CN114005726B

CN114005726B - Ultraviolet irradiation device

Info

Publication number: CN114005726B
Application number: CN202111267699.4A
Authority: CN
Inventors: 柳生英昭; 今村笃史; 森学
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2020-09-01
Filing date: 2021-06-18
Publication date: 2022-06-03
Anticipated expiration: 2041-06-18
Also published as: CN114121595A; CN114005726A

Abstract

Provided is an ultraviolet irradiation device equipped with an excimer lamp that emits light having a central wavelength at a wavelength of 200nm to 230nm, and having a device structure with higher versatility. The ultraviolet irradiation device (100) is provided with: an excimer lamp (12) having a discharge vessel (13) in which a luminescent gas is sealed, and a pair of first electrodes (14) and second electrodes (15) which are arranged in contact with the discharge vessel (13) and which generate dielectric barrier discharge in the interior of the discharge vessel (13); and a case (11) which houses the excimer lamp (12) therein and has a light emission window for emitting light having a center wavelength of 200 to 230nm emitted from the excimer lamp (12), wherein the case is made of an insulating heat-resistant resin material, and the case forms a closed space for housing the excimer lamp.

Description

Ultraviolet irradiation device

The present application is a divisional application of an invention patent application having an application date of 2021, 18/06, application No. 202110675354.6 and an invention name of "ultraviolet irradiation device".

Technical Field

The present invention relates to an ultraviolet irradiation apparatus provided with an excimer lamp.

Background

Conventionally, in order to prevent the spread of infection caused by harmful microorganisms (bacteria, mold, etc.) or viruses, ultraviolet rays are irradiated to microorganisms or viruses suspended in a space and microorganisms or viruses adhering to various places such as a floor surface, a wall surface, and an object surface to inactivate them.

For example, patent document 1 discloses an ultraviolet irradiation device used for sterilization and deodorization of skin and the like. The excimer lamp mounted on the ultraviolet irradiation device includes an arc tube composed of a cylindrical outer tube and a cylindrical inner tube arranged along the tube axis of the outer tube, and an annular discharge space is formed between the outer tube and the inner tube. Further, an air suction/discharge fan for cooling the excimer lamp and a power supply unit for applying a high frequency and high voltage between an outer electrode disposed outside the arc tube and an inner electrode disposed inside the arc tube are provided.

Further, for example, patent document 2 discloses: as the light capable of sterilizing bacteria without damaging human cells, ultraviolet light having a wavelength of about 200nm (for example, excimer light having a wavelength of 207nm or 222 nm) can be used; this is safe for humans and enables UV sterilization of spaces and surfaces.

Documents of the prior art

Patent document

Patent document 1: japanese patent No. 6558376

Patent document 2: japanese patent No. 6025756

Disclosure of Invention

Problems to be solved by the invention

The discovery of ultraviolet rays that can inactivate harmful microorganisms or viruses without damaging human cells has led to the expectation of their use as an inactivation agent for microorganisms or viruses in a wide range of facilities (hospitals, sports facilities, theaters, eating houses, conference rooms, toilets, and the like) and vehicles (airplanes, trains, buses, and automobiles) that are used in human or animal commutes. However, the ultraviolet irradiation device described in patent document 1 is not a device structure having high versatility because the case structure thereof is likely to be large-sized.

Further, since the excimer lamp can adjust the wavelength characteristics (wavelength range) of the emitted light in accordance with the type of the discharge gas, it is possible to obtain the emitted light (ultraviolet light) having a center wavelength in the vicinity of a wavelength of 200nm by using an appropriate gas as the discharge gas. Specifically, by using krypton bromide (KrBr) gas, the emitted light having a central wavelength of 207nm can be obtained, and by using krypton chloride (KrCl) gas, the emitted light having a central wavelength of 222nm can be obtained.

However, when ultraviolet rays having a wavelength of less than 190nm are contained in the emitted light, ozone (O) may be generated₃). This is because, when ultraviolet rays having a wavelength of less than 190nm are irradiated into an oxygen-containing gas atmosphere, oxygen molecules are photolyzed to generate oxygen atoms, and ozone is generated by a bonding reaction between the oxygen molecules and the oxygen atoms. Therefore, when a specific excimer lamp is turned on in the atmospheric environment, a slight amount of ozone may be generated in the atmosphere when ultraviolet rays having a wavelength of less than 190nm are slightly emitted. In addition to the above, in consideration of the possibility of atmospheric discharge occurring between the electrodes when a high voltage is applied between the electrodes, and the possibility of atmospheric discharge occurring in a minute gap between the electrode and the discharge lamp, there is also a case where a slight amount of ozone is generated by the atmospheric discharge. The ozone may deteriorate organic materials such as resin and rubber.

Accordingly, an object of the present invention is to provide an ultraviolet irradiation device equipped with an excimer lamp that emits light having a central wavelength at a wavelength of 200nm to 230nm and having a device structure with higher versatility.

Means for solving the problems

In order to solve the above problem, an ultraviolet irradiation apparatus according to an aspect of the present invention includes: an excimer lamp having a discharge vessel in which a luminescent gas is sealed, and a pair of first and second electrodes which are arranged in contact with the discharge vessel and generate dielectric barrier discharge in the discharge vessel; and a case which houses the excimer lamp therein and has a light emission window for emitting light having a center wavelength of 200 to 230nm emitted from the excimer lamp, wherein the window is made of an insulating heat-resistant resin material.

Thus, by covering the excimer lamp with the heat-resistant resin case, the contents of the case are easily kept warm. This provides a relaxation effect of ultraviolet strain of the glass constituting the discharge vessel. In addition, when a small amount of oxygen exists around the excimer lamp, the oxygen may be subjected to ultraviolet rays emitted from the excimer lamp to generate ozone, but the inside of the case may be kept warm to promote thermal decomposition of ozone. Further, since the inside of the case is kept warm, it is not necessary to provide a mechanism for cooling the excimer lamp or the like in the case. Therefore, the size of the case structure can be suppressed, and a device structure with higher versatility can be obtained.

Further, the ultraviolet irradiation apparatus may further include: a first conductor electrically connected to the first electrode and provided to penetrate the case; and a second conductor electrically connected to the second electrode and provided to penetrate the case; the first conductor and the second conductor are electrically connected to a power supply unit for supplying power to the excimer lamp outside the case, and the case forms a closed space for accommodating the excimer lamp.

By providing the power supply unit outside the case in this manner, even when ozone is generated in a small amount around the excimer lamp, it is possible to prevent the ozone from deteriorating the components of the power supply unit. Further, since the electrical connection with the power supply unit can be achieved via the conductor provided through the case, a device structure with higher versatility can be achieved. Further, since the excimer lamp is accommodated in the case, the lamp can be replaced by replacing the case itself, and the device structure is highly convenient.

In the ultraviolet irradiation device, the first electrode and the second electrode may be fixed in contact with the housing; the connection between the first electrode and the first conductor is provided on a surface of the case, which the first electrode abuts; the connection between the second electrode and the second conductor is provided on a surface of the case where the second electrode abuts.

In this case, the electrical connection in the case can be configured without using a conductive member (wire). In the case of using an electric wire for electrical connection, it is assumed that the material covering the electric wire is deteriorated by ozone, and there is a possibility of occurrence of short circuit and electric leakage. Further, by providing the connection terminal on the contact surface between the case and the electrode, the electrical connection between the electrode and the power supply unit can be secured while maintaining the closed space in the case. Further, it is possible to more appropriately prevent the ultraviolet rays generated in the case from leaking through the through-hole in which the connection terminal is formed.

Further, in the ultraviolet irradiation device, the first conductor may include a first connection terminal electrically connected to the first electrode and provided to penetrate the case, and a first conductive member connected to the first connection terminal; the second conductor includes a second connection terminal electrically connected to the second electrode and provided to penetrate the case, and a second conductive member connected to the second connection terminal; the first connection terminal and the second connection terminal are electrically connected to a power supply unit for supplying power to the excimer lamp, outside the case, via the first conductive member and the second conductive member.

In this way, when the connection terminal is used, the manufacturing is easy, and a power supply structure in which the case is penetrated and connected to the electrode can be easily realized.

In the ultraviolet irradiation device, the first electrode and the second electrode may be fixed in contact with the case; the first connection terminal is provided on a surface of the case against which the first electrode abuts; the second connection terminal is provided on a surface of the case, the surface being in contact with the second electrode.

In this case, the electrical connection in the case can be made without using a conductive member (wire). When the electric wire is used for electrical connection, if the material covering the electric wire is deteriorated by ozone, there is a possibility that short-circuit and electric leakage occur. Further, by providing the connection terminal on the contact surface between the case and the electrode, the electrical connection between the electrode and the power supply unit can be secured while maintaining the closed space in the case. Further, it is possible to more appropriately prevent the ultraviolet rays generated in the case from leaking through the through-hole in which the connection terminal is formed.

In the ultraviolet irradiation device, the first connection terminal and the second connection terminal may be screw members for fixing the first electrode and the second electrode to the case, respectively.

In this case, the connection terminal can also serve as a mechanical connection between the case and the electrode (fixation of the electrode).

In the ultraviolet irradiation device, the case may include an upper frame portion and a lower frame portion, and a closed space for accommodating the excimer lamp may be formed by the upper frame portion and the lower frame portion; the light emitting window is formed in the upper frame portion; the first electrode and the second electrode are fixed to the lower frame portion, respectively.

In this case, the ultraviolet irradiation device can be easily manufactured and assembled.

Further, in the ultraviolet irradiation device, the power supply unit may be disposed on a side of the case opposite to a side on which the light emission window is formed.

In this case, the structure can be made most compact, easy to handle, and versatile.

In the ultraviolet irradiation device, the power supply unit may include an inverter and a cooling mechanism for cooling the inverter.

In this case, the power supply unit can be efficiently cooled.

Further, in the ultraviolet irradiation device, an optical filter may be provided in the light emission window to block transmission of the UVC wave on the longer wavelength side than 230 nm.

In this case, an ultraviolet irradiation device that emits light in a wavelength range with little adverse effect on the human body can be provided.

In the ultraviolet irradiation device, the heat-resistant resin material may be any of Polytetrafluoroethylene (PTFE), ethylene-tetrafluoroethylene copolymer (ETFE), Perfluoroalkoxyalkane (PFA), polyether imide (PEI), glass fiber-containing polyphenylene sulfide (PPS-GF), Liquid Crystal Polymer (LCP), and glass fiber-containing polybutylene terephthalate (PBT-GF).

In this case, the case can be made of a resin material which is less deteriorated by ultraviolet rays and sufficiently ensures heat resistance (100 ℃ or higher). Further, not only deterioration resistance and heat resistance to ultraviolet rays, but also light-shielding properties and processability to UVC waves are considered, Polyetherimide (PEI) is most easily handled, and is preferable.

Effects of the invention

According to one aspect of the present invention, an ultraviolet irradiation apparatus having a device structure with higher versatility can be provided, the ultraviolet irradiation apparatus being equipped with an excimer lamp that emits light having a center wavelength at a wavelength of 200nm to 230 nm.

Drawings

Fig. 1 is an external view of a light source unit provided in the ultraviolet irradiation device according to the present embodiment.

Fig. 2 is a schematic view of an internal structure of a light source unit provided in the ultraviolet irradiation device.

FIG. 3 shows the results of UV-VIS transmittance measurements of Polyetherimides (PEI).

Fig. 4 is a schematic diagram showing the structure of the ultraviolet irradiation apparatus.

Description of the reference numerals

11 … a box body; 11a … upper frame portion; 11b … lower frame portion; 11c … opening part; 11d … window component; 12 … excimer lamp; 13 … a discharge vessel; 14 … a first electrode; 15 … a second electrode; 21 … a support portion; 22 … power supply components; 23 … connection part; 24 … cooling the component; 25 … shielding part; 26 … fixed part; 100 … ultraviolet irradiation device; 110 … light source part; 120 … power supply section.

Detailed Description

Embodiments of the present invention are described below with reference to the drawings.

Fig. 1 is an external view of a light source unit 110 as an ultraviolet irradiation device according to the present embodiment. Fig. 2 is a schematic view of the internal structure of the light source unit 110.

As shown in fig. 1, the light source unit 110 includes a case 11 including an upper frame portion 11a and a lower frame portion 11 b. As shown in fig. 2, the light source unit 110 includes an excimer lamp 12 housed inside the housing 11. The excimer lamp 12 emits light having a center wavelength at a wavelength of 200nm to 230 nm.

The case 11 is made of an insulating heat-resistant resin material. In the present embodiment, the case 11 is made of Polyetherimide (PEI).

The material of the case 11 may be any resin material as long as it has sufficient heat resistance (100 ℃ or higher) with little deterioration to ultraviolet rays, and may be, for example, Polytetrafluoroethylene (PTFE), ethylene-tetrafluoroethylene copolymer (ETFE), Perfluoroalkoxyalkane (PFA), Polyetherimide (PEI), polyphenylene sulfide (PPS-GF) containing glass fibers, Liquid Crystal Polymer (LCP), polybutylene terephthalate (PBT-GF) containing glass fibers, or the like.

In order to verify the ultraviolet deterioration in detail with respect to ultraviolet rays having a wavelength of 200 to 230nm, it was confirmed that the illuminance was 15mW/cm using a KrCl excimer lamp emitting light having a peak wavelength of 222nm²Particularly, little UV deterioration was observed in Polytetrafluoroethylene (PTFE), Perfluoroalkoxyalkane (PFA) and Polyetherimide (PEI), and it was confirmed that the ultraviolet ray irradiation of (1) is preferable as a material for the case of the present invention.

Further, if an ultraviolet irradiation apparatus for inactivating microorganisms and viruses without damaging human cells is considered, a case for housing a light source (for example, an excimer lamp) is preferably made of a resin material having a low transmittance of UVC waves which damages human cells. For example, a resin material having almost no transmittance (for example, a transmittance of 5% or less, more preferably 1% or less) of UVC waves at a longer wavelength side than 230nm is preferable.

Therefore, it was confirmed that the transmission of UVC wave was high, and Polytetrafluoroethylene (PTFE) and Perfluoroalkoxyalkane (PFA) having high resistance to ultraviolet deterioration were confirmed to have a transmission of UVC wave of about several% to several tens% at a predetermined thickness. Therefore, the resin material may leak harmful light through the case, and if there is a fear in use, it is necessary to take a separate light shielding measure.

On the other hand, when Polyetherimide (PEI) was used as a material of the case, it was confirmed that transmission of UVC waves could be effectively suppressed to a considerable extent. FIG. 3 shows the results of UV-VIS transmittance measurements on a plate-shaped polyetherimide material having a thickness of 1 mm. As is clear from FIG. 3, it is understood that light having a wavelength of 400nm or less is hardly transmitted.

From the above viewpoint, Polyetherimide (PEI) is most preferably used as a material of the case.

The casing 11 is formed of an upper frame portion 11a and a lower frame portion 11b to form a closed space into which no outside air flows, and has a structure for partitioning the inside of the casing 11 from the outside of the casing 11. The excimer lamp 12 is accommodated in the closed space formed inside the housing 11 and covered by the housing 11.

An opening 11c serving as a light exit window is formed in the upper frame portion 11 a. A window member 11d made of, for example, quartz glass is provided in the opening 11 c. In addition, an optical filter or the like for blocking unnecessary light may be provided in the opening 11 c. The light extraction surface of the excimer lamp 12 is disposed to face the light emission window.

In fig. 2, the light source unit 110 includes a plurality of (3) excimer lamps 12, but the number of excimer lamps 12 is not particularly limited.

The excimer lamp 12 includes a discharge vessel 13 having a straight tube shape and hermetically sealed at both ends. The discharge vessel 13 may consist of quartz glass, for example. Further, an inert gas and a halogen are sealed as a luminescent gas in the discharge vessel 13. In the present embodiment, a KrCl excimer lamp using krypton chloride (KrCl) gas is used. In this case, the center wavelength of the resulting radiated light is 222 nm.

Further, bromine (Br) may be used as the halogen. In the case of a KrBr excimer lamp, the center wavelength of the resulting radiant light is 207 nm.

A pair of electrodes (a first electrode 14 and a second electrode 15) is disposed in contact with the outer surface of the discharge vessel 13. As shown in fig. 2, the first electrode 14 and the second electrode 15 are disposed on the side surface (+ Z-direction surface) of the discharge vessel 13 opposite to the light extraction surface, so as to be spaced apart from each other in the tube axis direction (Y direction) of the discharge vessel 13.

And, the discharge vessel 13 is in contact with and arranged across these two

electrodes

14, 15. Specifically, grooves are formed on the two

electrodes

14, 15, and the discharge vessel 13 is embedded in the grooves of the

electrodes

14, 15.

One of the pair of electrodes (for example, the first electrode 14) is a high-voltage side electrode, and the other electrode (for example, the second electrode 15) is a low-voltage side electrode (ground electrode). By applying a high-frequency voltage between the first electrode 14 and the second electrode 15, an excimer light having a central wavelength of 222nm is emitted from the light extraction surface of the excimer lamp 12, while an excimer dimer is generated in the internal space of the discharge vessel 13.

In the present embodiment, the surfaces of the pair of

electrodes

14 and 15 opposite to the surfaces on which the grooves are formed are abutted and fixed to the surface of the lower frame portion 11b (the surface facing the light exit window of the upper frame portion 11 a), and thus the light extraction surface of the excimer lamp 12 is disposed so as to face the light exit window. Therefore, the light emitted from the excimer lamp 12 is emitted from the light source unit 110 through the light emission window.

Here, the

electrodes

14 and 15 may be made of a metal member having reflectivity with respect to light emitted from the excimer lamp 12. In this case, light emitted from the discharge vessel 13 in the + Z direction can be reflected and made to travel in the-Z direction.

The opening 11c serving as the light exit window may be provided with an optical filter as described above. The optical filter may be, for example, a wavelength selective filter that transmits light in a wavelength range of 190nm to 237nm (more preferably, light in a wavelength range of 190nm to 230 nm) with little adverse effect on the human body and cuts off light in other UVC wavelength ranges.

As the wavelength selective filter, for example, a filter having a wavelength of HfO₂Layer and SiO₂An optical filter comprising a dielectric multilayer film formed by the layers.

In addition, as the wavelength selective filter, a filter having a structure made of SiO₂Layer and Al₂O₃An optical filter comprising a dielectric multilayer film formed by the layers.

However, the use of the optical filter having the optical filter composed of HfO as the wavelength selective filter₂Layer and SiO₂In the case of an optical filter having a dielectric multilayer film formed of layers, a multilayer film made of SiO is used₂Layer and Al₂O₃The total number of layers can be reduced as compared with the case of an optical filter in which a dielectric multilayer film is formed. Therefore, the transmittance of ultraviolet rays at an incident angle of 0 ° can be improved.

By providing the optical filter at the light exit window in this way, even when harmful light is emitted from the excimer lamp 12 to a human being, the light can be reliably prevented from leaking out of the housing 11.

The first electrode 14 and the second electrode 15 are electrically connected to a power supply unit for supplying power to the excimer lamp 12. In the present embodiment, the power supply unit is disposed outside the case 11.

Specifically, the light source unit 110 includes a first connection terminal 16a as a metal member electrically connected to the first electrode 14 and penetrating the case 11, and a first conductive member (wire) 17a electrically connecting the first connection terminal 16a and the power supply unit, as a first connection member (first conductor) electrically connecting the first electrode 14 and the power supply unit.

The first connection terminal 16a is provided on a contact surface of the case 11 with the first electrode 14, and may be a screw member that penetrates the contact surface and fixes the first electrode 14 to the case 11. That is, the screw head of the first connection terminal 16a is provided outside the case 11 and on a surface of the case 11 against which the first electrode 14 abuts. One end of the first conductive member 17a is connected to a screw head of a first connection terminal 16a provided outside the case 11, and the other end is connected to a power supply unit. Thus, the first conductive member 17a electrically connects the first connection terminal 16a and the power supply unit outside the case 11, and the electric connection inside the case 11 is made without using an electric wire.

Similarly, the light source unit 110 includes a second connection terminal 16b electrically connected to the second electrode 15 and penetrating the case 11, and a second conductive member (wire) 17b electrically connecting the second connection terminal 16b and the power supply unit, as a second connection member (second conductor) electrically connecting the second electrode 15 and the power supply unit. The second connection member has the same structure as the first connection member.

The first conductive member 17a and the second conductive member 17b are provided with a connector 18 that is detachable from the power supply unit. The first connection terminal 16a and the second connection terminal 16b can be electrically connected to the power supply unit easily by the connector 18.

With the above configuration, the light source unit 110 can be easily attached to and detached from the power supply unit by attaching and detaching the connector 18. Therefore, when the excimer lamp 12 housed in the housing 11 is to be replaced, the lamp can be replaced by replacing the housing 11 itself, and the device structure is highly convenient.

Fig. 4 is a schematic diagram showing a configuration of the ultraviolet irradiation device 100 including a power supply unit.

As shown in fig. 4, the ultraviolet irradiation device 100 includes the light source unit 110 and the power supply unit 120.

The power supply unit 120 includes a support unit 21, a power supply member 22, a connection unit 23, and a cooling member (cooling mechanism) 24. The power supply member 22, the connection portion 23, and the cooling member 24 are disposed on the side of the support portion 21 opposite to the side on which the case 11 is disposed, and are covered with a shielding portion 25.

Here, the power supply section 22 includes an inverter to which power from a power supply is supplied. The connecting portion 23 connects the first conductive member 17a and the second conductive member 17b (not shown in fig. 4). The cooling part 24 is a part for cooling the power supply part 22, and may be a heat sink, for example. The cooling mechanism is not limited to the cooling member 24 described above, and may be a cooling fan, for example.

The power supply unit 120 is fixed to the lower frame portion 11b of the case 11 by the fixing portion 26 via the support portion 21, and is disposed on the back surface side (the side opposite to the light emission window) of the case 11 of the light source unit 110.

As described above, the ultraviolet irradiation device 100 of the present embodiment includes: a light source unit 110 having a housing 11 and an excimer lamp 12. The case 11 is made of an insulating heat-resistant resin material. The housing 11 accommodates the excimer lamp 12 therein, and has a light emission window for emitting light having a center wavelength of 200 to 230nm emitted from the excimer lamp 12. A power supply unit 120 for supplying power to the excimer lamp 12 is disposed outside the housing 11. The first electrode 14 of the excimer lamp 12 and the power supply unit 120 are electrically connected by a first connecting member (first conductor) formed to penetrate the housing 11, and the second electrode 15 of the excimer lamp 12 and the power supply unit 120 are electrically connected by a second connecting member (second conductor) formed to penetrate the housing 11.

Specifically, the first connection member includes a first connection terminal 16a provided to penetrate the case 11 and electrically connected to the first electrode 14, and a first conductive member 17a electrically connecting the first connection terminal 16a and the power supply unit 120 outside the case 11. Similarly, the second connection member includes a second connection terminal 16b electrically connected to the second electrode 15 and provided to penetrate the case 11, and a second conductive member 17b electrically connecting the second connection terminal 16b and the power supply unit 120 to each other outside the case 11.

Thus, the housing 11 made of a heat-resistant resin material is configured to cover the excimer lamp 12, and has a structure in which the inside of the housing 11 is partitioned from the outside of the housing 11. The power supply unit 120 is disposed outside the case 11.

Even when ultraviolet rays having a wavelength of less than 190nm are slightly contained in the emitted light from the excimer lamp 12, if oxygen exists around the excimer lamp, the ultraviolet rays act on the oxygen to generate ozone. By covering the excimer lamp 12 with the housing 11 made of a heat-resistant resin material and disposing the power supply unit 120 outside the housing 11, it is possible to prevent the electronic components constituting the power supply unit 120 from being deteriorated by ozone even when ozone is generated around the excimer lamp 12.

The excimer lamp 12 is covered with the housing 11, and a closed space into which no outside gas flows is formed in the housing 11. Therefore, during the lighting of the excimer lamp 12, the temperature in the housing 11 rises due to the heat emitted from the excimer lamp 12 itself, and the housing 11 is made of a heat-resistant resin material, so that the heat in the housing 11 is not easily dissipated, and the excimer lamp 12 can be easily kept warm.

The half-life of ozone becomes shorter as the temperature rises. Therefore, the inside of the case 11 is kept warm, and the ozone generated in the case 11 can be easily thermally decomposed.

Further, the quartz glass constituting the discharge vessel 13 may be strained by ultraviolet irradiation for a long time. It is expected that such strain in the silica glass is relaxed by heat. That is, by adopting a structure in which heat in the chamber 11 is not easily dissipated and the excimer lamp 12 is easily kept warm, the effect of alleviating the ultraviolet strain of the quartz glass constituting the discharge vessel 13 can be expected.

On the other hand, the power supply unit 120 includes an inverter or the like for applying a high frequency and high voltage to the excimer lamp 12, and when the lighting operation of the excimer lamp 12 is continued, the power supply unit 120 is likely to generate heat. Therefore, a cooling mechanism (cooling member 24) for cooling the power supply unit 120 is provided.

In this case, when the excimer lamp and the power supply unit are disposed in the same space (including a space communicating with each other), the excimer lamp is cooled by a cooling mechanism for cooling the power supply unit. When the excimer lamp is supercooled, strain due to ultraviolet rays tends to remain in the quartz glass constituting the discharge vessel.

In contrast, in the present embodiment, since the power supply unit 120 is disposed outside the housing 11, only the power supply unit 120 can be appropriately cooled by the cooling mechanism. In this way, the lighting drive can be appropriately continued without overcooling the excimer lamp 12.

Further, since the ultraviolet irradiation device 100 of the present embodiment can be electrically connected to the power supply unit 120 via the

connection terminals

16a and 16b provided to penetrate the housing 11, a small and versatile device structure can be realized. Further, the power supply structure can be easily manufactured in terms of manufacturing, and can be easily connected to the

electrodes

14 and 15 through the case 11.

Further, by providing the

connection terminals

16a and 16b on the contact surfaces of the case 11 and the

electrodes

14 and 15, the electrical connection inside the case 11 can be made to a structure not using a conductive member (wire). Therefore, in the case 11, the material covering the electric wire can be prevented from being deteriorated by ozone, and the problems of short circuit and electric leakage can be avoided. Further, the electrical connection between the

electrodes

14 and 15 and the power supply unit 120 can be secured while maintaining the closed space in the case 11.

Further, by using the

connection terminals

16a and 16b as screw members for fixing the

electrodes

14 and 15 to the case 11, the

connection terminals

16a and 16b can also be used for mechanical connection (electrode fixing) between the case 11 and the

electrodes

14 and 15.

Further, by disposing the power supply unit 120 on the opposite side of the case 11 from the surface on which the light exit window is formed, it is easy to handle the most compact configuration, and a versatile structure can be obtained.

Further, at this time, since the

connection terminals

16a and 16b are provided on the surfaces of the case 11 which the

electrodes

14 and 15 abut against, the

connection terminals

16a and 16b can be arranged at the positions closest to the power supply unit 120, and the

conductive members

17a and 17b can be easily led around.

The excimer lamp 12 further includes: a first electrode 14 and a second electrode 15 which are arranged apart from each other in a first direction (Y direction) and have grooves formed on respective side surfaces so as to extend in the first direction; and a discharge vessel 13 partially fitted into the concave grooves formed in both the first electrode 14 and the second electrode 15, and arranged to extend in the first direction so as to straddle the first electrode 14 and the second electrode 15. With this structure, since discharge can be performed by the discharge vessel 13 of only the straight tube type, the excimer lamp can be significantly downsized compared to, for example, an excimer lamp having a discharge vessel of a double tube structure.

As described above, the ultraviolet irradiation apparatus 100 according to the present embodiment can be an ultraviolet irradiation apparatus having a small-sized and highly versatile apparatus structure, which is equipped with an excimer lamp that emits light having a central wavelength at a wavelength of 200nm to 230 nm. According to the ultraviolet irradiation device of the present invention, it is possible to provide natural sterilization by ultraviolet rays and inactivation of viruses without causing erythema and keratitis on the skin and eyes of humans and animals. In particular, unlike conventional ultraviolet light sources, the ultraviolet light source can be installed in a manned environment indoors or outdoors by taking advantage of the characteristic that it can be used in the manned environment, and can irradiate the entire environment, thereby providing air and virus inhibition and sterilization on the surface of the installation member in the environment. This corresponds to the target 3 "of sustainable development targets (SDGs) leading in the united nations, ensuring healthy lives of people of all ages and promoting welfare, and also, to the target 3.3" by 2030, it eradicates infectious diseases such as aids, tuberculosis, malaria and overlooked tropical diseases, and also contributes greatly to hepatitis, water-system infectious diseases and other infectious diseases.

In the above embodiment, the case where the power supply structure from the power supply unit 120 to the

electrodes

14 and 15 is a structure in which the

connection terminals

16a and 16b and the

conductive members

17a and 17b are combined has been described. However, the structure of feeding power from the power supply unit 120 to the

electrodes

14 and 15 is not limited to the above. For example, the

electrodes

14 and 15 and the power supply unit 120 may be directly connected to each other by a conductive member (wire) provided through the case 11. That is, the first connecting member (first conductor) and the second connecting member (second conductor) may be constituted only by the conductive member.

Claims

1. An ultraviolet irradiation apparatus, characterized in that,

the disclosed device is provided with:

an excimer lamp having: a discharge vessel filled with a luminescent gas; and a pair of first and second electrodes disposed in contact with the discharge vessel to generate dielectric barrier discharge in the discharge vessel; and

a case containing the excimer lamp therein and having a light emission window for emitting light having a center wavelength at a wavelength of 200nm to 230nm emitted from the excimer lamp, the case being made of an insulating heat-resistant resin material,

the box body forms a closed space for accommodating the excimer lamp.

2. The ultraviolet irradiation apparatus as set forth in claim 1,

further provided with:

a first conductor electrically connected to the first electrode and provided to penetrate the case; and

a second conductor electrically connected to the second electrode and provided to penetrate the case;

the first conductor and the second conductor are electrically connected to a power supply unit for supplying power to the excimer lamp outside the case.

3. The ultraviolet irradiation apparatus as set forth in claim 2,

the first electrode and the second electrode are fixed in contact with the case;

the connection between the first electrode and the first conductor is provided on a surface of the case, which the first electrode abuts;

the connection between the second electrode and the second conductor is provided on a surface of the case where the second electrode abuts.

4. The ultraviolet irradiation apparatus according to claim 2 or 3,

the first conductor includes: a first connection terminal electrically connected to the first electrode and provided to penetrate the case; and a first conductive member connected to the first connection terminal;

the second conductor includes: a second connection terminal electrically connected to the second electrode and provided to penetrate the case; and a second conductive member connected to the second connection terminal;

the first connection terminal and the second connection terminal are electrically connected to a power supply unit for supplying power to the excimer lamp, outside the case, via the first conductive member and the second conductive member.

5. The ultraviolet irradiation apparatus as set forth in claim 4,

the first connection terminal is provided on a surface of the case against which the first electrode abuts;

the second connection terminal is provided on a surface of the case, the surface being in contact with the second electrode.

6. The ultraviolet irradiation apparatus as set forth in claim 4,

the first connection terminal and the second connection terminal are screw members for fixing the first electrode and the second electrode to the case, respectively.

7. The ultraviolet irradiation apparatus according to claim 2 or 3,

the box body is provided with an upper frame part and a lower frame part, and the upper frame part and the lower frame part form the closed space for accommodating the excimer lamp;

the light emitting window is formed in the upper frame portion;

the first electrode and the second electrode are fixed to the lower frame portion, respectively.

8. The ultraviolet irradiation apparatus according to claim 2 or 3,

the power supply unit is disposed on the opposite side of the case from the surface on which the light emission window is formed.

9. The ultraviolet irradiation apparatus according to claim 2 or 3,

the power supply unit includes an inverter and a cooling mechanism for cooling the inverter.

10. The ultraviolet irradiation apparatus according to any one of claims 1 to 3,

the light emission window is provided with an optical filter that blocks transmission of UVC waves on a longer wavelength side than 230 nm.

11. The ultraviolet irradiation apparatus according to any one of claims 1 to 3,

the heat-resistant resin material is any of PTFE (polytetrafluoroethylene), ETFE (ethylene-tetrafluoroethylene copolymer), PFA (perfluoroalkoxyalkane), PEI (polyetherimide), PPS-GF (polyphenylene sulfide) containing glass fibers, LCP (liquid crystal polymer) and PBT-GF (polybutylene terephthalate) containing glass fibers.

12. The ultraviolet irradiation apparatus according to any one of claims 1 to 3,

the heat-resistant resin material is Polyetherimide (PEI).