動と同期して揺動しないように図示しているが、長尺状樹脂フィルム4を導入する案内用回転ロール13も案内用回転ロール8a或いは案内用回転ロール8bと同様に、上側ドラム或いは下側ドラムの揺動と同期して揺動するものを用いることができる。特に長尺状樹脂フィルム4を案内用回転ロール13を介して案内用回転ロールでの抱角(図1のθに相当)が、30〜180゜の範囲の角度、好ましくは、45〜180゜の範囲の角度、さらに好ましくは45〜120゜の範囲の角度で、上側ドラム或いは下側ドラムに導入する場合に特に効果が優れる。
図1では、案内用回転ロールはドラムと連結している軸により固定してドラムの揺動と同期して揺動するようにしているが、案内用回転ロールはドラムと連結せずドラムの揺動と同期して揺動するように設けても良い。
In FIG. 1, the guide rotating roll 13 for introducing the long resin film 4 is illustrated so as not to swing in synchronization with the swing of the drum. Similarly to the guide rotary roll 8a or the guide rotary roll 8b, the rotary roll 13 that swings in synchronization with the swing of the upper drum or the lower drum can be used. In particular, the holding angle (corresponding to θ in FIG. 1) of the long resin film 4 through the guide rotary roll 13 through the guide rotary roll 13 is in the range of 30 to 180 °, preferably 45 to 180 °. The effect is particularly excellent when it is introduced into the upper drum or the lower drum at an angle in the range of 45 to 120 °, more preferably in the range of 45 to 120 °.
In FIG. 1, the guide rotary roll is fixed by a shaft connected to the drum so as to swing in synchronism with the swing of the drum. However, the guide rotary roll is not connected to the drum but the drum swing. You may provide so that it may rock | fluctuate synchronizing with a motion.

図1の加熱圧着装置の基本構成は、公知のダブルベルトプレスに相当し、上側ドラム2aと下側ドラム2bのそれぞれの後方には、後方上側ドラム9aと後方下側ドラム9bが備えられ、上側ドラム2aと後方上側ドラム9aの周囲、そして下側ドラム2bと後方下側ドラム9bの周囲のそれぞれには、エンドレスベルト10a、10bが装着され、ドラムの回転と同期してエンドレスに回転する。上側ドラム2aと後方上側ドラム9aとの間(下側ドラム2bと後方下側ドラム9bとの間)には、加熱加圧具11と加圧冷却装置12とが備えられている。   The basic configuration of the thermocompression bonding apparatus of FIG. 1 corresponds to a known double belt press, and a rear upper drum 9a and a rear lower drum 9b are provided at the rear of each of the upper drum 2a and the lower drum 2b. Endless belts 10a and 10b are mounted around the drum 2a and the rear upper drum 9a, and around the lower drum 2b and the rear lower drum 9b, respectively, and rotate endlessly in synchronization with the rotation of the drum. Between the upper drum 2a and the rear upper drum 9a (between the lower drum 2b and the rear lower drum 9b), a heating / pressurizing tool 11 and a pressure / cooling device 12 are provided.

図1において、例えば、長尺状金属箔3aと長尺状金属箔3bとは共に銅箔であって、長尺状樹脂フィルム4は熱圧着性の多層芳香族ポリイミドフィルムとする。   In FIG. 1, for example, the long metal foil 3a and the long metal foil 3b are both copper foils, and the long resin film 4 is a thermocompression-bonding multilayer aromatic polyimide film.

銅箔には通常、電解銅箔および圧延銅箔があり、それぞれ市販されていて、目的に応じて任意の厚みの電解銅箔と圧延銅箔を製造業者から入手して本発明の積層体の製造に用いることができる。   Copper foil usually has electrolytic copper foil and rolled copper foil, and each is commercially available. Depending on the purpose, an electrolytic copper foil and a rolled copper foil of any thickness can be obtained from the manufacturer, and the laminate of the present invention can be obtained. Can be used for manufacturing.

また、金属箔は銅箔に限定されるものではなく、アルミ箔などの各種の金属箔(特に導電性の金属箔)を目的に応じて用いることができる。そして、銅箔などの金属箔として、ポリイミド、エポキシ樹脂などの熱圧着性或いは接着性の樹脂被覆層を表面に有する金属箔を用いることができる。これらの樹脂被覆層を表面に有する金属箔は、通常、その表面の樹脂被覆層が樹脂フィルムと対面するようにして配置して用いる。   Moreover, metal foil is not limited to copper foil, Various metal foils (especially electroconductive metal foil), such as aluminum foil, can be used according to the objective. And as metal foil, such as copper foil, the metal foil which has thermocompression-bonding or adhesive resin coating layers, such as a polyimide and an epoxy resin, on the surface can be used. The metal foil having such a resin coating layer on the surface is usually used by being arranged so that the resin coating layer on the surface faces the resin film.

長尺状金属箔の厚みについては、加熱圧着装置に供給できる厚さであれば特に制限はないが、通常は5〜35μmであり、好ましくは5〜12μm、特に好ましくは5〜10μmである。キャリア層を有する金属箔の場合には、その金属箔の厚みは通常1〜7μmである。特に銅箔を用いる場合は、圧延銅箔では通常8〜35μmで、電解銅箔では通常5〜35μmである。キャリア層を有する銅箔の場合には、その銅箔の厚みは通常1〜5μmである。
長尺状金属箔の幅については、連続的に搬送できる幅であれば特に制限はない。すなわち、利用する加熱圧着装置による連続的な加熱圧着処理が可能な幅であればよい。
The thickness of the long metal foil is not particularly limited as long as it can be supplied to the thermocompression bonding apparatus, but is usually 5 to 35 μm, preferably 5 to 12 μm, and particularly preferably 5 to 10 μm. In the case of a metal foil having a carrier layer, the thickness of the metal foil is usually 1 to 7 μm. In particular, when copper foil is used, it is usually 8 to 35 μm for rolled copper foil, and usually 5 to 35 μm for electrolytic copper foil. In the case of a copper foil having a carrier layer, the thickness of the copper foil is usually 1 to 5 μm.
The width of the long metal foil is not particularly limited as long as it can be continuously conveyed. That is, the width may be any width that allows continuous thermocompression treatment by the thermocompression bonding apparatus to be used.

熱圧着性多層芳香族ポリイミドフィルムは、非熱圧着性芳香族ポリイミドフィルムとその一方もしくは両方の表面に形成された熱圧着性芳香族ポリイミド層とからなるフィルムであって、例えば、宇部興産株式会社から市販されており、容易に入手できる。熱圧着性多層芳香族ポリイミドフィルムについての詳しい記載は、前述の特許文献1に見られる。   The thermocompression bonding multilayer aromatic polyimide film is a film comprising a non-thermocompression bonding aromatic polyimide film and a thermocompression bonding aromatic polyimide layer formed on one or both surfaces thereof, for example, Ube Industries, Ltd. And is readily available. A detailed description of the thermocompression-bonding multilayer aromatic polyimide film can be found in the aforementioned Patent Document 1.

なお、図1に関する説明では、樹脂フィルムとして熱圧着性多層芳香族ポリイミドフィルムを用いた例をとり挙げたが、樹脂フィルムは、加熱条件下で金属箔と圧着可能な樹脂フィルムであれば特に限定はない。目的に応じて使用することが可能な樹脂フィルムとしては、熱圧着性芳香族ポリイミドフィルム、熱圧着性ポリエステルフィルム、熱圧着性ポリアミドフィルム(熱圧着性アラミドフィルム)、熱圧着性ビニルエステルフィルム、熱圧着性フッ素樹脂フィルムなどを挙げることができる。樹脂フィルムは、単層フィルムであっても、また片面あるいは両面に熱圧着層を有する多層フィルムであってもよい。特に好ましいのは、熱圧着性芳香族ポリイミドフィルムと熱圧着性ポリアミドフィルム(熱圧着性アラミドフィルム)である。   In the description of FIG. 1, an example in which a thermocompression-bonding multilayer aromatic polyimide film is used as the resin film has been described. However, the resin film is particularly limited as long as it is a resin film that can be crimped to a metal foil under heating conditions. There is no. Resin films that can be used according to the purpose include thermocompression bonding aromatic polyimide film, thermocompression bonding polyester film, thermocompression bonding polyamide film (thermocompression bonding aramid film), thermocompression bonding vinyl ester film, heat Examples thereof include a pressure-sensitive fluororesin film. The resin film may be a single layer film or a multilayer film having a thermocompression bonding layer on one side or both sides. Particularly preferred are a thermocompression bonding aromatic polyimide film and a thermocompression bonding polyamide film (thermocompression bonding aramid film).

樹脂フィルムの厚みは、加熱圧着装置に供給できる厚さであれば特に制限はないが、通常は5〜150μmであり、好ましくは8〜100μm、特に好ましくは10〜50μmである。
樹脂フィルムは、その片面または両面に金属箔と加熱圧着が可能な厚みの熱圧着性の表面層を有していることが好ましく、その表面層の厚みは、通常0.5〜10μm、好ましくは1〜8μm、特に好ましくは1〜5μmである。
長尺状樹脂フィルムの幅については、連続的に搬送できる幅であれば特に制限はない。すなわち、利用する加熱圧着装置による連続的な加熱圧着処理が可能な幅であればよい。
Although there will be no restriction | limiting in particular if the thickness of a resin film is the thickness which can be supplied to a thermocompression bonding apparatus, Usually, it is 5-150 micrometers, Preferably it is 8-100 micrometers, Most preferably, it is 10-50 micrometers.
It is preferable that the resin film has a thermocompression-bondable surface layer that can be thermocompression-bonded to the metal foil on one or both sides, and the thickness of the surface layer is usually 0.5 to 10 μm, preferably 1-8 μm, particularly preferably 1-5 μm.
The width of the long resin film is not particularly limited as long as it can be continuously conveyed. That is, the width may be any width that allows continuous thermocompression treatment by the thermocompression bonding apparatus to be used.

次に、図1の加熱圧着装置を用いる長尺状金属箔/樹脂フィルム積層シートの製造方法を、長尺状金属箔/樹脂フィルム/長尺状金属箔の三層からなる積層シートの製造方法を例にして詳しく説明する。   Next, the manufacturing method of the elongate metal foil / resin film lamination sheet using the thermocompression bonding apparatus of FIG. 1 is the same as the manufacturing method of the lamination sheet consisting of three layers of elongate metal foil / resin film / elongation metal foil. An example will be described in detail.

製造目的の積層シートは、長尺状金属箔/樹脂フィルム/長尺状金属箔の三層からなる積層シートであるため、まず、長尺状金属箔3a、樹脂フィルム4そして長尺状金属箔3bを、それぞれの巻き出しロール(図示なし)から巻き出す。そして、長尺状金属箔3aと長尺状金属箔3bは、上側ドラム2aと下側ドラム2bとの間(ダブルベルトプレスの場合には、上側のエンドレスベルト10aと下側のエンドレスベルト10bとの間)に形成されるスリットに、案内用回転ロール8a、8bに案内されて導入される。一方、樹脂フィルム4もドラムに接続していない案内用回転ロール13に案内されて上記スリットに導入され、このスリットにて、長尺状金属箔/樹脂フィルム/長尺状金属箔の三層からなる積層構造体を形成する。そして、この積層構造体は、エンドレスベルト10a、10bの回転と共に前進し、前進している間に加熱圧着処理が施されて長尺状金属箔/樹脂フィルム/長尺状金属箔の三層が一体化した積層シートとなり、その後、巻き取りロール5、6に巻き取られる。   Since the laminated sheet for manufacturing is a laminated sheet composed of three layers of long metal foil / resin film / long metal foil, first, the long metal foil 3a, the resin film 4 and the long metal foil 3b is unwound from each unwinding roll (not shown). The long metal foil 3a and the long metal foil 3b are arranged between the upper drum 2a and the lower drum 2b (in the case of a double belt press, the upper endless belt 10a and the lower endless belt 10b Between the guide rolls 8a and 8b. On the other hand, the resin film 4 is also guided to the guide rotary roll 13 not connected to the drum and introduced into the slit, and from this slit, the three layers of long metal foil / resin film / long metal foil are used. A laminated structure is formed. The laminated structure advances with the rotation of the endless belts 10a and 10b, and is subjected to a thermocompression treatment while moving forward, so that three layers of long metal foil / resin film / long metal foil are formed. It becomes an integrated laminated sheet, and is then wound on winding rolls 5 and 6.

上記の加熱圧着装置を用いる長尺状金属箔/樹脂フィルム積層シートの製造に際して、長尺状金属箔及び/又は長尺状樹脂フィルムをドラムに導入する案内用回転ロールが、当該ドラムに同期して揺動するために、上側ドラムと下側ドラムとの間に導入される部位から案内用回転ロールの間の長尺状金属箔及び/又は長尺状樹脂フィルムの長さ方向或いは幅方向の張力が不均一になりにくくなるため、長尺状金属箔及び/又は長尺状樹脂フィルムの折れや皺の発生などのトラブルの発生が効果的に回避できるという優れた効果が得られる。
本発明では、長尺状金属箔及び/又は長尺状樹脂フィルムは、案内用回転ロールを介して案内用回転ロールでの抱角(θ)が、30〜180゜の範囲の角度、好ましくは、45〜180゜の範囲の角度、さらに好ましくは45〜120゜の範囲の角度で、上側ドラム或いは下側ドラムに導入する場合に特に効果が優れ、さらに案内用回転ロールでの抱角(θ)を持たせることにより、入り口ドラムで予熱することが可能となる。
When the long metal foil / resin film laminated sheet is manufactured using the thermocompression bonding apparatus, a guide rotating roll for introducing the long metal foil and / or the long resin film into the drum is synchronized with the drum. In the length direction or the width direction of the long metal foil and / or the long resin film between the part introduced between the upper drum and the lower drum and the guide rotating roll. Since the tension is less likely to be uneven, it is possible to obtain an excellent effect that troubles such as breakage of the long metal foil and / or long resin film and occurrence of wrinkles can be effectively avoided.
In the present invention, the long metal foil and / or the long resin film has a holding angle (θ) in the guide rotary roll through the guide rotary roll in the range of 30 to 180 °, preferably It is particularly effective when it is introduced into the upper drum or the lower drum at an angle in the range of 45 to 180 °, more preferably in the range of 45 to 120 °, and the holding angle (θ ) Can be preheated by the entrance drum.

なお、図1では、長尺状積層体の製造装置を、ダブルベルトプレスを用いた装置として説明したが、長尺状積層体の製造装置は、上側ドラムと下側ドラムとを含む加熱圧着装置(特に表面が弾性材料からなるドラムを用いる加熱圧着装置)を含む公知の加熱圧着装置、あるいは公知の加熱圧着装置の変形もしくは改良からなる加熱圧着装置を用いて同様に実施することができることは勿論である。また、製造する長尺状積層体は一組に限られることはなく、二組、三組あるいは四組の同時製造も可能である。   In addition, in FIG. 1, although the manufacturing apparatus of the elongate laminated body was demonstrated as an apparatus using a double belt press, the manufacturing apparatus of an elongate laminated body is a thermocompression bonding apparatus including an upper drum and a lower drum. It can of course be carried out in the same manner by using a known thermocompression bonding apparatus including (especially a thermocompression bonding apparatus using a drum whose surface is made of an elastic material) or a modification or improvement of a known thermocompression bonding apparatus. It is. Moreover, the long laminated body to manufacture is not restricted to one set, Two sets, three sets, or four sets can be manufactured simultaneously.

本発明の長尺状金属箔/樹脂フィルム積層シートの製造方法に利用できる製造装置の代表的な構成を示す。The typical structure of the manufacturing apparatus which can be utilized for the manufacturing method of the elongate metal foil / resin film lamination sheet of this invention is shown.

符号の説明Explanation of symbols

1a、1b 回転軸
2a 上側ドラム
2b 下側ドラム
3a、3b 長尺状金属箔
4 長尺状樹脂フィルム
5、6 巻き取りロール
7 上側ドラム2aと下側ドラム2bとの接触面
8a、8b 案内用回転ロール
9a 後方上側ドラム
9b 後方下側ドラム
10a、10b エンドレスベルト
11 加熱加圧具
12 加圧冷却装置
13 案内用回転ロール
1a, 1b Rotating shaft 2a Upper drum 2b Lower drum 3a, 3b Long metal foil 4 Long resin film 5, 6 Winding roll 7 Contact surface between upper drum 2a and lower drum 2b 8a, 8b For guidance Rotating roll 9a Rear upper drum 9b Rear lower drum 10a, 10b Endless belt 11 Heating and pressing tool 12 Pressure cooling device 13 Rotating roll for guidance

Claims (6)

一組もしくは複数組の長尺状金属箔/樹脂フィルム積層シートの製造に必要な枚数の長尺状金属箔と長尺状樹脂フィルムとを、それぞれ回転軸に軸支された回転可能な上側ドラムと下側ドラムとからなる加熱圧着装置の両ドラム間に重ね合せた状態で供給し、次いで重ね合わされた状態の長尺状金属箔と長尺状樹脂フィルムとを加熱圧着装置を通過させて加熱圧着することにより長尺状金属箔/樹脂フィルム積層シートを製造する方法であって、該加熱圧着装置として、上側ドラムと下側ドラムとが揺動可能とされていて、少なくとも一方のドラムの前方に、長尺状金属箔及び/又は長尺状樹脂フィルムの、加熱圧着装置内での上側ドラムと下側ドラムとの接触面に対して上方もしくは下方となる方向からの導入を案内する少なくとも一つの案内用回転ロールが設けられ、かつ該案内用回転ロールの回転軸が上側ドラムまたは下側ドラムの回転軸に当該ドラムの揺動と同期して揺動するように接続されている加熱圧着装置を用いることにより、長尺状金属箔及び/又は長尺状樹脂フィルムを幅方向に揺動させながら加熱圧着装置に供給することを特徴とする長尺状金属箔/樹脂フィルム積層シートの製造方法。 A rotatable upper drum in which one or a plurality of long metal foil / resin film laminated sheets, each of which is necessary for manufacturing a long sheet of metal foil and a long resin film, is supported by a rotating shaft. Is supplied in a state of being overlapped between the two drums of the thermocompression bonding device comprising the upper and lower drums, and then the superposed metal foil and the long resin film are passed through the thermocompression bonding device and heated. A method of manufacturing a long metal foil / resin film laminated sheet by pressure bonding, wherein the upper and lower drums are swingable as the thermocompression bonding device, and at the front of at least one drum In addition, at least one for guiding the introduction of the long metal foil and / or the long resin film from the direction above or below the contact surface between the upper drum and the lower drum in the thermocompression bonding apparatus. Horn A thermocompression bonding apparatus provided with an inner rotary roll and connected so that the rotary shaft of the guide rotary roll swings in synchronization with the swing of the drum on the rotary shaft of the upper drum or the lower drum; A method for producing a long metal foil / resin film laminate sheet, characterized in that the long metal foil and / or the long resin film is supplied to a thermocompression bonding apparatus while being swung in the width direction. 案内用回転ロールが少なくとも長尺状金属箔を回転下に案内する案内用回転ロールである請求項1に記載の製造方法。 The manufacturing method according to claim 1, wherein the guide rotary roll is a guide rotary roll that guides at least the long metal foil under rotation. 案内用回転ロールを介して上側ドラム或いは下側ドラムに導入される長尺状金属箔及び/又は長尺状樹脂フィルムが、案内用回転ロールでの抱角(θ)が30〜180゜の範囲の角度で導入される請求項1もしくは2に記載の製造方法。 The long metal foil and / or long resin film introduced into the upper drum or the lower drum via the guide rotating roll has a holding angle (θ) of 30 to 180 ° at the guiding rotating roll. The manufacturing method according to claim 1 or 2, which is introduced at an angle of. 加熱圧着装置がダブルベルトプレスである請求項1乃至3のうちのいずれかの項に記載の製造方法。 The manufacturing method according to claim 1, wherein the thermocompression bonding apparatus is a double belt press. 長尺状金属箔が長尺状銅箔である請求項1乃至4のうちのいずれかの項に記載の製造方法。 The manufacturing method according to claim 1, wherein the long metal foil is a long copper foil. 長尺状樹脂フィルムが長尺状ポリイミドフィルムである請求項1乃至5のうちのいずれかの項に記載の製造方法。 The manufacturing method according to any one of claims 1 to 5, wherein the long resin film is a long polyimide film.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101492457B1 (en) 2013-03-27 2015-02-12 주식회사 이녹스 Excellent product reliability flexicle copper clad laminate producing apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067173U (en) * 1973-10-24 1975-06-16
JPH0880572A (en) * 1994-09-12 1996-03-26 Tanita Haujingu Wear:Kk Method and apparatus for bonding metal plate and film
JPH09235011A (en) * 1996-02-29 1997-09-09 Hitachi Constr Mach Co Ltd Meandering adjustment device of belt conveyor
JP2000313062A (en) * 1999-04-30 2000-11-14 Fuji Kikai Kogyo Kk Dry laminator
JP2006240117A (en) * 2005-03-04 2006-09-14 Toray Ind Inc Method for producing heat resistant, flexible metal laminated plate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5067173U (en) * 1973-10-24 1975-06-16
JPH0880572A (en) * 1994-09-12 1996-03-26 Tanita Haujingu Wear:Kk Method and apparatus for bonding metal plate and film
JPH09235011A (en) * 1996-02-29 1997-09-09 Hitachi Constr Mach Co Ltd Meandering adjustment device of belt conveyor
JP2000313062A (en) * 1999-04-30 2000-11-14 Fuji Kikai Kogyo Kk Dry laminator
JP2006240117A (en) * 2005-03-04 2006-09-14 Toray Ind Inc Method for producing heat resistant, flexible metal laminated plate

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101492457B1 (en) 2013-03-27 2015-02-12 주식회사 이녹스 Excellent product reliability flexicle copper clad laminate producing apparatus

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