JP2009066577A - Ultraviolet ray irradiation apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultraviolet ray irradiation apparatus which can be used as a windowed irradiation type or a direct irradiation type. <P>SOLUTION: A lamp house 15A is composed by detachably combining a first housing body 2, in which a dielectric barrier discharge lamp 1 is housed and power is supplied to the dielectric barrier discharge lamp so that the dielectric barrier discharge lamp discharges electricity and emits light, with a second housing body 8 in which a window material 7 for transmitting ultraviolet rays to be emitted from the dielectric barrier discharge lamp is housed so that the window material is positioned adjacently to the front position of the ultraviolet ray emitting surface of the dielectric barrier discharge lamp. A distance between an installation plane of the lamp house composed by combining the first and second housing bodies with each other and the window material of the second housing body is made equal to the distance between the installation plane of the first housing body, when only the first housing body is installed without being combined with the second housing body, and the ultraviolet ray emitting surface of the dielectric barrier discharge lamp. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an ultraviolet irradiation device.

  Conventionally, an excimer lamp has been widely used as an ultraviolet light source in an optical cleaning apparatus for dry cleaning a liquid crystal substrate, a printed wiring board, and the like.

  The excimer lamp has a single wavelength of 172 nm by applying a high frequency voltage to a quartz glass tube filled with an excimer-generating gas and discharging the excimer-generating gas into an excimer (abbreviation of excited dimmer) state by discharging within the tube. Dielectric barrier discharge lamps that emit ultraviolet rays are used.

By using such a dielectric barrier discharge lamp and irradiating ultraviolet rays with ultraviolet rays having a wavelength of 172 nm in the air atmosphere, oxygen in the air can be decomposed to generate active oxygen. The active oxygen can remove the organic compound by generating a carbon dioxide gas (CO ₂ ), water (H ₂ O), or the like when the organic compound whose bond is broken reacts with the active oxygen. Due to these characteristics, the dielectric barrier discharge lamp is widely used as an ultraviolet light source of a light cleaning device.

  By the way, the 172 nm ultraviolet light emitted from the dielectric barrier discharge lamp used in the optical cleaning device is easily attenuated by oxygen. Therefore, in the light cleaning apparatus, as described in Japanese Patent Application Laid-Open No. 2001-135279 (Patent Document 1), a dielectric barrier discharge lamp is housed in a lamp house in which a window material is installed on an ultraviolet emission window. Then, the inside of the lamp house is purged with nitrogen or flowed to allow the ultraviolet light emitted from the dielectric barrier discharge lamp to reach the window material without being attenuated by oxygen, and is emitted outside the lamp house through the window material. In general, an irradiation type with a window configured to effectively irradiate an object to be irradiated, which is placed close to the outside of the irradiator, with ultraviolet light of 172 nm and to perform optical cleaning is generally used. In the case of this irradiation type light cleaning device with a window, the distance between the irradiation window in the atmosphere and the object to be irradiated is shortened to, for example, 3 mm or less so that ultraviolet rays are not greatly attenuated by the influence of oxygen. However, light irradiation is performed.

  On the other hand, as an ultraviolet irradiation device employed in a light cleaning device, a direct irradiation type in which a dielectric barrier discharge lamp is arranged in the atmosphere without using a window material is also known. In this direct irradiation type ultraviolet irradiation device, a dielectric barrier discharge lamp is used to irradiate an irradiated object before the ultraviolet light emitted from the dielectric barrier discharge lamp is attenuated by oxygen in the atmosphere. It is necessary to make the structure which can approach the distance of the ultraviolet emission surface and the object to be irradiated as close as the irradiation type with a window.

The irradiation type with window and direct irradiation type ultraviolet irradiation device will be compared. (1) The type with window is characterized in that (a) the irradiation range of ultraviolet rays is wide, (b) the peak illuminance is low, and (c) the damage received by the secondary product such as particles is small. (2) The direct irradiation type is characterized in that (a) the irradiation width is narrow, (b) the peak illuminance is high, and (c) the damage received by the secondary product such as particles is large. As described above, the characteristics of the irradiation type with window and the direct irradiation type have advantages and disadvantages. For this reason, in the market, it is necessary to properly use the irradiation type with window and the direct irradiation type according to the application and performance.
JP 2001-135279 A

  The present invention has been made in view of the above-described problems of the prior art, and an object of the present invention is to provide an ultraviolet irradiation apparatus that can be used as a windowed irradiation type or a direct irradiation type.

  According to the present invention, there is provided a first housing that houses a dielectric barrier discharge lamp, supplies power to the dielectric barrier discharge lamp and emits discharge light, and a window material that transmits ultraviolet rays emitted from the dielectric barrier discharge lamp. An ultraviolet irradiation apparatus comprising a lamp house that is detachably combined with a second storage body that is stored so as to be positioned close to the front position of the ultraviolet emission surface of the dielectric barrier discharge lamp, The distance D2 between the installation surface of the lamp house and the window material of the second storage body in a state where the storage body and the second storage body are combined is the first storage body except for the second storage body. It is characterized by having a structure that is equal to the distance D1 between the installation surface when the single storage body is installed and the ultraviolet emission surface of the dielectric barrier discharge lamp.

  According to the present invention, the first storage body and the second storage body can be combined to be used as an irradiation type ultraviolet irradiation device with a window. On the other hand, except for the second storage body, the first storage body can be used. By installing a single unit, it can be used as a direct irradiation type ultraviolet irradiation device, and by setting D1 = D2, it can be used as an irradiation type with a window or as a direct irradiation type. The distance from the ultraviolet emission surface to the object can be made almost equal, and the irradiation type with window and the direct irradiation type can be used properly according to the application and performance. At the same time, in manufacturing, one type of product can be applied to both the irradiation type with window and the direct irradiation type ultraviolet irradiation device, and the manufacturing cost can be reduced.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  (First Embodiment) An ultraviolet irradiation apparatus according to a first embodiment of the present invention will be described with reference to FIGS. Reference numeral 1 denotes an excimer dielectric barrier discharge lamp that discharges and emits ultraviolet light. An excimer-generating gas made of a rare gas such as xenon or krypton is sealed inside an airtight container 1A having an elongated tubular shape made of an ultraviolet light transmissive material. A configuration in which an internal electrode (not shown) is installed in the central axis portion of the hermetic container 1 over the whole area in the interaxial direction, and the outer electrode 1B is in close contact with the outer surface of the hermetic container 1A over a semicircular and almost entire length. It is. Both ends of the dielectric barrier discharge lamp 1 are supported by being suspended from the inner top surface of the first housing 2 by the support member 3. By applying a high voltage between the external electrode 1B and an internal electrode (not shown) to the dielectric barrier discharge lamp 1, the excimer generation gas inside the hermetic vessel 1A is excited to cause discharge. Ultraviolet rays are generated and emitted from the lower surface side.

  The first storage body 2 is a box having an open bottom surface, and includes support portions 41 and 42 located at both ends of the lamp 1, side walls 51 and 52 located on both sides parallel to the lamp axis, and the top plate 6. It is configured. The vertical width W1 of the side walls 51 and 52 is made smaller than the vertical width W2 of the support portions 41 and 42 so that the irradiated object transferred in the direction perpendicular to the lamp axis can approach the lower surface 1C of the dielectric barrier discharge lamp 1. It is.

  Further, with the dielectric barrier discharge lamp 1 attached, the lower surface 1C, which is the ultraviolet emission surface of the dielectric barrier discharge lamp 1, and the lower edge surfaces 41A of the support portions 41, 42 of the first storage body 2, respectively. , 42A is set to a height difference D1, and the lower surface 1C of the dielectric barrier discharge lamp 1 is D1 more than the lower edge surfaces 41A, 42A of the support portions 41, 42 of the first housing 2 respectively. It is set to be supported at a position recessed in the box.

  The second storage body 8 that supports the window member 7 includes side walls 91 and 92 on both sides parallel to the lamp axis, support leg portions 101 and 102 on both ends perpendicular to the lamp axis, and a window member in which the window member 7 is fitted. It is comprised by the support part 11 at the box which an upper surface opens. The window material 7 is fitted into a window 12 that is formed in the window material support portion 11 and is elongated in the lamp axis direction. The difference in height between the lower edge surfaces 101A and 102A of the support leg portions 101 and 102 at both ends and the lower surface 7A of the window member 7 is D2, which is substantially the same as D1. The height difference W3 between the upper edge surfaces 101B, 102B of each of the support legs 101, 102 and the upper edge surfaces 91A, 92A of each of the side walls 91, 92 is set to the same dimension as W2-W1.

  The combination of the 1st storage body 2 and the 2nd storage body 8 of the said structure changes with whether the lamp house of an ultraviolet irradiation device is made into the irradiation type with a window, or a direct irradiation type. When used as an irradiation type with a window, as shown in FIGS. 1 and 2, the first housing 2 is used as a lamp house 15 </ b> A having a structure assembled on the upper surface side of the second housing 8. In this case, since the dimension of W3 = W2−W1 is set, the lower edge surfaces 41A and 42A of the support portions 41 and 42 of the first storage body 2 are respectively connected to the support leg portions 101 and 42 of the second storage body 8. By being placed in contact with the upper edge surfaces 101B and 102B of each 102, a lamp house 15A with a window as an assembly of the first and second storage bodies 2 and 8 is assembled. In this type of lamp house 15A with a window, the dielectric barrier discharge lamp 1 is lit and discharged to emit ultraviolet rays, and is emitted downward through the window member 7 so that the lamps between the support legs 101 and 102 at both ends are lamps. By irradiating the irradiated object in a direction perpendicular to the axis (perpendicular to the paper surface in FIGS. 1 and 2), the irradiated object is irradiated with ultraviolet rays that are transmitted through the window member 7 and light-washed. be able to.

  When used as the direct irradiation type, only the first housing 2 is used as the lamp house 15B as shown in FIG. Then, the dielectric barrier discharge lamp 1 is discharged to emit ultraviolet rays, and the irradiated object is transferred between the support portions 41 and 42 at both ends in a direction perpendicular to the lamp axis (direction perpendicular to the paper surface in FIG. 3). By doing so, the object to be irradiated can be directly irradiated with ultraviolet rays emitted from the lower surface of the dielectric barrier discharge lamp 1 to be washed with light.

  According to the ultraviolet irradiation apparatus of the present embodiment, the first storage body 2 that stores the dielectric barrier discharge lamp 1 and the second storage body 8 in which the window member 7 is fitted can be combined. If the direct irradiation type is necessary, only the first storage body 2 is used alone as the lamp house 15B, and if the irradiation type with a window is necessary, the second storage body 8 is combined with the first storage body 2. The lamp house 15A having the structure can be used, and the distances D1 and D2 at which ultraviolet rays are attenuated by oxygen in the atmosphere can be shortened to a distance of 3 mm or less so that the influence is not great. .

  (Second Embodiment) An ultraviolet irradiation apparatus according to a second embodiment of the present invention will be described with reference to FIGS. In addition, about the element which is common in 1st Embodiment, a common code | symbol is attached | subjected and demonstrated. In FIG. 6, reference numeral 16 denotes an apparatus housing, and the lamp house 15 </ b> A or the lamp house 15 </ b> B is housed and used in the apparatus housing 16. This configuration is common even in the first embodiment.

  The ultraviolet irradiation device of the second embodiment uses a dielectric barrier discharge lamp 1 similar to that of the first embodiment as an ultraviolet light source, and is supported by a lamp clip 3 on the inner top surface of the first housing 2. ing. The structure of the first storage body 2 is substantially the same as that of the first embodiment. However, by setting the vertical width W1 of the side walls 51, 52 on both sides parallel to the lamp axis to be smaller than that of the first embodiment, the lower edge surfaces 51A, 52A of the side walls 51, 52 respectively become dielectric barriers. The discharge lamp 1 is set to be positioned slightly higher than the lower surface 1C. Therefore, with respect to the height difference D1 between the lower edge surfaces 41A, 42A of the support portions 41, 42 of the first storage body 2 and the lower surface 1C of the dielectric barrier discharge lamp 1, the first storage body 2 also has the same height. The height difference D3 between the lower edge surfaces 41A, 42A of each of the support portions 41, 42 and the lower edge surfaces 51A, 52A of the respective side walls 51, 52 is D3> D1.

  The structure of the second storage body 8 is substantially the same as that of the first embodiment. However, the vertical width W3 of each of the side walls 91 and 92 of the second storage body 8 is slightly larger than in the first embodiment, with W3 = W2−W1.

  Even in the ultraviolet irradiation device of the second embodiment, the combination of the first storage body 2 and the second storage body 8 constitutes an irradiation type lamp house 15A with a window as the ultraviolet irradiation device or directly. It depends on whether the irradiation type lamp house 15B is constructed. When used as an irradiation type with a window, the first housing 2 is used as a lamp house 15A assembled on the upper surface side of the second housing 8 as shown in FIG. In this case, since the dimension of W3 = W2−W1 is set, the lower edge surfaces 41A and 42A of the support portions 41 and 42 of the first storage body 2 are respectively connected to the support leg portions 101 and 42 of the second storage body 8. As in the case of the first embodiment, a type with a window as an assembly of the first and second storage bodies 2 and 8 is provided by abutting and mounting on the upper edge surfaces 101B and 102B of each 102. The lamp house 15A is assembled. As shown in FIG. 6, the lamp house 15A is installed at a predetermined height in the apparatus housing 16 and used as an ultraviolet irradiation light source apparatus.

  In this type of lamp house 15A with a window, the dielectric barrier discharge lamp 1 is lit and discharged to emit ultraviolet rays, and is emitted downward through the window member 7 so that the lamps between the support legs 101 and 102 at both ends are lamps. By moving the irradiated object W in a direction perpendicular to the axis (direction perpendicular to the paper surface in FIG. 4), the irradiated object is irradiated with ultraviolet rays that are transmitted through the window member 7 and are washed with light. it can.

  When used as a direct irradiation type, as shown in FIGS. 5 and 6, the lamp house 15 </ b> B is constituted by only the first housing 2 and is housed in the apparatus housing 16 for use. Then, the dielectric barrier discharge lamp 1 is discharged to emit ultraviolet rays, and the irradiated object W is placed between the support portions 41 and 42 at both ends in a direction perpendicular to the lamp axis (direction perpendicular to the paper surface in FIG. 5). By transferring, the object to be irradiated can be directly irradiated with ultraviolet rays emitted from the lower surface of the dielectric barrier discharge lamp 1 and can be washed with light. In this case, the lower edge surfaces 51A and 52A of the side walls 51 and 52 are set to be slightly higher than the lower surface 1C that is the ultraviolet emission surface of the dielectric barrier discharge lamp 1 in this embodiment. Therefore, the lower surface 1C of the dielectric barrier discharge lamp 1 can be brought closer to the irradiated surface of the irradiated object W than in the case of the first embodiment, and ultraviolet irradiation with reduced attenuation due to oxygen can be performed. It becomes possible, and the efficiency of light washing can be improved.

  (Third Embodiment) An ultraviolet irradiation apparatus according to a third embodiment of the present invention will be described with reference to FIGS. 7 (a) and 7 (b). The feature of this embodiment is that the combined structure of the first and second storage bodies 2 and 8 is the same as that of the first and second embodiments. A feature of the present embodiment is that the height adjustment mechanism 17 of the dielectric barrier discharge lamp 1 is provided in the first housing 2 so that the height in the apparatus housing 16 can be adjusted. To do. That is, the upper part of the lamp house holding member 18 holding the lamp house 15A or 15B is supported by the support member 19 from the upper side of the housing top plate 20, and the support member 19 is supported with respect to the housing top plate 20, for example. The height adjustment member such as the stopper screw 21 can be adjusted up and down.

  Thereby, in the ultraviolet irradiation device of the third embodiment, as shown in FIG. 7A, the first housing 2 and the second housing 8 are combined to provide an irradiation type lamp house 15A with a window. , The distance between the window member 7 and the irradiated object W is adjusted by pulling up the support member 19 with the stopper screw 21. And when using it as the direct irradiation type lamp house 15B only with the 1st accommodating body 2, as shown in FIG.7 (b), the lower surface of the dielectric barrier discharge lamp 1 with respect to the to-be-irradiated object W is shown. It adjusts so that the supporting member 19 may be lowered | hung with the stopper screw 21 so that it may adjoin. Thus, according to the present embodiment, even when the first storage body 2 and the second storage body 8 are combined and used as an irradiation type lamp house 15A with a window, only the first storage body 2 is used. Even when used as a direct irradiation type lamp house 15B, the distance of the ultraviolet emission surface with respect to the irradiation object W can be easily adjusted.

  (Fourth Embodiment) An ultraviolet irradiation apparatus according to a fourth embodiment of the present invention will be described with reference to FIGS. The feature of the present embodiment lies in the holding structure of the dielectric barrier discharge lamp 1, and as shown in FIGS. 8 and 9, the dielectric barrier discharge lamp 1 is cooled by a conductor cooling block 22 that also serves as an external electrode. As shown in FIG. 9, the C-shaped clip 24 is fitted into and fixed to the cut grooves 23 provided at both ends of the cooling block 22 as shown in FIG. 9, and the dielectric barrier discharge lamp is fixed by the C-shaped clip 24. 1 is elastically held, and power is supplied from the outside through the cooling block 22 so that a high voltage is applied to the internal electrode in the dielectric barrier discharge lamp 1 to discharge the lamp. Thereby, the dielectric barrier discharge lamp 1 integrated with the cooling block 22 is attached to the top plate 6 of the first storage body 2 in the first embodiment and the second embodiment.

  According to the present embodiment, by adopting such a lamp mounting structure, no load is applied to the dielectric barrier discharge lamp 1, the occurrence of cracks in the dielectric barrier discharge lamp 1 can be suppressed, and the kerf 23 The outer surface of the dielectric barrier discharge lamp 1 is brought into close contact with the inner peripheral surface of the cooling block 22 also serving as an external electrode, with the C-shaped clip 24 fitted and fixed substantially flush with the dielectric barrier discharge lamp 1. There is an advantage that a high voltage can be applied.

Sectional drawing which shows the structure of the irradiation type with a window which combined the 1st storage body and the 2nd storage body of the ultraviolet irradiation device of the 1st Embodiment of this invention. The exploded perspective view of the irradiation type with a window of the ultraviolet irradiation device of the said 1st Embodiment. Sectional drawing which shows the structure of the direct irradiation type using only the 1st accommodating body of the ultraviolet irradiation device of the said 1st Embodiment. Sectional drawing which shows the structure of the irradiation type with a window which combined the 1st storage body and the 2nd storage body of the ultraviolet irradiation device of the 2nd Embodiment of this invention. Sectional drawing which shows the structure of the direct irradiation type using only the 1st accommodating body of the ultraviolet irradiation device of the said 2nd Embodiment. Sectional drawing cut | disconnected in the surface perpendicular | vertical to the lamp | ramp axis | shaft of the direct irradiation type | mold using only the 1st accommodating body of the ultraviolet irradiation device of the said 2nd Embodiment. Sectional drawing cut | disconnected by the surface perpendicular | vertical to the lamp axis | shaft of the irradiation type with a window of the ultraviolet irradiation device of the 3rd Embodiment of this invention, and sectional drawing cut | disconnected by the surface perpendicular | vertical to the lamp axis | shaft of a direct irradiation type. The front view and side view which show the lamp | ramp holding structure in the ultraviolet irradiation device of the 4th Embodiment of this invention. The disassembled perspective view which shows the lamp | ramp holding structure in the ultraviolet irradiation device of the said 4th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Dielectric barrier discharge lamp 1C Ultraviolet emission surface 2 1st accommodating body 3 Lamp holding member 41,42 Support part 41A, 42A Lower edge part 51,52 Side wall 51A, 52A Lower edge part 6 Top plate 7 Window material 8 Second Storage body 91,92 side plate 101,102 support leg portion 101A, 102A lower edge portion 101B, 102B upper edge portion 15A, 15B lamp house

Claims (2)

The dielectric barrier discharge lamp is housed, and a first housing body that supplies power to the dielectric barrier discharge lamp to discharge light and a window member that transmits ultraviolet rays emitted from the dielectric barrier discharge lamp includes the dielectric barrier. An ultraviolet irradiation device comprising a lamp house that is detachably combined with a second storage body that is stored so as to be positioned close to the front position of the ultraviolet emission surface of the discharge lamp,
The distance D2 between the installation surface of the lamp house and the window material of the second storage body in a state where the first storage body and the second storage body are combined, excluding the second storage body. An ultraviolet irradiation apparatus characterized by having a structure equal to a distance D1 between an installation surface when the single unit of the first storage body is installed and an ultraviolet emission surface of the dielectric barrier discharge lamp.   The distance D3 from the lower edge of the side surface through which the ultraviolet irradiation object in the first storage body passes is set to be larger than the distances D1 and D2 from the lower surface of the first storage body. The ultraviolet irradiation device described.

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